JP2019056101A - Double faced adhesive tape, and stacking body of thin film component and supporting component - Google Patents

Abstract

To provide a double faced adhesive tape that has appropriate bonding force to prevent a thin film component from shifting from or coming off a supporting component between the thin film component and the supporting component when it is processed into the thin film component, which cannot be deformed substantially, and allows the thin film component to be easily separated from the supporting component after it is processed into the thin film component without damage or adhesive residues.SOLUTION: The double faced adhesive tape is provided with a base material having a first surface and a second surface on a supporting component, an adhesive layer which is disposed above the first surface and the second surface and at the uppermost part, and a release layer which is disposed from at least one surface of the base material to the adhesive layer disposed above the surface.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a double-sided pressure-sensitive adhesive tape used for temporarily fixing a thin film member that cannot be substantially deformed to a support member, and the thin film member that cannot be substantially deformed by the double-sided pressure-sensitive adhesive tape. It is related with the separable laminated body temporarily fixed to. Typically, the thin film member is formed of a material that cannot be substantially deformed (for example, thin film glass), or a member that cannot be substantially deformed on the surface (for example, a thin film electrode). Formed from a processed material that can be substantially deformed (eg, plastic film, etc.). Here, “cannot be substantially deformed” means that the material is damaged when deformed.

  A thin glass substrate may be used as a component such as a liquid crystal display or a smartphone. In order to prevent the thin film substrate from being damaged when performing some processing on the thin film substrate having brittleness and low strength, such as the formation of an element for an electronic device or a part of the element, such as a glass substrate, A substrate for reinforcement is bonded to the surface opposite to the processed surface of the substrate, and in this state, an element for electronic device or a part of the element is formed on the thin film substrate through various processing and conveying repeated steps. Then, after the processing is completed, the thin film substrate is separated from the reinforcing base.

  Patent Document 1 discloses a jig for supporting a substrate of a liquid crystal display element on a surface and transporting the process, the jig having a glass support and a butyl rubber adhesive layer bonded to the surface. Have been described. The pressure-sensitive adhesive layer made of butyl rubber is such that the adhesive force for holding the substrate attached to the surface is maintained substantially constant even after repeated use.

  However, since the substrate and the glass support are damaged when they are deformed, once they are attached, they cannot be lifted from the attachment surface, and the substrate is made of glass by applying a desorption force to the substrate. It is difficult to peel from the body.

  Therefore, when the substrate is directly attached to the pressure-sensitive adhesive layer as in the jig of Patent Document 1, the pressure-sensitive adhesive layer is still used for a thinner glass substrate for the purpose of reducing the thickness and weight. It is difficult to peel off from the substrate, and the substrate may be damaged when peeling off. In addition, the adhesive may remain on the separated substrate.

  Patent Document 2 discloses a glass substrate with protective glass formed by laminating a glass substrate and a back surface protective glass substrate, and the glass substrate and the back surface protective glass substrate have a removability. There is described a glass substrate with protective glass laminated via a silicone resin layer for addition reaction type release paper.

  The glass substrate with protective glass of Patent Document 2 uses an easily peelable and non-adhesive silicone resin layer or the like as a resin layer for bonding the glass substrate and the protective glass substrate. Therefore, it is easy to peel a glass substrate and a protective glass substrate, and when peeling a glass substrate and a protective glass substrate, possibility that a glass substrate will be damaged is low.

  However, since the resin layer having removability is non-adhesive, it is difficult to stick, and there is a possibility that the adhesion to the glass substrate is poor. In addition, as described in the examples, a step of screen-printing a resin layer having removability on a protective glass and heat-curing, a glass substrate and a protective glass substrate through a resin having removability In addition, it is necessary to go through complicated steps such as a step of bonding with a vacuum press at room temperature, and there is room for improvement in productivity.

Japanese Patent Laid-Open No. 8-86993 International Publication WO2008 / 007622

  The present invention solves the above-mentioned conventional problems, and the object of the present invention is to support the thin film member between the thin film member and the support member during the processing of the thin film member that cannot be substantially deformed. Double-sided pressure-sensitive adhesive tape that has an appropriate adhesive force that does not deviate from or peel off from the member, and can easily separate the thin film member from the support member without breakage or adhesive residue after processing to the thin film member Another object of the present invention is to provide a laminate of a thin film member and a support member, and a method for manufacturing the laminate.

  As a result of intensive studies to solve the above-mentioned problems, the present inventors have determined that the structure of the double-sided pressure-sensitive adhesive tape includes a base material having a first surface and a second surface, and a first surface and a second surface. This double-sided pressure-sensitive adhesive tape has an adhesive layer located above and on the top, and a release layer provided between at least one surface of the base material and the adhesive layer located above the surface. By applying a laminated body in which the thin film member that cannot be substantially deformed and the support member are applied, the thin film member is finally damaged and remains without adhesive residue after processing. The inventors have found that they can be easily separated, and have achieved the present invention.

  In the present specification, “above the surface” means a direction from the inside to the surface of the material having the surface.

  More specifically, (1) a laminate having a structure in which the thin film member is bonded to the support member with the double-sided adhesive tape is prepared, and after the processing to the thin film member is completed, first, the thin film member And applying a desorption force in the vertical direction to the support member and separating the thin film member side and the support member side between the release layer of the double-sided adhesive tape and the adhesive layer in contact with the release layer, Next, (2) If the single-sided adhesive tape remaining in the form of a flexible single-sided adhesive tape having a release layer on the side opposite to the processing surface side of the thin-film member is slowly peeled off from the thin-film substrate Finally, it was found that a processed thin film member having no breakage and no adhesive residue can be obtained. Furthermore, if an adhesive layer having the property of being cured by subsequent application of external energy such as radiation or heat is applied as the adhesive layer, separation of the thin film member side from the support member, and the thin film member of the single-sided adhesive tape It has been found that it is possible to obtain a processed thin film member that is more easily peeled off from the substrate and that has a better yield, and has led to the present invention.

  That is, the present invention relates to a base material having a first surface and a second surface, an adhesive layer located above and on top of the first surface and the second surface, and at least one surface of the base material A double-sided pressure-sensitive adhesive tape having a release layer provided between the surface and the pressure-sensitive adhesive layer located above the surface.

  In one certain form, the said mold release layer is provided between the any one surface of the said base material and the adhesion layer located above this surface.

  In one certain form, the said release layer comprises the release agent selected from the group which consists of a silicone type release agent and a fluorine-type release agent.

  In one certain form, the said adhesion layer is the acrylic adhesive polymer which has an active functional group, the acrylic adhesive polymer which has an active functional group, the thermosetting adhesive which has a thermal crosslinking agent and a thermal polymerization initiator as a main component, and an active functional group. It comprises an adhesive selected from the group consisting of an adhesive polymer, a thermal crosslinking agent, and a photosensitive adhesive mainly composed of a photopolymerization initiator.

  In one certain form, one of the said double-sided adhesive tapes is used in order to temporarily fix the 1st member to the 2nd member, and these 2 members are formed from the material which cannot be changed substantially. It is a thing.

  In one certain form, at least one of the said materials is glass.

  Moreover, this invention provides the double-sided adhesive tape product which has one of the said double-sided adhesive tapes, and the peeling liner provided in the surface of the adhesive layer of this double-sided adhesive tape.

The present invention also includes a support member,
A base material having a first surface and a second surface laminated on the support member; an adhesive layer located above and on top of the first surface and the second surface; and at least one of the base materials A double-sided pressure-sensitive adhesive tape having a release layer provided between the surface and the pressure-sensitive adhesive layer located above the surface;
A thin film member that is substantially undeformable laminated on the double-sided adhesive tape,
A laminate having the same is provided.

  In one certain form, the said double-sided adhesive tape is one of the said double-sided adhesive tapes.

  Moreover, this invention is a manufacturing method of the laminated body of a thin film member and a supporting member including the process of bonding together the thin film member and supporting member which cannot be substantially deformed with either of the above double-sided adhesive tapes. provide.

  According to the present invention, an appropriate adhesion force between the thin film member and the support member so that the thin film member is not displaced from the support member or peeled off during the processing to the thin film member that cannot be substantially deformed. A double-sided pressure-sensitive adhesive tape capable of easily separating the thin-film member from the support member without being damaged or having adhesive residue after the processing to the thin-film member, a laminate of the thin-film member and the support member, and a laminate thereof A method of manufacturing a body is provided.

It is sectional drawing which shows the layer structure of the double-sided adhesive tape which is one Embodiment of the laminated body of this invention. In one Embodiment of the laminated body of this invention, it is sectional drawing which showed the process in which the thin film member once temporarily fixed to the support member using the double-sided adhesive tape is isolate | separated from a support member. (A) is sectional drawing which shows the laminated constitution of the adhesive tape intermediate body used for the laminated body of an Example, (b) is sectional drawing which shows the laminated constitution of the double-sided adhesive tape used for the laminated body of an Example. It is. (A) is sectional drawing which shows the laminated constitution of the adhesive tape intermediate body used for the laminated body of a comparative example, (b) is sectional drawing which shows the laminated constitution of the double-sided adhesive tape used for the laminated body of a comparative example It is. In one embodiment of the laminate of the example, a double-sided adhesive tape is used to attach a thin film substrate glass (thin film member) and a reinforcing base glass (support member), and to perform a vertical peel test, a reinforcing base It is sectional drawing which shows the state which attached the glass on the stainless steel plate using the adhesive agent.

  FIG. 1 is a cross-sectional view showing a layer structure of a double-sided pressure-sensitive adhesive tape which is an embodiment of the laminate of the present invention. The double-sided pressure-sensitive adhesive tape of FIG. 1 includes a base material 3 having a first surface a and a second surface b, and adhesive layers 2 and 5 that are laminated above the two surfaces of the base material and located at the top. And a release layer 4 provided between the second surface b of the substrate 3 and the adhesive layer 5.

  The constituent members and the layer structure of the double-sided pressure-sensitive adhesive tape of the present invention are not limited to the embodiment shown in FIG. The double-sided pressure-sensitive adhesive tape of the present invention may have layers other than the substrate 3, the pressure-sensitive adhesive layers 2, 5 and the release layer 4 as long as the flexibility sufficient to curve the double-sided pressure-sensitive adhesive tape is not impaired.

  As the layer structure of the double-sided pressure-sensitive adhesive tape of the present invention, for example, the release layer 4 is replaced between the second surface b of the base material 3 and the pressure-sensitive adhesive layer 5, and the first surface a of the base material 3 and the pressure-sensitive adhesive layer. 2 may be provided. Further, for example, in addition to the second surface b of the substrate 3 and the adhesive layer 5, an additional release layer may be provided between the first surface a of the substrate 3 and the adhesive layer 2. . However, when an additional release layer is provided, it is necessary that the release layer on the side close to the thin film member that is finally processed and used is more heavily peeled than the other release layer.

  As the layer structure of the double-sided pressure-sensitive adhesive tape of the present invention, the release layer 4 is typically provided between the second surface b of the substrate 3 and the pressure-sensitive adhesive layer 5 that adheres to the support member.

  A laminate structure may be employed in which a base material is newly attached to the pressure-sensitive adhesive layer 5 of the double-sided pressure-sensitive adhesive tape, and a new pressure-sensitive adhesive layer that adheres to the support member 8 on the opposite side of the new base material. Moreover, the double-sided pressure-sensitive adhesive tape may include a release liner for protecting the pressure-sensitive adhesive surface of each pressure-sensitive adhesive layer until use. Such a release liner is not particularly limited, and can be appropriately selected from known release liners.

  The base material 3 may be a material having a strength that can withstand the use environment, and includes paper, polymer material, cloth, metal foil, and the like. Preferably, it is made of a polymer material such as vinyl chloride, polyimide, polyamide, poly (tetrafluoroethylene), and polyester (such as polyethylene terephthalate and polyethylene naphthalate). The form of these base materials is a film form, and thickness is generally 5-200 micrometers, Preferably it is 10-100 micrometers.

  If desired, before applying the resin composition by applying the primer composition to the support or subjecting the support to corona treatment or flame treatment, as is known in the art, The surface can be modified to enhance the adhesion between the resin composition and the substrate. The use of a primer is particularly suitable when a polyethylene terephthalate or polyethylene naphthalate substrate is used.

  The release layer 4 is a layer that weakens the adhesive force of the pressure-sensitive adhesive layer 5 that adheres to the surface thereof. The release layer 4 may be formed from a release agent commonly used for release liners. Examples of the release agent include silicone release agents, fluorine release agents, long-chain alkyl release agents, alkyd release agents, melamine release agents, acrylic release agents, and the like. Among these, from the viewpoint of releasability with the pressure-sensitive adhesive used, it is preferable to include a release agent selected from the group consisting of silicone release agents and fluorine release agents.

  The release layer 4 is formed so as not to peel from the surface of the substrate 3. That is, if necessary, the release agent is diluted with a hydrocarbon solvent such as cyclohexane, hexane, heptane, or isooctane, or an organic solvent such as an aromatic solvent such as toluene or xylene, or water, and then cured as necessary. A release layer coating solution is obtained by adding and mixing the catalyst. Next, the release layer coating liquid obtained is applied to the surface of the substrate 3, dried and cured to form a release layer. As the drying / curing method of the release layer coating layer, heat, ultraviolet irradiation, electron beam irradiation and the like can be used. The thickness of the release layer is about 0.1 to 0.6 μm, preferably about 0.2 to 0.4 μm.

  In general, the adhesive used to temporarily fix the thin film member to the support member is bonded to the adhesive during desorption (separation between the thin film member side and the support member side, and separation of the single-sided adhesive tape from the thin film member). For the purpose of reducing the force, there is a type having the property of being cured when external energy is applied. Such an adhesive for temporary fixing is in an uncured state at the time of application and has flexibility and appropriate adhesive force, but is cured at the time of desorption and is cured and contracted to increase the elastic modulus. The power is greatly reduced.

  The adhesive layer in a state in which the thin film member is fixed to the support member means an adhesive layer that has not yet been cured for the purpose of easily separating the thin film member side from the support member side because the thin film member is processed. . The adhesive layer in a state in which the thin film member is separated from the support member or the adhesive layer in a state in which the single-sided adhesive tape is peeled from the thin film member is easily separated from the support member side after the processing to the thin film member, Or the adhesive layer of the state hardened in order to peel a single-sided adhesive tape from a thin film member is meant.

  The adhesive layer 2 is formed from an adhesive that does not remain on the adherend surface of the thin film member or the like after peeling from the thin film member. The pressure-sensitive adhesive forming the pressure-sensitive adhesive layer 2 is preferably of a type having performance equivalent to that of the pressure-sensitive adhesive layer 5. The pressure-sensitive adhesive forming the pressure-sensitive adhesive layer 2 and the pressure-sensitive adhesive layer 5 may be the same type or different types.

  Examples of the temporarily fixing pressure-sensitive adhesive include re-peelable fine-adhesive silicone pressure-sensitive adhesives and acrylic pressure-sensitive adhesives. Among these, in particular, a curable pressure-sensitive adhesive is preferred in which the adhesive strength is greatly reduced by applying external energy at the time of desorption.

  Among the curable adhesives, as the radiation curable adhesive, for example, an acrylic adhesive polymer having an active functional group (carbon-carbon double bond group), a thermal crosslinking agent, and a photopolymerization initiator are the main components. A photosensitive adhesive is preferred. The configuration of such an adhesive is described in JP-A No. 2002-212521, the disclosure of which is incorporated herein by reference.

  The method for introducing the active functional group into the acrylic adhesive polymer is not particularly limited, but usually (meth) acrylic acid ester, hydroxyl group-containing unsaturated compound, carboxyl group-containing unsaturated compound, etc. Examples thereof include a method of polymerizing a copolymer comprising, and then subjecting the functional group of the copolymer to an addition reaction with a compound having a functional group capable of undergoing an addition reaction and a carbon-carbon double bond. For example, there is a method in which a hydroxyl group in the side chain of an acrylic adhesive polymer is reacted with an isocyanate compound having a (meth) acryloyloxy group (for example, 2-methacryloyloxyethyl isocyanate). In this manner, an acrylic adhesive polymer having an active functional group such as a (meth) acryloyloxy group can be obtained.

  When the acrylic adhesive polymer having an active functional group has a weight average molecular weight smaller than 100,000, a high viscosity adhesive composition of several thousand to several tens of thousands cP is obtained in consideration of coating properties and the like. Is difficult and undesirable. On the other hand, when the weight average molecular weight is larger than 2 million, there is no particular problem in terms of the characteristics of the adhesive tape, but it is difficult to mass-produce the acrylic adhesive polymer, which is not preferable.

  In addition, when the active functional group content of the acrylic polymer having the active functional group is smaller than 0.01 meq / g, the photoradical crosslinking reaction does not occur sufficiently, and as a result, easy peelability is imparted. When the active functional group content is larger than 2.0 meq / g, there is no particular problem in terms of the characteristics of the adhesive tape, but an acrylic adhesive polymer is mass-produced. Difficult to do and not preferred.

  Further, when the hydroxyl value of the acrylic adhesive polymer having an active functional group is smaller than 10 mgKOH / g, the initial adhesiveness is not sufficient because the reaction with the thermal crosslinking agent is not sufficient, and the adherend There is a risk that adhesive residue will be generated. In addition, when the hydroxyl value is greater than 100 mgKOH / g, excess hydroxyl group that does not participate in the reaction with the thermal crosslinking agent interacts with the adherend surface, so that the adhesive force is sufficiently reduced even when external energy is applied. There is a risk of not.

  The main component of the acrylic adhesive polymer having an active functional group is usually composed of a copolymer of a (meth) acrylic acid alkyl ester monomer and a polar group-containing monomer. Examples of the (meth) acrylic acid alkyl ester monomer include hexyl acrylate, n-octyl acrylate, isooctyl acrylate, 2-ethylhexyl acrylate, dodecyl acrylate, decyl acrylate, or a single carbon atom having 5 or less carbon atoms. Examples thereof include pentyl acrylate, n-butyl acrylate, isobutyl acrylate, ethyl acrylate, methyl acrylate, and methacrylates similar to these. Examples of polar group-containing monomers include 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate, acrylic acid, and methacrylic acid. Specific examples of the copolymer obtained by copolymerizing these include a copolymer of 2-ethylhexyl acrylate and acrylic acid, a copolymer of 2-ethylhexyl acrylate and 2-hydroxyethyl acrylate, and acrylic acid. Examples include terpolymers of 2-ethylhexyl, acrylic acid, and 2-hydroxyethyl acrylate, but are not particularly limited thereto.

  The acrylic pressure-sensitive adhesive polymer having an active functional group used for the radiation-curable pressure-sensitive adhesive has a functional group that crosslinks by a radical reaction in a polymer side chain or the like. When the radiation curable pressure-sensitive adhesive is peeled off from the adherend, it is exposed to ultraviolet rays or the like to cause a crosslinking reaction, thereby increasing the cohesive force of the pressure-sensitive adhesive. It is difficult to produce adhesive residue.

  Further, instead of the acrylic adhesive polymer having the active functional group, a composition in which an oligomer having the active functional group is added to the usual acrylic adhesive polymer having no active functional group. You can use it. Moreover, you may use the composition which added the oligomer etc. which have the said active functional group further to the acrylic adhesive polymer which has the said active functional group.

  As the photopolymerization initiator used in the radiation curable pressure-sensitive adhesive, a compound that generates radical active species by ultraviolet rays or the like is preferable. Specifically, benzoin alkyl ether initiators such as benzoin methyl ether, benzoin ethyl ether, benzoin propyl ether, benzoin isopropyl ether, benzoin isobutyl ether; benzophenone, benzoylbenzoic acid, 3,3′-dimethyl-4-methoxybenzophenone Benzophenone initiators such as polyvinyl benzophenone; α-hydroxycyclohexyl phenyl ketone, 4- (2-hydroxyethoxy) phenyl (2-hydroxy-2-propyl) ketone, α-hydroxy-α, α'-dimethylacetophenone, methoxy Acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 2-methyl-1- [4- (methylthio) -phenyl] -2-morpholine Aromatic ketone initiators such as propane-1; aromatic ketal initiators such as benzyldimethyl ketal; thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2-dodecylthioxanthone Thioxanthone initiators such as 2,4-dichlorothioxanthone, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2,4-diisopropylthioxanthone; benzyl initiators such as benzyl; benzoin initiators such as benzoin Α-ketol compounds such as 2-methyl-2-hydroxypropiophenone; aromatic sulfonyl chloride compounds such as 2-naphthalenesulfonyl chloride; 1-phenone-1,1-propanedione-2- (o-ethoxyca) Boniru) photoactive oxime-based compounds such as oxime; camphor quinone compounds; halogenated ketone compound: acyl phosphino sulfoxide compounds; acyl phosphonium isocyanate-based compounds. These may be used alone or in combination of two or more.

  It is preferable that the addition amount of these photoinitiators is 0.1-10 mass parts with respect to 100 mass parts of acrylic adhesive polymers which have an active functional group.

  When the addition amount of the photopolymerization initiator is less than 0.1 parts by mass, the photoreactivity with respect to ultraviolet rays or the like is not sufficient, so the curing of the pressure-sensitive adhesive is insufficient, and the releasability is not sufficient. When the amount is more than 10 parts by mass, the effect is saturated, which is not preferable from the viewpoint of economy.

  Further, as a sensitizer for such a photopolymerization initiator, a compound such as dimethylaminoethyl methacrylate, 4-dimethylaminobenzoic acid isoamyl may be added to the adhesive.

  As the thermal crosslinking agent used in the radiation curable pressure-sensitive adhesive, an isocyanate compound-based crosslinking agent, an epoxy compound-based crosslinking agent, an aluminum chelate compound-based crosslinking agent or the like generally used as a crosslinking agent for acrylic pressure-sensitive adhesives is used. .

  For example, polyisocyanate crosslinking agents (trade name: L-45, etc.), epoxy compound-based crosslinking agents (trade name: E-AX, etc.) and aluminum chelate compound-based crosslinking agents (trade name: M) sold by Soken Chemical Co., Ltd. -5A etc.) can be used, but is not limited to those listed here.

  These thermal crosslinking agents are preferably added at a ratio of 0.01 to 10 parts by mass with respect to 100 parts by mass of the acrylic adhesive polymer having the active functional group. When the addition amount of the thermal cross-linking agent is less than 0.01 parts by mass, the cohesive force of the pressure-sensitive adhesive is not sufficient, and there is a possibility that the adhesive remains on the adherend, and the addition amount is more than 10 parts by mass. In some cases, excess thermal crosslinking agent not involved in the reaction may bleed out and contaminate the adherend.

  A tackifier such as a rosin resin, a terpene resin, or a petroleum resin usually used for an acrylic resin or the like may be added to the radiation effect adhesive.

  In the component of the radiation effect type pressure-sensitive adhesive, a thermal polymerization initiator may be used instead of the photopolymerization initiator. Thereby, thermosetting property is imparted to the pressure-sensitive adhesive, and a thermosetting pressure-sensitive adhesive is provided. The thermal polymerization initiator used is preferably a compound that generates radical active species by heating. Specifically, dicumyl peroxide, di-t-butyl peroxide, t-butyl peroxybenzoate, t-butyl hydroperoxide, benzoyl peroxide, cumene hydroperoxide, diisopropylbenzene hydroperoxide, paramentane hydro Peroxide, di-t-butyl peroxide, 2,2′-azobis (isobutyronitrile), 1,1-azobis (cyclohexane-1-carbonitrile), azocumene, 2,2′-azobis (2-methyl) Butyronitrile), 2,2′-azobisdimethylvaleronitrile, 4,4′-azobis (4-cyanovaleric acid), 2- (tert-butylazo) -2-cyanopropane, 2,2′-azobis ( 2,4,4-trimethylpentane), 2,2′-azobis ( - methyl propane), compounds such as dimethyl 2,2'-azobis (2-methylpropionate) and the like.

  It is preferable that the addition amount of these thermal polymerization initiators used by this invention is 0.1-10 mass parts with respect to 100 mass parts of acrylic adhesive polymers which have an active functional group.

  When the addition amount of the thermal polymerization initiator is less than 0.1 parts by mass, the adhesiveness is not sufficiently cured because the reactivity to heating is insufficient, and the peelability is not sufficient. When the amount is more than 10 parts by mass, the effect is saturated, which is not preferable from the viewpoint of economy.

  The adhesive layers 2 and 5 are formed by, for example, a coating method. That is, the adhesive is diluted with an organic solvent such as toluene or ethyl acetate to obtain an adhesive layer coating solution. Next, the pressure-sensitive adhesive layer coating liquid is applied to the surface of the substrate, dried and cured to form the pressure-sensitive adhesive layer. The thickness of the adhesive layer is about 5 to 100 μm, preferably about 10 to 30 μm.

  2 (a), 2 (b), and 2 (c) show that the thin film member 7 temporarily fixed to the support member 8 using a double-sided adhesive tape is removed from the support member 8 in one embodiment of the laminate of the present invention. It is sectional drawing which showed the process separated. FIG. 2A shows a state in which the thin film member 7 is fixed and stacked on the support member 8. The adhesive layer 2 of the double-sided adhesive tape is attached to the lower surface of the thin film member 7 in the form of a single-sided adhesive tape having a base material 3 and a release layer 4, and the adhesive layer 5 is attached to the upper surface of the support member 8. ing.

  The thin film member 7 is an object to be processed. Typically, the thin film member 7 is a member made of a material having brittleness and low strength. However, as described above, a material having flexibility and high strength ( For example, a resin such as a plastic film) may be used. During processing, the thin film member 7 is subjected to processing such as etching, sputtering, and patterning, and processing such as conveyance between processing devices.

  Specific examples of the material of the thin film member 7 include glass, metal, resin, and the like, and typically includes glass. The thickness of the thin film member 7 is generally 0.1 mm or more and 2.0 mm or less, preferably 0.2 mm or more and 1.0 mm or less, more preferably 0.2 mm or more and 0.5 mm or less. If the thickness of the thin film member 7 is less than 0.1 mm, the possibility of breakage when separated from the support member 8 increases, and a thin film member having a thickness exceeding 2.0 mm is processed without being damaged alone. be able to.

  The support member 8 is a member that is reinforced to prevent the thin film member 7 from being damaged while a predetermined process necessary for processing the thin film member 7 is performed. The support member 8 is preferably made of a material excellent in rigidity, heat resistance, and chemical resistance so as not to damage the thin film member 7 having brittleness and low strength. Specific examples of the material of the support member 8 include glass and metal. The thickness of the support member 8 is preferably larger than the thickness of the thin film member 7, but is generally 0.1 mm or more and 5.0 mm or less, preferably 0.4 mm or more and 2.0 mm or less.

  FIG. 2B shows a state in which the thin film member 7 has been peeled off from the support member 8. After a predetermined process necessary for processing the thin film member 7 is completed, an easy peeling process is performed on the laminate of the thin film member 7 and the support member 8 if necessary. A specific example of the easy peeling treatment is a treatment for reducing the adhesive force of the pressure-sensitive adhesive layer by performing heating or radiation irradiation. Thereafter, a peeling force, for example, a desorption force in a direction perpendicular to the surface of the thin film member 7 is applied to the thin film member 7. Then, the double-sided pressure-sensitive adhesive tape is easily peeled between the release layer 4 and the pressure-sensitive adhesive layer 5. Thereby, the thin film member 7 is separated from the support member 8.

  FIG. 2C shows a state where the double-sided adhesive tape is separated from the thin film member 7 and the support member 8. On the lower surface of the thin film member 7, the single-sided adhesive tape having the structure of the adhesive layer 2, the base material 3, and the release layer 4 remains, but the single-sided adhesive tape is flexible and curved from the adherend surface. Can be turned up. Therefore, the adhesive layer 2 is easily peeled off from the lower surface of the thin film member 7 together with the base material 3 and the release layer 4, and the adhesive 2 does not remain on the thin film member 7. In addition, the adhesive layer 5 remains on the upper surface of the support member 8, but when the support member 8 is reused without being discarded, it can be removed from the support member 8 by peeling off with a finger or wiping with a solvent. .

  The adhesive layers 2 and 5 fix the thin film member 7 to the support member 8 so that the thin film member 7 is not displaced or peeled off from the support member 8 while the thin film member 7 is processed. It is formed from a pressure-sensitive adhesive having an appropriate adhesive strength. As the pressure-sensitive adhesive, a type that has been conventionally used for temporarily fixing a processed part is preferable, a type having removability is more preferable, and a type having a property of being cured by external application after external energy. More preferred. The thin film member 7 needs to be separated from the support member 8 after the processing is completed. In this state, the adhesive force of the pressure-sensitive adhesive may be as weak as possible, or may be significantly weakened by the subsequent application of external energy. preferable.

  For example, as shown in FIG. 2 (a), in the laminate having the configuration of the present invention, immediately after the thin film member 7 and the support member 8 are fixed, the adhesive layer 5 of the double-sided adhesive tape is released from the support member 8. The pressure-sensitive adhesive layer 2 is in contact with the thin film member 7 and the base material 3. In this state, the adhesive force at the interface between the pressure-sensitive adhesive layer 5 and the support member 8 and the adhesive force at the interface between the pressure-sensitive adhesive layer 2 and the thin film member 7 are adequately secured. 5 and the release layer 4 interface. This is because the surface energy of the thin film member 7 and the support member 8 is typically larger than the surface energy of the adhesives 2 and 5, and the surface energy of the release layer 4 is smaller than the surface energy of the adhesives 2 and 5. caused by. In this case, if the adhesive force at the interface between the pressure-sensitive adhesive layer 5 and the release layer 4 is extremely small, the thin film member 7 is separated from the support member 8 at this interface during the processing, and the processing to the thin film member 7 is performed. Can not be.

Therefore, immediately after fixing the thin film member 7 to the supporting member 8, the adhesive force (X) of the adhesive layer 5 to the release layer 4 is in the range of 0.02 N / 25 mm or more and 0.50 N / 25 mm or less. Is preferred. Although the absolute value itself is small, if the adhesive force (X) of the pressure-sensitive adhesive layer 5 to the release layer 4 is at least 0.02 N / 25 mm or more, the thin film member 7 can be removed during processing and transporting processes. The state of being fixed to the support member 8 can be maintained without being displaced from the support member 8 or being peeled off. Further, after the processing of the thin film member 7 is completed, a desorption force is applied to the thin film member 7 in the vertical direction to separate the thin film member 7 side from the support member 8 side at the interface between the adhesive layer 5 and the release layer 4. Since it is necessary to apply the adhesive layer having the property of being cured by the subsequent application of external energy to the adhesive layer 5, and including the case of adopting the method of separating after greatly weakening the adhesive force, this stage, It is preferable to keep the upper limit of the so-called initial adhesive strength at 0.50 N / 25 mm or less. Thus, by not setting the upper limit of the adhesive force higher than necessary, the thin film member 7 side is more easily separated from the support member 8 side at the interface between the adhesive layer 5 and the release layer 4 after the processing is completed. It becomes easy to do.

In addition, after the processing to the thin film member 7 is completed, a desorption force is applied to the thin film member 7 in the vertical direction, and the thin film member 7 side is separated from the support member 8 side at the interface between the adhesive layer 5 and the release layer 4. In this case, the interface having the smallest adhesive force is again the interface between the pressure-sensitive adhesive layer 5 and the release layer 4. The adhesive force (Y) of the adhesive layer 5 to the release layer 4 is preferably in the range of 0.01 N / 25 mm or more and 0.10 N / 25 mm or less, 0.01 N / 25 mm or more and 0.05 N / 25 mm or less. More preferably, it is the range. In order to make the adhesive force (Y) of the pressure-sensitive adhesive layer 5 to the release layer 4 fall within the above range, it is preferable to apply a pressure-sensitive adhesive layer having a property of being cured by post-application of external energy to the pressure-sensitive adhesive layer 5. That is, even if the above-mentioned adhesive force (X) to the release layer 4 of the adhesive layer 5 immediately after fixing the thin film member 7 to the support member 8 described above exceeds 0.10 N / 25 mm, Since the adhesive layer 5 can be cured by post-applying external energy to the adhesive layer 5 after the processing is completed, the adhesive force (Y) of the adhesive layer 5 to the release layer 4 is 0.10 N / 25 mm or less. Can be reduced. By setting the adhesive force (Y) within the above range, the thin film member 7 side is separated from the support member 8 side in the vertical direction at the interface between the adhesive layer 5 and the release layer 4 without damaging the thin film member 7. can do. When the adhesive force (Y) exceeds 0.10 N / 25 mm, damage to the thin film member 7 such as breakage, chipping or cracking occurs when the thin film member 7 side is separated from the support member 8 side in the vertical direction after the processing is completed. There is a risk of giving.

After the processing to the thin film member 7 is finished and first separated between the release layer 4 and the adhesive layer 5 into the thin film member 7 side and the support member 8 side, for example, FIG. As shown, on the side opposite to the processing surface side of the thin film member 7, there is a flexible single-sided adhesive tape composed of an adhesive layer 2, a base material 3, and a release layer 4 (FIG. 2B Equivalent to the adhesive tape intermediate 10)). That is, in order to obtain the finally processed thin film member 7, it is necessary to slowly peel the flexible single-sided adhesive tape from the thin film member 7 in a 90 ° peel direction, for example. In order to easily peel the single-sided adhesive tape without damaging the thin film member 7 and without leaving adhesive (residue residue), the adhesive force of the adhesive layer 2 to the thin film member 7 in the peeled state (Z) is preferably in the range of 0.03 N / 25 mm or more and less than 1.00 N / 25 mm, and more preferably in the range of 0.03 N / 25 mm or more and less than 0.50 N / 25 mm. In order to make the adhesive force (Z) of the pressure-sensitive adhesive layer 2 to the thin film member 7 fall within the above range, it is preferable to apply a pressure-sensitive adhesive layer having a property of being cured by post-application of external energy to the pressure-sensitive adhesive layer 2. By setting the adhesive force (Z) within the above range, the single-sided adhesive tape can be peeled from the thin film member 7 in the 90 ° peel direction without damaging the thin film member 7 and without leaving adhesive. If the adhesive force (Z) exceeds 1.00 N / 25 mm, the thin film member 7 may be damaged when the single-sided adhesive tape is peeled from the thin film member 7.

Immediately after fixing the thin film member 7 to the support member 8, the “adhesive force (X)” of the adhesive layer 5 to the release layer 4 is that the adhesive layer 2 of the double-sided adhesive tape is lined with a PET film at 23 ° C. In Example 1, the adhesive layer 5 on the opposite surface was attached to the support member 8 and the test piece prepared by reciprocating pressure with a 2 kg roller was used, and the peeling speed was 300 mm / min with the support member 8 fixed at 23 ° C. It means 90 degree peel adhesive force when the release layer 4 side is peeled from the pressure-sensitive adhesive layer 5 at an angle of 90 degrees at a peeling speed of.

Further, the “adhesive force (Y)” of the adhesive layer 5 to the release layer 4 in a state where the thin film member 7 side is separated from the support member 8 side is basically the same as “adhesive force (X)”. Of 90 degree peel adhesion. However, when the external energy is applied to the adhesive layer as necessary when separating the thin film member 7 side from the support member 8 side, 90 ° peel adhesion when peeling after applying external energy to the test piece Means power.

Furthermore, the “adhesive strength (Z)” of the adhesive layer 2 to the thin film member 7 in the state where the single-sided adhesive tape is peeled off from the thin film member 7 is the single-sided state in which the adhesive layer 5 of the double-sided adhesive tape is peeled off. A tape test piece prepared by attaching the adhesive layer 2 of the adhesive tape to the thin film member 7 and press-fitting one reciprocating with a 2 kg roller at 23 ° C. at a peeling speed of 300 mm / min with the thin film member 7 fixed at 23 ° C. It means 90 degree peel adhesive force when the pressure-sensitive adhesive layer 2 side is peeled from the thin film member 7 at an angle of 90 degrees at a peeling speed of. However, when peeling the single-sided pressure-sensitive adhesive tape from the thin film member 7 and applying external energy to the pressure-sensitive adhesive layer as necessary, 90 degree peel adhesive strength when peeling after applying external energy to the test piece Means.

  The following examples further illustrate the present invention, but the present invention is not limited thereto.

<Preparation of resin composition>
1. Adhesive (1) Adhesive composition A
After mixing 100 parts by mass of silicone-based adhesive (“KR-3704” (trade name) manufactured by Shin-Etsu Chemical) and 0.5 part by mass of platinum catalyst (“CAT-PL-50T” (trade name) manufactured by Shin-Etsu Chemical), It diluted with toluene so that it might become solid content concentration of 40 mass%, and the silicone adhesive composition A was obtained.

(2) Adhesive composition B
100 parts by mass of a radical polymerizable acrylic pressure-sensitive adhesive (“N-4498” (trade name) manufactured by Nippon Synthetic Chemical), 1.0 part by mass of an isocyanate crosslinking agent (“L-55E” (trade name) manufactured by Tosoh Corporation), After mixing 0.5 parts by mass of a thermal polymerization initiator (MAIB manufactured by Otsuka Chemical Co., Ltd.), the mixture was diluted with ethyl acetate so that the solid content concentration was 35% by mass to obtain a thermosetting acrylic pressure-sensitive adhesive composition B.

(3) Adhesive composition C
100 parts by mass of a radical polymerizable acrylic pressure-sensitive adhesive (“N-4498” (trade name) manufactured by Nippon Synthetic Chemical), 1.0 part by mass of an isocyanate crosslinking agent (“L-55E” (trade name) manufactured by Tosoh Corporation), After mixing 0.5 parts by mass of a photopolymerization initiator (“Irg819” (trade name) manufactured by BASF), the radiation-curing acrylic pressure-sensitive adhesive composition is diluted with ethyl acetate so that the solid content concentration becomes 35% by mass. C was obtained.

(4) Adhesive composition D
After mixing 100 parts by mass of an acrylic adhesive (“SK Dyne 1495” (trade name) manufactured by Soken Chemical Co., Ltd.) and 1.0 part by mass of an isocyanate-based crosslinking agent (“L-45” (trade name) manufactured by Soken Chemical Co., Ltd.), solid The mixture was diluted with ethyl acetate so as to be 30% by mass, and an acrylic pressure-sensitive adhesive composition D was obtained.

2. Release agent (1) Release agent composition a
After mixing 100 parts by mass of a silicone release agent (“LTC-752” (trade name) manufactured by Toray Dow Corning) and 0.5 part by mass of a platinum catalyst (NC-25 manufactured by Toray Dow Corning (trade name)), It diluted with toluene so that it might become 1 mass% of solid content, and the silicone type release agent composition a was obtained.

(2) Release agent composition b
After mixing 100 parts by mass of a fluorine-based release agent (Toray Dow Corning “BY24-900” (trade name)) and 0.6 parts by mass of a platinum catalyst (Toray Dow Corning NC-25 (trade name)) Then, it was diluted with isooctane so as to have a solid content of 1% by mass to obtain a fluorine-based release agent composition b.

(3) Release agent composition c
A non-silicone release agent (“Pyroyl 1070” (trade name) manufactured by Lion Specialty Chemical) was diluted with toluene to a solid content of 1% by mass to obtain a non-silicone release agent composition c.

[Example 1]
<Production of double-sided adhesive tape>
Fig.3 (a) is sectional drawing which shows the layer structure of the adhesive tape intermediate body of an Example. The silicone release agent composition a (dry thickness: 0.2 μm) is applied to one surface of the base material layer 3 made of a PET film (thickness: 38 μm), the solvent is dried, and the release layer 4 Formed. A silicone pressure-sensitive adhesive composition A (dry thickness: 10 μm) was applied to the other surface of the base material layer 3, and the solvent was dried to form a pressure-sensitive adhesive layer A2. The release liner 1 was bonded to the surface of the adhesive layer A2 to produce an adhesive tape intermediate 10.

  FIG.3 (b) is sectional drawing which shows the layer structure of the double-sided adhesive tape of an Example. A thermosetting acrylic pressure-sensitive adhesive composition B (thickness: dry 20 μm) was applied to the release liner 6 and the solvent was dried to form a pressure-sensitive adhesive layer B5. The surface of this adhesive layer B5 was bonded to the surface of the release layer 4 of the adhesive tape intermediate 10 to obtain a double-sided adhesive tape 20.

<Production and Evaluation of Laminate of Thin Film Member and Support Member>
FIG. 5 shows a reinforcing base for performing a vertical peel test on a laminate in which a double-sided adhesive tape 20 is used to attach a thin film substrate glass 30 as a thin film member and a reinforcing base glass 31 as a support member. It is sectional drawing which shows the state which attached the glass 31 side on the stainless steel plate 50 using the adhesive agent 40 for epoxy 2 liquid glass. The thin film substrate glass 30 was 45 mm long × 45 mm wide, the reinforcing base glass was 50 mm long × 50 mm wide, the double-sided adhesive tape 20 was 40 mm long × 40 mm wide, and the stainless steel plate 50 was 100 mm × 100 mm in size. The thickness of the thin film substrate glass 30 was 0.4 mm assuming a thin film substrate. The thickness of the reinforcing base glass 31 was 2.0 mm assuming the reinforcing base. Using the double-sided adhesive tape 20, the thin film substrate glass 30 and the reinforcing base glass 31 are adhered so that the adhesive layer A 2 is in contact with the thin film substrate glass 30 and the adhesive layer B 5 is in contact with the reinforcing base glass 31. And a reinforcing substrate glass 31 was prepared. Subsequently, the laminated body of the thin film substrate glass 30 and the reinforcing base glass 31 was subjected to a heat treatment at 150 ° C. for 1 hour as an external energy application treatment.

  After the laminated body of the thin film substrate glass 30 and the reinforcing base glass 31 is cooled to room temperature, the reinforcing base glass 31 is bonded and fixed onto the stainless steel plate 50 using the epoxy two-component glass adhesive 40, A test piece for a vertical peel test was prepared.

  The prepared stainless steel plate 50 is fixed, and a suction pad is attached to the center of the upper surface of the thin film substrate glass 30. The suction pad is held by the finger of the hand and slowly attaches and detaches vertically to the thin film substrate glass 30. In addition, the thin film substrate glass 30 was peeled off from the reinforcing base glass 31. The double-sided pressure-sensitive adhesive tape of Example 1 was peeled between the release layer 4 and the pressure-sensitive adhesive layer B5, and the thin film substrate glass 30 was separated from the reinforcing base glass 31 without being damaged.

  An adhesive tape intermediate 10 composed of the adhesive layer A2, the base material 3, and the release layer 4 is adhered to the lower surface of the separated thin film substrate glass 30. Subsequently, this adhesive tape intermediate 10 was pulled away at a speed of 300 mm / min in the 90 ° direction. The adhesive tape intermediate 10 of Example 1 was peeled between the adhesive layer A2 and the thin film substrate glass 30, and no damage to the thin film substrate glass 30 and generation of adhesive residue on the surface were observed.

The peelability between the release layer 4 and the adhesive layer B5 of the double-sided adhesive tape was evaluated based on the following criteria.

<Vertical peelability evaluation criteria>
When the number of glass plate laminate test specimens is N = 10, the thin film substrate glass 30 and the reinforcing base glass 31 are bonded with the double-sided adhesive tape 20, and pulled apart in the vertical direction by the above method, the damaged state of the thin film substrate glass 30 The thin film substrate glass 30 was evaluated as being non-defective and evaluated according to the following criteria.

(◎) Non-defective rate: 100% (N = 10 out of NG number)
(◯) Non-defective rate: 70% to 90% (N = 10, NG number is 1 to 3)
(△) Non-defective rate: 10 to 60% (N = 10, NG number is 4 to 9)
(×) Non-defective rate: 0% (N = 10, NG number is 10)

A thin film substrate glass 30 having a non-defective rate of 70% or more (◎) (○) was evaluated as a laminate capable of vertical peeling.

[Example 2]
A double-sided pressure-sensitive adhesive tape 20 was produced in the same manner as in Example 1 except that the radiation-curable acrylic pressure-sensitive adhesive composition C was used instead of the thermosetting acrylic pressure-sensitive adhesive composition B to form the pressure-sensitive adhesive layer B5. The substrate glass 30 and the reinforcing base glass 31 were attached to produce a laminate of the thin film substrate glass 30 and the reinforcing base glass 31. A vertical peel test of the laminate of the thin film substrate glass 30 and the reinforcing base glass 31 was performed in the same manner as in Example 1 except that ultraviolet irradiation (accumulated light amount 300 mJ / cm ² ) was performed instead of the heat treatment. As a result, the double-sided adhesive tape was peeled between the release layer 4 and the adhesive layer B5, and the thin film substrate glass 30 was separated from the reinforcing base glass 31 without being damaged.

  Moreover, when the adhesive tape intermediate body 10 of Example 2 remaining on the lower surface of the thin film substrate glass 30 was peeled in the same manner as in Example 1, it can be peeled between the pressure sensitive adhesive layer A2 and the thin film substrate glass 30, and the thin film Breakage of the substrate glass 30 and generation of adhesive residue on the surface were not observed.

[Example 3]
A double-sided pressure-sensitive adhesive tape 20 was produced in the same manner as in Example 1 except that the radiation-curable acrylic pressure-sensitive adhesive composition C was used in place of the silicone pressure-sensitive adhesive composition A to form the pressure-sensitive adhesive layer A2, and the thin film substrate glass 30 was prepared. And a reinforcing substrate glass 31 were adhered, and a laminate of the thin film substrate glass 30 and the reinforcing substrate glass 31 was produced. Subsequently, the vertical peeling test of the laminated body of the thin film substrate glass 30 and the reinforcement | strengthening base glass 31 was done. As a result, the double-sided adhesive tape was peeled between the release layer 4 and the adhesive layer B5, and the thin film substrate glass 30 was separated from the reinforcing base glass 31 without being damaged.

Further, the adhesive tape intermediate 10 of Example 3 remaining on the lower surface of the thin film substrate glass 30 was further irradiated with ultraviolet rays (integrated light amount 300 mJ / cm ² ) to cure the adhesive layer A2, and then Example 1 The adhesive tape intermediate 10 of Example 3 was peeled between the adhesive layer A2 and the thin film substrate glass 30, and no damage to the thin film substrate glass 30 and no adhesive residue were observed.

[Example 4]
The adhesive layer A2 is formed using the thermosetting acrylic adhesive composition B instead of the silicone adhesive composition A, and the radiation curable acrylic adhesive composition C is used instead of the thermosetting acrylic adhesive composition B. A double-sided pressure-sensitive adhesive tape 20 is produced in the same manner as in Example 1 except that the adhesive layer B5 is formed using A, and the thin-film substrate glass 30 and the reinforcing base glass 31 are adhered. A laminate with the base glass 31 was produced. A vertical peel test of the laminate of the thin film substrate glass 30 and the reinforcing base glass 31 was performed in the same manner as in Example 1 except that ultraviolet irradiation (accumulated light amount 300 mJ / cm ² ) was performed instead of the heat treatment. As a result, the double-sided adhesive tape was peeled between the release layer 4 and the adhesive layer B5, and the thin film substrate glass 30 was separated from the reinforcing base glass 31 without being damaged.

  Further, the adhesive tape intermediate 10 of Example 4 remaining on the lower surface of the thin film substrate glass 30 was further subjected to heat treatment (150 ° C., 1 hour) to cure the adhesive layer A2, and then Example 1 The adhesive tape intermediate 10 of Example 3 was peeled between the adhesive layer A2 and the thin film substrate glass 30, and no damage to the thin film substrate glass 30 and no adhesive residue were observed.

[Example 5]
The radiation-curable acrylic pressure-sensitive adhesive composition C is used instead of the silicone pressure-sensitive adhesive composition A to form the pressure-sensitive adhesive layer A2, and the thermosetting acrylic pressure-sensitive adhesive composition B is used instead of the acrylic pressure-sensitive adhesive composition D. The double-sided pressure-sensitive adhesive tape 20 is produced in the same manner as in Example 1 except that the adhesive layer B5 is formed, and the thin film substrate glass 30 and the reinforcing base glass 31 are pasted, and the thin film substrate glass 30 and the reinforcing base glass 31 are adhered. A laminate was prepared. A vertical peel test was performed on the laminate of the thin film substrate glass 30 and the reinforcing base glass 31 in the same manner as in Example 1 except that the heat treatment was not performed. As a result, a part of the thin film substrate glass 30 was damaged, but most of the double-sided adhesive tape was peeled off between the release layer 4 and the adhesive layer B5, and the thin film substrate glass 30 was not damaged from the reinforcing base glass 31. Isolated on. The yield rate of the thin film substrate glass 30 was 90%.

Further, the adhesive tape intermediate 10 of Example 5 remaining on the lower surface of the thin film substrate glass 30 was further irradiated with ultraviolet rays (integrated light amount 300 mJ / cm ² ) to cure the adhesive layer A2, and then Example 1 The adhesive tape intermediate 10 of Example 5 was peeled between the adhesive layer A2 and the thin film substrate glass 30, and no damage to the thin film substrate glass 30 and no adhesive residue were observed.

[Example 6]
The release layer 4 is formed using the fluorine release agent composition b instead of the silicone release agent composition a, and the adhesive layer A2 using the acrylic adhesive composition D instead of the silicone adhesive composition A. A double-sided pressure-sensitive adhesive tape 20 is produced in the same manner as in Example 1, except that the silicone pressure-sensitive adhesive composition A is used in place of the thermosetting acrylic pressure-sensitive adhesive composition B to form the pressure-sensitive adhesive layer B5. The thin film substrate glass 30 and the reinforcing base glass 31 were attached to produce a laminate of the thin film substrate glass 30 and the reinforcing base glass 31. A vertical peel test was performed on the laminate of the thin film substrate glass 30 and the reinforcing base glass 31 in the same manner as in Example 1 except that the heat treatment was not performed. As a result, a part of the thin film substrate glass 30 was damaged, but most of the double-sided adhesive tape was peeled off between the release layer 4 and the adhesive layer B5, and the thin film substrate glass 30 was not damaged from the reinforcing base glass 31. Isolated on. The yield rate of the thin film substrate glass 30 was 90% or more.

Moreover, when the adhesive tape intermediate body 10 of Example 6 remaining on the lower surface of the thin film substrate glass 30 was peeled in the same manner as in Example 1, it can be peeled between the pressure sensitive adhesive layer A2 and the thin film substrate glass 30, and the thin film Breakage of the substrate glass 30 and generation of adhesive residue on the surface were not observed.

[Example 7]
A double-sided pressure-sensitive adhesive tape 20 was produced in the same manner as in Example 1 except that the release layer 4 was formed using a non-silicone release agent composition c instead of the silicone release agent composition a. 30 and the reinforcing base glass 31 were pasted to produce a laminate of the thin film substrate glass 30 and the reinforcing base glass 31. Subsequently, the vertical peeling test of the laminated body of the thin film substrate glass 30 and the reinforcement | strengthening base glass 31 was done. As a result, a part of the thin film substrate glass 30 was damaged, but most of the double-sided adhesive tape was peeled off between the release layer 4 and the adhesive layer B5, and the thin film substrate glass 30 was not damaged from the reinforcing base glass 31. Isolated on. The yield rate of the thin film substrate glass 30 was 80%.

Moreover, when the adhesive tape intermediate body 10 of Example 7 remaining on the lower surface of the thin film substrate glass 30 was peeled in the same manner as in Example 1, it can be peeled between the pressure sensitive adhesive layer A2 and the thin film substrate glass 30, and the thin film Breakage of the substrate glass 30 and generation of adhesive residue on the surface were not observed.

[Example 8]
A double-sided pressure-sensitive adhesive tape 20 was produced in the same manner as in Example 1 except that the release layer 4 was formed using the fluorine-based release agent composition b instead of the silicone-based release agent composition a, and the thin film substrate glass 30 And a reinforcing substrate glass 31 were adhered, and a laminate of the thin film substrate glass 30 and the reinforcing substrate glass 31 was produced. Subsequently, the vertical peeling test of the laminated body of the thin film substrate glass 30 and the reinforcement | strengthening base glass 31 was done. As a result, the double-sided pressure-sensitive adhesive tape peeled between the release layer 4 and the pressure-sensitive adhesive layer B5, and the thin film substrate glass 30 was not damaged.

Moreover, when the adhesive tape intermediate body 10 of Example 8 remaining on the lower surface of the thin film substrate glass 30 was peeled in the same manner as in Example 1, it can be peeled between the pressure sensitive adhesive layer A2 and the thin film substrate glass 30, and the thin film Breakage of the substrate glass 30 and generation of adhesive residue on the surface were not observed.

[Example 9]
A double-sided pressure-sensitive adhesive tape 20 was produced in the same manner as in Example 5 except that the release layer 4 was formed using a non-silicone release agent composition c instead of the silicone release agent composition a, and a thin film substrate glass was prepared. 30 and the reinforcing base glass 31 were pasted to produce a laminate of the thin film substrate glass 30 and the reinforcing base glass 31. Subsequently, the vertical peeling test of the laminated body of the thin film substrate glass 30 and the reinforcement | strengthening base glass 31 was done. As a result, a part of the thin film substrate glass 30 was damaged, but most of the double-sided adhesive tape was peeled off between the release layer 4 and the adhesive layer B5, and the thin film substrate glass 30 was not damaged from the reinforcing base glass 31. Isolated on. The yield rate of the thin film substrate glass 30 was 70%.

Moreover, when the adhesive tape intermediate body 10 of Example 9 remaining on the lower surface of the thin film substrate glass 30 was peeled in the same manner as in Example 1, it can be peeled between the pressure sensitive adhesive layer A2 and the thin film substrate glass 30 and the thin film Breakage of the substrate glass 30 and generation of adhesive residue on the surface were not observed.

[Comparative Example 1]
Fig.4 (a) is sectional drawing which shows the layer structure of the adhesive tape intermediate body of a comparative example. FIG.4 (b) is sectional drawing which shows the layer structure of the double-sided adhesive tape of a comparative example. A pressure-sensitive adhesive tape intermediate 11 was produced in the same manner as in Example 1 except that the release layer 4 was not formed on the base material layer 3, and a double-sided pressure-sensitive adhesive tape 21 was produced. A laminate of the thin film substrate glass 30 and the reinforcing base glass 31 was produced in the same manner as in Example 1 using the obtained double-sided adhesive tape 21, and a vertical peel test was performed. When the base glass 31 for use was to be separated in the vertical direction, all the thin film substrate glasses 30 with the number of test bodies N = 10 were broken.

[Comparative Example 2]
A pressure-sensitive adhesive tape intermediate 11 was produced in the same manner as in Example 2 except that the release layer 4 was not formed on the base material layer 3, and a double-sided pressure-sensitive adhesive tape 21 was produced. Using the obtained double-sided adhesive tape 21, a laminate of the thin film substrate glass 30 and the reinforcing base glass 31 was produced in the same manner as in Example 2, and a vertical peel test was performed. When the base glass 31 for use was to be separated in the vertical direction, all the thin film substrate glasses 30 with the number of test bodies N = 10 were broken.

[Comparative Example 3]
A pressure-sensitive adhesive tape intermediate 11 was produced in the same manner as in Example 3 except that the release layer 4 was not formed on the base material layer 3, and a double-sided pressure-sensitive adhesive tape 21 was produced. A laminated body of the thin film substrate glass 30 and the reinforcing base glass 31 was produced in the same manner as in Example 3 using the obtained double-sided adhesive tape 21, and a vertical peel test was performed. When the base glass 31 for use was to be separated in the vertical direction, all the thin film substrate glasses 30 with the number of test bodies N = 10 were broken.

[Comparative Example 4]
A pressure-sensitive adhesive tape intermediate 11 was produced in the same manner as in Example 4 except that the release layer 4 was not formed on the base material layer 3, and a double-sided pressure-sensitive adhesive tape 21 was produced. Using the obtained double-sided adhesive tape 21, a laminate of the thin film substrate glass 30 and the reinforcing base glass 31 was prepared in the same manner as in Example 4, and a vertical peel test was performed. When the base glass 31 for use was to be separated in the vertical direction, all the thin film substrate glasses 30 with the number of test bodies N = 10 were broken.

[Comparative Example 5]
A pressure-sensitive adhesive tape intermediate 11 was produced in the same manner as in Example 5 except that the release layer 4 was not formed on the base material layer 3, and a double-sided pressure-sensitive adhesive tape 21 was produced. Using the obtained double-sided adhesive tape 21, a laminate of the thin film substrate glass 30 and the reinforcing base glass 31 was produced in the same manner as in Example 5, and a vertical peel test was performed. When the base glass 31 for use was to be separated in the vertical direction, all the thin film substrate glasses 30 with the number of test bodies N = 10 were broken.

[Comparative Example 6]
The release layer 4 is not formed on the base material layer 3, the adhesive layer A2 is formed using the acrylic adhesive composition D instead of the silicone adhesive composition A, and the thermosetting acrylic adhesive composition B Instead, the adhesive tape intermediate 11 was produced in the same manner as in Example 1 except that the silicone adhesive composition A was used to form the adhesive layer B5, and the double-sided adhesive tape 21 was produced. A laminate of the thin film substrate glass 30 and the reinforcing base glass 31 was produced in the same manner as in Example 1 using the obtained double-sided adhesive tape 21, and a vertical peel test was performed. When the base glass 31 for use was to be separated in the vertical direction, all the thin film substrate glasses 30 with the number of test bodies N = 10 were broken.

  Tables 1 to 4 summarize the types of resin compositions used in the adhesive tapes of the laminates of Examples and Comparative Examples and the evaluation results of the vertical peel test of the laminates.

[Table 1]

[Table 2]

[Table 3]

[Table 4]

According to the present invention, an appropriate adhesion force between the thin film member and the support member so that the thin film member is not displaced from the support member or peeled off during the processing to the thin film member that cannot be substantially deformed. A double-sided pressure-sensitive adhesive tape capable of easily separating the thin-film member from the support member without being damaged or having adhesive residue after the processing to the thin-film member, a laminate of the thin-film member and the support member, and a laminate thereof A method of manufacturing a body can be provided. In this embodiment, the thin film member having brittleness and low strength is applied as the thin film member. However, the present invention is not limited to a material formed from a material that can be substantially deformed. The present invention can also be applied to a case where a processed member that cannot be substantially deformed is formed (for example, a member in which a thin film electrode or the like is formed on a plastic film).

1, 6 ... release liner,
2, A2, 5, B5 ... adhesive layer,
3 ... base material,
4 ... release layer,
7: Thin film member,
8: Support member.

Claims (10)

  A substrate having a first surface and a second surface; an adhesive layer positioned above and on top of the first surface and the second surface; and located above the surface from at least one surface of the substrate A double-sided pressure-sensitive adhesive tape having a release layer provided between the pressure-sensitive adhesive layers.   The double-sided pressure-sensitive adhesive tape according to claim 1, wherein the release layer is provided between any one surface of the base material and the pressure-sensitive adhesive layer positioned above the surface.   The double-sided pressure-sensitive adhesive tape according to claim 1 or 2, wherein the release layer comprises a release agent selected from the group consisting of a silicone release agent and a fluorine release agent.   The adhesive layer comprises an acrylic adhesive polymer having an active functional group, a thermosetting adhesive mainly comprising a thermal crosslinking agent and a thermal polymerization initiator, and an acrylic adhesive polymer having an active functional group, a heat The double-sided pressure-sensitive adhesive tape according to any one of claims 1 to 3, comprising a pressure-sensitive adhesive selected from the group consisting of a light-sensitive pressure-sensitive adhesive mainly composed of a crosslinking agent and a photopolymerization initiator.   The first member is used to temporarily fix the first member to the second member, and the two members are formed of a material that cannot be substantially deformed. Double-sided adhesive tape as described.   The double-sided pressure-sensitive adhesive tape according to claim 5, wherein at least one of the materials is glass.   A double-sided pressure-sensitive adhesive tape product comprising the double-sided pressure-sensitive adhesive tape according to any one of claims 1 to 6 and a release liner provided on the surface of the pressure-sensitive adhesive layer of the double-sided pressure-sensitive adhesive tape. A support member;
A base material having a first surface and a second surface laminated on the support member; an adhesive layer located above and on top of the first surface and the second surface; and at least one of the base materials A double-sided pressure-sensitive adhesive tape having a release layer provided between the surface and the pressure-sensitive adhesive layer located above the surface;
A thin film member that is substantially undeformable laminated on the double-sided adhesive tape,
Laminate having.   The laminate according to claim 8, wherein the double-sided pressure-sensitive adhesive tape is the double-sided pressure-sensitive adhesive tape according to any one of claims 2 to 6.   A laminate of a thin film member and a support member, comprising a step of bonding a thin film member and a support member that cannot be substantially deformed by the double-sided pressure-sensitive adhesive tape according to any one of claims 1 to 6. Production method.

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