JP2019042851A - Transport holding jig - Google Patents

Abstract

To provide a transport holding jig of which a thickness is reduced while a capacity of a fluid feeding chamber is assured.SOLUTION: A transport holding jig 20 comprises: a body 22 having a holding surface 26 of a transport object T, an accommodation recess 28 formed in the holding surface 26, a recess 30 formed in a bottom 28A of the accommodation recess 28, and a fluid supply passage 32 for supplying a compressed fluid L into the recess 30; a plate-like part 54 which is accommodated in the accommodation recess 28, of which a plate surface 54B contacts the bottom 28A of the accommodation recess 28, and in which an exhaust passage 52 for the compressed fluid L is formed between an outer peripheral end 54A and a side wall 28B of the accommodation recess 28; and a nozzle 24 having a recess 58 which is formed in the plate surface 54B and forms a fluid supply chamber 56, into which the compressed fluid L is supplied, between itself and the recess 30, and a communication passage (as one example, a discharge groove 60) which is formed in the plate-like part 54, extends from the recess 58 toward the outer peripheral end 54A, and communicates the fluid supply chamber 56 and the exhaust passage 52.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a transport holder.

  2. Description of the Related Art There has conventionally been known a transport holder that non-contactingly holds an object to be transferred, such as a semiconductor wafer or a glass substrate, by using a Bernoulli effect to generate a negative pressure by using a fluid as a medium.

  Patent Document 1 discloses a transport holder in which a discharge head having a plate-like portion is housed in a housing recess formed in a holding surface of a discharge board. In this conveyance holder, the side wall surface in which the receiving recess is inclined and the inclined surface formed at the outer peripheral end of the plate portion are in contact, and the side of the receiving recess and the plate surface connected to the inclined surface of the plate portion A compression tank (fluid supply chamber) is formed between the wall and the wall. The compression tank is supplied with the compressed fluid from the fluid supply port of the discharge board through the fluid passage of the projecting head. Then, the compressed fluid supplied to the compression tank is discharged to the fluid discharge passage through the discharge groove formed on the inclined surface of the plate portion.

Japanese Patent Application Publication No. 2006-346783

  In the transfer holder disclosed in Patent Document 1, since the compression tank (fluid supply chamber) is formed between the inclined side wall surface of the accommodation recess and the plate surface of the plate-like portion, the capacity of the compression tank can be increased. In the secured state, it is difficult to reduce the thickness of the transport holder.

  An object of the present invention is, in consideration of the above-mentioned fact, to provide a transport holder whose thickness is reduced while securing the volume of the fluid supply chamber.

  A transport holder according to a first aspect of the present invention includes a holding surface of a transport object, a housing recess formed in the holding surface, a first recess formed in a bottom of the housing recess, and a compressed fluid. A main body having a fluid supply passage for supplying to the first recess, and the accommodation recess accommodated in the accommodation recess, the plate surface abuts on the bottom of the accommodation recess, the space between the outer peripheral end and the side wall of the accommodation recess A plate-like portion forming a discharge path of compressed fluid, a second recess formed on the plate surface and forming a fluid supply chamber to which the compressed fluid is supplied between the first recess and the plate-like portion And a nozzle having a communication passage extending from the second recess toward the outer peripheral end and communicating the fluid supply chamber with the discharge passage.

In the transport holder according to the first aspect, the compressed fluid is supplied to the fluid supply chamber through the fluid supply path. The supplied compressed fluid is discharged to the discharge passage through the communication passage. The discharged compressed fluid flows from the discharge passage between the holding surface of the main body and the object to be transported. At this time, a negative pressure is generated in the vicinity of the discharge path, and a suction force acts on the object to be conveyed. On the other hand, on the holding surface, the compressed fluid that has flowed out of the discharge path exerts a pulling force on the object to be transported. As described above, since the suction force and the separation force act on the object to be conveyed, the object to be conveyed is suctioned and held in a noncontact state with the conveyance holder.
Here, in the transport holder, since the fluid supply chamber is formed by the first concave portion of the main body and the second concave portion of the plate-like portion, for example, the first concave portion of the main body and the plate surface of the plate-like portion Compared to the configuration in which the fluid supply chamber is formed, the thickness can be reduced while securing the volume of the fluid supply chamber.

  The transfer holder according to the second aspect of the present invention is the transfer holder according to the first aspect, wherein the fluid supply chamber is formed in an annular shape.

  In the transfer holder according to the second aspect, since the fluid supply chamber is formed in an annular shape, for example, in order to supply the compressed fluid to the fluid supply chamber as compared with the configuration in which a plurality of divided fluid supply chambers are formed. The number of fluid supply channels can be reduced. This simplifies the structure of the transport holder (main body).

  The transport holder according to the third aspect of the present invention is the transport holder according to the first aspect or the second aspect, wherein the communication path is formed on the plate surface and extends from the second recess toward the outer peripheral end The groove width of the groove is narrower on the outer peripheral end side than on the second recess side.

In the transport holder according to the third aspect, since the groove formed in the plate surface of the plate portion is used as the communication passage, for example, compared to the configuration in which the through hole formed in the plate portion is used as the communication passage, Machining of the nozzle is simplified.
Further, in the above-mentioned conveyance holder, the groove width of the groove which is the communication passage is made narrower on the outer peripheral end side of the plate-like portion than the second recess side, so for example, the groove width is constant or from the second recess side Also, the flow velocity of the compressed fluid supplied to the fluid supply chamber can be increased when passing through the groove, as compared with the configuration in which the outer peripheral end side is widened. Thereby, the force which carries out suction holding of the conveyance object by the conveyance holder improves.

  The transport holder according to the fourth aspect of the present invention is the transport holder according to the third aspect, wherein the groove width of the groove is gradually narrowed from the second recess toward the outer peripheral end.

  In the transport holder according to the fourth aspect, since the groove width of the groove is gradually narrowed from the second recess toward the outer peripheral end of the plate portion, for example, the groove width of the groove is from the second recess to the plate portion Compared to the configuration in which the width of the compressed fluid narrows sharply toward the outer peripheral end of the groove, the pressure loss of the compressed fluid flowing in the groove can be suppressed to increase the flow velocity. As a result, the force for suctioning and holding the object to be transported by the transport holder can be further improved.

  According to the present invention, since it is set as the above-mentioned, the conveyance holder which made thickness thin can be provided, securing the capacity of a fluid supply room.

It is a disassembled perspective view of the conveyance holder which concerns on 1st Embodiment of this invention. It is a top view of the main body which comprises the conveyance holder shown by FIG. It is a top view of the nozzle which comprises the conveyance holder shown by FIG. It is sectional drawing which cut | disconnected the conveyance holder shown by FIG. 1 along the axial direction. It is a disassembled perspective view of the conveyance holder which concerns on 2nd Embodiment of this invention. It is a top view of the nozzle which comprises the conveyance holder shown by FIG. It is a disassembled perspective view of the conveyance holder which concerns on 3rd Embodiment of this invention. It is a top view of the nozzle which comprises the conveyance holder shown by FIG. It is sectional drawing which cut | disconnected the conveyance holder which concerns on other embodiment of this invention along the axial direction. It is sectional drawing which cut | disconnected the conveyance holder which concerns on other embodiment of this invention along the axial direction.

  Hereinafter, the conveyance holder concerning one embodiment of the present invention is concretely explained, referring to an attached drawing.

First Embodiment
As shown in FIG. 4, the transfer holder 20 of the present embodiment is attached to a supply plate 18 attached to a tip of an arm of a transfer robot instead of a hand, and a transfer target T (two-dot chain line in FIG. ) Is configured to be suctioned and held.

<Transporting holder>
As shown in FIG. 1, the transport holder 20 includes a cylindrical main body 22 and a nozzle 24 attached to the main body 22.

(Body)
As shown in FIG. 4, the main body 22 includes the holding surface 26 of the object to be transferred T, the housing recess 28 formed on the holding surface 26, the recess 30 formed on the bottom 28 A of the housing recess 28, and the compressed fluid And a fluid supply passage 32 for supplying L to the recess 30.

  As shown in FIG. 4, the holding surface 26 is a surface on one side in the axial direction X (a lower surface in FIG. 4) of the main body 22 and is a flat surface.

  The housing recess 28 is configured to include a bottom 28A (a ceiling in FIG. 4) and a side wall 28B. The bottom portion 28A is circular, and the side wall 28B is continuously formed along the outer peripheral end of the bottom portion 28A. Further, the side wall 28B is inclined with respect to the axial direction X of the main body 22. Specifically, the side wall 28B is inclined such that the diameter of the accommodation recess 28 increases from the bottom portion 28A toward the opening side.

  The recess 30 is formed in the central portion of the bottom 28A, and includes the bottom 30A and the side wall 30B. The bottom 30A is circular, and the side wall 30B is continuously formed along the outer peripheral end of the bottom 30A. Further, the side wall 30 B extends along the axial direction X of the main body 22. Therefore, the recess 30 has a substantially constant diameter from the bottom 30A to the opening. In addition, the recessed part 30 of this embodiment is an example of the 1st recessed part in this invention.

  The fluid supply path 32 extends from the bottom 36A of the recess 36 to the bottom 30A of the recess 30 formed in the mounting surface 34 which is the surface on the other side (the upper surface in FIG. 4) of the body 22 in the axial direction X A communication passage 38 communicating the inside of the recess 36 and the inside of the recess 30 is provided. A plurality of communication passages 38 are formed at intervals (in the present embodiment, at regular intervals) around an insertion hole 42 described later. Further, when the plate surface 18A of the supply plate 18 is attached to the attachment surface 34 of the main body 22, the recess 30 and the fluid supply path 40 of the compressed fluid L formed in the supply plate 18 communicate with each other.

  An insertion hole 42 is formed in the main body 22 from the center of the bottom portion 30A of the recess 30 toward the center of the bottom portion 36A of the recess 36. The insertion hole 42 extends along the axial direction X of the main body 22 so that an insertion portion 62 described later of the nozzle 24 can be inserted.

  Further, a fluid passage 44 is formed in the main body 22 so as to extend radially inward (a central side of the main body 22) from the outer peripheral surface 22A. The fluid passage 44 is connected to one of the plurality of communication passages 38. Further, in the present embodiment, the inlet 44 A of the fluid passage 44 is closed by the embedding member 46.

  An annular groove 48 is formed in the mounting surface 34 of the main body 22 so as to surround the recess 36. An O-ring 50 is fitted in the groove 48. In a state where the plate surface 18A of the supply plate 18 is attached to the mounting surface 34 of the main body 22, the O-ring 50 is compressed and deformed, and the restoring force (elastic force) seals between the plate surface 18A and the mounting surface 34 ing.

(nozzle)
As shown in FIGS. 1 and 3, the nozzle 24 is housed in the housing recess 28 and forms a plate-like portion 54 that forms the discharge passage 52 of the compressed fluid L between the outer peripheral end 54A and the side wall 28B of the housing recess 28. And a recess 58 forming a fluid supply chamber 56 (see FIG. 4) to which the compressed fluid L is supplied between the recess 30 and the fluid supply chamber 56 and the discharge passage 52 extending from the recess 58 toward the outer peripheral end 54A. And a discharge groove 60 for communicating the two.

  As shown in FIGS. 1 and 4, the plate-like portion 54 is formed in a disk shape, and in the state of being accommodated in the accommodation recess 28, the plate surface 54B (upper surface in FIG. 4) is the bottom 28A of the accommodation recess 28. Abut on. At this time, the plate surface 54C (the lower surface in FIG. 4) of the plate portion 54 is substantially flush with the holding surface 26. That is, in the present embodiment, the depth of the accommodation recess 28 and the thickness of the plate-like portion 54 are set to substantially the same value. Further, between the outer peripheral end 54A of the plate-like portion 54 and the side wall 28B of the accommodation recess 28, a discharge passage 52 is formed, through which the compressed fluid L is discharged from the discharge groove 60. The discharge path 52 is continuously formed in the circumferential direction of the main body 22. In other words, the discharge passage 52 is annular.

  Further, on the plate surface 54B of the plate-like portion 54, a cylindrical insertion portion 62 which protrudes from the central portion along the axial direction X of the main body 22 is formed. A concave portion 64 extending toward the root of the insertion portion 62 is formed at the top of the insertion portion 62, and a female screw is formed on the side wall surface of the concave portion 64. The nozzle 24 is attached to the main body 22 by inserting the insertion portion 62 into the above-mentioned insertion hole 42 and screwing the screw member 66 into the recess 64.

  The recess 58 is formed in the plate surface 54 B of the plate-like portion 54. Specifically, it is continuously formed in the circumferential direction between the insertion portion 62 of the plate surface 54B and the outer peripheral end 54A. In other words, the recess 58 is formed in an annular shape on the plate surface 54B with the insertion portion 62 as the center. The recess 58 and the recess 30 form a fluid supply chamber 56. The compressed fluid L is supplied from the fluid supply path 40 to the fluid supply chamber 56. In the present embodiment, since the recess 36 and the recess 58 are respectively formed in an annular shape, the fluid supply chamber 56 is also formed in an annular shape. The recess 58 of the present embodiment is an example of the second recess in the present invention.

  As shown in FIGS. 1 and 3, the discharge groove 60 is formed in the plate surface 54B of the plate-like portion 54, and extends from the side wall 58B on the outer peripheral side of the recess 58 toward the outer peripheral end 54A. 56 and the discharge passage 52 are in communication. Further, a plurality of discharge grooves 60 are formed in the circumferential direction of the plate-like portion 54 at intervals (in the present embodiment, at constant intervals). The groove width W of the discharge groove 60 is the same from the recess 58 to the outer peripheral end 54A. The discharge groove 60 of the present embodiment is an example of the communication passage in the present invention.

  Moreover, as a material which forms the main body 22 and the nozzle 24, various metals, various resin, ceramics, a composite material etc. may be used.

  Next, the operation and effects of the transfer holder 20 according to the present embodiment will be described.

  In the transport holder 20, the compressed fluid L is supplied from the fluid supply passage 40 formed in the supply plate 18 to the recess 36 of the fluid supply passage 32 formed in the main body 22. The compressed fluid L supplied to the recess 36 is supplied to the fluid supply chamber 56 formed by the recess 30 and the recess 58 through the communication passage 38. In the fluid supply chamber 56, the pressure of the compressed fluid L via the fluid supply passage 40 and the fluid supply passage 32 is buffered. Then, the compressed fluid L in the fluid supply chamber 56 is discharged to the discharge passage 52 through the discharge groove 60. The discharged compressed fluid L flows outward from the discharge passage 52 between the holding surface 26 of the main body 22 and the object T to be transported. At this time, a negative pressure is generated in the vicinity of the discharge path 52, and a suction force acts on the object to be conveyed. On the other hand, on the holding surface 26, the compressed fluid L that has flowed out of the discharge path 52 acts on the object T to be pulled away. As described above, since the suction force and the separating force act on the object to be conveyed T, the object T is suctioned and held in a non-contact state with the conveyance holder 20.

  Here, in the transport holder 20, since the fluid supply chamber 56 is formed by the recess 30 of the main body 22 and the recess 58 of the plate-like portion 54, for example, the recess of the main body and the plate surface of the plate-like portion Compared to the configuration in which the fluid supply chamber is formed, the thickness (the thickness of the main body 22 in the present embodiment) can be reduced while securing the volume of the fluid supply chamber 56.

  Further, in the transport holder 20, since the fluid supply chamber 56 is formed in an annular shape, the compressed fluid L is supplied to the fluid supply chamber 56 as compared with, for example, a configuration in which a plurality of divided fluid supply chambers are formed. It is possible to reduce the number of fluid supply paths 32 for This simplifies the structure of the transport holder 20 (main body 22).

  Furthermore, in the transport holder 20, since the discharge groove 60 formed in the plate surface 54B of the plate portion 54 is an example of the communication passage in the present invention, for example, the through hole formed in the plate portion 54 The processing of the nozzle 24 is simplified as compared with the configuration in which the communication passage is used.

  In the first embodiment, the shape of the main body 22 is cylindrical, and the shape of the plate-like portion 54 of the nozzle 24 is disk-like, but the present invention is not limited to this configuration. For example, the shape of the main body 22 may be polygonal, elliptical, or the like. Further, the shape of the plate-like portion 54 of the nozzle 24 may be a polygonal plate shape, an elliptical plate shape or the like.

Second Embodiment
The conveyance holder 70 of 2nd Embodiment is shown by FIG.5 and FIG.6. The transport holder 70 of the present embodiment includes the main body 22 of the first embodiment and the nozzle 72. The nozzle 72 has the same configuration as the nozzle 24 of the first embodiment except for the configuration of the ejection groove 74, so the same reference numerals are given to the same components as the nozzle 24 and the description thereof is omitted.

  The groove width W of the discharge groove 74 is narrower at the outer peripheral end 54A side than at the concave portion 58 side. Specifically, as shown in FIG. 6, the groove width W of the discharge groove 74 gradually decreases from the side wall 58B on the outer peripheral side of the recess 58 toward the middle part, and from the middle part to the outer peripheral end The width is constant toward 54A.

  Next, the effect of the conveyance holder 70 of this embodiment is demonstrated. In addition, the description is suitably suitably abbreviate | omitted about the effect similar to the effect obtained by 1st Embodiment.

  In the conveyance holder 70, since the groove width W of the discharge groove 74 is narrower on the outer peripheral end 54A side than on the concave portion 58 side, for example, the groove width W is constant or wider on the outer peripheral end 54A side than the concave portion 58 side. As compared with the configuration, the flow velocity when the compressed fluid L supplied to the fluid supply chamber 56 passes through the discharge groove 74 can be increased. As a result, the force by which the conveyance holder 70 sucks and holds the object to be conveyed T is improved.

Third Embodiment
The conveyance holder 80 of 3rd Embodiment is shown by FIG.7 and FIG.8. The transport holder 80 of the present embodiment includes the main body 22 of the first embodiment and the nozzle 82. The nozzle 82 has the same configuration as the nozzle 24 of the first embodiment except for the configuration of the ejection groove 84. Therefore, the same reference numerals are given to the same components as the nozzle 24 and the description thereof is omitted.

  In the discharge groove 84, the groove width W gradually narrows from the recess 58 toward the outer peripheral end 54A. Specifically, as shown in FIG. 8, the side wall 84A of the discharge groove 84 is continuously curved from the side wall 58B on the outer peripheral side of the recess 58 toward the outer peripheral end 54A, and the groove width W is from the recess 58 to the outer peripheral end It is getting narrower towards 54A.

  Next, the effect of the conveyance holder 80 of this embodiment is demonstrated. In addition, the description is suitably suitably abbreviate | omitted about the effect similar to the effect obtained by 1st Embodiment.

  In the transport holder 80, since the groove width W of the discharge groove 84 is gradually narrowed from the recess 58 toward the outer peripheral end 54A, for example, the groove width W of the discharge groove 84 from the recess 58 toward the outer peripheral end 54A Compared to the configuration in which the pressure is sharply narrowed, the pressure loss of the compressed fluid L flowing in the discharge groove 84 can be suppressed to increase the flow velocity. As a result, the force by which the transport holder 80 sucks and holds the transport target T is further improved.

Other Embodiments
In the first embodiment, the transport holder 20 is attached to the supply plate 18 of the transport robot, but the present invention is not limited to this configuration. For example, the end plate 92 may be attached to the attachment surface 34 of the main body 22 as in the transport holder 90 shown in FIG. In the transport holder 90, the embedding member 46 is removed from the inlet 44A of the fluid passage 44, and a pipe 94 for supplying the compressed fluid L to the inlet 44A is connected. Also, for example, the end plate 102 may be attached to the attachment surface 34 of the main body 22 as the transfer holder 100 shown in FIG. 10. A fluid passage 104 communicating with the fluid supply passage 32 (recess 36) of the main body 22 is formed in the end plate 102, and a pipe 94 for supplying the compressed fluid L is connected to the fluid passage 104. .
In addition, about each structure of the conveyance holder 90 shown by FIG. 9 and the conveyance holder 100 shown by FIG. 10, you may apply to 2nd Embodiment and 3rd Embodiment.

In the first embodiment, the fluid supply chamber 56 is formed in an annular shape, but the present invention is not limited to this configuration. For example, the fluid supply chamber 56 may be formed intermittently.
Alternatively, the recess 30 may be disposed intermittently in the circumferential direction, and the recess 58 may be continuous in the circumferential direction, or the recess 30 may be contiguous in the circumferential direction and the recess 58 may be disposed intermittently in the circumferential direction. Good. Even in this case, the fluid supply chamber 56 is formed in an annular shape.
The configuration of the fluid supply chamber 56 may be applied to the second embodiment and the third embodiment.

Moreover, in 1st Embodiment, although the discharge groove 60 as an example of a communicating path is formed in the plate surface 54B of the plate-like part 54, this invention is not limited to this structure. For example, a through hole (an example of a communication passage in the present invention) may be formed in the plate portion 54 so as to extend from the recess 58 toward the outer peripheral end 54A.
The configuration of the through holes formed in the plate-like portion 54 may be applied to the second embodiment and the third embodiment.

  The embodiments of the present invention have been described above by referring to the embodiments. However, these embodiments are merely examples, and various modifications can be made without departing from the scope of the present invention. Further, it goes without saying that the scope of rights of the present invention is not limited to these embodiments.

Reference Signs List 20 transport holder 22 main body 24 nozzle 26 holding surface 28 accommodation recess 28A bottom 28B side wall 30 recess (first recess)
32 fluid supply passage 52 discharge passage 54 plate-like portion 54A peripheral end 54B plate surface 56 fluid supply chamber 58 recess (second recess)
60 Discharge groove (groove (communication passage))
70 transport holder 72 nozzle 74 discharge groove (groove (communication passage))
80 transport holder 82 nozzle 84 discharge groove (groove (communication passage))
90 Transport holder 100 Transport holder L Compressed fluid T Transport object W Groove width

Claims (4)

A holding surface of an object to be transported, a housing recess formed in the holding surface, a first recess formed in a bottom of the housing recess, and a fluid supply passage for supplying a compressed fluid to the first recess; A body having a
A plate-like portion is accommodated in the accommodation recess, the plate surface is in contact with the bottom of the accommodation recess, and forms a discharge path of the compressed fluid between the outer peripheral end and the side wall of the accommodation recess. And a second recess forming a fluid supply chamber to which the compressed fluid is supplied between the first recess and the first recess, and the plate-like portion is formed to extend from the second recess to the outer peripheral end A nozzle having a communication passage for communicating the fluid supply chamber with the discharge passage;
A transport holder comprising:   The transfer holder according to claim 1, wherein the fluid supply chamber is formed in an annular shape. The communication passage is a groove formed in the plate surface and extending from the second recess toward the outer peripheral end,
The conveyance holder according to claim 1 or 2 whose slot width of said slot is narrower on said peripheral end side than said 2nd crevice side.   The conveyance holder according to claim 3, wherein a groove width of the groove is gradually narrowed from the second recess toward the outer peripheral end.