JP2019039396A5 - - Google Patents

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Publication number
JP2019039396A5
JP2019039396A5 JP2017162868A JP2017162868A JP2019039396A5 JP 2019039396 A5 JP2019039396 A5 JP 2019039396A5 JP 2017162868 A JP2017162868 A JP 2017162868A JP 2017162868 A JP2017162868 A JP 2017162868A JP 2019039396 A5 JP2019039396 A5 JP 2019039396A5
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JP
Japan
Prior art keywords
shaft
chamber
opening end
rotor
damper
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JP2017162868A
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English (en)
Japanese (ja)
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JP2019039396A (ja
JP6779528B2 (ja
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Priority to JP2017162868A priority Critical patent/JP6779528B2/ja
Priority claimed from JP2017162868A external-priority patent/JP6779528B2/ja
Publication of JP2019039396A publication Critical patent/JP2019039396A/ja
Publication of JP2019039396A5 publication Critical patent/JP2019039396A5/ja
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Publication of JP6779528B2 publication Critical patent/JP6779528B2/ja
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JP2017162868A 2017-08-25 2017-08-25 ドライ真空ポンプ Active JP6779528B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017162868A JP6779528B2 (ja) 2017-08-25 2017-08-25 ドライ真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017162868A JP6779528B2 (ja) 2017-08-25 2017-08-25 ドライ真空ポンプ

Publications (3)

Publication Number Publication Date
JP2019039396A JP2019039396A (ja) 2019-03-14
JP2019039396A5 true JP2019039396A5 (enrdf_load_stackoverflow) 2019-10-03
JP6779528B2 JP6779528B2 (ja) 2020-11-04

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ID=65726011

Family Applications (1)

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JP2017162868A Active JP6779528B2 (ja) 2017-08-25 2017-08-25 ドライ真空ポンプ

Country Status (1)

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JP (1) JP6779528B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250073339A (ko) 2023-03-22 2025-05-27 가시야마고교가부시끼가이샤 드라이 진공펌프
KR102612899B1 (ko) * 2023-06-29 2023-12-13 프로인주식회사 용적 이송식 건식 펌프

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002122087A (ja) * 2000-10-17 2002-04-26 Toyota Industries Corp 真空ポンプにおける軸封構造
WO2008152713A1 (ja) * 2007-06-13 2008-12-18 Kashiyama Industries, Ltd. ルーツ式ポンプおよびルーツ式ポンプ製造方法

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