JP2019035059A - Resin composition - Google Patents

Abstract

To provide a resin composition that makes it possible to obtain an insulating layer having a low dielectric constant and having high adhesion to a conductor layer after an HAST test, and can also inhibit resin flow.SOLUTION: A resin composition contains (A) an epoxy resin, (B) a curing agent, (C) rubber particle, and (D) a fluorine-based filler, with the content of (C) component being 0.1 mass%-3 mass% to a nonvolatile component 100 mass% in the resin composition.SELECTED DRAWING: None

Description

  The present invention relates to a resin composition, an adhesive film, a circuit board, and a semiconductor device.

  As a circuit board manufacturing technique, a build-up manufacturing method in which an insulating layer and a conductor layer are alternately stacked on an inner layer substrate is known. The insulating layer is generally formed by obtaining a resin composition layer as a coating film of a resin varnish containing the resin composition and curing the resin composition layer. For example, Patent Document 1 discloses a resin composition containing an epoxy resin, a curing agent, and a fluororesin filler, and the content of the fluororesin filler is 50 with respect to the solid content of the resin composition. A resin composition characterized in that it is from mass% to 85 mass% is described.

Japanese Patent Laid-Open No. 2006-166347

  The resin composition for forming the insulating layer generally contains a large amount of thermosetting resin from the viewpoint of achieving high insulating performance. As this thermosetting resin, it was usual to use an epoxy resin or its curing agent. It is also known to reduce the coefficient of thermal expansion of the cured resin composition by using an inorganic filler as the filler. On the other hand, the present inventor examined the use of a fluorine-based filler as a filler in order to develop an insulating layer having a low dielectric constant.

  However, an insulating layer formed of a cured product of a resin composition containing a fluorine-based filler tends to have low adhesion to a conductive layer formed on the insulating layer. Among them, the adhesiveness of the insulating layer was particularly low after undergoing a super accelerated high temperature and high humidity life test (HAST test). In order to increase the insulation reliability over a long period of time, it is desired that the insulating layer can exhibit high adhesion to the conductor layer even after the HAST test.

  Further, when an adhesive film is produced using a resin composition containing a fluorine-based filler, the resin film tends to have a large resin flow during lamination with the inner layer substrate. Here, the resin flow refers to a phenomenon in which the resin composition flows out from a portion between the support of the adhesive film and the inner layer substrate when the adhesive film and the inner layer substrate are laminated. When this resin flow occurs, the resin composition layer usually protrudes beyond the edge of the support of the adhesive film. And when resin flow arises, there exists a tendency for the thickness of a resin composition layer to become thin in the edge part of an adhesive film by the part for the resin composition which flowed out. For this reason, when a large resin flow occurs, the thickness of the resin composition layer becomes non-uniform, making it difficult to control the thickness.

  The present invention was devised in view of the above problems, and can provide an insulating layer having a low dielectric constant and high adhesion to the conductor layer after the HAST test, and can further suppress the resin flow. An object of the present invention is to provide a resin composition; an adhesive film having a layer containing the resin composition; a circuit board and a semiconductor device including an insulating layer made of a cured product of the resin composition.

As a result of intensive studies to solve the above problems, the present inventor combined (A) an epoxy resin, (B) a curing agent, a predetermined amount of (C) rubber particles, and (D) a fluorine-based filler. Thus, the inventors have found that the above-mentioned problems can be solved and completed the present invention.
That is, the present invention includes the following.

[1] A resin composition comprising (A) an epoxy resin, (B) a curing agent, (C) rubber particles, and (D) a fluorine-based filler,
(C) The resin composition whose quantity of a component is 0.1 mass%-3 mass% with respect to 100 mass% of non-volatile components in a resin composition.
[2] The resin composition according to [1], wherein the component (D) is a fluorine-based polymer particle.
[3] The resin composition according to [2], wherein the component (D) is polytetrafluoroethylene particles.
[4] The resin composition according to any one of [1] to [3], comprising (E) an inorganic filler.
[5] The resin composition according to [4], wherein the component (E) is silica.
[6] The resin composition according to [4] or [5], in which the amount of the component (E) is 5% by mass to 70% by mass with respect to 100% by mass of the nonvolatile component in the resin composition.
[7] The amount of the component (D) according to any one of [1] to [6], which is 10% by mass to 80% by mass with respect to 100% by mass of the non-volatile component in the resin composition. Resin composition.
[8] The component (A) is selected from the group consisting of bisphenol A type epoxy resins, bixylenol type epoxy resins, biphenyl aralkyl type epoxy resins, naphthylene ether type epoxy resins, naphthalene type tetrafunctional epoxy resins and naphthol type epoxy resins. The resin composition according to any one of [1] to [7], which is one or more types of epoxy resins.
[9] The resin composition according to any one of [1] to [8], which is used for forming an insulating layer of a circuit board.
[10] An adhesive film having a support and a resin composition layer comprising the resin composition according to any one of [1] to [9] provided on the support.
[11] A circuit board including an insulating layer made of a cured product of the resin composition according to any one of [1] to [9].
[12] A semiconductor device comprising the circuit board according to [11].

  According to the present invention, an insulating layer having a low dielectric constant and having high adhesion to a conductor layer after a HAST test can be obtained, and furthermore, a resin composition capable of suppressing resin flow; There can be provided an adhesive film having a layer including a circuit board and a semiconductor device including an insulating layer made of a cured product of the resin composition.

FIG. 1 is a top view schematically showing the periphery of an end portion of an adhesive film laminated to an inner layer substrate in an example.

  Hereinafter, the present invention will be described in detail with reference to embodiments and examples. However, the present invention is not limited to the following embodiments and exemplifications, and can be implemented with any modifications without departing from the scope of the claims of the present invention and the equivalents thereof.

  In the following description, the amount of each component in the resin composition is a value relative to 100% by mass of the nonvolatile component in the resin composition unless otherwise specified.

  In the following description, the term “dielectric constant” indicates a relative dielectric constant unless otherwise specified.

[1. Outline of Resin Composition]
The resin composition of the present invention includes (A) an epoxy resin, (B) a curing agent, (C) rubber particles, and (D) a fluorine-based filler. Here, the term “fluorine-based” means containing a fluorine atom. The term “fluorine-based filler” refers to a filler that contains a compound containing a fluorine atom as a material. In this resin composition, the amount of (C) rubber particles is in a predetermined range.

  According to such a resin composition, it is possible to obtain an insulating layer having a low dielectric constant and high adhesion to the conductor layer after the HAST test, and further, it is possible to suppress the resin flow. Can be obtained.

[2. (A) Epoxy resin]
Examples of the epoxy resin as the component (A) include bixylenol type epoxy resins, bisphenol A type epoxy resins, bisphenol F type epoxy resins, bisphenol S type epoxy resins, bisphenol AF type epoxy resins, dicyclopentadiene type epoxy resins, Trisphenol type epoxy resin, naphthol novolak type epoxy resin, phenol novolak type epoxy resin, tert-butyl-catechol type epoxy resin, naphthalene type epoxy resin, naphthol type epoxy resin, anthracene type epoxy resin, glycidylamine type epoxy resin, glycidyl ester Type epoxy resin, cresol novolac type epoxy resin, biphenyl type epoxy resin, linear aliphatic epoxy resin, epoxy resin having butadiene structure, alicyclic Epoxy resins, heterocyclic epoxy resins, spiro ring-containing epoxy resin, cyclohexane type epoxy resin, cyclohexanedimethanol type epoxy resins, naphthylene ether type epoxy resin, trimethylol type epoxy resin, tetraphenyl ethane epoxy resin. An epoxy resin may be used individually by 1 type, and may be used in combination of 2 or more types.

  (A) As an epoxy resin, an aromatic epoxy resin is preferable from the viewpoint of reducing the average linear thermal expansion coefficient of the insulating layer. Here, the aromatic epoxy resin refers to an epoxy resin whose molecule contains an aromatic skeleton. The aromatic skeleton is a chemical structure generally defined as aromatic, and includes not only a monocyclic structure such as a benzene ring but also a polycyclic aromatic structure such as a naphthalene ring and an aromatic heterocyclic structure. Among these, from the viewpoint of remarkably obtaining the desired effect of the present invention, the (A) epoxy resin is bisphenol A type epoxy resin, bixylenol type epoxy resin, biphenyl aralkyl type epoxy resin, naphthylene ether type epoxy resin, naphthalene type 4 One or more types of epoxy resins selected from the group consisting of functional epoxy resins and naphthol type epoxy resins are preferable, and bisphenol A type epoxy resins, bixylenol type epoxy resins and naphthol type epoxy resins are particularly preferable.

  It is preferable that a resin composition contains the epoxy resin which has a 2 or more epoxy group in 1 molecule as (A) epoxy resin. From the viewpoint of remarkably obtaining the desired effect of the present invention, the ratio of the epoxy resin having two or more epoxy groups in one molecule with respect to 100% by mass of the nonvolatile component (A) of the epoxy resin is preferably 50 masses. % Or more, more preferably 60% by mass or more, and particularly preferably 70% by mass or more.

  As the epoxy resin, an epoxy resin that is liquid at a temperature of 20 ° C. (hereinafter sometimes referred to as “liquid epoxy resin”) and an epoxy resin that is a solid at a temperature of 20 ° C. (sometimes referred to as “solid epoxy resin”). There is. The resin composition (A) may contain only a liquid epoxy resin or only a solid epoxy resin as an epoxy resin, but may contain a combination of a liquid epoxy resin and a solid epoxy resin. Is preferred. (A) By using a combination of a liquid epoxy resin and a solid epoxy resin as an epoxy resin, the flexibility of the resin composition layer can be improved, and the breaking strength of the cured product of the resin composition can be improved. .

  The liquid epoxy resin is preferably a liquid epoxy resin having two or more epoxy groups in one molecule, and more preferably an aromatic liquid epoxy resin having two or more epoxy groups in one molecule.

  Liquid epoxy resins include bisphenol A type epoxy resins, bisphenol F type epoxy resins, bisphenol AF type epoxy resins, naphthalene type epoxy resins, glycidyl ester type epoxy resins, glycidyl amine type epoxy resins, phenol novolac type epoxy resins, and ester skeletons. Preferred are cycloaliphatic epoxy resin, cyclohexane type epoxy resin, cyclohexanedimethanol type epoxy resin, glycidylamine type epoxy resin, and epoxy resin having butadiene structure, glycidylamine type epoxy resin, bisphenol A type epoxy resin, bisphenol F type Epoxy resins, bisphenol AF type epoxy resins and naphthalene type epoxy resins are more preferred, and bisphenol A type epoxy resins are particularly preferred.

  Specific examples of the liquid epoxy resin include “HP4032”, “HP4032D”, “HP4032SS” (naphthalene type epoxy resin) manufactured by DIC; “828US”, “jER828US”, “jER828EL”, “825” manufactured by Mitsubishi Chemical Corporation. "Epicoat 828EL" (bisphenol A type epoxy resin); "jER807", "1750" (bisphenol F type epoxy resin) manufactured by Mitsubishi Chemical; "jER152" (phenol novolac type epoxy resin) manufactured by Mitsubishi Chemical; “630”, “630LSD” (glycidylamine type epoxy resin) manufactured by Mitsubishi Chemical Corporation; “ZX1059” (mixed product of bisphenol A type epoxy resin and bisphenol F type epoxy resin) manufactured by Nippon Steel & Sumikin Chemical Co., Ltd .; Nagase ChemteX Corporation "EX" made “721” (glycidyl ester type epoxy resin); “Celoxide 2021P” (alicyclic epoxy resin having an ester skeleton) manufactured by Daicel; “PB-3600” (epoxy resin having a butadiene structure) manufactured by Daicel; “ZX1658”, “ZX1658GS” (liquid 1,4-glycidylcyclohexane type epoxy resin) manufactured by Kagaku Co., Ltd .; These may be used alone or in combination of two or more.

  The solid epoxy resin is preferably a solid epoxy resin having 3 or more epoxy groups in one molecule, and more preferably an aromatic solid epoxy resin having 3 or more epoxy groups in one molecule.

  Solid epoxy resins include bixylenol type epoxy resins, biphenyl aralkyl type epoxy resins, naphthalene type epoxy resins, naphthalene type tetrafunctional epoxy resins, cresol novolac type epoxy resins, dicyclopentadiene type epoxy resins, trisphenol type epoxy resins, Naphthol type epoxy resin, biphenyl type epoxy resin, naphthylene ether type epoxy resin, anthracene type epoxy resin, bisphenol A type epoxy resin, bisphenol AF type epoxy resin, tetraphenylethane type epoxy resin are preferable, bixylenol type epoxy resin, biphenyl Aralkyl type epoxy resins, naphthylene ether type epoxy resins, naphthalene type tetrafunctional epoxy resins and naphthol type epoxy resins are more preferred.

  Specific examples of the solid epoxy resin include “HP4032H” (naphthalene type epoxy resin) manufactured by DIC; “HP-4700” and “HP-4710” (naphthalene type tetrafunctional epoxy resin) manufactured by DIC; "N-690" (cresol novolac type epoxy resin) manufactured by DIC; "N-695" (cresol novolac type epoxy resin) manufactured by DIC; "HP-7200" (dicyclopentadiene type epoxy resin) manufactured by DIC; “HP-7200HH”, “HP-7200H”, “EXA-7311”, “EXA-7311-G3”, “EXA-7311-G4”, “EXA-7311-G4S”, “HP6000” (manufactured by DIC) Naphthylene ether type epoxy resin) “EPPN-502H” (trisphenol type epoxy resin) manufactured by Nippon Kayaku Co., Ltd. Resin); “NC7000L” (naphthol novolak type epoxy resin) manufactured by Nippon Kayaku; “NC3000H”, “NC3000”, “NC3000L”, “NC3100” (biphenylaralkyl type epoxy resin) manufactured by Nippon Kayaku; Nippon Steel “ESN475V” (naphthol type epoxy resin) manufactured by Sumikin Chemical Co., Ltd .; “ESN485” (naphthol novolak type epoxy resin) manufactured by Nippon Steel & Sumikin Chemical Co., Ltd .; “YX4000H”, “YX4000”, “YL6121” (biphenyl) manufactured by Mitsubishi Chemical Corporation Type epoxy resin); “YX4000HK” (bixylenol type epoxy resin) manufactured by Mitsubishi Chemical; “YX8800” (anthracene type epoxy resin) manufactured by Mitsubishi Chemical; “PG-100” and “CG” manufactured by Osaka Gas Chemical -500 "(bisphenol F type epoxy resin); “YL7760” (bisphenol AF type epoxy resin) manufactured by Mitsubishi Chemical; “YL7800” (fluorene type epoxy resin) manufactured by Mitsubishi Chemical; “jER1010” (solid bisphenol A) manufactured by Mitsubishi Chemical Type epoxy resin); “jER1031S” (tetraphenylethane type epoxy resin) manufactured by Mitsubishi Chemical Corporation. These may be used alone or in combination of two or more.

  (A) When using a combination of a liquid epoxy resin and a solid epoxy resin as the epoxy resin, their mass ratio (liquid epoxy resin: solid epoxy resin) is preferably 1: 0.1 to 1:15, More preferably, it is 1: 0.5 to 1:10, and particularly preferably 1: 1 to 1: 8. When the mass ratio between the liquid epoxy resin and the solid epoxy resin is in the above range, preferable adhesiveness can be obtained when the adhesive is used in the form of an adhesive film. Moreover, when using it with the form of an adhesive film, sufficient flexibility is acquired and a handleability can be improved. Furthermore, the breaking strength of the cured product of the resin composition can be effectively increased.

  (A) The epoxy equivalent of an epoxy resin becomes like this. Preferably it is 50-5000, More preferably, it is 50-3000, More preferably, it is 80-2000, Most preferably, it is 110-1000. (A) When the epoxy equivalent of an epoxy resin exists in the said range, the crosslinked density of the hardened | cured material of a resin composition becomes sufficient, and an insulating layer with small surface roughness can be obtained. The epoxy equivalent is the mass of a resin containing 1 equivalent of an epoxy group, and can be measured according to JIS K7236.

  (A) The weight average molecular weight of the epoxy resin is preferably 100 to 5000, more preferably 250 to 3000, and further preferably 400 to 1500 from the viewpoint of remarkably obtaining the desired effect of the present invention. The weight average molecular weight of a resin such as an epoxy resin is a weight average molecular weight in terms of polystyrene measured by a gel permeation chromatography (GPC) method.

  The amount of the (A) epoxy resin in the resin composition is preferably 5% by mass or more with respect to 100% by mass of the nonvolatile component in the resin composition from the viewpoint of obtaining an insulating layer exhibiting good mechanical strength and insulation reliability. More preferably, it is 8% by mass or more, particularly preferably 10% by mass or more, preferably 70% by mass or less, more preferably 50% by mass or less, and particularly preferably 30% by mass or less.

[3. (B) Curing agent]
The curing agent as the component (B) usually has a function of reacting with the epoxy resin (A) to cure the resin composition. Examples of the (B) curing agent include an active ester curing agent, a phenol curing agent, a naphthol curing agent, a benzoxazine curing agent, a cyanate ester curing agent, and a carbodiimide curing agent. . Moreover, a hardening | curing agent may be used individually by 1 type, or may use 2 or more types together.

  As the active ester curing agent, a compound having one or more active ester groups in one molecule can be used. Among them, as the active ester curing agent, two or more ester groups having high reaction activity such as phenol esters, thiophenol esters, N-hydroxyamine esters, and heterocyclic hydroxy compound esters in one molecule are used. The compound which has is preferable. The active ester curing agent is preferably obtained by a condensation reaction between a carboxylic acid compound and / or a thiocarboxylic acid compound and a hydroxy compound and / or a thiol compound. In particular, from the viewpoint of improving heat resistance, an active ester curing agent obtained from a carboxylic acid compound and a hydroxy compound is preferable, and an active ester curing agent obtained from a carboxylic acid compound and a phenol compound and / or a naphthol compound is more preferable. .

  Examples of the carboxylic acid compound include benzoic acid, acetic acid, succinic acid, maleic acid, itaconic acid, phthalic acid, isophthalic acid, terephthalic acid, and pyromellitic acid.

  Examples of the phenol compound or naphthol compound include hydroquinone, resorcin, bisphenol A, bisphenol F, bisphenol S, phenolphthaline, methylated bisphenol A, methylated bisphenol F, methylated bisphenol S, phenol, o-cresol, m- Cresol, p-cresol, catechol, α-naphthol, β-naphthol, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, phloroglucin, Benzenetriol, dicyclopentadiene type diphenol compound, phenol novolac and the like can be mentioned. Here, the “dicyclopentadiene type diphenol compound” refers to a diphenol compound obtained by condensing two molecules of phenol with one molecule of dicyclopentadiene.

  Preferable specific examples of the active ester curing agent include an active ester compound containing a dicyclopentadiene type diphenol structure, an active ester compound containing a naphthalene structure, an active ester compound containing an acetylated product of phenol novolac, and a benzoylated product of phenol novolac. The active ester compound containing is mentioned. Of these, active ester compounds containing a naphthalene structure and active ester compounds containing a dicyclopentadiene type diphenol structure are more preferred. The “dicyclopentadiene type diphenol structure” represents a divalent structural unit composed of phenylene-dicyclopentylene-phenylene.

  As a commercial product of an active ester type curing agent, for example, as an active ester compound containing a dicyclopentadiene type diphenol structure, “EXB9451”, “EXB9460”, “EXB9460S”, “HPC-8000-65T”, “HPC-” 8000H-65TM "," EXB-8000L-65TM "," EXB-8150-65T "(manufactured by DIC);" EXB9416-70BK "(manufactured by DIC) as an active ester compound containing a naphthalene structure; Phenol novolac acetylated product "DC808" (manufactured by Mitsubishi Chemical Corp.) as an active ester compound containing: YLH1026 (manufactured by Mitsubishi Chemical Corp.) as an active ester compound containing a benzoylated phenol novolac; an active ester which is an acetylated phenol novolac “DC808” (manufactured by Mitsubishi Chemical Corporation) as a curing agent; “YLH1026” (manufactured by Mitsubishi Chemical Corporation), “YLH1030” (manufactured by Mitsubishi Chemical Corporation), “YLH1048” (manufactured by Mitsubishi Chemical Corporation) as benzoylated phenol novolac Mitsubishi Chemical Co., Ltd.);

  As a phenol type hardening | curing agent and a naphthol type | system | group hardening | curing agent, what has a novolak structure from a heat resistant and water-resistant viewpoint is preferable. Further, from the viewpoint of adhesion between the insulating layer and the conductor layer, a nitrogen-containing phenol-based curing agent is preferable, and a triazine skeleton-containing phenol-based curing agent is more preferable.

  Specific examples of the phenol-based curing agent and the naphthol-based curing agent include, for example, “MEH-7700”, “MEH-7810”, “MEH-7785” manufactured by Meiwa Kasei Co., Ltd .; “NHN” manufactured by Nippon Kayaku Co., Ltd. "CBN", "GPH": "SN170", "SN180", "SN190", "SN475", "SN485", "SN495", "SN-495V", "SN375" manufactured by Nippon Steel & Sumikin Chemical; “TD-2090”, “LA-7052”, “LA-7054”, “LA-1356”, “LA-3018-50P”, “EXB-9500”, and the like.

  Specific examples of the benzoxazine-based curing agent include “HFB2006M” manufactured by Showa Polymer Co., Ltd. and “Pd” and “Fa” manufactured by Shikoku Kasei Kogyo Co., Ltd.

  Examples of the cyanate ester curing agent include bisphenol A dicyanate, polyphenol cyanate, oligo (3-methylene-1,5-phenylene cyanate), 4,4′-methylenebis (2,6-dimethylphenyl cyanate), 4,4. '-Ethylidene diphenyl dicyanate, hexafluorobisphenol A dicyanate, 2,2-bis (4-cyanate) phenylpropane, 1,1-bis (4-cyanatephenylmethane), bis (4-cyanate-3,5-dimethyl) Bifunctional cyanate resins such as phenyl) methane, 1,3-bis (4-cyanatephenyl-1- (methylethylidene)) benzene, bis (4-cyanatephenyl) thioether, and bis (4-cyanatephenyl) ether; Phenol novolac and Polyfunctional cyanate resin derived from resol novolac; prepolymer these cyanate resin is partially triazine of; and the like. Specific examples of the cyanate ester curing agent include “PT30” and “PT60” (phenol novolac type polyfunctional cyanate ester resin), “ULL-950S” (polyfunctional cyanate ester resin), and “BA230” manufactured by Lonza Japan. , “BA230S75” (a prepolymer in which part or all of bisphenol A dicyanate is triazine-modified into a trimer), and the like.

  Specific examples of the carbodiimide curing agent include “V-03” and “V-07” manufactured by Nisshinbo Chemical Co., Ltd.

  Among the above, from the viewpoint of remarkably obtaining the desired effect of the present invention, (B) the curing agent is one or more selected from the group consisting of an active ester curing agent, a phenol curing agent and a naphthol curing agent. A curing agent is preferred. Furthermore, an active ester curing agent is particularly preferable from the viewpoint of effectively reducing the dielectric constant of the cured product of the resin composition. Therefore, it is preferable that the (B) curing agent used for the resin composition includes an active ester curing agent.

  When using an active ester type curing agent, the amount of the active ester type curing agent with respect to 100% by mass of the (B) curing agent is preferably 10% by mass or more, more preferably 20% by mass or more, and further preferably 30% by mass or more. Yes, preferably 80% by mass or less, more preferably 70% by mass or less, and still more preferably 60% by mass or less. When the amount of the active ester curing agent is within the above range, the desired effect of the present invention can be remarkably obtained, and in particular, the dielectric constant of the cured product of the resin composition can be effectively reduced.

  The amount of the (B) curing agent in the resin composition is preferably 0.1% by mass or more with respect to 100% by mass of the nonvolatile component in the resin composition, from the viewpoint of remarkably obtaining the desired effect of the present invention. Preferably it is 0.5 mass% or more, More preferably, it is 1 mass% or more, Preferably it is 40 mass% or less, More preferably, it is 30 mass% or less, More preferably, it is 20 mass% or less.

  When the number of epoxy groups in the (A) epoxy resin is 1, the number of active groups in the (B) curing agent is preferably 0.1 or more, more preferably 0.2 or more, still more preferably 0.3 or more, preferably Is 1.5 or less, more preferably 1.2 or less, still more preferably 1 or less, and particularly preferably 0.8 or less. Here, “(A) the number of epoxy groups of the epoxy resin” is a value obtained by adding up all the values obtained by dividing the mass of the nonvolatile component of the (A) epoxy resin present in the resin composition by the epoxy equivalent. Further, “(B) the number of active groups of the curing agent” is a value obtained by adding up all values obtained by dividing the mass of the non-volatile component of the (B) curing agent present in the resin composition by the active group equivalent. (A) When the number of active groups of (B) curing agent when the number of epoxy groups of the epoxy resin is 1, the desired effect of the present invention can be remarkably obtained, and more usually, the resin composition The heat resistance of the cured product is further improved.

[4. (C) Rubber particles]
The rubber particles as the component (C) are particles containing rubber and usually function as an organic filler having rubber elasticity. By containing the rubber particles (C) in a predetermined amount, it is possible to achieve suppression of the resin flow of the resin composition and improvement of the adhesion of the cured product of the resin composition to the conductor layer after the HAST test. . The amount of (C) rubber particles in the resin composition is usually 0.1% by mass or more, preferably 0.3% by mass or more, and particularly preferably 0.5% by mass with respect to 100% by mass of the nonvolatile component in the resin composition. It is usually not more than 3% by mass, preferably not more than 2.6% by mass, particularly preferably not more than 2.2% by mass.

  (C) As rubber particles, for example, rubber particles that are not dissolved in an organic solvent described later and are not compatible with (A) an epoxy resin and (B) a curing agent are used. Such (C) rubber particles can exist in a dispersed state in the resin varnish and the resin composition.

  Examples of the rubber particles include core-shell type rubber particles, cross-linked acrylonitrile butadiene rubber particles, cross-linked styrene butadiene rubber particles, and acrylic rubber particles. Among these, core-shell type rubber particles are preferable from the viewpoint of remarkably obtaining the desired effect of the present invention.

  The core-shell type rubber particles are rubber particles including a shell layer on the surface of the particle and a core layer inside the shell layer. For example, core-shell type rubber particles including a shell layer formed of a polymer having a relatively high glass transition temperature and a core layer formed of a polymer having a relatively low glass transition temperature can be mentioned. Among these, core-shell type rubber particles in which the shell layer is formed of a glassy polymer and the core layer is formed of a rubbery polymer are preferable. Such a core-shell type rubber particle can suppress aggregation of rubber particles or increase the dispersibility of the rubber particles in resin components such as (A) an epoxy resin and (B) a curing agent by the shell layer, and Excellent rubber elasticity can be exhibited by the core layer.

  The core-shell type rubber particles may have a two-layer structure including only the shell layer and the core layer, but may further have a structure of three or more layers including an arbitrary layer. For example, the core-shell type rubber particles may include an arbitrary layer between the shell layer and the core layer, and may include an arbitrary layer inside the core layer. To give a specific example, the core-shell type rubber particles include a shell layer formed of a glassy polymer, a core layer formed of a rubbery polymer, and an arbitrary layer of a glassy polymer formed inside the core layer. It may have a three-layer structure including these layers.

  In the core-shell type rubber particles, examples of the glassy polymer include acrylic polymers such as polymethyl methacrylate; styrene polymers such as polystyrene and styrene / divinylbenzene copolymer; Among these, acrylic polymers are preferable, and polymethyl methacrylate is particularly preferable. On the other hand, examples of the rubber-like polymer include acrylic rubbers such as homopolymers or copolymers of acrylic monomers such as butyl acrylate; butadiene rubbers such as polybutadiene; isoprene rubber; butyl rubber; Among these, acrylic rubber and butadiene rubber are preferable, and acrylic rubber is particularly preferable. Here, the term “acrylic monomer” includes acrylic acid esters, methacrylic acid esters, and combinations thereof.

  Specific examples of the core-shell type rubber particles include staphyloids “AC3832”, “AC3816N”, “IM401-modified 7-17” manufactured by Aika Industry Co., Ltd .; “Metablene KW-4426” manufactured by Mitsubishi Chemical Co., Ltd .; Dow Chemical Japan Examples include Paraloid “EXL-2655” manufactured by the company.

Specific examples of the crosslinked acrylonitrile butadiene rubber (NBR) particles include “XER-91” (average particle size 0.5 μm) manufactured by JSR.
Specific examples of the crosslinked styrene butadiene rubber (SBR) particles include “XSK-500” (average particle size 0.5 μm) manufactured by JSR.
Specific examples of the acrylic rubber particles include metablene “W300A” (average particle size 0.1 μm), “W450A” (average particle size 0.2 μm) manufactured by Mitsubishi Chemical Corporation.

  (C) Rubber particles may be used alone or in combination of two or more.

  (C) The rubber particles usually have an effect of increasing the toughness of the cured product of the resin composition. Therefore, the insulating layer formed of the cured product of the resin composition containing (C) rubber particles is excellent in mechanical strength. Moreover, (C) rubber particles usually have a stress relaxation action. Therefore, in the insulating layer formed of the cured resin composition containing the rubber particles (C), the internal stress generated during the formation is relaxed by the rubber particles (C). Therefore, since the residual stress of the insulating layer can be reduced, the mechanical strength of the insulating layer can be increased also by this.

  (C) The rubber particles can be produced, for example, by increasing the molecular weight of the rubber component to a level at which it does not dissolve in the organic solvent and the resin component, and forming the particles. In particular, the core-shell type rubber particles can be produced, for example, by seed polymerization of one type or two or more types of monomers corresponding to each layer in a plurality of stages.

  (C) The average particle size of the rubber particles is preferably 0.005 μm or more, more preferably 0.2 μm or more, preferably 1 μm or less, more preferably 0.6 μm or less. (C) The average particle diameter of the rubber particles can be measured using a dynamic light scattering method. Specifically, rubber particles are uniformly dispersed in a suitable organic solvent by a method such as ultrasonic waves, and the particle size distribution of the rubber particles using a concentrated particle size analyzer (“FPAR-1000” manufactured by Otsuka Electronics Co., Ltd.). Can be measured on a mass basis, and the median diameter can be measured as an average particle diameter.

[5. (D) Fluorine-based filler]
(D) The fluorine-type filler as a component is a filler which contains the compound containing a fluorine atom as a material. The fluorine-based filler is generally particles. Therefore, as the (D) fluorine-based filler, particles containing a compound containing a fluorine atom are usually used.

  (D) As the material of the fluorine-based filler, a fluorine-based polymer is preferable from the viewpoint of reducing the dielectric constant of the insulating layer. Therefore, as the (D) fluorine-based filler, fluorine-based polymer particles are preferable.

  Examples of the fluoropolymer include polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA), perfluoroethylene propene copolymer (FEP), ethylene-tetrafluoroethylene copolymer (ETFE), tetrafluoroethylene-perfluorodiode. Xol copolymer (TFE / PDD), polyvinylidene fluoride (PVDF), polychlorotrifluoroethylene (PCTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), polyvinyl fluoride (PVF). These may be used alone or in combination of two or more.

  Among these, from the viewpoint of particularly reducing the dielectric constant of the insulating layer, polytetrafluoroethylene is preferable as the fluoropolymer. Therefore, as the (D) fluorine-based filler, polytetrafluoroethylene particles as particles containing polytetrafluoroethylene are preferable.

  The weight average molecular weight of the fluoropolymer is preferably 5000000 or less, more preferably 4000000 or less, and particularly preferably 3000000 or less, from the viewpoint of remarkably obtaining the desired effect of the present invention.

  (D) The average particle diameter of the fluorine-based filler is preferably 0.05 μm or more, more preferably 0.08 μm or more, particularly preferably 0.10 μm or more, preferably 10 μm or less, more preferably 5 μm or less, particularly Preferably it is 4 micrometers or less. When the average particle diameter of the (D) fluorine-based filler is in the above range, the desired effect of the present invention can be remarkably obtained, and usually (D) the fluorine-based filler in the resin composition. The dispersibility can be improved.

  (D) The average particle diameter of particles such as fluorine-based fillers can be measured by a laser diffraction / scattering method based on the Mie scattering theory. Specifically, the particle size distribution of the particles is measured on a volume basis by a laser diffraction / scattering particle size distribution measuring apparatus, and the average particle size can be obtained as the median diameter from the particle size distribution. As the measurement sample, one in which particles are dispersed in a solvent by ultrasonic waves can be preferably used. As the laser diffraction / scattering particle size distribution measuring apparatus, “LA-500” manufactured by Horiba, Ltd. or the like can be used.

  (D) Examples of commercially available fluorine-based fillers include “Lublon L-2”, “Lublon L-5” and “Lublon L-5F” manufactured by Daikin Industries, Ltd .; “Fluon PTFE L-170JE” manufactured by Asahi Glass Co., Ltd. ”,“ FluonPTFEEL-172JE ”,“ FluonPTFE L-173JE ”;“ KTL-500F ”,“ KTL-2N ”,“ KTL-1N ”manufactured by Kitamura Co., Ltd .;“ TLP10F-1 ”manufactured by Mitsui DuPont Fluorochemical Co., Ltd. And the like.

  (D) The fluorine-based filler may be surface-treated. For example, (D) the fluorine-based filler may be surface-treated with an arbitrary surface treatment agent. Examples of the surface treatment agent include surfactants such as nonionic surfactants, amphoteric surfactants, cationic surfactants and anionic surfactants; inorganic fine particles. From the viewpoint of affinity, it is preferable to use a fluorosurfactant as the surface treatment agent. Further, as the above-mentioned fluorine-based surfactant, a suitable non-particulate fluorine-based polymer or fluorine-based oligomer may be used. Specific examples of the fluorosurfactant include “Surflon S-243” (perfluoroalkyl ethylene oxide adduct) manufactured by AGC Seimi Chemical Co .; “Megafac F-251” and “Megafac F-” manufactured by DIC "477", "Megafuck F-553", "Megafuck R-40", "Megafuck R-43", "Megafuck R-94"; "FTX-218", "Futgent 610FM" manufactured by Neos ;

  The amount of (D) fluorine-based filler in the resin composition is preferably 10% by mass or more, more preferably 15% by mass or more, and particularly preferably 20% by mass with respect to 100% by mass of the nonvolatile component in the resin composition. It is above, Preferably it is 80 mass% or less, More preferably, it is 60 mass% or less, Most preferably, it is 40 mass% or less. (D) When the amount of the fluorine-based filler is in the above range, the desired effect of the present invention can be remarkably obtained, and in particular, the dielectric constant of the cured product of the resin composition can be effectively reduced. it can.

  In particular, when the resin composition contains (E) an inorganic filler, the amount of (D) fluorine-based filler in the resin composition is 100 mass in total of (D) fluorine-based filler and (E) inorganic filler. % Is preferably 20% by mass or more, more preferably 30% by mass or more, particularly preferably 35% by mass or more, preferably 90% by mass or less, more preferably 70% by mass or less, and particularly preferably 50% by mass. % Or less. (D) When the amount of the fluorine-based filler is in the above range, the desired effect of the present invention can be remarkably obtained, and in particular, the dielectric constant of the cured product of the resin composition can be effectively reduced. it can.

[6. (E) Inorganic filler]
The resin composition may include (E) an inorganic filler as an optional component in addition to the components described above. Examples of the inorganic filler material as the component (E) include silica, alumina, glass, cordierite, silicon oxide, barium sulfate, barium carbonate, talc, clay, mica powder, zinc oxide, hydrotalcite, Boehmite, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, boron nitride, aluminum nitride, manganese nitride, aluminum borate, strontium carbonate, strontium titanate, calcium titanate, magnesium titanate, bismuth titanate , Titanium oxide, zirconium oxide, barium titanate, barium zirconate titanate, barium zirconate, calcium zirconate, zirconium phosphate, and zirconium tungstate phosphate. Among these, silica is particularly preferable from the viewpoint of remarkably obtaining the desired effect of the present invention. Examples of the silica include amorphous silica, fused silica, crystalline silica, synthetic silica, and hollow silica. Among these, spherical silica is preferable. (E) An inorganic filler may be used individually by 1 type, and may be used in combination of 2 or more types.

  Usually, the (E) inorganic filler is contained in the resin composition in the form of particles. (E) The average particle diameter of the inorganic filler is preferably 0.01 μm or more, more preferably 0.05 μm or more, particularly preferably 0.1 μm or more, from the viewpoint of remarkably obtaining the desired effect of the present invention. Preferably it is 5.0 micrometers or less, More preferably, it is 2.0 micrometers or less, More preferably, it is 1.0 micrometers or less. Moreover, (E) Since the average particle diameter of an inorganic filler exists in the said range, the circuit embedding property of a resin composition layer can be improved normally, or the surface roughness of an insulating layer can be made small.

  (E) Examples of commercially available inorganic fillers include “SP60-05” and “SP507-05” manufactured by Nippon Steel & Sumikin Materials; “YC100C”, “YA050C”, and “YA050C-MJE” manufactured by Admatechs. "YA010C"; Denka's "UFP-30"; Tokuyama's "Silfil NSS-3N", "Silfil NSS-4N", "Silfil NSS-5N"; Admatechs' "SC2500SQ" “SO-C4”, “SO-C2”, “SO-C1”; and the like. (E) The average particle diameter of the inorganic filler can be measured by a laser diffraction / scattering method based on the Mie scattering theory as in the case of (D) the fluorine-based filler.

  (E) The inorganic filler may be surface-treated with an arbitrary surface treatment agent. Examples of the surface treatment agent include coupling agents such as aminosilane coupling agents, epoxysilane coupling agents, mercaptosilane coupling agents, titanate coupling agents; alkoxysilane compounds; organosilazane compounds; It is done. By performing the surface treatment with these surface treatment agents, (E) the moisture resistance and dispersibility of the inorganic filler can be enhanced.

  Examples of commercially available surface treatment agents include “KBM403” (3-glycidoxypropyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., “KBM803” (3-mercaptopropyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., Shin-Etsu. “KBE903” (3-aminopropyltriethoxysilane) manufactured by Chemical Industry Co., Ltd. “KBM573” (N-phenyl-3-aminopropyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., “SZ-31” manufactured by Shin-Etsu Chemical Co., Ltd. ( Hexamethyldisilazane), “KBM-103” (phenyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., “KBM-4803” (long-chain epoxy type silane coupling agent) manufactured by Shin-Etsu Chemical Co., Ltd., and the like. Moreover, a surface treating agent may be used individually by 1 type, and may be used in combination of 2 or more types.

The degree of the surface treatment with the surface treatment agent can be evaluated by the amount of carbon per unit surface area of the (E) inorganic filler. (E) carbon content per unit surface area of the inorganic filler, (E) from the viewpoint of the dispersibility of the inorganic filler improved, preferably 0.02 mg / ^{m 2} or more, more preferably 0.1 mg / ^{m 2} or more, Particularly preferably, it is 0.2 mg / m ² or more. On the other hand, from the viewpoint of suppressing an increase in the melt viscosity of the resin varnish and the sheet form, the carbon amount is preferably 1 mg / m ² or less, more preferably 0.8 mg / m ² or less, particularly preferably. 0.5 mg / m ² or less.

  (E) The amount of carbon per unit surface area of the inorganic filler is determined by washing the surface-treated (E) inorganic filler with a solvent (for example, methyl ethyl ketone (hereinafter sometimes abbreviated as “MEK”)). Can be measured. Specifically, a sufficient amount of MEK and (E) inorganic filler surface-treated with a surface treatment agent are mixed and ultrasonically cleaned at 25 ° C. for 5 minutes. Next, after removing the supernatant and drying the non-volatile components, the carbon amount per unit surface area of the (E) inorganic filler can be measured using a carbon analyzer. As the carbon analyzer, “EMIA-320V” manufactured by HORIBA, Ltd. can be used.

  The amount of the (E) inorganic filler in the resin composition is preferably 5% by mass or more, more preferably 10% by mass or more, and further preferably 15% by mass or more with respect to 100% by mass of the nonvolatile component in the resin composition. More preferably, it is 20% by mass or more, preferably 70% by mass or less, more preferably 60% by mass or less, still more preferably 50% by mass or less, and still more preferably 40% by mass or less. (E) Since the thermal expansion coefficient of the hardened | cured material of a resin composition can be made low because the quantity of an inorganic filler is more than the lower limit of the said range, the curvature of an insulating layer can be suppressed. Moreover, (E) When the quantity of an inorganic filler is below the upper limit of the said range, the mechanical strength of the hardened | cured material of a resin composition can be improved, and especially the tolerance with respect to elongation can be improved.

[7. (F) Thermoplastic resin]
In addition to the components described above, the resin composition may contain (F) a thermoplastic resin as an optional component. Examples of the thermoplastic resin as the component (F) include phenoxy resin, polyvinyl acetal resin, polyolefin resin, polybutadiene resin, polyimide resin, polyamideimide resin, polyetherimide resin, polysulfone resin, polyethersulfone resin, and polyphenylene ether resin. , Polycarbonate resin, polyether ether ketone resin, and polyester resin. Among these, phenoxy resin is preferable from the viewpoint of remarkably obtaining the desired effect of the present invention. A thermoplastic resin may be used individually by 1 type, and may be used in combination of 2 or more types.

  Examples of the phenoxy resin include bisphenol A skeleton, bisphenol F skeleton, bisphenol S skeleton, bisphenolacetophenone skeleton, novolac skeleton, biphenyl skeleton, fluorene skeleton, dicyclopentadiene skeleton, norbornene skeleton, naphthalene skeleton, anthracene skeleton, adamantane skeleton, terpene Examples thereof include a phenoxy resin having one or more skeletons selected from the group consisting of a skeleton and a trimethylcyclohexane skeleton. The terminal of the phenoxy resin may be any functional group such as a phenolic hydroxyl group or an epoxy group.

  Specific examples of the phenoxy resin include “1256” and “4250” (both bisphenol A skeleton-containing phenoxy resins) manufactured by Mitsubishi Chemical; “YX8100” (bisphenol S skeleton-containing phenoxy resin) manufactured by Mitsubishi Chemical; "YX6954" (bisphenol acetophenone skeleton-containing phenoxy resin) manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd. "FX280" and "FX293" manufactured by Nippon Steel & Sumikin Chemical Co., Ltd .; “YL7769BH30”, “YL6794”, “YL7213”, “YL7290”, “YL7891BH30” and “YL7482” may be mentioned.

  (F) The polystyrene-reduced weight average molecular weight of the thermoplastic resin is preferably 8000 or more, more preferably 10,000 or more, particularly preferably 20000 or more, preferably 70000 from the viewpoint of remarkably obtaining the desired effect of the present invention. Below, more preferably 60000 or less, particularly preferably 50000 or less. (F) The polystyrene equivalent weight average molecular weight of the thermoplastic resin can be measured by a gel permeation chromatography (GPC) method.

  When (F) a thermoplastic resin is used, the amount of the (F) thermoplastic resin in the resin composition is preferably 0.5% by mass or more, more preferably, 100% by mass of the non-volatile component in the resin composition. It is 0.6 mass% or more, More preferably, it is 0.7 mass% or more, Preferably it is 15 mass% or less, More preferably, it is 12 mass% or less, More preferably, it is 10 mass% or less.

[8. (G) Curing accelerator]
In addition to the components described above, the resin composition may contain (G) a curing accelerator as an optional component. (G) By using a curing accelerator, curing can be accelerated when the resin composition is cured.

  (G) As a hardening accelerator, a phosphorus hardening accelerator, an amine hardening accelerator, an imidazole hardening accelerator, a guanidine hardening accelerator, a metal hardening accelerator, a peroxide hardening accelerator is mentioned, for example. It is done. Among these, phosphorus-based curing accelerators, amine-based curing accelerators, imidazole-based curing accelerators, and metal-based curing accelerators are preferable, amine-based curing accelerators, imidazole-based curing accelerators, and metal-based curing accelerators are more preferable. A system curing accelerator is particularly preferred. (G) A hardening accelerator may be used individually by 1 type, and may be used in combination of 2 or more types.

  Examples of phosphorus curing accelerators include triphenylphosphine, phosphonium borate compounds, tetraphenylphosphonium tetraphenylborate, n-butylphosphonium tetraphenylborate, tetrabutylphosphonium decanoate, (4-methylphenyl) triphenylphosphonium thiocyanate. , Tetraphenylphosphonium thiocyanate, and butyltriphenylphosphonium thiocyanate. Of these, triphenylphosphine and tetrabutylphosphonium decanoate are preferable.

  Examples of amine curing accelerators include trialkylamines such as triethylamine and tributylamine, 4-dimethylaminopyridine, benzyldimethylamine, 2,4,6, -tris (dimethylaminomethyl) phenol, 1,8-diazabicyclo. (5, 4, 0) -undecene. Of these, 4-dimethylaminopyridine and 1,8-diazabicyclo (5,4,0) -undecene are preferable.

  Examples of the imidazole curing accelerator include 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 1,2-dimethylimidazole, 2-ethyl-4-methylimidazole, 1,2-dimethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1-cyanoethyl-2-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-undecylimidazolium trimellitate, 1-cyanoethyl- 2 Phenylimidazolium trimellitate, 2,4-diamino-6- [2'-methylimidazolyl- (1 ')]-ethyl-s-triazine, 2,4-diamino-6- [2'-undecylimidazolyl- (1 ′)]-ethyl-s-triazine, 2,4-diamino-6- [2′-ethyl-4′-methylimidazolyl- (1 ′)]-ethyl-s-triazine, 2,4-diamino- 6- [2′-Methylimidazolyl- (1 ′)]-ethyl-s-triazine isocyanuric acid adduct, 2-phenylimidazole isocyanuric acid adduct, 2-phenyl-4,5-dihydroxymethylimidazole, 2-phenyl- 4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrolo [1,2-a] benzimidazole, 1-dodecyl-2-me Le benzyl-imidazolium chloride, 2-methyl-imidazoline, 2-phenyl imidazole compounds of imidazoline and the like; and, adducts of imidazole compounds and epoxy resin; and the like. Of these, 2-ethyl-4-methylimidazole and 1-benzyl-2-phenylimidazole are preferable.

  A commercial item may be used as an imidazole series hardening accelerator, for example, "P200-H50" by Mitsubishi Chemical Corporation is mentioned.

  Examples of the guanidine curing accelerator include dicyandiamide, 1-methylguanidine, 1-ethylguanidine, 1-cyclohexylguanidine, 1-phenylguanidine, 1- (o-tolyl) guanidine, dimethylguanidine, diphenylguanidine, trimethylguanidine, Tetramethylguanidine, pentamethylguanidine, 1,5,7-triazabicyclo [4.4.0] dec-5-ene, 7-methyl-1,5,7-triazabicyclo [4.4.0] Deca-5-ene, 1-methyl biguanide, 1-ethyl biguanide, 1-n-butyl biguanide, 1-n-octadecyl biguanide, 1,1-dimethyl biguanide, 1,1-diethyl biguanide, 1-cyclohexyl biguanide, 1 -Allyl biguanide, 1-phenyl biguanide, 1- ( - tolyl), and the biguanide. Of these, dicyandiamide and 1,5,7-triazabicyclo [4.4.0] dec-5-ene are preferred.

  As a metal type hardening accelerator, the organometallic complex or organometallic salt of metals, such as cobalt, copper, zinc, iron, nickel, manganese, tin, is mentioned, for example. Specific examples of the organometallic complex include organic cobalt complexes such as cobalt (II) acetylacetonate and cobalt (III) acetylacetonate, organic copper complexes such as copper (II) acetylacetonate, and zinc (II) acetylacetonate. Organic zinc complexes such as iron (III) acetylacetonate, organic nickel complexes such as nickel (II) acetylacetonate, and organic manganese complexes such as manganese (II) acetylacetonate. Examples of the organic metal salt include zinc octylate, tin octylate, zinc naphthenate, cobalt naphthenate, tin stearate, and zinc stearate.

  Examples of the peroxide curing accelerator include cyclohexanone peroxide, tert-butyl peroxybenzoate, methyl ethyl ketone peroxide, dicumyl peroxide, tert-butyl cumyl peroxide, di-tert-butyl peroxide, diisopropylbenzene hydro Examples thereof include peroxide, cumene hydroperoxide, and tert-butyl hydroperoxide.

  A commercially available product can be used as the peroxide curing accelerator, and examples thereof include “Park Mill D” manufactured by NOF Corporation.

  When the (G) curing accelerator is used, the amount of the (G) curing accelerator in the resin composition is based on 100% by mass of the non-volatile component in the resin composition from the viewpoint of remarkably obtaining the desired effect of the present invention. , Preferably 0.01% by mass or more, more preferably 0.03% by mass or more, particularly preferably 0.05% by mass or more, preferably 3% by mass or less, more preferably 2% by mass or less, particularly preferably. 1% by mass or less.

[9. (H) Fluorine polymer or fluorine oligomer]
In addition to the components described above, the resin composition may contain a non-particulate (H) fluorine-based polymer or fluorine-based oligomer as an optional component. As the fluorine polymer and fluorine oligomer as the component (H), only a fluorine polymer may be used, only a fluorine oligomer may be used, or a combination of a fluorine polymer and a fluorine oligomer may be used. This component (H) is a component that can be made non-particulate in the resin composition, and is usually excellent in compatibility with a resin component such as (A) an epoxy resin. Moreover, since (H) component contains a fluorine atom in the molecule | numerator, it has high affinity with respect to (D) fluorine-type filler. Therefore, the (H) component functions as a surfactant at the interface between the (D) fluorine-based filler and the resin component, and can increase the dispersibility of the (D) fluorine-based filler. And the surface roughness of the insulating layer after a roughening process can be made small by improving the dispersibility of (D) fluorine-type filler in this way. Furthermore, the dielectric constant of the hardened | cured material of a resin composition can be normally lowered | hung by using (H) component.

  Examples of the fluorine-based polymer include “LE-605” manufactured by Kyoeisha Chemical Co., Ltd. Examples of the fluorine-based oligomer include DIC's MegaFuck “F-556”, “F-558”, “F-561”, “F-563”, “F-569”, “DS-21”, “ R-40 "," R-41 "and the like. Moreover, (H) component may be used individually by 1 type, and may be used in combination of 2 or more types.

  When the component (H) is used, the amount of the component (H) in the resin composition is preferably 0.1% by mass or more, more preferably 0.5% by mass with respect to 100% by mass of the nonvolatile component in the resin composition. % Or more, particularly preferably 1.0% by mass or more, preferably 10% by mass or less, more preferably 5% by mass or less, and particularly preferably 3% by mass or less. When the amount of the component (H) is in the above range, the surface roughness of the insulating layer after the roughening treatment can be reduced, or the dielectric constant of the cured product of the resin composition can be effectively reduced.

[10. (I) Coupling agent]
In addition to the components described above, the resin composition may contain (I) a coupling agent as an optional component. (I) Since the dispersibility of the inorganic filler (E) can be increased by using the coupling agent, the surface roughness of the insulating layer after the roughening treatment can be reduced.

  (I) As a coupling agent, the same thing as the example quoted as the surface treating agent of (E) inorganic filler is mentioned, for example. Moreover, (I) a coupling agent may be used individually by 1 type, and may be used in combination of 2 or more types.

  When (I) a coupling agent is used, the amount of (I) coupling agent in the resin composition is preferably 0.1% by mass or more, more preferably, 100% by mass of the nonvolatile component in the resin composition. It is 0.2% by mass or more, particularly preferably 0.5% by mass or more, preferably 5% by mass or less, more preferably 3% by mass or less, and particularly preferably 1% by mass or less. (I) When the amount of the coupling agent is in the above range, the surface roughness of the insulating layer after the roughening treatment can be reduced.

[11. (J) Additive]
The resin composition may further contain an additive as an optional component in addition to the components described above. Examples of such additives include organometallic compounds such as organocopper compounds, organozinc compounds and organocobalt compounds; thickeners; antifoaming agents; leveling agents; adhesion-imparting agents; colorants; Is mentioned. Moreover, an additive may be used individually by 1 type and may be used combining two types of arbitrary forms.

[12. Method for producing resin composition]
The resin composition can be produced, for example, by a method in which the compounding components are mixed with a solvent as necessary and stirred using a stirring device such as a rotary mixer. In particular, when the component (H) is used, the (D) fluorine-based filler is mixed with the other components after mixing the (D) fluorine-based filler and the (H) component. It is preferable to mix (H) component separately with other components. Thereby, the resin flow of a resin composition can be suppressed especially effectively.

[13. Characteristics of resin composition]
The hardened | cured material of the resin composition mentioned above can make the dielectric constant low. Therefore, an insulating layer having a low dielectric constant can be obtained from the cured product of the resin composition. For example, when a cured product is obtained by curing the resin composition by the method described in Examples, the dielectric constant of the cured product is preferably 3.00 or less, more preferably 2.98 or less, and particularly preferably 2 97 or less. Here, the dielectric constant of the cured product can be measured by the method described in Examples.

  The resin composition described above can reduce the resin flow. Therefore, when laminating the adhesive film produced using this resin composition with the inner layer substrate, the resin composition layer is prevented from flowing out from the end portion of the adhesive film, and an unintended change in the thickness of the resin composition layer Can be suppressed. For example, when an adhesive film including a resin composition layer having a thickness of 50 μm formed of a resin composition is laminated on an inner layer substrate by the method described in the examples, the resin flow amount can be preferably 3 mm or less. And the thickness control of an insulating layer can be easily performed by using such a resin composition.

  When a conductive layer is formed on the cured product layer of the resin composition described above, the adhesion between the cured product layer and the conductive layer can be increased even after the HAST test. Therefore, according to the hardened | cured material of the resin composition mentioned above, the insulating layer which has the high adhesiveness with respect to a conductor layer can be obtained after a HAST test. For example, an insulating layer is formed with a cured product of the resin composition by the method described in the examples, and a conductor layer is formed on the insulating layer by plating. In this case, the peel strength after performing the HAST test under the conditions described in the examples can be increased. Specifically, the peel strength after the HAST test can be set to 0.3 kgf / cm or more. The peel strength can be measured by the method described in Examples. And according to such an insulating layer, the adhesiveness of an insulating layer and a conductor layer can be made favorable over a long period of time.

The inventor presumes the mechanism by which the above-described effect can be obtained by the resin composition described above as follows. However, the technical scope of the present invention is not limited by the mechanism described below.
(D) The fluorine-containing filler has an effect of lowering the dielectric constant of the cured product of the resin composition when combined with (A) an epoxy resin and (B) a curing agent.
However, (D) fluorine-based fillers generally have a low affinity with (A) resin components such as epoxy resins. Therefore, when (D) the fluorine-based filler is contained in the resin composition in combination with the resin component, the fluidity of the resin composition increases because the interaction between the fluorine-based filler and the resin component is small. Therefore, when the (D) fluorine-based filler is used, the resin flow of the resin composition is increased. On the other hand, when the resin composition contains (C) rubber particles, the (C) rubber particles have high affinity for the resin component, so that the thixotropy of the resin composition can be increased. Thereby, the fluidity | liquidity of the resin composition at the time of lamination can be suppressed, and a resin flow can be suppressed.
Further, (D) Fluorine-based filler usually has a large expansion and contraction due to temperature change. Therefore, during the HAST test, (D) the fluorine-based filler expands, and when it is cooled thereafter, (D) the fluorine-based filler contracts. If it does so, in the hardened | cured material of a resin composition, the stress by the expansion | swelling and shrinkage | contraction of (D) fluorine-type filler will arise. In general, since the affinity between the (D) fluorine-based filler and the resin component is low, the interface between the (D) fluorine-based filler and the resin component is poor in binding properties. Therefore, when a stress is applied to the cured product of the resin composition, (D) the interface between the fluorine-based filler and the resin component is liable to be peeled off, and to be a starting point of cracks. Therefore, after the HAST test, (D) peeling occurs at the interface between the fluorine-based filler and the resin component, or (D) minute cracks originate from the interface between the fluorine-based filler and the resin component. As a result, the mechanical strength of the insulating layer is lowered, and there is a tendency that the conductor layer is easily peeled off along with the destruction of the vicinity of the surface of the insulating layer. On the other hand, when (C) rubber particles are used, (C) rubber particles can absorb the stress generated by the expansion and contraction of (D) fluorine-based filler accompanying temperature change. Therefore, a decrease in the mechanical strength of the insulating layer due to the HAST test can be suppressed. Furthermore, (C) rubber particle has the effect | action which improves the toughness of the hardened | cured material of a resin composition. Therefore, even if the mechanical strength of the insulating layer is reduced by the HAST test, the reduction can be compensated by the effect of improving toughness by (C) rubber particles. Therefore, if the hardened | cured material of the resin composition mentioned above is used, the insulating layer which has the high adhesiveness with respect to a conductor layer after a HAST test can be obtained.

[14. Application of resin composition]
The resin composition of the present invention can be used as a resin composition for forming an insulating layer of a circuit board such as a printed circuit board, and in particular, build-up for forming an insulating layer in manufacturing a circuit board by a build-up method. It is preferably used as a resin composition for forming an insulating layer.

  In particular, taking advantage of the fact that an insulating layer having a low dielectric constant can be obtained, this resin composition is a resin composition for forming an insulating layer of a high-frequency circuit board (for forming an insulating layer of a high-frequency circuit board). Resin composition) can be suitably used. Especially, this resin composition can be more suitably used as a resin composition (resin composition for forming an interlayer insulating layer of a high frequency circuit board) for forming an interlayer insulating layer of a high frequency circuit board. Here, the “high frequency circuit board” means a circuit board that can be operated even with an electric signal in a high frequency band. The “high frequency band” usually means a band of 1 GHz or more, and the above resin composition is particularly effective in a band of 28 GHz to 80 GHz.

  In addition, since the insulating layer having a low dielectric constant can contribute to a reduction in the height of the circuit board, it is suitable for applications requiring a thin circuit board. Furthermore, an insulating layer having a low dielectric constant facilitates impedance control of the circuit board, and is therefore suitable for increasing the degree of design freedom of the circuit board. From this point of view, examples of suitable applications of the resin composition include circuit boards such as a mother board, an IC package board, a camera module board, and a fingerprint authentication sensor board used for portable devices. As a specific example, the fingerprint authentication sensor may include an insulating layer included in a circuit board, a plurality of electrodes formed on the insulating layer, and an insulating film in this order. In this fingerprint authentication sensor, fingerprint authentication is performed by utilizing the fact that the capacitance value of the capacitor formed by the finger, electrode and insulating film placed on the insulating film differs between the concave and convex parts of the fingerprint. Is called. In such a fingerprint authentication sensor, if the insulating layer can be made thin, the sensor itself can be miniaturized.

  The resin composition of the present invention uses a resin composition such as an adhesive film, a sheet-like laminated material such as a prepreg, a solder resist, an underfill material, a die bonding material, a semiconductor sealing material, a hole-filling resin, a component-filling resin, etc. Can be used in a wide range of applications.

[15. Adhesive film]
The resin composition described above can be applied in a varnish state and used for forming an insulating layer. However, industrially, it is preferable to use an adhesive film having a resin composition layer containing this resin composition to form an insulating layer. The adhesive film includes a support and a resin composition layer provided on the support. The resin composition layer is a layer formed of the above-described resin composition and may be referred to as an “adhesion layer”.

  The thickness of the resin composition layer is preferably 100 μm or less, more preferably 80 μm or less, still more preferably 60 μm or less, and particularly preferably 50 μm or less from the viewpoint of thinning. The minimum of the thickness of a resin composition layer is not specifically limited, For example, it may be 1 micrometer or more, 5 micrometers or more, 10 micrometers or more.

  Examples of the support include a film made of a plastic material, a metal foil, and a release paper. The support is preferably a film made of a plastic material or a metal foil.

  When a film made of a plastic material is used as the support, examples of the plastic material include polyethylene terephthalate (hereinafter sometimes referred to as “PET”) and polyethylene naphthalate (hereinafter sometimes referred to as “PEN”). Polyester; Polycarbonate (hereinafter sometimes referred to as “PC”); Acrylic polymer such as polymethyl methacrylate (hereinafter sometimes referred to as “PMMA”); Cyclic polyolefin; Triacetylcellulose (hereinafter sometimes referred to as “TAC”). ); Polyether sulfide (hereinafter sometimes referred to as “PES”); polyether ketone; polyimide; Among them, polyethylene terephthalate and polyethylene naphthalate are preferable, and polyethylene terephthalate is particularly preferable because it is inexpensive and excellent in availability.

  When metal foil is used as the support, examples of the metal foil include copper foil and aluminum foil. Among these, copper foil is preferable. As the copper foil, a foil made of a single metal of copper may be used, and a foil made of an alloy of copper and another metal (for example, tin, chromium, silver, magnesium, nickel, zirconium, silicon, titanium, etc.). It may be used.

  The support may be subjected to a treatment such as a mat treatment, a corona treatment, or an antistatic treatment on the surface to be joined to the resin composition layer.

  Moreover, as a support body, you may use the support body with a release layer which has a release layer in the surface joined to a resin composition layer. Examples of the release agent that can be used for the release layer of the support with the release layer include one or more release agents selected from the group consisting of alkyd resins, polyolefin resins, urethane resins, and silicone resins. . Examples of commercially available release agents include “SK-1”, “AL-5”, and “AL-7” manufactured by Lintec Corporation, which are alkyd resin release agents. In addition, examples of the support with a release layer include “Lumirror T60” manufactured by Toray Industries, Inc., “Purex” manufactured by Teijin Limited, “Unipeel” manufactured by Unitika, and the like.

  The thickness of the support is preferably in the range of 5 μm to 75 μm, more preferably in the range of 10 μm to 60 μm. In addition, when using a support body with a release layer, it is preferable that the thickness of the whole support body with a release layer is the said range.

  For the adhesive film, for example, a resin varnish containing an organic solvent and a resin composition is prepared, and this resin varnish is applied to a support using a coating device such as a die coater and further dried to form a resin composition layer. By making it, it can manufacture.

  Examples of organic solvents include ketone solvents such as acetone, methyl ethyl ketone (MEK), and cyclohexanone; acetate solvents such as ethyl acetate, butyl acetate, cellosolve acetate, propylene glycol monomethyl ether acetate, and carbitol acetate; cellosolve and butyl carbitol Carbitol solvents of the following: aromatic hydrocarbon solvents such as toluene and xylene; amide solvents such as dimethylformamide, dimethylacetamide (DMAc) and N-methylpyrrolidone; One organic solvent may be used alone, or two or more organic solvents may be used in combination.

  Drying can be carried out by a known method such as heating or hot air blowing. The drying conditions are set so that the content of the organic solvent in the resin composition layer is usually 10% by mass or less, preferably 5% by mass or less. Depending on the boiling point of the organic solvent in the resin varnish, for example, when using a resin varnish containing 30% by mass to 60% by mass of the organic solvent, the resin composition is dried at 50 ° C. to 150 ° C. for 3 minutes to 10 minutes. A physical layer can be formed. Usually, the resin composition layer is obtained as a film obtained by semi-curing a coating film of a resin varnish.

  The adhesive film may contain arbitrary layers other than a support body and a resin composition layer as needed. For example, a protective film according to the support may be provided on the surface of the adhesive film that is not joined to the support of the resin composition layer (that is, the surface opposite to the support). The thickness of the protective film is, for example, 1 μm to 40 μm. By the protective film, it is possible to suppress the adhesion and scratches of dust and the like to the surface of the resin composition layer. When the adhesive film has a protective film, the adhesive film can usually be used by peeling off the protective film. The adhesive film can be stored in a roll.

[16. Prepreg]
The insulating layer may be formed using a prepreg instead of the adhesive film. The prepreg can be formed by impregnating a sheet-like fiber base material with a resin composition.

  The sheet-like fiber base material used for the prepreg is not particularly limited. As a sheet-like fiber base material, arbitrary fiber base materials used as a base material for prepregs, such as a glass cloth, an aramid nonwoven fabric, and a liquid crystal polymer nonwoven fabric, can be used, for example. From the viewpoint of thinning, the thickness of the sheet-like fiber base material is preferably 900 μm or less, more preferably 800 μm or less, still more preferably 700 μm or less, and particularly preferably 600 μm or less. From the viewpoint of reducing the depth of plating for forming the conductor layer, the thickness of the sheet-like fiber base material is preferably 30 μm or less, more preferably 20 μm or less, and particularly preferably 10 μm or less. The lower limit of the thickness of the sheet fiber substrate is usually 1 μm or more, and may be 1.5 μm or more, or 2 μm or more.

The prepreg can be produced by a method such as a hot melt method or a solvent method.
The thickness of the prepreg may be in the same range as the resin composition layer in the adhesive film described above.

[17. Circuit board]
The circuit board of this invention contains the insulating layer formed with the hardened | cured material of the resin composition mentioned above. In one embodiment, the circuit board includes an inner layer substrate and an insulating layer provided on the inner layer substrate.

  The “inner layer substrate” is a member that becomes a base material of the circuit board. Examples of the inner layer substrate include those including a core substrate such as a glass epoxy substrate, a metal substrate, a polyester substrate, a polyimide substrate, a BT resin substrate, and a thermosetting polyphenylene ether substrate. In general, the inner layer substrate includes a conductor layer formed directly or indirectly on one side or both sides of the core base material. This conductor layer may be patterned so as to function as an electrical circuit, for example. An inner layer substrate in which a conductor layer is formed as a circuit on one side or both sides of the core substrate may be referred to as an “inner layer circuit board”. Further, an intermediate product in which at least one of an insulating layer and a conductor layer is to be formed for manufacturing a circuit board is also included in the term “inner layer board”. When the circuit board incorporates components, an inner layer substrate incorporating the components may be used.

  The thickness of the inner layer substrate is usually from 50 μm to 4000 μm, and preferably from 200 μm to 3200 μm from the viewpoint of improving the mechanical strength and reducing the height (reducing thickness) of the circuit board.

  The inner layer substrate may be provided with one or more through holes extending from one surface to the other surface in order to electrically connect the conductor layers on both sides thereof. Further, the inner layer substrate may be provided with further components such as passive elements.

  The insulating layer is a layer of a cured product of the resin composition. The insulating layer formed of the cured product is a circuit for a build-up circuit board, a high-frequency circuit board, a mother board, an IC package board, a camera module board, and a fingerprint authentication sensor board used for portable devices. It can be suitably applied to an insulating layer for a substrate.

  The circuit board may have only one insulating layer or may have two or more layers. When the circuit board has two or more insulating layers, it can be provided as a build-up layer in which conductor layers and insulating layers are alternately laminated.

  The thickness of the insulating layer is usually 20 μm to 200 μm, and preferably 50 μm to 150 μm from the viewpoint of improving electrical characteristics and reducing the height of the circuit board.

  The insulating layer may be provided with one or more via holes for electrically connecting the conductor layers included in the circuit board.

  Since the said insulating layer is a layer formed with the hardened | cured material of the resin composition mentioned above, the outstanding characteristic of the hardened | cured material of the resin composition mentioned above can be exhibited. Therefore, the insulating layer of the circuit board is preferably in the same range as described in the section of the characteristic of the resin composition, such as the dielectric constant of the insulating layer and the peel strength between the insulating layer and the conductive layer after the HAST test. Can be adjusted. These characteristics can be measured by the methods described in the examples.

A circuit board can be manufactured by the manufacturing method including the following process (I) and process (II), for example using an adhesive film.
(I) The process of laminating | stacking an adhesive film on an inner layer board | substrate so that the resin composition layer of this adhesive film may join an inner layer board | substrate.
(II) A step of thermosetting the resin composition layer to form an insulating layer.

  Lamination | stacking with an inner layer board | substrate and an adhesive film can be performed by the thermocompression bonding process heated, for example, pressing an adhesive film to an inner layer board | substrate from the support body side. Examples of the member for the thermocompression bonding process (also referred to as “thermocompression bonding member”) include a heated metal plate (SUS end plate or the like) or a metal roll (SUS roll). In addition, the thermocompression bonding member is not directly pressed against the support of the adhesive film and pressed, but through an elastic material such as heat-resistant rubber so that the adhesive film sufficiently follows the unevenness of the surface of the inner layer substrate. It is preferable to press.

  Lamination | stacking with an inner layer board | substrate and an adhesive film can be implemented by the vacuum laminating method, for example. In the vacuum laminating method, the temperature for thermocompression bonding is preferably 60 ° C to 160 ° C, more preferably 80 ° C to 140 ° C. The pressure for thermocompression bonding is preferably 0.098 MPa to 1.77 MPa, more preferably 0.29 MPa to 1.47 MPa. The time for thermocompression bonding is preferably 20 seconds to 400 seconds, more preferably 30 seconds to 300 seconds. Lamination is preferably performed under reduced pressure conditions with a pressure of 26.7 hPa or less.

  Lamination can be performed with a commercially available vacuum laminator. Examples of the commercially available vacuum laminator include a vacuum pressurizing laminator manufactured by Meiki Seisakusho, a vacuum applicator manufactured by Nikko Materials, and a batch vacuum pressurizing laminator.

  After the lamination, the laminated resin composition layer may be smoothed by pressing from the support side under normal pressure (under atmospheric pressure), for example, with a thermocompression bonding member. The pressing conditions for the smoothing treatment can be the same as the conditions for the thermocompression bonding of the laminate. The smoothing treatment can be performed with a commercially available laminator. In addition, you may perform a lamination | stacking and smoothing process continuously using said commercially available vacuum laminator.

  The support may be removed between step (I) and step (II), or may be removed after step (II).

  In step (II), the resin composition layer is thermally cured to form an insulating layer. The conditions for thermosetting the resin composition layer are not particularly limited, and the conditions employed when forming the insulating layer of the circuit board can be arbitrarily employed.

  The thermosetting conditions of the resin composition layer vary depending on, for example, the type of resin composition. The curing temperature of the resin composition layer is usually in the range of 120 ° C to 240 ° C (preferably in the range of 150 ° C to 220 ° C, more preferably in the range of 170 ° C to 200 ° C). The curing time is usually in the range of 5 minutes to 120 minutes (preferably 10 minutes to 100 minutes, more preferably 15 minutes to 90 minutes).

  Before the resin composition layer is thermally cured, the resin composition layer may be preheated at a temperature lower than the curing temperature. For example, prior to thermosetting the resin composition layer, the resin composition layer is usually at a temperature of 50 ° C. or higher and lower than 120 ° C. (preferably 60 ° C. or higher and 110 ° C. or lower, more preferably 70 ° C. or higher and 100 ° C. or lower). May be preheated for usually 5 minutes or longer (preferably 5 minutes to 150 minutes, more preferably 15 minutes to 120 minutes).

  The method for manufacturing a circuit board may further include (III) a step of drilling the insulating layer, (IV) a step of roughening the insulating layer, and (V) a step of forming a conductor layer. These steps (III) to (V) can be performed according to an appropriate method used for manufacturing a circuit board. When the support is removed after step (II), the support is removed between step (II) and step (III), between step (III) and step (IV), or step You may implement at any time between (IV) and process (V).

  Step (III) is a step of making a hole in the insulating layer. By drilling, holes such as via holes and through holes can be formed in the insulating layer. Step (III) can be performed, for example, by a method such as drilling, lasering, or plasma depending on the composition of the resin composition used for forming the insulating layer. The size and shape of the hole can be appropriately determined according to the design of the circuit board.

  Step (IV) is a step of subjecting the insulating layer to a roughening treatment. The procedure and conditions of the roughening treatment are not particularly limited, and any procedure and conditions used when forming the insulating layer of the circuit board can be adopted. For example, the insulating layer can be roughened by performing a swelling treatment with a swelling liquid, a roughening treatment with an oxidizing agent, and a neutralization treatment with a neutralizing liquid in this order.

  Examples of the swelling liquid include an alkaline solution and a surfactant solution, and preferably an alkaline solution. As an alkaline solution, a sodium hydroxide solution and a potassium hydroxide solution are more preferable. Examples of commercially available swelling liquids include “Swelling Dip Securigans P” and “Swelling Dip Securigans SBU” manufactured by Atotech Japan. Moreover, a swelling liquid may be used individually by 1 type, and may be used in combination of 2 or more types. The swelling treatment with the swelling liquid is not particularly limited. The swelling treatment can be performed, for example, by immersing the insulating layer in a swelling liquid at 30 ° C. to 90 ° C. for 1 minute to 20 minutes. From the viewpoint of suppressing the swelling of the resin in the insulating layer to an appropriate level, it is preferable to immerse the insulating layer in a swelling liquid at 40 ° C. to 80 ° C. for 5 minutes to 15 minutes.

  Examples of the oxidizing agent include an alkaline permanganate solution in which potassium permanganate or sodium permanganate is dissolved in an aqueous solution of sodium hydroxide. Moreover, an oxidizing agent may be used individually by 1 type, and may be used in combination of 2 or more types. The roughening treatment with an oxidizing agent such as an alkaline permanganic acid solution is preferably performed by immersing the insulating layer in an oxidizing agent solution heated to 60 to 80 ° C. for 10 to 30 minutes. The concentration of permanganate in the alkaline permanganate solution is preferably 5% by mass to 10% by mass. Examples of commercially available oxidizers include alkaline permanganate solutions such as “Concentrate Compact CP” and “Dosing Solution Securigans P” manufactured by Atotech Japan.

  As the neutralizing solution, an acidic aqueous solution is preferable. As a commercial item of the neutralization liquid, for example, “Reduction Solution Securigans P” manufactured by Atotech Japan Co., Ltd. may be mentioned. Moreover, a neutralization liquid may be used individually by 1 type, and may be used in combination of 2 or more types. The treatment with the neutralizing solution can be performed by immersing the treated surface of the insulating layer subjected to the roughening treatment with the oxidizing agent in the neutralizing solution at 30 to 80 ° C. for 5 to 30 minutes. From the viewpoint of workability and the like, a method of immersing the insulating layer subjected to the roughening treatment with the oxidizing agent in a neutralizing solution at 40 ° C. to 70 ° C. for 5 minutes to 20 minutes is preferable.

  Step (V) is a step of forming a conductor layer. The material used for the conductor layer is not particularly limited. In a preferred embodiment, the conductor layer is one or more selected from the group consisting of gold, platinum, palladium, silver, copper, aluminum, cobalt, chromium, zinc, nickel, titanium, tungsten, iron, tin and indium. Contains metal. The conductor layer may be a single metal layer or an alloy layer. Examples of the alloy layer include a layer formed of an alloy of two or more kinds of metals selected from the above group (for example, a nickel / chromium alloy, a copper / nickel alloy, and a copper / titanium alloy). Among them, from the viewpoint of versatility of forming the conductor layer, cost, ease of patterning, etc., a single metal layer of chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver or copper; or nickel / chromium alloy, copper -An alloy layer of nickel alloy or copper / titanium alloy is preferable. Further, a single metal layer of chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver or copper; or an alloy layer of nickel / chromium alloy is more preferable, and a single metal layer of copper is still more preferable.

  The conductor layer may have a single layer structure, or may have a multilayer structure including two or more single metal layers or alloy layers made of different types of metals or alloys. When the conductor layer has a multilayer structure, the layer in contact with the insulating layer is preferably a single metal layer of chromium, zinc or titanium, or an alloy layer of nickel / chromium alloy.

  The thickness of the conductor layer is usually 3 μm to 200 μm, preferably 10 μm to 100 μm.

  The conductor layer can be formed by, for example, directly patterning a metal foil used as a support for the adhesive film. The conductor layer can be formed by plating, for example. As a formation method by plating, for example, the surface of the insulating layer can be plated by a method such as a semi-additive method or a full additive method to form a conductor layer having a desired wiring pattern. Especially, it is preferable to form by a semi-additive method from a viewpoint of the simplicity of manufacture.

  Hereinafter, an example in which the conductor layer is formed by the semi-additive method will be described. First, a plating seed layer is formed on the surface of the insulating layer by electroless plating. Next, a mask pattern for exposing a part of the plating seed layer is formed on the formed plating seed layer so as to correspond to a desired wiring pattern. A metal layer is formed by electrolytic plating on the exposed plating seed layer, and then the mask pattern is removed. Thereafter, an unnecessary plating seed layer can be removed by etching or the like to form a conductor layer having a desired wiring pattern.

  The conductor layer may be formed using a metal foil, for example. When forming a conductor layer using metal foil, it is preferable to implement process (V) between process (I) and process (II). For example, after the step (I), the support is removed, and a metal foil is laminated on the exposed surface of the resin composition layer. Lamination of the resin composition layer and the metal foil can be performed by a vacuum laminating method. The lamination conditions may be the same as the lamination conditions of the inner layer substrate and the adhesive film in step (I). Next, step (II) is performed to form an insulating layer. Thereafter, using the metal foil on the insulating layer, a conductor layer having a desired wiring pattern can be formed by a method such as a subtractive method or a modified semi-additive method. A metal foil can be manufactured by methods, such as an electrolytic method and a rolling method, for example. Examples of commercially available metal foils include HLP foils, JXUT-III foils manufactured by JX Metals, 3EC-III foils, TP-III foils manufactured by Mitsui Metal Mining Co., Ltd., and the like.

  When the circuit board includes two or more insulating layers and a conductor layer (build-up layer), the above-described insulating layer forming step and conductor layer forming step are repeated one or more times to obtain a circuit. A circuit board having a functioning multilayer wiring structure can be manufactured.

  In another embodiment, the circuit board can be manufactured using prepreg instead of the adhesive film. The manufacturing method using a prepreg is basically the same as the case of using an adhesive film.

[18. Semiconductor device]
A semiconductor device includes the circuit board. This semiconductor device can be manufactured using a circuit board.

  Examples of the semiconductor device include various semiconductor devices used for electrical products (for example, computers, mobile phones, digital cameras, and televisions) and vehicles (for example, motorcycles, automobiles, trains, ships, and aircrafts).

  The semiconductor device can be manufactured, for example, by mounting a component (semiconductor chip) on a conductive portion of a circuit board. The “conducting part” is “a part where an electric signal can be transmitted on the circuit board”, and the part may be a surface of the circuit board or a part embedded in the circuit board. Absent. In addition, an electric circuit element made of a semiconductor can be arbitrarily used for the semiconductor chip.

  As a method for mounting a semiconductor chip when manufacturing a semiconductor device, any method in which the semiconductor chip functions effectively can be adopted. As a semiconductor chip mounting method, for example, a wire bonding mounting method, a flip chip mounting method, a mounting method using a bumpless buildup layer (BBUL), a mounting method using an anisotropic conductive film (ACF), a non-conductive film (NCF) ) Mounting method. Here, the “mounting method using a build-up layer without bumps (BBUL)” means “a mounting method in which a semiconductor chip is directly embedded in a circuit board and the semiconductor chip and wiring of the circuit board are connected”.

  EXAMPLES The present invention will be specifically described below with reference to examples, but the present invention is not limited to these examples. In the following description, “parts” and “%” mean “parts by mass” and “% by mass”, respectively, unless otherwise specified.

[Example 1]
20 parts of liquid bisphenol A type epoxy resin (epoxy equivalent 187, “jER828US” manufactured by Mitsubishi Chemical Corporation), 10 parts of bixylenol type epoxy resin (epoxy equivalent 190, “YX4000HK” manufactured by Mitsubishi Chemical Corporation), biphenylaralkyl type epoxy resin (epoxy) Equivalent 276, 30 parts by Nippon Kayaku “NC3000”), 10 parts naphthol type epoxy resin (epoxy equivalent 332, “ESN475V” by Nippon Steel & Sumikin Chemical Co., Ltd.), and phenoxy resin (methyl ethyl ketone / cyclohexanone having a solid content of 30% by mass) = 1/1 solution, "YL7553BH30" manufactured by Mitsubishi Chemical Corporation) was dissolved in 60 parts of methyl ethyl ketone and 20 parts of cyclohexanone with heating to obtain a resin solution.

  To this resin solution, 15 parts of active ester curing agent (active group equivalent 223, non-volatile component 65% by mass toluene solution, “DIC” HPC8000-65T ”), triazine skeleton-containing cresol novolac type curing agent (phenol equivalent 151, solid 25 parts by mass of a 2-methoxypropanol solution of 50% by mass, “LA3018-50P” manufactured by DIC), 4 parts of a curing accelerator (4-dimethylaminopyridine (DMAP), methyl ethyl ketone solution having a solid content of 5% by mass), N— 100 parts of spherical silica (“SO-C2” manufactured by Admatechs, average particle size 0.5 μm) surface-treated with phenyl-3-aminopropyltrimethoxysilane (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.), polytetrafluoroethylene particles ("Lebron L-2" manufactured by Daikin Industries, Ltd., average particle size 3 μm) 80 parts, core shell 2 parts of rubber particles (“AC3816N” manufactured by Aika Kogyo Co., Ltd.) and 4 parts of non-particulate fluorine-containing polymer (“LE-605” manufactured by Kyoeisha Chemical Co., Ltd.) are mixed and dispersed uniformly with a high-speed rotating mixer. Thus, a resin varnish was obtained.

  As a support, a polyethylene terephthalate film (thickness 38 μm, “AL5” manufactured by Lintec) having an alkyd resin release layer on the surface was prepared. On this support body, the said resin varnish was apply | coated uniformly using the die-coater. The applied resin varnish was dried at 80 ° C. to 120 ° C. (average 100 ° C.) for 6 minutes to form a resin composition layer, and an adhesive film having a support and a resin composition layer was obtained. The thickness of the resin composition layer was 50 μm, and the amount of residual solvent in the resin composition was about 2% by mass.

  Next, the adhesive film was wound up in a roll shape while a 15 μm-thick polypropylene film was bonded to the surface of the resin composition layer. The wound adhesive film was slit to a width of 507 mm to obtain a sheet-like adhesive film having a size of 507 mm × 336 mm.

[Example 2]
The amount of the core-shell type rubber particles (“AC3816N” manufactured by Aika Kogyo Co., Ltd.) was changed from 2 parts to 6 parts. Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Example 3]
80 parts of polytetrafluoroethylene particles ("Lublon L-2" manufactured by Daikin Industries, Ltd.) and 4 parts of a fluorine-containing polymer ("LE-605" manufactured by Kyoeisha Chemical Co., Ltd.) were mixed in advance and then mixed into the resin solution. . Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Example 4]
30 parts of biphenyl aralkyl type epoxy resin (“NC3000” manufactured by Nippon Kayaku Co., Ltd.) was changed to 27 parts of naphthylene ether type epoxy resin (epoxy equivalent 260, “HP6000” manufactured by DIC).
Further, 2 parts of core-shell type rubber particles (“AC3816N” manufactured by Aika Industry Co., Ltd.) are mixed with core-shell type rubber particles (“IM401-modified 7-17” manufactured by Aika Industry Co., Ltd.), the core is polybutadiene, and the shell is a styrene / divinylbenzene copolymer. ) Changed to 2 parts. Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Example 5]
30 parts of biphenyl aralkyl type epoxy resin (“NC3000” manufactured by Nippon Kayaku Co., Ltd.), 20 parts of naphthylene ether type epoxy resin (epoxy equivalent 260, “HP6000” manufactured by DIC) and naphthalene type tetrafunctional epoxy resin (epoxy) Equivalent 163, “HP4700” manufactured by DIC Corporation) was changed to 5 parts. Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Example 6]
15 parts of active ester curing agent (toluene solution with 65% by mass of nonvolatile components, “HPC8000-65T” manufactured by DIC) and cresol novolac type curing agent containing triazine skeleton (2-methoxypropanol solution with a solid content of 50% by mass, manufactured by DIC) 25 parts of “LA3018-50P”), 15 parts of naphthol type curing agent (hydroxyl equivalent: 215, “SN485” manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.) and triazine-containing phenol novolak resin (hydroxyl equivalent: 125, methyl ethyl ketone solution having a solid content of 60%, DIC ("LA7054" manufactured by the company) was changed to 12 parts. Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Example 7]
To the resin varnish, 2 parts of N-phenyl-3-aminopropyltrimethoxysilane (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) was further added. Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Comparative Example 1]
The amount of core-shell type rubber particles (“AC3816N” manufactured by Aika Kogyo Co., Ltd.) was changed from 2 parts to 0 parts. Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Comparative Example 2]
2 parts of core-shell type rubber particles (“AC3816N” manufactured by Aika Kogyo Co., Ltd.), an epoxy resin having a polybutadiene structure capable of functioning as a non-particulate rubber (epoxy equivalent 190, methyl ethyl ketone solution having a solid content of 80% by weight, manufactured by Daicel Chemical Industries, Ltd. PB3600M ”)) to 2.5 parts. Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Comparative Example 3]
The amount of core-shell type rubber particles (“AC3816N” manufactured by Aika Kogyo Co., Ltd.) was changed from 2 parts to 12 parts. Except for the above, a resin varnish and an adhesive film were produced in exactly the same manner as in Example 1.

[Measurement of dielectric constant]
A polyethylene terephthalate film ("PET501010" manufactured by Lintec Corporation) having a release treatment on the surface was prepared. On this polyethylene terephthalate film, the resin varnish obtained in the Examples and Comparative Examples was uniformly applied using a die coater so that the thickness of the resin composition layer after drying was 50 μm. The applied resin varnish was dried at 80 ° C. to 110 ° C. (average 95 ° C.) for 6 minutes to obtain a resin composition layer. Thereafter, the resin composition layer was cured by heat treatment at 200 ° C. for 90 minutes, and the support was peeled off to obtain a cured film formed of a cured product of the resin composition. The cured product film was cut into a length of 80 mm and a width of 2 mm to obtain an evaluation sample.

  With respect to this evaluation sample, by a cavity resonance perturbation method using an analyzer (“HP 8362B” manufactured by Agilent Technologies) at a measurement frequency of 5.8 GHz and a measurement temperature of 23 ° C., the dielectric of the cured product of the resin composition The rate was measured. The measurement was performed on two test pieces, and the average value was calculated.

[Measurement of resin flow rate]
An inner layer substrate (glass cloth base epoxy resin double-sided copper-clad laminate, copper foil thickness 18 μm, substrate thickness 0.8 mm, “R5715ES” manufactured by Matsushita Electric Works, Ltd.) was prepared. Using the batch-type vacuum press laminator (two-stage build-up laminator “CVP700” manufactured by Nikko Materials), the resin composition layer is in contact with the inner layer substrate using the adhesive films produced in Examples and Comparative Examples. In this way, lamination was performed on both surfaces of the inner layer substrate. Lamination was performed by reducing the pressure for 30 seconds to a pressure of 13 hPa or less, and then pressing the film at 100 ° C. and a pressure of 0.74 MPa for 30 seconds. Next, hot pressing was performed at 100 ° C. and a pressure of 0.5 MPa for 60 seconds.

  Then, the edge part of the adhesive film laminated on the inner layer board | substrate was observed. FIG. 1 is a top view schematically showing the periphery of an end portion of an adhesive film 100 laminated on an inner layer substrate 200 in the embodiment. As a result of the observation, as shown in FIG. 1, it was observed that the resin composition layer 110 of the adhesive film 100 protrudes outside the edge 120 </ b> E of the support 120 of the adhesive film 100. The protrusion of the resin composition layer 110 is formed by flowing the resin composition layer 110 fluidized at the time of lamination in an in-plane direction parallel to the surface 200U of the inner layer substrate 200. Therefore, the distance W from the edge 120E of the support 120 of the adhesive film 100 to the tip portion 110T of the protruding resin composition layer 110 was measured, and this distance W was obtained as the resin flow amount. A resin flow amount of 3 mm or less was determined as “◯”, and a resin flow amount greater than 3 mm was determined as “x”.

[Measurement of peel strength]
(1) Inner layer substrate surface treatment:
A glass cloth base epoxy resin double-sided copper-clad laminate (with a copper foil thickness of 18 μm, a substrate thickness of 0.8 mm, “R5715ES” manufactured by Matsushita Electric Works, Ltd.) on which an inner layer circuit was formed was prepared as an inner layer substrate. Both surfaces of this inner layer substrate were etched by 1 μm with an etching agent (“CZ8100” manufactured by MEC Co., Ltd.) to roughen both copper surfaces of the inner layer substrate.

(2) Lamination of adhesive film:
Using the batch-type vacuum press laminator (two-stage build-up laminator “CVP700” manufactured by Nikko Materials Co., Ltd.) for the adhesive films produced in the examples and comparative examples, the resin composition layer is in contact with the inner layer substrate. The laminate was laminated on both sides of the inner layer substrate. Lamination was performed by reducing the pressure for 30 seconds to a pressure of 13 hPa or less, and then pressing the film at 100 ° C. and a pressure of 0.74 MPa for 30 seconds. Next, hot pressing was performed at 100 ° C. and a pressure of 0.5 MPa for 60 seconds.

(3) Curing of resin composition:
The adhesive film laminated on the inner layer substrate was heated at 100 ° C. for 30 minutes and further at 180 ° C. for 30 minutes to cure the resin composition layer, thereby forming an insulating layer. Thereafter, the polyethylene terephthalate film as a support was peeled off. Thus, a sample substrate having an insulating layer, an inner layer substrate, and an insulating layer in this order was obtained.

(4) Roughening treatment:
The sample substrate was immersed in a swelling liquid (including “Swelling Dip Securigant P” manufactured by Atotech Japan, diethylene glycol monobutyl ether) at 60 ° C. for 10 minutes. Next, the sample substrate was immersed for 20 minutes at 80 ° C. in a roughening solution (“Concentrate Compact P” KMnO ₄ : 60 g / L, NaOH: 40 g / L aqueous solution manufactured by Atotech Japan). Next, the sample substrate was immersed for 5 minutes at 40 ° C. in a neutralizing solution (“Reduction Sholycine Securigant P” manufactured by Atotech Japan). Thereafter, the sample substrate was dried at 80 ° C. for 30 minutes to obtain a roughened substrate.

(5) Plating by semi-additive method:
The roughened substrate was immersed in an electroless plating solution containing PdCl ₂ at 40 ° C. for 5 minutes, and then immersed in an electroless copper plating solution at 25 ° C. for 20 minutes. Thereafter, the roughened substrate was subjected to an annealing process of heating at 150 ° C. for 30 minutes. An etching resist was formed on the roughened substrate after the annealing treatment, and a pattern was formed by etching. Thereafter, copper sulfate electrolytic plating was performed to form a conductor layer with a thickness of 25 μm on the surface of the insulating layer. Next, annealing was performed by heating at 180 ° C. for 30 minutes to obtain a circuit board having a conductor layer on the insulating layer.

(6) Measurement of peel strength (peel strength) of plated conductor layer:
A cut was made in the conductor layer of the circuit board so as to surround a rectangular portion having a width of 10 mm and a length of 100 mm. One end of the rectangular portion in the length direction was peeled off and grasped with a gripping tool (Autocom type tester “AC-50CSL” manufactured by TS E). Then, a peel test is performed in which the conductor layer is peeled in the direction perpendicular to the surface of the circuit board at a speed of 50 mm / min at room temperature, and the load (kgf / cm) when the length of 35 mm is peeled is peel strength. As measured. A peel strength of 0.3 kgf / cm or more was judged as “◯”. Moreover, the thing whose peel strength was less than 0.3 kgf / cm and the thing which the swelling produced were determined as "x".

[Measurement of peel strength after HAST test]
Using the highly accelerated life test apparatus (“PM422” manufactured by Enomoto Kasei Co., Ltd.), an accelerated environment test was performed in which the circuit board was exposed to an environment of a temperature of 130 ° C. and a humidity of 85% RH for 100 hours. Thereafter, the peel strength when the conductor layer of the circuit board was peeled was measured by the same operation as the step (6) “Measurement of peel strength (peel strength) of the plating conductor layer” in the above [Measurement of peel strength]. .
When the peel strength after the accelerated environment test was 0.3 kgf / cm or more, it was determined as “◯”, and when it was less than 0.3 kgf / cm, it was determined as “x”.

[result]
The results of the above-described examples and comparative examples are shown in the following table. In the following table, the amount of each component represents parts by mass of the non-volatile component. In the table below, the meanings of the abbreviations are as follows.
828US: Liquid bisphenol A type epoxy resin (epoxy equivalent 187, “jER828US” manufactured by Mitsubishi Chemical Corporation).
YX4000HK: Boxylenol type epoxy resin (epoxy equivalent 190, “YX4000HK” manufactured by Mitsubishi Chemical Corporation).
NC3000: biphenyl aralkyl type epoxy resin (epoxy equivalent 276, “NC3000” manufactured by Nippon Kayaku Co., Ltd.).
HP6000: A naphthylene ether type epoxy resin (epoxy equivalent 260, “HP6000” manufactured by DIC).
HP4700: Naphthalene type tetrafunctional epoxy resin (epoxy equivalent 163, “HP4700” manufactured by DIC Corporation).
ESN-475V: naphthol type epoxy resin (epoxy equivalent 332, “ESN475V” manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.).
PB3600M: An epoxy resin having a polybutadiene structure that can function as a non-particulate rubber (epoxy equivalent 190, methyl ethyl ketone solution with a solid content of 80% by weight, “PB3600M” manufactured by Daicel Chemical Industries).
HPC8000-65T: active ester curing agent (active group equivalent 223, non-volatile component 65 mass% toluene solution, “HPC8000-65T” manufactured by DIC).
SN485: naphthol type curing agent (hydroxyl group equivalent 215, “SN485” manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.).
LA3018-50P: Triazine skeleton-containing cresol novolac type curing agent (phenol equivalent 151, 2-methoxypropanol solution having a solid content of 50% by mass, “LA3018-50P” manufactured by DIC).
LA7054: Triazine-containing phenol novolak resin (methylethylketone solution having a hydroxyl group equivalent of 125 and a solid content of 60%, "LA7054" manufactured by DIC).
AC3816N: Core-shell type rubber particles (“AC3816N” manufactured by Aika Industry Co., Ltd.).
IM401-modified 7-17: Core-shell type rubber particles ("IM401-modified 7-17" manufactured by Aika Kogyo Co., Ltd., core is polybutadiene, shell is styrene / divinylbenzene copolymer).
Lubron L-2: polytetrafluoroethylene particles (“Lublon L-2” manufactured by Daikin Industries, Ltd., average particle size 3 μm).
SO-C2: Spherical silica surface-treated with N-phenyl-3-aminopropyltrimethoxysilane (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.) (“SO-C2” manufactured by Admatechs, average particle size of 0.5 μm).
YL7553BH30: Phenoxy resin (methyl ethyl ketone / cyclohexanone = 1/1 solution having a solid content of 30% by mass, “YL7553BH30” manufactured by Mitsubishi Chemical Corporation).
DMAP: curing accelerator (4-dimethylaminopyridine, methyl ethyl ketone solution having a solid content of 5% by mass).
LE605: Non-particulate fluorine-containing polymer (“LE-605” manufactured by Kyoeisha Chemical Co., Ltd.).
KBM573: N-phenyl-3-aminopropyltrimethoxysilane (“KBM573” manufactured by Shin-Etsu Chemical Co., Ltd.).

[Consideration]
As can be seen from Table 1, in the examples, a low dielectric constant is obtained. Moreover, in an Example, the amount of resin flows is small and the peel strength after a HAST test is large. Therefore, from this result, according to the present invention, an insulating layer having a low dielectric constant and high adhesion to the conductor layer after the HAST test can be obtained, and a resin composition capable of suppressing the resin flow can be realized. Was confirmed.

  Moreover, in order to obtain the desired effect of the present invention from the results of (C) Comparative Example 1 that does not contain rubber particles and Comparative Example 3 in which the amount of rubber particles is excessive, (C) It can be seen that the quantity should fall within a predetermined range. In particular, in Comparative Example 3, because the amount of (C) rubber particles was excessive, the mechanical strength of the resin composition was lowered, the peel strength before the HAST test was lowered, and (C) rubber particles It is thought that the peel strength after the HAST test was lowered due to the increase of the effect of the expansion.

  Furthermore, in order to obtain the desired effect of the present invention from the result of Comparative Example 2 using an epoxy resin ("PB-3600M" manufactured by Daicel Corporation) that can function as a liquid rubber instead of (C) rubber particles. Shows that particles should be used as the rubber component. In Comparative Example 2, it is considered that the resin flow amount was increased because the thixotropy-improving action was not obtained by using a rubber component that was not particulate. In Comparative Example 2, the non-particulate rubber component was not able to sufficiently absorb the stress caused by the temperature change during the HAST test, so it is considered that the peel strength after the HAST test was lowered.

  Further, when Example 1 and Example 3 are compared, Example 1 has a smaller resin flow amount. Therefore, in order to effectively suppress the resin flow, as in Example 1, (D) a fluorine-based filler and (H) a fluorine-based polymer are mixed and then other components are mixed. It can be seen that (D) the fluorine-based filler and (H) the fluorine-based polymer are preferably mixed separately with the other components.

  In the above examples, it was confirmed that even if the components (E) to (I) were not used, the results were the same as in the above examples, although there were differences in the degree.

DESCRIPTION OF SYMBOLS 100 Adhesive film 110 Resin composition layer 120 Support body 200 Inner layer board | substrate

Claims (12)

A resin composition comprising (A) an epoxy resin, (B) a curing agent, (C) rubber particles, and (D) a fluorine-based filler,
(C) The resin composition whose quantity of a component is 0.1 mass%-3 mass% with respect to 100 mass% of non-volatile components in a resin composition.   (D) The resin composition of Claim 1 whose component is a fluorine-type polymer particle.   The resin composition according to claim 2, wherein the component (D) is polytetrafluoroethylene particles.   (E) The resin composition of any one of Claims 1-3 containing an inorganic filler.   (E) The resin composition of Claim 4 whose component is a silica.   (E) The resin composition of Claim 4 or 5 whose quantity of a component is 5 mass%-70 mass% with respect to 100 mass% of non-volatile components in a resin composition.   (D) The resin composition of any one of Claims 1-6 whose quantity of a component is 10 mass%-80 mass% with respect to 100 mass% of non-volatile components in a resin composition.   The component (A) is selected from the group consisting of bisphenol A type epoxy resin, bixylenol type epoxy resin, biphenyl aralkyl type epoxy resin, naphthylene ether type epoxy resin, naphthalene type tetrafunctional epoxy resin and naphthol type epoxy resin. The resin composition of any one of Claims 1-7 which is the above epoxy resin.   The resin composition according to claim 1, which is used for forming an insulating layer on a circuit board.   The adhesive film which has a support body and the resin composition layer containing the resin composition of any one of Claims 1-9 provided on this support body.   The circuit board containing the insulating layer which consists of a hardened | cured material of the resin composition of any one of Claims 1-9.   A semiconductor device comprising the circuit board according to claim 11.

Images