JP2019021625A5 - - Google Patents

Download PDF

Info

Publication number
JP2019021625A5
JP2019021625A5 JP2018130470A JP2018130470A JP2019021625A5 JP 2019021625 A5 JP2019021625 A5 JP 2019021625A5 JP 2018130470 A JP2018130470 A JP 2018130470A JP 2018130470 A JP2018130470 A JP 2018130470A JP 2019021625 A5 JP2019021625 A5 JP 2019021625A5
Authority
JP
Japan
Prior art keywords
target
axis
sample
electron beam
flaky
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018130470A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019021625A (ja
JP7046746B2 (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2019021625A publication Critical patent/JP2019021625A/ja
Publication of JP2019021625A5 publication Critical patent/JP2019021625A5/ja
Application granted granted Critical
Publication of JP7046746B2 publication Critical patent/JP7046746B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2018130470A 2017-07-11 2018-07-10 X線生成のための薄片成形されたターゲット Active JP7046746B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762531097P 2017-07-11 2017-07-11
US62/531,097 2017-07-11

Publications (3)

Publication Number Publication Date
JP2019021625A JP2019021625A (ja) 2019-02-07
JP2019021625A5 true JP2019021625A5 (https=) 2021-05-13
JP7046746B2 JP7046746B2 (ja) 2022-04-04

Family

ID=62909410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018130470A Active JP7046746B2 (ja) 2017-07-11 2018-07-10 X線生成のための薄片成形されたターゲット

Country Status (4)

Country Link
US (1) US10746672B2 (https=)
EP (1) EP3428928A1 (https=)
JP (1) JP7046746B2 (https=)
CN (1) CN109243947B (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10416099B2 (en) 2013-09-19 2019-09-17 Sigray, Inc. Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
WO2020051061A1 (en) 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
WO2021011209A1 (en) 2019-07-15 2021-01-21 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
EP4111235A4 (en) 2020-02-26 2023-11-01 Shenzhen Xpectvision Technology Co., Ltd. IMAGING SYSTEMS AND METHODS OF USE
CN113764246B (zh) * 2020-06-03 2025-04-18 宁波伯锐锶电子束科技有限公司 一种显微镜
CN112213343B (zh) * 2020-12-03 2021-03-16 中国科学院自动化研究所 塑料条带承载生物超薄切片快速成像方法、系统、装置
DE112023000574B4 (de) 2022-01-13 2026-02-26 Sigray, Inc. Mikrofokus-röntgenquelle zur erzeugung von röntgenstrahlen mit hohem fluss und niedriger energie
WO2023168204A1 (en) 2022-03-02 2023-09-07 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
CN117062289A (zh) * 2023-08-09 2023-11-14 深圳综合粒子设施研究院 基于金属丝靶的射线源
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
WO2026009290A1 (ja) * 2024-07-01 2026-01-08 株式会社日立ハイテク 電子線応用装置とその制御方法
CN121114108B (zh) * 2025-11-13 2026-01-23 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院) 一种在双束电镜内实现微区xrf的分析方法与系统

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5515250Y2 (https=) * 1975-07-29 1980-04-08
US5044001A (en) * 1987-12-07 1991-08-27 Nanod Ynamics, Inc. Method and apparatus for investigating materials with X-rays
JPH03273200A (ja) * 1990-03-23 1991-12-04 Elionix Kk 端部放出型x線顕微鏡
US5148462A (en) * 1991-04-08 1992-09-15 Moltech Corporation High efficiency X-ray anode sources
AUPQ831200A0 (en) * 2000-06-22 2000-07-13 X-Ray Technologies Pty Ltd X-ray micro-target source
FR2882886B1 (fr) * 2005-03-02 2007-11-23 Commissariat Energie Atomique Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source
JP4954526B2 (ja) * 2005-10-07 2012-06-20 浜松ホトニクス株式会社 X線管
DE102005053386A1 (de) * 2005-11-07 2007-05-16 Comet Gmbh Nanofocus-Röntgenröhre
JP4826632B2 (ja) * 2006-06-02 2011-11-30 株式会社日立製作所 X線顕微鏡およびx線顕微方法
US7336760B2 (en) * 2006-07-28 2008-02-26 Varian Medical Systems Technologies, Inc. Methods, systems, and computer-program products to estimate scattered radiation in cone-beam computerized tomographic images and the like
US8068579B1 (en) * 2008-04-09 2011-11-29 Xradia, Inc. Process for examining mineral samples with X-ray microscope and projection systems
JP5317120B2 (ja) * 2009-05-22 2013-10-16 独立行政法人産業技術総合研究所 X線顕微鏡用試料収容セル、x線顕微鏡、およびx線顕微鏡像の観察方法
US20150092924A1 (en) * 2013-09-04 2015-04-02 Wenbing Yun Structured targets for x-ray generation
US10269528B2 (en) * 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US9934930B2 (en) 2014-04-18 2018-04-03 Fei Company High aspect ratio x-ray targets and uses of same
JP6450153B2 (ja) * 2014-11-07 2019-01-09 浜松ホトニクス株式会社 X線像撮像用ユニット、電子顕微鏡及び試料像取得方法

Similar Documents

Publication Publication Date Title
JP2019021625A5 (https=)
JP7046746B2 (ja) X線生成のための薄片成形されたターゲット
CN101842052B (zh) 固定x射线数字化乳房断层合成系统和相关方法
US7496180B1 (en) Focal spot temperature reduction using three-point deflection
CN1809909B (zh) 用于人和小动物成像的计算机断层摄影系统
JP5294653B2 (ja) マルチx線発生装置及びx線撮影装置
US9424958B2 (en) Multiple focal spot X-ray radiation filtering
US20100091940A1 (en) Tomosynthesis apparatus and method to operate a tomosynthesis apparatus
KR101875847B1 (ko) 방사선 촬영 장치 및 이를 이용한 방사선 촬영 방법
CN102651998A (zh) 用于微分相衬成像的扫描系统
JP2009533151A5 (https=)
CN116367781A (zh) 用于多源体积光谱计算机断层扫描的系统、设备及方法
JP2008515513A5 (https=)
JPWO2021108715A5 (https=)
CN102484934A (zh) 单色x-射线方法和装置
JP5677534B2 (ja) 放射線撮影装置及びその制御方法
EP2255374A2 (en) Circular tomosynthesis x-ray tube
US20140177794A1 (en) System and method for focal spot deflection
CN106940323A (zh) 新型x射线成像技术
JP2015019987A5 (https=)
JP2015019987A (ja) マルチ放射線発生装置及び放射線撮影システム
US20160100816A1 (en) Radiographic imaging apparatus, method of controlling radiographic imaging apparatus and computed tomography apparatus
JP5914625B2 (ja) 放射線撮影装置及びその制御方法
JP2020053217A5 (https=)
KR102139661B1 (ko) 회전 가능한 시준기를 구비한 ct 시스템