JP2019020192A - Method for inspecting optical element and method of manufacturing optical element - Google Patents

Abstract

To provide a method for inspecting an optical element, enabling arrangement angles of a plurality of translucent plates to be accurately inspected.SOLUTION: There is provided the method for inspecting an optical element 1 which comprises a plurality of spaced translucent plates 2 each having parallel two planes 2a, 2b and inclined at a predetermined angle with respect to incident light L0 for functioning as the optical element. A light shielding member 7 is arranged on one plane 2b side out of two planes 2a, 2b of the translucent plate 2 to be inspected, and arrangement angles of the translucent plate 2 are inspected using an optical sensor 6 from the other plane 2a side.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an optical element inspection method and an optical element manufacturing method.

  2. Description of the Related Art Conventionally, there has been known an optical element including a plurality of translucent plates arranged so as to form a predetermined angle with respect to incident light. For example, in an optical engine of a projection-type image device such as a liquid crystal projector, light having a randomly polarized light (incident light) emitted from a light source is split or polarized to emit one type of linearly polarized light. In order to emit light, a plurality of translucent plates are arranged so as to form a predetermined angle with respect to incident light, and two parallel planes serving as incident surfaces and exit surfaces of the plurality of translucent plates Alternatively, a polarization conversion element in which a polarization separation film, a reflection film, or the like is formed is mounted on one plane (see Patent Document 1).

  In Patent Document 1, in a polarization conversion element in which a plurality of light-transmitting plate materials are bonded together with an adhesive, the life characteristics are adversely affected by the deterioration of the adhesive, or when an adhesive that suppresses the deterioration is used. Because of the problem that the optical characteristics and bonding reliability are reduced due to the adhesion of dust and dirt to the adhesive surface, a plurality of translucent plates with a polarizing separation film and a reflective film are formed on the substrate. A polarization conversion element arranged at a distance is described. The plurality of translucent plates are attached to the base material by, for example, fitting into a recess provided on the surface of the base material, or by inserting along a guide groove provided on the surface of the base material.

JP 2012-247705 A

  In an optical element such as the above-described polarization conversion element, the angle with respect to the incident light of the plurality of light-transmitting plates and the surface of the flat base material that becomes the incident surface and the exit surface of the plurality of light-transmitting plates. If the arrangement angle such as the angle (inclination angle) is deviated, the angle of the emitted light deviates from the assumption, so that desired characteristics may not be obtained. As described above, as a method for attaching a plurality of translucent plates to the base material, fitting into a recess, insertion into a guide groove, and the like are conceivable. There is no compensation that the light plate is attached with the desired accuracy. Therefore, when inspecting an optical element provided with a plurality of translucent plates that are arranged at a predetermined angle with respect to incident light, the arrangement angle of the plurality of translucent plates is accurately inspected. There is a need for an inspection method that enables this.

  INDUSTRIAL APPLICABILITY The present invention makes it possible to accurately inspect the arrangement angle of a plurality of translucent plates, and to arrange a plurality of translucent plates at an accurate arrangement angle. An object of the present invention is to provide a method for manufacturing an optical element.

  The present invention provides a method for inspecting an optical element having the following configurations [1] to [6] and a method for manufacturing an optical element having the configurations [7] to [13].

[1] An optical element comprising a light-transmitting plate having a plurality of parallel two planes that are inclined at a predetermined angle with respect to incident light when functioning as an optical element and are spaced from each other. A method of inspecting,
A step of disposing a light shielding member on one of the two planes of the translucent plate to be inspected, and inspecting the arrangement angle of the translucent plate using an optical sensor from the other plane. A method for inspecting an optical element comprising:
[2] In the inspecting step, at least one selected from an elevation angle of the plane with respect to a virtual horizontal plane and an angle of the plane with respect to incident light when the plurality of translucent plates are set in an upright state is used. The optical element inspection method according to [1], which is measured as an arrangement angle of the optical plate material.
[3] From the optical sensor to the other flat surface of the one end portion of the plurality of light transmissive plate members protruding in order from the adjacent light transmissive plate members, the one plane side being blocked by a light shielding member. The optical element inspection method according to [1] or [2], wherein the arrangement angles of the plurality of translucent plates are sequentially inspected by sequentially irradiating measurement light.
[4] The light shielding member according to any one of [1] to [3], wherein the light shielding member is inserted between the light transmissive plate material to be inspected and the light transmissive plate material adjacent to the one plane side. Optical element inspection method.
[5] The optical element according to any one of [1] to [4], wherein the plurality of translucent plates have a functional optical film provided on at least one of the two planes. Inspection method.
[6] The optical element inspection method according to any one of [1] to [5], wherein a laser autocollimator is used as the optical sensor.

[7] preparing a translucent plate having a plurality of parallel two planes;
Inclining the plurality of translucent plates at a predetermined angle with respect to incident light when functioning as an optical element, and aligning them at an interval; and
Fixing the aligned plurality of translucent plates; and
Among the plurality of fixed translucent plates, a light shielding member is arranged on one plane side of the two planes of the translucent plate to be inspected, and an optical sensor is used from the other plane side. And a step of inspecting an arrangement angle of the translucent plate material.
[8] preparing a translucent plate having a plurality of parallel two planes;
Inclining the plurality of translucent plates at a predetermined angle with respect to incident light when functioning as an optical element, and aligning them at an interval; and
A light-shielding member is arranged on one plane side of the two planes of the translucent plate material to be inspected among the plurality of aligned translucent plate materials, and an optical sensor is used from the other plane side. A step of inspecting an arrangement angle of the translucent plate,
A step of fixing the plurality of translucent plates that are determined to be non-defective products in the inspecting step.
[9] In the inspecting step, at least one selected from an elevation angle of the plane with respect to a virtual horizontal plane and an angle of the plane with respect to incident light when the plurality of translucent plates are set in an upright state is used. The method for producing an optical element according to [7] or [8], which is measured as an arrangement angle of the optical plate material.
[10] In the step of inspecting, the other plane in which the one plane side of one end projecting sequentially from the adjacent translucent plates of the plurality of translucent plates is shielded by a light shielding member. The manufacturing method of the optical element according to any one of [7] to [9], wherein the arrangement angle of the plurality of translucent plates is sequentially examined by sequentially irradiating measurement light from the optical sensor.
[11] The method for manufacturing an optical element according to any one of [7] to [10], wherein a laser autocollimator is used as the optical sensor in the inspection step.
[12] The optical element according to any one of [7] to [11], wherein the plurality of translucent plates have a functional optical film provided on at least one of the two planes. Manufacturing method.
[13] The method for manufacturing an optical element according to any one of [7] to [12], further including a step of cutting the plurality of translucent plates that have undergone the inspection step or the fixing step.

  According to the optical element inspection method of the present invention, it is possible to accurately inspect the arrangement angle of a plurality of translucent plates. Moreover, according to the manufacturing method of the optical element to which such an inspection method is applied, a plurality of translucent plates can be arranged at an accurate arrangement angle.

It is a top view for demonstrating the inspection method of the optical element of 1st Embodiment. It is sectional drawing which shows an example of the arrangement | positioning angle of the translucent board | plate material test | inspected with the test | inspection method of the optical element shown in FIG. It is a top view which shows the other example of the arrangement | positioning angle of the translucent board | plate material test | inspected with the test | inspection method of the optical element shown in FIG. It is a top view for demonstrating the manufacturing method of the optical element of 2nd Embodiment. It is a top view for demonstrating the manufacturing method of the optical element of 3rd Embodiment. It is a top view for demonstrating the manufacturing method of the optical element of 4th Embodiment.

  Hereinafter, embodiments of the inspection method and the manufacturing method of the optical element of the present invention will be described.

(First embodiment)
First, an embodiment of the optical element inspection method of the present invention will be described with reference to FIGS. FIG. 1 is a plan view showing a state in which the optical element 1 is inspected based on the optical element inspection method of the embodiment. The optical element 1 shown in FIG. 1 includes a plurality of translucent plates 2, 2,. The optical element 1 to be inspected is placed on a stage 3 that can move in the XY directions. The plurality of translucent plates 2 have two parallel planes 2a and 2b, respectively. These two planes 2a and 2b function as an incident surface for incident light and an output surface for emitted light when the plurality of translucent plates 2 are caused to function as the optical element 1.

  As the translucent plate material 2, for example, a glass material such as soda lime glass, borosilicate glass, non-alkali glass, or quartz glass is used, but is not limited thereto. The translucent plate 2 may be a transparent resin material or the like. Although the translucent board | plate material 2 shown in FIG. 1 has the functional optical film 4 provided in the plane 2a, it is not restricted to this. Examples of the functional optical film 4 include a reflective film, a polarizing film, a selective transmission film, a separation film, and a filter film, but are not limited thereto. Examples of the optical element 1 include, but are not limited to, a reflective element, a polarizing element, a selective transmission element, a separation element, a filter element, and a combination of these elements.

  The plurality of translucent plates 2 are inclined at a predetermined angle A with respect to the incident light L0 assumed when functioning as the optical element 1, and are arranged in parallel at an interval. In the optical element 1 shown in FIG. 1, a plurality of translucent plates 2 are arranged on a substrate 5. Examples of the substrate 5 include, but are not limited to, a support substrate such as a glass substrate that supports a plurality of translucent plates 2 when the optical element 1 is configured. As the substrate 5, besides a glass substrate, a metal plate, a resin plate, or a composite material thereof can be used. Further, the shape of the substrate 5 is not limited to a plate shape as long as a plurality of translucent plates 2 can be arranged. As shown in an embodiment of an optical element manufacturing method to be described later, in the manufacturing process of the optical element 1, a temporary fixing substrate that temporarily fixes a plurality of translucent plates 2 may be used. That is, after aligning a plurality of translucent plates 2 on the temporary fixing substrate 5 and inspecting the alignment at that time, fixing the plurality of translucent plates 2 in the inspected state on the support substrate. Thus, an optical element including a plurality of translucent plates 2 can be manufactured. The optical element 1 to be inspected only needs to have a plurality of translucent plates 2.

  The plurality of translucent plates 2 have two parallel flat surfaces 2a and 2b with respect to the incident light L0 so that the flat surfaces 2a and 2b function as an incident surface and an output surface with respect to the assumed incident light L0. While being inclined at an angle A, they are arranged perpendicular to the virtual horizontal plane. The angle A with respect to the incident light L0 of the planes 2a and 2b is not particularly limited, and is appropriately set according to the configuration and function of the optical element 1. In addition, when the substrate 5 is the support substrate 5 when the optical element 1 is configured as described above, the surface 5a of the support substrate 5 serves as an installation surface for the plurality of translucent plates 2, so that the virtual horizontal plane Becomes the surface 5 a of the support substrate 5. Therefore, the plurality of translucent plates 2 are installed in an upright state on the support substrate 5 so that the planes 2 a and 2 b are orthogonal to the surface 5 a of the support substrate 5. When the substrate 5 is a temporarily fixed substrate 5 of a plurality of translucent plates 2, the plurality of translucent plates 2 are separately fixed to a support substrate. A plurality of translucent plates 2 are arranged so that the translucent plate 3 becomes an imaginary horizontal plane when the translucent plate 3 is in an upright state, and the planes 2a and 2b are orthogonal to the virtual horizontal plane 5a.

  The inspection process of the optical element 1 is performed as follows. In the inspection process of the optical element 1, the arrangement angles of the plurality of translucent plates 2 are inspected. As shown in FIG. 2, the angle of arrangement of the translucent plate 2 is an angle B of the planes 2a and 2b of the translucent plate 2 with respect to the surface 5a of the substrate 5, or a translucent plate as shown in FIG. The angle A with respect to the incident light L0 of 2 planes 2a and 2b is mentioned. If these angles A and B are deviated from each other, desired characteristics cannot be obtained as the optical element 1. Therefore, it is inspected whether the angles A and B are assumed angles or are within an allowable range of the assumed angles.

  Regarding the angle B, the translucent plate 2 is set so that the planes 2a and 2b are orthogonal to the surface of the support substrate. Therefore, when the substrate 5 is the support substrate 5 when the optical element 1 is configured, Then, it is inspected whether the angle (elevation angle) of the planes 2a and 2b with respect to the surface 5a of the substrate 5 is 90 ° or within an allowable range thereof. Even when the substrate 5 is the temporarily fixed substrate 5 of the translucent plate 2, the plurality of translucent plates 2 are fixed to the support substrate while maintaining an upright state with respect to the substrate 5. 5 is assumed to be a virtual horizontal plane, it is inspected whether the angle (elevation angle) of the planes 2a and 2b with respect to the surface 5a of the substrate 5 is 90 ° or within an allowable range thereof. Regarding the angle A, it is inspected whether the angle of the planes 2a and 2b with respect to the assumed incident light L0 is within the assumed angle or its allowable range.

  In carrying out the inspection of the angles A and B described above, since the plurality of translucent plates 2 are inclined and arranged at intervals, at least one end of the translucent plate 2 to be inspected is It protrudes from the adjacent translucent plate 2. That is, a part of the flat surface 2a of the translucent plate 2 to be inspected is exposed without being blocked by the adjacent translucent plate 2. For this reason, by using the plane 2a of the transparent plate 2 to be inspected exposed from the adjacent transparent plate 2 and irradiating the exposed plane with the inspection light (measurement light), the angle A is optically detected. , B can be inspected. Specifically, as shown in FIG. 1, by irradiating the measurement light L1 from the optical sensor 6 to the plane 2a of the light-transmitting plate 2 to be inspected exposed from the adjacent light-transmitting plate 2, Inspection of the angles A and B of the plane 2a is performed.

  An example of the optical sensor 6 is a laser autocollimator. The laser autocollimator 6 irradiates the inspection object with measurement light (measurement beam) L1 having a predetermined wavelength, and inspects the inclination of the inspection object from the angle of the reflected light L2 from the inspection object. When inspecting the angle B, as shown in FIG. 2, the measurement light (measurement beam) L1 is irradiated from the laser autocollimator 6 onto the plane 2a of the translucent plate 2, and the reflected light L2 from the plane 2a is perpendicular to the plane 2a. By measuring the angle in the direction (vertical direction), the elevation angle of the translucent plate 2 with respect to the surface 5a of the substrate 5 can be obtained. When the angle A is inspected, as shown in FIG. 3, the measurement light (measurement beam) L1 is radiated from the laser autocollimator 6 to the plane 2a of the translucent plate 2, and the reflected light L2 from the plane 2a. The angle of the translucent plate 2 with respect to the assumed incident light L0 can be obtained by measuring the angle in the plane direction (left-right direction). The optical sensor 6 is fixed to the inspection stage on which the substrate 5 or the like is placed with its position and angle compensated.

  In the inspection process of the angles A and B described above, since the plurality of translucent plates 2 are arranged at intervals, an adjacent translucent plate 2 is provided on the back side of the translucent plate 2 to be inspected. Exists. If the light transmitting plate 2 to be inspected is simply irradiated with the measurement light L1 from the laser autocollimator 6, the reflected light from the light transmitting plate 2 adjacent to the back side becomes noise, and accurate measurement can be performed. Can not. Therefore, the inspection process for the angles A and B is performed on the back side of the light-transmitting plate 2 to be inspected, specifically between the light-transmitting plate 2 to be inspected and the light-transmitting plate 2 adjacent to the back side. Further, the measurement light L1 is irradiated from the laser autocollimator 6 to the light-transmitting plate 2 to be inspected in a state where the light shielding member 7 is inserted. Since the noise caused by the reflected light from the adjacent translucent plate 2 can be blocked by the light shielding member 7, the angle A and the angle B of the translucent plate 2 to be inspected can be inspected more accurately. As the light shielding member 7, it is preferable to use a member having a surface that prevents the measurement light L1 irradiated from the laser autocollimator 6 from reflecting and absorbs light.

  When inspecting the angles A and B of the plurality of translucent plates 2, the stage 3 or the optical sensor 6 on which the optical element 1 is placed is moved in the XY direction, and the stage 3 or the optical sensor 6 is moved. The light shielding member 7 is moved in conjunction with the operation. That is, the light shielding member 7 is sequentially moved to the back side of the plurality of translucent plates 2, and the measurement light L1 is irradiated from the optical sensor 6 to the translucent plate 2 having the light shielding members 7 moved to the back side. Then, the angles A and B of the plurality of translucent plates 2 are measured in order. By interlocking the movement of the stage 3 or the optical sensor 6 and the movement of the light shielding member 7, the inspection of the plurality of translucent plates 2 in the optical element 1 can be automatically performed. In such an inspection process for a plurality of translucent plates 2, measurement of angle A and angle B may be performed simultaneously or separately based on the configuration of optical sensor 6 such as a laser autocollimator. May be.

  In performing the inspection process of the angles A and B, when the translucent plate 2 has the functional optical film 4, the reflectance of the functional optical film 4 is used as the measurement light L1 emitted from the laser autocollimator 6. It is preferable to use a laser beam having a wavelength of 0.5% or more. As a result, the angles A and B can be measured more accurately. If a laser beam having a wavelength with a reflectance of less than 0.5% is used, the intensity of the light received by the optical sensor 6 is weak and the signal is weak, so that accurate measurement may not be possible. In addition, an antireflection film that suppresses reflection of light of a specific wavelength may be used as the functional optical film 4, and also in this case, laser light having a wavelength at which the reflectance is 0.5% or more is used. Thus, the angles A and B can be measured more accurately. However, the inspection process of the plurality of translucent plates 2 is not limited to the inspection of the translucent plates 2 having the functional optical film 4. Even when the plurality of translucent plates 2 do not have the functional optical film 4, the measurement light L1 can be reflected with a certain degree of reflectance by the plane 2a of the translucent plate 2, so that the angle A, The inspection step B can be performed. In this case, it is preferable to select the wavelength of the laser beam or the like as the measurement light L1 in consideration of the reflectance at the surface (plane 2a) of the translucent plate member 2.

  As described above, in the inspection method of the embodiment, when inspecting an optical element including a plurality of light transmissive plates 2, the light shielding member 7 is disposed on the back side of the light transmissive plate 2 to be inspected. The light transmitting plate 2 to be inspected is irradiated with the measuring light L1 from the optical sensor 6 such as a laser autocollimator, and the arrangement angle of the light transmitting plate 2 is inspected. Accordingly, the arrangement angle of the light-transmitting plate 2 to be inspected, specifically the elevation angle A of the planes 2a and 2b with respect to the virtual horizontal plane, without being affected by noise due to the reflected light from the adjacent light-transmitting plate 2 or The angle A of the planes 2a and 2b with respect to the assumed incident light L0 can be measured accurately and quickly. Thus, the optical element 1 which has a desired characteristic can be provided reliably by determining the optical element 1 which is within the angle which the arrangement | positioning angle of the translucent board | plate material 2 assumes as a good product.

(Second Embodiment)
Next, as a second embodiment of the present invention, an embodiment of an optical element manufacturing method will be described with reference to FIG. In the method for manufacturing an optical element according to the second embodiment, as shown in FIG. 4, the plurality of translucent plates 2 are fixed at predetermined positions on the support substrate 5 constituting the optical element 1, and then described above. An inspection process of the translucent plate 2 is performed. That is, first, a translucent plate 2 having a plurality of parallel two planes 2a and 2b is prepared. The structure of the translucent plate 2 is as described above, and a functional optical film may be provided on at least one of the two planes 2a and 2b. A plurality of translucent plates 2 in which a plurality of translucent plates 2 are inclined on the surface 5a of the support substrate 5 at a predetermined angle A with respect to the assumed incident light L0, and are aligned at intervals. 2 is fixed to the support substrate 5. For fixing the translucent plate 2, for example, an adhesive such as a photo-curing adhesive is used, or fitting into a recess provided in the support substrate 5 or insertion into a guide groove is applied.

  With respect to the plurality of translucent plates 2 fixed on the surface 5a of the support substrate 5, the elevation angle B of the planes 2a and 2b with respect to the surface 5a of the support substrate 5 and the angles of the planes 2a and 2b with respect to the assumed incident light L0 An inspection process for an arrangement angle such as A is performed. As described in detail in the first embodiment, the inspection process of the translucent plate 2 is performed with the light shielding member disposed on the back side of the translucent plate 2 to be inspected. This is performed by irradiating the plate material 2 with measurement light from an optical sensor. The specific inspection process is as described in detail in the first embodiment. Inspection of the plurality of translucent plates 2 fixed on the surface 5a of the support substrate 5 is performed, and the optical element 1 in which the plurality of translucent plates 2 are fixed at an accurate position and angle is regarded as a good product. By determining, the optical element 1 having desired characteristics can be reliably provided. The optical element 1 after the inspection is not limited to having a final element shape, and may have an element shape corresponding to a plurality of elements. In such a case, the optical element 1 can be manufactured by cutting or processing the required shape after the inspection.

(Third embodiment)
Next, as a third embodiment of the present invention, another embodiment of the optical element manufacturing method will be described with reference to FIG. In the method of manufacturing an optical element according to the third embodiment, as shown in FIG. 5, a plurality of translucent plates 2 are aligned at predetermined positions on a temporarily fixed substrate 11, and the translucent plates in this state are arranged. After performing the inspection step 2, a plurality of translucent plates 2 aligned at an accurate position and angle are fixed to the support substrate while maintaining the state. That is, first, similarly to the second embodiment, a translucent plate 2 having a plurality of parallel two planes 2a and 2b is prepared. The structure of the translucent plate 2 is as described above, and a functional optical film may be provided on at least one of the two planes 2a and 2b.

  A plurality of translucent plates 2 are aligned on the temporarily fixed substrate 11. The temporary fixing substrate 11 shown in FIG. 5 has a temporary fixing tool for the translucent plate 2 provided on the surface 11a. That is, on the surface 11 a of the temporarily fixed substrate 11, a plurality of pressing pins 12 provided in accordance with the alignment shape of the plurality of light transmitting plates 2, and a light transmitting plate material pressed against the pressing pins 12. 2 and a pressing member 13 such as a leaf spring which is made upright by applying a pressing force. The combination of the pressing pin 12 and the pressing member 13 is arranged according to the number of the translucent plates 2 to be aligned on the temporarily fixed substrate 11, and the alignment shape of the plurality of translucent plates 2; That is, it is provided according to the arrangement interval and the arrangement angle. A plurality of translucent plates 2 are aligned on such a temporarily fixed substrate 11 and temporarily fixed by pressing pins 12 and pressing members 13. The temporarily fixed translucent plate 2 is aligned by the pressing pin 12 and the pressing member 13 at a desired arrangement interval or arrangement angle, but avoids some arrangement errors due to the accuracy of the temporary fixture. I can't.

  Therefore, as shown in FIG. 5, the plurality of translucent plates 2 aligned on the temporarily fixed substrate 11 are inspected, and whether the plurality of translucent plates 2 are aligned at an accurate position and angle. Determine if. That is, as in the inspection process described in the first embodiment, a part of the flat surface 2a of the translucent plate 2 to be inspected is exposed without being blocked by the adjacent translucent plate 2. Therefore, in the state where the light shielding member 7 is inserted between the translucent plate 2 to be inspected and the translucent plate 2 adjacent to the back side, the translucent of the inspection target exposed from the adjacent translucent plate 2 By irradiating the measuring light L1 from the optical sensor 6 to the flat surface 2a of the transparent plate material 2 and measuring the angle of the reflected light L2 from the flat surface 2a, the surface of the temporarily fixed substrate 11 (virtual horizontal surface) ) The elevation angle with respect to 11a and the angle with respect to the assumed incident light L0 are inspected.

  In the above-described inspection process, those in which the elevation angle of the plurality of translucent plates 2 and the angle with respect to the assumed incident light L0 are within the assumed angle range are determined as non-defective products and sent to the subsequent fixing process to the support substrate. Even if the elevation angle of the plurality of translucent plates 2 and the angle with respect to the assumed incident light L0 deviate from the assumed angular range, the plurality of translucent plates 2 are only temporarily fixed. The elevation angle of the translucent plate 2 and the angle with respect to the assumed incident light L0 can be readjusted. The plurality of translucent plates 2 having these angles readjusted are subjected to the inspection process again, and those determined to be non-defective are sent to the subsequent fixing process to the support substrate.

  In the process of fixing the plurality of translucent plates 2 to the support substrate, the plurality of translucent plates 2 are maintained while maintaining the arrangement angle and the upright state of the plurality of translucent plates 2 determined as non-defective products in the inspection process. A support substrate is bonded to the upper side of the substrate. As a result, the optical element 1 in which the elevation angle of the plurality of translucent plates 2 and the angle with respect to the assumed incident light L0 is within an assumed angle range, that is, the optical element 1 having desired characteristics can be more reliably manufactured. . When the shape of the plurality of translucent plates 2 fixed to the support substrate corresponds to the plurality of elements, the optical element 1 is cut and processed into a necessary shape after being fixed to the support substrate. To manufacture.

  In the third embodiment, since inspection is performed in a state where a plurality of light-transmitting plate members 2 are temporarily fixed, only non-defective products can be sent to the supporting substrate fixing step. Further, for those in which the elevation angle of the plurality of translucent plates 2 and the angle with respect to the assumed incident light L0 are determined to be poor, the elevation angle of the translucent plate 2 and the angle with respect to the assumed incident light L0 are readjusted, Generation of non-defective products can be suppressed. Therefore, the yield of the optical element 1 can be increased, and the optical element 1 having desired characteristics can be manufactured at a low cost.

(Fourth embodiment)
Next, as a fourth embodiment of the present invention, another embodiment of the method for manufacturing an optical element will be described with reference to FIG. In the optical element manufacturing method according to the fourth embodiment, a plurality of translucent plates 2 are aligned on a predetermined position on the temporarily fixed substrate 11 as in the third embodiment, and the translucency in this state is obtained. After performing the inspection process of the conductive plate material 2, the plurality of translucent plate materials 2 aligned at an accurate position and angle are fixed to the support substrate while maintaining the state. That is, first, similarly to the second embodiment, a translucent plate 2 having a plurality of parallel two planes 2a and 2b is prepared. The structure of the translucent plate 2 is as described above, and a functional optical film may be provided on at least one of the two planes 2a and 2b.

  A plurality of translucent plates 2 are aligned on the temporarily fixed substrate 11. The plurality of translucent plates 2 are temporarily fixed to the temporary fixing substrate 11 using a temporary fixing material capable of correcting the position such as wax. Next, as shown in FIG. 6, the plurality of translucent plates 2 aligned on the temporarily fixed substrate 11 are inspected, and whether the plurality of translucent plates 2 are aligned at an accurate position and angle. Determine if. That is, as in the inspection process described in the first embodiment, a part of the flat surface 2a of the translucent plate 2 to be inspected is exposed without being blocked by the adjacent translucent plate 2. Therefore, in the state where the light shielding member 7 is inserted between the translucent plate 2 to be inspected and the translucent plate 2 adjacent to the back side, the translucent of the inspection target exposed from the adjacent translucent plate 2 The surface of the temporarily fixed substrate 5 of the translucent plate 2 (virtual horizontal plane) is obtained by irradiating the plane 2a of the transparent plate 2 with the measurement light L1 from the optical sensor 6 and measuring the angle of the reflected light L2 from the plane 2a ) The elevation angle with respect to 5a and the angle with respect to the assumed incident light L0 are inspected.

  In the above-described inspection process, those in which the elevation angle of the plurality of translucent plates 2 and the angle with respect to the assumed incident light L0 are within the assumed angle range are determined as non-defective products and sent to the subsequent fixing process to the support substrate. Even if the elevation angle of the plurality of translucent plates 2 and the angle with respect to the assumed incident light L0 deviate from the assumed angular range, the plurality of translucent plates 2 are only temporarily fixed. The elevation angle of the translucent plate 2 and the angle with respect to the assumed incident light L0 can be readjusted. The plurality of translucent plates 2 having these angles readjusted are subjected to the inspection process again, and those determined to be non-defective are sent to the subsequent fixing process to the support substrate.

  In the process of fixing the plurality of translucent plates 2 to the support substrate, the plurality of translucent plates 2 are maintained while maintaining the arrangement angle and the upright state of the plurality of translucent plates 2 determined as non-defective products in the inspection process. A support substrate is bonded to the upper side of the substrate. As a result, the optical element 1 in which the elevation angle of the plurality of translucent plates 2 and the angle with respect to the assumed incident light L0 is within an assumed angle range, that is, the optical element 1 having desired characteristics can be more reliably manufactured. . When the shape of the plurality of translucent plates 2 fixed to the support substrate corresponds to the plurality of elements, the optical element 1 is cut and processed into a necessary shape after being fixed to the support substrate. To manufacture.

  In the fourth embodiment, as in the third embodiment, since inspection is performed with a plurality of translucent plates 2 temporarily fixed, only non-defective products can be sent to the support substrate fixing step. . Further, for those in which the elevation angle of the plurality of translucent plates 2 and the angle with respect to the assumed incident light L0 are determined to be poor, the elevation angle of the translucent plate 2 and the angle with respect to the assumed incident light L0 are readjusted, Generation of non-defective products can be suppressed. Therefore, the yield of the optical element 1 can be increased, and the optical element 1 having desired characteristics can be manufactured at a low cost.

  INDUSTRIAL APPLICABILITY The optical element inspection method of the present invention is useful for inspecting the arrangement angle of a plurality of translucent plates of various optical elements, and can accurately inspect whether an optical element has desired characteristics. it can. In addition, the method for producing an optical element of the present invention is useful for producing various optical elements because a plurality of translucent plates can be arranged at an accurate arrangement angle.

  DESCRIPTION OF SYMBOLS 1 ... Optical element, 2 ... Translucent board | plate material, 2a, 2b ... Plane, 4 ... Functional optical film, 5 ... Substrate, 5a ... Surface, 6 ... Optical sensor, 7 ... Light-shielding member, L0 ... Incident light, L1 ... Measuring light, L2 ... reflected light.

Claims (13)

A method for inspecting an optical element comprising a plurality of light-transmitting plate members having two parallel planes that are inclined at a predetermined angle with respect to incident light when functioning as an optical element and spaced from each other Because
A step of disposing a light shielding member on one of the two planes of the translucent plate to be inspected, and inspecting the arrangement angle of the translucent plate using an optical sensor from the other plane. A method for inspecting an optical element comprising:   In the step of inspecting, at least one selected from an elevation angle of the plane with respect to a virtual horizontal plane and an angle of the plane with respect to incident light when the plurality of translucent boards are in an upright state, and the translucent board is selected. The optical element inspection method according to claim 1, wherein the optical element is measured as an arrangement angle.   Measurement light from the optical sensor is applied to the other plane of the one end portion of the plurality of translucent plates that protrudes sequentially from the adjacent translucent plates, the one plane being blocked by a light shielding member. The optical element inspection method according to claim 1 or 2, wherein the arrangement angles of the plurality of translucent plates are sequentially inspected by sequentially irradiating.   4. The optical device according to claim 1, wherein the light shielding member is inserted between the light transmissive plate material to be inspected and the light transmissive plate material adjacent to the one plane side. 5. Element inspection method.   5. The optical element according to claim 1, wherein the plurality of translucent plates have a functional optical film provided on at least one of the two planes. 6. Inspection method.   The optical element inspection method according to claim 1, wherein a laser autocollimator is used as the optical sensor. Preparing a translucent plate having a plurality of parallel two planes;
Inclining the plurality of translucent plates at a predetermined angle with respect to incident light when functioning as an optical element, and aligning them at an interval; and
Fixing the aligned plurality of translucent plates; and
Among the plurality of fixed translucent plates, a light shielding member is arranged on one plane side of the two planes of the translucent plate to be inspected, and an optical sensor is used from the other plane side. And a step of inspecting an arrangement angle of the translucent plate material. Preparing a translucent plate having a plurality of parallel two planes;
Inclining the plurality of translucent plates at a predetermined angle with respect to incident light when functioning as an optical element, and aligning them at an interval; and
A light-shielding member is arranged on one plane side of the two planes of the translucent plate material to be inspected among the plurality of aligned translucent plate materials, and an optical sensor is used from the other plane side. A step of inspecting an arrangement angle of the translucent plate,
A step of fixing the plurality of translucent plates that are determined to be non-defective products in the inspecting step.   In the step of inspecting, at least one selected from an elevation angle of the plane with respect to a virtual horizontal plane and an angle of the plane with respect to incident light when the plurality of translucent boards are in an upright state, and the translucent board is selected. The method of manufacturing an optical element according to claim 7, wherein the optical element is measured as an arrangement angle.   In the step of inspecting, the one flat surface of one end projecting sequentially from the adjacent translucent plates of the plurality of translucent plates is on the other plane where the one plane side is blocked by a light shielding member, The method for manufacturing an optical element according to claim 7, wherein the arrangement angles of the plurality of translucent plates are sequentially inspected by sequentially irradiating measurement light from the optical sensor.   The method of manufacturing an optical element according to claim 7, wherein a laser autocollimator is used as the optical sensor in the inspection step.   The optical element according to claim 7, wherein the plurality of translucent plates have a functional optical film provided on at least one of the two planes. Production method.   The method of manufacturing an optical element according to any one of claims 7 to 12, further comprising a step of cutting the plurality of translucent plates that have undergone the inspection step or the fixing step.

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