JP2019014960A - Soft magnetic alloy powder and method for producing the same, and, dust core using the same - Google Patents

Soft magnetic alloy powder and method for producing the same, and, dust core using the same Download PDF

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JP2019014960A
JP2019014960A JP2018075900A JP2018075900A JP2019014960A JP 2019014960 A JP2019014960 A JP 2019014960A JP 2018075900 A JP2018075900 A JP 2018075900A JP 2018075900 A JP2018075900 A JP 2018075900A JP 2019014960 A JP2019014960 A JP 2019014960A
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soft magnetic
alloy powder
magnetic alloy
crystal phase
αfe
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JP6941766B2 (en
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正人 前出
Masato Maede
正人 前出
小島 俊之
Toshiyuki Kojima
俊之 小島
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Panasonic Intellectual Property Management Co Ltd
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Abstract

To provide soft magnetic alloy powder which has high saturation magnetic flux density and obtains excellent soft magnetic characteristics, and a dust core using the same.SOLUTION: The soft magnetic alloy powder is used which includes an amorphous phase and an αFe crystal phase residing in the amorphous phase, and in which a mode of volume distribution of a crystallite of the αFe crystal phase is 1 nm or more and 15 nm or less and a half width of the volume distribution of the crystallite of the αFe crystal phase is 3 nm or more and 50 nm or less. A method for producing soft magnetic alloy powder is used that comprises: a pulverizing step of pulverizing an alloy composition having an amorphous phase into a powder; and a heat treatment step of heat treating the powder to precipitate an αFe crystal phase so that the αFe crystal phase has a mode of volume distribution of a crystallite of 1 nm or more and 15 nm or less and has a half width of 3 nm or more and 50 nm or less.SELECTED DRAWING: Figure 1

Description

本願発明は、軟磁性合金粉末とその製造方法、および、それを用いた圧粉磁心に関する。特に、本願発明は、チョークコイル、リアクトル、トランス等のインダクタに用いられる軟磁性合金粉末とその製造方法、および軟磁性合金粉末を用いた圧粉磁心に関するものである。   The present invention relates to a soft magnetic alloy powder, a method for producing the same, and a dust core using the same. In particular, the present invention relates to a soft magnetic alloy powder used for an inductor such as a choke coil, a reactor, and a transformer, a manufacturing method thereof, and a dust core using the soft magnetic alloy powder.

近年、ハイブリッド自動車(HEV)やプラグインハイブリッド自動(PHEV)、電気自動車(EV)など、車両の電動化が急速に進んでおり、更なる燃費向上のためシステムの小型・軽量化が求められている。その電動化市場に牽引されて、様々な電子部品に対して小型化および軽量化が求められる中、チョークコイル、リアクトル、トランスなどで使用される軟磁性合金粉末およびそれを用いた圧粉磁心に対してますます高い性能が要求されている。   In recent years, the electrification of vehicles such as hybrid vehicles (HEV), plug-in hybrid automatics (PHEV), and electric vehicles (EV) is rapidly progressing, and the system is required to be smaller and lighter in order to further improve fuel efficiency. Yes. Driven by the electrification market, miniaturization and weight reduction are required for various electronic components, and soft magnetic alloy powders used in choke coils, reactors, transformers, etc. and dust cores using the same On the other hand, higher performance is required.

この軟磁性合金粉末およびそれを用いた圧粉磁心においては、小型化・軽量化のために、材質としては、飽和磁束密度が高いことが優れ、コアロスが小さくことが要求されている。さらに、この軟磁性合金粉末およびそれを用いた圧粉磁心は、直流重畳特性に優れることも要求されている。   In the soft magnetic alloy powder and the dust core using the soft magnetic alloy powder, in order to reduce the size and weight, the material is required to be excellent in high saturation magnetic flux density and small in core loss. Further, the soft magnetic alloy powder and the dust core using the soft magnetic alloy powder are also required to have excellent direct current superposition characteristics.

中でも、アモルファス相中に微小なαFe結晶相が析出したナノ結晶軟磁性合金は、高飽和磁束密度と低コアロスの両立が可能な優れた軟磁性材料である。   Among these, a nanocrystalline soft magnetic alloy in which a fine αFe crystal phase is precipitated in an amorphous phase is an excellent soft magnetic material capable of achieving both high saturation magnetic flux density and low core loss.

例えば、特許文献1には、高飽和磁束密度でナノスケールの結晶粒からなるFe基のナノ結晶軟磁性合金粉末の製造方法と、優れた磁気特性を示すナノ結晶軟磁性合金粉末および磁性部品が記載されている。   For example, Patent Document 1 discloses a method for producing a Fe-based nanocrystalline soft magnetic alloy powder composed of nanoscale crystal grains with a high saturation magnetic flux density, and a nanocrystalline soft magnetic alloy powder and a magnetic component exhibiting excellent magnetic properties. Have been described.

特許第5445888号公報Japanese Patent No. 5445888

図2に、特許文献1に記載された軟磁性合金粉末内部のミクロ組織の模式図を示す。ナノ軟磁性合金粉末は、平均粒径60nm以下のαFe結晶相1が、アモルファス相2中に体積分率で30%以上分散している。   FIG. 2 shows a schematic diagram of the microstructure inside the soft magnetic alloy powder described in Patent Document 1. As shown in FIG. In the nano soft magnetic alloy powder, the αFe crystal phase 1 having an average particle diameter of 60 nm or less is dispersed in the amorphous phase 2 by 30% or more by volume fraction.

しかしながら、この中には、数nm以下の大きさで結晶化が足りない微結晶粒や、数十nm以上の肥大化した結晶粒も含まれる。この場合、ナノ軟磁性合金粉末の磁気異方性が大きくなり、ナノ軟磁性合金粉末の保磁力が増加する。さらに、それを用いた圧粉磁心のコアロスも増加する。   However, this includes fine crystal grains having a size of several nanometers or less and insufficient crystallization, and enlarged crystal grains of several tens of nanometers or more. In this case, the magnetic anisotropy of the nano soft magnetic alloy powder increases, and the coercive force of the nano soft magnetic alloy powder increases. Furthermore, the core loss of the dust core using the same also increases.

本発明は、前記従来の課題を解決するもので、高飽和磁束密度でかつ優れた軟磁気特性が得られる結晶軟磁性合金粉末とその製造方法、および、それを用いた圧粉磁心を提供することを目的とする。   The present invention solves the above-mentioned conventional problems, and provides a crystalline soft magnetic alloy powder having a high saturation magnetic flux density and excellent soft magnetic properties, a method for producing the same, and a dust core using the crystalline soft magnetic alloy powder. For the purpose.

上記目的を達成するために、アモルファス相と、上記アモルファス相中に位置するαFe結晶相と、を有し、上記αFe結晶相の結晶子の体積分布の最頻値が1nm以上15nm以下であり、上記αFe結晶相の結晶子体積分布の半値幅が3nm以上50nm以下である軟磁性合金粉末を用いる。   In order to achieve the above object, an amorphous phase and an αFe crystal phase located in the amorphous phase, and a mode of volume distribution of crystallites of the αFe crystal phase is 1 nm or more and 15 nm or less, A soft magnetic alloy powder having a full width at half maximum of the crystallite volume distribution of the αFe crystal phase of 3 nm to 50 nm is used.

また、アモルファス相を有する合金組成物を粉末にする粉砕工程と、上記粉末を熱処理してαFe結晶相を析出させ、かつ、上記αFe結晶相の結晶子の体積分布の最頻値が1nm以上15nm以下、上記αFe結晶相の結晶子の体積分布の半値幅が3nm以上50nm以下にする熱処理工程と、を含む軟磁性合金粉末の製造方法を用いる。   In addition, a pulverizing step of powdering an alloy composition having an amorphous phase, and heat-treating the powder to precipitate an αFe crystal phase, and a mode value of a volume distribution of crystallites of the αFe crystal phase is 1 nm or more and 15 nm In the following, a method of producing a soft magnetic alloy powder is used, which includes a heat treatment step in which the half width of the volume distribution of the crystallites of the αFe crystal phase is 3 nm or more and 50 nm or less.

以上のように、本実施の形態で開示する手段によれば、軟磁性合金粉末の保磁力を低減でき、高飽和磁束密度でかつ優れた軟磁気特性が得られるナノ結晶軟磁性合金粉末とそれを用いた圧粉磁心を提供することができる。   As described above, according to the means disclosed in the present embodiment, a nanocrystalline soft magnetic alloy powder capable of reducing the coercive force of the soft magnetic alloy powder, obtaining a high saturation magnetic flux density and excellent soft magnetic properties, and The powder magnetic core using can be provided.

本実施の形態により製造した軟磁性合金粉末の結晶子の体積分布を示す図The figure which shows the volume distribution of the crystallite of the soft-magnetic alloy powder manufactured by this Embodiment 特許文献1に記載された軟磁性合金粉末内部のミクロ組織の模式図Schematic diagram of the microstructure inside the soft magnetic alloy powder described in Patent Document 1.

<軟磁性合金粉末の製造>
まず、本実施の形態の軟磁性合金粉末の製造方法について説明する。
<Manufacture of soft magnetic alloy powder>
First, the manufacturing method of the soft magnetic alloy powder of this Embodiment is demonstrated.

(1)αFe結晶相の微細結晶を析出する合金組成物を、高周波加熱などによって融解し、液体急冷法でアモルファス相の薄帯または薄片を作製する。アモルファス相の薄帯を作製する液体急冷法としては、Fe基アモルファス薄帯の製造などに使用される単ロール式のアモルファス製造装置や、双ロール式のアモルファス製造装置を使用することができる。   (1) An alloy composition in which fine crystals of the αFe crystal phase are precipitated is melted by high-frequency heating or the like, and an amorphous phase ribbon or flake is produced by a liquid quenching method. As a liquid quenching method for producing a thin ribbon of an amorphous phase, a single roll type amorphous production apparatus or a twin roll type amorphous production apparatus used for production of an Fe-based amorphous ribbon can be used.

(2)次に、薄帯または薄片を粉砕して粉末化する。薄帯または薄片の粉砕は、一般的な粉砕装置を使用できる。例えば、ボールミル、スタンプミル、遊星ミル、サイクロンミル、ジェットミル、回転ミルなどが使用できる。また、粉砕して得られた粉末を、ふるいを用いて分級することにより、所望の粒度分布を有する軟磁性合金粉末が得られる。   (2) Next, the ribbon or slice is pulverized into powder. A general crusher can be used for crushing the ribbon or flakes. For example, a ball mill, a stamp mill, a planetary mill, a cyclone mill, a jet mill, a rotary mill, etc. can be used. Moreover, the soft magnetic alloy powder which has a desired particle size distribution is obtained by classifying the powder obtained by grinding | pulverizing using a sieve.

(3)次に、薄帯または薄片の粉砕粉を熱処理して、αFe結晶相を析出させる。熱処理装置は、例えば、熱風炉、ホットプレス、ランプ、シースー金属ヒーター、セラミックヒーター、ロータリーキルンなどを使用できる。特に、ホットプレスで、粉末を挟んで熱処理するのが好ましい。粉体自体の温度を正確に制御できる。   (3) Next, the pulverized powder of the ribbon or flake is heat-treated to precipitate the αFe crystal phase. As the heat treatment apparatus, for example, a hot stove, a hot press, a lamp, a sheath metal heater, a ceramic heater, a rotary kiln, or the like can be used. In particular, it is preferable to perform heat treatment by sandwiching the powder with a hot press. The temperature of the powder itself can be accurately controlled.

熱処理時の粉末の温度を均一にすることにより、数nm以下の結晶化不足の微結晶粒や数十nm以上の肥大化した結晶粒ができるのを防ぎ、適切なサイズのαFe結晶相の結晶粒を析出させることができる。単に、容器に入れて、炉に入れるだけでは、粉末の温度が不均一となる。粉末の温度を均一にしないと、結晶化の度合いが場所で異なり、不均質な大きさの結晶となる。   By making the temperature of the powder uniform during the heat treatment, it is possible to prevent the formation of fine crystal grains insufficiently crystallized below several nanometers and enlarged crystal grains above several tens of nanometers. Grains can be precipitated. Simply placing it in a container and in a furnace results in a non-uniform powder temperature. If the temperature of the powder is not uniform, the degree of crystallization varies from place to place, resulting in inhomogeneous crystals.

その結果、高飽和磁束密度でかつ優れた軟磁気特性が得られる結晶軟磁性合金粉末が得られる。   As a result, a crystalline soft magnetic alloy powder having a high saturation magnetic flux density and excellent soft magnetic properties can be obtained.

<圧粉磁心の作製>
(1)本実施の形態における圧粉磁心の作製は、上記の軟磁性合金粉末と、フェノール樹脂やシリコーン樹脂などの絶縁性が良好で耐熱性が高いバインダーとを混合して造粒粉を作製する。
<Production of dust core>
(1) The powder magnetic core in the present embodiment is prepared by mixing the soft magnetic alloy powder and a binder having good insulation and high heat resistance such as phenol resin and silicone resin to produce granulated powder. To do.

(2)次に造粒粉を所望の形状を有する耐熱性が高い金型に充填し、加圧成形して圧粉体を得る。   (2) Next, the granulated powder is filled into a highly heat-resistant mold having a desired shape, and pressure-molded to obtain a green compact.

(3)その後、バインダーが加熱硬化し、かつα結晶相が析出しない温度で熱処理を行うことで、高飽和磁束密度でかつ優れた軟磁気特性が得られる圧粉磁心が得られる。   (3) Thereafter, by performing heat treatment at a temperature at which the binder is heat-cured and the α crystal phase is not precipitated, a powder magnetic core having a high saturation magnetic flux density and excellent soft magnetic properties can be obtained.

(評価方法)
<結晶子の体積分布>
軟磁性合金粉末における結晶子の体積分布は、まず、X線回折装置(XRD)によって得られた粉末試料のX線回折プロファイルを取得する。次に、プロファイル形状を、体積荷重分布関数を用いて表現し、直径に対する体積比率を計算することによって、結晶子の体積分布が得られる。
(Evaluation method)
<Volume distribution of crystallites>
As for the volume distribution of crystallites in the soft magnetic alloy powder, first, an X-ray diffraction profile of a powder sample obtained by an X-ray diffractometer (XRD) is obtained. Next, the profile shape is expressed using a volume load distribution function, and the volume ratio of the crystallite is obtained by calculating the volume ratio with respect to the diameter.

<結晶化度>
また、軟磁性合金粉末におけるαFe結晶相の割合を示す結晶化度は、X線回折装置(XRD)によって得られた粉末試料のX線回折パターンから得ることができる。αFe結晶相の回折パターンと、アモルファス相に特有のブロードな回折パターンを分離する。次に、それぞれの回折強度を求めた後、全回折強度に対するαFe結晶相の回折強度の比を計算することによって、結晶化度が得られる。
<Crystallinity>
The crystallinity indicating the proportion of the αFe crystal phase in the soft magnetic alloy powder can be obtained from an X-ray diffraction pattern of a powder sample obtained by an X-ray diffractometer (XRD). The diffraction pattern of the αFe crystal phase is separated from the broad diffraction pattern unique to the amorphous phase. Next, after obtaining the respective diffraction intensities, the crystallinity can be obtained by calculating the ratio of the diffraction intensity of the αFe crystal phase to the total diffraction intensity.

なお、X線回折装置(XRD)は、RINT−Ultima(リガク社製)を使用し、照射X線はCu−Kα、光学系は集中ビーム系、検出器はゴニオメータ型を使用した。   The X-ray diffractometer (XRD) used was RINT-Ultima (manufactured by Rigaku Corporation), the irradiation X-ray was Cu-Kα, the optical system was a concentrated beam system, and the detector was a goniometer type.

(実施例、比較例)
急冷単ロール法により作製したFe73.5−Cu1−Nb3−Si13.5−B9(原子%)のFe系アモルファス合金薄帯を、回転ミルを用いて粉砕し、アモルファス相の軟磁性合金粉末を得た。粉砕は、粗粉砕3分後、微粉砕20分実施した。
(Examples and comparative examples)
A Fe-based amorphous alloy ribbon of Fe73.5-Cu1-Nb3-Si13.5-B9 (atomic%) produced by a quenching single roll method is pulverized using a rotary mill to obtain a soft magnetic alloy powder in an amorphous phase. It was. The pulverization was performed for 3 minutes after the coarse pulverization for 20 minutes.

次に、粉砕粉を熱処理して、αFe結晶相を析出させた。熱処理は、実施例1〜4の他に、比較用として、比較例1、比較例2の6通り実施した。
<熱処理>
実施例1は、ホットプレスで550℃、20秒加熱した。
Next, the pulverized powder was heat-treated to precipitate an αFe crystal phase. In addition to Examples 1 to 4, the heat treatment was performed in six ways, Comparative Example 1 and Comparative Example 2, for comparison.
<Heat treatment>
Example 1 was heated with a hot press at 550 ° C. for 20 seconds.

実施例2は、熱風炉で390℃、12時間加熱した後、ホットプレスで550℃、7分加熱した。   In Example 2, after heating in a hot air oven at 390 ° C. for 12 hours, it was heated in a hot press at 550 ° C. for 7 minutes.

実施例3は、ホットプレスで550℃、20秒加熱した。   In Example 3, the hot pressing was performed at 550 ° C. for 20 seconds.

実施例4は、ホットプレスで550℃、20秒加熱した。   Example 4 was heated with a hot press at 550 ° C. for 20 seconds.

比較例1は、熱風炉で530℃、10分加熱した。   Comparative Example 1 was heated in a hot stove at 530 ° C. for 10 minutes.

比較例2は、ホットプレスで550℃、20秒加熱した後、熱プラズマにより再溶融させた。   In Comparative Example 2, after heating at 550 ° C. for 20 seconds with a hot press, it was remelted with thermal plasma.

図1に、得られたそれぞれのナノ結晶軟磁性合金粉末に対して、X線回折装置(XRD)を用いて、結晶子サイズの度数分布を算出した結果を示す。図1の度数分布より、それぞれの結晶子サイズの度数分布の最頻値と半値幅を算出した。最頻値は、最大度数のところの結晶子サイズである。また、上述した結晶化度の算出方法により、結晶化度を算出した。   FIG. 1 shows the result of calculating the frequency distribution of crystallite size for each obtained nanocrystalline soft magnetic alloy powder using an X-ray diffractometer (XRD). From the frequency distribution of FIG. 1, the mode value and the half-value width of the frequency distribution of each crystallite size were calculated. The mode is the crystallite size at the maximum frequency. Further, the crystallinity was calculated by the above-described crystallinity calculation method.

また、シリコーン樹脂をバインダーとして混合し、造粒を行い、造粒粉を作製した。次に、造粒粉を金型に投入し、加圧成形を行って圧粉体を作製した。シリコーン樹脂は、軟磁性合金粉末の3重量%程度とした。   Moreover, the silicone resin was mixed as a binder, granulated, and granulated powder was produced. Next, the granulated powder was put into a mold and subjected to pressure molding to produce a green compact. The silicone resin was about 3% by weight of the soft magnetic alloy powder.

得られたそれぞれの圧粉体に対して、B−Hアナライザーを用いて、周波数1MHz、磁束密度25mTにおけるコア損失を測定した。コア損失の合否基準は、1300kW/m以下とした。その理由は、一般的な金属系の材料のコア損失以下となることを目標としたためである。 For each obtained green compact, the core loss at a frequency of 1 MHz and a magnetic flux density of 25 mT was measured using a BH analyzer. The pass / fail criterion for core loss was 1300 kW / m 3 or less. The reason is that the target is to be equal to or less than the core loss of a general metal material.

表1に、実施例1〜4、比較例1、比較例2の結晶子サイズの体積分布の最頻値と半値幅、結晶化度、コア損失を示す。なお、比較例2のコア損失は、軟磁性粉末の保磁力が実施例1の4倍程度あり、コア損失が大きく装置限界を超えて測定できなかったため、4000kW/m以上と推定している。 Table 1 shows the mode, volume at half maximum, crystallinity, and core loss of the crystallite size volume distributions of Examples 1 to 4, Comparative Example 1, and Comparative Example 2. The core loss of Comparative Example 2 is estimated to be 4000 kW / m 3 or more because the coercive force of the soft magnetic powder is about four times that of Example 1 and the core loss is too large to be measured beyond the apparatus limit. .

Figure 2019014960
Figure 2019014960

<結晶サイズの体積分布の最頻値および半値幅、結晶化度>
表1の結果をみると、結晶子の体積分布の最頻値および半値幅が小さすぎても大きすぎてもコア損失が増加し、結晶子の体積分布には、コア損失を小さくする最適な結晶子サイズの体積分布があることがわかる。さらに、結晶化度が高い方がコア損失を小さくできることもわかる。
<体積分布の最頻値と半値幅>
したがって、結晶子の体積分布の最頻値が1nm以上15nm以下、かつ、結晶子サイズの体積分布の半値幅が3nm以上50nm以下がよい。
<Mode and half width of crystal size volume distribution, crystallinity>
The results of Table 1 show that the core loss increases if the mode and half-value width of the crystallite volume distribution is too small or too large, and the crystallite volume distribution is optimal for reducing the core loss. It can be seen that there is a volume distribution of crystallite size. It can also be seen that the higher the crystallinity, the smaller the core loss.
<Mode and half width of volume distribution>
Therefore, the mode of the volume distribution of the crystallites is preferably 1 nm or more and 15 nm or less, and the half width of the volume distribution of the crystallite size is 3 nm or more and 50 nm or less.

また、結晶子の体積部分の最頻値は、6nm以上15nm以下がよい。   Further, the mode value of the volume part of the crystallite is preferably 6 nm or more and 15 nm or less.

結晶子の体積分布の最頻値が8nm以上15nm以下、かつ、結晶子サイズの体積分布の半値幅が10nm以上20nm以下が好ましい。   The mode value of the crystallite volume distribution is preferably 8 nm or more and 15 nm or less, and the half width of the crystallite size volume distribution is preferably 10 nm or more and 20 nm or less.

さらに、結晶子の体積分布の最頻値が8nm以上11nm以下、かつαFe結晶相の結晶子の体積分布の半値幅が10nm以上15nm以下がよい。
<結晶化度>
加えて、結晶化度が55%より高いと、さらにコア損失が小さい圧粉磁心が得られる。
結晶化度は、70%%以上であると好ましい。さらに、結晶化度が、80%以上であると好ましい。
Further, the mode of the volume distribution of the crystallites is preferably 8 nm or more and 11 nm or less, and the half width of the volume distribution of the crystallites of the αFe crystal phase is preferably 10 nm or more and 15 nm or less.
<Crystallinity>
In addition, when the degree of crystallinity is higher than 55%, a dust core having a smaller core loss can be obtained.
The crystallinity is preferably 70% or more. Furthermore, the crystallinity is preferably 80% or more.


なお、実施例2は実施例1に対して、熱処理時間を長くして粉末の周囲に形成される酸化膜の厚みを増やし、圧粉磁心の耐圧を向上させている。

Compared to Example 1, Example 2 increases the thickness of the oxide film formed around the powder by increasing the heat treatment time, thereby improving the pressure resistance of the dust core.

実施例2は、実施例1に対して、結晶サイズの体積分布が少し大きくなるが、コア損失は比較例1より小さく、合否基準を満たすことができる。よって、信頼性を高めた上で優れた磁気特性が得られていると考えられる。   In Example 2, the volume distribution of the crystal size is slightly larger than that in Example 1, but the core loss is smaller than that of Comparative Example 1 and can satisfy the pass / fail criteria. Therefore, it is considered that excellent magnetic characteristics are obtained with improved reliability.

比較例1は、結晶子が数nm以下で小さく、結晶化が不足している微粒子を多数含み、結晶化度が低い。比較例2は、数十nm以上の肥大化した結晶粒を多数含み、結晶化度が低い。   Comparative Example 1 has a small crystallite of several nanometers or less, includes many fine particles that are insufficiently crystallized, and has a low crystallinity. Comparative Example 2 includes a large number of enlarged crystal grains of several tens of nm or more and has a low crystallinity.

したがって、比較例1、比較例2とも、ナノ軟磁性合金粉末の磁気異方性が大きくなり、ナノ軟磁性合金粉末の保磁力が増加する。さらに、それを用いた圧粉磁心のコア損失も増加する。   Therefore, in both Comparative Example 1 and Comparative Example 2, the magnetic anisotropy of the nano soft magnetic alloy powder increases, and the coercive force of the nano soft magnetic alloy powder increases. Furthermore, the core loss of the dust core using the same also increases.

一方、実施例1、実施例2は、結晶子が数nm以下や数十nm以上の割合が少なく、さらに、結晶化度も高く、ナノ軟磁性合金粉末の磁気異方性が平均化されて小さくなり、ナノ軟磁性合金粉末の保磁力が小さくなる、と考えられる。さらに、それを用いた圧粉磁心のコア損失も低減できる。   On the other hand, in Examples 1 and 2, the crystallite has a small proportion of several nm or less and several tens of nm or more, and the crystallinity is high, and the magnetic anisotropy of the nano soft magnetic alloy powder is averaged. It is considered that the coercive force of the nano soft magnetic alloy powder is reduced and the magnetic force is reduced. Furthermore, the core loss of the powder magnetic core using it can also be reduced.

<考察>
粉末の集合体は、粉末間に空隙が存在し熱伝導性が低い。そのため、熱風炉で熱処理すると、一部の粉末は熱が十分に伝わらず、粉末の熱処理時の温度が十分に上がらない。
<Discussion>
The powder aggregate has low thermal conductivity due to the presence of voids between the powders. For this reason, when heat treatment is performed in a hot stove, heat is not sufficiently transferred to some powders, and the temperature during the heat treatment of the powder does not rise sufficiently.

一方、熱風炉には吸熱機能がないため、一部の粉末は、αFe結晶相析出に伴う自己発熱により熱暴走し、粉末の熱処理時の温度が上がりすぎる。   On the other hand, since the hot stove does not have an endothermic function, some powders run away due to self-heating due to the αFe crystal phase precipitation, and the temperature during the heat treatment of the powder is too high.

よって、熱風炉での熱処理は、熱処理時の粉末の温度が不均一になり、数nm以下の微結晶粒と数十nm以上の肥大化した結晶粒が多数混在した状態となり、軟磁性合金粉末の保磁力が増加する。   Therefore, the heat treatment in the hot stove makes the temperature of the powder non-uniform during the heat treatment, resulting in a state where a large number of fine crystal grains of several nm or less and a large number of enlarged crystal grains of several tens of nm are mixed. The coercive force increases.

一方、ホットプレスでの熱処理は、上下から粉末を、加熱板で挟み込んで加熱するため、熱伝導性が高い。さらに、αFe結晶相析出に伴う自己発熱により、粉末の温度がホットプレスより高くなると、粉末の発熱を加熱板で吸熱することができる。   On the other hand, the heat treatment in the hot press has high thermal conductivity because the powder is sandwiched between the heating plates and heated from above and below. Further, when the temperature of the powder becomes higher than that of the hot press due to self-heating due to the precipitation of the αFe crystal phase, the heat generation of the powder can be absorbed by the heating plate.

したがって、熱処理時の全ての粉末の温度を均一にでき、最適なサイズのαFe結晶相を析出させることができる。よって、高飽和磁束密度でかつ優れた軟磁気特性が得られる結晶軟磁性合金粉末が得られる。   Therefore, the temperature of all the powders during the heat treatment can be made uniform, and the αFe crystal phase of the optimum size can be precipitated. Therefore, a crystalline soft magnetic alloy powder having a high saturation magnetic flux density and excellent soft magnetic characteristics can be obtained.

(全体として)
なお、Fe基アモルファス合金薄帯は、実施例の組成の薄帯に限定されるものではなく、αFe結晶相の微細結晶を析出できるものであればよい。
(as a whole)
Note that the Fe-based amorphous alloy ribbon is not limited to the ribbon having the composition of the embodiment, but may be any as long as it can precipitate fine crystals of the αFe crystal phase.

また、結晶子サイズ体積分布、結晶化度も、実施例の組成でなくとも、同様である。   Further, the crystallite size volume distribution and the crystallinity are the same even if they are not the compositions of the examples.

本実施の形態によれば、高飽和磁束密度でかつ優れた軟磁気特性が得られるナノ結晶軟磁性合金粉末とそれを用いた圧粉磁心を提供することができる。   According to the present embodiment, it is possible to provide a nanocrystalline soft magnetic alloy powder with a high saturation magnetic flux density and excellent soft magnetic characteristics, and a dust core using the nanocrystalline soft magnetic alloy powder.

1 αFe結晶相
2 アモルファス相
1 αFe crystal phase 2 Amorphous phase

Claims (12)

アモルファス相と、
前記アモルファス相中に位置するαFe結晶相と、
を有し、
前記αFe結晶相の結晶子の体積分布の最頻値が1nm以上15nm以下であり、
前記αFe結晶相の結晶子の体積分布の半値幅が3nm以上50nm以下である軟磁性合金粉末。
An amorphous phase,
An αFe crystal phase located in the amorphous phase;
Have
The mode of volume distribution of crystallites of the αFe crystal phase is 1 nm or more and 15 nm or less,
A soft magnetic alloy powder having a half width of a volume distribution of crystallites of the αFe crystal phase of 3 nm to 50 nm.
前記αFe結晶相の結晶子の体積分布の最頻値が6nm以上15nm以下である請求項1記載の軟磁性合金粉末。 The soft magnetic alloy powder according to claim 1, wherein a mode value of volume distribution of crystallites of the αFe crystal phase is 6 nm or more and 15 nm or less. 前記αFe結晶相の結晶子の体積分布の最頻値が8nm以上15nm以下である請求項1記載の軟磁性合金粉末。 The soft magnetic alloy powder according to claim 1, wherein the mode value of the volume distribution of crystallites of the αFe crystal phase is 8 nm or more and 15 nm or less. 前記αFe結晶相の結晶子の体積分布の半値幅が10nm以上20nm以下である請求項1または2記載の軟磁性合金粉末。 The soft magnetic alloy powder according to claim 1 or 2, wherein a half width of a volume distribution of crystallites of the αFe crystal phase is 10 nm or more and 20 nm or less. 前記αFe結晶相の結晶子の体積分布の最頻値が8nm以上11nm以下である請求項1〜3のいずれか1項に記載の軟磁性合金粉末。 The soft magnetic alloy powder according to any one of claims 1 to 3, wherein a mode value of a volume distribution of crystallites of the αFe crystal phase is 8 nm or more and 11 nm or less. 前記αFe結晶相の結晶子の体積分布の半値幅が10nm以上15nm以下である請求項1〜4のいずれか1項に記載の軟磁性合金粉末。 The soft magnetic alloy powder according to any one of claims 1 to 4, wherein a half width of a volume distribution of crystallites of the αFe crystal phase is 10 nm or more and 15 nm or less. 前記αFe相の結晶化度が55%より高い請求項1〜6のいずれか1項に軟磁性合金粉末。   The soft magnetic alloy powder according to claim 1, wherein the crystallinity of the αFe phase is higher than 55%. 前記αFe相の結晶化度が70%以上である請求項7項に軟磁性合金粉末。   The soft magnetic alloy powder according to claim 7, wherein the crystallinity of the αFe phase is 70% or more. 前記αFe相の結晶化度が80%以上である請求項7項に軟磁性合金粉末。   The soft magnetic alloy powder according to claim 7, wherein the crystallinity of the αFe phase is 80% or more. 請求項1から9のいずれか1項に記載の軟磁性合金粉末と、バインダーとを、含む圧粉磁心。   A dust core comprising the soft magnetic alloy powder according to any one of claims 1 to 9 and a binder. アモルファス相を有する合金組成物を粉末にする粉砕工程と、
前記粉末を熱処理してαFe結晶相を析出させ、かつ、前記αFe結晶相の結晶子サイズの体積分布の最頻値が1nm以上15nm以下、前記αFe結晶相の結晶子サイズの体積分布の半値幅が3nm以上50nm以下にする熱処理工程と、を含む軟磁性合金粉末の製造方法。
A pulverizing step of powdering an alloy composition having an amorphous phase;
The powder is heat-treated to precipitate an αFe crystal phase, and the mode value of the volume distribution of the crystallite size of the αFe crystal phase is 1 nm or more and 15 nm or less, the half width of the volume distribution of the crystallite size of the αFe crystal phase And a heat treatment step of 3 nm or more and 50 nm or less.
前記熱処理工程では、ホットプレスで前記粉末を挟んで熱処理する請求項11記載の軟磁性合金粉末の製造方法。
The method for producing a soft magnetic alloy powder according to claim 11, wherein in the heat treatment step, the heat treatment is performed by sandwiching the powder with a hot press.
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