JP2019011525A - Light reflecting glass cloth - Google Patents
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- JP2019011525A JP2019011525A JP2017127784A JP2017127784A JP2019011525A JP 2019011525 A JP2019011525 A JP 2019011525A JP 2017127784 A JP2017127784 A JP 2017127784A JP 2017127784 A JP2017127784 A JP 2017127784A JP 2019011525 A JP2019011525 A JP 2019011525A
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- light reflector
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- LDXJRKWFNNFDSA-UHFFFAOYSA-N 2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound C1CN(CC2=NNN=C21)CC(=O)N3CCN(CC3)C4=CN=C(N=C4)NCC5=CC(=CC=C5)OC(F)(F)F LDXJRKWFNNFDSA-UHFFFAOYSA-N 0.000 description 2
- IHCCLXNEEPMSIO-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperidin-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1CCN(CC1)CC(=O)N1CC2=C(CC1)NN=N2 IHCCLXNEEPMSIO-UHFFFAOYSA-N 0.000 description 2
- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 2
- DEXFNLNNUZKHNO-UHFFFAOYSA-N 6-[3-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperidin-1-yl]-3-oxopropyl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1CCN(CC1)C(CCC1=CC2=C(NC(O2)=O)C=C1)=O DEXFNLNNUZKHNO-UHFFFAOYSA-N 0.000 description 2
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
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- OHVLMTFVQDZYHP-UHFFFAOYSA-N 1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-2-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound N1N=NC=2CN(CCC=21)C(CN1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)=O OHVLMTFVQDZYHP-UHFFFAOYSA-N 0.000 description 1
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 1
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- WZFUQSJFWNHZHM-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC(=O)N1CC2=C(CC1)NN=N2 WZFUQSJFWNHZHM-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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Landscapes
- Laminated Bodies (AREA)
- Woven Fabrics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
本発明は、紫外線ランプや半導体製造装置に用いられる光の反射体に好適な、広範囲な波長領域において反射効率が良好でかつ再利用可能なガラスクロスを使用した光反射体に関する。 The present invention relates to a light reflector using a glass cloth that is suitable for a light reflector used in an ultraviolet lamp or a semiconductor manufacturing apparatus and has a good reflection efficiency in a wide wavelength range and can be reused.
産業用ヒータを主目的とする照射効率を向上する為の光の反射体としては、アルミニウムや金、銀膜が一般的に用いられている。 Aluminum, gold, and silver films are generally used as light reflectors for improving the irradiation efficiency mainly for industrial heaters.
しかしながら、半導体製造装置に用いられる熱の反射体としては、これらの金属膜が汚染原因となる為に使用できない場合がある事、またＵＶランプの波長領域ではこれら金属膜での吸収の影響により反射効率が著しく低下する等の問題があり、半導体製造装置やＵＶランプの反射体として金属膜は好ましくない。 However, as heat reflectors used in semiconductor manufacturing equipment, these metal films may not be used because they cause contamination, and in the wavelength range of UV lamps, they are reflected by the influence of absorption by these metal films. There is a problem that the efficiency is remarkably lowered, and a metal film is not preferable as a reflector of a semiconductor manufacturing apparatus or a UV lamp.
金属膜による弊害を克服する反射膜として、高純度のシリカ粉を気泡が混入する方法で焼結し、多数の気泡を内包する薄膜層により、半導体製造装置で嫌われる金属不純物の少ない、かつ波長３００ｎｍ〜２２００ｎｍに渡る広い波長領域で高い反射率を有する反射体が提案されている（特許文献１）。 As a reflective film that overcomes the negative effects of metal films, high-purity silica powder is sintered by a method in which bubbles are mixed, and a thin film layer that contains a large number of bubbles reduces the amount of metal impurities that are disliked by semiconductor manufacturing equipment. A reflector having a high reflectance in a wide wavelength region ranging from 300 nm to 2200 nm has been proposed (Patent Document 1).
この高純度シリカガラス層による反射体は半導体製造装置の加熱用反射体あるいはＵＶランプ反射体として好適に用いられているが、反射体自体がシリカガラス管の外表面若しくは内表面にコーティング層として形成される為、シリカガラス管と一体となっており、非常に高価な反射層であるにも関わらず、使用によってシリカガラス管が破損した場合、あるいは反射層が破損した場合、一方の修理が効かず、そのまま全体を廃棄するしか方法が無かった。 The reflector made of this high-purity silica glass layer is suitably used as a heating reflector or UV lamp reflector in semiconductor manufacturing equipment, but the reflector itself is formed as a coating layer on the outer or inner surface of the silica glass tube. Therefore, if the silica glass tube is damaged by use or the reflective layer is damaged even though it is integrated with the silica glass tube and it is a very expensive reflective layer, one of the repairs is effective. There was no other way but to dispose of the whole.
本発明の目的は、紫外線ランプや半導体製造装置に用いられる光の反射体に好適な、広範囲な波長領域において反射効率が良好でかつ再利用可能なガラスクロス光反射体を提供することを目的とする。 An object of the present invention is to provide a glass cloth light reflector that is suitable for a reflector of light used in an ultraviolet lamp or a semiconductor manufacturing apparatus, has a good reflection efficiency in a wide wavelength range, and can be reused. To do.
上記の問題点を鑑み、発明者らが鋭意検討した結果、ガラスクロスよりなる光反射体をガラス管の外部に高効率な反射率が得られる状態で構成する事により、ガラス管若しくは反射体の何れかに破損や不具合が生じた場合、一方のみを交換する事が可能となる事を見出した。 In view of the above problems, as a result of intensive studies by the inventors, by configuring a light reflector made of glass cloth in a state in which a highly efficient reflectance is obtained outside the glass tube, the glass tube or the reflector It has been found that if one of them is damaged or defective, only one of them can be replaced.
更に、本発明の副次的な効果として、ガラスクロスがガラス管の保護層あるいは保温層として機能する事で、ガラスクロスのクッション効果によりガラス管自体が割れ辛く、また保温効率の向上がもたらされる事を見出した。 Further, as a secondary effect of the present invention, the glass cloth functions as a protective layer or a heat insulating layer of the glass tube, so that the glass tube itself is difficult to break due to the cushioning effect of the glass cloth, and the heat insulating efficiency is improved. I found a thing.
即ち、本発明のガラスクロス光反射体は、Ｅガラス、Ｓガラス、Ｔガラス、ＵＴガラス、Ｄガラス、Ｌガラス、ＮＥガラス及びシリカガラスからなる群から選択される１種以上のガラスフィラメントを複数本束ね、撚糸したガラスヤーンを製織されてなるガラスクロスからなるガラスクロス光反射体である。 That is, the glass cloth light reflector of the present invention includes a plurality of one or more glass filaments selected from the group consisting of E glass, S glass, T glass, UT glass, D glass, L glass, NE glass, and silica glass. This is a glass cloth light reflector made of a glass cloth made by weaving a bundled and twisted glass yarn.
本明細書では、ガラス繊維とは、ガラスを引き伸ばして得られる細い糸状のものを指し、単繊維をガラスフィラメント、ガラスフィラメントを束ねたものをガラスストランド、ガラスフィラメントを束ねて撚りをかけたものをガラスヤーンと定義する。 In this specification, the glass fiber refers to a thin thread-like shape obtained by stretching glass, a single filament made of glass filament, a bundle of glass filaments made of glass strands, and a bundle of glass filaments twisted. Defined as glass yarn.
本発明の光反射体は、前記ガラスクロスのヤーンにより光反射されることで、波長４００ｎｍ〜２０００ｎｍにおける光に対する反射率が７０％以上であることが好適である。 The light reflector of the present invention is preferably light-reflected by the glass cloth yarn, so that the reflectance with respect to light at a wavelength of 400 nm to 2000 nm is 70% or more.
前記ガラスフィラメントがシリカガラスからなるシリカガラスフィラメントであることが好ましい。本発明の光反射体は、前記シリカガラスフィラメントを複数本束ね、撚糸したシリカガラスヤーンであって、波長４００ｎｍ以下の紫外線領域でも優れた反射率特性を有するシリカガラスヤーンを製織されてなるシリカガラスクロスからなるシリカガラスクロス光反射体であって、前記シリカガラスクロスのヤーンにより光反射されることで、波長３００ｎｍ〜２０００ｎｍにおける光に対する反射率が７０％以上であることが好適である。 It is preferable that the glass filament is a silica glass filament made of silica glass. The light reflector of the present invention is a silica glass yarn in which a plurality of the silica glass filaments are bundled and twisted, and is formed by weaving a silica glass yarn having excellent reflectance characteristics even in an ultraviolet region having a wavelength of 400 nm or less. It is a silica glass cloth light reflector made of cloth, and it is preferable that the reflectance with respect to light at a wavelength of 300 nm to 2000 nm is 70% or more by being reflected by the yarn of the silica glass cloth.
本発明の光反射体は、前記ガラスクロスが積層されてなることが好ましい。 The light reflector of the present invention is preferably formed by laminating the glass cloth.
本発明の光反射体は、紫外線ランプ、または半導体製造装置に好適に用いられる。 The light reflector of the present invention is suitably used for an ultraviolet lamp or a semiconductor manufacturing apparatus.
本発明によれば、紫外線ランプや半導体製造装置に用いられる光の反射体に好適な、広範囲な波長領域において反射効率が良好でかつ再利用可能なガラスクロス光反射体を提供することができる。さらに、本発明によれば、クッション保護性やフレキシブル性、保温効果性に優れたガラスクロス光反射体を得ることができる。
更に、シリカガラスクロス反射体の場合には１０００℃程度までの高耐熱性も付与される。
According to the present invention, it is possible to provide a glass cloth light reflector that has good reflection efficiency and can be reused in a wide wavelength range, which is suitable for a light reflector used in an ultraviolet lamp or a semiconductor manufacturing apparatus. Furthermore, according to this invention, the glass cloth light reflector excellent in cushion protective property, flexibility, and heat retention effect can be obtained.
Furthermore, in the case of a silica glass cloth reflector, high heat resistance up to about 1000 ° C. is also imparted.
以下に本発明の実施の形態を説明するが、これらは例示的に示されるもので、本発明の技術思想から逸脱しない限り種々の変形が可能なことはいうまでもない。 Embodiments of the present invention will be described below, but these are exemplarily shown, and it goes without saying that various modifications are possible without departing from the technical idea of the present invention.
図１は本発明のガラスクロス光反射体の表面の拡大写真であり、図２は図１のＡで示される部分であるガラスヤーン１２の要部拡大模式図であり、図３は、図２のＢで示される部分であるガラスストランド１４の拡大写真であり、図４は、図３のＣで示される部分であるガラスフィラメント１６の拡大写真である。
図１において、符号１０は本発明のガラスクロス光反射体であり、ガラスフィラメント１６を複数本束ねたガラスストランド１４を撚糸したガラスヤーン１２により製織されたガラスクロス１８からなる。
FIG. 1 is an enlarged photograph of the surface of the glass cloth light reflector of the present invention, FIG. 2 is an enlarged schematic view of the essential part of a glass yarn 12 which is a portion indicated by A in FIG. 1, and FIG. 4 is an enlarged photograph of the glass strand 14 which is a portion indicated by B, and FIG. 4 is an enlarged photograph of the glass filament 16 which is a portion indicated by C in FIG.
In FIG. 1, reference numeral 10 denotes a glass cloth light reflector according to the present invention, which is composed of a glass cloth 18 woven by a glass yarn 12 obtained by twisting a glass strand 14 in which a plurality of glass filaments 16 are bundled.
図２〜図４において符号２０は入射光であり、符号２２は反射光である。図２〜図４に示す如く、本発明のガラスクロス光反射体１０は、ガラスヤーン１２により光反射されることで、広範囲な波長領域において良好な反射効率が得られる。本発明のガラスクロス光反射体１０は、波長４００〜２０００ｎｍの光に対する反射率が７０％以上であることが好ましく、８０％以上であることがより好ましい。 2 to 4, reference numeral 20 is incident light, and reference numeral 22 is reflected light. As shown in FIGS. 2 to 4, the glass cloth light reflector 10 according to the present invention is reflected by the glass yarn 12, thereby obtaining good reflection efficiency in a wide wavelength range. In the glass cloth light reflector 10 of the present invention, the reflectance with respect to light having a wavelength of 400 to 2000 nm is preferably 70% or more, and more preferably 80% or more.
図１では１枚のガラスクロス１８からなるガラスクロス光反射体１０の例を示したが、用いられるガラスクロス１８の数に制限はなく、複数枚のガラスクロス１８を用いても良く、複数枚のガラスクロス１８を積層して用いることが好ましい。後述する実施例からも明らかなように、ガラスクロスの積層枚数が増加するに従い反射率も高くなることから、積層枚数に応じて反射率を好ましい範囲で選択することが可能である。用いられるガラスクロス１８の数は、求められる反射率や、用いられるガラスフィラメントの直径や本数、ガラスヤーン１２の撚り数、ガラスクロス１８の開口率、ガラスクロス１８の厚み等に応じて適宜選択すればよい。 Although FIG. 1 shows an example of the glass cloth light reflector 10 composed of one glass cloth 18, the number of glass cloths 18 used is not limited, and a plurality of glass cloths 18 may be used. It is preferable to use a laminated glass cloth 18. As will be apparent from the examples described later, the reflectance increases as the number of laminated glass cloths increases. Therefore, the reflectance can be selected within a preferable range according to the number of laminated sheets. The number of glass cloths 18 used is appropriately selected according to the required reflectance, the diameter and number of glass filaments used, the number of twists of the glass yarn 12, the aperture ratio of the glass cloth 18, the thickness of the glass cloth 18, and the like. That's fine.
ガラスクロス光反射体１０の厚さは特に制限はないが、０．３ｍｍ以上２ｍｍ以下が好ましく、０．５ｍｍ以上１．５ｍｍ以下がより好ましい。前記の厚さを超える場合、クロス反射効率は高止まりとなり、更に経済性の観点からもこの範囲が適当と考える。 Although there is no restriction | limiting in particular in the thickness of the glass cloth light reflector 10, 0.3 mm or more and 2 mm or less are preferable, and 0.5 mm or more and 1.5 mm or less are more preferable. When the thickness exceeds the above-mentioned thickness, the cross reflection efficiency remains high, and this range is considered appropriate from the viewpoint of economy.
複数枚のガラスクロス１８を積層して用いる場合は、積層方法に特に制限はないが、所望の反射率を得られる層数を選択し、積層されたガラスクロス１８の各層が相互に密着し、ずれや空隙が生じないための手段を施すことが好適である。ガラスクロス１８の各層のずれ防止手段としては特に制限はないが、例えば、ガラス糸による縫い合わせ、シリカ系接着剤等によるガラスクロス同士の接着、単純な加熱融着、ゾルゲル溶液を浸み込ませた後の加熱密着、酸水素バーナー等によるガラスクロス同士の熱融着等が挙げられ、これらを組み合わせて用いても良い。 When a plurality of glass cloths 18 are laminated and used, there is no particular limitation on the lamination method, but the number of layers capable of obtaining a desired reflectance is selected, and the layers of the laminated glass cloth 18 are in close contact with each other. It is preferable to provide means for preventing the occurrence of deviation and voids. There are no particular restrictions on the means for preventing the slippage of each layer of the glass cloth 18, but, for example, stitching with glass yarn, adhesion between glass cloths with a silica-based adhesive, simple heat fusion, and sol-gel solution were immersed. Examples include heat adhesion after heating, heat fusion between glass cloths using an oxyhydrogen burner, and the like, and these may be used in combination.
積層されるガラスクロス１８は、所定の形状にカットし、複数枚重ねて用いても良く、切断せずに複数回折り返して重ねて用いても良く、複数枚折り返して重ねて用いても良く、またこれらを組み合わせて用いても良い。 The glass cloth 18 to be laminated may be cut into a predetermined shape and used by overlapping a plurality of sheets, or may be used by being folded several times without being cut, or may be used by folding a plurality of sheets. Moreover, you may use combining these.
前記ガラスフィラメント１６としては、Ｅガラス、Ｓガラス、Ｔガラス、ＵＴガラス、Ｄガラス、Ｌガラス、ＮＥガラス及びシリカガラスからなる群から選択される１種以上のガラスフィラメントが用いられるが、ＳｉＯ２組成量が９９．９９質量％〜１００質量％であるシリカガラスフィラメントが好適である。該シリカガラスフィラメントを用いたシリカガラスヤーンは、波長４００ｎｍ以下の紫外線領域でも優れた反射率特性を有しており、波長３００ｎｍ〜２０００ｎｍにおける光に対する反射率を７０％以上とすることができる。波長３００ｎｍ〜２０００ｎｍにおける光に対する反射率が８０％以上であることがより好ましい。 As the glass filaments 16, E glass, S glass, T glass, UT glass, D glass, L glass and one or more glass filaments selected from the group consisting of NE glass and silica glass is used, SiO 2 A silica glass filament having a composition amount of 99.99% by mass to 100% by mass is preferable. The silica glass yarn using the silica glass filament has excellent reflectance characteristics even in an ultraviolet region having a wavelength of 400 nm or less, and the reflectance with respect to light at a wavelength of 300 nm to 2000 nm can be 70% or more. It is more preferable that the reflectance with respect to light at a wavelength of 300 nm to 2000 nm is 80% or more.
本発明のガラスクロス光反射体１０は、シリカガラスフィラメントを用い、該シリカガラスフィラメントを複数本束ね、撚糸したシリカガラスヤーンを製織されてなるシリカガラスクロスからなるシリカガラスクロス光反射体であることが好適である。該シリカガラスクロス光反射体は、波長３００ｎｍ及び１２００ｎｍにおける光に対する反射率がいずれも７０％以上であることが好ましく、８０％以上であることがより好ましい。 The glass cloth light reflector 10 of the present invention is a silica glass cloth light reflector made of a silica glass cloth formed by weaving a plurality of silica glass filaments using a silica glass filament and bundling a plurality of silica glass filaments. Is preferred. The silica glass cloth light reflector preferably has a reflectance of 70% or more, more preferably 80% or more, for light at wavelengths of 300 nm and 1200 nm.
ＳｉＯ２組成量が９９．９９質量％〜１００質量％、即ち、実質的に１００％としたシリカガラスクロスを光反射体として用いることで、Ｅガラス、Ｄガラス、Ｓガラス、Ｔガラス、ＵＴガラス、ＮＥガラス等の一般的な多成分系ガラスクロスの場合に生じる光を吸収してしまうことによる劣化を軽減することができる。 By using a silica glass cloth having a SiO 2 composition amount of 99.99 mass% to 100 mass%, that is, substantially 100% as a light reflector, E glass, D glass, S glass, T glass, UT glass It is possible to reduce deterioration caused by absorbing light generated in the case of a general multicomponent glass cloth such as NE glass.
また、従来、シリカガラスクロス或いは一般的な多成分系ガラスクロスはいずれもヤーン表面の高強度化（クラック防止）の為に有機（主にシランカップリング剤）処理を施すが、シリカガラスクロスからなるガラスクロス光反射体は、その有機成分を加熱して脱離させることで純粋なシリカとなる。ＳｉＯ２単体配合成分であることより、１０００℃程度の高温環境下でも使用可能なガラスクロス反射体を得ることができる。 Conventionally, both silica glass cloth and general multi-component glass cloth have been subjected to organic (mainly silane coupling agent) treatment to increase the strength of the yarn surface (preventing cracks). The resulting glass cloth light reflector becomes pure silica by heating and desorbing its organic components. Since it is a component containing SiO 2 alone, a glass cloth reflector that can be used even in a high temperature environment of about 1000 ° C. can be obtained.
ガラスフィラメント１６の製造方法は特に制限はなく、公知の紡糸方法を用いることができる。
ガラスフィラメント１６の直径は特に制限はないが、直径３．０μｍ〜１５μｍが好適である。
There is no restriction | limiting in particular in the manufacturing method of the glass filament 16, A well-known spinning method can be used.
The diameter of the glass filament 16 is not particularly limited, but a diameter of 3.0 μm to 15 μm is preferable.
前記ガラスフィラメント１６からガラスヤーン１２を得る方法は特に制限はないが、ガラスフィラメント１６を４０本〜４００本束ねたガラスストランド１４を、撚糸機を用いて撚糸し、ガラスヤーン１２とすることが好適である。ガラスヤーンの撚り数は特に制限はないが、５〜５０回転／ｍの撚り数が好ましい。また、撚糸後、さらに合撚しても良い。 The method for obtaining the glass yarn 12 from the glass filament 16 is not particularly limited, but it is preferable that the glass strand 14 in which 40 to 400 glass filaments 16 are bundled is twisted using a twisting machine to form the glass yarn 12. It is. The twist number of the glass yarn is not particularly limited, but a twist number of 5 to 50 revolutions / m is preferable. Moreover, you may twist further after twisting.
ガラスクロス１８の製織方法は特に制限はなく、公知の方法により製織することができる。
ガラスクロス１８の織り構造については、特に限定されないが、例えば、平織り、ななこ織り、朱子織り、綾織り等の織り構造が挙げられ、フレキシブル性のある平織り構造や朱子織り構造が好ましい。
ガラスクロス１８を構成する経糸及び緯糸の織密度は特に制限はないが、例えば、各々独立して、３０〜１５０本／インチが好適である。
There is no restriction | limiting in particular in the weaving method of the glass cloth 18, It can weave by a well-known method.
The weave structure of the glass cloth 18 is not particularly limited, and examples thereof include plain weave, Nanako weave, satin weave, twill weave and the like, and a flexible plain weave structure and satin weave structure are preferable.
The weaving density of the warp and weft constituting the glass cloth 18 is not particularly limited, but for example, 30 to 150 yarns / inch are preferable independently of each other.
ガラスクロス１８の厚さは特に制限はないが０．３ｍｍ以上２ｍｍ以下が好ましく、０．５ｍｍ以上１．５ｍｍ以下がより好ましい。前記の厚さを超える場合、クロス反射効率は高止まりとなり、更に経済性の観点からもこの範囲が適当と考える。 The thickness of the glass cloth 18 is not particularly limited, but is preferably from 0.3 mm to 2 mm, and more preferably from 0.5 mm to 1.5 mm. When the thickness exceeds the above-mentioned thickness, the cross reflection efficiency remains high, and this range is considered appropriate from the viewpoint of economy.
ガラスヤーン１２やガラスクロス１８は、シランカップリング剤等の公知の表面処理剤で表面処理されることが好適である。 The glass yarn 12 and the glass cloth 18 are preferably surface-treated with a known surface treatment agent such as a silane coupling agent.
図５は、本発明のガラスクロス光反射体１０に施されるほつれ防止処置の例を示す写真であり、（ａ）はガラス糸３０によるほつれ防止処置、（ｂ）は両端ループ織り３２によるほつれ防止処置の例をそれぞれ示す。ガラスクロス光反射体１０を構成するガラスクロス１８はその端部にほつれ防止処置を施すことが好適である。該ほつれ防止処置の方法は特に制限はないが、例えば、図５（ａ）に示した如く、ガラスクロス１８の端部を、ガラス糸３０を用いた端縫いによるほつれ防止処置や、図５（ｂ）に示した如く、特殊織機によりクロスの端部がループ織状態としたほつれ防止処置、酸水素バーナー等によるガラス繊維同士の熱融着切断によるほつれ防止処置、シラン系接着剤での端部固定によるほつれ防止処置等が挙げられる。 FIG. 5 is a photograph showing an example of a fraying prevention treatment applied to the glass cloth light reflector 10 of the present invention, where (a) is a fraying prevention treatment by the glass yarn 30, and (b) is a fraying by the double-end loop weave 32. Examples of prevention measures are shown below. It is preferable that the glass cloth 18 constituting the glass cloth light reflector 10 is subjected to a fraying prevention treatment at its end. The fraying prevention treatment method is not particularly limited. For example, as shown in FIG. 5A, the fraying prevention treatment by the end stitching using the glass thread 30 is performed on the end portion of the glass cloth 18, as shown in FIG. As shown in b), a fraying prevention treatment in which the end portion of the cloth is made into a loop weaving state by a special loom, a fraying prevention treatment by heat fusion cutting of glass fibers with an oxyhydrogen burner, an end portion with a silane-based adhesive Examples include fraying prevention treatment by fixing.
本発明のガラスクロス光反射体１０は、紫外線ランプ、または半導体製造装置に好適に用いられる。
図６〜図８は、それぞれ本発明のガラスクロス光反射体の使用方法の第１〜第３の例を示す図である。本発明のガラスクロス光反射体の使用方法は特に制限はないが、ガラスクロス光反射体を、反射面を構成するガラス体に必要十分な反射率を得られる層数で固定して用いることが好適である。
The glass cloth light reflector 10 of the present invention is suitably used for an ultraviolet lamp or a semiconductor manufacturing apparatus.
6-8 is a figure which shows the 1st-3rd example of the usage method of the glass cloth light reflector of this invention, respectively. The method of using the glass cloth light reflector of the present invention is not particularly limited, but the glass cloth light reflector may be used by fixing it with the number of layers capable of obtaining a reflectance sufficient for the glass body constituting the reflecting surface. Is preferred.
前記反射面を構成するガラス体の形状は特に制限はないが、ガラス管、ガラス板、又はガラス板が組み合わされた構造物よりなることが好適である。図６及び図７ではガラス体としてシリカガラスランプ管４２を用いた例を示す。 Although the shape of the glass body which comprises the said reflective surface does not have a restriction | limiting in particular, It is suitable that it consists of a structure with which the glass tube, the glass plate, or the glass plate was combined. 6 and 7 show an example in which a silica glass lamp tube 42 is used as a glass body.
本発明のガラスクロス光反射体の使用方法としては、例えば、図６に示した如く、芯材４４に巻かれた本発明のガラスクロス光反射体１０をシリカガラスランプ管４２に１層又は複数層、テープ巻きしながら重ねることが好適である。
図６では、必要幅を有する幅広のガラスクロス光反射体１０を用いた例を示したが、本発明のガラスクロス光反射体の形状は特に制限はなく、例えば、図７に示した如く、幅狭のテープ状のガラスクロス光反射体４０を用い、複数枚のガラスクロス光反射体４０をずらして重ねてもよい。
As a method of using the glass cloth light reflector of the present invention, for example, as shown in FIG. 6, one layer or a plurality of glass cloth light reflectors 10 of the present invention wound around a core material 44 are provided on a silica glass lamp tube 42. It is preferable to stack the layers while winding them with tape.
In FIG. 6, although the example using the wide glass cloth light reflector 10 which has a required width was shown, there is no restriction | limiting in particular in the shape of the glass cloth light reflector of this invention, For example, as shown in FIG. A narrow tape-shaped glass cloth light reflector 40 may be used, and a plurality of glass cloth light reflectors 40 may be shifted and overlapped.
また、図８に示した如く、ガラスクロス光反射体を袋状とし、該袋状のガラスクロス光反射体中に詰め物を詰めたブランケットタイプのガラスクロス光反射体５０は、非常に保温性やクッション性に優れており、好適である。図８（ａ），（ｂ）のブランケットタイプのガラスクロス光反射体５０では、詰め物として図８（ｃ）で示したシリカガラスウール５２を用いた例を示した。該ブランケットタイプのガラスクロス光反射体５０は、図８（ｂ）に示した如くフレキシブル性が高く、ワークとなる母材管に密着保持させて用いることができる。 Further, as shown in FIG. 8, the blanket-type glass cloth light reflector 50 in which the glass cloth light reflector is formed in a bag shape, and the filling is packed in the bag-shaped glass cloth light reflector, It is excellent in cushioning properties and is suitable. In the blanket type glass cloth light reflector 50 shown in FIGS. 8A and 8B, an example is shown in which the silica glass wool 52 shown in FIG. 8C is used as the filling. The blanket-type glass cloth light reflector 50 has high flexibility as shown in FIG. 8B, and can be used by being in close contact with a base material tube as a workpiece.
前記反射面を構成するガラス体とガラスクロス光反射体とが互いに固定される手段を有していることが好ましい。また、前記反射面を構成するガラス体とガラスクロス光反射体の双方を固定する手段を有していることが好適である。 It is preferable that the glass body and the glass cloth light reflector constituting the reflecting surface have means for fixing to each other. Moreover, it is preferable to have a means for fixing both the glass body and the glass cloth light reflector constituting the reflection surface.
ガラス体とガラスクロス光反射体の固定手段としては特に制限はないが、例えば、ガラス体に突起を設け、ガラスクロス光反射体側にこの突起と嵌合する為の構造が構成されていることが好ましい。また、ガラスクロス光反射体にガラス体に固定する為の紐状の構造体を設け、これによってガラス体にガラスクロス光反射体が固定されていてもよい。また、互いのクロスをガラス糸で縫い付ける、或いは、互いのクロスをバーナー等により熱融着させてもよい。或いは、ガラス管と前記ガラス管の外径よりも内径が少し大きい石英ガラスのリング状留め具を用意し、前記ガラス管に巻いたガラスクロス光反射体の上から前記石英ガラスのリング状留め具による２点留め(両端部)〜３点留め(両端部及び中央部)を行うことで、ガラスクロス光反射体をガラス管に固定させても良い。さらに、ガラス体とガラスクロス光反射体に対して双方を固定する為の第３の固定手段を有していても良い。 There are no particular restrictions on the means for fixing the glass body and the glass cloth light reflector, but for example, a protrusion is provided on the glass body, and a structure for fitting the protrusion on the glass cloth light reflector side is configured. preferable. Moreover, the string-like structure for fixing to a glass body may be provided in a glass cloth light reflector, and the glass cloth light reflector may be fixed to the glass body by this. Alternatively, the crosses may be sewn with glass yarns, or the crosses may be heat-sealed with a burner or the like. Alternatively, a glass tube and a quartz glass ring-shaped fastener having an inner diameter slightly larger than the outer diameter of the glass tube are prepared, and the quartz glass ring-shaped fastener is placed on the glass cloth light reflector wound around the glass tube. The glass cloth light reflector may be fixed to the glass tube by performing two-point fastening (both ends) to three-point fastening (both ends and center). Furthermore, you may have the 3rd fixing means for fixing both with respect to a glass body and a glass cloth light reflector.
本発明のガラスクロス光反射体は、ガラス体と離して扱うことが出来る為、片方が破損した場合にも再利用が可能であり、破損や不具合が生じた場合の交換も容易であり、極めて作業性に優れている。 Since the glass cloth light reflector of the present invention can be handled separately from the glass body, it can be reused even when one side is damaged, and it is easy to replace when damage or malfunction occurs. Excellent workability.
以下に実施例をあげて本発明をさらに具体的に説明するが、これらの実施例は例示的に示されるもので限定的に解釈されるべきでないことはいうまでもない。 The present invention will be described more specifically with reference to the following examples. However, it is needless to say that these examples are shown by way of illustration and should not be construed in a limited manner.
（実施例１）
平均フィラメント径７.３μｍのシリカガラスフィラメントを２００本束ねたシリカガラスストランドを、撚糸機を用いて撚糸し、シリカガラスヤーンを得た。撚り数として２４回転／ｍを採用した。該シリカガラスヤーンを経糸及び緯糸の織密度を６５本×６５本／２５ｍｍの条件で製織（平織）し、シリカガラスクロス（厚さ：０．０９５ｍｍ）を得た。
Example 1
A silica glass strand obtained by bundling 200 silica glass filaments having an average filament diameter of 7.3 μm was twisted using a twisting machine to obtain a silica glass yarn. The number of twists was 24 rotations / m. The silica glass yarn was woven (plain weave) under conditions of warp and weft yarn density of 65 × 65/25 mm to obtain silica glass cloth (thickness: 0.095 mm).
該シリカガラスクロスを６０ｍｍにカットしたガラスクロス光反射体（実施例１−１）及び該カットしたガラスクロス光反射体を所定枚数重ねて積層したガラスクロス光反射体（実施例１−２：２枚重ね、実施例１−３：３枚重ね、実施例１−４：４枚重ね、実施例１−５：５枚重ね）を作製した。 A glass cloth light reflector (Example 1-1) obtained by cutting the silica glass cloth into 60 mm and a glass cloth light reflector (Example 1-2: 2) in which a predetermined number of the cut glass cloth light reflectors are stacked. Sheets, Example 1-3: 3 sheets, Example 1-4: 4 sheets, Example 1-5: 5 sheets).
得られたガラスクロス光反射体に対して、波長範囲：３００〜２５００ｎｍにおける光の反射率を測定した。リファレンスのラブスフェア社製スペクトラロン（登録商標）標準反射板の反射率を１００％とし、アジレント社製Ｃａｒｙ ５０００の積分球ユニットで測定を行った。結果を図９及び表１に示す。 The reflectance of the light in the wavelength range: 300-2500 nm was measured with respect to the obtained glass cloth light reflector. The reflectance of a Spectralon (registered trademark) standard reflector manufactured by Reference Labsphere was set to 100%, and measurement was performed with an integrating sphere unit of Cary 5000 manufactured by Agilent. The results are shown in FIG.
図９及び表１に示した如く、シリカガラスクロスを３〜５枚積層してなる、実施例１−３〜実施例１−５のガラスクロス光反射体は、いずれも波長３００〜２５００ｎｍの光に対する反射率が７０％以上であり、特に、４及び５枚積層した実施例１−４及び実施例１−５のガラスクロス光反射体は、波長３００ｎｍ及び１２００ｎｍにおける光に対する反射率が８０％以上であり、極めて反射効率が優れていた。 As shown in FIG. 9 and Table 1, each of the glass cloth light reflectors of Examples 1-3 to 1-5, which is formed by laminating 3 to 5 silica glass cloths, has a wavelength of 300 to 2500 nm. The glass cloth light reflectors of Example 1-4 and Example 1-5, in which 4 and 5 layers are laminated, have a reflectance with respect to light at wavelengths of 300 nm and 1200 nm of 80% or more. And the reflection efficiency was extremely excellent.
前記得られたシリカガラスクロスを用いたガラスクロス光反射体に対して、下記評価１）〜５）を行った。評価１）及び３）では実施例１−５と同様、シリカガラスクロスを５枚重ねた状態のガラスクロス光反射体に対して評価し、評価２）、４）及び５）ではシリカガラス管の外層にシリカガラスクロスを５枚重ねて巻いた状態のガラスクロス光反射体に対して評価した。結果を表２に示す。 The following evaluations 1) to 5) were performed on the glass cloth light reflector using the obtained silica glass cloth. In evaluations 1) and 3), as in Example 1-5, evaluation was made on a glass cloth light reflector in a state where five sheets of silica glass cloth were stacked. In evaluations 2), 4) and 5), the silica glass tube was evaluated. Evaluation was made on a glass cloth light reflector in a state in which five silica glass cloths were stacked on the outer layer and wound. The results are shown in Table 2.
評価１）反射特性
波長３００ｎｍ及び１２００ｎｍにおける光に対する反射率について評価した。
反射率が８０％以上を○、８０％未満を×として評価した。
Evaluation 1) Reflection characteristics The reflectance with respect to light at wavelengths of 300 nm and 1200 nm was evaluated.
The reflectance was evaluated as ◯ when the reflectance was 80% or more, and x when the reflectance was less than 80%.
評価２）クッション保護性
２ｍ上段よりパチンコ玉を落下させシリカガラス管にヒビが発生するかどうかを評価した。
ヒビ発生無を○、ヒビ発生有を×として評価した。
Evaluation 2) Cushion protection property A pachinko ball was dropped from the upper stage of 2 m to evaluate whether or not cracks occurred in the silica glass tube.
The evaluation was made with ◯ indicating no occurrence of cracks and × indicating presence of cracks.
評価３）フレキシブル性
柔軟性の有無について評価した。
Evaluation 3) Flexibility The presence or absence of flexibility was evaluated.
評価４）保温効果性
シリカガラス管内の温度変化（開始時１０００℃）を測定することで保温効果を評価した。保温効果有を○、保温効果無を×として評価した。
Evaluation 4) Thermal insulation effect The thermal insulation effect was evaluated by measuring the temperature change (1000 degreeC at the time of a start) in a silica glass tube. Evaluation was made with a heat retention effect of ○ and a heat retention effect of ×.
評価５）再利用の可否
シリカガラス管が破損した場合の再利用の可否について評価した。
Evaluation 5) Reusability Whether the silica glass tube is broken was evaluated for reuse.
（比較例１）
特許文献１の実施例１記載の方法により、シリカガラス管の外層にシリカガラス膜を被覆し、シリカガラス被覆体を得た。得られたシリカガラス被覆体に対し、実施例１と同様の方法により、評価１）〜５）を行った。結果を表２に示す。
(Comparative Example 1)
By the method described in Example 1 of Patent Document 1, the outer layer of the silica glass tube was coated with a silica glass film to obtain a silica glass coated body. Evaluations 1) to 5) were performed on the obtained silica glass coated body in the same manner as in Example 1. The results are shown in Table 2.
表２に示した如く、実施例１のガラスクロス光反射体は、反射特性が極めて優れており、クッション保護性及び保温効果性も良好であった。また、実施例１のガラスクロス光反射体は布状態であり、フレキシブル性が高かった。さらに、シリカガラス管に密着コーティングされている比較例１のシリカガラス被覆体と比較して、実施例１のガラスクロス光反射体はシリカガラス管と離して扱うことが出来る為、片方が破損した場合にも再利用が容易である。 As shown in Table 2, the glass cloth light reflector of Example 1 was extremely excellent in reflection characteristics, and had good cushion protection and heat retention effects. Moreover, the glass cloth light reflector of Example 1 was in a cloth state and had high flexibility. Furthermore, since the glass cloth light reflector of Example 1 can be handled separately from the silica glass tube as compared with the silica glass coated body of Comparative Example 1 that is closely coated on the silica glass tube, one side is damaged. In some cases, it is easy to reuse.
（実施例２）
平均フィラメント径９．９μｍのシリカガラスフィラメントを２００本束ねたシリカガラスストランドを、撚糸機を用いて撚り数として１８０回転（Ｚ撚り）／ｍにて撚糸後、更に２本を併せて１５２回転（Ｓ撚り）／ｍにて合撚糸を実施してシリカガラスヤーンを得た。該シリカガラスヤーンを経糸及び緯糸の織密度を５６本×５３本／２５ｍｍの条件で製織（朱子織）し、シリカガラスクロス（厚さ：０．２４ｍｍ）を得た。
(Example 2)
A silica glass strand obtained by bundling 200 silica glass filaments having an average filament diameter of 9.9 μm is twisted at 180 rotations (Z-twisting) / m using a twisting machine, and then further combined to 152 rotations (152 rotations). A twisted yarn was carried out at S twist / m to obtain a silica glass yarn. The silica glass yarn was woven (a satin weave) under the condition of warp and weft weaving density of 56 × 53/25 mm to obtain a silica glass cloth (thickness: 0.24 mm).
該シリカガラスクロスを６０ｍｍにカットしたガラスクロス光反射体（実施例２−１）及び該カットしたガラスクロス光反射体を所定枚数重ねて積層したガラスクロス光反射体（実施例２−２：２枚重ね、実施例２−３：３枚重ね、実施例２−４：４枚重ね、実施例２−５：５枚重ね）を作製した。 A glass cloth light reflector (Example 2-1) obtained by cutting the silica glass cloth into 60 mm and a glass cloth light reflector (Example 2-2: 2) in which a predetermined number of the cut glass cloth light reflectors are stacked. Sheets, Example 2-3: 3 sheets, Example 2-4: 4 sheets, Example 2-5: 5 sheets).
得られたガラスクロス光反射体に対して、実施例１と同様の方法により光の反射率を測定した。結果を図１０及び表３に示す。 With respect to the obtained glass cloth light reflector, the light reflectance was measured in the same manner as in Example 1. The results are shown in FIG.
図１０及び表３に示した如く、シリカガラスクロスを２〜５枚積層してなる、実施例２−３〜実施例２−５のガラスクロス光反射体は、いずれも波長３００〜２５００ｎｍの光に対する反射率が８０％以上であり、極めて反射効率が優れていた。 As shown in FIG. 10 and Table 3, each of the glass cloth light reflectors of Example 2-3 to Example 2-5, which is formed by laminating 2 to 5 silica glass cloths, has a wavelength of 300 to 2500 nm. The reflectance was 80% or more, and the reflection efficiency was extremely excellent.
（実施例３）
平均フィラメント径９．９μｍのシリカガラスフィラメントを２００本束ねたシリカガラスストランドを、撚糸機を用いて撚糸し、シリカガラスヤーンを得た。撚り数として４０回転／ｍを採用した。該シリカガラスヤーンを経糸及び緯糸の織密度で６０本×５８本／２５ｍｍで製織（朱子織）し、シリカガラスクロス（厚さ：０．１３ｍｍ）を得た。
(Example 3)
A silica glass strand in which 200 silica glass filaments having an average filament diameter of 9.9 μm were bundled was twisted using a twisting machine to obtain a silica glass yarn. The number of twists was 40 rotations / m. The silica glass yarn was woven (valve weaving) with a weft density of warp and weft of 60 × 58 yarns / 25 mm to obtain a silica glass cloth (thickness: 0.13 mm).
該シリカガラスクロスを６０ｍｍにカットしたガラスクロス光反射体（実施例３−１）及び該カットしたガラスクロス光反射体を所定枚数重ねて積層したガラスクロス光反射体（実施例３−２：２枚重ね、実施例３−３：３枚重ね、実施例３−４：４枚重ね、実施例３−５：５枚重ね）を作製した。 A glass cloth light reflector (Example 3-1) obtained by cutting the silica glass cloth into 60 mm and a glass cloth light reflector (Example 3-2: 2) obtained by laminating a predetermined number of the cut glass cloth light reflectors. Sheets, Example 3-3: 3 sheets, Example 3-4: 4 sheets, Example 3-5: 5 sheets).
得られたガラスクロス光反射体に対して、実施例１と同様の方法により光の反射率を測定した。結果を図１１及び表４に示す。 With respect to the obtained glass cloth light reflector, the light reflectance was measured in the same manner as in Example 1. The results are shown in FIG.
図１１及び表４に示した如く、シリカガラスクロスを２〜５枚積層してなる、実施例３−２〜実施例３−５のガラスクロス光反射体は、いずれも波長３００〜２５００ｎｍの光に対する反射率が７０％以上であり、特に、４及び５枚積層した実施例３−４〜実施例３−５のガラスクロス光反射体は、波長３００ｎｍ及び１２００ｎｍにおける光に対する反射率が８０％以上であり、極めて反射効率が優れていた。 As shown in FIG. 11 and Table 4, each of the glass cloth light reflectors of Example 3-2 to Example 3-5, which is formed by laminating 2 to 5 silica glass cloths, has a wavelength of 300 to 2500 nm. The glass cloth light reflectors of Example 3-4 to Example 3-5, in which 4 and 5 layers are laminated, have a reflectance with respect to light at wavelengths of 300 nm and 1200 nm of 80% or more. And the reflection efficiency was extremely excellent.
（実施例４）
平均フィラメント径７．０μｍのＥガラスフィラメントを２００本束ねたガラスストランドを、撚糸機を用いて撚糸し、ガラスヤーンを得た。撚り数として４０回転／ｍを採用した。該ガラスヤーンを経糸及び緯糸の織密度で６０本×５８本／２５ｍｍで製織（朱子織）し、Ｅガラス製のガラスクロス（厚さ：０．０９０ｍｍ）を得た。
(Example 4)
A glass strand obtained by bundling 200 E glass filaments having an average filament diameter of 7.0 μm was twisted using a twisting machine to obtain a glass yarn. The number of twists was 40 rotations / m. The glass yarn was woven at a weaving density of warp and weft of 60 × 58 yarns / 25 mm (a satin weave) to obtain a glass cloth (thickness: 0.090 mm) made of E glass.
該ガラスクロスを６０ｍｍにカットしたガラスクロス光反射体（実施例４−１）及び該カットしたガラスクロス光反射体を所定枚数重ねて積層したガラスクロス光反射体（実施例４−２：２枚重ね、実施例４−３：３枚重ね、実施例４−４：４枚重ね、実施例４−５：５枚重ね）を作製した。 A glass cloth light reflector (Example 4-1) obtained by cutting the glass cloth into 60 mm and a glass cloth light reflector (Example 4-2: two sheets) obtained by stacking a predetermined number of the cut glass cloth light reflectors. Overlap, Example 4-3: 3 sheets, Example 4-4: 4 sheets, Example 4-5: 5 sheets).
得られたガラスクロス光反射体に対して、実施例１と同様の方法により光の反射率を測定した。結果を図１２及び表５に示す。 With respect to the obtained glass cloth light reflector, the light reflectance was measured in the same manner as in Example 1. The results are shown in FIG.
図１２及び表５に示した如く、ガラスクロスを３〜５枚積層してなる、実施例４−３〜実施例４−５のガラスクロス光反射体は、いずれも波長４００〜２５００ｎｍの光に対する反射率は７０％以上と良好であったが、シリカガラスクロスを用いた実施例１〜３とは異なり、波長３００ｎｍにおける光反射率が低かった。 As shown in FIG. 12 and Table 5, the glass cloth light reflectors of Example 4-3 to Example 4-5, which are formed by laminating 3 to 5 glass cloths, all correspond to light having a wavelength of 400 to 2500 nm. The reflectivity was as good as 70% or more, but unlike Examples 1 to 3 using a silica glass cloth, the light reflectivity at a wavelength of 300 nm was low.
（比較例２）
平均粒径が１．５μｍの合成シリカガラス粒子を、１％のメチルセルロースを含む水溶液に分散させ、固形分濃度が７５％のスラリーとした。該スラリーを用いて、６０ｍｍ角の天然石英ガラス板の表面に塗布膜を形成した後、加熱処理し、シリカガラス膜で被覆されたシリカガラス被覆体（膜厚：比較例２−１：１０７μｍ、比較例２−２：１５９μｍ）を得た。得られたシリカガラス被覆体に対して、実施例１と同様の方法により光の反射率を測定した。結果を図１３及び表６に示す。
(Comparative Example 2)
Synthetic silica glass particles having an average particle size of 1.5 μm were dispersed in an aqueous solution containing 1% methylcellulose to obtain a slurry having a solid content concentration of 75%. Using this slurry, after forming a coating film on the surface of a 60 mm square natural quartz glass plate, heat treatment was performed, and a silica glass coated body coated with a silica glass film (film thickness: Comparative Example 2-1: 107 μm, Comparative Example 2-2: 159 μm) was obtained. The light reflectance of the obtained silica glass coating was measured in the same manner as in Example 1. The results are shown in FIG.
１０，４０，５０：本発明のガラスクロス光反射体、１２：ガラスヤーン、１４：ガラスストランド、１６：ガラスフィラメント、１８：ガラスクロス、２０：入射光、２２：反射光、３０：ガラス糸、３２：ループ織り、４２：シリカガラスランプ管、４４：芯材、５２：シリカガラスウール。 10, 40, 50: Glass cloth light reflector of the present invention, 12: Glass yarn, 14: Glass strand, 16: Glass filament, 18: Glass cloth, 20: Incident light, 22: Reflected light, 30: Glass yarn, 32: Loop weave, 42: Silica glass lamp tube, 44: Core material, 52: Silica glass wool.
Claims (5)
前記光反射体は、該シリカガラスフィラメントを複数本束ね、撚糸したシリカガラスヤーンを製織されてなるシリカガラスクロスからなるシリカガラスクロス光反射体であり、
該シリカガラスクロスのヤーンにより光反射されることで、波長３００ｎｍ〜２０００ｎｍにおける光に対する反射率が７０％以上である、請求項１記載のガラスクロス光反射体。 The glass filament is a silica glass filament made of silica glass,
The light reflector is a silica glass cloth light reflector made of a silica glass cloth in which a plurality of silica glass filaments are bundled and woven silica glass yarn twisted.
2. The glass cloth light reflector according to claim 1, wherein the reflectance with respect to light at a wavelength of 300 nm to 2000 nm is 70% or more by being reflected by the silica glass cloth yarn. 3.
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