JP6680939B1 - Structure including glass cloth light reflector - Google Patents
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- JP6680939B1 JP6680939B1 JP2019177490A JP2019177490A JP6680939B1 JP 6680939 B1 JP6680939 B1 JP 6680939B1 JP 2019177490 A JP2019177490 A JP 2019177490A JP 2019177490 A JP2019177490 A JP 2019177490A JP 6680939 B1 JP6680939 B1 JP 6680939B1
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- 239000011521 glass Substances 0.000 title claims abstract description 240
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- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
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- 239000005340 laminated glass Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
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- 238000004804 winding Methods 0.000 description 2
- OHVLMTFVQDZYHP-UHFFFAOYSA-N 1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-2-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound N1N=NC=2CN(CCC=21)C(CN1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)=O OHVLMTFVQDZYHP-UHFFFAOYSA-N 0.000 description 1
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 1
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- LDXJRKWFNNFDSA-UHFFFAOYSA-N 2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound C1CN(CC2=NNN=C21)CC(=O)N3CCN(CC3)C4=CN=C(N=C4)NCC5=CC(=CC=C5)OC(F)(F)F LDXJRKWFNNFDSA-UHFFFAOYSA-N 0.000 description 1
- WZFUQSJFWNHZHM-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC(=O)N1CC2=C(CC1)NN=N2 WZFUQSJFWNHZHM-UHFFFAOYSA-N 0.000 description 1
- IHCCLXNEEPMSIO-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperidin-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1CCN(CC1)CC(=O)N1CC2=C(CC1)NN=N2 IHCCLXNEEPMSIO-UHFFFAOYSA-N 0.000 description 1
- DEXFNLNNUZKHNO-UHFFFAOYSA-N 6-[3-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperidin-1-yl]-3-oxopropyl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1CCN(CC1)C(CCC1=CC2=C(NC(O2)=O)C=C1)=O DEXFNLNNUZKHNO-UHFFFAOYSA-N 0.000 description 1
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
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Landscapes
- Optical Elements Other Than Lenses (AREA)
- Laminated Bodies (AREA)
- Woven Fabrics (AREA)
Abstract
【課題】紫外線ランプや半導体製造装置に用いられる光の反射体に好適な、広範囲な波長領域において反射効率が良好でかつ再利用可能なガラスクロス光反射体を含む構造体を提供する。【解決手段】Ｅガラス、Ｓガラス、Ｔガラス、ＵＴガラス、Ｄガラス、Ｌガラス、ＮＥガラス及びシリカガラスからなる群から選択される１種以上のガラスフィラメントを複数本束ね、撚糸したガラスヤーンを製織されてなるガラスクロスからなるガラスクロス光反射体と、反射面を構成するガラス体と、を含む構造体であって、前記ガラスクロス光反射体は、前記反射面を構成するガラス体に、所望の反射率を得られる層数で着脱可能に固定して用いられる、構造体であるようにした。【選択図】図１PROBLEM TO BE SOLVED: To provide a structure including a reusable glass cloth light reflector having a good reflection efficiency in a wide wavelength range, which is suitable for a light reflector used in an ultraviolet lamp or a semiconductor manufacturing apparatus. SOLUTION: A glass yarn obtained by bundling a plurality of one or more kinds of glass filaments selected from the group consisting of E glass, S glass, T glass, UT glass, D glass, L glass, NE glass and silica glass, and twisting them. A glass cloth light reflector comprising a woven glass cloth, and a glass body constituting a reflecting surface, wherein the glass cloth light reflector is a glass body constituting the reflecting surface, The structure is such that it is detachably fixed and used in the number of layers that can obtain a desired reflectance. [Selection diagram] Figure 1
Description
本発明は、紫外線ランプや半導体製造装置に用いられる光の反射体に好適な、広範囲な波長領域において反射効率が良好でかつ再利用可能なガラスクロスを使用した光反射体に関する。 The present invention relates to a light reflector using a glass cloth, which is suitable for a light reflector used in an ultraviolet lamp or a semiconductor manufacturing apparatus, has a good reflection efficiency in a wide wavelength range and is reusable.
産業用ヒータを主目的とする照射効率を向上する為の光の反射体としては、アルミニウムや金、銀膜が一般的に用いられている。 Aluminum, gold, and silver films are generally used as light reflectors for improving the irradiation efficiency mainly for industrial heaters.
しかしながら、半導体製造装置に用いられる熱の反射体としては、これらの金属膜が汚染原因となる為に使用できない場合がある事、またＵＶランプの波長領域ではこれら金属膜での吸収の影響により反射効率が著しく低下する等の問題があり、半導体製造装置やＵＶランプの反射体として金属膜は好ましくない。 However, as a heat reflector used in a semiconductor manufacturing apparatus, these metal films may not be used in some cases because they cause contamination, and in the wavelength range of a UV lamp, reflection is caused by the absorption of these metal films. A metal film is not preferable as a reflector of a semiconductor manufacturing apparatus or a UV lamp because of problems such as a significant decrease in efficiency.
金属膜による弊害を克服する反射膜として、高純度のシリカ粉を気泡が混入する方法で焼結し、多数の気泡を内包する薄膜層により、半導体製造装置で嫌われる金属不純物の少ない、かつ波長３００ｎｍ〜２２００ｎｍに渡る広い波長領域で高い反射率を有する反射体が提案されている（特許文献１）。 As a reflection film that overcomes the adverse effects of metal films, a high-purity silica powder is sintered by a method in which air bubbles are mixed, and a thin film layer that contains a large number of air bubbles reduces the metal impurities that semiconductor manufacturing equipment dislikes, and the wavelength A reflector having a high reflectance in a wide wavelength range from 300 nm to 2200 nm has been proposed (Patent Document 1).
この高純度シリカガラス層による反射体は半導体製造装置の加熱用反射体あるいはＵＶランプ反射体として好適に用いられているが、反射体自体がシリカガラス管の外表面若しくは内表面にコーティング層として形成される為、シリカガラス管と一体となっており、非常に高価な反射層であるにも関わらず、使用によってシリカガラス管が破損した場合、あるいは反射層が破損した場合、一方の修理が効かず、そのまま全体を廃棄するしか方法が無かった。 This high-purity silica glass layer reflector is preferably used as a heating reflector or a UV lamp reflector for semiconductor manufacturing equipment, but the reflector itself is formed as a coating layer on the outer or inner surface of the silica glass tube. Therefore, even if the silica glass tube is integrated with the silica glass tube and it is a very expensive reflection layer, if the silica glass tube is damaged by use or the reflection layer is damaged, one of the repairs will be effective. Instead, the only option was to discard the entire product.
本発明の目的は、紫外線ランプや半導体製造装置に用いられる光の反射体に好適な、広範囲な波長領域において反射効率が良好でかつ再利用可能なガラスクロス光反射体を提供することを目的とする。 An object of the present invention is to provide a glass cloth light reflector that is suitable for a light reflector used in an ultraviolet lamp or a semiconductor manufacturing apparatus, has good reflection efficiency in a wide wavelength range and can be reused. To do.
上記の問題点を鑑み、発明者らが鋭意検討した結果、ガラスクロスよりなる光反射体をガラス管の外部に高効率な反射率が得られる状態で構成する事により、ガラス管若しくは反射体の何れかに破損や不具合が生じた場合、一方のみを交換する事が可能となる事を見出した。 In view of the above problems, as a result of intensive studies by the inventors, by configuring a light reflector made of glass cloth in a state where a highly efficient reflectance is obtained outside the glass tube, the glass tube or the reflector is It has been found that it is possible to replace only one of them if any of them is damaged or defective.
更に、本発明の副次的な効果として、ガラスクロスがガラス管の保護層あるいは保温層として機能する事で、ガラスクロスのクッション効果によりガラス管自体が割れ辛く、また保温効率の向上がもたらされる事を見出した。 Further, as a secondary effect of the present invention, the glass cloth functions as a protective layer or a heat retaining layer of the glass tube, so that the glass tube itself is hard to break due to the cushioning effect of the glass cloth, and the heat retaining efficiency is improved. I found a thing.
即ち、本発明のガラスクロス光反射体は、Ｅガラス、Ｓガラス、Ｔガラス、ＵＴガラス、Ｄガラス、Ｌガラス、ＮＥガラス及びシリカガラスからなる群から選択される１種以上のガラスフィラメントを複数本束ね、撚糸したガラスヤーンを製織されてなるガラスクロスからなるガラスクロス光反射体である。 That is, the glass cloth light reflector of the present invention comprises a plurality of one or more glass filaments selected from the group consisting of E glass, S glass, T glass, UT glass, D glass, L glass, NE glass and silica glass. This is a glass cloth light reflector comprising a glass cloth obtained by weaving a bundle of twisted glass yarns.
本明細書では、ガラス繊維とは、ガラスを引き伸ばして得られる細い糸状のものを指し、単繊維をガラスフィラメント、ガラスフィラメントを束ねたものをガラスストランド、ガラスフィラメントを束ねて撚りをかけたものをガラスヤーンと定義する。 In the present specification, the glass fiber refers to a thin thread-like material obtained by stretching glass, a glass filament of a single fiber, a glass strand of a bundle of glass filaments, and a twisted bundle of glass filaments. Defined as glass yarn.
本発明の光反射体は、前記ガラスクロスのヤーンにより光反射されることで、波長４００ｎｍ〜２０００ｎｍにおける光に対する反射率が７０％以上であることが好適である。 The light reflector of the present invention preferably has a reflectance of 70% or more for light at a wavelength of 400 nm to 2000 nm by being reflected by the yarn of the glass cloth.
前記ガラスフィラメントがシリカガラスからなるシリカガラスフィラメントであることが好ましい。本発明の光反射体は、前記シリカガラスフィラメントを複数本束ね、撚糸したシリカガラスヤーンであって、波長４００ｎｍ以下の紫外線領域でも優れた反射率特性を有するシリカガラスヤーンを製織されてなるシリカガラスクロスからなるシリカガラスクロス光反射体であって、前記シリカガラスクロスのヤーンにより光反射されることで、波長３００ｎｍ〜２０００ｎｍにおける光に対する反射率が７０％以上であることが好適である。 It is preferable that the glass filament is a silica glass filament made of silica glass. The light reflector of the present invention is a silica glass yarn in which a plurality of the silica glass filaments are bundled and twisted, and the silica glass yarn is woven and has excellent reflectance characteristics even in an ultraviolet region having a wavelength of 400 nm or less. It is preferable that the silica glass cloth light reflector made of cloth has a reflectance of 70% or more for light at a wavelength of 300 nm to 2000 nm by being reflected by the yarn of the silica glass cloth.
本発明の光反射体は、前記ガラスクロスが積層されてなることが好ましい。 The light reflector of the present invention is preferably formed by laminating the glass cloth.
本発明の光反射体は、紫外線ランプ、または半導体製造装置に好適に用いられる。 The light reflector of the present invention is preferably used for an ultraviolet lamp or a semiconductor manufacturing device.
本発明によれば、紫外線ランプや半導体製造装置に用いられる光の反射体に好適な、広範囲な波長領域において反射効率が良好でかつ再利用可能なガラスクロス光反射体を提供することができる。さらに、本発明によれば、クッション保護性やフレキシブル性、保温効果性に優れたガラスクロス光反射体を得ることができる。
更に、シリカガラスクロス反射体の場合には１０００℃程度までの高耐熱性も付与される。
According to the present invention, it is possible to provide a reusable glass cloth light reflector having a good reflection efficiency in a wide wavelength range, which is suitable for a light reflector used in an ultraviolet lamp or a semiconductor manufacturing apparatus. Furthermore, according to the present invention, it is possible to obtain a glass cloth light reflector excellent in cushion protection, flexibility, and heat retention effect.
Further, in the case of the silica glass cloth reflector, high heat resistance up to about 1000 ° C. is also imparted.
以下に本発明の実施の形態を説明するが、これらは例示的に示されるもので、本発明の技術思想から逸脱しない限り種々の変形が可能なことはいうまでもない。 Embodiments of the present invention will be described below, but it goes without saying that these are shown as examples and various modifications can be made without departing from the technical idea of the present invention.
図１は本発明のガラスクロス光反射体の表面の拡大写真であり、図２は図１のＡで示される部分であるガラスヤーン１２の要部拡大模式図であり、図３は、図２のＢで示される部分であるガラスストランド１４の拡大写真であり、図４は、図３のＣで示される部分であるガラスフィラメント１６の拡大写真である。
図１において、符号１０は本発明のガラスクロス光反射体であり、ガラスフィラメント１６を複数本束ねたガラスストランド１４を撚糸したガラスヤーン１２により製織されたガラスクロス１８からなる。
FIG. 1 is an enlarged photograph of the surface of the glass cloth light reflector of the present invention, FIG. 2 is an enlarged schematic view of an essential part of a glass yarn 12 which is a portion indicated by A in FIG. 1, and FIG. 3 is an enlarged photograph of the glass strand 14 which is a portion indicated by B, and FIG. 4 is an enlarged photograph of the glass filament 16 which is a portion indicated by C in FIG.
In FIG. 1, reference numeral 10 is a glass cloth light reflector of the present invention, which is composed of a glass cloth 18 woven by a glass yarn 12 obtained by twisting a glass strand 14 in which a plurality of glass filaments 16 are bundled.
図２〜図４において符号２０は入射光であり、符号２２は反射光である。図２〜図４に示す如く、本発明のガラスクロス光反射体１０は、ガラスヤーン１２により光反射されることで、広範囲な波長領域において良好な反射効率が得られる。本発明のガラスクロス光反射体１０は、波長４００〜２０００ｎｍの光に対する反射率が７０％以上であることが好ましく、８０％以上であることがより好ましい。 2 to 4, reference numeral 20 is incident light, and reference numeral 22 is reflected light. As shown in FIGS. 2 to 4, the glass cloth light reflector 10 of the present invention is light-reflected by the glass yarn 12, so that good reflection efficiency can be obtained in a wide wavelength range. The glass cloth light reflector 10 of the present invention preferably has a reflectance of 70% or more, and more preferably 80% or more, for light having a wavelength of 400 to 2000 nm.
図１では１枚のガラスクロス１８からなるガラスクロス光反射体１０の例を示したが、用いられるガラスクロス１８の数に制限はなく、複数枚のガラスクロス１８を用いても良く、複数枚のガラスクロス１８を積層して用いることが好ましい。後述する実施例からも明らかなように、ガラスクロスの積層枚数が増加するに従い反射率も高くなることから、積層枚数に応じて反射率を好ましい範囲で選択することが可能である。用いられるガラスクロス１８の数は、求められる反射率や、用いられるガラスフィラメントの直径や本数、ガラスヤーン１２の撚り数、ガラスクロス１８の開口率、ガラスクロス１８の厚み等に応じて適宜選択すればよい。 Although FIG. 1 shows an example of the glass cloth light reflector 10 composed of one glass cloth 18, the number of glass cloths 18 used is not limited, and a plurality of glass cloths 18 may be used. It is preferable to stack and use the glass cloth 18 of. As will be apparent from the examples described later, the reflectance increases as the number of laminated glass cloths increases, so that the reflectance can be selected within a preferable range according to the number of laminated layers. The number of glass cloths 18 to be used may be appropriately selected depending on the required reflectance, the diameter and number of glass filaments to be used, the number of twists of the glass yarn 12, the aperture ratio of the glass cloth 18, the thickness of the glass cloth 18, and the like. Good.
ガラスクロス光反射体１０の厚さは特に制限はないが、０．３ｍｍ以上２ｍｍ以下が好ましく、０．５ｍｍ以上１．５ｍｍ以下がより好ましい。前記の厚さを超える場合、クロス反射効率は高止まりとなり、更に経済性の観点からもこの範囲が適当と考える。 The thickness of the glass cloth light reflector 10 is not particularly limited, but is preferably 0.3 mm or more and 2 mm or less, more preferably 0.5 mm or more and 1.5 mm or less. When the thickness exceeds the above range, the cross reflection efficiency remains high, and it is considered that this range is appropriate from the viewpoint of economy.
複数枚のガラスクロス１８を積層して用いる場合は、積層方法に特に制限はないが、所望の反射率を得られる層数を選択し、積層されたガラスクロス１８の各層が相互に密着し、ずれや空隙が生じないための手段を施すことが好適である。ガラスクロス１８の各層のずれ防止手段としては特に制限はないが、例えば、ガラス糸による縫い合わせ、シリカ系接着剤等によるガラスクロス同士の接着、単純な加熱融着、ゾルゲル溶液を浸み込ませた後の加熱密着、酸水素バーナー等によるガラスクロス同士の熱融着等が挙げられ、これらを組み合わせて用いても良い。 When a plurality of glass cloths 18 are laminated and used, the laminating method is not particularly limited, but the number of layers that can obtain a desired reflectance is selected, and the layers of the laminated glass cloths 18 are in close contact with each other. It is preferable to provide a means for preventing displacement and voids. There are no particular restrictions on the means for preventing misalignment of the layers of the glass cloth 18, but for example, stitching with glass threads, adhesion of the glass cloths with a silica-based adhesive or the like, simple heat fusion, and impregnation with a sol-gel solution Examples of the method include heat adhesion and heat fusion between glass cloths by an oxyhydrogen burner or the like, which may be used in combination.
積層されるガラスクロス１８は、所定の形状にカットし、複数枚重ねて用いても良く、切断せずに複数回折り返して重ねて用いても良く、複数枚折り返して重ねて用いても良く、またこれらを組み合わせて用いても良い。 The glass cloth 18 to be laminated may be cut into a predetermined shape and used by stacking a plurality of sheets, may be folded back a plurality of times without cutting, and may be folded back and used a plurality of sheets. Also, these may be used in combination.
前記ガラスフィラメント１６としては、Ｅガラス、Ｓガラス、Ｔガラス、ＵＴガラス、Ｄガラス、Ｌガラス、ＮＥガラス及びシリカガラスからなる群から選択される１種以上のガラスフィラメントが用いられるが、ＳｉＯ２組成量が９９．９９質量％〜１００質量％であるシリカガラスフィラメントが好適である。該シリカガラスフィラメントを用いたシリカガラスヤーンは、波長４００ｎｍ以下の紫外線領域でも優れた反射率特性を有しており、波長３００ｎｍ〜２０００ｎｍにおける光に対する反射率を７０％以上とすることができる。波長３００ｎｍ〜２０００ｎｍにおける光に対する反射率が８０％以上であることがより好ましい。 As the glass filaments 16, E glass, S glass, T glass, UT glass, D glass, L glass and one or more glass filaments selected from the group consisting of NE glass and silica glass is used, SiO 2 A silica glass filament having a composition amount of 99.99% by mass to 100% by mass is suitable. The silica glass yarn using the silica glass filament has excellent reflectance characteristics even in an ultraviolet region having a wavelength of 400 nm or less, and the reflectance for light at a wavelength of 300 nm to 2000 nm can be 70% or more. It is more preferable that the reflectance for light at a wavelength of 300 nm to 2000 nm is 80% or more.
本発明のガラスクロス光反射体１０は、シリカガラスフィラメントを用い、該シリカガラスフィラメントを複数本束ね、撚糸したシリカガラスヤーンを製織されてなるシリカガラスクロスからなるシリカガラスクロス光反射体であることが好適である。該シリカガラスクロス光反射体は、波長３００ｎｍ及び１２００ｎｍにおける光に対する反射率がいずれも７０％以上であることが好ましく、８０％以上であることがより好ましい。 The glass cloth light reflector 10 of the present invention is a silica glass cloth light reflector made of a silica glass filament obtained by bundling a plurality of silica glass filaments and weaving a twisted silica glass yarn. Is preferred. The silica glass cloth light reflectors each have a reflectance of 70% or more, and more preferably 80% or more, with respect to light at wavelengths of 300 nm and 1200 nm.
ＳｉＯ２組成量が９９．９９質量％〜１００質量％、即ち、実質的に１００％としたシリカガラスクロスを光反射体として用いることで、Ｅガラス、Ｄガラス、Ｓガラス、Ｔガラス、ＵＴガラス、ＮＥガラス等の一般的な多成分系ガラスクロスの場合に生じる光を吸収してしまうことによる劣化を軽減することができる。 E glass, D glass, S glass, T glass, UT glass by using silica glass cloth having a SiO 2 composition amount of 99.99 mass% to 100 mass%, that is, substantially 100%, as a light reflector. , NE glass and other general multi-component glass cloths can be reduced in deterioration caused by absorbing light.
また、従来、シリカガラスクロス或いは一般的な多成分系ガラスクロスはいずれもヤーン表面の高強度化（クラック防止）の為に有機（主にシランカップリング剤）処理を施すが、シリカガラスクロスからなるガラスクロス光反射体は、その有機成分を加熱して脱離させることで純粋なシリカとなる。ＳｉＯ２単体配合成分であることより、１０００℃程度の高温環境下でも使用可能なガラスクロス反射体を得ることができる。 Conventionally, both silica glass cloth and general multi-component glass cloth are treated with an organic (mainly silane coupling agent) treatment to increase the strength (crack prevention) of the yarn surface. The glass cloth light reflector is made into pure silica by heating and desorbing the organic component. By virtue of the fact that it is a simple substance compounding component of SiO 2, it is possible to obtain a glass cloth reflector that can be used even in a high temperature environment of about 1000 ° C.
ガラスフィラメント１６の製造方法は特に制限はなく、公知の紡糸方法を用いることができる。
ガラスフィラメント１６の直径は特に制限はないが、直径３．０μｍ〜１５μｍが好適である。
The method for producing the glass filament 16 is not particularly limited, and a known spinning method can be used.
The diameter of the glass filament 16 is not particularly limited, but a diameter of 3.0 μm to 15 μm is preferable.
前記ガラスフィラメント１６からガラスヤーン１２を得る方法は特に制限はないが、ガラスフィラメント１６を４０本〜４００本束ねたガラスストランド１４を、撚糸機を用いて撚糸し、ガラスヤーン１２とすることが好適である。ガラスヤーンの撚り数は特に制限はないが、５〜５０回転／ｍの撚り数が好ましい。また、撚糸後、さらに合撚しても良い。 The method for obtaining the glass yarn 12 from the glass filament 16 is not particularly limited, but it is preferable to twist the glass strands 14 in which 40 to 400 glass filaments 16 are bundled into a glass yarn 12 by using a twisting machine. Is. The twist number of the glass yarn is not particularly limited, but a twist number of 5 to 50 rotations / m is preferable. Further, after twisting, it may be further twisted.
ガラスクロス１８の製織方法は特に制限はなく、公知の方法により製織することができる。
ガラスクロス１８の織り構造については、特に限定されないが、例えば、平織り、ななこ織り、朱子織り、綾織り等の織り構造が挙げられ、フレキシブル性のある平織り構造や朱子織り構造が好ましい。
ガラスクロス１８を構成する経糸及び緯糸の織密度は特に制限はないが、例えば、各々独立して、３０〜１５０本／インチが好適である。
The weaving method of the glass cloth 18 is not particularly limited, and the weaving can be performed by a known method.
The weave structure of the glass cloth 18 is not particularly limited, but examples thereof include a weave structure such as a plain weave, a satin weave, a satin weave, and a twill weave, and a flexible plain weave structure and a satin weave structure are preferable.
The weaving density of the warp and the weft constituting the glass cloth 18 is not particularly limited, but, for example, independently of each other, 30 to 150 yarns / inch is preferable.
ガラスクロス１８の厚さは特に制限はないが０．３ｍｍ以上２ｍｍ以下が好ましく、０．５ｍｍ以上１．５ｍｍ以下がより好ましい。前記の厚さを超える場合、クロス反射効率は高止まりとなり、更に経済性の観点からもこの範囲が適当と考える。 The thickness of the glass cloth 18 is not particularly limited, but is preferably 0.3 mm or more and 2 mm or less, more preferably 0.5 mm or more and 1.5 mm or less. When the thickness exceeds the above range, the cross reflection efficiency remains high, and it is considered that this range is appropriate from the viewpoint of economy.
ガラスヤーン１２やガラスクロス１８は、シランカップリング剤等の公知の表面処理剤で表面処理されることが好適である。 The glass yarn 12 and the glass cloth 18 are preferably surface-treated with a known surface treatment agent such as a silane coupling agent.
図５は、本発明のガラスクロス光反射体１０に施されるほつれ防止処置の例を示す写真であり、（ａ）はガラス糸３０によるほつれ防止処置、（ｂ）は両端ループ織り３２によるほつれ防止処置の例をそれぞれ示す。ガラスクロス光反射体１０を構成するガラスクロス１８はその端部にほつれ防止処置を施すことが好適である。該ほつれ防止処置の方法は特に制限はないが、例えば、図５（ａ）に示した如く、ガラスクロス１８の端部を、ガラス糸３０を用いた端縫いによるほつれ防止処置や、図５（ｂ）に示した如く、特殊織機によりクロスの端部がループ織状態としたほつれ防止処置、酸水素バーナー等によるガラス繊維同士の熱融着切断によるほつれ防止処置、シラン系接着剤での端部固定によるほつれ防止処置等が挙げられる。 FIG. 5 is a photograph showing an example of the anti-raveling treatment applied to the glass cloth light reflector 10 of the present invention, where (a) is the anti-raveling treatment by the glass thread 30, and (b) is the anti-raveling by the loop fabric 32 at both ends. Examples of preventive measures are shown below. The glass cloth 18 constituting the glass cloth light reflector 10 is preferably subjected to anti-fraying treatment at its end. There are no particular restrictions on the method for preventing fraying. For example, as shown in FIG. 5A, the end portion of the glass cloth 18 may be sewn by edge stitching using a glass thread 30 or a method for preventing fraying as shown in FIG. As shown in b), the end of the cloth is loop-weaved by a special loom, the fray is prevented, the fray is prevented by fusing and cutting the glass fibers with an oxyhydrogen burner, and the end with a silane adhesive is used. Examples include measures to prevent fraying by fixing.
本発明のガラスクロス光反射体１０は、紫外線ランプ、または半導体製造装置に好適に用いられる。
図６〜図８は、それぞれ本発明のガラスクロス光反射体の使用方法の第１〜第３の例を示す図である。本発明のガラスクロス光反射体の使用方法は特に制限はないが、ガラスクロス光反射体を、反射面を構成するガラス体に必要十分な反射率を得られる層数で固定して用いることが好適である。
The glass cloth light reflector 10 of the present invention is suitably used for an ultraviolet lamp or a semiconductor manufacturing apparatus.
6 to 8 are views showing first to third examples of the method of using the glass cloth light reflector of the present invention, respectively. The method of using the glass cloth light reflector of the present invention is not particularly limited, but it is possible to use the glass cloth light reflector by fixing the glass cloth constituting the reflecting surface with a number of layers that can obtain a necessary and sufficient reflectance. It is suitable.
前記反射面を構成するガラス体の形状は特に制限はないが、ガラス管、ガラス板、又はガラス板が組み合わされた構造物よりなることが好適である。図６及び図７ではガラス体としてシリカガラスランプ管４２を用いた例を示す。 The shape of the glass body forming the reflecting surface is not particularly limited, but it is preferable that the glass body is made of a glass tube, a glass plate, or a structure in which glass plates are combined. 6 and 7 show an example in which a silica glass lamp tube 42 is used as the glass body.
本発明のガラスクロス光反射体の使用方法としては、例えば、図６に示した如く、芯材４４に巻かれた本発明のガラスクロス光反射体１０をシリカガラスランプ管４２に１層又は複数層、テープ巻きしながら重ねることが好適である。
図６では、必要幅を有する幅広のガラスクロス光反射体１０を用いた例を示したが、本発明のガラスクロス光反射体の形状は特に制限はなく、例えば、図７に示した如く、幅狭のテープ状のガラスクロス光反射体４０を用い、複数枚のガラスクロス光反射体４０をずらして重ねてもよい。
As a method of using the glass cloth light reflector of the present invention, for example, as shown in FIG. 6, one layer or a plurality of layers of the glass cloth light reflector 10 of the present invention wound around a core material 44 is formed on a silica glass lamp tube 42. It is preferable to stack the layers while winding the tape.
FIG. 6 shows an example in which a wide glass cloth light reflector 10 having a required width is used, but the shape of the glass cloth light reflector of the present invention is not particularly limited, and for example, as shown in FIG. A narrow tape-shaped glass cloth light reflector 40 may be used, and a plurality of glass cloth light reflectors 40 may be staggered and stacked.
また、図８に示した如く、ガラスクロス光反射体を袋状とし、該袋状のガラスクロス光反射体中に詰め物を詰めたブランケットタイプのガラスクロス光反射体５０は、非常に保温性やクッション性に優れており、好適である。図８（ａ），（ｂ）のブランケットタイプのガラスクロス光反射体５０では、詰め物として図８（ｃ）で示したシリカガラスウール５２を用いた例を示した。該ブランケットタイプのガラスクロス光反射体５０は、図８（ｂ）に示した如くフレキシブル性が高く、ワークとなる母材管に密着保持させて用いることができる。 Further, as shown in FIG. 8, the blanket type glass cloth light reflector 50 in which the glass cloth light reflector is in the shape of a bag and the bag-shaped glass cloth light reflector is filled with a filling material has a very high heat retention property. It has excellent cushioning properties and is suitable. In the blanket type glass cloth light reflector 50 shown in FIGS. 8A and 8B, an example in which the silica glass wool 52 shown in FIG. 8C is used as the filling is shown. The blanket type glass cloth light reflector 50 has high flexibility as shown in FIG. 8 (b) and can be used by being held in close contact with a base material tube which is a work.
前記反射面を構成するガラス体とガラスクロス光反射体とが互いに固定される手段を有していることが好ましい。また、前記反射面を構成するガラス体とガラスクロス光反射体の双方を固定する手段を有していることが好適である。 It is preferable to have a means for fixing the glass body and the glass cloth light reflector forming the reflecting surface to each other. Further, it is preferable to have a means for fixing both the glass body and the glass cloth light reflector forming the reflecting surface.
ガラス体とガラスクロス光反射体の固定手段としては特に制限はないが、例えば、ガラス体に突起を設け、ガラスクロス光反射体側にこの突起と嵌合する為の構造が構成されていることが好ましい。また、ガラスクロス光反射体にガラス体に固定する為の紐状の構造体を設け、これによってガラス体にガラスクロス光反射体が固定されていてもよい。また、互いのクロスをガラス糸で縫い付ける、或いは、互いのクロスをバーナー等により熱融着させてもよい。或いは、ガラス管と前記ガラス管の外径よりも内径が少し大きい石英ガラスのリング状留め具を用意し、前記ガラス管に巻いたガラスクロス光反射体の上から前記石英ガラスのリング状留め具による２点留め(両端部)〜３点留め(両端部及び中央部)を行うことで、ガラスクロス光反射体をガラス管に固定させても良い。さらに、ガラス体とガラスクロス光反射体に対して双方を固定する為の第３の固定手段を有していても良い。 The means for fixing the glass body and the glass cloth light reflector is not particularly limited, but for example, a structure may be provided in which a protrusion is provided on the glass body and the glass cloth light reflector side is fitted with the protrusion. preferable. Further, the glass cloth light reflector may be provided with a string-like structure for fixing the glass cloth light reflector, and thereby the glass cloth light reflector may be fixed to the glass body. Further, the mutual cloths may be sewn with a glass thread, or the mutual cloths may be heat-sealed with a burner or the like. Alternatively, a glass tube and a quartz glass ring-shaped fastener having an inner diameter slightly larger than the outer diameter of the glass tube are prepared, and the quartz glass ring-shaped fastener is wound on the glass cloth light reflector wound around the glass tube. The glass cloth light reflector may be fixed to the glass tube by performing the two-point fastening (both ends) to the three-point fastening (both ends and central portion). Further, a third fixing means for fixing both the glass body and the glass cloth light reflector may be provided.
本発明のガラスクロス光反射体は、ガラス体と離して扱うことが出来る為、片方が破損した場合にも再利用が可能であり、破損や不具合が生じた場合の交換も容易であり、極めて作業性に優れている。 Since the glass cloth light reflector of the present invention can be handled separately from the glass body, it can be reused even if one of them is damaged, and it is easy to replace when damage or a defect occurs, which is extremely Excellent workability.
以下に実施例をあげて本発明をさらに具体的に説明するが、これらの実施例は例示的に示されるもので限定的に解釈されるべきでないことはいうまでもない。 Hereinafter, the present invention will be described in more detail with reference to examples, but it goes without saying that these examples are shown by way of illustration and should not be construed in a limited manner.
（実施例１）
平均フィラメント径７.３μｍのシリカガラスフィラメントを２００本束ねたシリカガラスストランドを、撚糸機を用いて撚糸し、シリカガラスヤーンを得た。撚り数として２４回転／ｍを採用した。該シリカガラスヤーンを経糸及び緯糸の織密度を６５本×６５本／２５ｍｍの条件で製織（平織）し、シリカガラスクロス（厚さ：０．０９５ｍｍ）を得た。
(Example 1)
A silica glass strand obtained by bundling 200 silica glass filaments having an average filament diameter of 7.3 μm was twisted using a twisting machine to obtain a silica glass yarn. The number of twists used was 24 rotations / m. The silica glass yarn was woven (plain weave) under the condition that the weaving density of the warp and the weft was 65 filaments × 65 filaments / 25 mm to obtain a silica glass cloth (thickness: 0.095 mm).
該シリカガラスクロスを６０ｍｍにカットしたガラスクロス光反射体（実施例１−１）及び該カットしたガラスクロス光反射体を所定枚数重ねて積層したガラスクロス光反射体（実施例１−２：２枚重ね、実施例１−３：３枚重ね、実施例１−４：４枚重ね、実施例１−５：５枚重ね）を作製した。 A glass cloth light reflector obtained by cutting the silica glass cloth into 60 mm (Example 1-1) and a glass cloth light reflector obtained by laminating a predetermined number of the cut glass cloth light reflectors (Example 1-2: 2). Sheet stack, Example 1-3: 3 sheet stack, Example 1-4: 4 sheet stack, Example 1-5: 5 sheet stack) were prepared.
得られたガラスクロス光反射体に対して、波長範囲：３００〜２５００ｎｍにおける光の反射率を測定した。リファレンスのラブスフェア社製スペクトラロン（登録商標）標準反射板の反射率を１００％とし、アジレント社製Ｃａｒｙ ５０００の積分球ユニットで測定を行った。結果を図９及び表１に示す。 With respect to the obtained glass cloth light reflector, the reflectance of light in the wavelength range of 300 to 2500 nm was measured. The reflectance was set to 100% for the reference Labsphere Spectralon (registered trademark) standard reflection plate, and the measurement was performed with an integrating sphere unit of Cary 5000 manufactured by Agilent. The results are shown in FIG. 9 and Table 1.
図９及び表１に示した如く、シリカガラスクロスを３〜５枚積層してなる、実施例１−３〜実施例１−５のガラスクロス光反射体は、いずれも波長３００〜２５００ｎｍの光に対する反射率が７０％以上であり、特に、４及び５枚積層した実施例１−４及び実施例１−５のガラスクロス光反射体は、波長３００ｎｍ及び１２００ｎｍにおける光に対する反射率が８０％以上であり、極めて反射効率が優れていた。 As shown in FIG. 9 and Table 1, each of the glass cloth light reflectors of Examples 1-3 to 1-5 formed by laminating 3 to 5 silica glass cloths has a wavelength of 300 to 2500 nm. Is 70% or more, and in particular, the glass cloth light reflectors of Examples 1-4 and 1-5 in which 4 and 5 sheets are laminated have a reflectance of 80% or more for light at wavelengths of 300 nm and 1200 nm. And the reflection efficiency was extremely excellent.
前記得られたシリカガラスクロスを用いたガラスクロス光反射体に対して、下記評価１）〜５）を行った。評価１）及び３）では実施例１−５と同様、シリカガラスクロスを５枚重ねた状態のガラスクロス光反射体に対して評価し、評価２）、４）及び５）ではシリカガラス管の外層にシリカガラスクロスを５枚重ねて巻いた状態のガラスクロス光反射体に対して評価した。結果を表２に示す。 The following evaluations 1) to 5) were performed on the glass cloth light reflector using the silica glass cloth obtained above. In the evaluations 1) and 3), the glass cloth light reflector in the state where five silica glass cloths were stacked was evaluated in the same manner as in Example 1-5. In the evaluations 2), 4) and 5), the silica glass tube The evaluation was performed on the glass cloth light reflector in a state in which five silica glass cloth layers were wound on the outer layer. The results are shown in Table 2.
評価１）反射特性
波長３００ｎｍ及び１２００ｎｍにおける光に対する反射率について評価した。
反射率が８０％以上を○、８０％未満を×として評価した。
Evaluation 1) Reflection characteristics The reflectance for light at wavelengths of 300 nm and 1200 nm was evaluated.
A reflectance of 80% or more was evaluated as ◯, and a reflectance of less than 80% was evaluated as x.
評価２）クッション保護性
２ｍ上段よりパチンコ玉を落下させシリカガラス管にヒビが発生するかどうかを評価した。
ヒビ発生無を○、ヒビ発生有を×として評価した。
Evaluation 2) Cushion protection It was evaluated whether or not cracks were generated in the silica glass tube by dropping a pachinko ball from the upper part of 2 m.
No cracks were evaluated as ◯, and cracks were evaluated as x.
評価３）フレキシブル性
柔軟性の有無について評価した。
Evaluation 3) Flexibility The presence or absence of flexibility was evaluated.
評価４）保温効果性
シリカガラス管内の温度変化（開始時１０００℃）を測定することで保温効果を評価した。保温効果有を○、保温効果無を×として評価した。
Evaluation 4) Heat-retaining effect The heat-retaining effect was evaluated by measuring the temperature change in the silica glass tube (1000 ° C at the start). The heat-retaining effect was evaluated as ◯, and the heat-retaining effect was evaluated as x.
評価５）再利用の可否
シリカガラス管が破損した場合の再利用の可否について評価した。
Evaluation 5) Possibility of reuse Possibility of reuse was evaluated when the silica glass tube was damaged.
（比較例１）
特許文献１の実施例１記載の方法により、シリカガラス管の外層にシリカガラス膜を被覆し、シリカガラス被覆体を得た。得られたシリカガラス被覆体に対し、実施例１と同様の方法により、評価１）〜５）を行った。結果を表２に示す。
(Comparative Example 1)
According to the method described in Example 1 of Patent Document 1, the outer layer of the silica glass tube was coated with a silica glass film to obtain a silica glass coated body. Evaluations 1) to 5) were performed on the obtained silica glass coated body in the same manner as in Example 1. Table 2 shows the results.
表２に示した如く、実施例１のガラスクロス光反射体は、反射特性が極めて優れており、クッション保護性及び保温効果性も良好であった。また、実施例１のガラスクロス光反射体は布状態であり、フレキシブル性が高かった。さらに、シリカガラス管に密着コーティングされている比較例１のシリカガラス被覆体と比較して、実施例１のガラスクロス光反射体はシリカガラス管と離して扱うことが出来る為、片方が破損した場合にも再利用が容易である。 As shown in Table 2, the glass cloth light reflector of Example 1 had extremely excellent reflection characteristics, and also had good cushion protection and heat retention effects. Further, the glass cloth light reflector of Example 1 was in a cloth state and had high flexibility. Further, as compared with the silica glass coated body of Comparative Example 1 in which the silica glass tube is closely coated, the glass cloth light reflector of Example 1 can be handled separately from the silica glass tube, so one side is damaged. It is easy to reuse even in the case.
（実施例２）
平均フィラメント径９．９μｍのシリカガラスフィラメントを２００本束ねたシリカガラスストランドを、撚糸機を用いて撚り数として１８０回転（Ｚ撚り）／ｍにて撚糸後、更に２本を併せて１５２回転（Ｓ撚り）／ｍにて合撚糸を実施してシリカガラスヤーンを得た。該シリカガラスヤーンを経糸及び緯糸の織密度を５６本×５３本／２５ｍｍの条件で製織（朱子織）し、シリカガラスクロス（厚さ：０．２４ｍｍ）を得た。
(Example 2)
A silica glass strand obtained by bundling 200 silica glass filaments having an average filament diameter of 9.9 μm is twisted at a number of twists of 180 rotations (Z twist) / m using a twisting machine, and then two more are combined for 152 rotations ( S-twisting) / m was carried out to obtain a silica glass yarn. The silica glass yarn was woven under the condition that the weaving density of warp and weft was 56 filaments / 53 filaments / 25 mm to obtain silica glass cloth (thickness: 0.24 mm).
該シリカガラスクロスを６０ｍｍにカットしたガラスクロス光反射体（実施例２−１）及び該カットしたガラスクロス光反射体を所定枚数重ねて積層したガラスクロス光反射体（実施例２−２：２枚重ね、実施例２−３：３枚重ね、実施例２−４：４枚重ね、実施例２−５：５枚重ね）を作製した。 A glass cloth light reflector obtained by cutting the silica glass cloth into 60 mm (Example 2-1) and a glass cloth light reflector obtained by laminating a predetermined number of the cut glass cloth light reflectors (Example 2-2: 2). Sheet stack, Example 2-3: 3 sheet stack, Example 2-4: 4 sheet stack, Example 2-5: 5 sheet stack) were prepared.
得られたガラスクロス光反射体に対して、実施例１と同様の方法により光の反射率を測定した。結果を図１０及び表３に示す。 With respect to the obtained glass cloth light reflector, the light reflectance was measured by the same method as in Example 1. The results are shown in FIG. 10 and Table 3.
図１０及び表３に示した如く、シリカガラスクロスを２〜５枚積層してなる、実施例２−３〜実施例２−５のガラスクロス光反射体は、いずれも波長３００〜２５００ｎｍの光に対する反射率が８０％以上であり、極めて反射効率が優れていた。 As shown in FIG. 10 and Table 3, each of the glass cloth light reflectors of Examples 2-3 to 2-5 formed by laminating 2 to 5 silica glass cloths has a wavelength of 300 to 2500 nm. The reflectance was 80% or more, and the reflection efficiency was extremely excellent.
（実施例３）
平均フィラメント径９．９μｍのシリカガラスフィラメントを２００本束ねたシリカガラスストランドを、撚糸機を用いて撚糸し、シリカガラスヤーンを得た。撚り数として４０回転／ｍを採用した。該シリカガラスヤーンを経糸及び緯糸の織密度で６０本×５８本／２５ｍｍで製織（朱子織）し、シリカガラスクロス（厚さ：０．１３ｍｍ）を得た。
(Example 3)
A silica glass strand obtained by bundling 200 silica glass filaments having an average filament diameter of 9.9 μm was twisted using a twisting machine to obtain a silica glass yarn. 40 twists / m was adopted as the number of twists. The silica glass yarn was woven at a weaving density of warp and weft of 60 × 58 yarns / 25 mm (sateen weave) to obtain silica glass cloth (thickness: 0.13 mm).
該シリカガラスクロスを６０ｍｍにカットしたガラスクロス光反射体（実施例３−１）及び該カットしたガラスクロス光反射体を所定枚数重ねて積層したガラスクロス光反射体（実施例３−２：２枚重ね、実施例３−３：３枚重ね、実施例３−４：４枚重ね、実施例３−５：５枚重ね）を作製した。 A glass cloth light reflector obtained by cutting the silica glass cloth into 60 mm (Example 3-1) and a glass cloth light reflector obtained by laminating a predetermined number of the cut glass cloth light reflectors (Example 3-2: 2). Sheet stack, Example 3-3: 3 sheet stack, Example 3-4: 4 sheet stack, Example 3-5: 5 sheet stack) were prepared.
得られたガラスクロス光反射体に対して、実施例１と同様の方法により光の反射率を測定した。結果を図１１及び表４に示す。 With respect to the obtained glass cloth light reflector, the light reflectance was measured by the same method as in Example 1. The results are shown in FIG. 11 and Table 4.
図１１及び表４に示した如く、シリカガラスクロスを２〜５枚積層してなる、実施例３−２〜実施例３−５のガラスクロス光反射体は、いずれも波長３００〜２５００ｎｍの光に対する反射率が７０％以上であり、特に、４及び５枚積層した実施例３−４〜実施例３−５のガラスクロス光反射体は、波長３００ｎｍ及び１２００ｎｍにおける光に対する反射率が８０％以上であり、極めて反射効率が優れていた。 As shown in FIG. 11 and Table 4, each of the glass cloth light reflectors of Examples 3-2 to 3-5 formed by laminating 2 to 5 silica glass cloths has a wavelength of 300 to 2500 nm. Is 70% or more, and in particular, the glass cloth light reflectors of Examples 3-4 to 3-5 in which 4 and 5 sheets are laminated have a reflectance of 80% or more for light at wavelengths of 300 nm and 1200 nm. And the reflection efficiency was extremely excellent.
（実施例４）
平均フィラメント径７．０μｍのＥガラスフィラメントを２００本束ねたガラスストランドを、撚糸機を用いて撚糸し、ガラスヤーンを得た。撚り数として４０回転／ｍを採用した。該ガラスヤーンを経糸及び緯糸の織密度で６０本×５８本／２５ｍｍで製織（朱子織）し、Ｅガラス製のガラスクロス（厚さ：０．０９０ｍｍ）を得た。
(Example 4)
A glass strand obtained by bundling 200 E glass filaments having an average filament diameter of 7.0 μm was twisted using a twisting machine to obtain a glass yarn. 40 twists / m was adopted as the number of twists. The glass yarn was woven at a weaving density of warp and weft of 60 × 58/25 mm (sateen weave) to obtain a glass cloth made of E glass (thickness: 0.090 mm).
該ガラスクロスを６０ｍｍにカットしたガラスクロス光反射体（実施例４−１）及び該カットしたガラスクロス光反射体を所定枚数重ねて積層したガラスクロス光反射体（実施例４−２：２枚重ね、実施例４−３：３枚重ね、実施例４−４：４枚重ね、実施例４−５：５枚重ね）を作製した。 A glass cloth light reflector obtained by cutting the glass cloth into 60 mm (Example 4-1) and a glass cloth light reflector obtained by laminating a predetermined number of the cut glass cloth light reflectors (Example 4-2: 2 sheets) Stacking, Example 4-3: 3 stacks, Example 4-4: 4 stacks, Example 4-5: 5 stacks) were prepared.
得られたガラスクロス光反射体に対して、実施例１と同様の方法により光の反射率を測定した。結果を図１２及び表５に示す。 With respect to the obtained glass cloth light reflector, the light reflectance was measured by the same method as in Example 1. The results are shown in FIG. 12 and Table 5.
図１２及び表５に示した如く、ガラスクロスを３〜５枚積層してなる、実施例４−３〜実施例４−５のガラスクロス光反射体は、いずれも波長４００〜２５００ｎｍの光に対する反射率は７０％以上と良好であったが、シリカガラスクロスを用いた実施例１〜３とは異なり、波長３００ｎｍにおける光反射率が低かった。 As shown in FIG. 12 and Table 5, each of the glass cloth light reflectors of Examples 4-3 to 4-5, which is formed by laminating 3 to 5 glass cloths, has a wavelength of 400 to 2500 nm. The reflectance was as good as 70% or more, but unlike Examples 1 to 3 using silica glass cloth, the light reflectance at a wavelength of 300 nm was low.
（比較例２）
平均粒径が１．５μｍの合成シリカガラス粒子を、１％のメチルセルロースを含む水溶液に分散させ、固形分濃度が７５％のスラリーとした。該スラリーを用いて、６０ｍｍ角の天然石英ガラス板の表面に塗布膜を形成した後、加熱処理し、シリカガラス膜で被覆されたシリカガラス被覆体（膜厚：比較例２−１：１０７μｍ、比較例２−２：１５９μｍ）を得た。得られたシリカガラス被覆体に対して、実施例１と同様の方法により光の反射率を測定した。結果を図１３及び表６に示す。
(Comparative example 2)
Synthetic silica glass particles having an average particle size of 1.5 μm were dispersed in an aqueous solution containing 1% methylcellulose to obtain a slurry having a solid content concentration of 75%. Using the slurry, a coating film was formed on the surface of a natural quartz glass plate of 60 mm square and then heat-treated, and the silica glass coating body coated with the silica glass film (film thickness: Comparative Example 2-1: 107 μm, Comparative Example 2-2: 159 μm) was obtained. The light reflectance of the obtained silica glass coating was measured in the same manner as in Example 1. The results are shown in FIG. 13 and Table 6.
１０，４０，５０：本発明のガラスクロス光反射体、１２：ガラスヤーン、１４：ガラスストランド、１６：ガラスフィラメント、１８：ガラスクロス、２０：入射光、２２：反射光、３０：ガラス糸、３２：ループ織り、４２：シリカガラスランプ管、４４：芯材、５２：シリカガラスウール。 10, 40, 50: glass cloth light reflector of the present invention, 12: glass yarn, 14: glass strand, 16: glass filament, 18: glass cloth, 20: incident light, 22: reflected light, 30: glass yarn, 32: loop weave, 42: silica glass lamp tube, 44: core material, 52: silica glass wool.
Claims (7)
反射面を構成するガラス体と、
を含む構造体であって、
前記ガラスクロス光反射体は、前記反射面を構成するガラス体に、所望の反射率を得られる層数で着脱可能に固定して用いられ、且つ該ガラス体に前記ガラスクロス光反射体を巻いて用いる、構造体。 A glass yarn obtained by weaving a plurality of one or more glass filaments selected from the group consisting of E glass, S glass, T glass, UT glass, D glass, L glass, NE glass and silica glass, and twisting them into a glass yarn. A glass cloth light reflector made of glass cloth,
A glass body that constitutes the reflection surface,
A structure containing
The glass cloth light reflector is detachably fixed to a glass body forming the reflection surface with a number of layers capable of obtaining a desired reflectance , and the glass cloth light reflector is wound around the glass body. Ru using Te, structure.
前記光反射体は、該シリカガラスフィラメントを複数本束ね、撚糸したシリカガラスヤーンを製織されてなるシリカガラスクロスからなるシリカガラスクロス光反射体であり、
該シリカガラスクロスのヤーンにより光反射されることで、波長３００ｎｍ〜２０００ｎｍにおける光に対する反射率が７０％以上である、請求項１〜３のいずれか１項記載の構造体。 The glass filament is a silica glass filament made of silica glass,
The light reflector is a silica glass cloth light reflector made of a silica glass cloth formed by weaving a plurality of twisted silica glass yarns by bundling a plurality of the silica glass filaments,
The structure according to any one of claims 1 to 3, wherein a reflectance of light at a wavelength of 300 nm to 2000 nm is 70% or more by being reflected by the yarn of the silica glass cloth.
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