JP2018535414A - 広帯域フィルタを用いた分光光度測定方法および装置 - Google Patents
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- 238000000034 method Methods 0.000 title description 4
- 238000002798 spectrophotometry method Methods 0.000 title description 2
- 239000013307 optical fiber Substances 0.000 description 6
- 238000012986 modification Methods 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
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- G—PHYSICS
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1204—Grating and filter
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1213—Filters in general, e.g. dichroic, band
- G01J2003/1221—Mounting; Adjustment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J2003/1226—Interference filters
- G01J2003/1243—Pivoting IF or other position variation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J2003/1866—Monochromator for three or more wavelengths
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Optical Filters (AREA)
Abstract
Description
Claims (6)
- 入射する光から特定の波長帯域の光を分析するための分光光度装置であって、
上記分光光度装置は、
入射した光を拡散させる受光部;
第1の広帯域フィルタの組;および
上記第1の広帯域フィルタの組を通過した光を検出する検出器を含み、
上記第1の広帯域フィルタの組は、
光の入射方向に対し第1の角度を有するように配置され、上記入射する光に第1の波長帯域を通過させる第1の広帯域フィルタ;
光の入射方向に対し上記第1の角度とは異なる第2の角度を有するように配置され、上記第1の広帯域フィルタを通過した光に第2の波長帯域を通過させる第2の広帯域フィルタ;および
上記第2の広帯域フィルタを通過した光の経路を、上記第1の広帯域フィルタを通過した光の経路と等しくなるように調整する第1の経路補償手段を含み、
上記第1の広帯域フィルタ、上記第2の広帯域フィルタ、および上記第1の経路補償手段は、光の入射方向に対し直列的に配置されることを特徴とする、分光光度装置。 - 第2の広帯域フィルタの組をさらに含む分光光度装置であって、
上記第2の広帯域フィルタの組は、
光の入射方向に対し第3の角度を有するように配置され、上記入射する光に第3の波長帯域を通過させる第3の広帯域フィルタ;
光の入射方向に対し上記第3の角度とは異なる第4の角度を有するように配置され、上記第3の広帯域フィルタを通過した光に第4の波長帯域を通過させる第4の広帯域フィルタ;および
上記第3の広帯域フィルタを通過した光の経路を、上記第4の広帯域フィルタを通過した光の経路と等しくなるように調整する第2の経路補償手段を含み、
上記第3の広帯域フィルタ、上記第4の広帯域フィルタ、および上記第2の経路補償手段は、光の入射方向に対し直列的に配置され、
上記第1の広帯域フィルタの組と上記第2の広帯域フィルタの組は、側面から見たときに、光の入射方向に対し垂直な方向に一直線に配置されることを特徴とする、請求項1に記載の分光光度装置。 - 側面から見たときに、光の入射方向に対し垂直な方向に上記第1の広帯域フィルタの組および上記第2の広帯域フィルタの組と一直線に配置されるN個の広帯域フィルタの組と、をさらに含み、
1≦N≦28である、請求項2に記載の分光光度装置。 - 上記受光部は、第1の受光部および第2の受光部を含み、
上記第1の広帯域フィルタの組には、上記第1の受光部から光が入射され、
上記第2の広帯域フィルタの組には、上記第2の受光部から光が入射されることを特徴とする、請求項2に記載の分光光度装置。 - 上記第1の広帯域フィルタの組と上記検出器との間に、干渉を防止するための少なくとも一つ以上のレンズをさらに含み、
上記少なくとも一つのレンズは、
シリンドリカルレンズ;
凸レンズ;または
これらの任意の組み合わせ
のうち少なくとも一つを含むことを特徴とする、請求項1または2に記載の分光光度装置。 - 上記検出器は、イメージセンサであることを特徴とする、請求項1〜3のいずれか一項に記載の分光光度装置。
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KR10-2016-0007150 | 2016-01-20 | ||
KR1020160007150A KR101803250B1 (ko) | 2016-01-20 | 2016-01-20 | 광대역 필터를 이용한 분광 광도 측정 기술 및 장치 |
PCT/KR2016/014032 WO2017126801A1 (en) | 2016-01-20 | 2016-12-01 | Technique and apparatus for spectrophotometry using broadband filters |
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JP6611936B2 JP6611936B2 (ja) | 2019-11-27 |
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KR102498122B1 (ko) | 2017-11-21 | 2023-02-09 | 삼성전자주식회사 | 분광 장치와, 분광 방법, 및 생체신호 측정장치 |
KR102663185B1 (ko) * | 2018-08-07 | 2024-05-03 | 삼성전자주식회사 | 광학 방출 분광 시스템 및 그 보정 방법, 반도체 소자 제조 방법 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4896965A (en) * | 1988-09-14 | 1990-01-30 | The United States Of America As Represented By The United States Department Of Energy | Real-time alkali monitoring system |
JPH10300915A (ja) * | 1997-04-23 | 1998-11-13 | Fujikura Ltd | バンドパスフィルタ装置 |
JP2008216479A (ja) * | 2007-03-01 | 2008-09-18 | Tohoku Univ | 波長可変フィルタ分光装置 |
WO2012131812A1 (ja) * | 2011-03-31 | 2012-10-04 | コニカミノルタアドバンストレイヤー株式会社 | 分光器 |
US20140175541A1 (en) * | 2012-12-21 | 2014-06-26 | Stmicroelectronics S.R.L. | Manufacturing of electronic devices in a wafer of semiconductor material having trenches with different directions |
WO2014175541A1 (ko) * | 2013-04-25 | 2014-10-30 | 한국화학연구원 | 광대역 필터를 이용하여 빛의 파장을 선택할 수 있는 단색화 장치 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8830039D0 (en) | 1988-12-22 | 1989-02-15 | Renishaw Plc | Raman microscope |
JPH06273232A (ja) * | 1993-03-18 | 1994-09-30 | Minolta Camera Co Ltd | 測色計の受光光学系 |
US5790250A (en) * | 1996-11-04 | 1998-08-04 | Ail Systems, Inc. | Apparatus and method for real-time spectral alignment for open-path fourier transform infrared spectrometers |
US6636651B2 (en) * | 2001-06-08 | 2003-10-21 | Koncent Communication, Inc. | Four-port bidirectional optical circulator |
US7397561B2 (en) | 2005-11-07 | 2008-07-08 | Wafermasters, Incorporated | Spectroscopy system |
US8437582B2 (en) * | 2005-12-22 | 2013-05-07 | Palo Alto Research Center Incorporated | Transmitting light with lateral variation |
KR101054017B1 (ko) * | 2008-09-16 | 2011-08-03 | 양병관 | 분광기의 보정방법 |
RU2436038C1 (ru) * | 2010-07-02 | 2011-12-10 | Общество с ограниченной ответственностью "ВИНТЕЛ" | Статический фурье-спектрометр |
US8049886B1 (en) * | 2010-10-14 | 2011-11-01 | Alcon Lensx, Inc. | Spectrometer with adjustable-deflector-controlled alignment for optical coherence tomography |
US9442014B2 (en) * | 2011-04-05 | 2016-09-13 | Konica Minolta, Inc. | Fourier transform spectrometer and fourier transform spectroscopic method |
EP2756303B1 (en) * | 2011-09-15 | 2018-08-22 | The Trustees of Columbia University in the City of New York | Measurement of a fluorescent analyte using tissue excitation |
US9677990B2 (en) * | 2014-04-30 | 2017-06-13 | Particles Plus, Inc. | Particle counter with advanced features |
WO2017087390A1 (en) * | 2015-11-16 | 2017-05-26 | Analog Devices, Inc. | Waveguide-based integrated spectrometer |
-
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- 2016-01-20 KR KR1020160007150A patent/KR101803250B1/ko active IP Right Grant
- 2016-12-01 WO PCT/KR2016/014032 patent/WO2017126801A1/en active Application Filing
- 2016-12-01 JP JP2018522706A patent/JP6611936B2/ja active Active
- 2016-12-01 US US15/770,656 patent/US10514298B2/en active Active
- 2016-12-01 EP EP16886644.0A patent/EP3356774A4/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4896965A (en) * | 1988-09-14 | 1990-01-30 | The United States Of America As Represented By The United States Department Of Energy | Real-time alkali monitoring system |
JPH10300915A (ja) * | 1997-04-23 | 1998-11-13 | Fujikura Ltd | バンドパスフィルタ装置 |
JP2008216479A (ja) * | 2007-03-01 | 2008-09-18 | Tohoku Univ | 波長可変フィルタ分光装置 |
WO2012131812A1 (ja) * | 2011-03-31 | 2012-10-04 | コニカミノルタアドバンストレイヤー株式会社 | 分光器 |
US20140175541A1 (en) * | 2012-12-21 | 2014-06-26 | Stmicroelectronics S.R.L. | Manufacturing of electronic devices in a wafer of semiconductor material having trenches with different directions |
WO2014175541A1 (ko) * | 2013-04-25 | 2014-10-30 | 한국화학연구원 | 광대역 필터를 이용하여 빛의 파장을 선택할 수 있는 단색화 장치 |
KR20140127504A (ko) * | 2013-04-25 | 2014-11-04 | 한국화학연구원 | 광대역 필터를 이용하여 빛의 파장을 선택할 수 있는 단색화 장치 |
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KR101803250B1 (ko) | 2017-11-30 |
US20190056268A1 (en) | 2019-02-21 |
US10514298B2 (en) | 2019-12-24 |
WO2017126801A1 (en) | 2017-07-27 |
EP3356774A1 (en) | 2018-08-08 |
EP3356774A4 (en) | 2019-07-03 |
KR20170087321A (ko) | 2017-07-28 |
JP6611936B2 (ja) | 2019-11-27 |
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