JP2018527580A - 試験室又は被検査物の真空引き時における漏れ検知 - Google Patents
試験室又は被検査物の真空引き時における漏れ検知 Download PDFInfo
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- JP2018527580A JP2018527580A JP2018513863A JP2018513863A JP2018527580A JP 2018527580 A JP2018527580 A JP 2018527580A JP 2018513863 A JP2018513863 A JP 2018513863A JP 2018513863 A JP2018513863 A JP 2018513863A JP 2018527580 A JP2018527580 A JP 2018527580A
- Authority
- JP
- Japan
- Prior art keywords
- inspection object
- test chamber
- evacuating
- signal
- leakage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000012360 testing method Methods 0.000 title claims abstract description 49
- 238000007689 inspection Methods 0.000 title claims abstract description 23
- 238000001514 detection method Methods 0.000 title description 6
- 238000000034 method Methods 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 claims abstract description 15
- 230000007704 transition Effects 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000003570 air Substances 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
Claims (10)
- 試験室内に含まれる被検査物の漏れを検知する方法であって、
前記試験室内に前記被検査物を配置する工程と、
前記試験室を真空引きする工程と、
前記試験室を真空引きする間に、計測信号Mとして前記試験室内の前記ガスの前記分圧を計測する工程と、
時間tにおける前記信号M(t)の前記推移及びnは正の有理数である前記項t−nを含む近似関数F(t)から差分Dを形成する工程と、
前記差分信号Dに基づいて前記被検査物の漏れの有無を判断する工程と、
を備える方法。 - 被検査物の漏れを検知する方法であって、
前記被検査物を真空引きする工程と、
前記被検査物を真空引きする間に、計測信号Mとして前記被検査物内の前記分圧を計測する工程と、
時間tにおける前記信号M(t)の前記推移及びnは正の有理数である前記項t−nを含む近似関数F(t)から差分Dを形成する工程と、
前記差分信号Dに基づいて前記被検査物の漏れの有無を判断する工程と、
を備える方法。 - nは1以上で、好ましくは整数であることを特徴とする、請求項1に記載の方法。
- 前記近似関数F(t)が前記項1/t2を含むように、n=2であることを特徴とする、請求項3に記載の方法。
-
- 前記近似関数F(t)が、前記計測中に所定の期間、算出されることを特徴とする、請求項1〜5の何れかに記載の方法。
- 前記期間は約1乃至5秒間、好ましくは約2秒間の範囲であることを特徴とする、請求項6に記載の方法。
- 前記近似関数は、D(t)<M(t)/1000である限り、新しい計測値のために算出されることを特徴とする、請求項1〜7の何れかに記載の方法。
- 前記試験室内の前記圧力が1mbar未満、好ましくは0.1mbar未満である場合、前記差分信号Dに基づいて前記被検査物の漏れの有無を判断することを特徴とする、請求項1〜8の何れかに記載の方法。
- 前記被検査物の漏れは、前記差分DがM(t)/100よりも大きくなると、すぐに検知されるとみなされることを特徴とする、請求項1〜9の何れかに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015217598.7A DE102015217598A1 (de) | 2015-09-15 | 2015-09-15 | Leckdetektion beim Evakuieren einer Prüfkammer oder eines Prüflings |
DE102015217598.7 | 2015-09-15 | ||
PCT/EP2016/071416 WO2017046027A1 (de) | 2015-09-15 | 2016-09-12 | Leckdetektion beim evakuieren einer prüfkammer oder eines prüflings |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018527580A true JP2018527580A (ja) | 2018-09-20 |
JP6830481B2 JP6830481B2 (ja) | 2021-02-17 |
Family
ID=56893995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018513863A Active JP6830481B2 (ja) | 2015-09-15 | 2016-09-12 | 試験室又は被検査物の真空引き時における漏れ検知 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20180252613A1 (ja) |
EP (1) | EP3350561B1 (ja) |
JP (1) | JP6830481B2 (ja) |
KR (1) | KR20180051549A (ja) |
CN (1) | CN108139292B (ja) |
DE (1) | DE102015217598A1 (ja) |
TW (1) | TWI708049B (ja) |
WO (1) | WO2017046027A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019121462B4 (de) * | 2019-08-08 | 2021-12-09 | Inficon Gmbh | Verfahren zur Dichtheitsprüfung eines flüssigkeitsgefüllten Prüflings |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6315133A (ja) * | 1986-07-08 | 1988-01-22 | Toshiba Corp | 真空リ−クチエツク方法 |
WO1994004902A1 (de) * | 1992-08-25 | 1994-03-03 | Leybold Ag | Vakuum-messgerät für die integrale dichtigkeitskontrolle mit leichten gasen |
US20020000117A1 (en) * | 2000-03-30 | 2002-01-03 | Mccoy Christopher R. | Method for identifying leaks in a sealed package having a liquid therein |
JP2002500764A (ja) * | 1997-05-26 | 2002-01-08 | レーマン,マーチン | リークテストのための方法および装置 |
US20140334946A1 (en) * | 2013-05-08 | 2014-11-13 | Volvo Car Corporation | Leakage detection system and method for fuel tank systems |
JP2014533825A (ja) * | 2011-11-16 | 2014-12-15 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | 検査ガスの添加無しの、寸法的に安定な/緩んだパッケージの漏れの迅速な検出 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4715214A (en) * | 1986-10-03 | 1987-12-29 | S. Himmelstein And Company | Leak tester |
EP2333290B1 (en) * | 2009-12-14 | 2013-05-15 | Volvo Car Corporation | Method and system to detect a leak in a vehicle fuel tank |
-
2015
- 2015-09-15 DE DE102015217598.7A patent/DE102015217598A1/de not_active Withdrawn
-
2016
- 2016-09-12 EP EP16763283.5A patent/EP3350561B1/de active Active
- 2016-09-12 US US15/760,014 patent/US20180252613A1/en not_active Abandoned
- 2016-09-12 CN CN201680054533.5A patent/CN108139292B/zh active Active
- 2016-09-12 WO PCT/EP2016/071416 patent/WO2017046027A1/de active Application Filing
- 2016-09-12 JP JP2018513863A patent/JP6830481B2/ja active Active
- 2016-09-12 KR KR1020187009114A patent/KR20180051549A/ko not_active Application Discontinuation
- 2016-09-14 TW TW105130062A patent/TWI708049B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6315133A (ja) * | 1986-07-08 | 1988-01-22 | Toshiba Corp | 真空リ−クチエツク方法 |
WO1994004902A1 (de) * | 1992-08-25 | 1994-03-03 | Leybold Ag | Vakuum-messgerät für die integrale dichtigkeitskontrolle mit leichten gasen |
JP2002500764A (ja) * | 1997-05-26 | 2002-01-08 | レーマン,マーチン | リークテストのための方法および装置 |
US20020000117A1 (en) * | 2000-03-30 | 2002-01-03 | Mccoy Christopher R. | Method for identifying leaks in a sealed package having a liquid therein |
JP2014533825A (ja) * | 2011-11-16 | 2014-12-15 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | 検査ガスの添加無しの、寸法的に安定な/緩んだパッケージの漏れの迅速な検出 |
US20140334946A1 (en) * | 2013-05-08 | 2014-11-13 | Volvo Car Corporation | Leakage detection system and method for fuel tank systems |
Also Published As
Publication number | Publication date |
---|---|
TWI708049B (zh) | 2020-10-21 |
TW201719133A (zh) | 2017-06-01 |
JP6830481B2 (ja) | 2021-02-17 |
CN108139292A (zh) | 2018-06-08 |
EP3350561A1 (de) | 2018-07-25 |
US20180252613A1 (en) | 2018-09-06 |
EP3350561B1 (de) | 2020-04-29 |
DE102015217598A1 (de) | 2017-03-16 |
KR20180051549A (ko) | 2018-05-16 |
CN108139292B (zh) | 2020-11-03 |
WO2017046027A1 (de) | 2017-03-23 |
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