JP2018521312A5 - - Google Patents

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Publication number
JP2018521312A5
JP2018521312A5 JP2017562066A JP2017562066A JP2018521312A5 JP 2018521312 A5 JP2018521312 A5 JP 2018521312A5 JP 2017562066 A JP2017562066 A JP 2017562066A JP 2017562066 A JP2017562066 A JP 2017562066A JP 2018521312 A5 JP2018521312 A5 JP 2018521312A5
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JP
Japan
Prior art keywords
sensing
particle
sensor
space
sensing system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017562066A
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English (en)
Japanese (ja)
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JP2018521312A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/EP2016/062580 external-priority patent/WO2016198321A1/en
Publication of JP2018521312A publication Critical patent/JP2018521312A/ja
Publication of JP2018521312A5 publication Critical patent/JP2018521312A5/ja
Pending legal-status Critical Current

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JP2017562066A 2015-06-12 2016-06-03 粒子センサ及び粒子感知方法 Pending JP2018521312A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP15171840 2015-06-12
EP15171840.0 2015-06-12
PCT/EP2016/062580 WO2016198321A1 (en) 2015-06-12 2016-06-03 Particle sensor and particle sensing method

Publications (2)

Publication Number Publication Date
JP2018521312A JP2018521312A (ja) 2018-08-02
JP2018521312A5 true JP2018521312A5 (enExample) 2019-06-27

Family

ID=53397908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017562066A Pending JP2018521312A (ja) 2015-06-12 2016-06-03 粒子センサ及び粒子感知方法

Country Status (5)

Country Link
US (1) US10520413B2 (enExample)
EP (1) EP3308135A1 (enExample)
JP (1) JP2018521312A (enExample)
CN (1) CN107743580A (enExample)
WO (1) WO2016198321A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105008895B (zh) 2012-10-15 2019-02-15 纳诺赛莱克特生物医药股份有限公司 颗粒分选的系统、设备和方法
AT519716B1 (de) * 2017-03-14 2019-01-15 Mat Center Leoben Forschung Gmbh Partikelsensor und Verfahren zur Messung von Partikelkonzentrationen
US10816445B2 (en) 2017-06-21 2020-10-27 Koninklijke Philips N.V. Particle sensor and particle sensing method
GB201715014D0 (en) 2017-09-18 2017-11-01 Cambridge Entpr Ltd Particulate matter detection
US11047777B2 (en) 2017-11-14 2021-06-29 Aerodyne Microsystems Inc. Thermophoretic particle concentrator
EP3791155A1 (en) * 2018-05-11 2021-03-17 Teknologian Tutkimuskeskus VTT Oy Particle sensor
CN117030553B (zh) * 2023-10-09 2024-03-08 乌镇实验室 一种粉体颗粒的粒径测量和筛分收集方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE249036T1 (de) * 1993-06-07 2003-09-15 Colloidal Dynamics Pty Ltd Messung der teilchengrösse und -ladung in mehrkomponenten-kolloiden
JP3393817B2 (ja) * 1998-10-16 2003-04-07 株式会社堀場製作所 粒径分布測定装置
US6666905B2 (en) 1998-10-16 2003-12-23 Midwest Research Institute Thermoelectric particle precipitator and method using same for collecting particles from fluid streams
US7168292B2 (en) 2003-05-15 2007-01-30 The Regents Of The University Of California Apparatus for particulate matter analysis
EP1671101A1 (en) * 2003-10-03 2006-06-21 Vrije Universiteit Brussel Method and device for size-separating particles present in a fluid
EP2255178A1 (en) 2008-02-27 2010-12-01 Volvo Technology Corporation Method and arrangement for detecting particles
WO2010001925A1 (ja) * 2008-07-01 2010-01-07 新日本製鐵株式会社 降下粉塵量推定方法、降下粉塵量推定装置、及び降下粉塵量推定プログラム
US8631685B2 (en) * 2008-10-15 2014-01-21 Massachusetts Institute Of Technology Method and apparatus for extended time and varying environment measurements of single particles in microfluidic channels
JP2011256796A (ja) * 2010-06-09 2011-12-22 Toyota Motor Corp Ｐｍ量検出システム
US8806915B2 (en) * 2011-08-08 2014-08-19 University Of California Microfabricated particulate matter monitor
US20130235357A1 (en) * 2012-03-12 2013-09-12 Kla-Tencor Corporation System and Method for Particle Control Near A Reticle
CN103411864B (zh) * 2013-08-05 2015-12-30 深迪半导体(上海)有限公司 基于结构共振测量气体悬浮颗粒浓度的mems传感器

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