JP2018515335A - チャンクポリシリコンまたは粒状ポリシリコンの製品流を搬送するための装置 - Google Patents
チャンクポリシリコンまたは粒状ポリシリコンの製品流を搬送するための装置 Download PDFInfo
- Publication number
- JP2018515335A JP2018515335A JP2017561324A JP2017561324A JP2018515335A JP 2018515335 A JP2018515335 A JP 2018515335A JP 2017561324 A JP2017561324 A JP 2017561324A JP 2017561324 A JP2017561324 A JP 2017561324A JP 2018515335 A JP2018515335 A JP 2018515335A
- Authority
- JP
- Japan
- Prior art keywords
- eddy current
- polysilicon
- sensor
- product stream
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 46
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 18
- 239000010703 silicon Substances 0.000 claims abstract description 18
- 239000004033 plastic Substances 0.000 claims abstract description 17
- 239000000356 contaminant Substances 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 14
- 238000011156 evaluation Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 239000002245 particle Substances 0.000 description 6
- 230000005291 magnetic effect Effects 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010298 pulverizing process Methods 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 239000011856 silicon-based particle Substances 0.000 description 3
- 238000005303 weighing Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012216 screening Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 2
- 239000005052 trichlorosilane Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- VQPFDLRNOCQMSN-UHFFFAOYSA-N bromosilane Chemical compound Br[SiH3] VQPFDLRNOCQMSN-UHFFFAOYSA-N 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012432 intermediate storage Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000006148 magnetic separator Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- -1 silicon halogen compounds Chemical class 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
- B07C5/344—Sorting according to other particular properties according to electric or electromagnetic properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G27/00—Jigging conveyors
- B65G27/04—Load carriers other than helical or spiral channels or conduits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C2501/00—Sorting according to a characteristic or feature of the articles or material to be sorted
- B07C2501/0036—Sorting out metallic particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/04—Bulk
- B65G2201/042—Granular material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0208—Control or detection relating to the transported articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Control Of Conveyors (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Attitude Control For Articles On Conveyors (AREA)
- Sorting Of Articles (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Abstract
Description
2 センサー強度
3 筐体
4 ライニング
5 チャネルトラフ
α オフセット角度
Claims (8)
- プラスチックまたはシリコンでライニングされた金属製の搬送面と、製品流中の金属異物または導電性異物を検出するための渦電流センサーとを含む、チャンクポリシリコンまたは粒状ポリシリコンの製品流を搬送するための装置。
- 前記渦電流センサーは、前記搬送面のライニングの下部の筐体内に位置する、請求項1に記載の装置。
- 前記筐体およびライニングが固定されている側面ライニングを含む、請求項2に記載の装置。
- 前記渦電流センサーは、搬送された製品流に対して横方向の複数の平行で離間した列に配置されている、請求項1〜3のいずれか一項に記載の装置。
- 少なくとも一列の渦電流センサーは、別の列の渦電流センサーに対して横方向にオフセットに配置されている、請求項4に記載の装置。
- 前記渦電流センサーは、一つの列中の最も近い隣接した二つの渦電流センサーの中心点が別の列の共通の最も近い隣接した渦電流センサーの中心点に結合する場合に、最小辺長Sを有する三角形が形成されるように配置される、請求項4または5に記載の装置。
- 前記製品流は、請求項1〜6のいずれか一項に記載の装置のプラスチックまたはシリコンでライニングされた金属製の搬送面上を移動し、前記異物の検出は渦電流センサーによりなされる、チャンクポリシリコンまたは粒状ポリシリコンの製品流中の金属異物または導電性の異物を識別するための方法。
- 前記装置は、異物が検出されると、評価用電子機器により電源が切られる、請求項7に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015209589.4 | 2015-05-26 | ||
DE102015209589.4A DE102015209589A1 (de) | 2015-05-26 | 2015-05-26 | Vorrichtung zur Förderung eines Produktstroms aus Polysiliciumbruch oder Polysiliciumgranulat |
PCT/EP2016/061470 WO2016188917A1 (de) | 2015-05-26 | 2016-05-20 | Vorrichtung zur förderung eines produktstroms aus polysiliciumbruch oder polysiliciumgranulat |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018515335A true JP2018515335A (ja) | 2018-06-14 |
JP6518348B2 JP6518348B2 (ja) | 2019-05-22 |
Family
ID=56092894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017561324A Active JP6518348B2 (ja) | 2015-05-26 | 2016-05-20 | チャンクポリシリコンまたは粒状ポリシリコンの製品流を搬送するための装置 |
Country Status (9)
Country | Link |
---|---|
US (1) | US10155629B2 (ja) |
EP (1) | EP3302831B1 (ja) |
JP (1) | JP6518348B2 (ja) |
KR (1) | KR102089679B1 (ja) |
CN (1) | CN107548324B (ja) |
DE (1) | DE102015209589A1 (ja) |
MY (1) | MY189340A (ja) |
TW (1) | TWI596052B (ja) |
WO (1) | WO2016188917A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015209589A1 (de) | 2015-05-26 | 2016-12-01 | Wacker Chemie Ag | Vorrichtung zur Förderung eines Produktstroms aus Polysiliciumbruch oder Polysiliciumgranulat |
CN111069095B (zh) * | 2019-12-31 | 2021-11-16 | 宁晋晶兴电子材料有限公司 | 一种硅料筛选装置及处理方法 |
DE102020112182A1 (de) | 2020-05-06 | 2021-11-11 | Aktien-Gesellschaft der Dillinger Hüttenwerke (Société Anonyme des Forges et Aciéries de Dilling) | Verfahren und Vorrichtung zur Bestimmung des Magnetitgehalts eines Sinterprodukts für den Hochofenprozess |
Citations (6)
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JPH06273535A (ja) * | 1993-01-21 | 1994-09-30 | Nikka Densoku Kk | 金属検出装置および金属除去装置 |
JPH10314680A (ja) * | 1997-05-09 | 1998-12-02 | Wacker Chemie Gmbh | 光電子式分類装置及び分類方法 |
JP2007275886A (ja) * | 2006-04-06 | 2007-10-25 | Wacker Chemie Ag | ポリシリコンを微粉砕しかつ選別するための方法および装置 |
JP2011032100A (ja) * | 2009-07-31 | 2011-02-17 | Wacker Chemie Ag | 顆粒状のシリコンを搬送するための方法 |
JP2011237287A (ja) * | 2010-05-11 | 2011-11-24 | Eminet Co Ltd | 金属検出装置 |
JP2014130075A (ja) * | 2012-12-28 | 2014-07-10 | Nippon Brake Kogyo Kk | 金属異物検知装置 |
Family Cites Families (21)
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GB654150A (en) * | 1947-05-15 | 1951-06-06 | Bolidens Gruv Ab | Improvements in and relating to methods and apparatus for ore separation |
US5654637A (en) * | 1995-05-19 | 1997-08-05 | Geonics Limited | Method for detecting buried high conductivity objects including scaling of voltages for eliminating noise of a particular depth |
JP3658523B2 (ja) * | 1999-08-31 | 2005-06-08 | アンリツ産機システム株式会社 | 金属検出機 |
US20030206008A1 (en) * | 2000-04-07 | 2003-11-06 | Le Cuong Duy | Eddy current measuring system for monitoring and controlling a physical vapor deposition(PVD) process |
CN1306267C (zh) * | 2001-09-21 | 2007-03-21 | 德克工程株式会社 | 金属异物检测方法及其装置 |
DE10204176A1 (de) * | 2002-02-01 | 2003-08-14 | Wacker Chemie Gmbh | Vorrichtung und Verfahren zur kontaminationsarmen automatischen Verpackung von Polysiliciumbruch |
ES2276103T3 (es) * | 2002-10-11 | 2007-06-16 | Force Technology | Un sistema y un metodo para clasificar objetos automaticamente. |
ITMI20042077A1 (it) * | 2004-10-29 | 2005-01-29 | Cottino Francesco | Dispositivo di trasporto per calzature |
AT504527B1 (de) | 2007-02-23 | 2008-06-15 | Evk Di Kerschhaggl Gmbh | Verfahren und vorrichtung zum unterscheiden von ein elektromagnetisches wechselfeld beeinflussenden objekten, insbesondere metallobjekten |
US7919964B2 (en) * | 2008-06-02 | 2011-04-05 | Geonics Limited | Combined electromagnetic sensor and magnetometer |
JP2010034133A (ja) * | 2008-07-25 | 2010-02-12 | Just:Kk | 多結晶シリコンウエハのクラック検出装置 |
DE102009058549A1 (de) * | 2009-12-17 | 2011-06-22 | ThyssenKrupp Fördertechnik GmbH, 45143 | Detektionseinrichtung für eine Bandfördereinrichtung und Verfahren zur Detektion von elektrischen leitfähigen Fremdkörpern im Fördergut einer Bandfördereinrichtung |
NL2006306C2 (en) * | 2011-02-28 | 2012-08-29 | Inashco R & D B V | Eddy current seperation apparatus, separation module, separation method and method for adjusting an eddy current separation apparatus. |
CN202057609U (zh) * | 2011-03-16 | 2011-11-30 | 常州市万阳光伏有限公司 | 一种多晶硅块检测装置 |
CN202052624U (zh) | 2011-03-22 | 2011-11-30 | 江西赛维Ldk太阳能高科技有限公司 | 一种硅料分选装置 |
CN102253047B (zh) * | 2011-04-27 | 2013-06-05 | 3i系统公司 | 太阳能硅片光致发光在线抽样检测系统及其检测方法 |
US8855809B2 (en) * | 2011-09-01 | 2014-10-07 | Spectramet, Llc | Material sorting technology |
JP5894833B2 (ja) * | 2012-03-30 | 2016-03-30 | 株式会社荏原製作所 | 渦電流センサ並びに研磨方法および装置 |
CN203021474U (zh) * | 2013-01-07 | 2013-06-26 | 上海沐杨实业有限公司 | 一种垃圾再生处理系统 |
DE102015209589A1 (de) | 2015-05-26 | 2016-12-01 | Wacker Chemie Ag | Vorrichtung zur Förderung eines Produktstroms aus Polysiliciumbruch oder Polysiliciumgranulat |
EP3260889B1 (en) * | 2016-06-22 | 2022-10-05 | Mettler-Toledo Safeline Limited | Metal detection apparatus |
-
2015
- 2015-05-26 DE DE102015209589.4A patent/DE102015209589A1/de not_active Withdrawn
-
2016
- 2016-05-19 TW TW105115430A patent/TWI596052B/zh active
- 2016-05-20 MY MYPI2017001613A patent/MY189340A/en unknown
- 2016-05-20 WO PCT/EP2016/061470 patent/WO2016188917A1/de active Application Filing
- 2016-05-20 JP JP2017561324A patent/JP6518348B2/ja active Active
- 2016-05-20 US US15/576,550 patent/US10155629B2/en active Active
- 2016-05-20 KR KR1020177035089A patent/KR102089679B1/ko active IP Right Grant
- 2016-05-20 CN CN201680029250.5A patent/CN107548324B/zh active Active
- 2016-05-20 EP EP16726054.6A patent/EP3302831B1/de active Active
Patent Citations (6)
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JPH06273535A (ja) * | 1993-01-21 | 1994-09-30 | Nikka Densoku Kk | 金属検出装置および金属除去装置 |
JPH10314680A (ja) * | 1997-05-09 | 1998-12-02 | Wacker Chemie Gmbh | 光電子式分類装置及び分類方法 |
JP2007275886A (ja) * | 2006-04-06 | 2007-10-25 | Wacker Chemie Ag | ポリシリコンを微粉砕しかつ選別するための方法および装置 |
JP2011032100A (ja) * | 2009-07-31 | 2011-02-17 | Wacker Chemie Ag | 顆粒状のシリコンを搬送するための方法 |
JP2011237287A (ja) * | 2010-05-11 | 2011-11-24 | Eminet Co Ltd | 金属検出装置 |
JP2014130075A (ja) * | 2012-12-28 | 2014-07-10 | Nippon Brake Kogyo Kk | 金属異物検知装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20180002823A (ko) | 2018-01-08 |
US10155629B2 (en) | 2018-12-18 |
WO2016188917A1 (de) | 2016-12-01 |
TW201641390A (zh) | 2016-12-01 |
TWI596052B (zh) | 2017-08-21 |
US20180148267A1 (en) | 2018-05-31 |
MY189340A (en) | 2022-02-04 |
EP3302831B1 (de) | 2018-12-05 |
DE102015209589A1 (de) | 2016-12-01 |
KR102089679B1 (ko) | 2020-03-17 |
WO2016188917A8 (de) | 2017-10-05 |
EP3302831A1 (de) | 2018-04-11 |
JP6518348B2 (ja) | 2019-05-22 |
CN107548324A (zh) | 2018-01-05 |
CN107548324B (zh) | 2019-08-23 |
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