JP2018512522A - Clean gas cabin - Google Patents

Abstract

The present invention is hermetically sealed to the surrounding environment and includes a plurality of side walls (30, 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10) relates to a clean gas cabin (10) having an internal space surrounded by it. Side walls (30, 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 of the clean gas cabin (10) One or more structural core plates, at least part of which comprises two covering plates (12.1, 12.2) and a structural core (12.3), in particular a honeycomb core, arranged between them (12), in particular formed from one or more honeycomb core plates, one corner (11, 11.1, 11.2, 11.3, 11.4, 11.4) of the clean gas cabin (10). 11.5, 11.6), one cover plate (12.1, 12.2) is bent and the other cover plate (12.1, 12.2) and the structural core (12. 3) is assumed to be separated. By forming the clean gas cabin (10) with the structural core plate (12), the clean gas cabin (10) is significantly reduced in weight.

Description

  The present invention relates to a clean gas cabin having an internal space that is sealed with respect to the surrounding environment and surrounded by a plurality of side walls.

  Many manufacturing processes and work steps in manufacturing and research and development cannot be performed under normal environmental conditions and require a separate atmosphere. Such a manufacturing process can be, for example, a coating process in semiconductor manufacturing, a sealing step in LCD or OLED manufacturing, or a high purity raw material manufacturing process in, for example, medical and pharmaceutical technology and welding applications, particularly titanium welding. These processes may require, for example, clean room conditions, low humidity, inert gas atmospheres, or a combination of different and different conditions.

  It is well known to carry out manufacturing processes or work steps as described above in a closed space in which an atmosphere can be generated depending on the requirements. This closed space has an air lock, and a required material can be introduced into the closed space via the air lock and a product can be taken out.

  Such a space is formed, for example, in a so-called glove box, as fully described in the literature (see “Reinraumtechnik” 3. aktualisierte u. Erw. Aufl., Springer, pages 202-207). Such glove boxes are mainly manufactured from special steel and provide a means for carrying out the desired work steps in the glove box via a glove port. In order to generate the required atmosphere, a corresponding gas supply or circulation conduit is provided, through which the gas is taken out from the glove box and guided through at least one gas preparation unit, and then again in the glove box To be supplied. Such a glove box is difficult to incorporate into a production line based on its configuration, particularly when the production unit is large. This is because the equipment to be enclosed can only be entered into the glove box via the airlock provided.

  Thus, hood-designed inert gas casings are known. The hood forms an enclosed space together with the bottom plate, and a desired atmosphere can be generated therein. The pre-assembled hood is installed on the bottom plate from above and sealed. The required ports, airlocks, chambers connected upstream, and other required units and components are preferably already attached to the hood and have been tested. Therefore, this inert gas casing can be quickly installed in a work or manufacturing planned space. The hood-designed mounting member provides a means to operate any facility or facility part in a closed space that can generate an atmosphere on demand. For this reason, the size of the hood is adapted to the equipment at the moment. The material used for forming the inert gas casing is set so as not to change the atmosphere therein due to, for example, contamination or outgassing. Furthermore, this casing is formed so that gas exchange is not performed between the interior space of the inert gas casing and the surrounding environment. Known are inert gas casings made of special steel or aluminum. The disadvantage of such inert gas casings is the heavy weight that arises based on the type of construction described and the materials used. On the other hand, when the weight is heavy, it is difficult to cover each equipment from above. This is because a lifting device must be provided that can apply a load accordingly. Furthermore, the inert gas casing additionally increases the bottom load in addition to the enclosed equipment. This means that if the load capacity of the bottom of the building where the clean gas cabin is to be installed is not sufficient, costly large scale remedial measures are required to improve the static equilibrium of the bottom.

  Therefore, an object of the present invention is to provide a facility or an internal space that is sealed with respect to the surrounding environment, can generate an atmosphere according to a request for operating the facility or the facility part, and has a low weight. The object is to provide a clean gas cabin for accommodating equipment parts.

  One or more structural core plates, in particular at least one part of the side wall of the clean gas cabin, each comprising two covering plates and a structural core, in particular a honeycomb core, arranged between them, is provided. This is solved by being formed from one or more honeycomb core plates. In the frame of the present invention, the structural core plate is formed in a sandwich shape, has two or more cover plates, and has a plate shape in which the structural core is disposed between the cover plates. Means a constituent member. In this case, the structural core may be any structure, particularly a lightweight structure. The lightweight structure may be formed of, for example, a honeycomb core, a corrugated or meandering material, or a foam material.

  The clean gas cabin according to the present invention is a casing capable of generating a required atmosphere inside. For this reason, the casing is formed airtight with respect to the surrounding environment. Within the casing, manufacturing processes and work steps that require a separate atmosphere can be carried out. For this purpose, a corresponding production unit such as a robot or laboratory equipment is arranged in the clean gas cabin. The cleanliness, moisture content, or composition may apply to the requirements for the atmosphere. That is, for example, a specific process can be performed only under an inert gas atmosphere. Other parameters such as temperature or box pressure may also be adjustable. Therefore, corresponding gas preparation units are arranged corresponding to the clean gas cabin. In other words, the clean gas cabin may be a cabin having a polygonal bottom surface and an internal space that is sealed with respect to the surrounding environment and surrounded by the side wall, and includes at least one circulation conduit. Gas is removed from the clean gas cabin via a conduit, guided through at least one gas preparation unit, and then supplied again to the clean gas cabin. The box may be equipped with a laminar flow system.

  Sidewalls made of structural core plates have a significantly lower weight compared to solidly constructed side walls with comparable mechanical loads. Based on the construction of a structural core plate having two covering plates spaced apart and connected to each other via a structural core, a very high load bearing capacity of the side walls is obtained. Since the structural core plate has a high bending stiffness, the side walls formed from the structural core plate bend at all or slightly elastically when a load is applied. The structural core plate is airtight in the direction of the surface normal of the structural core plate, based on the covering plates arranged on both sides, corresponding to the transmission characteristics of the used covering plate. In particular, an aluminum honeycomb core plate in which a covering plate and a structural core are formed of aluminum is suitable for manufacturing an airtight side wall of a clean gas cabin. The structural core prevents gas from flowing laterally within the structural core plate with respect to its surface normal. This guarantees that there is no risk of gas flowing into or out of the clean gas cabin, for example through the edges or through openings formed in each cover plate. Is done.

  The structural core plate as a whole is based on its configuration and cannot be bent easily. This is because in this case the outer cover plate is stretched and the inner cover plate must be compressed. This leads to a corresponding distortion.

  Therefore, in one variation of the present invention, one cover plate is bent along one corner of the clean gas cabin, and the other cover plate and the structural core are separated from each other, or It may be assumed that the cover plate is processed and molded in the structural core toward the other cover plate, and the structural core plate is bent in the processing and forming region.

  One of the cover plates is bent along one corner of the clean gas cabin, and the other cover plate and the structural core are separated, so that the corner of the corner is still formed by the structural core plate. Can be formed. Preferably, the cover plate, which will later be located on the outer corner side of the corner, is separated with the structural core until it reaches the opposite cover plate. The inner cover plate is then bent to the desired angle at the corner of the clean gas cabin along the gap formed in the outer cover plate and the structural core. At this time, the gap is widened.

  Alternatively, it is envisaged that the cover plate that is later located at the inner corner of the corner corner and the underlying structural core are separated along the rear corner until the opposite cover plate is reached. It may be. In this case, the gap is formed so as to spread in a wedge shape toward the separated cover plate, starting from the cover plate that is not separated. In this case, the required opening angle of the gap is defined in advance based on the angle of the corner to be formed. The unseparated cover plate is then bent along the gap to form the outer corner. At this time, the gap is reduced again.

  Advantageously, based on the respective non-separated cover plates, the structural core plates are also airtight in the areas where the corners are formed. In this case, the structural core prevents gas from starting from the gap and spreading into the structural core plate.

  If one cover plate is machined into the structural core towards the other cover plate and it is assumed that the structural core plate is bent in the work forming area, it is particularly easy to avoid airtight corners. Corners can be formed.

  In one preferred configuration of the invention, a gap formed in the separated cover plate and the structural core along one corner of the clean gas cabin is covered by a corner cover, and The corner-corner cover is intimately bonded to the structural core plate on one side of the gap, respectively, with two legs arranged at an angle to each other, and is particularly closely bonded It may be assumed. Corner corner cover enhances the stability of the side wall in the corner corner region, determines the angle of the corner corner, and this angle is not separated, for example, when a load is applied to the side wall Is prevented from changing by turning. In addition, the corner cover provides an additional seal of the sidewall along the corner.

  Protecting the edge of the side wall from mechanical damage can be achieved by placing a molded rail on the edge of the structural core plate at the upper and lower ends of the side wall, especially overlaid and intimately coupled with the structural core plate, especially This can be achieved by being closely bonded. The shaped rails allow a tight connection of the side walls to the bottom and lid of the clean gas cabin.

  In order to be able to easily and reliably fix another component to the structural core plate, at least one screw receiving part is arranged on the structural core plate, the screw receiving part being arranged on the structural core plate. Guided through one of the two cover plates and at least a part of the structural core arranged between each cover plate, and / or the screw receiving portion is guided through both cover plates and the structural core It may be assumed that at least one side is sealed when the fixing member is inserted. If only one of the two covering plates is penetrated by the screw receiving part, the component core plate remains airtight in the region of the screw receiving part. For example, when the mechanical load applied to the screw fastening portion increases, it is necessary for the screw receiving portion to penetrate both the covering plates, and gas flows from the outside into the clean gas cabin through the screw receiving portion. And outflow from the clean gas cabin to the surrounding environment can be prevented through the seal.

  In the airtight connection between two adjacent structural core plates, the two adjacent structural core plates are connected by at least one connection rail, and the connection rail has a contact portion, and the contact portion is This can be achieved by being tightly coupled with one of the covering plates of the adjacent structural core plates, in particular by being closely bonded. That is, the contact portion of the coupling rail forms an airtight bridge between two adjacent structural core plates. Advantageously, the coupling of the structural core plates takes place in a linear region on the side wall of the clean gas cabin. Such a joint can be more easily sealed than a joint at the corner of the clean gas cabin. As an alternative or in addition to bonding, a sealing member may be provided between each structural core plate and the abutting portion of the applied coupling rail.

  The design configuration is an extrusion molded member in which the coupling rail includes a hollow molded portion and an abutting portion integrally formed with the hollow molded portion, and adjacent structural core plates are disposed along both sides of the hollow molded portion. It can be further simplified by being disposed and being separated by the hollow molding part. The hollow molded part achieves high rigidity and stability of the connecting rail. This provides additional reinforcement of the side walls that are coupled to the coupling rail. The hollow molded part also causes the precise positioning of the structural core plate applied to the hollow molded part. Coupling rails can be manufactured easily and inexpensively in a single extrusion process. In order to achieve a light construction of the clean gas cabin, the connecting rail is preferably made from aluminum.

  The assembly of the clean gas cabin is such that at least one of the adjacent structural core plates is integrally formed with the abutting part and the hollow molding part on the side opposite to the abutting part at the edge thereof. By being inserted and held in a region between the rails, it can be simplified. The corresponding rail and the abutting portion located on the opposite side form a U-shaped receiving portion together with the hollow molded portion, and the edge of the structural core plate can be inserted and held in this receiving portion. It can be done. That is, the corresponding rail provides an additional seal as well as increased stability in the transition region of the structural core plate to the coupling rail.

  In order to be able to seal the interior space of the clean gas cabin also downward, the side wall is indirectly or directly coupled to the bottom of the clean gas cabin, the bottom being a structural core plate, In particular, it may be assumed that it is formed from one or more bottom plates formed as a honeycomb core plate. In this case, the side wall is hermetically coupled to the bottom. By forming the bottom using the structural core plate, a significant weight reduction of the clean gas cabin is achieved compared to a solid bottom structure.

  The tight coupling of the clean gas cabin side wall with the bottom is easy to assemble, the side wall being placed on the bottom with a mounted rail, in particular overlaid, and fixed to the bottom by means of a holding bracket. This can be achieved by providing a sealing member between the forming rail and the bottom and / or bonding the forming rail to the bottom.

  The strong yet airtight joint between the adjacent bottom plates is integrally formed or bonded to the edges of the adjacent bottom plates that are butted against each other, and the bottom rails that engage with each other inside and outside are integrally formed. This can be achieved by being tightly coupled to each other.

  In another preferred configuration of the invention, the clean gas cabin is closed upwards by a lid formed from at least one lid plate, which lid plate is from a structural core plate, in particular a honeycomb core plate. It may be assumed that it is formed. Again, the structural core plate offers the advantages already described: low weight, high mechanical load capacity with slight deflection, and gas tightness.

  The tight coupling of the side walls of the clean gas cabin with the lid is a simple, indirect or direct connection with the at least one lid plate, with the side walls being mounted, in particular with a fitted rail. And / or a sealing member is provided between the formed rail and the cover plate, and / or the formed rail is bonded to the cover plate.

  Hereinafter, the present invention will be described in more detail based on the illustrated embodiments.

It is a perspective view which shows the external appearance of a clean gas cabin. It is a perspective view which shows the inner side of the clean gas cabin shown in FIG. FIG. 3 is an exploded view of the clean gas cabin shown in FIGS. 1 and 2. It is sectional drawing which looked at the corner part of the clean gas cabin from the top. It is a perspective view which shows the external appearance of the part which has the corner | angular corner part of the clean gas cabin shown in FIG. It is a perspective view which shows the inner side of the part which has the corner | angular corner part of the clean gas cabin shown in FIG. It is the external appearance perspective view and exploded view of the part which has the corner | angular corner part of the clean gas cabin shown in FIG. It is an external appearance perspective view of the area | region of the two coupling rails of the part which has the corner | angular corner part of the clean gas cabin shown in FIG. FIG. 9 is a cross-sectional view of two side walls with end rails butted against each other, comprising the coupling rail shown in FIG. 8. FIG. 4 is an external view of a portion including a coupling rail arranged vertically shown in FIG. 3. FIG. 4 is an external view of a portion shown in FIG. 3 that includes a vertically arranged coupling rail and an upper terminal end of a first vertical side wall. FIG. 4 is an external view of a portion shown in FIG. 3, including a vertically arranged coupling rail and a lower end portion of a first vertical side wall. FIG. 4 shows the inside of the part shown in FIG. 3 with the vertically arranged coupling rails and the lower end portions of the fifth and sixth side walls. It is an exploded view of the part of the area | region of two adjacent bottom boards shown in FIG. It is a perspective view of the support body of a clean gas cabin. It is sectional drawing which looked at the support body shown in FIG. 15 in the direction of the longitudinal direction extension part of this support body. It is a figure which shows the part of the area | region of the lid | cover of a clean gas cabin shown in FIG. It is a figure which shows the part of the fixed area | region of the support structure of a clean gas cabin shown in FIG.

  FIG. 1 is a perspective view showing the appearance of the clean gas cabin 10. In order to make the following configuration easier to convey, the front side 10.1 and the back side 10.2 of the clean gas cabin 10 are arbitrarily defined.

  The clean gas cabin 10 has a polygonal outline. In the illustrated embodiment, the contour is hexagonal. Correspondingly, a plurality of side walls 30 are installed on the hexagonal bottom 20. In this case, each side wall 30 is oriented along a positioning member 21 attached to the outside of the bottom portion 20. At the selected front-side 10.1 viewpoint, a first vertical side wall 30.1 is provided on the left side, and the first, second and third horizontal side walls 30. 8, 30.9, 30.10 are provided. Other vertical sidewalls 30.2, 30.3, 30.4, 30.5, 30.6, 30.7 are shown in FIG. The first vertical side wall 30.1 has a first corner corner 11.1 of the clean gas cabin 10. Three horizontal side walls 30.8, 30.9, 30.10 are stretched around the second and third corners 11.2, 11.3. A cutout portion 31 is provided in the central region of the second horizontal side wall 30.9, and an intermediate door 35 is inserted into the cutout portion 31.

  The transitions between each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 are coupled respectively. Rails 60 are provided, and these coupling rails 60 are connected to the respective side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, by coupling brackets 61. 30.8, 30.9, 30.10.

  The upper side of the clean gas cabin 10 is closed by a lid 40. The lid 40 also has a hexagonal basic structure. The surface of the lid 40 is formed from four lid plates 43. These lid plates 43 are held by a fixing member 44 and an edge fixing member 45. An edge enclosure 42 is provided so as to surround the lid plate 43, and a fence 41 is attached to the edge enclosure 42.

  Two circulation conduits 50.1 and 50.2 are attached to the side of the clean gas cabin 10 in the form of rectangular passages. Circulation conduits 50.1 and 50.2 are connected to clean gas cabins through supply sections 51.1 and 51.2 and extraction locations 52.1 and 52.2 as shown in FIGS. 10 internal spaces are connected. For this purpose, corresponding openings are provided in the first and third horizontal side walls 30.8, 30.10 and in the second vertical side wall 30.2 shown in FIG.

  The clean gas cabin 10 forms a casing sealed with respect to the surrounding environment. Manufacturing equipment, laboratory equipment, or the like can be arranged in the clean gas cabin 10. Further, a predetermined atmosphere can be adjusted in the clean gas cabin 10. For this reason, a specific gas or gas mixture having a predetermined composition may exist in the internal space of the clean gas cabin 10. The gas or gas mixture may be an inert gas. Furthermore, the humidity of the gas or gas mixture can be adjusted. As an additional requirement, a clean room class required for the clean gas cabin 10 may be set in advance. Multiple requirements may apply individually or in combination. In addition, other atmospheric parameters such as temperature and pressure can be adjusted. It is understood that the clean gas corresponding to the present invention has an atmosphere corresponding to the required requirements.

  Depending on the required atmosphere, the clean gas cabin 10 is equipped with a corresponding unit for supplying or generating this atmosphere. In the present embodiment, the clean gas cabin 10 has two circulation conduits 50.1 and 50.2. Through these circulation conduits 50.1 and 50.2, gas is taken out from the clean gas cabin 10 at the take-out locations 52.1 and 52.2, and again clean through the supply sections 51.1 and 51.2. It is supplied to the gas cabin 10. At this time, the gas is supplied to the gas preparation unit 55 shown in FIG. The gas preparation unit 55 is connected to the internal space of the clean gas cabin 10. After the gas prepared in the gas preparation unit 55 flows through the gas preparation unit 55, the circulation conduits 50.1 and 50.2 and the supply unit 51.1 are taken out via the extraction points 52.1 and 52.2. , 51.2 and the interior space of the clean gas cabin 10. The gas preparation includes generating an atmosphere required for the internal space of the clean gas cabin 10.

  In this way, the clean gas cabin 10 enables the implementation of manufacturing processes or work steps that require a special atmosphere. Such a manufacturing step may be, for example, a high purity material coating process, sealing process, or treatment or manufacture in the pharmaceutical field. The required materials and substances are supplied via an air lock provided, for example, via an intermediate door 35 in this embodiment. In this case, the intermediate door 35 may form a connection portion for a chamber connected to the clean gas cabin 10.

  In accordance with the present invention, each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 is shown in FIG. As will be described in more detail, the structural core plate 12 is formed. Each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 is a honeycomb core plate or an aluminum honeycomb core It may be formed as a plate. The structural core plate has a multilayer structure. As shown in FIG. 4, at least two covering plates 12.1, 12.2 arranged at intervals are joined to the structural core 12.3 in a plane. The covering plates 12.1, 12.2 and the structural core 12.3 are manufactured from aluminum in this embodiment. The structural core 12.3 is formed as a honeycomb core. In this way, a plate having a low weight as well as a high bending stiffness is formed. That is, the clean gas cabin 10 has a significantly lower weight than the clean gas cabin 10 manufactured using a solid aluminum wall or a special steel wall. Thereby, the bottom load generated based on the weight of the transferred equipment part and the clean gas cabin 10 is greatly reduced. Therefore, the clean gas cabin 10 can be used even in a building having a small bottom load capacity. Furthermore, the relatively low weight facilitates the installation of the clean gas cabin 10 at the point of use. This is because no lifting device is required for this purpose, or a lifting device with a small load capacity is required.

  In order to further reduce the weight of the clean gas cabin 10, the cover plate 43 is also formed from the structural core plate 12, in this embodiment from an aluminum honeycomb core plate.

  FIG. 2 is a perspective view showing the inside of the clean gas cabin 10 shown in FIG. In this case, the inside of the clean gas cabin 10 is viewed from the back side 10.2 of the clean gas cabin 10.

  On the bottom 20 of the clean gas cabin 10, the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30. A gas supply passage 53 is attached along the line 10. The gas supply passage 53 has a bottom 20 and side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. Is bound to. The first supply portion 51.1 of the circulation conduit 50.1 and the second supply portion 52.2 of the circulation conduit 50.2 shown in FIG. 3 communicate with the gas supply passage 53. The gas supply passage 53 is connected to the internal space of the clean gas cabin 10 through a perforated cover grid 54 disposed on the side and upper portion of the gas supply passage 53.

  Coupling rails 60 are disposed between the illustrated horizontal side walls 30.8, 30.9, 30.10, and these coupling rails 60 are integrally formed toward the interior space of the clean gas cabin 10, respectively. It has a hollow molded part 60.2. Each side wall 30.8, 30.9, 30.10 is applied to the hollow molded part 60.2. The structure of the coupling rail 60 of the illustrated embodiment is shown in an enlarged sectional view in FIG.

  The upper region of the internal space of the clean gas cabin 10 is partitioned by the support structure 70. A ceiling 13 formed at least partially as a perforated ceiling is attached to the support structure 70 downward. On the support structure 70 is supported a filter 56 (and possibly a temperature regulator in the form of a water / air heat exchanger) 56 of the gas preparation unit 55. A lower structure 46 is disposed on the filter (heat exchanger), and the lid 40 of the clean gas cabin 10 is supported on the lower structure 46. The support structure 70 and the lower structure 46 are provided on the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, It is formed by a plurality of supports 80 fixed to 30.10.

  Manufacturing equipment or laboratory equipment can be installed at the bottom 20 of the clean gas cabin 10. The production facility or laboratory facility may be, for example, a robot that performs one or more work steps in the atmosphere of the generated clean gas cabin 10.

  The gas is taken out from the internal space of the clean gas cabin 10 via the take-out locations 52.1 and 52.2, and is supplied again to the internal space via the supply units 51.1 and 51.2. For this purpose, the gas is sucked through the filter 56 into the intermediate chamber between the ceiling 13 and the lid 40 and then supplied to the circulation conduits 50.1, 50.2. The ceiling 13 is formed by being perforated on the lower side of the filter 56. Alternatively, the ceiling 13 may be cut out below the filter 56. As a result, gas flows through the internal space of the clean gas cabin 10 from the top to the bottom. For this purpose, corresponding fans (not shown) are provided in the circulation conduits 50.1, 50.2.

  FIG. 3 is an exploded view of the clean gas cabin 10 shown in FIGS. 1 and 2.

  The fourth corner 11.4 of the clean gas cabin 10 is arranged in the seventh vertical side wall 30.7. The fifth corner 11.5 extends into the fifth vertical sidewall 30.5, while the sixth corner 11.6 extends to the third vertical sidewall 30. .3. The butt edges between the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 are respectively Rather than extending along the corners 11.1, 11.2, 11.3, 11.4, 11.5, 11.6 of the clean gas cabin 10, the outer wall of the clean gas cabin 10 It is arrange | positioned along the part extended linearly. Thereby, the transition part between each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 is good. Can be sealed.

  A support structure 70 is attached to each of the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. A mounting rail 71 is attached.

  The bottom portion 20 is formed from adjacent bottom plates 22.1, 22.2, 22.3. In the present embodiment, three bottom plates 22.1, 22.2, 22.3 are provided. In order to reduce the weight of the clean gas cabin 10, the bottom plates 22.1, 22.2, 22.3 are formed from the structural core plate 12, in this embodiment from an aluminum honeycomb core plate.

  Each part V, VI, VII, VIII, X, XI, XII, XIII, XIV, XVII, XVIII is shown in FIG. 5, FIG. 7, FIG. 7, FIG. 8, FIG. 14, FIG. 17 and FIG. 18 are enlarged.

  With respect to manufacturing, various components of the clean gas cabin 10 are manufactured in advance. In this case, bottom plates 22.1, 22.2, 22.3, side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30 .9, 30.10 and lid plate 43 are each cut from structural core plate 12. The cut-out portion 31 for the intermediate door 35 and the required cut-out portions such as the extraction locations 52.1 and 52.2 and the supply portions 51.1 and 51.2 of the circulation conduits 50.1 and 50.2 are provided on each side wall. 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. Each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. 4, bent along the rear corners 11.1, 11.2, 11.3, 11.4, 11.5, 11.6 of the clean gas cabin 10, as will be described in more detail with respect to FIG. . The support 80 is cut off, and the support structure 70 and the lower structure 46 are assembled. The lid plate 43 is coupled to the lower structure 46 via the fixing member 44.

  In order to assemble the clean gas cabin 10, the bottom plates 22.1, 22.2, and 22.3 are joined to form the bottom portion 20, and the positioning member 21 is attached. Manufacturing or laboratory equipment is located at the bottom 20. Next, each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. In addition to being coupled to each other by 60, the bottom plates 22.1, 22.2, and 22.3 are hermetically coupled. In this case, each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10 is positioned on one side. It is in contact with the member 21. A mounting rail 71 is attached to each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. And the support structure 70 is inserted. Each unit of the gas preparation unit 55 is attached. Next, the lid 40 is fitted and fitted to each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. Combined airtight. An access member such as the intermediate door 35 is attached. Finally, another component group such as the circulation conduits 50.1 and 50.2, the gas supply passage 53, the edge enclosure 42 and the fence 41 is attached. The advantage provided by this procedure is that individual components are installed in the field without having to transport the entire pre-fabricated hood. Therefore, a lift device is not necessary, and transportation to the installation location of each component is easy, so that it is inexpensive.

  In one alternative procedure, first each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30 .10, the support structure 70, and the lower structure 46 including the lid 40, the hood of the clean gas cabin 10 is pre-assembled. Depending on the circumstances at that time, further components and groups of the hood may be pre-assembled.

  Regarding the installation of the clean gas cabin 10, the bottom 20 is formed, the positioning member 21 is attached, and the manufacturing facility or the laboratory facility is installed thereon. Next, a pre-assembled hood is installed on the bottom 20 from above. In this case, advantageously, the hood can already be inspected in advance for its function and sealing properties. Furthermore, this arrangement can be assembled quickly in the field and thus without, for example, long interruptions in continuous production.

  FIG. 4 shows a cross-sectional view of the corner 11 of the clean gas cabin 10 as viewed from above. In this case, the corner 11 is a proxy for the corners 11.1, 11.2, 11.3, 11.4, 11.5, 11.6 already described. The structural core plate 12 is formed of two facing cover plates 12.1, 12.2 and a structural core 12.3 arranged at intervals. The structural core 12.3 connects the two covering plates 12.1, 12.2. The structural core plate 12 forms the corners 11. For this reason, the outer second covering plate 12.2 and the structural core 12.3 are separated along the corner 11 by the present invention. The inner first cover plate 12.1 is bent along the edge 11. In this case, the inner first cover plate 12.1 has an inner angle formed along the edge 11 on the side of the inner first cover plate 12.1 opposite to the structural core 12.3. Is bent. By bending the structural core plate 12, an open gap 32 is formed along the separation line of the first covering plate 12.1 and the structural core 12.3. The gap 32 is covered with a corner corner cover 33. The corner cover 33 is formed by two legs 33.1 and 33.2 facing each other at a predetermined angle. In this case, the above angle corresponds to a required angle of the edge 11 of the clean gas cabin 10. The legs 33.1, 33.2 are each connected to one side of the gap 32 and in particular bonded to the second covering plate 12.2 outside the structural core plate 12.

  The structural core plate 12 has high stability and bending rigidity based on its configuration, and also has a small weight. Therefore, it is possible to form the clean gas cabin 10 having an extremely small weight as compared with a conventional wall material such as solid aluminum or special steel. Based on both covering plates 12.1, 12.2, the structural core plate is airtight. There is no risk of gas flowing between the covering plates 12.1, 12.2 in the structural core 12.3 in a direction transverse to the surface normal of the structural core plate 12. This is because the structural core elements are tightly coupled to each other in the above-mentioned direction and are also tightly coupled to the covering plates 12.1, 12.2. In this embodiment, the structural core plate 12 is provided with a honeycomb core as the structural core 12.3. The honeycomb core can be formed in an airtight manner in a direction transverse to the surface normal of the structural core plate 12 while leading to high bending rigidity of the structural core plate 12.

  In order to form the edge 11, only the outer second covering plate 12.2 and the structural core 12.3 are separated, the inner first covering plate 12.1 is not separated according to the invention, The structural core plate 12 remains airtight in the region of the edge 11 because it is merely bent. This means that the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. It is a basic prerequisite for use. Since the structural core plate 12 is airtight in the transverse direction with respect to the surface normal, gas flows in through the gap 32 and is spaced from the corner corner 11 in the lateral direction with respect to the structural core plate 12. There is no risk of flowing into the possible opening of the arranged first covering plate 12.1 and thus into the clean gas cabin 10.

  The angle of the edge 11 is set in advance and stabilized by the corner cover 33. In addition, the corner cover 33 seals the area of the gap 32. The corner corner cover 33 further prevents the inner first cover plate 12.1 from being accidentally damaged through the gap 32 from the outside. Preferably, the corner cover 33 is a rail, in particular made of aluminum, bent along its longitudinal extension.

  In this embodiment, the structural element plate 12 is formed as an aluminum honeycomb core plate. In this case, the covering plates 12.1, 12.2 and the structural core 12.3 are manufactured from aluminum. The structural core 12.3 has a honeycomb structure. As a result, the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30. 10 is obtained. Aluminum is preferably inert to the atmosphere required mostly in the clean gas cabin 10.

  FIG. 5 is a perspective view showing the appearance of a portion V including the second corner portion 11.2 of the clean gas cabin 10 shown in FIG. A corner cover 33 is bonded to the second cover plate 12.2 outside the structural core plate 12 along the second corner 11.2. Two molded rails 62 are fitted over the upper edge of the first horizontal side wall 30.8. In this case, the first horizontal side wall 30.8 is inserted into the receiving area 62.2 of each adjacent shaped rail 62. On the side of the forming rail 62 opposite to the opening of the receiving area 62.2, two support strips 62.1 are integrally formed on both sides of the receiving area 62.2. In the region of the second edge 11.2, the shaped rails 62 cut so as to form a seam are butted against each other.

  The formed rail 62 has side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9 formed as the structural core plate 12. , 30.10 exposed edges are coated against the top. In the state in which the clean gas cabin 10 is assembled, the support strip 62.1 forms a contact surface for the lid 40 to be placed. In this case, the contact surface can be tightly coupled to the lid 40, for example by gluing or tightening. A plurality of seals may be disposed along the contact surface for sealing. Preferably, the molded rail 62 and the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. The contact area between is also sealed. For this purpose, a sealing member may be provided in the receiving area 62.2 or each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30. 7, 30.8, 30.9, 30.10 are bonded to the forming rail 62 in the area of the receiving area 62.2.

  FIG. 6 shows a perspective view of the portion VI of the clean gas cabin 10 having the fifth corner 11.5 shown in FIG. 3 as viewed from the inside. That is, this portion VI corresponds to the drawing shown in FIG. 5, but the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7. , 30.8, 30.9, 30.10 The corners 11.1, 11.2, 11.3, 11.4, 11.5, 11.6 in the region of the upper terminal end were viewed. By the way.

  The fifth vertical side wall 30.5 is formed as a structural core plate 12. The first cover plate 12.1 inside the structural core plate 12 is bent along the fifth corner portion 11.5, thereby forming an inner corner. The inner first cover plate 12.1 in the region of the fifth corner corner 11.5 is not divided, and the region of the fifth corner corner 11.5 is kept airtight.

  FIG. 7 shows an external perspective view and an exploded view of the portion VII having the second corner portion 11.2 of the clean gas cabin 10 shown in FIG.

  The shaped rail 62 is cut to form a seam according to the angle of the second corner 11.2 and has a receiving area 62.2 that opens downwardly. In the region 62.2 it is fitted over the upper edge of the illustrated part VII of the horizontal first side wall 30.8.

  The edge cover 33 is cut as an aluminum molded member in accordance with the height of the corner area to be covered. A gap 32 formed on the basis of the separation of the outer second covering plate 12.2 and the structural core 12.3 when the eighth side wall 30.8 is bent has a second corner 11.2. Is exposed along.

  A plurality of coupling rails 60 are provided between the first and second horizontal side walls 30.8 and 30.9 arranged to overlap each other. These coupling rails 60 are attached to the first and second horizontal side walls 30.8, 30.9 by a plurality of coupling brackets 61 and a plurality of suitable fixing members, in particular screws.

  FIG. 8 is a perspective view showing the appearance of the portion VIII in the region of the second coupling rail 60 having the second corner portion 11.2 of the clean gas cabin 10 shown in FIG.

  The coupling rail 60 is arranged between the first and second horizontal side walls 30.8, 30.9. In this case, the connecting rail 60 is applied to the first and second horizontal side walls 30.8, 30.9 with a large area by the contact portion 60.1. The coupling rail 60 is attached to the first and second horizontal side walls 30.8, 30.9 by a coupling bracket 61. The coupling bracket 61 has a plurality of holes 61.1. Through these holes 61.1, a fixing member, in particular a screw, can be guided, and by using these fixing members, each coupling bracket 61 is connected to each side wall 30.1, 30.2, 30. 3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10, in the illustrated part VIII, the first and second horizontal side walls 30.8, It can be fixed at 30.9.

  Between the abutting portion 60.1 and the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. The area between is preferably sealed. For this purpose, the abutting portion 60.1 and the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30 .10 may be provided with a sealing member, or the abutting portion 60.1 may be provided on each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, It may be bonded to 30.7, 30.8, 30.9, 30.10. As a result, the coupling rail 60 has adjacent side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. Allowing an airtight bond between.

  At the second edge 11.2, the connecting rail 60 is cut to form a seam.

  FIG. 9 shows two side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6 which are provided with the coupling rail 60 shown in FIG. , 30.7, 30.8, 30.9, 30.10. Are shown in cross section. Shown is the butt area between the first and second horizontal side walls 30.8, 30.9.

  The coupling rail 60 is formed of a hollow molded part 60.2 and a contact part 60.1 formed integrally with the hollow molded part 60.2. On the opposite side of the second horizontal side wall 30.9 from the abutting portion 60.1, a corresponding rail 60.3 is integrally formed with the hollow molded part 60.2. The corresponding rail 60.3 is spaced apart from the abutting part 60.1 according to the thickness of the second horizontal side wall 30.9. As a result, a region surrounded by a U-shape is formed between the contact portion 60.1, the corresponding rail 60.3, and the hollow molded portion 60.2, and the second horizontal direction is formed in this region. A side wall 30.9 is inserted. The first and second horizontal side walls 30.8, 30.9 are in contact with the hollow molded part 60.2 on the end side. That is, the hollow molded portion 60.2 defines the interval between the first and second horizontal side walls 30.8, 30.9. The coupling rail 60 is applied to the first and second horizontal side walls 30.8, 30.9 from the outside by its abutting portion 60.1. The coupling bracket 61 is stretched in the lateral direction with respect to the longitudinally extending portion of the contact portion 61. Next to the contact portion 60.1, holes 61.1 are formed in the coupling bracket 61, respectively. A screw receiving portion 34 is formed on each of the first and second horizontal side walls 30.8 and 30.9 so as to coincide with these holes 61.1. The coupling bracket 61 is coupled to the first and second horizontal side walls 30.8, 30.9 by screws (not shown) guided into the screw receptacle 34 through the holes 61.1 of the coupling bracket 61. Is done. Thereby, the coupling rail 60 is held. At the same time, the coupling bracket 61 prevents the first and second horizontal side walls 30.8, 30.9 from separating from each other. Advantageously, the region between the coupling rail 60 and the first and second horizontal side walls 30.8, 30.9 is sealed, for example by a sealing member or adhesive. It is conceivable that the side wall 30.9 is sealed and glued to the U-shaped receptacle. It is further conceivable that the second side wall 30.9 may be supported on the abutting part 60.1 with a seal extending in the longitudinal direction of the molding part interposed. In this case, it is recommended to place the seal in the edge region of the abutting part 60.1 on the side opposite to the hollow molding part 60.2. When the seal is compressed, it can be displaced laterally over the abutment 60.1. In this case, the protruding region can be used for sealing purposes as well. This makes it possible, for example, to form a seal closure for components that continue perpendicular to or at an angle to the coupling rail.

  The screw receiver 34 passes completely through the first and second horizontal side walls 30.8, 30.9. Here, in order to avoid gas inflow into the clean gas cabin 10, a seal member is provided for sealing a screw receiving portion 34 to which a screw is attached later. In one alternative embodiment, the screw receptacle 34 may only be guided up to the first cover plate 12.1 inside the structural core plate 12. As a result, the inner first cover plate 12.1 remains closed, so that there is no risk of gas entering through the screw receiver 34 or out of the clean gas cabin 10. The structural core 12.3 prevents gas from starting from the screw receptacle 34 and spreading laterally relative to the first and second horizontal side walls 30.8, 30.9.

  The corresponding rail 60.3 simplifies the assembly of the clean gas cabin 10. Based on the corresponding rail 60.3, the coupling rail 60 is first connected to the respective side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30. Can be fitted over one of 8,30.9, 30.10. As a result, the coupling rail 60 is held. Next, the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. It can be coupled to the coupling rail 60.

  FIG. 10 shows an external view of the portion X shown in FIG. 3 having the coupling rails 60 arranged in the vertical direction.

  A vertically arranged coupling rail 60 couples the illustrated first vertical side wall 30.1 to the three horizontal side walls 30.8, 30.9, 30.10. Shown in FIG. ing. That is, the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8 arranged in the horizontal direction and the vertical direction by the coupling rail 60 are used. , 30.9, 30.10 can be hermetically coupled to each other.

  FIG. 11 shows an external view of the portion XI shown in FIG. 3 comprising the coupling rails 60 arranged in the vertical direction and the upper terminal end of the first vertical side wall 30.1.

  The first vertical side wall 30.1 is covered with a molded rail 62 fitted to the lid 40 of the clean gas cabin 10. A guide member 63 is inserted in the open end of the hollow molded part 60.2 of the connecting rail 60 with a connecting pipe piece 63.2. A leg 63.1 is integrally formed on the connecting pipe piece 63.2. The leg 63.1 has the same cross section as the support strip 62.1 of the adjacent molded rail. That is, the leg 63.1 and the support strip 62.1 form one continuous surface. This surface is directed to the lid 40. As a result, the guide member 63 and the molded rail 62 are connected to the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9. , 30.10 are adjacent to each other along the upper edge of each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30. 7, 30.8, 30.9, 30.10 and the lid 40 can be tightly coupled.

  FIG. 12 shows an external view of the part XII shown in FIG. 3 with the coupling rails 60 arranged in the vertical direction and the lower end of the first vertical side wall 30.1. .

  As shown in FIG. 11 with respect to the upper end of the first vertical side wall 30.1, the lower end is also joined by a shaped rail 62 and a connecting tube piece 63.2 on the extension of the shaped rail 62. A guide member 63 inserted in the hollow chamber forming portion 60.2 of the rail 60 is disposed. Again, the leg 63.1 of the guide member 63 and the support strip 62.1 of the adjacent shaped rail 62 form one continuous surface. This surface is directed to the bottom 20 of the clean gas cabin. As a result, the guide member 63 and the molded rail 62 are connected to the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, Each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7 along the lower edge of each side wall in the region where 30.10 are adjacent to each other. , 30.8, 30.9, 30.10 and the bottom 20 can be tightly coupled.

  FIG. 13 shows the portion XIII shown in FIG. 3 comprising the coupling rails 60 arranged in the vertical direction and the lower end portions of the fifth and sixth vertical side walls 30.5, 30.6. A view from the inside is shown.

  The fifth and sixth vertical side walls 30.5, 30.6 are inserted at their lower edges into the receiving area 62.2 of the correspondingly arranged shaped rail 62. A coupling rail 60 is disposed between the fifth and sixth vertical side walls 30.5, 30.6. The fifth vertical side wall 30.5 includes a corresponding rail 60.3, an abutting portion 60.1 (shown in FIG. 12) disposed opposite to the corresponding rail 60.3, and a hollow molded portion 60. 2 is inserted into a U-shaped region formed by 2. On the side opposite the corresponding rail 60.3, the mounting chevron 64 is abutted against the hollow molded part 60.2. Preferably, the mounting chevron 64 is coupled to the hollow molding 60.2. The mounting chevron 64 is coupled to the sixth vertical side wall 30.6. The fifth and sixth vertical side walls 30.5, 30.6 are airtightly coupled to each other by a coupling rail 60.

  The guide member 63 is at least partially inserted into the hollow molded part 60.2 of the coupling rail 60 by means of the connecting pipe piece 63.2. For this purpose, the outer contour of the connecting tube piece 63.2 is matched to the contour of the hollow chamber of the hollow molded part 60.2 into which the connecting tube piece 63.2 is inserted. The connecting pipe piece 63.2 is provided with a stopper for limiting the distance at which the connecting pipe piece 63.2 can be inserted into the hollow molded part 60.2.

  The support strip 62.1 of the forming rail 62 and the leg 63.1 of the guide member 63 form one continuous surface facing the bottom 20 of the clean gas cabin 10, and the support strip 62.1 and The leg 63.1 is in contact with the bottom 20 with the above-mentioned surface. The forming rail 62 and thus the fifth and sixth vertical side walls 30.5, 30.6 are fixed to the bottom 20 by means of a holding bracket 65 which tightens a part of the support strip 62.1 of the forming rail 62. , Coupled to the bottom 20.

  FIG. 14 is an exploded view of the portion XIV in the region of the two adjacent bottom plates 22.1, 22.2 shown in FIG. The bottom rails 23.1 and 23.2 which are engaged with each other inside and outside are attached to the abutted edges of the bottom plates 22.1 and 22.2. The bottom rails 23.1, 23.2 have receptacles for coupling members that can couple these bottom rails 23.1, 23.2.

  In this embodiment, the bottom rails 23.1, 23.2 are formed as separate components and are attached to the bottom plates 22.1, 22.2 on the end face side and are particularly bonded. According to one alternative embodiment, the bottom rails 23.1, 23.2 may be integrally formed on the bottom plates 22.1, 22.2.

  Positioning members 21 are provided at the edges of the bottom plates 22.1, 22.2. A holding bracket 65 is disposed so as to face the positioning member 21. When the positioning member 21 and the holding bracket 65 are combined, the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9 , 30.10 are positioned and fixed to the bottom 20 by the formed rail 62.

  FIG. 15 is a perspective view of the support 80 of the clean gas cabin 10. The support 80 is formed as a double T-shaped support having a first strip 81, a web 82, and a second strip 83. The support 80 has a plurality of mounting holes 84 along the web 82. An inclined surface 81.1 is attached to the end side of the first strip 81.

  In the present invention, the support 80 is formed from the structural core plate 12. For this reason, the first and second strips 81 and 83 and the web 82 are produced from the structural core plate 12 cut accordingly. In this embodiment, the strips 81 and 83 and the web 82 are both formed from an aluminum honeycomb core plate.

  By manufacturing the support 80 from the structural core plate 12, it is possible to save a great deal of weight compared to the conventional support 80 having a solid construction type. Based on the high bending rigidity of the structural core plate 12 used and the configuration in the form of a double T-shaped support, a support 80 capable of applying a high load that can be bent only slightly even when a load is applied is obtained.

  In one alternative embodiment (not shown), the support 80 manufactured from the structural core plate 12 may be a single T-shaped support or other known for U-shaped or L-shaped profiles or supports 80. It may be formed as a support 80 having the following contour.

  FIG. 16 is a cross-sectional view of the support 80 shown in FIG. 15 when viewed in the direction of the longitudinal extension of the support 80.

  The first strip 81 and the second strip 83 are coupled to the web 82 by a coupling chevron 85. The connecting chevron 85 extends over the length of the support 80 and is abutted against the web 82 at one support surface, and the strips 81 and 83 at the second support surface. It has been applied to. In this case, two opposing connecting chevron members 85 arranged on the web 82 are arranged in correspondence with each of the strips 81 and 83. The connecting chevron 85 is firmly connected to the web 82 and the strips 81 and 83. In particular, the connecting chevron 85 is bonded to the web 82 and / or the strips 81 and 83.

  Even in the case where a support 80 having a support shape different from the double T shape is provided, the connecting chevron 85 has a protrusion between the joined structural core plates 12 as shown for the double T shape support. Arranged along the mating area. In this case, the connecting chevron member 85 may be provided as an inner angle or an outer angle.

  In the illustrated embodiment, the attachment hole 84 is formed in the first strip 81 along the web 82.

  The band members 81 and 83 can be easily and quickly coupled to the web 82 by the coupling angle member 85. In this case, the large-area bonding between the connecting chevron 85 and the strips 81 and 83 and the web 82 provides a firm connection that can be loaded. The connecting chevron members 85 attached to both sides of the web 82 can reliably avoid the inclination of the strips 81 and 83 with respect to the web 82 when a load is applied to one side of the support 80.

  A fixing member, particularly a screw can be fixed in the mounting hole 84. Thereby, another structural member of the clean gas cabin 10, in this embodiment, the lid plate 43 can be coupled to the support 80. The mounting hole 84 starts from the first cover plate 12.1 of the structural core plate 12 used as the first strip 81 and penetrates only the structural core 12.3 to the second cover plate 12.2. It leads to. The second cover plate 12.2 is not penetrated. Thereby, in the support body 80 in which the fixing member inserted from the outside of the clean gas cabin 10 is brought into the mounting hole 84 in the first strip 81, the gas flows into the clean gas cabin 10 through the mounting hole 84. There is no risk of spilling out or out of the clean gas cabin 10.

  Corresponding to one embodiment (not shown), if the mounting hole 84 is guided through both cover plates 12.1, 12.2 based on a simpler manufacture, the web 82 Its arrangement form along prevents gas exchange between the internal space and the external space of the clean gas cabin 10. On both sides of the web 82, the transition from the web 82 to the first strip 81 is sealed by a connecting chevron 85 bonded to each side of the first strip 81 over the longitudinal extension of the support 80. Has been. Therefore, there is no possibility that the gas flows into or out of the internal space of the clean gas cabin 10 along the contact surface between the first strip 81 and the web 82 from the mounting hole 84.

  FIG. 17 shows a portion XVII of the region of the lid 40 of the clean gas cabin 10 shown in FIG.

  Each lid plate 43 formed from the structural core plate 12 is surrounded by a frame 43.1. The frame 43.1 has a U-shaped cross section, is fitted over the edge of the lid plate 43 and is particularly bonded. This provides a tight bond between the frame 43.1 and each lid plate 43. The lid plate 43 is manufactured from the structural core plate 12, particularly an aluminum honeycomb core plate.

  The cover plate 43 is placed on the first strip 81 of the support 80 shown in FIGS. 15 and 16 by the frame 43.1. In this case, the inclined surface 81.1 attached to the first strip 81 is directed to the outer edge of the lid 40.

  The support body 80 is a part of the lower structure 46 of the lid 40 shown in FIG. The lid plate 43 is fixed to the support body 80 by a fixing member 44. The fixing member 44 has two tightening portions 44.1 spaced laterally. A fixed portion 44.2 bent in a U-shape is integrally formed between the tightening portions 44.1, and the fixed portion 44.2 is formed on the first web 81 of the support 80. A plurality of holes (not shown) are formed so as to correspond to the mounting holes 84. Through these holes, the fixing member 44 is screwed to the support 80 with corresponding screws. In this case, the tightening portion 44.1 is engaged so as to surround the frame 43.1 of the adjacent lid plate 43, and the lid plate 43 is firmly fastened to the support 80. Adjacent lid plates 43 are separated from each other by a fixing portion 44.2 and are thus fixed in position.

  As shown in FIG. 1, a plurality of edge fixing members 45 are arranged on the outer edge of the lid 40. The edge fixing member 45 is bent in an S shape and has a tightening leg portion 45.1 and a fixing leg portion 45.2. The fixed leg 45.2 has a plurality of holes. The tightening leg portion 45.1 is engaged so as to surround the frame 43.1 outside the lid plate 43. The fixed leg 45.2 has a side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. It is fixed to the upper forming rail 62 (not shown in this drawing). In other words, the frame 43.1 of the lid plate 43 is fastened between the tightening leg 45.1 and the support strip 62.1 of each molded rail 62. This ensures that the lid is on each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10. It will be held. Preferably, the support area of the frame 43.1 in the support 80 and the forming rail 62 is sealed.

  FIG. 18 shows a portion XVIII of the fixing region of the support structure 70 of the clean gas cabin 10 shown in FIG. The support structure 70 is used to support the gas preparation unit 55 shown in FIG. 2 and the filter 56 provided therein.

  Shown is a fixed portion of the support structure 70 in the region of the fifth corner 11.5 of the clean gas cabin 10. The U-shaped mounting rail 71 shown in FIG. 3 is already attached to the fifth vertical side wall 30.5. A support receiver 72 is attached to the attachment rail 71. The support receiver 72 forms a half shell, and the support 80 of the support structure 70 is inserted into the half shell. Since the upper leg portion of the mounting rail 71 is notched in the region of the support receiver 72, the support 80 can be inserted into the support receiver 72. The cutout is covered with a cover 73. This ensures that the support 80 is fixed to the fifth vertical side wall 30.5.

  At the position of the outer end portion of the support body 80 of the support structure 70 shown in FIG. 3, the side walls 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7 are provided. , 30.8, 30.9, 30.10. A support receiver 72 is attached. That is, when the clean gas cabin 10 is assembled, the pre-assembled support structure 70 can be inserted into the interior space of the clean gas cabin from above and lowered to the support receiver 72. Preferably, the support 80 of the support structure 70 is connected to a support receiver 72 and is in particular screwed.

  Unlike the embodiment of the support 80 shown in FIGS. 15 and 16, the mounting hole 84 of the support 80 of the support structure 70 is formed as a through hole on the side of the web 82 of the support 80. Thereby, the fixing screw of the filter 56 can be guided through the mounting hole 84 and can be screwed using the nut from the lower side. Since the support structure 70 is disposed in the internal space of the clean gas cabin 10, no additional sealing means is required in this case.

  The clean gas cabin 10 manufactured mainly from the structural core plate 12 shown in FIGS. 1 to 18 has an extremely low weight compared to a known clean gas cabin. Thereby, the clean gas cabin 10 can be transported and installed more easily. The demand for bottom load at the installation location can also be reduced. Based on the illustrated configuration, the internal space of the clean gas cabin 10 is sealed with respect to the surrounding environment. Therefore, the required atmosphere can be generated and maintained in the internal space of the clean gas cabin 10. In this way, important processes and work steps can be carried out in an appropriate atmosphere. A clean gas cabin 10 formed in accordance with the illustrated concept can be easily adapted in size to its current requirements. Therefore, each bottom plate 22.1, 22.2, 22.3, each side wall 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30 provided. .8, 30.9, 30.10 and the size and number of the lid plate 43 and the required support structure 70 can be set accordingly. The contour of the clean gas cabin 10 can be adapted from the hexagon shown to any other polygon.

Claims (16)

A plurality of side walls (30, 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, In a clean gas cabin (10) having an internal space surrounded by 30.10)
The side wall (30, 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30 of the clean gas cabin (10). .10) one or more structures, at least part of which comprises each two covering plates (12.1, 12.2) and a structural core (12.3), in particular a honeycomb core, arranged between them A clean gas cabin (10), characterized in that it is formed from a core plate (12), in particular one or more honeycomb core plates.   One said cover board (12) along one corner (11, 11.1, 11.2, 11.3, 11.4, 11.5, 11.6) of the said clean gas cabin (10) .1, 12.2) are bent and the other cover plate (12.1, 12.2) and the structural core (12.3) are separated, or one of the cover plates (12.1, 12.2) are processed and molded in the structural core (12.3) toward the other cover plate (12.1, 12.2), and the structure is formed in the processed region. The clean gas cabin (10) according to claim 1, wherein the core plate (12.3) is bent.   The coatings separated along one corner (11, 11.1, 11.2, 11.3, 11.4, 11.5, 11.6) of the clean gas cabin (10) The gap (32) formed in the plate (12.1, 12.2) and the structural core (12.3) is covered by a corner cover (33) and / or the corner The cover (33) is closely connected to the structural core plate (12) on one side of the gap (32) with two legs (33.1, 33.2) arranged at an angle to each other. 3. A clean gas cabin (10) according to claim 2, wherein the clean gas cabin (10) is connected to, in particular, tightly bonded.   In the upper and lower ends of the side wall (30, 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10) On the edge of the structural core plate (12), a molded rail (62) is placed, in particular fitted, and tightly bonded to the structural core plate (12), in particular closely bonded, The clean gas cabin (10) according to any one of claims 1 to 3.   At least one screw receiving portion (34) is disposed on the structural core plate (12), and the screw receiving portion (34) includes two covering plates (12.12) of the structural core plate (12). 1, 12.2) and at least part of the structural core (12.3) arranged between each of the covering plates (12.1, 12.2) And / or the screw receiving portion (34) is guided through both the covering plates (12.1, 12.2) and the structural core (12.3), and the fixing member is inserted. The clean gas cabin (10) according to any one of claims 1 to 4, wherein the clean gas cabin (10) is sealed on at least one side in a state.   Two adjacent structural core plates (12) are connected by at least one connecting rail (60), and the connecting rail (60) has a contact portion (60.1). The attaching portion (60.1) is closely coupled with one of the covering plates (12.1, 12.2) of the adjacent structural core plate (12), and is particularly closely bonded. A clean gas cabin (10) according to any one of the preceding claims.   It is an extrusion-molded member comprising the coupling rail (60), a hollow molded part (60.2), and the abutting part (60.1) integrally formed with the hollow molded part (60.2), and adjacent to each other. The clean of claim 6, wherein the structural core plate (12) is disposed along both sides of the hollow molded part (60.2) and is separated by the hollow molded part (60.2). Gas cabin (10).   At least one of the adjacent structural core plates (12) is hollow on the opposite side of the contact portion (60.1) and the corresponding attachment portion (60.1) at the edge thereof The clean gas cabin (10) according to claim 7, wherein the clean gas cabin (10) is inserted and held in a region between the rail (60.3) integrally formed with the molding portion (60.2).   The side wall (30, 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10) is the clean gas. One or more bottom plates, which are indirectly or directly connected to the bottom (20) of the cabin (10), said bottom (20) being formed as said structural core plate (12), in particular a honeycomb core plate. The clean gas cabin (10) according to any one of claims 1 to 8, wherein the clean gas cabin (10) is formed from (22, 22.1, 22.2, 22.3).   The side walls (30, 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10) are placed In particular, the molded rail (62) fitted and fitted is installed on the bottom (20) and fixed to the bottom (20) by a holding bracket (65). The clean gas cabin (10) according to claim 9, wherein a sealing member is provided between the bottom (20) and / or the molded rail (62) is bonded to the bottom (20).   The bottom rails (23.1, 23.2) that engage with each other on the inside and outside of the adjacent bottom plates (22, 22.1, 22.2, 22.3) are integrally formed with each other. Clean gas cabin (10) according to claim 9 or 10, wherein said bottom rails (23.1, 23.2) are tightly coupled to each other.   The clean gas cabin (10) is closed upward by a lid (40) formed from at least one lid plate (43), and the lid plate (43) is the structural core plate (12). A clean gas cabin (10) according to any one of claims 1 to 11, in particular formed from a honeycomb core plate.   The side walls (30, 30.1, 30.2, 30.3, 30.4, 30.5, 30.6, 30.7, 30.8, 30.9, 30.10) are placed In particular, the molded rail (62) that is fitted over is indirectly or directly coupled to the at least one lid plate (43) and / or the molded rail (62) and the lid. The clean gas cabin (10) according to claim 12, wherein a sealing member is provided between the plate (43) and / or the molded rail (62) is bonded to the lid plate (43). .   14. The clean gas cabin (10) according to claim 1, wherein the structural core plate (12) is bent radially in a corner corner region of the clean gas cabin (10).   15. The clean gas cabin (10) according to any one of the preceding claims, wherein the structural core plate (12) is at least partially surrounded by one or more shaped parts on its outer periphery.   The structural core plate (12) is sealed against the molded part with the covering plate (12.1, 12.2) facing the internal space of the clean gas cabin (10), and 16. The clean gas cabin (10) according to claim 15, wherein the edge region of the structural core plate (12) is covered at least at part of its outer periphery.

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