JP2018206892A - Substrate processing apparatus and substrate transport apparatus - Google Patents

Abstract

To make it possible to speed up the loading of a substrate B into a working range Ro.SOLUTION: A following substrate B is caused to wait in a state in which the following substrate B2 partially enters a working range Ro. Therefore, as the work on a target substrate B1 is completed and the target substrate B1 is unloaded from the operation range Ro, the entire following substrate B2 can be promptly carried in the operation range Ro. In this way, it is possible to speed up the loading of the substrate B into the working range Ro. As a result, it is also possible to efficiently produce the mounting substrate.SELECTED DRAWING: Figure 11

Description

  The present invention relates to a technique for carrying a substrate into a work range for performing work on the substrate.

  Patent Documents 1 and 2 describe a component mounting system in which a component is mounted on a substrate by each component mounter while a substrate is sequentially loaded into a plurality of component mounters arranged in series. As described in Patent Document 1, each component mounting machine includes a carry-in conveyor, a work conveyor, and a carry-out conveyor. The carry-in conveyor transfers a substrate received from the outside of the apparatus to the work conveyor, and the work conveyor works the substrate. Transport to position. Then, the mounting head performs component mounting on the substrate at the work position, and the substrate on which component mounting is completed is transferred from the work conveyor to the carry-out conveyor, and is carried out of the apparatus by the carry-out conveyor.

JP 2009-54619 A Japanese Patent No. 4386396

  In such a component mounting machine, it is important to quickly carry the board into the work position. Therefore, the component mounter disclosed in Patent Document 1 waits for the board to straddle the carry-out conveyor of its other component mounter and its own carry-in conveyor on the upstream side in the board transfer direction while the preceding board is located at the work position. Wait for the next board in the area. Then, as the preceding substrate is unloaded from the working position, the succeeding substrate is loaded from the substrate standby area to the working position. However, in order to increase the production efficiency of the mounting board, further speeding up of board loading has been demanded.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of realizing the rapid loading of a substrate into the work range.

  A substrate processing apparatus according to the present invention includes a work head for performing work on a substrate within a work range having a predetermined length in the substrate transport direction, and a first provided on the upstream side of the work range in the transport direction. It has a conveyor, a second conveyor provided for the working range, and a third conveyor provided on the downstream side in the conveying direction of the working range, and is conveyed by the first conveyor, the second conveyor, and the third conveyor. Nt pieces (Nt is 2 or more), which is provided within the working range side by side in the carrying direction and can be moved between a contact position in contact with the substrate and a separation position away from the substrate. An integer) fixing member, and a substrate fixing portion that fixes the substrate by positioning the fixing member facing the substrate among the Nt fixing members, and the preceding substrate is carried into the working range and fixed. Together with the preceding board A control unit that executes a specific support mode for supporting the subsequent substrate on the upstream side in the transport direction in a state of partially entering the work range by controlling the conveyor unit and the substrate fixing unit, The specific support mode is executed when the preceding substrate can be fixed by a fixing member on the downstream side of Nu fixing members (Nu is an integer of 1 or more and less than Nt) counted from the upstream side in the transport direction. In the transport direction, transport the preceding substrate to the downstream side of the Nu fixing members, fix the preceding substrate by the fixing member facing the preceding substrate, and transport the Nu fixing members in the separated position. In the direction, the downstream end of the subsequent substrate is moved between the upstream end of the Nu-th fixing member and the upstream end of the (Nu + 1) -th fixing member by the first conveyor and the second conveyor. To support the plate.

  A substrate transfer device according to the present invention includes a first conveyor provided upstream of a work range having a predetermined length in the substrate transfer direction, a second conveyor provided for the work range, A third conveyor provided downstream in the conveyance direction of the work range, and a conveyor unit that conveys the substrate in the conveyance direction by the first conveyor, the second conveyor, and the third conveyor, and the work range aligned in the conveyance direction. And Nt fixing members (Nt is an integer of 2 or more) that are movable between a contact position that contacts the substrate and a separation position that is spaced apart from the substrate, and of the Nt fixing members A substrate fixing part that fixes the substrate by positioning the fixing member facing the substrate at the contact position, and the preceding substrate is carried in and fixed in the working range, and the subsequent substrate upstream in the transport direction from the preceding substrate is set in the working range. Partial advance And a control unit that executes a specific support mode for supporting in a state of being controlled by controlling the conveyor unit and the substrate fixing unit. The control unit counts from the upstream side in the transport direction (Nu is 1 or more). The specific support mode is executed when the preceding substrate can be fixed by the fixing member on the downstream side of the fixing member (an integer less than Nt), and in the specific support mode, the preceding substrate is set downstream of the Nu fixing members in the transport direction. While the preceding substrate is fixed by the fixing member that is transported and opposed to the preceding substrate, and the Nu fixing members are positioned at the separated positions, the downstream end of the succeeding substrate is the upstream end of the Nuth fixing member in the transport direction. And the (Nu + 1) th fixing member, the subsequent substrate is supported by the first conveyor and the second conveyor.

  In the present invention (substrate processing apparatus, substrate transfer apparatus) configured as described above, the first conveyor provided upstream in the transfer direction from the work range, the second conveyor provided for the work range, and the work A board | substrate is conveyed in a conveyance direction with the 3rd conveyor provided in the downstream of the conveyance direction from the range. In the work range, Nt fixing members are provided side by side in the transport direction. Each fixing member is movable between a contact position that contacts the substrate and a separation position that is separated from the substrate, and among the Nt fixing members, the fixing member that faces the substrate is positioned at the contact position and contacts the substrate. By doing so, the substrate is fixed. Accordingly, the substrate carried into the work range can be firmly supported, and the work on the substrate by the work head can be performed reliably.

  In the present invention, the specific support mode is executed when the preceding substrate can be fixed by the fixing members on the downstream side of the Nu fixing members counted from the upstream side in the transport direction. In the specific support mode, the preceding substrate is transported downstream of the Nu fixing members in the transport direction, and the preceding substrate is fixed by the fixing member facing the preceding substrate. Thereby, the work on the preceding substrate by the work head can be performed reliably. Further, in the specific support mode, with the Nu fixing members positioned at the separation positions, the downstream end of the subsequent substrate in the transport direction is set to the upstream end of the Nuth fixing member and the upstream end of the (Nu + 1) th fixing member. The subsequent substrate is supported by the first conveyor and the second conveyor. That is, the subsequent substrate is supported in a state where it is partially entered into the work range. Therefore, as the work on the preceding substrate is completed and the preceding substrate is unloaded from the working range, the succeeding substrate can be quickly loaded into the working range. In this way, speeding up of substrate loading into the work range can be realized.

  In the specific support mode, the substrate is configured such that, in the transport direction, the downstream end of the preceding substrate is transported to the downstream side of the upstream end of the most downstream fixing member among the Nt fixing members, and the preceding substrate is fixed. A processing apparatus may be configured. By carrying in the preceding substrate to the range facing the most downstream fixing member in this way, the succeeding substrate is quickly carried out from the working range and the subsequent substrate is quickly carried into the working range. be able to.

  The substrate fixing unit may configure the substrate processing apparatus so that the preceding substrate is fixed by the fixing member in a state where the substrate is separated from the second conveyor by the fixing member. In such a configuration, the preceding substrate is separated from the second conveyor while being fixed by the fixing member. Therefore, even after the preceding substrate is fixed, the subsequent substrate can be transferred by the second conveyor, and the degree of freedom of the subsequent substrate transfer operation is improved. Therefore, in the specific support mode, the substrate processing apparatus may be configured so that the subsequent substrate is transferred by the second conveyor in a period after the substrate fixing unit fixes the preceding substrate by the fixing member. .

  The conveyor unit can change the width of each of the first conveyor, the second conveyor, and the third conveyor according to the width of the substrate in the width direction orthogonal to the transport direction, and the control unit can change the preceding substrate and the subsequent substrate. When the widths in the width direction are different, the substrate processing apparatus may be configured to prohibit the specific support mode. Thereby, it is possible to prevent the preceding substrate and the subsequent substrate having different widths from being simultaneously carried into the second conveyor.

  The detector further includes a detector for detecting the position of the substrate, and the control unit stops the downstream end of the subsequent substrate between the upstream end of the Nuth fixing member and the upstream end of the (Nu + 1) th fixing member. The substrate processing apparatus may be configured so that the detector executes the detection based on the result of detecting the position of the subsequent substrate. In such a configuration, the position where the subsequent substrate is stopped can be accurately controlled based on the detection result by the detector.

  Further, the substrate processing apparatus may be configured such that the working head is a mounting head for mounting components on the substrate fixed in the working range by the substrate fixing unit. With such a configuration, it is possible to quickly carry the board into the work range and efficiently produce the mounting board.

  According to the present invention, it is possible to speed up the loading of a substrate into the work range.

The partial top view which shows typically the component mounting machine which is an example of the substrate processing apparatus which concerns on this invention. The top view which shows typically an example of the board | substrate conveying apparatus which concerns on this invention. The front view which shows typically the partial structure of the board | substrate conveyance apparatus of FIG. The front view which shows typically the partial structure of the board | substrate conveyance apparatus of FIG. The side view which shows typically the partial structure of the board | substrate conveyance apparatus of FIG. The side view which shows typically the partial structure of the board | substrate conveyance apparatus of FIG. FIG. 3 is a block diagram showing an electrical configuration of the substrate transfer apparatus of FIG. 2. The flowchart which shows an example of the conveyance control of the target board | substrate which the board | substrate conveyance apparatus of FIG. 2 performs. 3 is a flowchart showing an example of subsequent substrate transfer control executed by the substrate transfer apparatus of FIG. 2. The figure which shows typically the 1st operation example performed according to the flowchart of FIG. 8 and FIG. The figure which shows typically the 2nd operation | movement performed according to the flowchart of FIG. 8 and FIG. The figure which shows typically the 3rd operation | movement performed according to the flowchart of FIG. 8 and FIG.

  FIG. 1 is a partial plan view schematically showing a component mounter which is an example of a substrate processing apparatus according to the present invention. In the figure and the following figures, XYZ orthogonal coordinates composed of a Z direction parallel to the vertical direction and an X direction and a Y direction parallel to the horizontal direction, respectively, are shown as appropriate. The component mounter 1 includes a substrate transport device 2 on the base 11 that loads and unloads the substrate B with respect to a work range Ro having a predetermined range in the X direction (substrate transport direction). Then, the component mounting machine 1 mounts the component C by the head unit 3 on the substrate B carried into the work range Ro from the upstream side in the X direction by the substrate transport device 2, and transports the substrate B after the component mounting is completed to the substrate. The device 2 carries out the work range Ro to the downstream side in the X direction.

  The component mounter 1 includes an XY drive mechanism 4 that individually drives the two head units 3 in the XY directions. The XY drive mechanism 4 includes a pair of X beams 41 and 41 that extend parallel to the X direction and support the head unit 3 so as to be movable in the X direction. A ball screw 42 extending in parallel with the X direction and an X motor 43 that rotationally drives the ball screw 42 are attached to each X beam 41. The X motor 43 is a servo motor in this example. The head unit 3 is attached to the nut of the ball screw 42. Furthermore, the XY drive mechanism 4 includes a pair of Y beams 44 and 44 that extend in parallel to the Y direction. One end of each X beam 41 is supported by one Y beam 44 so as to be movable in the Y direction, and the other end of each X beam 41 is supported by the other Y beam 44 so as to be movable in the Y direction. A Y motor 45 that drives the X beams 41 and 41 in the Y direction is attached to each Y beam 44. Each Y motor 45 is a linear motor in this example, and includes movers 451 and 451 attached to ends of the X beams 41 and 41 and a stator 452 extending in parallel with the Y direction. The X beam 41 is driven in the Y direction together with the mover 451 by the magnetic force acting between the mover 451 and the stator 452. According to the XY drive mechanism 4, the head unit 3 can be moved in the XY directions by the X motor 43 and the Y motor 45.

  The component supply unit 5 is disposed on each side of the substrate transport apparatus 2 in the Y direction. In the component supply unit 5, a plurality of tape feeders 51 (hereinafter simply referred to as “feeders 51”) arranged in the X direction are detachably mounted. Each feeder 51 intermittently feeds a tape containing small pieces of components C (chip components) such as integrated circuits, transistors, capacitors, etc. at predetermined intervals in the Y direction, so that the components C in the tape are supplied to the components. To supply.

  The head unit 3 has a plurality of mounting heads 31 arranged in parallel to the X direction. Each mounting head 31 has a long shape extending in the Z direction (vertical direction), and the component C can be sucked and held by a suction nozzle removably attached to the lower end thereof. Then, the head unit 3 moves above the feeder 51 and sucks and holds the component C supplied by the feeder 51 with a suction nozzle. Subsequently, the head unit 3 moves above the board B in the work range Ro and releases the suction of the part C, thereby mounting the part C on the board B.

  In addition, a component recognition camera 6 and a nozzle storage unit 7 are disposed between the component supply unit 5 and the board transfer device 2. The component recognition camera 6 images the component C sucked by the suction nozzle in the component supply unit 5 and provides image information for acquiring component information and positional deviation information. This component imaging is executed when the head unit 3 passes above the component recognition camera 6 while moving from the component supply unit 5 to the board B. By analyzing the image acquired in this way, it is possible to obtain the amount of displacement and the rotation angle of the sucked part C in the XY plane. It is also possible to confirm whether or not the part C is held by the suction nozzle from the image information.

  The nozzle storage unit 7 has a function of storing a plurality of different types of suction nozzles. When it is instructed to attach the suction nozzle corresponding to the component C, the mounting head 31 moves up and down in the vertical direction Z after the head unit 3 moves to above the nozzle storage unit 7 and replaces the suction nozzle.

  FIG. 2 is a plan view schematically showing an example of the substrate transfer apparatus according to the present invention. 3 and 4 are front views schematically showing a partial configuration of the substrate transfer apparatus of FIG. 5 and 6 are side views schematically showing a partial configuration of the substrate transfer apparatus of FIG. FIG. 7 is a block diagram showing an electrical configuration of the substrate transfer apparatus of FIG. Subsequently, the substrate transfer apparatus 2 will be described with reference to these drawings.

  The substrate transfer apparatus 2 includes a control unit 20 as shown in FIG. The control unit 20 includes a processor configured by, for example, a CPU (Central Processing Unit) or RAM (Random Access Memory), and a storage unit configured by, for example, an HDD (Hard Disk Drive). And the control part 20 takes charge of the function which controls each part of the board | substrate conveyance apparatus 2 collectively.

  This board | substrate conveyance apparatus 2 is provided with the conveyor part 24 which has the carrying-in conveyor 21, the work conveyor 22, and the carrying-out conveyor 23 arranged in series in the X direction, and the conveyance path parallel to a X direction by these conveyors 21, 22, and 23 The substrate B is transported along Px. The carry-in conveyor 21 is provided upstream of the work range Ro in the X direction, the work conveyor 22 is provided with respect to the work range Ro, and the carry-out conveyor 23 is provided downstream of the work range Ro in the X direction.

  The carry-in conveyor 21 includes a conveyor housing 211 and a belt conveyor 212 attached to the inside (conveying path Px side) of the conveyor housing 211. These conveyor housings 211 are provided for both ends in the Y direction of the substrate B transported along the transport path Px, and both ends in the Y direction of the substrate B are supported by the belt conveyor 212.

  The work conveyor 22 includes a conveyor housing 221 and a belt conveyor 222 attached to the inside (conveying path Px side) of the conveyor housing 221. These conveyor housings 221 are provided for both ends in the Y direction of the substrate B transported along the transport path Px, and both ends in the Y direction of the substrate B are supported by the belt conveyor 222.

  The carry-out conveyor 23 includes a conveyor housing 231 and a belt conveyor 232 attached to the inside (conveying path Px side) of the conveyor housing 231. These conveyor housings 231 are provided for both ends in the Y direction of the substrate B transported along the transport path Px, and both ends in the Y direction of the substrate B are supported by the belt conveyor 232.

  The conveyors 21 and 22 drive the belt conveyors 212 and 222 in the X direction in response to a command from the control unit 20, so that the substrate B loaded by the carry-in conveyor 21 from the upstream side in the X direction is the work conveyor 22. And the work conveyor 22 carries the substrate B into the work range Ro. In addition, the conveyors 22 and 23 drive the belt conveyors 222 and 232 in the X direction according to a command from the control unit 20, so that the work conveyor 22 carries out the board B on which the component mounting in the work range Ro has been completed. The material is transferred to the conveyor 23, and the carry-out conveyor 23 carries the substrate B to the downstream side in the X direction.

  Further, the substrate transfer device 2 includes a substrate fixing unit 26 for fixing the substrate B carried into the work range Ro. The substrate fixing portion 26 has four clamp mechanisms 27 arranged in series in the X direction in the working range Ro corresponding to both ends of the substrate B in the Y direction. When the four clamp mechanisms 27 are distinguished, they are expressed as clamp mechanisms 27a, 27b, 27c, and 27d as shown in FIGS. Since the four clamp mechanisms 27 have the same configuration, the configuration will be described as a representative of one clamp mechanism 27 here.

  The clamp mechanism 27 includes a clamp cylinder 271 and a substrate clamp 273 attached to the clamp cylinder 271. The cylinder body of the clamp cylinder 271 is accommodated in the conveyor housing 221, and the cylinder rod 271 a of the clamp cylinder 271 protrudes downward from the lower surface of the conveyor housing 221. The cylinder rod 271a can be driven in the Z direction by controlling the supply of air to the cylinder port 271b attached to the conveyor housing 221.

  The substrate clamp 273 is attached to the cylinder rod 271a. The board clamp 273 includes a flat plate-like action portion 273a extending vertically along the inner wall of the conveyor housing 221 (the wall on the conveyance path Px side), and an attachment portion 273b for attaching the lower end of the action portion 273a to the cylinder rod 271a. And have. The action part 273a of the substrate clamp 273 faces the substrate B supported by the belt conveyor 222 from below.

  When the cylinder rod 271a is lowered (extended), the substrate clamp 273 is positioned at the separation position Pa in FIGS. 3 and 5, and the upper end of the action portion 273a is separated from the lower surface of the substrate B. On the other hand, when the cylinder rod 271a is raised (shrinked), the substrate clamp 273 is positioned at the contact position Pc in FIGS. 4 and 6, and the upper end of the action portion 273a contacts the lower surface of the substrate B. To raise. Further, the clamp mechanism 27 is provided with a flange member 274 protruding from the upper end of the conveyor housing 221 to the inside in the Y direction (on the conveyance path Px side), and the action portion 273a of the substrate clamp 273 located at the contact position Pc is The substrate B is sandwiched between the flange member 274 and the substrate B is fixed. In addition, the flange member 274 is extended in common with respect to the four clamp mechanisms 27a-27d.

  The substrate fixing portion 26 includes four clamp mechanisms 27a to 27d provided on one side of the substrate B in the Y direction, and four clamp mechanisms 27a to 27d provided on the other side of the substrate B in the Y direction. Are in a one-to-one correspondence relationship. The two clamp mechanisms 27 and 27 (for example, the clamp mechanisms 27a and 27a) in a corresponding relationship are arranged at the same position in the X direction and face each other across the transport path Px from the Y direction. Then, the two clamping mechanisms 27 in a corresponding relationship synchronize the operation of positioning the substrate clamp 273 at the separation position Pa and the operation of positioning the substrate clamp 273 at the contact position Pc.

  The driving of the clamp mechanisms 27a to 27d is executed by controlling the valves V1 to V3 (FIG. 7) that control the supply of air to the respective clamp cylinders 271 by the control unit 20. That is, the valve V1 is connected to the cylinder port 271b of the clamp cylinder 271 of the clamp mechanism 27a, and the controller 20 drives the substrate clamp 273 of the clamp mechanism 27a by opening and closing the valve V1. A valve V2 is connected to the cylinder port 271b of the clamp cylinder 271 of the clamp mechanism 27b, and the control unit 20 drives the substrate clamp 273 of the clamp mechanism 27b by opening and closing the valve V2. A valve V3 is connected to the cylinder port 271b of the clamp cylinder 271 of each of the clamp mechanisms 27c and 27d, and the control unit 20 opens and closes the valve V3 to drive the substrate clamp 273 of each of the clamp mechanisms 27c and 27d. . Thus, the clamp mechanism 27a, the clamp mechanism 27b, and the clamp mechanisms 27c and 27d can be driven independently.

  Furthermore, the substrate transport apparatus 2 includes three substrate sensors Sb1, Sb2, and Sb3 that detect the substrate B. The substrate sensor Sb1 is provided for the carry-in conveyor 21 and is disposed between the two conveyor housings 211 in the Y direction. The substrate sensor Sb1 is an optical sensor, and detects the substrate B that has reached it. Therefore, the control part 20 can recognize the position of the board | substrate B which the carrying-in conveyor 21 conveys based on the detection result of board | substrate sensor Sb1. The board sensors Sb2 and Sb3 are provided for the work conveyor 22, the board sensor Sb2 is disposed between the two clamp mechanisms 27b and 27b in the Y direction, and the board sensor Sb3 is two clamp mechanisms in the Y direction. 27d and 27d. The substrate sensors Sb2 and Sb3 are optical sensors, and detect the substrate B that has reached the upper side of each. Therefore, the control part 20 can recognize the position of the board | substrate B which the work conveyor 22 conveys based on the detection result of board | substrate sensor Sb2, Sb3.

  As will be described later, the substrate sensor Sb1 is used to control the position where the substrate B is placed on standby. On the other hand, the board sensors Sb2 and Sb3 are used to control the position where the board B to be mounted with components is stopped within the work range Ro. That is, the control unit 20 stops the substrate B a predetermined time after the downstream end of the substrate B conveyed by the work conveyor 22 is detected by the substrate sensor Sb3. As a result, the substrate B stops in a state where the downstream end of the substrate B is positioned at the downstream end of the work range Ro. In addition, when the length of the substrate B sequentially loaded is less than half the length of the work range Ro in the X direction, one more substrate B is loaded into the work range Ro. That is, the control unit 20 stops the substrate B a predetermined time after the downstream end of the substrate B conveyed by the work conveyor 22 is detected by the substrate sensor Sb2. As a result, the substrate B stops in a state where the downstream end of the substrate B is located at the center of the work range Ro. Thus, the two substrates B can be carried into the working range Ro.

  The substrate transfer apparatus 2 includes a carry-in conveyor width adjustment mechanism 281, a work conveyor width adjustment mechanism 282, and a carry-out conveyor width adjustment mechanism 283. The carry-in conveyor width adjusting mechanism 281 adjusts the width of the two belt conveyors 212 in the Y direction according to the width of the substrate B by driving at least one of the two conveyor housings 211 of the carry-in conveyor 21 in the Y direction. To do. The work conveyor width adjusting mechanism 282 adjusts the width of the two belt conveyors 222 in the Y direction according to the width of the substrate B by driving at least one of the two conveyor housings 221 of the work conveyor 22 in the Y direction. To do. The carry-out conveyor width adjusting mechanism 283 adjusts the width of the two belt conveyors 232 in the Y direction according to the width of the substrate B by driving at least one of the two conveyor housings 231 of the carry-out conveyor 23 in the Y direction. To do.

  Then, the substrate transfer device 2 carries the plurality of substrates B in order into the work range Ro. Specifically, the target board B1 that is the target of component mounting by the head unit 3 is carried into the work range Ro. Further, the position of waiting for the subsequent board B2 (that is, the subsequent board B2 upstream in the X direction from the target board B1) to be mounted by the head unit 3 next to the target board B1 is the X direction of the target board B1. It is adjusted according to the length.

  FIG. 8 is a flowchart showing an example of target substrate transfer control executed by the substrate transfer apparatus of FIG. FIG. 9 is a flowchart showing an example of the subsequent substrate transfer control executed by the substrate transfer apparatus of FIG. FIG. 10 shows a first operation example executed according to the flowcharts of FIGS. The flowcharts of FIGS. 8 and 9 are executed under the control of the control unit 20.

  8, in step S101, the substrate clamps 273 of the four clamp mechanisms 27a to 27d are each positioned at the separation position Pa and retracted downward from the transport path Px of the substrate B. In step S102, the substrate transport apparatus 2 starts transporting the target substrate B1. In the X direction, the downstream end Bd of the target substrate B1 enters the downstream side of the upstream end 273u of the substrate clamp 273 of the most downstream clamp mechanism 27d among the four clamp mechanisms 27a to 27d, and the target substrate B1 When facing the entire substrate clamp 273 of the clamp mechanism 27d, the substrate transport apparatus 2 stops transporting the target substrate B1 (step S103). The conveyance stop of the target substrate B1 is controlled based on the detection result of the substrate sensor Sb3. Thus, as shown in the column “Step S103” in FIG. 10, the target substrate B1 stops in the X direction with the downstream end Bd of the target substrate B1 coinciding with the downstream end of the work range Ro.

  Subsequently, the control unit 20 determines whether the substrate length Lb of the target substrate B1 in the X direction is equal to or less than the length L2 of the substrate B that can be fixed by the two clamp mechanisms 27c and 27d from the downstream side. Judgment is made (step S104). In the first operation example shown in FIG. 10, the substrate length Lb is larger than the length L2 (“NO” in step S104). Therefore, the control unit 20 proceeds to step S105, and the length of the substrate B that can be fixed by the three clamp mechanisms 27b, 27c, and 27d when the substrate length Lb of the target substrate B1 is counted from the downstream side in the X direction. It is determined whether it is L3 or less. In the first operation example of FIG. 10, the substrate length Lb is longer than the length L3 (“NO” in step S105). In this case, the control unit 20 moves all the substrate clamps 273 of the four clamp mechanisms 27a to 27d from the separation position Pa to the contact position Pc (step S106). As a result, as shown in the column “Step S <b> 106” in FIG. 10, the target substrate B <b> 1 is fixed by the four substrate clamps 273.

  When the loading of the target substrate B1 into the work range Ro is completed in this way, the standby substrate conveyance in FIG. 9 is started. In step S201, it is determined whether the subsequent substrate B2 can be carried into the work range Ro. Specifically, when the substrate clamp 273 of the most upstream clamp mechanism 27a in the X direction is not used for fixing the target substrate B1, it is determined that loading is possible (YES), while the substrate clamp of the clamp mechanism 27a is determined. If 273 is used for fixing the target substrate B1, it is determined that loading is not possible (NO). In the first operation example of FIG. 10, it is determined that loading cannot be performed, and steps S202 and S203 are executed. That is, the carry-in conveyor 21 starts transporting the subsequent substrate B2 in the X direction (step S202), and stops transporting the subsequent substrate B2 before the subsequent substrate B2 reaches the work range Ro (step S203). Specifically, the stop position of the subsequent substrate B2 is controlled by stopping the transport of the subsequent substrate B2 as the above-described substrate sensor Sb1 detects the subsequent substrate B2. As a result, as shown in the column of “Step S203” in FIG. 10, the subsequent substrate B2 is supported by the carry-in conveyor 21 and waits on the upstream side in the X direction of the work range Ro.

  8 and 9 will be used together with FIG. 11 to continue the description. Here, FIG. 11 is a diagram schematically showing the second operation executed in accordance with the flowcharts of FIGS. In the second operation example, the substrate length Lb of the target substrate B1 is shorter than that in the first operation example. Also in the second operation example, steps S101 to S103 are executed as in the first operation example, and the target substrate B1 stops in a state where the downstream end Bd thereof coincides with the downstream end of the work range Ro in the X direction. However, as shown in the column of “Step S103” in FIG. 11, the target substrate B1 faces the substrate clamps 273 of the three clamp mechanisms 27b, 27c, and 27d in the X direction from the downstream side, It does not face the substrate clamp 273 of the most upstream clamp mechanism 27a.

  In step S104, the control unit 20 determines whether the substrate length Lb of the target substrate B1 is equal to or less than the length L2 of the substrate B that can be fixed by the two clamping mechanisms 27c and 27d in the X direction. Judging. In the second operation example shown in FIG. 11, the substrate length Lb is larger than the length L2 (“NO” in step S104). Therefore, the control unit 20 proceeds to step S105, and the length of the substrate B that can be fixed by the three clamp mechanisms 27b, 27c, and 27d when the substrate length Lb of the target substrate B1 is counted from the downstream side in the X direction. It is determined whether it is L3 or less. In the second operation example of FIG. 11, the substrate length Lb is equal to or shorter than the length L3 (“YES” in step S105). In this case, the control unit 20 moves the substrate clamps 273 of the three clamp mechanisms 27b to 27d from the separation position Pa to the contact position Pc (step S107). As a result, the target substrate B1 is fixed by the three substrate clamps 273 as shown in the column of “Step S107” in FIG.

  When the loading of the target substrate B1 into the work range Ro is completed in this way, the standby substrate conveyance in FIG. 9 is started. In step S201, it is determined whether the subsequent substrate B2 can be carried into the work range Ro. In this example, since the substrate clamp 273 of the most upstream clamp mechanism 27a in the X direction is not used for fixing the target substrate B1, it is determined that loading is possible (YES), and the process proceeds to step S204. In step S204, the substrate transport apparatus 2 starts transporting the subsequent substrate B2 in the X direction. Then, after the substrate sensor Sb1 detects the subsequent substrate B2 (“YES” in step S205), the substrate transport apparatus 2 further transports the subsequent substrate B2 by a predetermined distance (step S206). That is, the carry-in conveyor 21 delivers the subsequent substrate B2 to the work conveyor 22, and the work conveyor 22 further conveys the subsequent substrate B2 in the X direction. In this way, the substrate transfer apparatus 2 further advances the subsequent substrate B2 that has entered the work range Ro in the X direction, and then stops the subsequent substrate B2 (step S207). As a result, as shown in the column of “Step S207” in FIG. 11, the substrate transport apparatus 2 sets the downstream end Bd of the subsequent substrate B2 in the X direction to the upstream ends 273u and 2 of the substrate clamp 273 of the first clamp mechanism 27a. The subsequent substrate B2 is supported by the carry-in conveyor 21 and the work conveyor 22 while entering between the upstream end 273u of the substrate clamp 273 of the second clamp mechanism 27b.

  Incidentally, in the first operation example and the second operation example described above, the case where “NO” is determined in step S104 is shown. However, if the substrate length Lb of the target substrate B1 is equal to or shorter than the length L2, “YES” is determined in step S104, and the control unit 20 moves the substrate clamps 273 of the two clamp mechanisms 27c and 27d. The contact position Pc is moved from the separation position Pa (step S108). Thus, the target substrate B1 is fixed by the two substrate clamps 273. Subsequently, steps S201 and S204 to S207 are executed as in the second operation example, and the subsequent substrate B2 is supported by the carry-in conveyor 21 and the work conveyor 22.

  As described above, in this embodiment, the carry-in conveyor 21 provided on the upstream side in the X direction from the work range Ro, the work conveyor 22 provided for the work range Ro, and the downstream side in the X direction from the work range Ro. The substrate B is conveyed in the X direction by the carry-out conveyor 23 provided in the X direction. In the work range Ro, four substrate clamps 273 are provided side by side in the X direction. Each substrate clamp 273 is movable between a contact position Pc that contacts the substrate B and a separation position Pa that is separated from the substrate B, and the substrate clamp 273 facing the substrate B out of the four substrate clamps 273 is in contact. The substrate B is fixed by contacting the substrate B at the position Pc. Accordingly, the board B carried into the work range Ro can be firmly supported, and the work (component mounting) on the board B by the mounting head 31 can be reliably performed.

  Further, in the present embodiment, the three substrate clamps 273 downstream from the first substrate clamp 273 (that is, the most upstream substrate clamp 273 among the four substrate clamps 273) in the X direction from the upstream side. When the target substrate B1 can be fixed, the mode (specific support mode) configured by steps S107, S108, and S204 to S207 is executed. In this specific support mode, the target substrate B1 is transported to the substrate clamp 273 downstream from the first substrate clamp 273 (substrate clamp 273 of the clamp mechanism 27a) in the X direction, and the target substrate 273 is opposed to the target substrate B1. The substrate B1 is fixed (steps S107 and S108). Specifically, when executing Step S107, three substrate clamps 273 (substrate clamps 273 of the clamp mechanisms 27b to 27d) facing the target substrate B1 fix the target substrate B1, and execute Step S108. In this case, two substrate clamps 273 (substrate clamps 273 of the clamp mechanisms 27c and 27d) facing the target substrate B1 fix the target substrate B1. Thereby, the work (component mounting) on the target board B1 by the mounting head 31 can be reliably performed. Further, in the specific support mode, with the first substrate clamp 273 positioned at the separation position Pa, the downstream end of the subsequent substrate B2 in the X direction is connected to the upstream end 273u of the first substrate clamp 273 and the second substrate clamp. The subsequent substrate B2 is supported by the carry-in conveyor 21 and the work conveyor 22 while entering between the upstream end 273u of the H.273 (steps S204 to S207). That is, the subsequent substrate B2 is put on standby in a state where the subsequent substrate B2 is partially entered into the work range Ro. Therefore, as the work on the target substrate B1 is completed and the target substrate B1 is unloaded from the work range Ro, the entire subsequent substrate B2 can be quickly loaded into the work range Ro. In this way, it is possible to speed up the loading of the substrate B into the work range Ro. As a result, it is possible to efficiently produce a board B on which components are mounted.

  For example, in the second operation example of FIG. 11, when component mounting on the target board B <b> 1 is completed, the board clamps 273 of the clamp mechanisms 27 b to 27 d are moved to the separation position Pa, and the target board B <b> 1 is moved to the belt conveyor 222 of the work conveyor 22. Placed on. Subsequently, the work conveyor 22 delivers the target board B1 to the carry-out conveyor 23, the carry-out conveyor 23 carries out the target board B1, and the work board 22 receives the entire subsequent board B2 received from the carry-in conveyor 21 as described above. In the same manner as the loading of the target substrate B1, it is loaded into the work range Ro. Thus, in the X direction, the subsequent substrate B2 stops in a state where the downstream end thereof coincides with the downstream end of the working range Ro. At this time, since a part of the subsequent substrate B2 has already entered the work range Ro before the transfer of the subsequent substrate B2 is started, the transfer distance of the subsequent substrate B2 required to carry the subsequent substrate B2 into the work range Ro is suppressed. Then, the subsequent substrate B2 can be quickly carried into the work range Ro.

  In the specific support mode, in the X direction, the downstream end Bd of the target substrate B1 is transported to the downstream side of the upstream end 273u of the most downstream substrate clamp 273 among the four substrate clamps 273, and the target substrate B1 is transferred. Fix it. In this way, by carrying the target substrate B1 to the range facing the most downstream substrate clamp 273 (substrate clamp 273 of the clamp mechanism 27d), the target substrate B1 that has been completed is quickly unloaded from the work range Ro. However, the entire subsequent substrate B2 can be quickly carried into the work range Ro.

  The substrate fixing unit 26 fixes the target substrate B1 with the substrate clamp 273 in a state where the substrate B is separated from the work conveyor 22 by the substrate clamp 273. In such a configuration, even after the target substrate B1 is fixed, the subsequent substrate B2 can be transferred by the work conveyor 22, and the degree of freedom of the transfer operation of the subsequent substrate B2 is improved. Therefore, in the specific support mode of this embodiment, the substrate fixing unit 26 transfers the subsequent substrate B2 by the work conveyor 22 in a period after the target substrate B1 is fixed by the substrate clamp 273, and the transfer operation is performed. The degree of freedom is utilized.

  Further, a substrate sensor Sb1 for detecting the position of the substrate B is provided. The control unit 20 then stops the downstream end 273d of the subsequent substrate B2 between the upstream end 273u of the first substrate clamp 273 and the upstream end 273u of the second substrate clamp 273, and the substrate sensor Sb1 follows. This is executed based on the result of detecting the position of the substrate B2. In such a configuration, the position at which the target substrate B1 is stopped can be accurately controlled based on the detection result by the substrate sensor Sb1.

  Thus, in the present embodiment, the component mounting machine 1 corresponds to an example of the “substrate processing apparatus” of the present invention, the mounting head 31 corresponds to an example of the “working head” and the “mounting head” of the present invention, The transfer device 2 corresponds to an example of the “substrate transfer device” of the present invention, the conveyor unit 24 corresponds to an example of the “conveyor unit” of the present invention, and the carry-in conveyor 21 corresponds to an example of the “first conveyor” of the present invention. The work conveyor 22 corresponds to an example of the “second conveyor” of the present invention, the carry-out conveyor 23 corresponds to an example of the “third conveyor” of the present invention, and the substrate fixing unit 26 corresponds to the “substrate fixing” of the present invention. The board clamp 273 corresponds to an example of the “fixing member” of the present invention, the separation position Pa corresponds to an example of the “separation position” of the present invention, and the contact position Pc corresponds to the “fixing member” of the present invention. It corresponds to an example of “contact position”, and the control unit 20 corresponds to the present invention. Steps S107, S108, and S204 to S207 correspond to an example of the “specific support mode” of the present invention, and the substrate clamps 273 of the clamp mechanisms 27a to 27d correspond to “Nt pieces of the present invention. It corresponds to an example of “fixing member” (Nt = 4), and the substrate clamp 273 of the clamp mechanism 27a corresponds to an example of “Nu fixing members” and “Nu-th fixing member” of the present invention (Nu = 1). The substrate clamp 273 of the clamp mechanism 27b corresponds to an example of the “(Nu + 1) th fixing member” of the present invention, the substrate sensor Sb1 corresponds to an example of the “detector” of the present invention, and the substrate B corresponds to the present invention. The target substrate B1 corresponds to an example of the “preceding substrate” of the present invention, the subsequent substrate B2 corresponds to an example of the “subsequent substrate” of the present invention, and the X direction corresponds to the “substrate” of the present invention. "Transport direction" It corresponds to the working range Ro corresponds to an example of the "working range" of the present invention.

  The present invention is not limited to the above-described embodiment, and various modifications can be made to the above-described one without departing from the spirit of the present invention. For example, in the above embodiment, the case of Nu = 1 has been exemplified. However, the specific value of Nu is not limited to this. Therefore, the substrate transport apparatus 2 may be configured as shown in FIG. Here, FIG. 12 is a diagram schematically showing a third operation executed in accordance with the flowcharts of FIGS. In the third operation example, Nu is 2, and the substrate length Lb of the target substrate B1 is not more than the length L2.

  In the third operation example, when the target substrate B1 is carried into the work range Ro (step S103), the control unit 20 moves the substrate clamps 273 of the two clamp mechanisms 27c and 27d from the separation position Pa to the contact position Pc. Move (step S108). As a result, the target substrate B1 is fixed by the two substrate clamps 273 as shown in the column of “Step S108” in FIG.

  When the loading of the target substrate B1 into the work range Ro is completed in this way, the standby substrate conveyance in FIG. 9 is started. That is, in step S204, the transfer of the subsequent substrate B2 is started, and after the substrate sensor Sb1 detects the subsequent substrate B2 (“YES” in step S205), the substrate transfer device 2 further transfers the subsequent substrate B2 by a predetermined distance ( Step S206). In this way, the substrate transfer apparatus 2 further advances the subsequent substrate B2 that has entered the work range Ro in the X direction, and then stops the subsequent substrate B2 (step S207). In the third operation example, the transport distance of the subsequent substrate B2 in step S206 is set longer than that in the second operation example. Thereby, as shown in the column of “Step S207” in FIG. 12, the substrate transport apparatus 2 uses the downstream end Bd of the subsequent substrate B2 in the X direction as the upstream ends 273u and 3 of the substrate clamp 273 of the second clamp mechanism 27b. The subsequent substrate B2 is supported by the carry-in conveyor 21 and the work conveyor 22 while entering between the upstream end 273u of the substrate clamp 273 of the second clamp mechanism 27c.

  As described above, also in the third operation example, the subsequent substrate B2 is put on standby in a state where the subsequent substrate B2 is partially entered into the work range Ro. Therefore, as the work on the target substrate B1 is completed and the target substrate B1 is unloaded from the work range Ro, the entire subsequent substrate B2 can be quickly loaded into the work range Ro. In this way, it is possible to speed up the loading of the substrate B into the work range Ro. As a result, it is possible to efficiently produce a mounting board.

  Further, the control for causing the subsequent substrate B2 to enter the first substrate clamp 273 as in the second operation example, and the control for causing the subsequent substrate B2 to enter the second substrate clamp 273 as in the third operation example are performed. Switching may be performed according to the determination results of S104 and S105. That is, if “NO” is determined in the step S104 and “YES” is determined in the step S105, the three substrate clamps 273 on the downstream side are used for fixing the target substrate B1, so that the second Run an example of operation. On the other hand, if “YES” is determined in the step S104, the two downstream substrate clamps 273 are used for fixing the target substrate B1, and therefore the third operation example is executed. In other words, among the four substrate clamps 273, the distance by which the subsequent substrate B2 enters the working range Ro can be changed according to the number of substrate clamps 273 that are not used for fixing the target substrate B1 counting from the upstream side. It ’s fine. More specifically, as the number of substrate clamps 273 that are not used for fixing the target substrate B1 increases from the upstream side, the distance at which the subsequent substrate B2 enters the working range Ro is increased.

  In the above example, the description has been made on the assumption that the target substrate B1 and the subsequent substrate B2 have the same width in the Y direction (width direction). However, it is also assumed that these widths are different. When the target substrate B1 and the subsequent substrate B2 have different widths in the Y direction as described above, the control unit 20 determines in step S201 that the subsequent substrate B2 cannot be carried into the work range Ro, and steps S204 to S204 are performed. While prohibiting the execution of S207, steps S202 and S203 may be executed. As a result, it is possible to prevent the target board B1 and the subsequent board B2 having different widths from being simultaneously carried into the work conveyor 22.

  Further, the specific configuration related to the substrate clamp 273 can be changed as appropriate. That is, the number (Nt) of the substrate clamps 273 is not limited to 4, and may be 2 or more. Further, it is not necessary that each substrate clamp 273 has the same length in the X direction.

  Further, each of the above-mentioned four substrate clamps 273 may be configured to be driven individually. The second to fourth substrate clamps 273 are collectively driven, while the first substrate clamp 273 is moved to 2 to 2. You may comprise so that it may drive separately with the 4th board | substrate clamp 273. FIG.

  Moreover, the carrying-in mode of the target substrate B1 into the work range Ro is not limited to the above example. Therefore, in the X direction, the conveyance of the target substrate B1 may be stopped in a state where the downstream end of the target substrate B1 is located upstream of the downstream end of the work range Ro.

  Various changes can also be made to the substrate sensor Sb1. For example, the position where the substrate sensor Sb1 is arranged may be changed.

  Further, the substrate processing apparatus on which the above-described substrate transfer device 2 can be mounted is not limited to the component mounter 1. Therefore, the above-described substrate transfer device 2 can be mounted on an appearance inspection device that inspects the appearance of solder or the like on the substrate B.

  DESCRIPTION OF SYMBOLS 1 ... Component mounting machine, 2 ... Board conveying apparatus, 20 ... Control part, 21 ... Carry-in conveyor (1st conveyor), 22 ... Work conveyor (2nd conveyor), 23 ... Carry-out conveyor (3rd conveyor), 24 ... Conveyor 26, substrate fixing part (substrate fixing part), 27, 27a to 27d ... clamp mechanism, 273 ... substrate clamp (fixing member), 31 ... mounting head (working head), B ... substrate, B1 ... target substrate (preceding) Substrate), B2 ... Subsequent substrate, Pa ... Separation position, Pc ... Contact position, Ro ... Working range, S107, S108, S204-S207 ... Specific support mode, Sb1 ... Substrate sensor (detector), X ... X direction (conveyance) Direction), Y ... Y direction (width direction)

Claims (8)

A work head for performing work on the substrate within a work range having a predetermined length in the substrate transport direction;
A first conveyor provided on the upstream side of the work range in the transport direction, a second conveyor provided for the work range, and a third conveyor provided on the downstream side of the work range in the transport direction. A conveyor unit that transports the substrate in the transport direction by the first conveyor, the second conveyor, and the third conveyor;
Nt (Nt is an integer of 2 or more) fixing members that are provided in the working range side by side in the transport direction and are movable between a contact position that contacts the substrate and a separation position that is separated from the substrate. A substrate fixing part that fixes the substrate by positioning the fixing member facing the substrate among the Nt fixing members at the contact position;
A specific support mode for carrying in and fixing the preceding substrate into the working range and supporting the succeeding substrate upstream of the preceding substrate in the transport direction in a state of partially entering the working range, the conveyor unit and A control unit that executes by controlling the substrate fixing unit,
The control unit is configured to perform the specific support mode when the preceding substrate can be fixed by the fixing member on the downstream side of Nu fixing members (Nu is an integer of 1 or more and less than Nt) counted from the upstream side in the transport direction. Run
In the specific support mode, the preceding substrate is transported downstream of the Nu fixing members in the transport direction, and the preceding substrate is fixed by the fixing member facing the preceding substrate, and the Nu number of fixing members are fixed. With the fixing member positioned at the separation position, the downstream end of the subsequent substrate is caused to enter between the upstream end of the Nuth fixing member and the upstream end of the (Nu + 1) th fixing member in the transport direction. A substrate processing apparatus for supporting the subsequent substrate by the first conveyor and the second conveyor.   In the specific support mode, in the transport direction, the downstream end of the preceding substrate is transported to the downstream side of the upstream end of the most downstream fixing member among the Nt fixing members, and the preceding substrate is fixed. Item 2. The substrate processing apparatus according to Item 1.   The substrate processing apparatus according to claim 1, wherein the substrate fixing unit fixes the preceding substrate with the fixing member in a state where the substrate is separated from the second conveyor by the fixing member.   4. The substrate processing according to claim 3, wherein in the specific support mode, the substrate fixing unit executes transfer of the subsequent substrate by the second conveyor, overlapping with a period after the preceding substrate is fixed by the fixing member. apparatus. The conveyor unit can change the width of each of the first conveyor, the second conveyor, and the third conveyor according to the width of the substrate in the width direction orthogonal to the transport direction.
5. The substrate processing apparatus according to claim 1, wherein the control unit prohibits the specific support mode when the widths in the width direction of the preceding substrate and the subsequent substrate are different. 6. A detector for detecting the position of the substrate;
The control unit is configured to stop the downstream end of the subsequent substrate between the upstream end of the Nu-th fixing member and the upstream end of the (Nu + 1) -th fixing member, and the detector detects the position of the subsequent substrate. The substrate processing apparatus according to claim 1, which is executed based on a result of detecting a position.   The substrate processing apparatus according to claim 1, wherein the work head is a mounting head for mounting a component on the substrate fixed in the work range by the substrate fixing unit. A first conveyor provided upstream of the transport range in a work range having a predetermined length in the substrate transport direction; a second conveyor provided for the work range; and the transport direction of the work range. A third conveyor provided on the downstream side of the first conveyor, the conveyor section that conveys the substrate in the conveying direction by the second conveyor and the third conveyor,
Nt (Nt is an integer of 2 or more) fixing members that are provided in the working range side by side in the transport direction and are movable between a contact position that contacts the substrate and a separation position that is separated from the substrate. A substrate fixing part that fixes the substrate by positioning the fixing member facing the substrate among the Nt fixing members at the contact position;
A specific support mode for carrying in and fixing the preceding substrate into the working range and supporting the succeeding substrate upstream of the preceding substrate in the transport direction in a state of partially entering the working range, the conveyor unit and A control unit that executes by controlling the substrate fixing unit,
The control unit is configured to perform the specific support mode when the preceding substrate can be fixed by the fixing member on the downstream side of Nu fixing members (Nu is an integer of 1 or more and less than Nt) counted from the upstream side in the transport direction. Run
In the specific support mode, the preceding substrate is transported downstream of the Nu fixing members in the transport direction, and the preceding substrate is fixed by the fixing member facing the preceding substrate, and the Nu number of fixing members are fixed. With the fixing member positioned at the separation position, the downstream end of the subsequent substrate is caused to enter between the upstream end of the Nuth fixing member and the upstream end of the (Nu + 1) th fixing member in the transport direction. A substrate transfer apparatus that supports the subsequent substrate by the first conveyor and the second conveyor.

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