JP2018165393A - Surface treatment apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface treatment apparatus that can reduce the number of devices attendant on surface treatment equipment such as pumps, for cost reduction.SOLUTION: A surface treatment apparatus 100 is used for treating a target surface 105, and has: a surface treatment tank 102 that stores at least a surface treatment liquid 101; and an aspirator 103 that has a gas introduction port 103a that introduces gas into the surface treatment tank 102, a liquid introduction port 103b that introduces liquid, and a discharge port 103c that mixes the gas introduced from the gas introduction port 103a and the liquid introduced from the liquid introduction port 103b to discharge the mixture, where the gas introduction port 103a is connected to outside of the surface treatment tank 102.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a surface treatment apparatus used for treating a surface of a workpiece.

  The surface treatment is performed in order to improve the properties of the object to be treated such as plating or painting. When plating is given as an example of the surface treatment, plating is usually performed while stirring a plating solution when plating. As the stirring method, bubbling or jet flow is used in the plating solution. In addition, air is mixed with the jet, and stirring is performed with both liquid and gas to perform plating.

  In Patent Document 1, an electroless plating solution is supplied by a pump or the like below the substrate to be processed, and an oxygen-containing gas is diffused by an air pump or the like into the electroless plating solution supplied below the substrate to be processed. And plating with stirring in both gas and gas.

JP, 2006-060935, A

  However, in the case of stirring with both liquid and gas, both a liquid pump and a gas pump are required. Usually, the environment of surface treatment equipment such as plating is often an acid or alkali atmosphere because the surface treatment solution is acid or alkali, and in such cases, corrosive equipment attached to the surface treatment equipment such as a pump is corroded. Adversely affect. Therefore, it is preferable that the number of auxiliary devices provided in a surface treatment facility such as a pump is as small as possible in terms of facility environment, maintenance, cost, and the like.

  Therefore, an object of the present invention is to provide a surface treatment apparatus capable of reducing the cost by reducing the number of auxiliary devices provided in a surface treatment facility such as a pump in such a surface treatment environment.

  A surface treatment apparatus according to one embodiment of the present invention is a surface treatment apparatus used for treating a surface of an object to be processed, and includes a surface treatment tank containing at least a surface treatment liquid, and a gas in the surface treatment tank. An aspirator having a gas introduction port for introducing liquid, a liquid introduction port for introducing liquid, and a discharge port for mixing and discharging the gas introduced from the gas introduction port and the liquid introduced from the liquid introduction port And the gas inlet is connected to the outside of the surface treatment tank.

  In this way, since gas and liquid can be discharged simultaneously by the aspirator, an air pump becomes unnecessary, the number of pumps can be reduced, and cost can be saved.

  At this time, in one aspect of the present invention, an intake air amount adjusting mechanism for adjusting an intake air amount of the gas introduced into the gas inlet may be further provided on the upstream side of the liquid inlet.

  In this way, since the amount of air can be adjusted, it is possible to obtain a desired gas amount, such as controlling the oxidation of the surface of the workpiece.

  At this time, in one aspect of the present invention, a branch mechanism for branching the liquid upstream of the liquid inlet, and an intake air amount adjusting mechanism downstream of the branch mechanism are further provided, and the intake air amount adjustment Liquid may be discharged from the downstream of the mechanism.

  If it does in this way, it can be set as the circulation amount of the process liquid required per unit time desired.

  At this time, in one aspect of the present invention, the discharge port is mixed with the gas mixed from the bottom to the top of the surface treatment tank at a position facing the bottom of the object to be processed at the bottom of the surface treatment tank. You may provide so that the said liquid may be discharged.

  In this way, since the gas and liquid are directly applied to the object to be processed at the same time, the solution near the surface of the object to be processed can be efficiently stirred, and the liquid flow goes from bottom to top. Can be removed along with bubbles from the overflow.

  At this time, in one embodiment of the present invention, a plurality of the discharge ports may be provided at any position excluding a position facing the bottom of the object to be processed at the bottom of the surface treatment tank.

  In this way, since the gas and the liquid are simultaneously discharged to both side surfaces of the object to be processed, the solutions on both side surfaces of the object to be processed can be efficiently stirred.

  At this time, in one mode of the present invention, the discharge port is mixed with the gas and the liquid mixed from the side surface of the surface treatment tank toward the center at a position facing the side surface of the object to be processed on the side surface of the surface treatment tank. It may be provided so as to discharge.

  If it does in this way, since it will contact directly to the processed material side which is the processed material surface, the solution on the processed material surface can be stirred more efficiently.

  Moreover, in one aspect of the present invention, the discharge port is provided below the bottom lower end of the object to be processed in the vicinity of the side surface of the surface treatment tank, and the gas mixed from the side surface of the surface treatment tank toward the center. It may be provided to discharge the liquid.

  In this way, the amount of dissolved oxygen in the liquid can be increased or decreased when the gas and liquid are not directly applied to the object to be processed.

  In the aspect of the invention, the surface treatment apparatus may further include a branch mechanism for branching the liquid to the upstream side of the liquid introduction port, and a liquid discharge mechanism for discharging the liquid downstream of the branch mechanism. It may be provided.

  This is advantageous when only the liquid is locally discharged onto the object to be processed and only the liquid needs to be stirred.

  As described above, according to the present invention, gas and liquid can be discharged simultaneously by an aspirator, so that an air pump is not required, the number of pumps can be reduced, and cost can be reduced.

FIG. 1 (A) is a schematic configuration showing an example of a surface treatment apparatus according to an embodiment of the present invention, and is a view showing an aspect in which an aspirator is not directly connected to a surface treatment tank, and FIG. It is a schematic structure which shows an example of the surface treatment apparatus concerning one embodiment of the invention, and is a figure showing the mode which connects an aspirator directly to a surface treatment tank. FIG. 2 is a schematic configuration diagram showing a modification of the surface treatment apparatus according to the embodiment of the present invention. FIG. 3 is a schematic configuration diagram showing another modification of the surface treatment apparatus according to another embodiment of the present invention. FIG. 4 is a schematic configuration diagram showing still another modification of the surface treatment apparatus according to another embodiment of the present invention. FIG. 5 is a schematic configuration diagram showing still another modification of the surface treatment apparatus according to another embodiment of the present invention. FIG. 6 is a schematic configuration diagram showing still another modification of the surface treatment apparatus according to another embodiment of the present invention.

  Hereinafter, preferred embodiments of the present invention will be described in detail. The present embodiment described below does not unduly limit the contents of the present invention described in the claims, and all the configurations described in the present embodiment are essential as means for solving the present invention. Not necessarily.

  First, the configuration of a surface treatment apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a schematic configuration of a surface treatment apparatus according to an embodiment of the present invention.

  As shown in FIG. 1, the surface treatment apparatus 100 according to an embodiment of the present invention is used to treat the surface of the workpiece 105 and includes a surface treatment tank 102 in which at least a surface treatment liquid 101 is accommodated. The gas was introduced into the surface treatment tank 102 from the gas introduction port 103a for introducing gas, the liquid introduction port 103b for introducing liquid, the gas introduced from the gas introduction port 103a, and the liquid introduction port 103b. An aspirator 103 having a discharge port 103c that mixes and discharges the liquid at the same time. The gas introduction port 103a is connected to the outside of the surface treatment tank 102.

  As shown in FIG. 1, the aspirator 103 is basically a T-shaped tube, and the lower part of the tube corresponding to the vertical line of the aspirator 103 in FIG. 1 is connected to the liquid inlet 103b. And the upper part of the pipe | tube which corresponds to the perpendicular line becomes the discharge outlet 103c. The inside of the pipe corresponding to the vertical line is partially narrowed, and a gas introduction port 103a which branches from here and corresponds to the horizontal line is attached. The liquid does not flow in the horizontal direction of the aspirator 103 in FIG. When water is caused to flow in the vertical direction, the flow velocity increases at a narrowed portion in the pipe, and therefore the pressure decreases due to the venturi effect. The surrounding gas in which the gas inlet 103a is connected to the outside of the surface treatment tank 102 flows into the reduced pressure liquid flow, and the gas and the liquid are mixed in the aspirator 103, and the gas and the liquid are discharged from the outlet 103c. It is discharged at the same time.

  Further, the gas introduced into the gas introduction port 103a is introduced by connecting the gas introduction port 103a to the outside of the surface treatment tank 102, and the introduced gas passes through, for example, the pipe 108 and the aspirator 103. The gas and the liquid are simultaneously discharged from the discharge port 103c by mixing with the liquid introduced from the liquid introduction port 103b. On the other hand, the liquid introduced into the liquid introduction port 103b is obtained by transferring the surface treatment liquid stored in the surface treatment tank 102 from the overflow tank 107 to the pump 106 through the pipe 108 and from the pump 106 through the pipe 108. The gas is connected to the inlet 103b, mixed with the gas introduced from the gas inlet 103a in the aspirator 103, and the gas and the liquid are simultaneously discharged from the outlet 103c.

  A plurality of the aspirators 103 may be provided. For example, when strong stirring is required, it is advantageous to provide a plurality of stirring.

  Furthermore, it is preferable to provide a filtration device either before or after the pump 106. In this way, impurities floating in the circulated liquid can be filtered, and clogging in the aspirator 103 due to the impurities themselves can be prevented. In addition, when the surface treatment is electroless plating, clogging in the aspirator 103 due to the presence of impurities that causes the metal crystal to grow as a nucleus can be prevented.

  Further, as shown in FIG. 1 (A), the surface treatment apparatus 100 according to an embodiment of the present invention includes an air intake adjustment mechanism 104 that adjusts an intake amount of gas introduced into the gas introduction port 103a. Preferably, it is further provided on the upstream side of 103b. Further, the intake air adjusting mechanism 104 is preferably provided on the upstream side of the liquid inlet 103 b and on the downstream side of the pump 106. For example, it is provided between the liquid inlet 103 b and the pump 106. In this way, the amount of air to be sucked can be adjusted by adjusting the flow rate of the liquid sent from the pump 106 to the liquid inlet 103b by the intake air adjusting mechanism 104 provided on the upstream side of the liquid inlet 103b. As a result, a desired gas amount can be obtained.

  For example, when it is desired to suppress the surface oxidation of the workpiece 105 in a situation where gas and liquid are mixed and discharged and stirred, the intake air amount may be suppressed by adjusting the intake air adjusting mechanism 104. On the other hand, when it is desired to proceed the surface oxidation of the workpiece 105, the intake air amount may be increased by adjusting the intake air adjusting mechanism 104 in the same manner. Moreover, the amount of dissolved oxygen in the liquid can be controlled.

  The intake air adjusting mechanism 104 is not particularly limited, but the intake air amount may be adjusted by a valve, for example. Note that when the valve is closed, the flow rate of the flowing liquid is reduced, the flow velocity is reduced, and the intake amount is reduced. On the other hand, when the valve is opened, the flow rate of the flowing liquid increases, so that the flow velocity increases and the intake amount increases.

  Moreover, it is preferable to provide an air filter further upstream of the adjusting mechanism. In this way, it is possible to prevent inhalation of impurities floating in the atmosphere when inhaling, to introduce a gas with less impurities into the aspirator 103, and to prevent clogging in the aspirator 103 due to the impurities themselves. In addition, when the surface treatment is electroless plating, clogging in the aspirator 103 due to the presence of impurities that causes the metal crystal to grow as a nucleus can be prevented. Furthermore, the air filter provided above is more preferably a carbon filter. In the surface treatment atmosphere, organic matter may be added to the surface treatment solution such as plating solution or pre-plating treatment, and organic matter such as lubricant added to the surface treatment equipment may be floating. This is because the above organic substances can be removed in addition to the impurities therein. You may combine said filter. Further, the above-described filter may be provided without providing the intake air amount adjusting mechanism 104. When installing an air filter, select an air filter with sufficient ventilation so as not to obstruct air intake.

  Moreover, it is preferable to attach a vacuum gauge to piping upstream of the gas inlet 103a. By doing so, since the state of gas flow through the pipe can be confirmed from the value of the vacuum gauge, not only the stage after completely clogging but also the stage before clogging can be confirmed. Therefore, clogging of the pipe can be prevented in advance, and the discharge amount from the aspirator can be kept more constant. Therefore, it is possible to improve the surface treatment capability of the workpiece.

  Further, FIG. 1A shows a mode in which the pipe 108 is provided in the surface treatment tank 102 and the aspirator 103 is provided in the surface treatment tank 102. For example, as shown in FIG. A surface treatment apparatus 110 that is directly connected to the tank 112 is also possible. At this time, the gas inlet 113a is connected to be outside the surface treatment tank 112 in order to introduce gas.

  For example, as shown in FIG. 1A, the aspirator 103 can be introduced into a space below the lower end of the bottom 105b of the workpiece 105 immersed in the surface treatment tank 102, or the bottom 102b of the surface treatment tank 102 from the installation ground. It is preferable to select when there is no space where the aspirator 103 can be introduced or when installation is difficult.

  On the other hand, as shown in FIG. 1B, when the aspirator 113 cannot be introduced into the space below the lower end of the bottom 115b of the workpiece 115 immersed in the surface treatment tank 112, or when the bottom 112b of the surface treatment tank 112 is installed from the installation ground. It is preferable to select when there is a space where the aspirator 113 can be introduced or when the installation is relatively easy.

  As described above, conventionally, in the case of stirring with both liquid and gas, both a liquid pump and a gas pump have been required. Usually, the surface treatment equipment environment is often an acid or alkali atmosphere because the surface treatment liquid such as pre-plating solution or plating solution is acid or alkali. It has adverse effects such as corroding the device, and crystals adhering to the device due to an acid or alkali atmosphere, and further causing corrosion. In addition, the initial cost increases because the pump is expensive. Furthermore, the failure rate is high due to the acid or alkali atmosphere, and the maintenance cost of the equipment and the human cost of pump replacement increase. In some cases, one or more pumps are required for each tank, and therefore, when mixing and stirring of gas and liquid is required, the number of pumps increases for each layer. Therefore, the number of auxiliary devices such as pumps is preferably as small as possible from the standpoints of equipment environment, maintenance and cost.

  Therefore, according to the surface treatment apparatus 100 according to an embodiment of the present invention, the gas and liquid introduced from the gas introduction port 103a and the liquid introduction port 103b are obtained by using the aspirator 103 provided in the surface treatment tank 102. By discharging simultaneously from the discharge port 103c, an air pump becomes unnecessary, the number of pumps can be reduced, and cost can be reduced.

  Furthermore, according to the surface treatment apparatus 100 according to an embodiment of the present invention, not only the cost of the above equipment, but also the gas and the liquid are mixed and simultaneously discharged and stirred, so that the stirring power is improved. Thus, when the surface treatment is, for example, plating, it is possible to promote plating deposition. Further, impurities attached to the surface of the workpiece 105 can be easily removed, and appearance defects such as foreign matters and roughness on the surface to be processed can be improved. Therefore, the surface treatment ability can be improved.

  Aspirators are very cheap compared to air pumps. In addition, since the aspirator is a small facility, it can be easily installed and retrofitted. In addition, because of this, the surface treatment tank can be widely modified, so that various surface treatment specifications can be accommodated. Hereinafter, aspects and modifications of the surface treatment apparatus 100 according to an embodiment of the present invention will be described.

  In the surface treatment apparatus 100 according to one embodiment of the present invention, as shown in FIG. 1A, the discharge port 103c is located at a position facing the bottom 105b of the workpiece 105 in the bottom 102b of the surface treatment tank 102. It is preferable that the gas and liquid mixed from the bottom part 102b of the surface treatment tank 102 to the top part are discharged.

  In this way, since it directly hits the workpiece 105, the solution near the surface of the workpiece 105 can be efficiently stirred, and the surface treatment of the workpiece 105 can be promoted. For example, when the surface treatment is plating, plating deposition can be promoted. Further, since the liquid flow direction is from the bottom to the top, impurities in the solution adhering to the surface of the workpiece 105 can be removed and efficiently removed from the overflow tank 107 together with bubbles. Therefore, the surface of the workpiece 105 can be efficiently cleaned by stirring the liquid on the surface of the workpiece 105. In addition to removing impurities in the solution adhering to the surface of the workpiece 105, impurities floating in the surface treatment liquid 101 can be efficiently removed from the overflow tank 107 together with bubbles. Therefore, appearance defects such as foreign matter and roughness on the surface of the object to be processed can be further improved.

  Examples of the surface treatment include electroless plating, electroplating, displacement plating, pretreatment, post-treatment, activation, catalyst application, pre-dip, etching, zincate, peeling, water washing, pickling and desmear. . Therefore, the surface treatment apparatus according to an embodiment of the present invention can correspond to the apparatus in the surface treatment described above. Note that the surface treatment is not limited to the above, and can be applied to an apparatus for processing performed to improve the properties of the object to be processed.

  For example, when the surface treatment apparatus according to an embodiment of the present invention is used for pre-plating treatment, it is advantageous when plating is performed after promoting the reaction necessary for pre-plating treatment. As described above, of course, impurities in the plating pretreatment solution are removed together with bubbles from the overflow tank, which is effective in reducing plating appearance defects.

  In addition, when the surface treatment apparatus according to an embodiment of the present invention is used in the washing tank, both the gas and the liquid are discharged and stirred at the same time, so that the cleaning power is improved and the impurities in the liquid of the washing tank Can be removed together with bubbles from the overflow tank, and the appearance defect of the object to be processed can be reduced.

  Although the effect at the time of using the surface treatment apparatus concerning one embodiment of the present invention for plating pretreatment and a washing tub was explained above, plating pretreatment, electroless plating other than a washing tub, electroplating, displacement plating, before In the treatment, post-treatment, activation, catalyst application, pre-dip, etching, zincate, peeling, water washing, pickling, desmear, etc., when the surface treatment apparatus according to one embodiment of the present invention is used, the surface treatment The ability can be improved, and the same effect as described above can be obtained.

  Further, the present invention is not limited to the above-described embodiment. For example, FIG. 2 shows a schematic configuration of a surface treatment apparatus 200 showing a modification of the surface treatment apparatus 100 according to the embodiment of the present invention. As shown in FIG. 2, a branching mechanism 209 for branching the liquid to the upstream side of the liquid inlet 203b and an intake air amount adjusting mechanism 204 further provided downstream of the branching mechanism 209 from the downstream toward the aspirator 203 are further provided. The liquid is preferably discharged from the downstream side of the intake air amount adjusting mechanism 204 into the surface treatment tank 202 through the pipe 208. The intake air amount adjusting mechanism 204 is not particularly limited. For example, the intake air amount may be adjusted by a valve. As the valve is closed, the flow rate of liquid flowing from the pump 206 to the aspirator 203 increases, so that the flow velocity increases and the intake air amount increases. On the other hand, when the valve is opened, the flow rate of the liquid flowing from the pump 206 to the aspirator 203 is reduced, so that the flow velocity is reduced and the intake amount is reduced.

  Here, the reason for installing a pump in the surface treatment tank is to perform agitation of the liquid in the tank and filtration by filtration. In the filtration, the necessary amount of processing liquid circulated per unit time is set according to the capacity of the tank. In circulation using only an aspirator, there is a possibility that the necessary circulation amount of the processing liquid per unit time cannot be satisfied due to its characteristics. It is possible to install many aspirators and increase the amount of circulation, but conversely there may be too much bubbling. In addition, if a dedicated pump is installed, the power will increase, which is not the original purpose. Therefore, according to the embodiment shown in FIG. 2, for the above reason, a desired appropriate circulation amount is obtained, and filtration by more appropriate filtration becomes possible.

  Further, in the embodiment of FIG. 2, when the circulation amount of the processing liquid is increased, a plurality of branch mechanisms 209, an intake air amount adjustment mechanism 204, and a pipe 208 may be provided.

  The branch mechanism 209 may be a mechanism suitable for branching, and for example, three T-shaped or Y-shaped joints are used. Four or more joints may be used. Further, the pipe for discharging the liquid into the surface treatment tank 202 from the downstream side of the intake air amount adjusting mechanism 204 may discharge the liquid near the liquid surface of the surface treatment tank 202. On the other hand, as shown in FIG. 2, the pipe may be extended to the vicinity of the bottom of the surface treatment tank 202 to discharge the liquid. Further, the branch mechanism 209 is preferably provided on the downstream side of the pump 206.

  Furthermore, another modification of the surface treatment apparatus 100 according to the embodiment of the present invention is shown. As shown in FIG. 3, it is preferable to provide a plurality of discharge ports 303c at any position other than the position facing the bottom 305b of the object to be processed in the surface treatment tank bottom 302b.

  In this way, the solution on both sides of the object to be processed 305 can be efficiently stirred. Therefore, since gas and liquid are discharged to both sides of the workpiece 305, the agitation becomes stronger, and when the surface treatment is plating, the promotion of plating deposition and the removal of impurities on the surface of the workpiece 305 are more effective. Thus, the appearance defect on the surface of the workpiece can be further reduced. Moreover, since it discharges to the both sides | surfaces of the to-be-processed object 305, it becomes advantageous when the to-be-processed object 305 is a thin board. For example, when the object of the object to be processed is a printed board, the plate thickness varies, and it can be applied to a thin board. Furthermore, since it discharges to the both sides | surfaces of the to-be-processed object 305, it is advantageous at the point which can agitate equally on both sides.

  Furthermore, another modification of the surface treatment apparatus 100 according to the embodiment of the present invention is shown. FIG. 4 is a schematic configuration diagram of a surface treatment apparatus 400 showing another modification of the surface treatment apparatus according to another embodiment of the present invention. As shown in FIG. 4, the discharge port 403c discharges the gas and liquid mixed from the surface treatment tank side surface 402a toward the center at a position facing the object side surface 405a of the surface treatment tank side surface 402a. It is preferable to provide it.

  In this way, since it directly hits the workpiece side 405a, which is the surface of the workpiece 405, the solution on the workpiece 405 surface can be stirred more efficiently, and when the surface treatment is plating, further plating precipitation is promoted. It becomes possible to improve the surface treatment capability. The embodiment shown in FIG. 4 is particularly effective when it is desired to increase the stirring of the surface of the workpiece.

  Furthermore, another modification of the surface treatment apparatus 100 according to the embodiment of the present invention is shown. FIG. 5 is a schematic configuration diagram of a surface treatment apparatus 500 showing still another modification of the surface treatment apparatus according to another embodiment of the present invention. As shown in FIG. 5, the discharge port 503c is provided in the vicinity of the surface treatment tank side surface 502a and below the lower end of the bottom 505b of the object to be processed, and discharges gas and liquid mixed from the surface treatment tank side surface 502a toward the center. It is preferable to provide it. That is, the aspirator 503 is provided between the lower end of the bottom 505b of the workpiece and the bottom surface 502b of the surface treatment tank.

  This is effective when it is desired to increase or decrease the amount of dissolved oxygen when the gas and liquid are not directly applied to the workpiece 505. Further, it is preferable to adjust the amount of gas discharged from the discharge port 503c by adjusting the intake amount by the intake air amount adjusting mechanism 504.

  In this case as well, in the case where the surface treatment is, for example, plating, the deposition is promoted and impurities in the solution adhering to the surface of the workpiece 505 are removed and removed from the overflow tank 507 together with bubbles. it can. Therefore, in addition to stirring the liquid on the surface of the object to be processed 505, the surface of the object to be processed 505 can be cleaned. In addition to removing impurities in the solution adhering to the surface of the object to be treated 505, impurities floating in the surface treatment liquid 501 can be removed from the overflow tank 507 together with bubbles. Therefore, appearance defects such as foreign matter and roughness on the surface of the surface treatment can be improved.

  Furthermore, another modification of the surface treatment apparatus 100 according to the embodiment of the present invention is shown. FIG. 6 is a schematic configuration diagram of a surface treatment apparatus 600 showing still another modification of the surface treatment apparatus according to another embodiment of the present invention. The surface treatment apparatus 600 shown in FIG. 6 causes the surface treatment apparatus 100 of FIG. 1 to further discharge a liquid downstream of the branch mechanism and a branch mechanism 609 for branching the liquid upstream of the liquid inlet 603b. A liquid discharge mechanism 610 may be provided. Further, the branch mechanism 609 is preferably provided on the downstream side of the pump 606.

  At this time, a plurality of liquid ejection mechanisms 610 may be provided. Further, the liquid may be provided at a position facing the object side surface 605a of the surface treatment tank side surface 602a so as to discharge the liquid from the surface treatment tank side surface 602a toward the center. Furthermore, the liquid discharge mechanism 610 is provided at a position facing the bottom 605b of the object to be processed of the surface treatment tank bottom 602b so as to discharge the liquid from the bottom 505b to the top of the surface treatment tank. Also good. Further, a plurality of liquid discharge mechanisms 610 may be provided, and a plurality of liquid discharge mechanisms 610 may be provided at any position other than the position facing the bottom 605b of the object to be processed of the surface treatment tank bottom 602b.

  This is advantageous when only the liquid is locally discharged onto the object to be processed and only the liquid needs to be stirred. Moreover, by discharging only the liquid, the stirring direction of the gas and liquid discharged from the aspirator can be changed, and complicated stirring can be achieved.

  As described above, the branch mechanism 609 may be a mechanism suitable for branching, and for example, three T-shaped or Y-shaped joints are used. Further, four or more joints may be used. In this case, a plurality of liquid ejection mechanisms 610 are provided. Furthermore, the liquid discharge mechanism 610 may be a mechanism suitable for discharge. For example, the liquid discharge mechanism 610 may be discharged as it is, but it is preferable that the discharge port is narrow in order to increase the stirring force.

  In addition, as described above, the surface treatment apparatus 600 has been described with respect to the surface treatment apparatus 100 of FIG. 1 further provided with the branch mechanism 609 and the liquid discharge mechanism 610. However, the surface treatment apparatus illustrated in FIGS. The configurations 200, 300, 400 and 500 are further provided with a branch mechanism 609 for branching the liquid upstream of the liquid inlet 603b and a liquid discharge mechanism 610 for discharging the liquid downstream of the branch mechanism. May be. Further, the branch mechanism 609 is preferably provided on the downstream side of the pump 606. If it does in this way, the same effect explained above can be acquired.

  Although each embodiment of the present invention has been described in detail as described above, it is easily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. It will be possible. Therefore, all such modifications are included in the scope of the present invention.

  For example, a term described with a different term having a broader meaning or the same meaning at least once in the specification or the drawings can be replaced with the different term in any part of the specification or the drawings. The configuration and operation of the surface treatment apparatus are not limited to those described in the embodiments and examples of the present invention, and various modifications can be made.

100 110 130 140 200 300 400 400 500 600 Surface treatment apparatus 101 111 131 141 201 301 401 501 601 Surface treatment liquid,
102 112 202 302 402 502 602 Surface treatment tank 402a 502a 602a Surface treatment tank side surface, 102b 112b 202b 302b 402b 502b 602b Surface treatment tank bottom,
103 113 133 143 203 303 403 503 603 aspirator,
103a 113a 133a 143a 203a 303a 403a 503a 603a gas inlet,
103b 113b 133b 143b 203b 303b 403b 503b 603b liquid inlet,
103c 113c 133c 143c 203c 303c 403c 503c 603c Discharge port,
104 114 134 144 204 304 404 504 604 intake adjustment mechanism,
105 115 135 145 205 305 405 505 605 Workpiece,
405a 605a Workpiece side surface,
105b 115b 135b 145b 205b 405b 505b 605b bottom of workpiece,
106 116 136 146 206 306 406 506 606 pump,
107 117 137 147 207 307 407 507 607 overflow tank,
108 118 138 148 208 308 408 508 608 piping,
209 609 Branch mechanism, 610 Liquid discharge mechanism

Claims (8)

A surface treatment apparatus used for treating a surface of a workpiece,
A surface treatment tank containing at least a surface treatment liquid;
A gas introduction port for introducing gas, a liquid introduction port for introducing liquid, and the gas introduced from the gas introduction port and the liquid introduced from the liquid introduction port are mixed and discharged into the surface treatment tank. An aspirator having a discharge port for
The surface treatment apparatus, wherein the gas inlet is connected to the outside of the surface treatment tank.   The surface treatment apparatus according to claim 1, further comprising an intake air amount adjusting mechanism that adjusts an intake air amount of the gas introduced into the gas introduction port on an upstream side of the liquid introduction port.   A branching mechanism for branching the liquid upstream of the liquid introduction port; and an intake air amount adjusting mechanism provided further downstream of the branching mechanism, and discharging the liquid from the downstream of the intake air amount adjusting mechanism. The surface treatment apparatus according to claim 1.   The discharge port is provided at a position facing the bottom of the object to be processed at the bottom of the surface treatment tank so as to discharge the gas and the liquid mixed from the bottom to the top of the surface treatment tank. The surface treatment apparatus according to claim 1, wherein the surface treatment apparatus is provided.   The said discharge port is provided with two or more in any position except the position which opposes the bottom part of the said to-be-processed object of the said surface treatment tank bottom part. Surface treatment equipment.   The discharge port is provided to discharge the gas and the liquid mixed from the side surface of the surface treatment tank toward the center at a position on the side surface of the surface treatment tank facing the side surface of the object to be processed. The surface treatment apparatus of any one of Claims 1-3 characterized by these.   The discharge port is provided near the side surface of the surface treatment tank and below the bottom lower end of the object to be processed, and is provided so as to discharge the gas and the liquid mixed from the side of the surface treatment tank toward the center. The surface treatment apparatus according to claim 1, wherein the surface treatment apparatus is provided.   The surface treatment apparatus is further provided with a branch mechanism for branching the liquid upstream of the liquid introduction port and a liquid discharge mechanism for discharging liquid downstream of the branch mechanism. The surface treatment apparatus of any one of Claims 1-7.