JP2018149632A - Adhesive tape automatic sticking device and adhesive tape automatic sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an adhesive tape automatic sticking device and adhesive tape automatic sticking method which can automatically stick an adhesive tape with low adhesiveness to a substrate.SOLUTION: An adhesive tape automatic sticking device 10 sticking an adhesive tape 13 on a substrate 12 includes: a substrate placement part 11; a tape sticking unit 20 which sticks the band-like adhesive tape 13 on the substrate 12 placed on the substrate placement part 11; and a movement device 30 which moves the tape sticking unit 20 in parallel with respect to a surface 11a of the substrate placement part 11 above the substrate 12. The supply speed of the adhesive tape 13 from the tape sticking unit 20 is synchronized with the movement speed of the tape sticking unit 20 by the movement device 30.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a suction tape automatic sticking apparatus and a suction tape automatic sticking method.

  In recent years, there is a case where a processing object or a transport object is fixed in a processing process or a transport process when manufacturing a precision instrument. When such an object to be processed or an object to be conveyed is fixed, it may be fixed with a tape. In this case, a tape sticking device that sticks an adhesive tape to a predetermined position easily and quickly using a pressing roller is known (for example, Patent Document 1). According to such a tape applicator, the adhesive tape is pressed against the tape application surface by the first and second pressing rollers after the tip of the adhesive tape is applied to a predetermined position on the tape application surface of the workpiece. The main body is engaged with and held by the work by the first to third guide rollers. Then, after the adhesive tape is wound around the first pressing roller and passed through the second pressing roller, the rotation position of the tape guide plate relative to the main body is fixed by the fixing means, and the gap between the pressing roller and the tape guide plate is fixed. The adhesive tape with a release material is positioned in the gap. From this state, when the main body is moved along the tape application surface, the adhesive tape that is peeled off from the adhesive tape with the release material is pressed against the tape application surface by the first and second pressing rollers and bonded to the tape application surface. .

JP 2000-326930 A

  However, in the case of the tape applicator shown in Patent Document 1, for example, when the main body is moved along the tape application surface, tension acts on the adhesive tape bonded to the tape application surface. For this reason, in the tape sticking apparatus shown in Patent Document 1, there is a problem that, for example, a tape with low adhesiveness such as an adsorbing tape peels off the tape stuck to the tape sticking surface due to the tension acting on the tape. For this reason, in the tape sticking apparatus shown in patent document 1, it can respond only to a tape like an adhesive tape with high adhesiveness. In addition, when using a tape such as an adhesive tape with high adhesiveness, there is a problem that the adhesive material of the tape, such as glue, adheres to the object to be fixed. For example, a tape with low adhesiveness such as an adsorption tape is used. It is sought to use. On the other hand, for example, when using a low-adhesive tape such as a suction tape, it must be handled manually, which takes time and is difficult to maintain the positional accuracy of the tape to be applied. It is.

  The present invention has been made in consideration of such points, and is capable of automatically sticking an adhesive tape having low adhesiveness to a substrate. It aims to provide a method.

  The present invention is an automatic suction tape sticking device for sticking an adhesive tape on a substrate, the substrate mounting portion, and the belt-like suction tape attached to the substrate placed on the substrate mounting portion. A tape attaching unit to be attached; and a moving device for moving the tape attaching unit above the substrate in parallel with the surface of the substrate mounting portion; and a supply speed of the suction tape from the tape attaching unit; The suction tape automatic sticking device, wherein the moving speed of the tape sticking unit by the moving device is synchronized.

  In the present invention, the tape attaching unit is provided rotatably, and has an unwinding shaft on which the suction tape is wound in a roll shape, and the tape attaching unit by the rotational speed of the unwinding shaft and the moving device is provided. It is an adsorption tape automatic sticking device characterized by synchronizing with the moving speed of the.

  The present invention is the suction tape automatic sticking apparatus, wherein the tape sticking unit includes a supply speed adjusting unit that adjusts the supply speed of the suction tape.

  The present invention is the suction tape automatic sticking device, wherein the tape sticking unit has a cutting mechanism for cutting the sticky tape.

  The present invention is an adsorption tape automatic sticking method, a placing step of placing a substrate on a substrate placing portion, and a tape attaching unit above the substrate parallel to the surface of the substrate placing portion. A first adhering step of adhering a strip-shaped adsorbing tape to the substrate by moving the adhering tape in a first direction, and in the first adhering step, the supply speed of the adsorbing tape from the tape adhering unit And the moving speed of the tape applying unit are synchronized with each other.

  In the present invention, after the first attaching step, the first movement for moving the tape attaching unit above the substrate in a direction opposite to the first direction in parallel to the surface of the substrate mounting portion. A second moving step of moving the tape attaching unit in a second direction perpendicular to the first direction parallel to the surface of the substrate platform, and above the substrate, A second adhering step of adhering the strip-shaped adsorbing tape to the substrate by moving a tape adhering unit in the first direction parallel to the surface of the substrate mounting portion; and In the second sticking step, the suction tape automatic sticking method is characterized in that a feeding speed of the suction tape from the tape sticking unit and a moving speed of the tape sticking unit are synchronized.

  In the present invention, after the first attaching step, the tape attaching unit is moved in a second direction perpendicular to the first direction in parallel to the surface of the substrate platform. And adhering the strip-shaped adsorbing tape to the substrate by moving the tape applying unit above the substrate in a direction opposite to the first direction in parallel to the surface of the substrate mounting portion. A second adhering step, wherein in the second adhering step, a supply speed of the adsorbing tape from the tape adhering unit and a moving speed of the tape adhering unit are synchronized with each other. It is a sticking method.

  In the present invention, the tape applying unit is provided rotatably and has an unwinding shaft on which the suction tape is wound in a roll shape, and the rotational speed of the unwinding shaft and the moving speed of the tape applying unit are Is a method of automatically sticking a suction tape, characterized in that

  The present invention is the adhering tape automatic adhering method, wherein the tape adhering unit includes a supply speed adjusting unit that adjusts the supply speed of the adsorbing tape.

  The present invention is the suction tape automatic sticking method, further comprising a cutting step of cutting the suction tape.

  According to the present invention, an adhesive tape having low adhesiveness can be automatically attached to a substrate.

FIG. 1 is a plan view showing an adsorption tape automatic sticking apparatus according to a first embodiment of the present invention. FIG. 2 is a perspective view showing the suction tape automatic sticking apparatus according to the first embodiment of the present invention. FIG. 3 is a cross-sectional view showing the suction tape. FIG. 4 is a cross-sectional view (a cross-sectional view taken along the line IV-IV in FIG. 1) showing the suction tape automatic sticking apparatus according to the first embodiment of the present invention. FIGS. 5A to 5C are plan views showing a suction tape automatic sticking method according to the first embodiment of the present invention. FIGS. 6A to 6C are plan views showing a suction tape automatic sticking method according to the first embodiment of the present invention. 7 (a)-(b) are plan views showing a suction tape automatic sticking method according to the first embodiment of the present invention. FIG. FIGS. 8A to 8B are plan views showing a suction tape automatic sticking method according to the first embodiment of the present invention. FIG. 9 is a plan view showing the metal foil fixed by the suction tape stuck by the suction tape automatic sticking device according to the first embodiment of the present invention. FIG. 10 is a cross-sectional view showing a modification of the suction tape automatic sticking device according to the first embodiment of the present invention. FIG. 11 is a plan view showing an adsorption tape automatic sticking device according to a second embodiment of the present invention. 12 (a)-(b) are plan views showing a suction tape automatic sticking method according to a second embodiment of the present invention. FIGS. 13 (a)-(b) are plan views showing a suction tape automatic sticking method according to a second embodiment of the present invention.

(First embodiment)
Hereinafter, the present embodiment will be described with reference to FIGS. Note that, in the following drawings, the same portions are denoted by the same reference numerals, and some detailed description may be omitted. In the present specification, the “surface” means a surface on which the suction tape is attached (that is, a surface facing upward in FIG. 4, a surface on the plus side in the Z direction).

  As shown in FIGS. 1, 2, and 4, the suction tape automatic sticking apparatus 10 attaches a belt-like suction tape 13 to a substrate platform 11 and a substrate 12 placed on the substrate platform 11. A tape attaching unit 20 to be attached and a moving device 30 for moving the tape attaching unit 20 above the substrate 12 in parallel to the surface 11a of the substrate platform 11 are provided. Among these, the substrate mounting part 11 is formed in a substantially rectangular plane shape, and its four sides extend along the X direction and the Y direction perpendicular to the X direction, respectively. The board | substrate mounting part 11 is mounted on the floor surface 1 of a work space, and has the conveyance apparatus which is not shown in figure which consists of a conveyor etc., for example. Such a substrate platform 11 transports the substrate 12 to the Y direction minus side when placing the substrate 12 on the substrate platform 11, and removes the substrate 12 from the substrate platform 11. It is comprised so that 12 can be conveyed to the Y direction plus side. Further, a contact plate 14 formed in, for example, a substantially L-shaped plane is provided on the substrate platform 11, and the substrate 12 placed on the substrate platform 11 contacts the contact plate 14. Thus, the substrate 12 can be positioned.

  The substrate 12 supports a fixed object (for example, a metal foil) fixed by the suction tape 13 in a processing process or a conveyance process when manufacturing a precision device, and is made of a flat plate-shaped member. As the substrate 12, for example, aluminum can be used. The thickness of the substrate 12 can be set in consideration of the strength of the material, suitability for handling, etc., and can be set as appropriate within a range of about 10 μm to 300 μm, for example. The size of the substrate 12 is arbitrary and can be appropriately selected according to the size of the fixed object. For example, a substrate 12 having a G6 size (1500 mm × 1850 mm) can be used.

  As shown in FIG. 3, the adsorption tape 13 includes a first adsorption layer 13a adsorbed on the surface of the substrate 12, a film layer 13b provided on the first adsorption layer 13a, and a first adsorption layer 13 provided on the film layer 13b. 2 adsorption layer 13c and separator 13d provided on the 2nd adsorption layer 13c and protecting the 2nd adsorption layer 13c. Such an adsorbing tape 13 adsorbs the first adsorbing layer 13a to the substrate 12, and then peels off the separator 13d from the second adsorbing layer 13c, thereby exposing the second adsorbing layer 13c and the second adsorbing layer 13c. It is comprised so that can be made to adsorb | suck to a fixed target object. The “adsorption tape” is a soft resin substrate in which countless micro bubbles are formed, and these bubbles serve as a suction cup. This suction tape recovers the suction force by washing away the suction surface with water and can be reused. As such an adsorbing tape 13, for example, a fixed film (registered trademark) manufactured by Fuji Copian Corporation can be used.

  As shown in FIGS. 1, 2, and 4, the tape attaching unit 20 is provided with a main body 21, a support plate 22 attached to the main body 21, a support plate 22, a rotatable plate and an adsorption tape. 13 has the unwinding axis | shaft 23 wound by roll shape. The main body 21 is formed in a substantially rectangular parallelepiped shape. The inlet opening 24 through which the suction tape 13 wound around the unwinding shaft 23 enters the main body 21 and the suction tape 13 withdraws from the main body 21. And an outlet opening 25 (see FIG. 4). The main body 21 is attached to a sticking moving part 32 </ b> A (described later) of the moving device 30 via the support plate 22. In addition, the main-body part 21 may be directly attached to the sticking movement part 32A, without passing through the support plate 22. FIG.

  A cutting mechanism 26 that automatically cuts the suction tape 13 that has entered the main body 21 is provided in the main body 21. The cutting mechanism 26 plays a role of cutting the suction tape 13 attached to the substrate 12 to a desired length. A cutter or the like can be used as the cutting mechanism 26. Moreover, as shown by the phantom line (two-dot chain line) of FIG. 4, the cut | disconnected suction tape 13 is stuck on the board | substrate 12 along a X direction. A guide roller 27 for guiding the suction tape 13 that has entered the main body 21 to the outlet opening 25 is provided in the main body 21.

  The support plate 22 rotatably supports the unwinding shaft 23, and is made of a flat plate member having a quadrangular shape. The support plate 22 is not limited to this, and may have an arbitrary shape as long as the unwinding shaft 23 can be rotatably supported.

  The unwinding shaft 23 is for causing the suction tape 13 to enter the main body 21 by unwinding the suction tape 13 wound in a roll shape. When the unwinding shaft 23 rotates counterclockwise as shown in FIG. 4, the suction tape 13 wound around the unwinding shaft 23 is unwound and the suction tape 13 enters the inlet opening 24. Yes. Further, the unwinding shaft 23 is driven by a motor (not shown) so that the rotational speed of the unwinding shaft 23 and the moving speed of the tape applying unit 20 by the moving device 30 are synchronized. That is, as will be described later, while the rotation angle of the unwinding shaft 23 is determined based on the moving distance of the tape applying unit 20 and the suction tape 13 is being unwound, the moving speed and unwinding shaft of the tape applying unit 20 are determined. The supply speed of the suction tape 13 unwound by the rotation of 23 is maintained substantially the same.

  As shown in FIGS. 1 and 2, the moving device 30 includes a sticking cylinder 31 </ b> A that extends in the X direction, and a pair of transfer cylinders 31 </ b> B that are connected to both ends of the sticking cylinder 31 </ b> A and extend in the Y direction. ing. Among these, the sticking cylinder 31A is provided with a sticking moving part 32A that moves in the X direction on the sticking cylinder 31A. This sticking cylinder 31A is composed of, for example, an electric cylinder, and is configured such that the sticking moving part 32A moves in the X direction on the sticking cylinder 31A when a motor (not shown) rotates the ball screw. Yes. In addition, when 31 A of sticking cylinders are comprised with an electric cylinder, the positional accuracy of 32 A of sticking movement parts can be improved, and the positional accuracy of the sticking place of the suction tape 13 in a X direction is ± 1 mm, for example. Can be kept to a degree.

  The support plate 22 of the tape application unit 20 described above is attached to the attachment movement unit 32A, and the application unit 32A moves in the X direction, so that the tape application unit 20 is the surface of the substrate platform 11. It is configured to move in the X direction parallel to 11a. Moreover, when such a sticking moving part 32A moves to the X direction minus side (first direction) along the horizontal direction, the suction tape 13 is supplied from the tape sticking unit 20. At this time, the supply speed of the suction tape 13 from the tape applying unit 20 and the moving speed of the tape applying unit 20 by the moving device 30 are synchronized. In this case, for example, the rotational speed of the unwinding shaft 23 may be synchronized with the moving speed of the tape pasting unit 20 by rotating the unwinding shaft 23 based on the rotational speed of a motor (not shown) of the sticking cylinder 31A. . By the way, when the suction tape 13 is unwound from the unwinding shaft 23, the diameter of the suction tape 13 wound around the unwinding shaft 23 decreases. Thereby, the length of the wound suction tape 13 may be shorter than the moving distance of the tape attaching unit 20. In this case, the tension in the moving direction of the tape applying unit 20 acts on the suction tape 13 attached to the substrate 12, and the suction tape 13 may be peeled off from the substrate 12. Moreover, when the length of the wound suction tape 13 is longer than the moving distance of the tape attaching unit 20, wrinkles may occur on the suction tape 13 attached to the substrate 12. For this reason, it is preferable that the difference between the moving distance of the tape attaching unit 20 and the length of the wound suction tape 13 is 5% or less. Thereby, the tension | tensile_strength which acts on the suction tape 13 stuck to the board | substrate 12 can be reduced, and the malfunction from which the suction tape 13 stuck to the board | substrate 12 peels from the board | substrate 12 can be prevented. Moreover, the malfunction which a wrinkle generate | occur | produces in the suction tape 13 stuck on the board | substrate 12 can be prevented. In addition, by adjusting the rotation speed of the unwinding shaft 23 with respect to the rotation speed of the motor (not shown) of the sticking cylinder 31A, the difference between the moving distance of the tape sticking unit 20 and the length of the unwound suction tape 13 is 5 % Or less can be adjusted.

  On the other hand, when the sticking moving part 32 </ b> A moves to the X direction plus side along the horizontal direction, the suction tape 13 is not supplied from the tape sticking unit 20. That is, when the sticking moving part 32 </ b> A moves to the X direction plus side along the horizontal direction, the tape sticking unit 20 does not rotate the unwinding shaft 23, and is sucked around the unwinding shaft 23. The tape 13 is not unwound.

  The pair of transfer cylinders 31B is supported on the floor 1 of the work space by a support body (not shown). Each of the pair of transfer cylinders 31B is provided with a transfer moving portion 32B that moves in the Y direction on each of the transfer cylinders 31B. These transfer cylinders 31B are constituted by, for example, electric cylinders, and when a motor (not shown) rotates a ball screw, each transfer moving portion 32B moves in the Y direction on the transfer cylinder 31B. It is configured. In addition, when the conveyance cylinder 31B is configured by an electric cylinder, the position accuracy of the conveyance moving unit 32B can be improved, and the position accuracy of the sticking place of the suction tape 13 in the Y direction is, for example, ± 1 mm. Can be kept to a degree.

  Both ends of the above-mentioned sticking cylinder 31A are attached to the transfer moving part 32B, and each transfer moving part 32B moves in the Y direction so as to move the sticking cylinder 31A in the Y direction. It has become. That is, the transfer cylinder 31B moves the tape sticking unit 20 in the Y direction parallel to the surface 11a of the substrate mounting part 11 via the sticking cylinder 31A by the transfer moving part 32B moving in the Y direction. Transport. Further, the moving speeds of the respective transport moving parts 32B are equal to each other, and the sticking cylinders 31A connected to the respective transport moving parts 32B are parallel to the X direction. Note that the suction tape 13 is not supplied from the tape applying unit 20 when the transport moving unit 32B moves in the Y direction along the horizontal direction. That is, when the transport moving part 32 </ b> B moves in the Y direction along the horizontal direction, the tape applying unit 20 does not rotate the unwinding shaft 23 and the suction tape 13 wound around the unwinding shaft 23. Will not be unwound.

  Next, the operation in the present embodiment having such a configuration will be described. Here, about the adsorption tape automatic sticking method using the adsorption tape automatic sticking apparatus 10 shown in FIG.1, FIG2 and FIG.4, FIG.5 (a)-(c), FIG.6 (a)-(c), This will be described with reference to FIGS. 7 (a)-(b) and FIGS. 8 (a)-(b).

  First, the substrate 12 is prepared.

  Next, the substrate 12 is placed on the substrate placement portion 11 (placement step). In this case, first, the substrate platform 11 is driven. Next, a part of the substrate 12 is manually placed on the substrate platform 11 (FIG. 5A). When a part of the substrate 12 is placed on the substrate platform 11, the substrate platform 11 moves the substrate 12 to the Y direction minus side. Thereafter, the substrate 12 abuts against the contact plate 14 and is positioned (FIG. 5B). At this time, the tape applying unit 20 is positioned at a predetermined standby position (see FIGS. 5A to 5B).

  Next, the belt-like suction tape 13 is attached to the substrate 12 (first attaching step). In this case, first, the transfer cylinder 31B is driven to move the transfer moving part 32B to the Y direction plus side (FIG. 5C). Thus, the tape sticking unit 20 is conveyed to the desired sticking start position in the Y direction. At this time, since the conveyance cylinder 31B is configured by an electric cylinder, the positional accuracy of the conveyance moving unit 32B can be improved, and the positional accuracy of the sticking place of the suction tape 13 in the Y direction is, for example, ± It can be kept at about 1 mm. Next, the tape applying unit 20 is moved above the substrate 12 in parallel to the surface 11a of the substrate platform 11 to the X direction minus side (first direction) (FIG. 6A). At this time, the sticking moving part 32A is moved to the X direction minus side by driving the sticking cylinder 31A. When the sticking moving part 32A moves to the X direction minus side, the tape sticking unit 20 is driven and the suction tape 13 is unwound from the unwinding shaft 23. The wound suction tape 13 enters the main body 21 from the inlet opening 24 of the tape applying unit 20, passes through the outlet opening 25, and exits from the main body 21 (see FIG. 4). Then, the suction tape 13 withdrawn from the main body portion 21 comes into contact with the surface of the substrate 12, and the first suction layer 13 a of the suction tape 13 is attracted to the surface of the substrate 12. At this time, without applying a pressing force from the surface side of the suction tape 13, the suction tape 13 is attracted to the substrate 12 by the weight of the suction tape 13. In this way, the suction tape 13 is supplied from the tape applying unit 20 to the substrate 12. At this time, the sticking cylinder 31A is constituted by an electric cylinder, so that the position accuracy of the sticking moving part 32A can be improved, and the position accuracy of the sticking place of the suction tape 13 in the X direction is, for example, ± It can be kept at about 1 mm. Further, when the suction tape 13 is supplied from the tape application unit 20, the supply speed of the suction tape 13 from the tape application unit 20 and the moving speed of the tape application unit 20 are synchronized. At this time, for example, the rotational speed of the unwinding shaft 23 and the moving speed of the tape attaching unit 20 are synchronized. In this case, for example, the rotational speed of the unwinding shaft 23 may be synchronized with the moving speed of the tape pasting unit 20 by rotating the unwinding shaft 23 based on the rotational speed of a motor (not shown) of the sticking cylinder 31A. . Thus, the sticking moving part 32A is moved to the X direction minus side until the tape sticking unit 20 reaches the desired sticking end position in the X direction. When the suction tape 13 is unwound from the unwinding shaft 23, the diameter of the suction tape 13 wound around the unwinding shaft 23 is reduced. Thereby, a difference may arise between the moving distance of the tape sticking unit 20 and the length of the wound suction tape 13. In this case, the rotational speed of the unwinding shaft 23 is adjusted with respect to the rotational speed of the motor (not shown) of the sticking cylinder 31A, and the difference between the moving distance of the tape sticking unit 20 and the length of the sucked suction tape 13 is 5%. The following is preferable. Thereby, the tension | tensile_strength which acts on the suction tape 13 stuck to the board | substrate 12 can be reduced, and the malfunction from which the suction tape 13 stuck to the board | substrate 12 peels from the board | substrate 12 can be prevented. Moreover, the malfunction which a wrinkle generate | occur | produces in the suction tape 13 stuck on the board | substrate 12 can be prevented.

  Next, after the tape sticking unit 20 reaches a desired sticking end position in the X direction, the sticking cylinder 31A is stopped, and the suction tape 13 is cut by the cutting mechanism 26 (cutting step). At this time, the cut suction tape 13 is stuck on the substrate 12 along the X direction. In this way, the belt-like suction tape 13 is attached to the substrate 12. Note that after the suction tape 13 is cut, the unwinding shaft 23 may be further rotated to unwind the suction tape 13 having a predetermined length from the unwinding shaft 23. Thereby, the front-end | tip of the suction tape 13 which passes the exit opening 25 and withdraws from the main-body part 21 can be brought close to the board | substrate 12, and the positional accuracy of the initial position at the time of sticking the suction tape 13 on the board | substrate 12 is improved. Can do.

  Next, the tape applying unit 20 is moved to the X direction plus side parallel to the surface 11a of the substrate platform 11 above the substrate 12 (first movement step) (FIG. 6B). At this time, the sticking moving part 32A is moved to the X direction plus side by driving the sticking cylinder 31A. In this manner, the sticking moving unit 32A is moved to the X direction plus side until the tape sticking unit 20 reaches a desired sticking start position in the X direction. In addition, when the sticking moving part 32A moves to the X direction plus side, the tape sticking unit 20 is not driven, and the suction tape 13 is not unwound from the unwinding shaft 23.

  Next, the tape applying unit 20 is moved in the Y direction plus side (second direction) in parallel with the surface 11a of the substrate platform 11 (second moving step) (FIG. 6C). At this time, the transfer cylinder 31B is driven to move the transfer moving part 32B to the Y direction plus side. In this way, the tape applicator unit 20 is conveyed to the Y direction plus side until the tape applicator unit 20 reaches a desired application start position in the Y direction. In addition, when the transfer moving part 32B moves to the Y direction plus side, the tape applying unit 20 is not driven, and the suction tape 13 is not unwound from the unwinding shaft 23.

  Next, the belt-like suction tape 13 is stuck on the substrate 12 (second sticking step). In this case, first, the tape applying unit 20 is moved above the substrate 12 in parallel with the surface 11a of the substrate platform 11 to the X direction minus side (FIG. 7A). At this time, the sticking moving part 32A is moved to the X direction minus side by driving the sticking cylinder 31A. When the sticking moving part 32 </ b> A moves to the X direction minus side, the tape sticking unit 20 is driven, and the suction tape 13 is supplied from the tape sticking unit 20 to the substrate 12. Further, when the suction tape 13 is supplied from the tape application unit 20, the supply speed of the suction tape 13 from the tape application unit 20 and the moving speed of the tape application unit 20 are synchronized. At this time, for example, the rotational speed of the unwinding shaft 23 and the moving speed of the tape attaching unit 20 are synchronized. In this case, for example, the rotational speed of the unwinding shaft 23 may be synchronized with the moving speed of the tape pasting unit 20 by rotating the unwinding shaft 23 based on the rotational speed of a motor (not shown) of the sticking cylinder 31A. . Thus, the sticking moving part 32A is moved to the X direction minus side until the tape sticking unit 20 reaches the desired sticking end position in the X direction.

  Next, after the tape sticking unit 20 reaches a desired sticking end position in the X direction, the sticking cylinder 31A is stopped, and the suction tape 13 is cut by the cutting mechanism 26 (cutting step). In this way, the belt-like suction tape 13 is attached to the substrate 12.

  Next, the tape attaching unit 20 is moved to the X direction plus side in parallel with the surface 11a of the substrate platform 11 above the substrate 12 (FIG. 7B). At this time, the sticking moving part 32A is moved to the X direction plus side by driving the sticking cylinder 31A. In this manner, the sticking moving unit 32A is moved to the X direction plus side until the tape sticking unit 20 reaches a desired sticking start position in the X direction.

  Next, the tape attaching unit 20 is moved in the Y direction minus side in parallel with the surface 11a of the substrate platform 11 (FIG. 8A). At this time, the transfer cylinder 31B is driven to move the transfer moving part 32B to the Y direction minus side. In this way, the tape applying unit 20 is transported to the Y direction minus side until the tape applying unit 20 reaches the standby position. Note that when the transport moving part 32B moves to the Y direction minus side, the tape applying unit 20 is not driven, and the suction tape 13 is not unwound from the unwinding shaft 23.

  Thereafter, by driving the substrate platform 11, the substrate 12 to which the suction tape 13 is attached is moved to the Y direction plus side. After the substrate 12 is moved to a state where it can be gripped, the substrate 12 is manually removed from the substrate platform 11 (FIG. 8B).

  In this way, the substrate 12 having the suction tape 13 attached thereto is obtained.

  In addition, as shown in FIG. 9, the fixed object, for example, metal foil 15, is attached on the board | substrate 12 to which the suction tape 13 was stuck. For example, the metal foil 15 is processed in a subsequent process to form a precision device. The thickness of such a metal foil 15 can be appropriately set within a range of, for example, about 10 μm to 300 μm.

  At this time, the length in the longitudinal direction (length in the X direction) of the suction tape 13 attached to the substrate 12 is preferably longer than the length in the X direction of the metal foil 15. Thereby, when the thin metal foil 15 is fixed on the substrate 12, it is possible to prevent a problem that the metal foil 15 is wrinkled. Further, since the length of the suction tape 13 in the longitudinal direction is longer than the length of the metal foil 15 in the X direction, the area of the suction tape 13 in contact with the substrate 12 is larger than the area of the suction tape 13 in contact with the metal foil 15. Can also be increased. Thereby, the suction force of the suction tape 13 acting on the substrate 12 can be made larger than the suction force of the suction tape 13 acting on the metal foil 15. For this reason, when removing the metal foil 15 from the substrate 12, it is possible to remove only the metal foil 15 with the suction tape 13 adhered to the substrate 12.

  Thus, according to the present embodiment, when adhering the adsorbing tape 13 to the substrate 12, the supply speed of the adsorbing tape 13 from the tape adhering unit 20 and the moving speed of the tape adhering unit 20 by the moving device 30 are as follows. Be synchronized. Thereby, when sticking the adsorption tape 13 to the board | substrate 12, the tension | tensile_strength which acts on the adsorption tape 13 can be reduced. For this reason, the adsorption tape 13 with low adhesiveness can be automatically attached to the substrate 12.

  Moreover, according to this Embodiment, when adhering the adsorption tape 13 to the board | substrate 12, the rotational speed of the unwinding axis | shaft 23 and the moving speed of the tape sticking unit 20 by the moving apparatus 30 are synchronized. Thereby, the supply speed of the suction tape 13 from the tape applying unit 20 and the moving speed of the tape applying unit 20 by the moving device 30 can be easily synchronized.

  Furthermore, according to the present embodiment, the tape attaching unit 20 has the cutting mechanism 26 that cuts the suction tape 13. Thereby, the length of the suction tape 13 stuck on the substrate 12 can be adjusted to a desired length.

Modification Examples by 10, a description will be given of modifications of the suction tape automatic attaching apparatus according to this embodiment. The modification shown in FIG. 10 is different in the configuration of the tape attaching unit 20, and the other configuration is substantially the same as the configuration shown in FIGS. 10, the same parts as those in FIGS. 1 to 8 are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the tape applying unit 20 shown in FIG. 10, a supply speed adjusting unit 28 that adjusts the supply speed of the suction tape 13 is provided in the main body 21 of the tape applying unit 20. The supply speed adjusting unit 28 is configured by a pair of delivery rollers 29 that sandwich the suction tape 13, for example. The delivery rollers 29 are driven by a motor (not shown) so that the rotational speed of each delivery roller 29 and the movement speed of the tape applying unit 20 by the moving device 30 are synchronized. That is, as will be described later, the rotation angle of each delivery roller 29 is determined based on the moving distance of the tape applying unit 20, and while the suction tape 13 is being unwound, the moving speed of the tape applying unit 20 and the pair The supply speed of the suction tape 13 that is unwound from the unwinding shaft 23 by the rotation of the feed roller 29 is maintained substantially the same. The surface of the feed roller 29 is preferably covered with a covering material 29a formed of the same material as the separator 13d of the suction tape 13. Thereby, it is possible to prevent the suction tape 13 from being attracted to the surface of the delivery roller 29 when the pair of delivery rollers 29 sandwich the suction tape 13.

  On the other hand, the unwinding shaft 23 is configured not to be driven by a motor or the like, but to rotate by the tension generated when the suction tape 13 is unwound from the unwinding shaft 23 by the rotation of the pair of delivery rollers 29. Has been.

  When the sticking moving part 32A of the moving device 30 moves to the X direction minus side along the horizontal direction, the supply speed of the suction tape 13 from the tape applying unit 20 and the moving speed of the tape applying unit 20 by the moving device 30 are: Synchronize. In this case, for example, by rotating the pair of delivery rollers 29 based on the rotation speed of a motor (not shown) of the sticking cylinder 31A, the rotational speed of the pair of delivery rollers 29 is synchronized with the moving speed of the tape pasting unit 20. Also good. In this case, even when the diameter of the suction tape 13 wound around the unwinding shaft 23 is reduced, the moving distance of the tape attaching unit 20 and the length of the unwound suction tape 13 are made equal. Can do.

  Like the tape applying unit 20 shown in FIG. 10, a supply speed adjusting unit 28 that adjusts the supply speed of the suction tape 13 is provided in the main body 21 of the tape applying unit 20. The moving distance can be made equal to the length of the wound suction tape 13. In this case, for example, even when the diameter of the suction tape 13 wound on the unwinding shaft 23 is changed, the moving speed of the tape attaching unit 20 and the supply speed of the suction tape 13 can be easily synchronized. The moving distance of the pasting unit 20 and the length of the wound suction tape 13 can be made equal.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. 11 to 13 are diagrams showing a second embodiment of the present invention. The second embodiment shown in FIG. 11 to FIG. 13 is different from the first embodiment mainly in that the suction tape automatic pasting apparatus 10 includes two tape pasting units 20A and 20B. is there. 11 to 13, the same parts as those of the first embodiment are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 11, the suction tape automatic sticking apparatus 10 includes two tape sticking units 20A and 20B. Each tape sticking unit 20A, 20B is attached to the sticking moving part 32A of the moving device 30 so as to face each other. Since other configurations are the same as those of the tape attaching unit 20 in the first embodiment, the description thereof is omitted here.

  When the sticking moving part 32A moves to the X direction minus side (first direction) along the horizontal direction, the suction tape 13 is supplied from the tape sticking unit 20A. At this time, the supply speed of the suction tape 13 from the tape attaching unit 20A and the moving speed of the tape attaching unit 20 by the moving device 30 are synchronized. In this case, for example, the rotation speed of the unwinding shaft 23A may be synchronized with the moving speed of the tape pasting unit 20 by rotating the unwinding shaft 23A based on the rotation speed of a motor (not shown) of the sticking cylinder 31A. .

  On the other hand, when the sticking moving part 32A moves to the X direction minus side along the horizontal direction, the suction tape 13 is not supplied from the tape sticking unit 20B. That is, when the sticking moving part 32A moves to the X direction minus side along the horizontal direction, the tape sticking unit 20B does not rotate the unwinding shaft 23B, and the suction wound around the unwinding shaft 23B. The tape 13 is not unwound.

  Moreover, when the sticking moving part 32A moves to the X direction plus side (the reverse direction of the first direction) along the horizontal direction, the suction tape 13 is supplied from the tape sticking unit 20A. At this time, the supply speed of the suction tape 13 from the tape applying unit 20B and the moving speed of the tape applying unit 20 by the moving device 30 are synchronized. In this case, for example, the rotation speed of the unwinding shaft 23B may be synchronized with the moving speed of the tape pasting unit 20 by rotating the unwinding shaft 23B based on the rotation speed of a motor (not shown) of the sticking cylinder 31A. .

  On the other hand, when the sticking moving part 32A moves to the X direction plus side along the horizontal direction, the suction tape 13 is not supplied from the tape sticking unit 20A. That is, when the sticking moving part 32A moves to the X direction plus side along the horizontal direction, the tape sticking unit 20A does not rotate the unwinding shaft 23A, and the suction wound around the unwinding shaft 23A. The tape 13 is not unwound.

  Next, the operation in the present embodiment having such a configuration will be described. Here, the suction tape automatic sticking method using the suction tape automatic sticking apparatus 10 shown in FIG. 11 will be described with reference to FIGS. 12 (a)-(b) and 13 (a)-(b).

  First, for example, by the method shown in FIGS. 5A to 5C, the substrate 12 is prepared, and after the substrate 12 is placed on the substrate platform 11, the conveyance cylinder 31 </ b> B is driven to perform the conveyance. The moving part 32B is moved to the Y direction plus side. Next, the tape applying unit 20 is moved above the substrate 12 in parallel with the surface 11a of the substrate platform 11 to the X direction minus side (first direction) (FIG. 12A). At this time, the sticking moving part 32A is moved to the X direction minus side by driving the sticking cylinder 31A. When the sticking moving part 32A moves to the X direction minus side, the tape sticking unit 20A is driven, and the suction tape 13 is unwound from the unwinding shaft 23A. In this way, the suction tape 13 is supplied from the tape applying unit 20A to the substrate 12. Further, when the suction tape 13 is supplied from the tape application unit 20A, the supply speed of the suction tape 13 from the tape application unit 20A and the moving speed of the tape application unit 20A are synchronized. At this time, for example, the rotational speed of the unwinding shaft 23A and the moving speed of the tape attaching unit 20A are synchronized. In this case, for example, the rotation speed of the unwinding shaft 23A may be synchronized with the moving speed of the tape pasting unit 20A by rotating the unwinding shaft 23A based on the rotation speed of a motor (not shown) of the sticking cylinder 31A. . Thus, the sticking moving part 32A is moved to the X direction minus side until the tape sticking unit 20A reaches the desired sticking end position in the X direction. In addition, when the sticking moving part 32A moves to the X direction plus side, the adhering tape 13 is not unwound from the unwinding shaft 23B without driving the tape sticking unit 20B.

  Next, after the tape sticking unit 20A reaches a desired sticking end position in the X direction, the sticking cylinder 31A is stopped, and the suction tape 13 is cut by a cutting mechanism 26 (not shown) provided in the tape sticking unit 20A. Is cut (cutting step). In this way, the belt-like suction tape 13 is attached to the substrate 12.

  Next, the tape attaching unit 20 is moved parallel to the surface 11a of the substrate platform 11 to the Y direction plus side (second direction) (moving step) (FIG. 12B). At this time, the tape attaching units 20A and 20B are transported to the Y direction plus side until the tape attaching unit 20B reaches a desired attachment start position in the Y direction.

  Next, the belt-like suction tape 13 is stuck on the substrate 12 (second sticking step). In this case, first, the tape attaching unit 20B is moved above the substrate 12 in parallel to the surface 11a of the substrate platform 11 to the plus side in the X direction (FIG. 13A). At this time, the sticking moving part 32A is moved to the X direction plus side by driving the sticking cylinder 31A. When the sticking moving part 32A moves to the plus side in the X direction, the tape sticking unit 20B is driven, and the suction tape 13 is supplied from the tape sticking unit 20B to the substrate 12. Further, when the suction tape 13 is supplied from the tape application unit 20B, the supply speed of the suction tape 13 from the tape application unit 20B and the moving speed of the tape application unit 20B are synchronized. At this time, for example, the rotational speed of the unwinding shaft 23B and the moving speed of the tape attaching unit 20B are synchronized. In this case, for example, the rotation speed of the unwinding shaft 23B may be synchronized with the moving speed of the tape pasting unit 20B by rotating the unwinding shaft 23B based on the rotation speed of a motor (not shown) of the sticking cylinder 31A. . In this way, the sticking moving unit 32A is moved to the X direction minus side until the tape sticking unit 20B reaches the desired sticking end position in the X direction. In addition, when the sticking movement part 32A moves to the X direction plus side, the tape attaching unit 20A is not driven, and the suction tape 13 is not unwound from the unwinding shaft 23A.

  Next, after the tape sticking unit 20B reaches a desired sticking end position in the X direction, the sticking cylinder 31A is stopped, and the suction tape 13 is cut by a cutting mechanism 26 (not shown) provided in the tape sticking unit 20B. Is cut (cutting step). In this way, the belt-like suction tape 13 is attached to the substrate 12.

  Next, the tape attaching units 20A and 20B are moved in the Y direction minus side in parallel to the surface 11a of the substrate platform 11 (FIG. 13B). At this time, the transfer cylinder 31B is driven to move the transfer moving part 32B to the Y direction minus side. In this way, the tape applying unit 20 is transported to the Y direction minus side until the tape applying units 20A and 20B reach the standby position.

  Thereafter, as shown in FIG. 8B, by driving the substrate mounting portion 11, the substrate 12 to which the suction tape 13 is attached is moved to the Y direction plus side. After the substrate 12 is moved to a state where it can be gripped, the substrate 12 is manually removed from the substrate platform 11.

  In this way, the substrate 12 having the suction tape 13 attached thereto is obtained.

  Thus, according to this Embodiment, the adsorption tape automatic sticking apparatus 10 is equipped with two tape sticking units 20A and 20B attached to the sticking movement part 32A of the moving apparatus 30 facing each other. Thereby, when moving the tape attaching units 20A and 20B to the X direction minus side parallel to the surface 11a of the substrate platform 11, the suction tape 13 is supplied from the one tape attaching unit 20A to the substrate 12, When the tape attaching units 20A and 20B are moved to the X direction plus side in parallel to the surface 11a of the substrate platform 11, the suction tape 13 can be supplied from the other tape attaching unit 20B to the substrate 12. For this reason, the movement to the X direction parallel to the surface 11a of the board | substrate mounting part 11 of tape sticking unit 20A, 20B can be reduced, and working time can be shortened.

  It is also possible to appropriately combine a plurality of constituent elements disclosed in the above embodiments and modifications as necessary. Or you may delete a some component from all the components shown by said each embodiment and modification.

DESCRIPTION OF SYMBOLS 10 Adsorption tape automatic sticking apparatus 11 Substrate mounting part 11a Surface 12 Substrate 13 Adsorption tape 20, 20A, 20B Tape sticking unit 23, 23A, 23B Unwinding shaft 26 Cutting mechanism 28 Supply speed adjustment part 30 Moving device

Claims (10)

An adhesive tape automatic sticking device for sticking an adhesive tape on a substrate,
A substrate mounting unit;
A tape attaching unit for adhering the belt-like adsorbing tape to the substrate placed on the substrate placing portion;
A moving device for moving the tape applying unit above the substrate in parallel with the surface of the substrate mounting unit;
An adhering tape automatic adhering device, wherein a feeding speed of the adsorbing tape from the tape adhering unit and a moving speed of the tape adhering unit by the moving device are synchronized.   The tape applying unit is provided rotatably and has an unwinding shaft on which the suction tape is wound in a roll shape, and the rotational speed of the unwinding shaft and the moving speed of the tape applying unit by the moving device are The adhering tape automatic sticking device according to claim 1, wherein the adhering tapes are synchronized.   The suction tape automatic sticking apparatus according to claim 1, wherein the tape sticking unit includes a supply speed adjusting unit that adjusts a supply speed of the suction tape.   The said tape sticking unit has a cutting mechanism which cut | disconnects the said suction tape, The suction tape automatic sticking apparatus as described in any one of Claims 1 thru | or 3 characterized by the above-mentioned. An adhering tape automatic sticking method,
A placing step of placing the substrate on the substrate placing portion;
A first adhering step of adhering a strip-shaped adsorbing tape to the substrate by moving a tape adhering unit above the substrate in a first direction parallel to the surface of the substrate platform;
In the first adhering step, an adsorbing tape automatic adhering method, wherein a supply speed of the adsorbing tape from the tape adhering unit and a moving speed of the tape adhering unit are synchronized. After the first sticking step, a first moving step for moving the tape sticking unit above the substrate in a direction opposite to the first direction in parallel with the surface of the substrate mounting portion;
A second moving step of moving the tape applying unit in a second direction perpendicular to the first direction in parallel to the surface of the substrate platform;
A second adhering step of adhering the strip-shaped adhering tape to the substrate by moving the tape adhering unit above the substrate in the first direction parallel to the surface of the substrate platform. And further comprising
6. The suction tape automatic sticking method according to claim 5, wherein, in the second sticking step, a supply speed of the suction tape from the tape sticking unit and a moving speed of the tape sticking unit are synchronized. After the first attaching step, the moving step of moving the tape attaching unit in a second direction orthogonal to the first direction in parallel to the surface of the substrate platform;
A second adhesive tape is attached to the substrate by moving the tape attaching unit above the substrate in a direction opposite to the first direction in parallel with the surface of the substrate mounting portion. Further comprising an attaching step,
6. The suction tape automatic sticking method according to claim 5, wherein, in the second sticking step, a supply speed of the suction tape from the tape sticking unit and a moving speed of the tape sticking unit are synchronized.   The tape applying unit is provided rotatably and has an unwinding shaft on which the suction tape is wound in a roll shape, and synchronizes the rotational speed of the unwinding shaft and the moving speed of the tape applying unit. The adhering tape automatic sticking method as described in any one of Claims 5 thru | or 7 characterized by these.   The said tape sticking unit has a supply speed adjustment part which adjusts the supply speed of the said suction tape, The suction tape automatic sticking method as described in any one of Claims 5 thru | or 8 characterized by the above-mentioned.   The method for automatically sticking an adhesive tape according to any one of claims 5 to 9, further comprising a cutting step of cutting the adhesive tape.

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