JP2018109585A - Connection switching device for measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To permit connection and use of a measuring device of a different measurement method and its measurement cable.SOLUTION: A connection switching device for a measuring device includes: device connector groups 5, 6, 7 capable of making connection to measuring devices MD1, MD2, MD3 for measuring a value of resistance of a measurement target 21 by a two-terminal method, a four-terminal method, and a four-terminal pair method; cable connectors 8 for a plurality of channels to which a measurement cable MC1 connected to the measurement target 21 is connectable; and a scanner part 9 that is composed of a plurality of switches (switches SW1 to SW4, and the like), and allows on/off states of the plurality of switches to be switched to a connection form, where a device connector group corresponding to one measurement method selected from among the two-terminal method, four-terminal method, and four-terminal pair method and each terminal of the cable connectors 8 corresponding to one selected channel are connected in a state in which a grounding connector 5included in the device connector group and a shield terminal SH of the cable connector 8 to which a shield of the measurement cable MC1 is connected are connected.SELECTED DRAWING: Figure 2

Description

  The present invention is arranged between a measurement cable connected to a plurality of measurement objects and the measurement apparatus, and corresponds to a measurement method in the measurement apparatus via the measurement cable between the selected measurement object and the measurement apparatus. The present invention relates to a connection switching device for a measuring device connected in a connection form.

  As this type of connection switching device, a connection switching unit (a component provided in a substrate inspection device) disclosed as background art in the following Patent Document 1 proposed by the present applicant is generally known. The connection switching unit includes a plurality of switches, and includes a plurality of lead wires connected to a plurality of measurement objects (a plurality of test conductors), a measurement device (a power source (DC source or voltage source), a voltmeter) , A device including an ammeter and a processing unit).

  This connection switching unit has four lead wires brought into contact with one measurement object selected from the plurality of measurement objects by individually turning on and off the plurality of built-in switches by the processing unit. Are connected to the measuring device in a connection form corresponding to the four-terminal method (measuring method with the measuring device). Thereby, the measuring apparatus can measure the physical quantity (resistance value in this example) of this one measuring object by the four-terminal method.

JP 2009-216616 A (page 2-4, FIG. 4)

  However, the connection switching device for the measuring device has the following problems to be improved. That is, there are measuring devices that measure not only by the four-terminal method as in the above-described measuring device but also by various measuring methods such as the two-terminal method and the four-terminal pair method. For this reason, it is possible to connect measurement devices of different measurement methods, and connect the connected measurement devices to measurement objects selected via lead wires (measurement cables) in a connection form corresponding to the measurement method of the measurement device. Although it is preferable that the configuration is connectable, the only measuring device that can be connected to the connection switching device described above is a measuring device that measures by the four-terminal method. Therefore, this connection switching device includes a measuring method other than the four-terminal method. However, there is a problem that a measuring device for measuring with cannot be connected and used.

  This invention is made | formed in view of this subject, and it aims at providing the connection switching apparatus for measuring apparatuses which can connect and use the measuring apparatus of a different measuring method, and its measuring cable.

  In order to achieve the above object, the connection switching device for a measuring device according to claim 1 is a first device terminal group to which a first measuring device for measuring a physical quantity to be measured by a first measuring method can be connected, and the measurement A second device terminal group that can be connected to a second measurement device that measures a physical quantity of an object by a second measurement method different from the first measurement method, and a shielded measurement cable that is connected to the measurement object can be connected A plurality of cable terminal groups for a plurality of channels and a plurality of switches and disposed between the first device terminal group, the second device terminal group, and the cable terminal group, When one measurement method is selected from one measurement method and the second measurement method, and one channel is selected from the plurality of channels, the first device terminal group and the second device terminal And the terminal group for the device corresponding to the selected one measuring method and the terminals corresponding to the selected one channel of the terminal group for cable are included in the terminal group for the device. A scanner capable of switching the on / off states of the plurality of switches to a connection configuration in which a ground terminal and a shield terminal to which the shield of the measurement cable in the cable terminal group is connected are connected. Department.

  Further, the connection switching device for a measuring device according to claim 2 is the connection switching device for the measuring device according to claim 1, wherein the selected one measuring method is a two-terminal method. When one end of the measurement object is grounded, the measurement object is not grounded via the measurement cable in the cable terminal group instead of the connection form in which the shield terminal is connected to the ground terminal. The on / off states of the plurality of switches can be switched to a connection configuration in which the shield terminal is connected to a terminal connected to the side terminal.

  According to a third aspect of the present invention, there is provided the connection switching device for a measuring apparatus according to the first or second aspect, wherein the scanner unit is connected to a chassis that is conductive and grounded. And the connection switch and the plurality of switches are disposed in the chassis, and when the connection switch is in an on state, the shield terminal is connected to the chassis via the connection switch. When the connection switch is off, the shield terminal is disconnected from the chassis.

  In the connection switching device for a measuring device according to claim 1, a first device terminal group to which the first measuring device can be connected, a second device terminal group to which the second measuring device can be connected, and a measurement cable can be connected. One channel selected from the device terminal group and the cable terminal group corresponding to the selected one of the cable terminal group, the first device terminal group, and the second device terminal group. Each corresponding terminal includes a scanner unit that can be switched to a connection form in which the ground terminal included in the device terminal group and the shield terminal of the cable terminal group are connected. .

  Therefore, according to the connection switching device for this measuring device, not only the measuring device of one measuring method and its measuring cable, but also the measuring devices of different kinds of measuring methods and the plural kinds of measuring cables corresponding to each of them. Any one set can be selected and connected for use.

  According to the connection switching device for a measuring apparatus according to claim 2, the shield terminal is connected to the terminal where the scanner unit is connected to the non-ground side terminal to be measured via the measurement cable in the cable terminal group. Since it is possible to switch to the connection form, the measuring device with the ammeter arranged on the non-grounded side is used, and the shield of the measuring cable is defined to be approximately the same potential as the ammeter in this measuring device (ie In a state in which a higher shielding effect is maintained), the current value of the current flowing through the measurement object whose one end is grounded and the voltage value of the voltage across the measurement object can be measured with high accuracy. In addition, this makes it possible to measure the resistance value of the measurement target with higher accuracy.

  According to the connection switching device for a measuring device according to claim 3, when the measurement cable is connected by the connection / disconnection switch, the shield terminal (and the shield terminal) to which the shield of the measurement cable in the cable terminal group is connected. The internal wiring in the connected chassis) can be grounded. As a result, according to this connection switching device, the shield terminal of the cable terminal group (and the internal terminal connected to the shield terminal) is connected due to the connection of the shield of the measurement cable in an undefined state. It is possible to prevent the occurrence of noise such as overvoltage and overcurrent in the wiring), thereby protecting each switch constituting the scanner unit.

1 is a configuration diagram of a connection switching device 1. FIG. It is a block diagram of the connection switching apparatus 1 in the state which connected measuring apparatus MD1 and measurement cable MC1 of the 2 terminal method. It is a block diagram of the connection switching apparatus 1 in the state which connected measuring apparatus MD2 and measurement cable MC2 of 4 terminal methods. It is a block diagram of the connection switching apparatus 1 in the state which connected measuring apparatus MD3 of 4 terminal pairs method, and measurement cable MC3. It is a block diagram of the connection switching apparatus 1 when measuring the resistance value of the measuring object 21 with one end grounded by connecting the other two-terminal pair measuring apparatus MD4 and the measuring cable MC1.

  Hereinafter, an embodiment of a connection switching device for a measuring device will be described with reference to the accompanying drawings.

  As shown in FIG. 1, the connection switching device 1 as an example of the connection switching device includes, as an example, a chassis 2, a plurality of types of device connector groups (in this example, a measuring device MD <b> 1 that measures by a two-terminal method, Device connector group 5 capable of connecting corresponding measuring device MD1 out of three types of measuring devices MD2, measuring device MD2 measuring by the 4-terminal method and measuring device MD3 measuring by the 4-terminal pair method, and corresponding measuring device MD2 Device connector group 6 that can be connected to the device, and three types of device connector groups that can be connected to the corresponding measurement device MD3, and a shielded measurement cable (for the measurement device MD1) that is connected to the measurement object A measurement cable MC1 to be described later, a measurement cable MC2 to be described later for the measurement apparatus MD2, and a measurement cable MC3 to be described later for the measurement apparatus MD3. Unless otherwise specified, each connector CN1, CN2, CN3 (refer to FIGS. 2 to 4) (hereinafter also referred to as “connector CN”) is connected to each connector 8 (this is also referred to as “measurement cable MC”). In the example, as an example, one multi-pin connector), a scanner unit 9 and a connection / disconnection switch 10 are provided.

  In this example, as an example of terminals (terminals for connection) constituting the terminal group for devices and the terminal group for cables, a description will be given with a connector in which the terminals are housed in a synthetic resin housing. The connection terminal is not limited to such a connector form, and may be a form in which the core wires of the cable are tightened by being screwed one by one, or a banana plug form.

  As an example, the chassis 2 is formed in a rectangular parallelepiped box using a conductive material such as a metal material. The chassis 2 is grounded via a grounding cable (not shown) connected to a grounding connection terminal (not shown), and is regulated to the ground potential. In FIG. 1 to FIG. 5, grounding is indicated by a reference symbol G.

As shown in FIG. 2, the device connector group 5 is for voltage detection for connecting a measuring device MD1 (a measuring device having a pair of detection terminals TP1 and TP2 and a guard terminal TPG) that measures by the two-terminal method. First connector 5 _H (hereinafter also referred to as connector 5 _H ), voltage detection second connector 5 _L (hereinafter also referred to as connector 5 _L ) and guard connector 5 _G (grounding connector as a grounding terminal. It is constituted by also referred) and the connector 5 _G.

Specifically, connection to connect the measuring device MD1 in switching device 1, as shown in FIG. 2, the detection terminals TP1 measuring apparatus MD1 to the connector 5 _H device connector group 5, also the connector 5 _L in through the respective detecting terminals TP2 measuring apparatus MD1 for example a coaxial cable connected, and the connector 5 _G connecting the guard terminal TPG measuring device MD1 via a single core cables. The measuring device MD1 includes a signal source SG, a voltmeter VM, and an ammeter IM connected as shown in FIG. For this reason, in the measuring apparatus MD1, the pair of detection terminals TP1 and TP2 also function as signal output terminals. Accordingly, the pair of voltage detection connectors 5 _H and 5 _L of the device connector group 5 also function as signal input connectors.

As shown in FIG. 3, the device connector group 6 includes a measuring device MD2 (a pair of detection terminals TP1, 1) that measures by a four-terminal method (specifically, a shielded four-terminal method (also referred to as a five-terminal method)). Third connector 6 _AH for voltage detection (hereinafter also referred to as connector 6 _AH ) for connecting TP2, a pair of signal output terminals TP3, TP4, and a guard terminal TPG), a fourth for voltage detection Connector 6 _AL (hereinafter also referred to as connector 6 _AL ), signal output first connector 6 _BH (hereinafter also referred to as connector 6 _BH ), signal output second connector 6 _BL (hereinafter also referred to as connector 6 _BL ) and connector It is composed of _5G . That is, the device connector group 6 is configured to share the connector _5G with the device connector group 5.

More specifically, when connecting the measuring apparatus MD2 to connection switching unit 1, as shown in FIG. 3, the detection terminal TP1 measuring apparatus MD2 to the connector 6 _AH device connector group 6, also the connector 6 the detection terminal TP2 measuring apparatus MD2 to _AL, also a signal output terminal TP3 of the measuring apparatus MD2 to the connector _{6 BH,} also the connector _{6 BL} signal output terminals TP4 measuring apparatus MD2 via respective example coaxial cable connect and the connector 5 _G connecting the guard terminal TPG measuring apparatus MD2 via a single core cables. Further, the measuring device MD2 includes a signal source SG, a voltmeter VM, and an ammeter IM connected as shown in FIG.

As shown in FIG. 4, the device connector group 7 includes a measuring device MD3 (a pair of detection terminals TP1 and TP2, a pair of signal output terminals TP3 and TP4, a pair of current detection terminals) that measure by a four-terminal pair method. A pair of connectors 6 _AH , 6 _AL , a pair of connectors 6 _BH , 6 _BL , a first connector for current detection 7 _H (hereinafter referred to as a connector 7) for connecting TP 5, TP 6 and a measuring device having guard terminals TPG). _H ), a current detection second connector 7 _L (hereinafter also referred to as a connector 7 _L ), and a connector 5 _G. That is, the device connector group 7 is configured to share the connector 5 _G with the device connector groups 5 and 6 and share the connectors 6 _AH , 6 _AL , 6 _BH , and 6 _BL with the device connector group 6. .

More specifically, when connecting the measuring apparatus MD3 to connection switching unit 1, as shown in FIG. 4, the detection terminal TP1 measuring apparatus MD3 to the connector 6 _AH device connector group 6, also the connector 6 the detection terminal TP2 measuring apparatus MD3 to _AL, also measures the signal output terminal TP3 of the connector _{6 BH} to the measuring apparatus MD3, also a signal output terminal TP4 of the connector _{6 BL} to the measuring apparatus MD3, also in the connector _{7 H} a current detection terminal TP5 apparatus MD3, also the connector ₇ the current detecting terminal TP6 measuring apparatus MD3 is connected for example via a coaxial cable _L, and and the connector ₅ single guard terminal TPG measuring apparatus MD3 is the _G Connect via a core cable. Further, the measuring device MD3 includes a signal source SG, a voltmeter VM, and an ammeter IM connected as shown in FIG.

In the connection switching device 1 of this example, the connector 5 _H constituting the device connector group 5 for connecting the measuring device MD1 so that either the measuring device MD2 or MD3 and the measuring device MD1 can be connected simultaneously. , 5 _L is provided separately from the connectors 6 _AH , 6 _AL constituting the device connector groups 6, 7 for connecting the measuring devices MD 2, MD 3, but the measuring devices MD 1, MD 2, MD 3 are used. when good configuration for connecting only one of which is selected from the connector 5 _H, 5 _L and a set of switches SW1 to be described later, and the connector 6 _AH, 6 _AL and one set of the set of switches SW2 to be described later It can also be set as the structure which omits. In this configuration, the detection terminals TP1, TP2 of the respective measuring devices MD1, MD2, MD3 is connected to the connector left of the connectors ₅ H, _{5 L} and the connector _{6 AH, 6 AL.} Hereinafter, when the detection terminals TP1 and TP2, the signal output terminals TP3 and TP4, the current detection terminals TP5 and TP6, and the guard terminal TPG are not distinguished, they are also simply referred to as terminals TP.

  In this connection switching device 1, the maximum number of terminals (six measuring devices MD3) excluding the guard terminal TPG among the terminals TP of the measuring devices MD1 to MD3 connected to the connection switching device 1 is one measurement object. This is the number of wires for one channel connected to the measurement object in order to measure the physical quantity. Accordingly, the cable connector 8 to which the measurement cable MC that can simultaneously connect n measurement objects (that is, the measurement cable MC for n channels (CH1 to CHn as shown in FIG. 1)) can be connected to 6 × It has n terminals and one terminal (one shield terminal SH connected to the shield of the measurement cable MC). The cable connector 8 is composed of a D-sub connector which is an example of a multi-pin connector.

Further, the cable connector 8 includes a measurement cable MC1 having the configuration shown in FIG. 2 for the measurement device MD1, a measurement cable MC2 having the configuration shown in FIG. 3 for the measurement device MD2, and a configuration shown in FIG. 4 for the measurement device MD3. One measurement cable MC selected from among the measurement cables MC3 is connected. In this case, the measurement cable MC1 is a measurement cable corresponding to the two-terminal method, and each channel CH1, of the cable connector 8 in one connector CN1 attached to the measurement cable MC1 and connected to the cable connector 8 is used. CH2, · · ·, total 2 × n pieces connected to (pins (terminals) which can be connected to the connector via the scanner unit 9 as described later ₅ H, _{5 L)} 1 pin and second pin of CHn Wiring (2 × n wirings) is applied to the pins of the connector, and a shield (for example, 2 × n wirings constituting the measurement cable MC1) is connected to one pin (terminal) connected to the shield terminal in the connector CN1. A shielding conductor such as a copper braided wire covering the periphery of the wiring) is connected.

The measurement cable MC2 is a measurement cable corresponding to the four-terminal method, and each channel CH1, CH2 of the cable connector 8 in one connector CN2 attached to the measurement cable MC2 and connected to the cable connector 8 is used. connected., four pin from pin 1 of CHn (described later way connector ₆ via the scanner unit 9 _AH, 6 _AL, 6 _BH, can be connected to _{6 BL} pin (terminal)) 4 × n pins are wired (4 × n wires), and one pin (terminal) connected to the shield terminal in the connector CN2 is shielded (for example, the measurement cable MC2 is configured. Shield conductors such as copper braided wires covering the periphery of 2 × n wires to be connected are connected.

The measurement cable MC3 is a measurement cable corresponding to the four-terminal pair method, and each channel CH1 of the cable connector 8 in one connector CN3 attached to the measurement cable MC3 and connected to the cable connector 8 is used. CH2, · · ·, can be connected from pin 1 of CHn pin 6 (connector ₆ via the scanner unit 9 as described later _{AH, 6 AL, 6 BH,} 6 BL, 7 H, 7 L pin A total of 6 × n pins connected to (terminal)) are wired (6 × n wires) and shielded on one pin (terminal) connected to the shield terminal in the connector CN3. For example, a shield conductor such as a copper braided wire covering the periphery of 6 × n wires constituting the measurement cable MC3 is connected.

The scanner unit 9 includes a plurality of switches, and is disposed between the device connector groups 5, 6 and 7 and the cable connector 8. In the scanner unit 9, one measurement method is selected from a plurality of measurement methods (in this example, a two-terminal method, a four-terminal method, and a four-terminal pair method) used in measurement by the measuring devices MD1 to MD3. When one channel CH is selected from a plurality of channels (n, n is an integer equal to or greater than 2) CH1, CH2,..., CHn, each of the device connector groups 5, 6, 7 is selected. So that the device connector group corresponding to one selected measurement method and the pins (terminals) of the cable connector 8 corresponding to one selected channel CH can be connected to each other. A plurality of switches can be switched on and off. In addition to this, in this connection form, the scanner unit 9 includes a shield terminal to which the shield of the measurement cable MC is connected in each pin of the connector _5G and the cable connector 8 included in the device connector group. The on / off states of a plurality of switches are also switchable so that they are connected in a state where they are connected to SH.

Specifically, as shown in FIG. 1, the scanner unit 9 is a two-pole single-throw type in which one contact (upper contact in the figure) of the two switch circuits is connected to the connectors 5 _H and 5 _L. the switch SW1, and one contact (the upper side of the contact in the drawing) connector 6 _AH, 2 are connected to 6 _AL pole single-throw switch SW2 in the two switching circuits, the one in the two switching circuits contacts and 2 pole single-throw switch SW3 connected to the (upper contacts in the drawing) connector 6 _BH, 6 _BL, one contact in the two switching circuits (upper contacts in the drawing) connector and a 7 _{H, 7} of two connected pole single throw the _L switch SW4.

Also, the scanner unit 9, as shown in FIG. 1, the other contact (same in the switch circuit connected to the connector 5 _H of the two switching circuits of the switch SW1 (left side of the switch circuit in the figure) two switching circuits (other contact on the left side of the switch circuit) in the figure connected to the connector 6 _AH of the switch circuit of the lower contact) and the switch SW2 in FIG. (a lower side in FIG. one detection line Lv1 contacts) are connected (one voltage detection line), and a switch circuit connected to the connector 5 _L of the two switching circuits of the switch SW1 (the right side of the switch circuit in the figure) other contact on the right side of the switch in the switching circuit (the diagram (lower side of the contact in the drawing) and is connected to the connector 6 _AL of the two switching circuits of the switch SW2 The other detection line Lv2 (the other voltage detection line) to which the other contact (the lower contact in the figure) in the circuit is connected is provided.

Also, the scanner unit 9, as shown in FIG. 1, the other contact (same in the switch circuit connected to the connector 6 _BH of the two switching circuits of the switch SW3 (left switch circuit in the drawing) one signal output line Lo1 which is connected to the lower contacts) in the drawing, and in the switch circuit (right switch circuit in the figure) connected to the connector 6 _BL of the two switching circuits of the switch SW3 The other signal output line Lo2 connected to the other contact (the lower contact in the figure) is provided. Also, the scanner unit 9, the lower contacts in the two switch contacts (FIG connector 7 switching circuit connected to the _H in the other in the (left switch circuit in the figure) of the circuit of the switch SW4 one of the current detection line connected to) Li1, and in the two switches switching circuits (other contact (FIG on the right of the switch circuit) in the figure connected to the connector 7 _L of the circuit of the switch SW4 The other current detection line Li2 connected to the lower contact) is disposed.

  In addition, as shown in FIG. 1, the scanner unit 9 detects one contact (the right contact in the figure) of one of the two switch circuits (the upper switch circuit in the figure). The other contact (the left contact in the figure) is connected to the line Lv1 and connected to the first pin in the corresponding channel CH of the cable connector 8 and the other switch circuit of the two switch circuits. One contact (the right contact in the figure) in (the lower switch circuit in the figure) is connected to the detection line Lv2, and the other contact (the left contact in the figure) is the cable connector 8 As many as two channels are provided with two-pole single-throw type switches SWv connected to the second pin in the corresponding channel CH. Hereinafter, these switches SWv in the channels CH1 to CHn are also referred to as voltage detection switch groups.

  As shown in FIG. 1, the scanner unit 9 has one contact point (right contact point in the figure) in one switch circuit (upper switch circuit in the figure) as a signal. The other contact (the contact on the left side in the figure) is connected to the output line Lo1 and connected to the third pin in the corresponding channel CH of the cable connector 8 and the other switch of the two switch circuits. One contact (the right contact in the figure) in the circuit (the lower switch circuit in the figure) is connected to the signal output line Lo2, and the other contact (the left contact in the figure) is for the cable. Two pole single throw type switches SWo connected to the fourth pin in the corresponding channel CH of the connector 8 are provided for the number of channels. Hereinafter, these switches SWo in the respective channels CH1 to CHn are also referred to as output switch groups.

  Further, as shown in FIG. 1, the scanner unit 9 has one contact point (the right contact point in the figure) in one of the two switch circuits (the upper switch circuit in the figure) as a current. The other contact (the contact on the left side in the figure) is connected to the detection line Li1 and connected to the fifth pin in the corresponding channel CH of the cable connector 8 and the other switch of the two switch circuits. One contact (the right contact in the figure) in the circuit (the lower switch circuit in the figure) is connected to the current detection line Li2, and the other contact (the left contact in the figure) is for the cable. Two pole single throw type switches SWi connected to the 6th pin in the corresponding channel CH of the connector 8 are provided for the number of channels. Hereinafter, these switches SWi in the channels CH1 to CHn are also referred to as current detection switch groups.

The scanner unit 9, as shown in FIG. 1, one contact (upper contacts in the drawing) is connected to the connector 5 _H, and the other contact (lower contact in the drawing) cable 1-pole single-throw switch SWs1 connected to the shield terminal SH of the connector 8 is provided. The scanner unit 9, as shown in the figure, one of the contacts (upper contacts in the drawing) is connected to the connector 5 _G, and (lower contacts in the drawing) the other contact cable 1-pole single-throw switch SWs2 connected to the shield terminal SH of the connector 8 is provided.

  In the connection switching device 1 of this example, the above-described switches SW1 to SW4, n switches SWv, n switches SWo, n switches SWi, and switches SWs1 and SWs2 constituting the scanner unit 9 are, for example, relays Or a semiconductor switch element such as a transistor (bipolar transistor or field effect transistor), and its on / off switching control (switching control between connected state and disconnected state) is arranged separately from the connection switching device 1. It is configured to be executed independently based on an individual control signal Sco output from a control device 11 such as a computer provided.

  As shown in FIG. 1, the contact switch 10 has one contact (the right contact in FIG. 1) connected to the chassis 2 (that is, connected to the ground G) and the other contact (shown in FIG. 1). The contact on the left side is a single-pole single-throw switch connected to the shield terminal SH of the cable connector 8. In the connection switching device 1 of this example, the connection / disconnection switch 10 is configured by a manual switch disposed on the surface of the chassis 2 as an example.

  Next, the operation of the connection switching device 1 will be described with reference to the drawings. In the following, the measurement device MD1 and the measurement cable MC1 are connected to the connection switching device 1, and the physical quantity of the measurement target 21 (in this example, the resistance value of the resistor as an example. The same applies to the following embodiments). An embodiment for measuring by the two-terminal method, an embodiment for measuring the physical quantity (resistance value) of the measuring object 21 by the four-terminal method by connecting the measuring device MD2 and the measurement cable MC2 to the connection switching device 1, and The measurement device MD3 and the measurement cable MC3 are connected to the connection switching device 1, and the physical quantity (resistance value) of the measurement target 21 is divided into the four-terminal pair method, and the connection in each embodiment The operation of the switching device 1 will be described.

  First, with reference to FIG. 2, the operation of the connection switching device 1 when measuring the physical quantity (resistance value) of the measurement target 21 by the two-terminal method will be described. In this case, as a pre-processing for measurement, the measurer first performs an operation on the connection / disconnection switch 10 to shift to the ON state. Accordingly, the shield terminal SH of the cable connector 8 (the terminal to which the shield of the measurement cable MC1 is connected when the measurement cable MC1 is connected to the connection switching device 1) and the inside of the chassis 2 connected to the shield terminal SH. Are connected to the chassis 2 (that is, grounded).

Further, measuring person, as pretreatment of the measurement, then, as shown in FIG. 2, the detection terminals TP1 to the connector 5 _H equipment connector unit 5 of the measurement device MD1, also detection terminal of the measurement device MD1 TP2 was connected via a respective coaxial cable to the connector 5 _L, and a guard terminal TPG measuring device MD1 connected via a Tanshin cable to the connector 5 _G. In addition, the connector CN1 of the measurement cable MC1 is connected to the cable connector 8, and the channel CH to be used among the channels CH of the measurement cable MC1 (in this example, all of the channels CH1 to CHn as shown in the figure). ) Connect the measuring object 21. Further, the control device 11 can acquire the voltage data Dv indicating the voltage value of the voltage across the measurement target 21 measured by the measurement device MD1 and the current data Di indicating the current value of the current flowing through the measurement target 21. The measuring device MD1 is connected to the control device 11.

  When the connector CN1 is connected to the cable connector 8, the shield of the measurement cable MC1 in an unstable state is connected to the shield terminal SH of the cable connector 8 and the shield terminal SH. In some cases, noise such as overvoltage or overcurrent is likely to be generated in the internal wiring of the chassis 2, but the shield terminal SH of the cable connector 8 is grounded as described above. Generation of noise can be prevented in advance, and each switch constituting the scanner unit 9 can be protected.

  In addition, after the measurement device MD1 and the measurement cable MC1 are connected to the connection switching device 1 in this way, the measurer performs an operation on the connection switch 10 at the end of the measurement preprocessing, and turns off. Transition to the state. As a result, the shield terminal SH and the like of the cable connector 8 are disconnected from the chassis 2 and the grounding is released.

  Next, the measurer performs an operation on the control device 11 (an operation on an input unit (not shown) such as a keyboard or an operation panel provided in the control device 11) and is connected to each channel CH of the measurement cable MC1. An instruction to measure the resistance values of the n measuring objects 21 by the two-terminal method is input to the control device 11.

  Thereby, as shown in FIG. 2, the control device 11 first shifts only the switch SW1 to the on state for each of the switches SW1 to SW4, and sets only the switch SWs2 to the on state for the switches SWs1 and SWs2. A control signal Sco for shifting (a signal for selecting the two-terminal method as a measurement method) is output to the connection switching device 1. Thereby, the connection switching device 1 connects the detection terminal TP1 of the measuring device MD1 to one detection line Lv1, connects the detection terminal TP2 to the other detection line Lv2, and connects the guard terminal TPG to the internal wiring (shield). Wiring connected to the terminal SH) and the shield terminal SH of the cable connector 8 are connected to the shield of the measurement cable MC1.

  Next, the control device 11 turns on the switches SWv connected to the first pin and the second pin in each of the channels CH1 to CHn of the cable connector 8, for example, one by one from the channel CH1 side in order for a predetermined time. A control signal Sco (signal for selecting a channel CH) for shifting is output to the connection switching device 1. Thereby, the connection switching device 1 connects the n measurement objects 21 one by one in order to the pair of detection lines Lv1 and Lv2 through the switch SWv for a predetermined time (that is, the pair of detection lines Lv1 and Lv2 through the switch SW1). (Connected to the detection terminals TP1, TP2 of the measuring device MD1 connected to the detection lines Lv1, Lv2).

  The measuring device MD1 supplies a signal for measurement from the signal source SG to each measuring object 21 connected for a predetermined time in this way, and the voltage value of the voltage across the measuring object 21 at the time of supplying this signal. Is measured by the voltmeter VM, and voltage data Dv indicating this voltage value is output to the control device 11, and the current value of the current flowing through the measuring object 21 when this signal is supplied is measured by the ammeter IM. Is output to the control device 11. The control device 11 is one measurement target actually connected to the measurement device MD1 via the connection switching device 1 among the n measurement targets 21 connected to the channels CH1 to CHn of the cable connector 8. Each time the voltage data Dv and current data Di for 21 are acquired, a resistance value is calculated for the one measurement object 21 connected based on the acquired data Dv and Di, and the one measurement object 21 is obtained. It memorizes corresponding to.

  When the control device 11 measures and stores all the resistance values for the n measurement objects 21, all the switches (the above-described switches SW1 to SW4, n switches SWv, n switches) constituting the scanner unit 9 are stored. The control signal Sco for shifting the switch SWo, the n switches SWi, and the switches SWs1, SWs2) to the OFF state is output to the connection switching device 1. Thereby, the measurement process by the two-terminal method of the resistance value for the n measurement objects 21 is completed. Thereafter, when the measurer continuously measures the resistance value of the new n measurement objects 21 by the two-terminal method, the measurer replaces the n measurement objects 21 that have been measured with the new n measurement objects 21. Connect to the measurement cable MC1 and repeat the above process. On the other hand, the measurer removes the measurement cable MC1 and the measurement device MD1 from the connection switching device 1 when finishing the measurement by the two-terminal method.

  Next, the operation of the connection switching device 1 when measuring the physical quantity (resistance value) of the measurement target 21 by the four-terminal method will be described with reference to FIG. In this case, as a pre-processing for measurement, the measurer first performs an operation on the connection / disconnection switch 10 to shift to the ON state. Thus, the shield terminal SH of the cable connector 8 (the terminal to which the shield of the measurement cable MC2 is connected when the measurement cable MC2 is connected to the connection switching device 1) and the inside of the chassis 2 connected to the shield terminal SH. Are connected to the chassis 2 (that is, grounded).

Further, measuring person, as pretreatment of the measurement, then, as shown in FIG. 3, the detecting terminal TP1 to the connector 6 _AH device connector group 6 of the measurement apparatus MD2, also detection terminal of the measuring apparatus MD2 TP2 to the connector _{6 AL,} also measuring apparatus MD2 a signal output terminal TP3 to the connector _{6 BH} device connector group 6, also through the respective signal output terminals TP4 measuring apparatus MD2 to the connector _{6 BL} coaxial cable connect, and a guard terminal TPG measuring apparatus MD2 connected via a Tanshin cable to the connector 5 _G. In addition, the connector CN2 of the measurement cable MC2 is connected to the cable connector 8, and the channel CH to be used among the channels CH of the measurement cable MC2 (in this example, all of the channels CH1 to CHn as shown in the figure). ) Connect the measuring object 21. Further, the measuring device MD2 is connected to the control device 11 so that the control device 11 can acquire the voltage data Dv and the current data Di of the measurement object 21 measured by the measuring device MD2.

  When the connector CN2 is connected to the cable connector 8, it is connected to the shield terminal SH of the cable connector 8 and the shield terminal SH in the same manner as the connection of the connector CN1 to the cable connector 8. Although noise may be generated in the internal wiring in the chassis 2, since the shield terminal SH and the like of the cable connector 8 are grounded, it is possible to prevent the noise from occurring and the scanner. It is possible to protect each switch constituting the unit 9.

  Further, after the measurement device MD2 and the measurement cable MC2 are connected to the connection switching device 1 in this way, the measurer performs an operation on the connection switch 10 as the last of the measurement preprocessing, and turns off. Transition to the state. Thereby, the grounding of the shield terminal SH and the like of the cable connector 8 is released.

  Next, the measurer performs an operation on the control device 11 and inputs an instruction to the control device 11 to measure the resistance values of the n measurement objects 21 connected to each channel CH of the measurement cable MC2 by the four-terminal method. To do.

  As a result, the control device 11 first shifts only the switches SW2 and SW3 to the on state for each of the switches SW1 to SW4 and turns on only the switch SWs2 for the switches SWs1 and SWs2, as shown in FIG. A control signal Sco (a signal for selecting the four-terminal method as a measurement method) for shifting to the state is output to the connection switching device 1. Thereby, the connection switching device 1 connects the detection terminal TP1 of the measuring device MD2 to one detection line Lv1, connects the detection terminal TP2 to the other detection line Lv2, and connects the signal output terminal TP3 to one signal. Connected to the output line Lo1, the signal output terminal TP4 to the other signal output line Lo2, and the guard terminal TPG to the internal wiring (wiring connected to the shield terminal SH) and the shield terminal SH of the cable connector 8 To the shield of the measurement cable MC2.

  Next, the control device 11 sets a set of the switch SWv connected to the first pin and the second pin in each channel CH1 to CHn of the cable connector 8 and the switch SWo connected to the third pin and the fourth pin. For example, a control signal Sco (a signal for selecting a channel CH) for shifting to the ON state for a predetermined time in order one by one from the channel CH1 side is output to the connection switching device 1. Thereby, the connection switching device 1 connects the n measurement objects 21 one by one to the pair of detection lines Lv1 and Lv2 through the switch SWv in order for a predetermined time (that is, the pair of detection objects Lv1 and Lv2 through the switch SW2). Are connected to the detection terminals TP1 and TP2 of the measuring device MD2 connected to the detection lines Lv1 and Lv2) and to the pair of signal output lines Lo1 and Lo2 via the switch SWo (that is, via the switch SW3). The signal output terminals TP3 and TP4 of the measuring device MD2 connected to the pair of signal output lines Lo1 and Lo2 are connected).

  The measuring device MD2 supplies a signal for measurement from the signal source SG to each measuring object 21 connected for a predetermined time in this way, and the voltage value of the voltage across the measuring object 21 at the time of supplying this signal. Is measured by the voltmeter VM, and voltage data Dv indicating this voltage value is output to the control device 11, and the current value of the current flowing through the measuring object 21 when this signal is supplied is measured by the ammeter IM. Is output to the control device 11. The control device 11 is one measurement object actually connected to the measurement device MD2 via the connection switching device 1 among the n measurement objects 21 connected to the channels CH1 to CHn of the cable connector 8. Each time the voltage data Dv and current data Di for 21 are acquired, a resistance value is calculated for the one measurement object 21 connected based on the acquired data Dv and Di, and the one measurement object 21 is obtained. It memorizes corresponding to.

  When the control device 11 measures and stores all the resistance values for the n measurement objects 21, all the switches (the above-described switches SW1 to SW4, n switches SWv, n switches) constituting the scanner unit 9 are stored. The control signal Sco for shifting the switch SWo, the n switches SWi, and the switches SWs1, SWs2) to the OFF state is output to the connection switching device 1. Thereby, the measurement process by the 4-terminal method of the resistance value for the n measurement objects 21 is completed. Thereafter, when the measurer continues to measure the resistance values of the new n measurement objects 21 by the four-terminal method, the measurer replaces the n measurement objects 21 that have already been measured with the new n measurement objects 21. Connect to the measurement cable MC2 and repeat the above process. On the other hand, the measurer removes the measurement cable MC2 and the measurement device MD2 from the connection switching device 1 when ending the measurement by the four-terminal method.

Next, with reference to FIG. 4, the operation of the connection switching device 1 when measuring the physical quantity (resistance value) of the measurement target 21 by the four-terminal pair method will be described. In this case, as a pre-processing for measurement, the measurer first performs an operation on the connection / disconnection switch 10 to shift to the ON state.
Accordingly, the shield terminal SH of the cable connector 8 (the terminal to which the shield of the measurement cable MC3 is connected when the measurement cable MC3 is connected to the connection switching device 1) and the inside of the chassis 2 connected to the shield terminal SH. Are connected to the chassis 2 (that is, grounded).

Further, measuring person, as pretreatment of the measurement, then, as shown in FIG. 4, the detection terminal TP1 to the connector 6 _AH device connector group 7 of the measurement apparatus MD3, also detection terminal of the measuring apparatus MD3 TP2 to the connector _{6 AL} device connector group 7, also measuring device a signal output terminal TP3 to the connector _{6 BH} device connector group 7 of MD3 and device connector group signal output terminals TP4 measuring apparatus MD3 7 of the connector _{6 BL} and the current detecting terminal TP5 measuring apparatus MD3 to the connector _{7 H} device connector group 7, also the current detecting terminal TP6 measuring apparatus MD3 to the connector _{7 L} of device connector group 7 each connected via a coaxial cable, and a guard terminal TPG measuring apparatus MD3 is connected via a Tanshin cable to the connector 5 _G. Further, the connector CN3 of the measurement cable MC3 is connected to the cable connector 8. In addition, the measurement target 21 is connected to the channel CH to be used among the channels CH of the measurement cable MC3 (in this example, to all of the channels CH1 to CHn as shown in the figure), and a return path is formed. The conductor 22 is connected. Further, the measurement device MD3 is connected to the control device 11 so that the control device 11 can acquire the voltage data Dv and current data Di of the measurement target 21 measured by the measurement device MD3.

  When the connector CN3 is connected to the cable connector 8, it is connected to the shield terminal SH of the cable connector 8 and the shield terminal SH in the same manner as the connection of the connector CN1 to the cable connector 8. Although noise may be generated in the internal wiring in the chassis 2, since the shield terminal SH and the like of the cable connector 8 are grounded, it is possible to prevent the noise from occurring and the scanner. It is possible to protect each switch constituting the unit 9.

  Further, after the measurement device MD3 and the measurement cable MC3 are connected to the connection switching device 1 in this way, the measurer performs an operation on the connection / disconnection switch 10 at the end of the measurement preprocessing, and turns off the measurement device MD3 and the measurement cable MC3. Transition to the state. Thereby, the grounding of the shield terminal SH and the like of the cable connector 8 is released.

  Next, the measurer performs an operation on the control device 11 and instructs the control device 11 to measure the resistance values of the n measurement objects 21 connected to the respective channels CH of the measurement cable MC3 by the four-terminal pair method. input.

  Thereby, as shown in FIG. 4, the control device 11 first shifts only the switches SW2, SW3, and SW4 to the on state for each of the switches SW1 to SW4, and only the switch SWs2 for the switches SWs1 and SWs2. A control signal Sco (a signal for selecting the four-terminal pair method as a measurement method) is output to the connection switching device 1. Thereby, the connection switching device 1 connects the detection terminal TP1 of the measuring device MD3 to one detection line Lv1, connects the detection terminal TP2 to the other detection line Lv2, and connects the signal output terminal TP3 to one signal. Connected to the output line Lo1, the signal output terminal TP4 is connected to the other signal output line Lo2, the current detection terminal TP5 is connected to one current detection line Li1, and the current detection terminal TP6 is connected to the other current detection line. The guard terminal TPG is connected to Li2 and connected to the shield of the measurement cable MC2 via the internal wiring (wiring connected to the shield terminal SH) and the shield terminal SH of the cable connector 8.

  Next, the control device 11 switches the switch SWv connected to the first pin and the second pin in each channel CH1 to CHn of the cable connector 8 and the switch SWo connected to the third pin and the fourth pin, and the fifth pin. And a control signal Sco (a signal for selecting a channel CH) for switching the set of the switches SWi connected to the No. 6 pin, for example, one by one from the channel CH1 side in order for a predetermined time. Output to the switching device 1. Thereby, the connection switching device 1 connects the n measurement objects 21 one by one in order to the pair of detection lines Lv1 and Lv2 through the switch SWv for a predetermined time (that is, the pair of detection objects Lv1 and Lv2 through the switch SW2). Connected to the detection terminals TP1 and TP2 of the measuring device MD3 connected to the detection lines Lv1 and Lv2), and connected to the pair of signal output lines Lo1 and Lo2 via the switch SWo (that is, via the switch SW3). Connected to the signal output terminals TP3 and TP4 of the measuring device MD3 connected to the pair of signal output lines Lo1 and Lo2, and connected to the pair of current detection lines Li1 and Li2 via the switch SWi (that is, A current detection terminal T of the measuring device MD3 connected to the pair of current detection lines Li1, Li2 via the switch SW4. 5, connected to the TP6).

  The measuring device MD3 supplies a signal for measurement from the signal source SG to each measuring object 21 connected for a predetermined time in this way, and the voltage value of the voltage across the measuring object 21 at the time of supplying this signal. Is measured by the voltmeter VM, and voltage data Dv indicating this voltage value is output to the control device 11, and the current value of the current flowing through the measuring object 21 when this signal is supplied is measured by the ammeter IM. Is output to the control device 11. The control device 11 is one measurement object actually connected to the measurement device MD3 via the connection switching device 1 among the n measurement objects 21 connected to the channels CH1 to CHn of the cable connector 8. Each time the voltage data Dv and current data Di for 21 are acquired, a resistance value is calculated for the one measurement object 21 connected based on the acquired data Dv and Di, and the one measurement object 21 is obtained. It memorizes corresponding to.

  When the control device 11 measures and stores all the resistance values for the n measurement objects 21, all the switches (the above-described switches SW1 to SW4, n switches SWv, n switches) constituting the scanner unit 9 are stored. The control signal Sco for shifting the switch SWo, the n switches SWi, and the switches SWs1, SWs2) to the OFF state is output to the connection switching device 1. Thereby, the measurement process by the four-terminal pair method of the resistance values for the n measurement objects 21 is completed. Thereafter, when the measurer continuously measures the resistance value of the new n measurement objects 21 by the four-terminal pair method, the measurer replaces the n measurement objects 21 that have been measured with the new n measurement objects 21. Is connected to the measurement cable MC3 and the above processing is repeated. On the other hand, the measurer removes the measurement cable MC3 and the measurement device MD3 from the connection switching device 1 when ending the measurement by the four-terminal pair method.

Thus, in this connection switching device 1, the physical quantity (resistance value in this example) of the measurement target 21 is selected from the first measurement method (in this example, one of the two-terminal method, the four-terminal method, and the four-terminal pair method). 1) a first device connector group (device connector groups 5 to 7) that can be connected to a first measurement device (a measurement device that is measured by the first measurement method among the measurement devices MD1 to MD3). A second group of measurement methods (in this example, a two-terminal method) that is different from the first measurement method in terms of the physical quantity (in this example, the resistance value) of the measurement target 21 and a connector group to which a measurement device that measures the first measurement method is connected. A second measuring device (a second measuring method among the measuring devices MD1 to MD3) that performs measurement with one of the remaining two except for any one of the four-terminal method and the four-terminal pair method. Connector group for second device (for device) that can be connected to the measuring device to be measured The connector group to which the measuring device to be measured by the second measuring method among the nectar groups 5 to 7 is connected) and the physical quantity (resistance value in this example) of the measuring object 21 is the first measuring method and the second measuring method. Third measurement measured by a different third measurement method (in this example, one of the two-terminal method, the four-terminal method, and the four-terminal pair method other than the first measurement method and the second measurement method) 3rd device connector group (measuring device measured with the 3rd measuring method among device connector groups 5-7) which can connect a device (measuring device measured with the 3rd measuring method among measuring devices MD1-MD3) Connector group for a plurality of channels (channels CH1 to CHn) to which measurement cables MC1 to MC3 (measurement cables with shields) connected to the measurement target 21 can be connected, and control signals When one measurement method is selected from the first to third measurement methods by co and one channel CH is selected from the n channels CH, an apparatus corresponding to the selected one measurement method Connector group (one of the device connector groups 5 to 7) and each terminal of the cable connector 8 corresponding to one selected channel CH are guard connectors (grounding) included in the device connector group. Connector) 5 _G and shield terminal SH to which the shield of the measurement cable (measurement cable corresponding to one measurement method selected from measurement cables MC1 to MC3) included in each terminal of cable connector 8 is connected And a scanner unit 9 that can be switched to a connection form that is connected in a connected state.

  Therefore, according to this connection switching device 1, not only a measuring device of one measuring method and its measuring cable, but also measuring devices of a plurality of different measuring methods (in this example, measuring device MD1, two-terminal method, The measurement device MD3 using the four-terminal method and the measurement device MD3 using the four-terminal-pair measurement device MD3) and a plurality of types of measurement cables corresponding to each of them (in this example, three types of measurement cables MC1 to MC3) Any one set can be selected and connected for use.

  In the connection switching device 1, as described above, a set of the two-terminal method measuring device MD1 and the corresponding measurement cable MC1, a set of the four-terminal method measuring device MD2 and the corresponding measuring cable MC2, and a four-terminal method. It is configured to be able to connect one set selected from the three sets of the pair of the measurement device MD3 and the corresponding measurement cable MC3, but corresponds to the measurement device MD1 of the two-terminal method and the same. The measurement cable MC1 and the four-terminal method measurement device MD2 and the corresponding measurement cable MC2 may be connected to one set selected from the two sets. Of the two sets of the terminal method measuring device MD1 and the corresponding set of measurement cables MC1 and the four-terminal pair measuring device MD3 and the corresponding set of measuring cables MC3 It is possible to connect one set selected from the above, or a set of the 4-terminal method measurement device MD2 and the corresponding measurement cable MC2 and a 4-terminal pair measurement device MD3 and the corresponding measurement. You may comprise so that one set selected from two sets of the set of cable MC3 can be connected.

  Note that some measuring devices that employ the two-terminal method have a configuration in which the ammeter IM is arranged on the ground side, such as the measuring device MD1 shown in FIG. 2, or the measuring device MD4 shown in FIG. As described above, there is a configuration in which the ammeter IM is arranged on the non-grounded side (a measuring device for measuring the resistance value of the measuring object 21 whose one end is grounded as shown in the figure). In the connection switching device 1 of this example, the measurement device MD4 can also be connected and used. Hereinafter, the operation of the connection switching device 1 when the measurement device MD4 is connected and used will be described with reference to FIG.

  First, as a pre-process of measurement, the measurer first performs an operation on the connection / disconnection switch 10 to shift to the on state. Accordingly, the connection of the measurement cable MC1 (measurement cable for the two-terminal method) to the connection switching device 1 is connected to the shield terminal SH of the cable connector 8 connected to the shield of the measurement cable MC1 and the shield terminal SH. Internal wiring in the chassis 2 is connected to the chassis 2 (that is, grounded).

Further, measuring person, as pretreatment of the measurement, then, as shown in FIG. 5, a detection terminal TP1 to the connector 5 _H equipment connector unit 5 of the measuring apparatus MD4, also detection terminal of the measurement device MD1 respectively TP2 to the connector _{5 L} connected through a coaxial cable. In addition, the connector CN1 of the measurement cable MC1 is connected to the cable connector 8, and the channel CH to be used among the channels CH of the measurement cable MC1 (in this example, all of the channels CH1 to CHn as shown in the figure). ) Connect the measuring object 21. In this case, the non-ground side terminal (in this example, the upper terminal in the figure) of the pair of terminals of each measurement object 21 is connected to the detection line Lv1, and the ground side terminal (in this example, in the figure). Each measurement object 21 is connected to each channel CH of the measurement cable MC1 so that the lower terminal is connected to the detection line Lv2. Further, the measurement device MD4 is connected to the control device 11 so that the control device 11 can acquire the voltage data Dv and the current data Di for the measurement object 21 measured by the measurement device MD4.

  When the connector CN1 is connected to the cable connector 8, the shield of the measurement cable MC1 in an unstable state is connected to the shield terminal SH of the cable connector 8 and the shield terminal SH. In some cases, noise such as overvoltage or overcurrent is likely to be generated in the internal wiring of the chassis 2, but as described above, the shield terminal SH of the cable connector 8 is grounded. Generation of noise can be prevented in advance, and each switch constituting the scanner unit 9 can be protected.

  In addition, after the measurement device MD4 and the measurement cable MC1 are connected to the connection switching device 1 in this way, the measurer performs an operation on the connection switch 10 at the end of the measurement preprocessing, and turns off. Transition to the state. Thereby, the grounding of the shield terminal SH and the like of the cable connector 8 is released.

  Next, the measurer performs an operation on the control device 11 (an operation on an input unit (not shown) such as a keyboard or an operation panel provided in the control device 11) and is connected to each channel CH of the measurement cable MC1. An instruction to measure the resistance values of the n measurement objects 21 by the two-terminal method under the condition that one terminal of the measurement object 21 is grounded is input to the control device 11.

  Thereby, as shown in FIG. 5, the control device 11 first shifts only the switch SW1 to the on state for each of the switches SW1 to SW4, and sets only the switch SWs1 to the on state for the switches SWs1 and SWs2. A control signal Sco (a signal for selecting a measurement method for measuring the grounded measurement object 21 using the two-terminal method) is output to the connection switching device 1. Thereby, the connection switching device 1 connects the detection terminal TP1 of the measurement device MD4 to one detection line Lv1, and connects the detection terminal TP2 to the other detection line Lv2. Further, the connection switching device 1 further connects the detection terminal TP1 of the measurement device MD4 to the shield of the measurement cable MC1 via the shield terminal SH of the cable connector 8.

  Next, the control device 11 turns on the switches SWv connected to the first pin and the second pin in each of the channels CH1 to CHn of the cable connector 8, for example, one by one from the channel CH1 side in order for a predetermined time. A control signal Sco (signal for selecting a channel CH) for shifting is output to the connection switching device 1. Thereby, the connection switching device 1 connects the n measurement objects 21 one by one in order to the pair of detection lines Lv1 and Lv2 through the switch SWv for a predetermined time (that is, the pair of detection lines Lv1 and Lv2 through the switch SW1). (Connected to the detection terminals TP1 and TP2 of the measuring device MD4 connected to the detection lines Lv1 and Lv2).

  The measuring device MD4 supplies a signal for measurement from the signal source SG to each measuring object 21 connected for a predetermined time in this way, and the voltage value of the voltage across the measuring object 21 at the time of supplying this signal. Is measured by the voltmeter VM, and voltage data Dv indicating this voltage value is output to the control device 11, and the current value of the current flowing through the measuring object 21 when this signal is supplied is measured by the ammeter IM. Is output to the control device 11. In this case, in the measurement apparatus MD4 in which the ammeter IM is arranged on the non-grounded side, the shield of the measurement cable MC1 is defined to be substantially the same as the electric potential of the ammeter IM in the measurement apparatus MD4. While maintaining the effect, it is possible to measure the voltage value of the voltage across the measurement object 21 and the current value of the current flowing through the measurement object 21.

  The control device 11 is one measurement target actually connected to the measurement device MD1 via the connection switching device 1 among the n measurement targets 21 connected to the channels CH1 to CHn of the cable connector 8. Each time the voltage data Dv and current data Di for 21 are acquired, a resistance value is calculated for the one measurement object 21 connected based on the acquired data Dv and Di, and the one measurement object 21 is obtained. It memorizes corresponding to.

  When the control device 11 measures and stores all the resistance values for the n measurement objects 21, all the switches (the above-described switches SW1 to SW4, n switches SWv, n switches) constituting the scanner unit 9 are stored. The control signal Sco for shifting the switch SWo, the n switches SWi, and the switches SWs1, SWs2) to the OFF state is output to the connection switching device 1. Thereby, the measurement process by the two-terminal method of the resistance value for the n measurement objects 21 is completed.

As described above, in the connection switching device 1, when the selected one measuring method is the two-terminal method, the scanner unit 9 is in the case of the measurement by the two-terminal method using the measuring device MD1 shown in FIG. topology (i.e., topology shield terminal SH is connected to the guard connector 5 _G) in place of the measurement target 21 via a measuring cable MC1 of the terminals of the cable connector 8 as shown in FIG. 5 A plurality of switches (switches SW1 to SW4, n switches SWv, n switches) are connected to the terminal (the first pin of each channel CH in FIG. 5) connected to the shield terminal SH. Switch SWo, n switches SWi, and switches SWs1 and SWs2) can be switched on and off.

  Therefore, according to this connection switching device 1, the measurement device MD4 defines the shield of the measurement cable MC1 to be substantially the same potential as the potential of the ammeter IM in the measurement device MD4 (that is, a state in which a higher shielding effect is maintained). ), The current value of the current flowing through the measurement object 21 having one end grounded can be measured with high accuracy together with the voltage value of the voltage across the measurement object 21. As a result, the control device 11 can measure the measurement object 21. Can be measured with higher accuracy.

  Further, in the connection switching device 1, the scanner unit 9 includes the chassis 2 that is grounded (that is, regulated to the ground potential) and the connection / disconnection switch 10, and this connection is performed when the connection / disconnection switch 10 is in the ON state. The shield terminal SH is connected to the chassis 2 via the disconnect switch 10. On the other hand, the shield terminal SH is disconnected from the chassis 2 when the disconnect switch 10 is off.

  Therefore, according to the connection switching device 1, when the various measurement cables MC1 to MC3 are connected, the shield terminal SH of the cable connector 8 to which the shields of the measurement cables MC1 to MC3 are connected and the shield terminal SH are connected. The internal wiring in the chassis 2 can be grounded via the connection switch 10. Thereby, according to this connection switching device 1, due to the fact that the shields of the measurement cables MC1 to MC3 in an undefined state are connected, the shield terminal SH of the cable connector 8 and the shield terminal SH are connected. It is possible to prevent the occurrence of noise such as overvoltage or overcurrent in the internal wiring in the connected chassis 2, thereby protecting each switch constituting the scanner unit 9. it can.

Further, in the connection switching device 1, via a pair of connectors ₅ H, _{5 L} switch SW1, also through a pair of connectors _{6 AH, 6 AL} switch SW2, respectively connected to a pair of detection lines Lv1, Lv2 It is equipped with the structure. Therefore, according to this connection switching device 1, as shown by a broken line in FIG. 2, the measurement device MD2 of the four-terminal method and the measurement device MD3 of the four-terminal method are connected simultaneously with the measurement device MD1 of the two-terminal method. It can also be used. Thus, according to the connection switching device 1, the measurement cable MC2 is used when the measurement device MD2 is connected simultaneously with the measurement device MD1, and the measurement is performed when the measurement device MD3 is connected simultaneously with the measurement device MD1. By using the cable MC3, the physical quantity (resistance value) of the measurement target 21 connected to each channel CH can be switched between the two-terminal method and the four-terminal method (or the four-terminal pair method) for each measurement target 21. Can be measured.

  Further, although an example in which the resistance value is measured as the physical quantity of the measurement target 21 has been described, the physical quantity is not limited to the resistance value, and may be, for example, impedance, capacitance, inductance, and the like. In addition, the example in which the switches SW1, SW2, SW3, SW4, SWv, SWo, and SWi are configured by one two-pole single-throw switch has been described. You can also.

DESCRIPTION OF SYMBOLS 1 Connection switching device 2 Chassis 5, 6, 7 Device connector group 8 Cable connector 9 Scanner part MC1, MC2, MC3 Measuring cable MD1, MD2, MD3, MD4 Measuring device SH Shield terminal SW1-SW4, SWv, SWo, SWi , SWs1, SWs2 switch

Claims (3)

A first device terminal group to which a first measurement device for measuring a physical quantity to be measured by the first measurement method can be connected;
A second device terminal group to which a second measurement device for measuring the physical quantity of the measurement object by a second measurement method different from the first measurement method can be connected;
A group of cable terminals for a plurality of channels to which a shielded measurement cable connected to the measurement object can be connected,
A plurality of switches and disposed between the first device terminal group and the second device terminal group and the cable terminal group, the first measurement method and the second measurement method. When one measurement method is selected and one channel is selected from the plurality of channels, the selected one of the first device terminal group and the second device terminal group is selected. The device terminal group corresponding to the measurement method and each terminal corresponding to the selected one channel of the cable terminal group include the ground terminal and the cable terminal group included in the device terminal group. Scanner unit capable of switching the on / off states of the plurality of switches to a connection configuration in which the shield terminal to which the shield of the measurement cable is connected is connected And it is connected switching device for measuring apparatus comprising a.   In the scanner unit, when the selected one measurement method is a two-terminal method and one end of the measurement object is grounded, instead of the connection form in which the shield terminal is connected to the ground terminal, The on / off state of the plurality of switches can be switched to a connection configuration in which the shield terminal is connected to a terminal connected to the non-grounded side terminal to be measured via the measurement cable in the cable terminal group. The connection switching device for a measuring device according to claim 1, which is configured as follows.   The scanner unit includes a conductive and grounded chassis, and a connection / disconnection switch. The connection / disconnection switch and the plurality of switches are disposed in the chassis, and the connection / disconnection switch is in an ON state. The connection switching device for a measuring apparatus according to claim 1 or 2, wherein the shield terminal is sometimes connected to the chassis via the connection / disconnection switch, and the shield terminal is disconnected from the chassis when the connection / disconnection switch is off. .

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