JP2018105808A5 - - Google Patents
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- Publication number
- JP2018105808A5 JP2018105808A5 JP2016255065A JP2016255065A JP2018105808A5 JP 2018105808 A5 JP2018105808 A5 JP 2018105808A5 JP 2016255065 A JP2016255065 A JP 2016255065A JP 2016255065 A JP2016255065 A JP 2016255065A JP 2018105808 A5 JP2018105808 A5 JP 2018105808A5
- Authority
- JP
- Japan
- Prior art keywords
- vibrating arm
- sensor element
- hole
- element according
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 12
- 230000000149 penetrating Effects 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims 2
- 230000003247 decreasing Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- 230000000875 corresponding Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016255065A JP6766644B2 (ja) | 2016-12-28 | 2016-12-28 | センサー素子、物理量センサー、電子機器および移動体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016255065A JP6766644B2 (ja) | 2016-12-28 | 2016-12-28 | センサー素子、物理量センサー、電子機器および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018105808A JP2018105808A (ja) | 2018-07-05 |
| JP2018105808A5 true JP2018105808A5 (zh) | 2019-11-21 |
| JP6766644B2 JP6766644B2 (ja) | 2020-10-14 |
Family
ID=62787990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016255065A Active JP6766644B2 (ja) | 2016-12-28 | 2016-12-28 | センサー素子、物理量センサー、電子機器および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6766644B2 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10177528B1 (en) | 2017-07-10 | 2019-01-08 | Ngk Spark Plug Co., Ltd. | Package for mounting light-emitting device |
-
2016
- 2016-12-28 JP JP2016255065A patent/JP6766644B2/ja active Active
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