JP2018099634A - Inkjet coating apparatus, and film pattern formation method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inkjet coating apparatus capable of accurately forming a film pattern so as to satisfy a requirement of edge accuracy, and to provide a film pattern formation method.SOLUTION: An inkjet coating apparatus includes: a droplet unit which discharges droplet onto a base material while moving relatively with respect to a base material; and a UV lamp unit which irradiates a coating film formed by the droplet unit on the base material with UV light while moving relatively with respect to the base material, where the droplet unit has such a shape as to extend in one direction to a coating width direction perpendicular to the movement direction with respect to the base material, the UV lamp unit has such a shape as to extend in one direction so that the irradiation range includes a coating range of the coating width direction of the droplet unit, and a light source is provided with an LED lighting.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an inkjet coating apparatus capable of forming a film pattern with high accuracy even with a UV curable material having high fluidity, and a film pattern forming method.

  Various types of coating films (called film patterns) such as lines and rectangles on substrates such as glass and films, for example, wiring patterns on wiring substrates (base materials) such as printed boards and package substrates, power semiconductors The insulating film pattern is formed by an inkjet coating apparatus (see, for example, Patent Document 1).

  As shown in FIG. 9, the ink jet coating apparatus includes a stage 100 on which the substrate W is placed and a droplet unit 101 that ejects droplets, and droplets are applied to the film formation region 103 on the substrate W. A film pattern is formed by discharging. Specifically, the film formation region 103 corresponding to the film pattern is set on the substrate W, and the film is formed from the droplet unit 101 while moving the droplet unit 101 relative to the substrate W. The coating film C is formed by discharging a large number of droplets having a constant particle size as a coating material in the region 103. And the predetermined film | membrane pattern is formed on the base material W by conveying the base material W to the drying apparatus from an inkjet coating device, and drying a coating film for a predetermined time.

JP 2000-133649 A

  In recent years, a UV curable coating material having a relatively high fluidity has been used, and the requirement of the edge accuracy of the film formation region 103 with respect to the wetting and spreading of the coating material has become strict. However, when the coating film C (film pattern) is formed with a coating material having high fluidity, droplets (coating material) that have landed on the film formation region 103 along the surface of the substrate W before being dried by a drying device. By spreading wet, it spreads over a slightly larger area than the shape immediately after landing. For this reason, there is a problem in that a film pattern corresponding to the set film formation region 103 cannot be formed with high accuracy and the requirement for coating accuracy cannot be satisfied.

  Accordingly, an object of the present invention is to provide an ink jet coating apparatus and a film pattern forming method capable of forming a film pattern with high accuracy while satisfying the requirement of edge accuracy even with a coating material having high fluidity. It is said.

  In order to solve the above-mentioned problems, the inkjet coating apparatus of the present invention moves relative to the base material, while moving relative to the base material, and a droplet unit that ejects liquid droplets onto the base material. A UV lamp unit that irradiates the coating film formed by the droplet unit on the substrate with UV light, and the droplet unit extends in one direction in the coating width direction perpendicular to the moving direction with respect to the substrate. The UV lamp unit has a shape extending in one direction so that the irradiation range includes the application range in the application width direction of the droplet unit. It is characterized by lighting.

  According to the inkjet coating apparatus of the present invention, since the UV lamp unit for curing the droplets on the discharged substrate is provided, the droplets discharged from the droplet unit are irradiated with UV light. Wetting and spreading of the discharged coating material can be suppressed. That is, since the UV lamp unit has an irradiation range that includes the application range of the droplet unit, the UV light is irradiated in the application width direction as soon as the coating material is dropped from the droplet unit. Therefore, the timing of curing the coating material can be advanced as compared with the case of transporting to a conventional drying apparatus and drying, and the spread of the coating material by wetting can be suppressed. Furthermore, since the LED lamp is provided on the light source of the UV lamp unit, the illuminance can be stabilized immediately after being turned on, compared to the case of using a halogen lamp, and the spread of the coating material can be quickly suppressed. Can do. Therefore, even a coating material having high fluidity can satisfy the requirements of the edge accuracy of the film pattern, and can form the film pattern with high accuracy.

  Further, the UV lamp unit may be provided with a plurality of LED lamps arranged in the longitudinal direction, and each LED lamp may be switched between irradiation and non-irradiation independently.

  According to this structure, only the LED lamp corresponding to the formation position of the coating film formed on the base material can be irradiated to cure only the coating film. Therefore, it is possible to reduce damage to the base material caused by irradiating the region where the coating film is not formed with UV light.

  In order to solve the above problems, the film pattern forming method of the present invention includes a droplet unit for discharging droplets on a substrate, and LED illumination on a coating film formed by the droplet units on the substrate. A film pattern method for forming a film pattern on a base material by moving the droplet unit and the UV lamp unit relative to the base material In the outer edge portion forming step of forming the outer edge portion of the film pattern formed by discharging droplets from the droplet unit, and irradiating the outer edge portion formed in the outer edge portion forming step with UV light, It is characterized by having a flow suppressing step for suppressing the fluidity of the outer edge portion immediately after formation, and an inner region forming step for discharging droplets to the inner region surrounded by the outer edge portion after the flow suppressing step.

  According to the film pattern forming method of the present invention, a film pattern can be accurately formed even with a coating material having high fluidity. That is, after the outer edge portion of the film pattern is formed in the outer edge portion forming step, the outer edge portion formed by irradiating the LED light in the flow suppressing step is cured to suppress wetting and spreading. That is, by irradiating the LED light, it is possible to stabilize the illuminance immediately after lighting, compared to the case of using a halogen lamp, and to quickly suppress the wetting and spreading of the coating material. And a film | membrane pattern can be formed, suppressing a wetting spread by discharging a droplet inside the outer edge part hardened to the extent which suppresses a wetting spread by an inner side area | region formation process. Therefore, even a coating material having high fluidity can satisfy the requirements of the edge accuracy of the film pattern, and can form the film pattern with high accuracy.

  Moreover, you may make it the structure which irradiates UV light for the outer edge part formed at the said outer edge part formation process in the said flow suppression process.

  According to this configuration, damage to the base material can be reduced by irradiating the UV light to the outer edge portion formed on the base material and curing it. In other words, after forming the outer edge portion and irradiating the entire substrate with UV light, the region where the outer edge portion is not formed (other thin film layers) is also irradiated with UV light, so that the region is damaged. Will give. Therefore, UV light is irradiated on a region where the outer edge portion (coating film) is not formed by irradiating UV light on the outer edge portion only, that is, only on the outer edge portion or on the peripheral region including the outer edge portion. It is possible to reduce damage to the base material due to irradiation.

  According to the present invention, even a coating material having high fluidity can satisfy the requirement for edge accuracy and form a film pattern with high accuracy.

It is a side view which shows roughly the inkjet coating device of this invention. It is a top view of the said inkjet coating apparatus. It is a figure which shows a base material and a head unit. It is a figure which shows nozzle arrangement | positioning of a head unit. It is a figure which shows the formation process of a film | membrane pattern on a base material, (a) is a figure which shows the state before a droplet unit and a UV lamp unit drive | work, (b) is an outer frame of a film formation area by a droplet unit It is a figure which shows the state in which the coating film was formed in. It is a figure which shows the formation process of a film | membrane pattern on a base material, (a) is a figure which shows the state which passes the part which a UV lamp unit extends in the Y-axis direction of an outer edge part, (b) is an outer edge part. It is a figure which shows the state which passes through the part extended in the X-axis direction. It is a figure which shows the formation process of a film | membrane pattern on a base material, (a) is a figure which shows the state which the droplet unit and UV lamp unit returned to the original position, (b) is an outer edge part by a droplet unit It is a figure which shows the state by which the coating liquid was apply | coated to the inner side area | region enclosed by. It is a figure which shows the formation process of a film | membrane pattern on a base material, (a) is a figure which shows the state which has irradiated the inner area | region by the UV lamp unit, (b) was formed in the film formation area It is a figure which shows the state by which the coating film was hardened. It is a figure which shows the conventional inkjet coating device, (a) is a side view, (b) is a top view.

  Embodiments according to the inkjet coating apparatus of the present invention will be described with reference to the drawings.

  FIG. 1 is a side view showing an embodiment of an inkjet coating apparatus, and FIG. 2 is a top view of the inkjet coating apparatus.

  As shown in FIGS. 1 and 2, the inkjet coating apparatus includes a stage 10 on which the substrate W is placed, and a droplet unit 2 that applies droplets (coating material) to the substrate W. While the droplet unit 2 moves on the substrate W placed on the stage 10, the droplets are discharged to a predetermined landing position (film formation region S), whereby the coating film C (film) is formed on the substrate W. Also referred to as a pattern (see FIG. 3).

  Here, as shown in FIG. 3, the base material W is formed with a plurality of film forming regions S on which the coating film C is to be formed. In the example of FIG. 3, a plurality of rectangular film formation regions S are provided, and each film formation region S is applied to the film formation region S by ejecting droplets as a coating material with an inkjet coating apparatus. A film C (film pattern) is formed.

  In the following description, the direction in which the droplet unit 2 moves is the X-axis direction (main scanning direction of the present embodiment), and the direction perpendicular to the horizontal plane is the Y-axis direction (sub-scanning direction of the present embodiment). ), The description will be made with the direction orthogonal to both the X-axis and Y-axis directions as the Z-axis direction.

  The ink jet coating apparatus has a base 1, and a stage 10 and a droplet unit 2 are provided on the base 1. Specifically, a rectangular parallelepiped stage 10 is provided on the base 1, and the droplet unit 2 is provided so as to straddle the stage 10 in the Y-axis direction.

  The stage 10 is for placing the substrate W, and is placed in a state where the placed substrate W maintains a horizontal posture. Specifically, the surface of the stage 10 is formed flat, and a plurality of suction holes are formed on the surface. A vacuum pump is connected to the suction hole. By operating the vacuum pump in a state where the substrate W is placed on the surface of the stage 10, a suction force is generated in the suction hole, and the substrate W is horizontal. It can be sucked and held on the surface of the stage 10 in a posture.

  Further, the droplet unit 2 is applied by landing a droplet, which is a coating material, on the substrate W, and includes a head unit 21 that discharges the coating material, and a gantry unit 22 that supports the head unit 21. have. The gantry portion 22 is formed in a substantially portal shape having leg portions 22a disposed on both outer sides of the stage 10 in the Y-axis direction and beam members 22b that connect the leg portions 22a and extend in the Y-axis direction. Yes. A head unit 21 is attached to the beam member 22b, and the gantry 22 is attached to be movable in the X-axis direction while straddling the stage 10 in the Y-axis direction. In the present embodiment, rails (not shown) extending in the X-axis direction are installed at both ends of the base 1 in the Y-axis direction, and the leg portions 22a are slidably attached to the rails. A linear motor is attached to the leg portion 22a, and by driving and controlling the linear motor, the gantry portion 22 moves in the X-axis direction and can be stopped at an arbitrary position.

  The beam member 22b is a columnar member that connects both the leg portions 22a. A head unit 21 is attached to the beam member 22b. Specifically, the head unit 21 is attached to a side surface on one side in the X-axis direction of the beam member 22b, and nozzles 31a and 41a (see FIG. 4) provided in the head unit 21 are formed on the surface of the stage 10. Installed in a facing position. Therefore, as the gantry unit 22 moves or stops in the X-axis direction, the head unit 21 can also move or stop along with it. By adjusting the amount of movement of the gantry unit 22, the surface of the stage 10 can be adjusted. The head unit 21 is positioned on the substrate W placed on the substrate W, and droplets as a coating material can be discharged onto the substrate W.

  Further, as shown in FIG. 4, the head unit 21 is obtained by integrating a plurality of nozzles 31 a and 41 a, and includes a first nozzle unit 30 and a second nozzle unit 40. In the present embodiment, the first nozzle unit 30 and the second nozzle unit 40 are fixed in a state where they are arranged adjacent to each other in the X-axis direction. That is, in the example shown in FIG. 4, the first nozzle unit 30 is disposed on the front side in the traveling direction (also referred to as the front side in the application direction) with respect to the second nozzle unit 40, and is applied when moving and applying in the X-axis direction. It is first arranged on the side facing the substrate W.

  The first nozzle unit 30 includes a plurality of head modules 31 having normal droplet nozzles 31a. In the present embodiment, the plurality of head modules 31 are arranged along the Y-axis direction and are arranged in a direction orthogonal to the application direction. The head module 31 has a plurality of normal droplet nozzles 31a, and the normal droplet nozzles 31a are provided in a state where they are aligned at a predetermined arrangement pitch in one direction. The normal droplet nozzle 31a is a nozzle that discharges droplets having a diameter larger than that of the minute droplet nozzle 41a, and a versatile nozzle is used. That is, when a driving voltage is applied to the head module 31, a common driving voltage is applied to each normal droplet nozzle 31a, and a droplet having a predetermined liquid amount is ejected from each normal droplet nozzle 31a. ing.

  Further, the head modules 31 are arranged so as to be shifted so as to have overlapping portions. In the example of FIG. 4, adjacent head modules 31 are alternately shifted in the X-axis direction. That is, these head modules 31 have different sizes at the regular intervals between the droplet nozzles 31a and the both end portions of the head module 31, and are thus shifted in the X-axis direction so that the dimensions of both end portions can be offset. Arranged in the Y-axis direction. That is, in the first nozzle unit 30, normal droplet nozzles 31a are arranged at equal intervals in the Y-axis direction when viewed in the X-axis direction, and all the normal nozzle nozzles 30 are viewed in the X-axis direction as a whole. The droplet nozzles 31a are arranged at a constant arrangement pitch along the Y-axis direction, and are arranged at equal intervals over the Y-axis direction when viewed from the X-axis direction.

  The second nozzle unit 40 has a plurality of micro droplet nozzles 41a and is arranged in a state of being aligned at a predetermined pitch in one direction (Y-axis direction in the present embodiment). The minute droplet nozzle 41a is a nozzle that ejects a droplet having a smaller diameter than the droplet ejected by the normal droplet nozzle 31a, and can eject a droplet having a smaller liquid volume than the normal droplet nozzle 31a. . In the present embodiment, for example, droplets of an amount 1/100 of that of the normal droplet nozzle 31a are ejected from the minute droplet nozzle 41a.

  The second nozzle unit 40 has the same configuration as the first nozzle unit 30 described above, and the arrangement of the micro droplet nozzles 41a is the same as the arrangement of the normal droplet nozzles 31a of the first nozzle unit 30. Has been. That is, the adjacent head modules 41 are arranged so as to be alternately displaced in the X-axis direction so that the dimensions of both end portions of the head module 41 can be offset. In addition, each micro droplet nozzle 41a of the second nozzle unit 40 is mounted on the head unit 21, and each micro liquid droplet nozzle 41a is viewed from the X-axis direction as each normal liquid of the first nozzle unit 30. It is attached so as to be located at the same position as the droplet nozzle 31a. In the present embodiment, when it is not necessary to distinguish between the normal droplet nozzle 31a and the minute droplet nozzle 41a, they are also simply referred to as nozzles 31a and 41a.

  A UV lamp unit 5 for irradiating UV light is provided on the base 1. The UV lamp unit 5 is provided so as to straddle the stage 10 in the Y-axis direction, and the irradiated UV light can irradiate the substrate W on the stage 10. Specifically, the UV lamp unit 5 includes an irradiation unit 60 that irradiates UV light, and a support frame portion 50 that supports the irradiation unit 60. The support frame portion 50 includes a column portion 51 disposed on the base 1 and a beam portion 52 that connects these column portions 51 and extends in the Y-axis direction, and is formed in a gate shape as a whole. Has been. An irradiation unit 60 is attached to the beam portion 52, and the support frame portion 50 is attached so as to be movable in the X-axis direction while straddling the stage 10 in the Y-axis direction. In the present embodiment, rails (not shown) extending in the X-axis direction are installed at both ends of the base 1 in the Y-axis direction, and the column portions 51 are slidably attached to the rails. And the linear motor is attached to the support | pillar part 51, By carrying out drive control of this linear motor, the support frame part 50 moves to an X-axis direction, and can stop now in arbitrary positions.

  In addition, an irradiation unit 60 is attached to the beam portion 52 and attached in such a posture that the irradiation direction faces the surface of the stage 10. Therefore, as the support frame unit 50 moves or stops in the X-axis direction, the irradiation unit 60 can also move or stop along with it, and the stage 10 can be adjusted by adjusting the movement amount of the support frame unit 50. The irradiation unit 60 is positioned on the substrate W placed on the surface of the substrate, and the coating material can be irradiated with UV light on the substrate W.

  The irradiation unit 60 irradiates UV light and has a shape extending in one direction. In the present embodiment, the irradiation unit 60 is formed so as to include the application width direction of the droplet unit 2, and the irradiation unit 60 includes one application range (application region) in the Y-axis direction ejected by the droplet unit 2. It extends in the direction. As shown in FIGS. 5 to 8, the irradiation unit 60 is provided with a plurality of LED lamps 61 as UV light sources arranged in the longitudinal direction. It is formed so that the entire application range (application region) in the Y-axis direction of the droplet unit 2 can be irradiated.

  Moreover, the LED lamp 61 of the irradiation unit 60 is formed so that an irradiation state and a non-irradiation state can be individually controlled. That is, the LED lamps 61 can be individually switched on and off, and when all the LED lamps 61 are turned on, the entire Y-axis direction of the coating region at a certain position is irradiated with UV light. Further, when the LED lamp 61 is partially turned on or off and the support frame unit 50 is moved, the region at the position where the LED lamp 61 is turned on is irradiated with UV light in the X-axis direction. That is, UV light can be irradiated only to a specific position on the base material W immediately below the LED lamp 61. Note that the fact that only a specific position is irradiated with UV light means that the UV light is irradiated only on the specific position as much as technically possible. Actually, the specific position and the peripheral area of the specific position are used. The region including

  Next, the operation of this ink jet coating apparatus will be described.

  First, the base material W is carried in by step S1. Specifically, the substrate W is placed on the stage 10 by a robot hand or the like. Then, by generating a suction force at the suction port, the substrate W is sucked and held on the surface of the stage 10 in a horizontal posture. At this time, the droplet unit 2 and the UV lamp unit 5 are located on the same side as shown in FIG.

  Next, an outer edge part formation process is performed. Specifically, the droplet unit 2 is caused to travel, and droplets are ejected from the minute droplet nozzle 41 a of the second nozzle unit 40 to form the outer edge portion 71 (outer frame portion) of the film forming region S. That is, the outer edge portion 71 surrounding the film formation region S is formed by discharging droplets along the outer frame (edge portion) of the rectangular film formation region S. The outer edge portion 71 is formed by using the minute droplet nozzle 41a instead of the normal droplet nozzle 31a, so that the outer edge portion 71 is accurately formed even if the outer frame portion of the film forming region S has a complicated shape. can do. Then, the outer edge portion 71 is formed for all the film formation regions S, and the outer edge portion 71 that separates the inner region S1 and the outer region at the edge portion of the film formation region S is formed (FIG. 5B).

  Next, a flow suppression process is performed. That is, since the coating material discharged onto the substrate W in the outer edge portion forming step tends to wet and spread, the fluidity is suppressed by irradiating the coating material with UV. Specifically, the UV lamp unit 5 is run to irradiate the formed outer edge 71 with UV light. In the present embodiment, only the LED lamp 61 corresponding to the outer edge portion 71 formed on the substrate W is turned on, and the UV lamp unit 5 is caused to travel. That is, as shown in FIG. 6A, in a state where the UV lamp unit 5 is positioned on the outer edge portion 71 extending in the Y-axis direction, only the LED lamp 61 corresponding to the outer edge portion 71 (see FIG. 6A). In the example shown, four LED lamps 61 colored in black are turned on.) Is turned on to stop the fluidity of the coating material on the outer edge 71. Here, the fluidity of the coating material is stopped as long as the fluidity of the coating material is weakened and cured, and the ejected coating material can be cured to the extent that the required edge accuracy can be maintained. That's fine. And it should just be able to be dried to such an extent that it mixes with the coating material discharged in a subsequent process and the outer edge portion 71 and the coating film C in the inner region S1 can be integrated when the film pattern is completely dried.

  As shown in FIG. 6B, only the LED lamp 61 corresponding to the outer edge 71 is black in the state positioned on the outer edge 71 extending in the X-axis direction (in the example shown in FIG. 6B, black). LED lamps 61 that are colored one by one are lit) to turn on the fluidity of the coating material on the outer edge 71. In this way, according to the shape of the outer edge portion 71 formed on the substrate W, only the LED lamp 61 corresponding to the outer edge portion 71 is turned on to stop the fluidity of the outer edge portion 71. That is, by irradiating unnecessary UV light, it is possible to suppress as much as possible that the region of the substrate W other than the region where the outer edge portion 71 is formed is damaged by the UV light. 6-8, the hardened outer edge part 71 is shown by the gray color.

  Next, an inner region forming step is performed. That is, a film pattern is formed by discharging droplets to the inner region S1 of the film forming region S where the outer edge portion 71 is formed. Specifically, as shown in FIG. 7A, the droplet unit 2 is returned to the original position, and the droplet unit 2 is caused to travel so that the droplet is discharged from the normal droplet nozzle 31 a of the first nozzle unit 30. A coating film C is formed in the inner region S1 that is discharged and surrounded by the outer edge portion 71 (outer frame portion) (FIG. 7B). The formed coating film C is integrated by mixing with the previously formed outer edge portion 71, but since the outer edge portion 71 is cured to some extent by the flow suppressing step, it was discharged to the inner region S <b> 1. The coating material stays in the inner region S <b> 1 without flowing out and is integrated with the outer edge portion 71. In addition, since it coats with the normal droplet nozzle 31a instead of the micro droplet nozzle 41a in the inner region S1, the coating film C is formed in the inner region S1 in a shorter time compared with the case of coating with the micro droplet nozzle 41a. can do.

  Next, the coating material applied to the film forming region S is cured by irradiating UV light again. Specifically, as shown in FIG. 8A, the UV lamp unit 5 is caused to travel, and the coating film C on the substrate W is irradiated with UV light. Thereby, the coating film C of the inner region S1 formed in the inner region forming step is cured (FIG. 8B). Here, the coating film C (the outer edge portion 71 and the coating film C in the inner region S1) formed in the film formation region S may be completely dried, or may be completely dried by a subsequent drying apparatus. You may let them. That is, the coating film C having high fluidity is formed in the outer edge portion 71 and the inner region S1 in the film forming region S, but is cured to such an extent that the fluidity of the coating film C formed in the inner region S1 is stopped. Then, the coating film C formed on the film forming region S may be dried by a subsequent drying apparatus. The coating film C on the film forming region S integrated with the outer edge portion 71 by the UV lamp unit 5 may be dried. It may be completely cured (dried).

  Thus, according to the film pattern forming method of the above embodiment, a film pattern can be formed with high accuracy even with a coating material having high fluidity. That is, after the outer edge portion 71 of the film pattern is formed in the outer edge portion forming step, the outer edge portion 71 formed by irradiating the LED light in the flow suppressing step is cured to suppress wetting and spreading. That is, by irradiating the LED light, it is possible to stabilize the illuminance immediately after lighting, compared to the case of using a halogen lamp, and to quickly suppress the wetting and spreading of the coating material. And a film | membrane pattern can be formed, suppressing a wetting spread by discharging a droplet inside the outer edge part 71 hardened to the extent which suppresses a wetting spread by an inner area | region formation process. Therefore, even a coating material having high fluidity can satisfy the requirements of the edge accuracy of the film pattern, and can form the film pattern with high accuracy.

  In the above embodiment, the outer edge portion 71 is formed by droplets ejected from the minute droplet nozzle 41a, and the inner region S1 is formed by droplets ejected from the normal droplet nozzle 31a. Both the portion 71 and the inner region S1 may be formed by the normal droplet nozzle 31a. In this case, since all the nozzles mounted on the head unit 21 may be a common nozzle, the cost of the ink jet coating apparatus can be reduced.

  In the above embodiment, the example in which the plurality of LED lamps 61 are provided in the UV lamp unit 5 has been described. However, the LED lamp 61 may have one LED lamp 61 having a shape extending in one direction including the application region. In this case, the surface of the substrate W on which the coating film C is not formed is irradiated, but the configuration of the UV lamp unit 5 can be simplified.

  In the above embodiment, the example in which the droplet unit 2 and the UV lamp unit 5 move with respect to the stationary substrate W has been described. However, the droplet unit 2 fixed to the substrate W to be transported, A film pattern may be formed by the UV lamp unit 5. In any case, the substrate W, the droplet unit 2, and the UV lamp unit 5 may be configured to move relatively.

  In the above-described embodiment, an example in which the droplet unit 2 and the UV lamp unit 5 function only in the forward path has been described, but both the forward path and the return path may function. In addition, since the UV lamp unit 5 can irradiate UV light immediately after forming the outer edge portion 71 or the coating film C with the droplet unit 2 by functioning only in the forward path, immediately after being formed on the substrate W. It is possible to suppress the outer edge portion 71 or the coating film C from spreading out as much as possible.

  In the above embodiment, the irradiation and non-irradiation of the LED lamp 61 have been described for the case where the LED lamp 61 itself is turned on or off. However, the LED lamp 61 is always turned on and the irradiation state using a shielding plate or the like is used. Alternatively, the non-irradiation state may be switched.

2 droplet unit 5 UV lamp unit 10 stage 21 head unit 30 first nozzle unit 40 second nozzle unit 60 irradiation unit 61 LED lamp 71 outer edge C coating film S film formation area S1 inner area W substrate

Claims (4)

A droplet unit that ejects droplets on the substrate while moving relative to the substrate;
A UV lamp unit that irradiates the coating film formed by the droplet unit on the substrate with UV light while moving relative to the substrate;
With
The droplet unit has a shape extending in one direction in the application width direction orthogonal to the moving direction with respect to the substrate,
The UV lamp unit has a shape extending in one direction so that the irradiation range includes the application range in the application width direction of the droplet unit, and the light source is provided with LED illumination. An ink jet coating apparatus.   The UV lamp unit is provided with a plurality of LED lamps arranged in the longitudinal direction, and each LED lamp is independently switched between irradiation and non-irradiation. A droplet unit that discharges droplets on a substrate; and a UV lamp unit that irradiates UV light using LED illumination as a light source on a coating film formed on the substrate by the droplet unit. In the film pattern method of forming a film pattern on a substrate by relatively moving the droplet unit and the UV lamp unit,
An outer edge forming step of forming an outer edge of a film pattern formed by discharging droplets from the droplet unit;
A flow suppressing step of irradiating UV light to the outer edge portion formed in the outer edge portion forming step to suppress the fluidity of the outer edge portion immediately after formation;
An inner region forming step of discharging droplets to an inner region surrounded by an outer edge after the flow suppressing step;
A film pattern forming method characterized by comprising:   In the flow suppressing step, the film pattern forming method is characterized by irradiating UV light on the outer edge portion formed in the outer edge portion forming step.

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