JP2018098400A - Screw fall prevention mechanism and thermal treatment apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a screw fall prevention mechanism capable of preventing a screw from falling even when the screw is loosened.SOLUTION: A screw fall prevention mechanism for preventing an upward screw 58 from falling fixes a plate-like member 54 to a lower surface of a susceptor 50 for supporting a processing container 2 housing a substrate and performing prescribed heating treatment thereof. The screw fall prevention mechanism has a fixing part 62 fixed to the lower surface of the plate-like member, a support member 64 being attached movably to the fixing part, and capable of supporting a head of the screw from below, and a movement limit mechanism for limiting movement of the support member.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a screw drop prevention mechanism and a heat treatment apparatus.

  Conventionally, as a device for depositing a thin film on a substrate, batch-type heat treatment for collectively depositing a plurality of substrates held by a substrate holder in a quartz processing vessel having an opening at the lower end An apparatus is known (see, for example, Patent Document 1). In this apparatus, the processing vessel is supported by a water cooling flange having a cooling water channel and a base plate. Moreover, in order to isolate | separate the area | region in which the process container was provided, and the area | region below the process container, the plate-shaped cover member is attached to the lower surface of a water cooling flange using the upward screw | thread.

JP-A-11-135448

  By the way, the upward screw used when the plate-like cover member is attached to the lower surface of the water-cooled flange may be loosened due to a temperature change caused by repeated film forming processes performed in the processing container. If the looseness is left unattended, the screw will fall. As a method for suppressing the occurrence of screw loosening, for example, a method using a spring washer or a hybrid screw can be considered.

  However, even when a spring washer or a hybrid screw is used, the screw may be loosened and dropped due to repeated temperature changes performed in the processing container. Then, when the screw falls on the substrate or the substrate holder carried into the processing container, the screw is carried into the processing container together with the substrate or the substrate holder, which causes impurities.

  For this reason, there is a need for a screw drop prevention mechanism that can prevent the screw from dropping even when the screw is loosened.

  In order to achieve the above object, a screw drop prevention mechanism according to one aspect of the present invention fixes a plate-like member to the lower surface of a support base that accommodates a substrate and supports a processing vessel that performs predetermined heat treatment on the substrate. A screw fall prevention mechanism for preventing an upward screw from falling, a fixed portion fixed to the lower surface of the plate-like member, and a movably attached to the fixed portion. A support member that can be supported; and a movement restriction mechanism that restricts movement of the support member.

  According to the disclosed screw drop prevention mechanism, it is possible to prevent the screw from dropping even when the screw is loosened.

Schematic sectional view of a heat treatment apparatus according to an embodiment of the present invention The figure for demonstrating the screw fall prevention mechanism of a 1st structural example. The figure for demonstrating the screw fall prevention mechanism of a 2nd structural example. The figure for demonstrating the screw fall prevention mechanism of the 3rd structural example The figure for demonstrating the screw fall prevention mechanism of a 4th structural example.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. In addition, in this specification and drawing, about the substantially same structure, the duplicate description is abbreviate | omitted by attaching | subjecting the same code | symbol.

[Heat treatment equipment]
A heat treatment apparatus according to an embodiment of the present invention will be described. FIG. 1 is a schematic cross-sectional view of a heat treatment apparatus according to an embodiment of the present invention.

  As shown in FIG. 1, the heat treatment apparatus 1 includes a substantially cylindrical processing container 2 having a ceiling with a longitudinal direction being a vertical direction. The processing container 2 is made of, for example, quartz. A lower end portion of the processing container 2 is opened to form an opening 18, and a flange portion 4 protruding outward is formed on the outer periphery thereof. The flange portion 4 is supported by being fixed to the water cooling flange 50 and the base plate 52. A plate-like cover member 54 is attached to the lower surface of the water cooling flange 50 using an upward screw 58. The cover member 54 is a plate-like member for separating the region S1 where the processing container 2 is provided and the region S2 below the processing container 2. Further, a heat insulating material 56 is provided between the water cooling flange 50 and the outer wall of the processing container 2.

  The opening 18 at the lower end of the processing container 2 can be opened and closed by a quartz cap 6 that can be moved up and down by a lifting mechanism 30. A quartz wafer boat 8 is placed on the cap 6 via a heat insulating cylinder 10. The wafer boat 8 holds a plurality of semiconductor wafers (hereinafter referred to as “wafers W”) substantially horizontally with a predetermined interval in the vertical direction. The wafer boat 8 is carried into or out of the processing container 2 as the cap unit 6 moves up and down.

  A gas introduction pipe 24 for introducing a processing gas into the processing container 2 is provided on the lower side wall of the processing container 2 so as to penetrate the processing container 2. The gas introduction pipe 24 is inserted in a horizontal direction from the outside to the inside of the processing container 2, is bent in an L shape in the processing container 2, and extends to the ceiling along the side wall.

  An exhaust port 26 for exhausting the inside of the processing container 2 is formed in the lower side wall of the processing container 2, and an exhaust system (not shown) is connected to the exhaust port 26. The exhaust system includes an exhaust passage (not shown) connected to the exhaust port 26, a pressure adjusting valve and a vacuum pump sequentially connected in the middle of the exhaust passage. With the exhaust system, the gas can be exhausted while adjusting the pressure in the processing container 2.

  A heater 20 for heating the wafer W is provided on the outer peripheral side of the processing container 2 so as to surround the processing container 2. The heater 20 is disposed on the inner peripheral side of the substantially cylindrical heat insulating material 22.

  In such a heat treatment apparatus, the upward screw 58 that fixes the cover member 54 to the lower surface of the water cooling flange 50 may be loosened due to a temperature change caused by repeated film forming processes performed in the processing container 2. If the looseness is left unattended, the screw 58 falls. As a method for suppressing the occurrence of looseness of the screw 58, for example, a method using a spring washer or a hybrid screw can be considered.

  However, even when a spring washer or a hybrid screw is used, the screw 58 may be loosened and dropped due to a temperature change caused by repeated film forming processes performed in the processing container 2. In addition, when the screw 58 falls on the wafer W or the wafer boat 8 that is waiting in the processing container 2, that is, in a state of waiting under the processing container 2, the wafer boat 8 is moved into the processing container 2. When carrying in, the screw 58 is also carried in, causing impurities to be generated.

  For this reason, there is a need for a screw drop prevention mechanism that can prevent the screw 58 from dropping even when the screw 58 is loosened.

  Hereinafter, a screw drop prevention mechanism according to an embodiment of the present invention that can prevent the screw 58 from falling even when the screw 58 is loose will be described.

[Screw fall prevention mechanism]
A screw drop prevention mechanism according to an embodiment of the present invention will be described. The screw drop prevention mechanism according to the embodiment of the present invention is an upward-facing method for fixing the cover member 54 to the lower surface of the water-cooling flange 50 that houses the wafer W and supports the processing vessel 2 that performs a predetermined heat treatment on the wafer W. The screw 58 is prevented from dropping.

(First configuration example)
FIG. 2 is a view for explaining the screw drop prevention mechanism of the first configuration example. FIG. 2A is a schematic cross-sectional view showing the screw drop prevention mechanism, and FIG. 2B is a schematic perspective view showing the screw drop prevention mechanism.

  As shown in FIGS. 2A and 2B, the screw drop prevention mechanism 60 </ b> A of the first configuration example includes a fixing portion 62, a support member 64, and a leaf spring 66. The fixing portion 62, the support member 64, and the leaf spring 66 are preferably formed of a heat-resistant material such as a metal from the viewpoint that it can be used at a site where the temperature is high.

  The fixing portion 62 is a portion that is fixed to the lower surface of the cover member 54. The fixed part 62 includes an attachment part 622 and a guide part 624.

  The attachment portion 622 is fixed to the cover member 54 with two rivets 68. Thereby, even when the cover member 54 expands or contracts due to a temperature change caused by repeated film forming processes performed in the processing container 2, the attachment portion 622 is not easily detached from the cover member 54. Further, the attachment portion 622 may be fixed to the cover member 54 by welding.

  The guide portion 624 is connected to the attachment portion 622 and guides (guides) the movement of the support member 64. A through hole 626 is formed in the guide portion 624. Further, the guide portion 624 may be formed integrally with the attachment portion 622.

  The support member 64 is movably attached to the guide portion 624 and is configured to support the head 582 of the screw 58. In the illustrated example, the support member 64 includes a first horizontal part 642 movably attached to the guide part 624, a vertical part 644 extending in the vertical direction from one end of the first horizontal part 642, and the vertical part 644. A second horizontal portion 646 that extends in a horizontal direction from an end opposite to the first horizontal portion 642 and can support the head portion 582 of the screw 58 from below.

  The leaf spring 66 is provided on the support member 64 and restricts the movement of the support member 64 in the horizontal direction. The leaf spring 66 enters the through hole 626 formed in the guide portion 624 at a position where the second horizontal portion 646 of the support member 64 supports the head portion 582 of the screw 58, so that the support member 64 extends in the horizontal direction. It is formed to limit movement.

  The screw 58 is preferably a hybrid screw from the viewpoint that it is difficult to loosen. Further, the screw 58 tries to loosen the screw 58 to the seating surface of the screw 58 even when the cover member 54 expands or contracts due to a temperature change caused by repeated film forming processes performed in the processing container 2. A stepped screw is preferable from the viewpoint that force is not easily applied.

  As described above, the screw drop prevention mechanism 60A of the first configuration example is fixed to the lower surface of the cover member 54 and is movably attached to the fixed portion 62. The head 582 of the screw 58 is attached to the fixing portion 62. A support member 64 that can be supported from below and a leaf spring 66 that restricts the movement of the support member 64 are provided. Thereby, even if the screw 58 is loosened, the support member 64 supports the head 582 of the screw 58 from below, so that the screw 58 can be prevented from dropping.

(Second configuration example)
FIG. 3 is a diagram for explaining the screw drop prevention mechanism of the second configuration example. FIG. 3A is a schematic sectional view showing a state in which the screw is supported by the screw drop prevention mechanism, and FIG. 3B is a schematic perspective view showing a state in which the screw is not supported by the screw drop prevention mechanism. is there.

  As shown in FIGS. 3A and 3B, the screw drop prevention mechanism 60B of the second configuration example enters the through hole formed in the cover member 54, thereby moving the support member 64 in the horizontal direction. This is different from the first configuration example in that it has a leaf spring 70 that restricts the movement of the first configuration example. Since other configurations can be the same as those in the first configuration example, a part of the description is omitted.

  The screw fall prevention mechanism 60 </ b> B of the second configuration example includes a fixing portion 62, a support member 64, and a leaf spring 70.

  The leaf spring 70 is provided on the support member 64 and restricts the movement of the support member 64 in the horizontal direction. The plate spring 70 enters the through hole 542 formed in the cover member 54 at a position where the second horizontal portion 646 of the support member 64 supports the head 582 of the screw 58, whereby the support member 64 in the horizontal direction. Restrict movement.

  As described above, the screw fall prevention mechanism 60B of the second configuration example is fixed to the lower surface of the cover member 54, and is movably attached to the fixed portion 62, and the head 582 of the screw 58 is attached. A support member 64 that can be supported from below and a leaf spring 70 that restricts the movement of the support member 64 are provided. Thereby, even if the screw 58 is loosened, the support member 64 supports the head 582 of the screw 58 from below, so that the screw 58 can be prevented from dropping.

(Third configuration example)
FIG. 4 is a diagram for explaining the screw drop prevention mechanism of the third configuration example, and is a schematic cross-sectional view showing the screw drop prevention mechanism.

  As shown in FIG. 4, the screw fall prevention mechanism 60 </ b> C of the third configuration example is different from the first configuration example in that it has a ball plunger 72 instead of the leaf spring 66. Since other configurations can be the same as those in the first configuration example, a part of the description is omitted.

  The screw fall prevention mechanism 60 </ b> C of the third configuration example includes a fixing portion 62, a support member 64, and a ball plunger 72.

  The support member 64 is movably attached to the guide portion 624 and is configured to support the head 582 of the screw 58. The support member 64 includes a first horizontal portion 642 movably attached to the guide portion 624, a vertical portion 644 extending in a vertical direction from one end of the first horizontal portion 642, and a first horizontal portion 642 of the vertical portion 644. And a second horizontal portion 646 that extends in the horizontal direction from the opposite end and can support the head 582 of the screw 58 from below. A through hole 648 is formed in the first horizontal portion 642.

  The ball plunger 72 is provided through the cover member 54 and restricts the movement of the support member 64 in the horizontal direction. The ball plunger 72 is formed so as to limit the horizontal movement of the support member 64 at a position where the second horizontal portion 646 of the support member 64 supports the head 582 of the screw 58.

  As described above, the screw drop prevention mechanism 60C of the third configuration example is fixed to the lower surface of the cover member 54, and is movably attached to the fixed portion 62. The head 582 of the screw 58 is attached to the fixing portion 62. A support member 64 that can be supported from below and a ball plunger 72 that restricts the movement of the support member 64 are provided. Thereby, even if the screw 58 is loosened, the support member 64 supports the head 582 of the screw 58 from below, so that the screw 58 can be prevented from dropping.

(Fourth configuration example)
FIG. 5 is a diagram for explaining the screw fall prevention mechanism of the fourth configuration example, and is a schematic cross-sectional view showing the screw fall prevention mechanism.

  As shown in FIG. 5, in the screw fall prevention mechanism 60D of the fourth configuration example, a through hole 648 is formed in the support member 64, and the through hole 648 formed in the support member 64 is dropped by its own weight. It differs from the first configuration example in that a pin 74 that can be inserted is provided. Since other configurations can be the same as those in the first configuration example, a part of the description is omitted.

  The screw fall prevention mechanism 60 </ b> D of the fourth configuration example includes a fixing portion 62, a support member 64, a pin 74, and a guide 76.

  The support member 64 includes a first horizontal portion 642 movably attached to the guide portion 624, a vertical portion 644 extending in a vertical direction from one end of the first horizontal portion 642, and a first horizontal portion 642 of the vertical portion 644. And a second horizontal portion 646 that extends in the horizontal direction from the opposite end and can support the head 582 of the screw 58 from below. A through hole 648 is formed in the first horizontal portion 642. The through hole 648 is formed at a position where the pin 74 is inserted at a position where the support member 64 supports the head 582 of the screw 58.

  The pin 74 limits the movement of the support member 64 in the horizontal direction. The pin 74 can be inserted into a through hole 648 formed in the support member 64 by dropping by its own weight. Since the pin 74 is inserted into the through hole 648 formed in the support member 64, the movement of the support member 64 in the horizontal direction is limited. The pin 74 is covered with a guide 76. This prevents the pin 74 from coming off.

  As described above, the screw drop prevention mechanism 60D of the fourth configuration example is fixed to the lower surface of the cover member 54, and is movably attached to the fixed portion 62, and the head 582 of the screw 58 is attached. A support member 64 that can be supported from below and a pin 74 that restricts the movement of the support member 64 are provided. Thereby, even if the screw 58 is loosened, the support member 64 supports the head 582 of the screw 58 from below, so that the screw 58 can be prevented from dropping.

〔Experimental result〕
An upward screw 58 for fixing the cover member 54 was attached to the lower surface of the water cooling flange 50 of the heat treatment apparatus described above, and the film formation process was repeated 110 times (Run) in the processing container 2. The temperature of the water cooling flange 50 during the film forming process was 25 to 30 ° C., and the temperature of the cover member 54 was about 30 ° C. Moreover, the time of one film-forming process was 3 to 8 hours. On the other hand, the temperature of the water cooling flange 50 when carrying out and carrying in the wafer boat 8 was 68.7 to 110 ° C., and the temperature of the cover member 54 was 100 ° C. to 220 ° C. Moreover, the time for carrying out and carrying in the wafer boat 8 was 7 to 15 minutes.

  After the 110th (Run) film forming process, it was confirmed whether or not the screw had dropped. As a result, no screw dropping occurred.

  As mentioned above, although the form for implementing this invention was demonstrated, the said content does not limit the content of invention, Various deformation | transformation and improvement are possible within the scope of the present invention.

  In the above embodiment, the wafer W is an example of a substrate. The water cooling flange 50 is an example of a support base. The cover member 54 is an example of a plate member. The leaf springs 66 and 70, the ball plunger 72, and the pin 74 are an example of a movement limiting mechanism.

  In the above-described embodiment, the case where the movement limiting mechanism is the leaf springs 66 and 70, the ball plunger 72, or the pin 74 has been described as an example. However, the present invention is not limited to this, and the movement of the support member 64 is performed. Other mechanisms may be used as long as it is possible to limit the above.

DESCRIPTION OF SYMBOLS 1 Heat processing apparatus 2 Processing container 50 Water cooling flange 54 Cover member 58 Screw 582 Head 60 Screw fall prevention mechanism 62 Fixing part 622 Mounting part 624 Guide part 64 Support member 642 1st horizontal part 644 Vertical part 646 2nd horizontal part 648 Through hole 66 leaf spring 68 rivet 70 leaf spring 72 ball plunger 74 pin W wafer

Claims (11)

A screw fall prevention mechanism for fixing a plate-like member to the lower surface of a support base that accommodates a substrate inside and supports a processing vessel that performs a predetermined heat treatment on the substrate, and prevents the upward screw from dropping,
A fixing portion fixed to the lower surface of the plate-like member;
A support member that is movably attached to the fixed portion and can support the head of the screw from below;
A movement restriction mechanism for restricting movement of the support member;
Having
Screw fall prevention mechanism. The fixing part is fixed to the plate-like member by rivets,
The screw fall prevention mechanism according to claim 1. The fixing portion is fixed to the plate member by welding,
The screw fall prevention mechanism according to claim 1. The support member is
A first horizontal portion movably attached to the fixed portion;
A vertical portion extending vertically from one end of the first horizontal portion;
A second horizontal portion extending in a horizontal direction from an end of the vertical portion opposite to the first horizontal portion, and capable of supporting the screw head from below;
Having
The screw fall prevention mechanism according to any one of claims 1 to 3. The movement restriction mechanism restricts movement of the support member in the horizontal direction at a position where the support member supports the head of the screw.
The screw fall prevention mechanism according to any one of claims 1 to 4. The movement restriction mechanism is a leaf spring.
The screw fall prevention mechanism according to any one of claims 1 to 5. The movement restriction mechanism is a ball plunger.
The screw fall prevention mechanism according to any one of claims 1 to 5. A through hole is formed in the support member,
The movement restriction mechanism is a pin that can be inserted into the through-hole by dropping by its own weight.
The screw fall prevention mechanism according to any one of claims 1 to 5. The screw is a hybrid screw,
The screw fall prevention mechanism according to any one of claims 1 to 8. The screw is a stepped screw;
The screw fall prevention mechanism according to any one of claims 1 to 9. A heat treatment apparatus for performing a predetermined heat treatment on a substrate accommodated in a processing container,
A support for supporting the processing vessel;
A plate-like member fixed to the lower surface of the support base by an upward screw;
The screw drop prevention mechanism according to any one of claims 1 to 10, which prevents the screw from dropping.
Having
Heat treatment equipment.

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