JP2018085481A - Method for regeneration of rubber elastic member - Google Patents

Method for regeneration of rubber elastic member Download PDF

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Publication number
JP2018085481A
JP2018085481A JP2016229055A JP2016229055A JP2018085481A JP 2018085481 A JP2018085481 A JP 2018085481A JP 2016229055 A JP2016229055 A JP 2016229055A JP 2016229055 A JP2016229055 A JP 2016229055A JP 2018085481 A JP2018085481 A JP 2018085481A
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adhesive surface
elastic member
rubber elastic
adhesive
resin composition
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有次 入澤
Yuji Irisawa
有次 入澤
俊明 初見
Toshiaki Hatsumi
俊明 初見
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Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
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Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02WCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00Technologies for solid waste management
    • Y02W30/50Reuse, recycling or recovery technologies
    • Y02W30/62Plastics recycling; Rubber recycling

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  • Separation, Recovery Or Treatment Of Waste Materials Containing Plastics (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method for regeneration of a rubber elastic member, by which a foreign material sticking to a tacky face of a rubber elastic member can be removed easily.SOLUTION: [1] A method for regeneration of a rubber elastic member comprises the steps of: putting a hardening resin composition on a tacky face that a rubber elastic member has; curing the hardening resin composition; and peeling a cured product formed on the tacky face, thereby removing a foreign material sticking to the tacky face together with the cured product. [2] The method for regeneration of a rubber elastic member as cited in [1], in which the tacky face is formed by a silicone rubber or fluorine-based elastomer. [3] The method for regeneration of a rubber elastic member as cited in [1] or [2], in which the hardening resin composition includes polyvinyl alcohol, polyvinyl acetate or vinyl acetate monomer. [4] The method for regeneration of a rubber elastic member as cited in [1] or [2], in which the hardening resin composition includes a fluorine-based elastomer.SELECTED DRAWING: None

Description

本発明は、ゴム弾性部材の粘着面に付着した異物を除去する、ゴム弾性部材の再生方法に関する。   The present invention relates to a method for regenerating a rubber elastic member, which removes foreign matter adhering to the adhesive surface of the rubber elastic member.

従来、セラミックコンデンサ、チップ抵抗、コイル、シリコンウエハ等の電子部品を搬送する保持治具には、その粘着面に電子部品を粘着して保持することが可能なゴム弾性部材が備えられている。ゴム弾性部材の粘着面に電子部品を粘着させたり取り外したりする際に、電子部品を構成するシリコン基板の端部や微細金属電極の一部が欠けたり、削られたりすることがある。また、ウエハからダイシングされた電子部品に、ウエハの切り屑が付着していることがある。このため、使用後のゴム弾性部材の粘着面には、電子部品の破片や切り屑等の異物が付着していることがある。   2. Description of the Related Art Conventionally, a holding jig for transporting electronic components such as a ceramic capacitor, a chip resistor, a coil, and a silicon wafer is provided with a rubber elastic member that can adhere and hold the electronic component on its adhesive surface. When the electronic component is adhered to or removed from the adhesive surface of the rubber elastic member, the end portion of the silicon substrate constituting the electronic component or a part of the fine metal electrode may be chipped or scraped. Also, wafer chips may adhere to electronic components diced from the wafer. For this reason, foreign materials such as debris and chips of electronic components may adhere to the adhesive surface of the rubber elastic member after use.

ゴム弾性部材の粘着面に付着した異物を除去すれば、そのゴム弾性部材を有する電子部品保持治具を再び使用することができる。このような異物を除去する方法として、例えば、特許文献1には、異物が付着したゴム弾性部材の粘着面に、特定の粘着力を有する粘着テープを一時的に貼着し、これを剥がすことによって、異物を粘着テープへ移し、ゴム弾性部材の粘着面から異物を除去する方法が開示されている。   If the foreign matter adhering to the adhesive surface of the rubber elastic member is removed, the electronic component holding jig having the rubber elastic member can be used again. As a method for removing such foreign matter, for example, in Patent Document 1, an adhesive tape having a specific adhesive force is temporarily attached to the adhesive surface of a rubber elastic member to which the foreign matter has adhered, and then peeled off. Discloses a method for transferring foreign matter to an adhesive tape and removing the foreign matter from the adhesive surface of the rubber elastic member.

特許第5887151号公報Japanese Patent No. 5887151

しかしながら、粘着テープをゴム弾性部材の粘着面に押し付けて貼着する際に、異物が細かく割れたり、異物がゴム弾性部材の粘着面へ突き刺さったりして、所望の通りに粘着面から異物を除去できないことがあった。また、異物を充分に除去するためには、粘着面に対して粘着テープを貼着し、剥離する一連の操作を複数回繰り返す必要があった。   However, when adhering the adhesive tape to the adhesive surface of the rubber elastic member, the foreign material is finely cracked, or the foreign material is stuck into the adhesive surface of the rubber elastic member, removing the foreign material from the adhesive surface as desired. There was something I couldn't do. Further, in order to sufficiently remove the foreign matter, it was necessary to repeat a series of operations of attaching and peeling the adhesive tape to the adhesive surface a plurality of times.

本発明は、上記事情に鑑みてなされたものであり、ゴム弾性部材の粘着面に付着した異物を容易に取り除くことが可能な、ゴム弾性部材の再生方法を提供する。   The present invention has been made in view of the above circumstances, and provides a method for regenerating a rubber elastic member that can easily remove foreign matter adhering to the adhesive surface of the rubber elastic member.

[1] ゴム弾性部材が有する粘着面に、硬化性樹脂組成物を配し、前記硬化性樹脂組成物を硬化させ、前記粘着面に形成された硬化物を剥離することによって、前記粘着面に付着していた異物を前記硬化物とともに除去する、ゴム弾性部材の再生方法。
[2] 前記粘着面は、シリコーンゴム又はフッ素系エラストマーで形成されている、[1]に記載のゴム弾性部材の再生方法。
[3] 前記硬化性樹脂組成物は、ポリビニルアルコール、ポリ酢酸ビニル又は酢酸ビニルモノマーを含む、[1]又は[2]に記載のゴム弾性部材の再生方法。
[4] 前記硬化性樹脂組成物は、フッ素系エラストマーを含む、[1]又は[2]に記載のゴム弾性部材の再生方法。
[5] 前記硬化性樹脂組成物を配する前の前記粘着面に前記異物の一部分が刺さっている、[1]〜[4]の何れか一項に記載のゴム弾性部材の再生方法。
[6] 前記異物が、ガラス、金属又は半導体によって形成された小片であり、その小片の最大径が5mm以下である、[1]〜[5]の何れか一項に記載のゴム弾性部材の再生方法。
[1] A curable resin composition is disposed on the adhesive surface of the rubber elastic member, the curable resin composition is cured, and the cured product formed on the adhesive surface is peeled off to thereby form the adhesive surface. A method for regenerating a rubber elastic member, wherein the adhered foreign matter is removed together with the cured product.
[2] The method for regenerating a rubber elastic member according to [1], wherein the adhesive surface is formed of silicone rubber or a fluorine-based elastomer.
[3] The method for regenerating a rubber elastic member according to [1] or [2], wherein the curable resin composition contains polyvinyl alcohol, polyvinyl acetate, or a vinyl acetate monomer.
[4] The method for regenerating a rubber elastic member according to [1] or [2], wherein the curable resin composition contains a fluorine-based elastomer.
[5] The method for regenerating a rubber elastic member according to any one of [1] to [4], wherein a part of the foreign matter is stuck in the adhesive surface before the curable resin composition is disposed.
[6] The rubber elastic member according to any one of [1] to [5], wherein the foreign matter is a small piece formed of glass, metal, or semiconductor, and the maximum diameter of the small piece is 5 mm or less. Playback method.

本発明のゴム弾性部材の再生方法によれば、ゴム弾性部材の粘着面に付着した異物を容易に取り除き、ゴム弾性部材を再生することができる。具体的には、ゴム弾性部材の粘着面上で形成した硬化物を剥離する操作を何度も繰り返すことなく、異物を充分に除去することができる。   According to the method for regenerating a rubber elastic member of the present invention, it is possible to easily remove foreign matter adhering to the adhesive surface of the rubber elastic member and regenerate the rubber elastic member. Specifically, the foreign matter can be sufficiently removed without repeating the operation of peeling the cured product formed on the adhesive surface of the rubber elastic member many times.

《ゴム弾性部材の再生方法》
本発明の第一態様は、ゴム弾性部材が有する粘着面に、硬化性樹脂組成物を配し、前記硬化性樹脂組成物を硬化させ、前記粘着面に形成された硬化物を剥離することによって、前記粘着面に付着していた異物を前記硬化物とともに除去する、ゴム弾性部材の再生方法である。
<Recycling method of rubber elastic member>
In the first aspect of the present invention, the curable resin composition is disposed on the adhesive surface of the rubber elastic member, the curable resin composition is cured, and the cured product formed on the adhesive surface is peeled off. A method for regenerating a rubber elastic member, wherein foreign matter adhering to the adhesive surface is removed together with the cured product.

(ゴム弾性部材)
ゴム弾性部材の形状は、電子部品等の被粘着物を粘着して保持することが可能な粘着面を有する形状であればよく、例えば、シート状、板状等の平坦形状が挙げられる。ゴム弾性部材の厚みは特に限定されず、例えば0.005mm〜5mm程度に設定され得る。
ゴム弾性部材の粘着面の面積は用途に応じて適宜設定され、例えば、100cm(10cm×10cm)〜600cm(20cm×30cm)とすることができる。
(Rubber elastic member)
The shape of the rubber elastic member may be a shape having an adhesive surface capable of adhering and holding an adherend such as an electronic component, and examples thereof include a flat shape such as a sheet shape and a plate shape. The thickness of the rubber elastic member is not particularly limited, and can be set to about 0.005 mm to 5 mm, for example.
The area of the adhesive surface of the rubber elastic member is appropriately set according to the application, and can be, for example, 100 cm 2 (10 cm × 10 cm) to 600 cm 2 (20 cm × 30 cm).

ゴム弾性部材の粘着面の全体が均一な粘着性を有していてもよいし、粘着面の一部が他の部分と異なる不均一な粘着性を有していてもよい。粘着面の粘着性が不均一である場合、その粘着面において、相対的に強い粘着性を有する強粘着部と、相対的に弱い粘着性を有する弱粘着部と、粘着性を有さない非粘着部とが、任意に配置された構成が例示できる。例えば、被粘着物を粘着して保持する主要な役割を果たす強粘着部が、弱粘着部又は非粘着部の間に一定間隔でアレイ状に配置された構成が挙げられる。   The entire adhesive surface of the rubber elastic member may have uniform adhesiveness, or a part of the adhesive surface may have non-uniform adhesiveness different from other parts. If the adhesive surface has non-uniform adhesiveness, the adhesive surface has a relatively strong adhesive part, a relatively weak adhesive part, a relatively weak adhesive part, and a non-adhesive part. A configuration in which the adhesive portion is arbitrarily arranged can be exemplified. For example, the structure by which the strong adhesion part which plays the main role which adhere | attaches and adhere | attaches a to-be-adhered object is arrange | positioned at a fixed space | interval between the weak adhesion part or the non-adhesion part is mentioned.

ゴム弾性部材の粘着面は、電子部品等の被粘着物を粘着して保持することが可能な粘着力を有している。前記強粘着部の粘着力は、被粘着物を充分に保持する観点から、後述する測定方法で測定して、1〜60g/mmが好ましく、7〜60g/mmがより好ましい。
上記の粘着力を有すると、例えば、シリコンウエハ、フレキシブルプリント基板、大画面表示装置用のガラス板、チップコンデンサ、セラミックコンデンサ、コイルフィルター、抵抗素子、導電回路、コンデンサ、LSI、インダクタ等の電子部品を容易に粘着して保持し、必要に応じて容易に取り外すことができる。
The adhesive surface of the rubber elastic member has an adhesive force capable of adhering and holding an adherend such as an electronic component. The adhesive strength of the strong adhesive part is preferably 1 to 60 g / mm 2 and more preferably 7 to 60 g / mm 2 as measured by a measurement method described later from the viewpoint of sufficiently holding the adherend.
Electronic components such as silicon wafers, flexible printed boards, glass plates for large screen display devices, chip capacitors, ceramic capacitors, coil filters, resistance elements, conductive circuits, capacitors, LSIs, inductors, etc. Can be easily adhered and held, and can be easily removed as necessary.

上記粘着力の測定方法は、粘着面の少なくとも測定部位が平坦である場合に適用され、次の通りに行われる。まず、測定する粘着面を備えたゴム弾性部材を水平に固定し、測定環境を21±1℃、湿度50±5%に設定する。次に、デジタルフォースゲージに取り付けられた直径10mmの円柱を成したステンレス鋼(SUS304)製の接触子を、下降速度10mm/分で下降させ、ゴム弾性部材の粘着面(例えば強粘着部)に接触させる。この接触子を粘着面に対して、25g/mmの押込み荷重で垂直に3秒間押圧する。その後、180mm/分の上昇速度で前記接触子を粘着面から垂直に引き離す。このときにデジタルフォースゲージによって引き離し荷重を読み取る。この操作を、粘着面の複数箇所、例えば10箇所で行い、得られる複数の引き離し荷重を算術平均した値を粘着面の粘着力とする。 The method for measuring the adhesive force is applied when at least the measurement site of the adhesive surface is flat, and is performed as follows. First, a rubber elastic member having an adhesive surface to be measured is fixed horizontally, and the measurement environment is set to 21 ± 1 ° C. and humidity 50 ± 5%. Next, a stainless steel (SUS304) contactor having a 10 mm diameter column attached to the digital force gauge is lowered at a descending speed of 10 mm / min to the adhesive surface of the rubber elastic member (for example, a strong adhesive portion). Make contact. This contactor is pressed vertically against the adhesive surface for 3 seconds with an indentation load of 25 g / mm 2 . Thereafter, the contactor is pulled vertically away from the adhesive surface at a rising speed of 180 mm / min. At this time, the separation load is read by the digital force gauge. This operation is performed at a plurality of locations on the adhesive surface, for example, 10 locations, and a value obtained by arithmetically averaging the plurality of separation loads obtained is defined as the adhesive strength of the adhesive surface.

上記粘着力の測定において用いる、ゴム弾性部材の固定装置としては、例えば、吸着固定装置(商品名:電磁チャック、KET−1530B、カネテック社製)や市販の真空吸引チャックプレートが挙げられる。上記の接触子を取り付けるデジタルフォースゲージとしては、例えば「商品名:ZP−50N、イマダ社製」が挙げられる。上記粘着力の測定は、手動で行ってもよいが、例えば、テストスタンド(例えば、商品名:VERTICAl MODEL MOTORIZED STAND シリーズ、イマダ社製)等の機器を用いて、自動で行ってもよい。   Examples of the rubber elastic member fixing device used in the measurement of the adhesive force include an adsorption fixing device (trade name: electromagnetic chuck, KET-1530B, manufactured by Kanetec Corporation) and a commercially available vacuum suction chuck plate. As a digital force gauge which attaches said contactor, "brand name: ZP-50N, the Imada company make" is mentioned, for example. Although the measurement of the adhesive force may be performed manually, for example, it may be automatically performed using a device such as a test stand (for example, trade name: VERTICAl MODEL MOTORIZED STAND series, manufactured by Imada Co., Ltd.).

粘着面の表面粗さは、被粘着物の取り付け及び取り外しを容易にする観点から調整されていてもよく、例えば、十点平均粗さRz(JIS B 0601−1994)が0.5〜3μmに調整されていることが好ましい。ここで例示した十点平均粗さRzは、カットオフ0.8mm、測定長さ2.4mmの条件で測定し、複数個所の測定値を算術平均した値である。
ここで、上記の粘着面の表面粗さは、粘着面に異物が付着していない状態の数値である。
The surface roughness of the adhesive surface may be adjusted from the viewpoint of facilitating the attachment and removal of the adherend. For example, the ten-point average roughness Rz (JIS B 0601-1994) is 0.5 to 3 μm. It is preferably adjusted. The ten-point average roughness Rz exemplified here is a value obtained by arithmetically averaging measured values at a plurality of locations, measured under conditions of a cutoff of 0.8 mm and a measurement length of 2.4 mm.
Here, the surface roughness of the pressure-sensitive adhesive surface is a numerical value in a state where no foreign matter is attached to the pressure-sensitive adhesive surface.

粘着面の硬度(JIS K6253[デュロメータA])は、被粘着物の取り付け及び取り外しを容易にする観点から調整されていてもよく、例えば、5〜60程度に調整されていることが好ましい。硬度が、5以上であると充分な粘着力が得られ易く、60以下であると被粘着物の取り外しを容易に行うことができる。   The hardness (JIS K6253 [durometer A]) of the adhesive surface may be adjusted from the viewpoint of facilitating the attachment and removal of the adherend, and is preferably adjusted to about 5 to 60, for example. When the hardness is 5 or more, sufficient adhesive force can be easily obtained, and when the hardness is 60 or less, the object to be adhered can be easily removed.

ゴム弾性部材は、単独で使用されてもよいし、他の基体に装着されて使用されてもよい。
基体の形状は特に限定されず、ゴム弾性部材を支持する目的に適した形状が適宜採用される。基体を形成する材料は特に限定されず、例えば、金属、樹脂、セラミックス等が挙げられる。
The rubber elastic member may be used alone or may be used by being attached to another base.
The shape of the substrate is not particularly limited, and a shape suitable for the purpose of supporting the rubber elastic member is appropriately adopted. The material for forming the substrate is not particularly limited, and examples thereof include metals, resins, and ceramics.

ゴム弾性部材の少なくとも粘着面は、粘着剤組成物によって形成され得る。粘着面を構成するゴム材料としては、例えば、シリコーンゴム、フッ素系エラストマー、ウレタン系エラストマー、天然ゴム、スチレン−ブタジエン共重合エラストマー等の各種エラストマー等が挙げられる。なかでも、強度、耐薬品性に優れたシリコーンゴム、フッ素系エラストマーが好ましい。シリコーンゴムとしては、例えば、特許第4656582号公報に記載された粘着性組成物によって得られたものが好ましい。フッ素系エラストマーとしては、例えば、特許第4632031号公報、特許第2990646号公報、特開2000−007835号公報、特開2001−106893号公報、特開2003−201401号公報等に記載されたものが好ましい。   At least the adhesive surface of the rubber elastic member can be formed of an adhesive composition. Examples of the rubber material constituting the pressure-sensitive adhesive surface include various elastomers such as silicone rubber, fluorine-based elastomer, urethane-based elastomer, natural rubber, and styrene-butadiene copolymer elastomer. Of these, silicone rubber and fluorine elastomer having excellent strength and chemical resistance are preferable. As silicone rubber, what was obtained by the adhesive composition described in the patent 4656582 is preferable, for example. Examples of the fluorine-based elastomer include those described in Japanese Patent No. 4632031, Japanese Patent No. 2990646, Japanese Patent Application Laid-Open No. 2000-007835, Japanese Patent Application Laid-Open No. 2001-106893, Japanese Patent Application Laid-Open No. 2003-201401, and the like. preferable.

(硬化性樹脂組成物)
ゴム弾性部材が有する粘着面に配する前記硬化性樹脂組成物としては、粘着面に配した後に粘着面上で硬化した硬化物が、粘着面から容易に剥離され得るものが好ましい。また、剥離の際に、粘着面に付着していた異物を硬化物と共に除去できるものが好ましい。ここで、「硬化」とは物理的作用又は化学的作用によって硬化性組成物の成分が固体に変化するこという。このような硬化性樹脂組成物としては、例えば、分散媒に樹脂が分散された樹脂組成物、分散媒に樹脂前駆体が分散若しくは溶解された樹脂前駆体組成物が挙げられる。ここで、「樹脂」には一般的な合成樹脂の他、ゴム及びエラストマーも含まれる。
(Curable resin composition)
The curable resin composition disposed on the adhesive surface of the rubber elastic member is preferably a cured product that can be easily peeled off from the adhesive surface after being disposed on the adhesive surface and cured on the adhesive surface. Moreover, what can remove the foreign material adhering to the adhesion surface with hardened | cured material at the time of peeling is preferable. Here, “curing” means that a component of the curable composition is changed to a solid by a physical action or a chemical action. Examples of such a curable resin composition include a resin composition in which a resin is dispersed in a dispersion medium, and a resin precursor composition in which a resin precursor is dispersed or dissolved in a dispersion medium. Here, “resin” includes not only general synthetic resin but also rubber and elastomer.

前記樹脂組成物としては、例えば、次に例示する水分散系接着剤組成物が挙げられる。ここで、水分散系接着剤組成物は、エマルションであってもよいし、非エマルションであってもよい。水分散系接着剤組成物は、配する粘着面を劣化させたり、粘着面に付着している異物を変性させたりする恐れが少ないので好ましい。
具体的な水分散系接着剤組成物としては、例えば、水にポリ酢酸ビニル(酢酸ビニル樹脂)が分散されたポリ酢酸ビニル分散液、水にエチレン−酢酸ビニル樹脂共重体(EVA)が分散されたEVA分散液、水にポリビニアルコールが分散されたポリビニルアルコール分散液、水に天然ゴム(ラテックス)が分散されたラテックス分散液、水にエーテルセルロース(セルロースのエーテル誘導体:例えばメチルセルロース)が分散されたエーテルセルロース分散液、水に澱粉が分散された澱粉分散液、水にαオレフィン(例えばイソブチレン)と無水マレイン酸の共重合体が分散されたαオレフィン系樹脂分散液、水にラテックス状のスチレン−ブタジエンゴム(SBRラテックス)が分散されたSBRラテックス分散液、水に(メタ)アクリル系樹脂が分散された(メタ)アクリル系樹脂分散液、水にウレタン系樹脂が分散されたウレタン系樹脂分散液、水に公知の水性高分子及びイソシアネートが分散されたイソシアネート架橋型樹脂分散液、水にフェノール樹脂が分散されたフェノール樹脂分散液、水にメラミン樹脂が分散されたメラミン樹脂分散液、水にウレア樹脂が分散されたウレア樹脂分散液等が挙げられる。
これらの分散液には、公知の添加剤が含まれていてもよい。
As said resin composition, the water-dispersed adhesive composition illustrated next is mentioned, for example. Here, the water-dispersed adhesive composition may be an emulsion or a non-emulsion. The water-dispersed adhesive composition is preferred because it has less fear of deteriorating the pressure-sensitive adhesive surface to be disposed or denatures foreign matter adhering to the pressure-sensitive adhesive surface.
Specific examples of the water-dispersed adhesive composition include a polyvinyl acetate dispersion in which polyvinyl acetate (vinyl acetate resin) is dispersed in water, and an ethylene-vinyl acetate resin copolymer (EVA) in water. EVA dispersion liquid, polyvinyl alcohol dispersion liquid in which polyvinyl alcohol is dispersed in water, latex dispersion liquid in which natural rubber (latex) is dispersed in water, and ether cellulose (an ether derivative of cellulose: for example, methyl cellulose) is dispersed in water. Ether cellulose dispersion, starch dispersion in which starch is dispersed in water, α-olefin resin dispersion in which a copolymer of α-olefin (eg, isobutylene) and maleic anhydride is dispersed in water, latex styrene in water -SBR latex dispersion in which butadiene rubber (SBR latex) is dispersed, (meth) acrylic in water (Meth) acrylic resin dispersions in which water-based resins are dispersed, urethane resin dispersions in which urethane resins are dispersed in water, and isocyanate cross-linked resin dispersions in which known aqueous polymers and isocyanates are dispersed in water And a phenol resin dispersion in which a phenol resin is dispersed in water, a melamine resin dispersion in which a melamine resin is dispersed in water, and a urea resin dispersion in which a urea resin is dispersed in water.
These dispersions may contain known additives.

前記樹脂組成物としては、例えば、次に例示する有機溶剤系接着剤組成物が挙げられる。有機溶剤系接着剤組成物は、粘着面に配した後に有機溶剤を除去するための乾燥が水に比べて容易であるため好ましい。
具体的な有機溶剤系接着剤組成物としては、例えば、溶剤に天然ゴムが含まれた天然ゴム溶液、溶剤にカゼインが含まれたカゼイン溶液、溶剤に(メタ)アクリル系樹脂が含まれた(メタ)アクリル系樹脂溶液、溶剤にウレタン系樹脂が含まれたウレタン系樹脂溶液、溶剤に塩化ビニル樹脂が含まれた塩化ビニル樹脂溶液、溶剤にクロロプレンゴムが含まれたクロロプレンゴム溶液、溶剤にスチレン−ブタジエンゴム(SBR)が含まれたSBR溶液、溶剤にニトリルゴムが含まれたニトリルゴム溶液、溶剤にニトロセルロースが含まれたニトロセルロース溶液、溶剤にフェノール樹脂が含まれたフェノール樹脂溶液、溶剤にメラミン樹脂が含まれたメラミン樹脂溶液、溶剤にウレア樹脂が含まれたウレア樹脂溶液、溶剤にフッ素系エラストマー(フッ素含有エラストマー)が含まれたフッ素系エラストマー溶液、溶剤にシリコーンゴムが含まれたシリコーンゴム溶液、等が挙げられる。
これらの溶液には、公知の添加剤が含まれていてもよい。これらの溶液を構成する溶剤は、目的の樹脂を溶解又は分散可能な公知の有機溶剤が適用される。
Examples of the resin composition include organic solvent-based adhesive compositions exemplified below. The organic solvent-based adhesive composition is preferable because it is easier to dry to remove the organic solvent after being placed on the adhesive surface than water.
Specific examples of the organic solvent-based adhesive composition include a natural rubber solution containing natural rubber as a solvent, a casein solution containing casein as a solvent, and a (meth) acrylic resin as a solvent ( (Meth) acrylic resin solution, urethane resin solution containing urethane resin in solvent, vinyl chloride resin solution containing vinyl chloride resin in solvent, chloroprene rubber solution containing chloroprene rubber in solvent, styrene in solvent -SBR solution containing butadiene rubber (SBR), nitrile rubber solution containing nitrile rubber as solvent, nitrocellulose solution containing nitrocellulose as solvent, phenol resin solution containing solvent as phenol resin, solvent Melamine resin solution containing melamine resin, urea resin solution containing urea resin in solvent, fluorine-based elastomer in solvent Chromatography (fluorine-containing elastomer) of the contained fluorine-based elastomer solution, the solvent in the silicone rubber contains silicone rubber solution, and the like.
These solutions may contain known additives. As the solvent constituting these solutions, a known organic solvent capable of dissolving or dispersing the target resin is applied.

前記樹脂前駆体は、樹脂モノマー又はプレポリマーをいう。
前記樹脂前駆体組成物は、配された粘着面上において、前記樹脂前駆体が反応し樹脂を形成するものである。具体的な樹脂前駆体組成物としては、例えば、水又は有機溶剤に酢酸ビニルが含まれたポリ酢酸ビニル前駆体組成物、水又は有機溶剤にエチレン及び酢酸ビニルが含まれたEVA前駆体組成物、水又は有機溶剤にビニルアルコールが含まれたポリビニルアルコール前駆体組成物、水又は有機溶剤に(メタ)アクリル酸又はそのアルキルエステルが含まれた(メタ)アクリル系樹脂前駆体組成物、水又は有機溶剤にポリオール及びポリイソシアネートが含まれたウレタン系樹脂前駆体組成物、水又は有機溶剤にエポキシ樹脂プレポリマーが含まれたエポキシ樹脂前駆体組成物、架橋成分を含むフッ素ゴム及び補強フィラーと架橋剤が含まれたフッ素樹脂前駆体組成物、水又は有機溶剤にオルガノポリシロキサン(その末端が例えば水酸基又はビニル基であるもの。)及び架橋剤が含まれたシリコーン系樹脂前駆体組成物等が挙げられる。
前記樹脂前駆体組成物には、光重合開始剤、熱重合開始剤、硬化剤、安定剤等の公知の添加剤が含まれていてもよい。
The resin precursor refers to a resin monomer or a prepolymer.
In the resin precursor composition, the resin precursor reacts to form a resin on the disposed adhesive surface. Specific examples of the resin precursor composition include a polyvinyl acetate precursor composition in which vinyl acetate is contained in water or an organic solvent, and an EVA precursor composition in which ethylene and vinyl acetate are contained in water or an organic solvent. , A polyvinyl alcohol precursor composition in which vinyl alcohol is contained in water or an organic solvent, a (meth) acrylic resin precursor composition in which water or an organic solvent contains (meth) acrylic acid or an alkyl ester thereof, water or Urethane resin precursor composition containing polyol and polyisocyanate in organic solvent, epoxy resin precursor composition containing epoxy resin prepolymer in water or organic solvent, fluororubber containing crosslinking component and reinforcing filler Fluoro resin precursor composition containing an agent, water or an organic solvent with organopolysiloxane What is Le group.) And a crosslinking agent and silicone-based resin precursor composition or the like contained.
The resin precursor composition may contain known additives such as a photopolymerization initiator, a thermal polymerization initiator, a curing agent, and a stabilizer.

前記硬化性樹脂組成物に含まれる前記樹脂又は前記樹脂前駆体の含有量は、前記硬化性樹脂組成物が前記粘着面に配され得る粘度を呈し、その硬化後に、前記粘着面上に硬化物を形成可能な量であればよい。具体的な前記含有量は、前記樹脂又は前記樹脂前駆体の種類にもよるが、前記硬化性樹脂組成物の総質量に対して、例えば、0.1〜50質量%の範囲で調整することができる。   Content of the said resin or the said resin precursor contained in the said curable resin composition exhibits the viscosity with which the said curable resin composition can be distribute | arranged to the said adhesion surface, and the cured | curing material on the said adhesion surface after the hardening As long as the amount can be formed. The specific content depends on the type of the resin or the resin precursor, but is adjusted in the range of, for example, 0.1 to 50% by mass with respect to the total mass of the curable resin composition. Can do.

(硬化性樹脂組成物を粘着面に配する方法)
ゴム弾性部材の粘着面に前記硬化性樹脂組成物を配する(設ける)方法としては、例えば、前記粘着面に前記硬化性樹脂組成物を塗布(塗工)する方法、前記粘着面に前記硬化性組成物を転写する方法等が挙げられる。
(Method of arranging the curable resin composition on the adhesive surface)
Examples of a method of arranging (providing) the curable resin composition on the adhesive surface of the rubber elastic member include a method of applying (coating) the curable resin composition to the adhesive surface, and the curing on the adhesive surface. And a method of transferring the adhesive composition.

前記塗布する方法としては、所望の厚みで塗布可能な公知方法が適用でき、例えば、フィルムコーター、フィルムアプリケーター、バーコーター、ダイコーター、スピンコーター、ロールコーター、カーテンコーター、各種の印刷、浸漬、噴霧、キャスティング、吐出、刷毛塗り等が挙げられる。また、前記硬化性樹脂組成物の粘度が低い場合には、塗布領域の周囲に囲い(土手)を設けて、硬化性樹脂組成物をその囲いの中へ注入するように塗布してもよい。
上記の塗布方法のうち、粘着面に付着している異物を、ゴム弾性部材の内部へ刺し込んだり、粉砕したりする恐れが少ない方法が好ましい。この観点から、粘着面に付着している異物が、ガラス、金属又は半導体によって形成された小片である場合、囲いを設けて注入する塗布方法が好ましい。
As the coating method, known methods that can be applied at a desired thickness can be applied. For example, film coater, film applicator, bar coater, die coater, spin coater, roll coater, curtain coater, various printing, dipping, spraying Casting, discharging, brushing, and the like. When the viscosity of the curable resin composition is low, an enclosure (bank) may be provided around the application region, and the curable resin composition may be applied so as to be injected into the enclosure.
Of the above-mentioned application methods, a method is preferred in which the foreign matter adhering to the adhesive surface is less likely to be pierced or crushed into the rubber elastic member. From this viewpoint, when the foreign matter adhering to the adhesive surface is a small piece formed of glass, metal, or semiconductor, a coating method in which an enclosure is provided and injected is preferable.

前記転写する方法としては、例えば、まず、離型フィルムの表面に前記硬化性樹脂組成物を配し(硬化性樹脂組成物層/離型フィルム層)の層構成を有する積層フィルムを準備する。次に、この積層フィルムの硬化性樹脂組成物層を前記粘着面に接触させ、その硬化前の粘着性を利用して前記硬化性樹脂組成物層を前記粘着面に付着させるとともに、前記積層フィルムの前記離型フィルム層を引き離すことによって、前記硬化性樹脂組成物層を前記粘着面に転写する方法が挙げられる。この転写方法においても、前記粘着面に付着している異物をゴム弾性部材の内部へ刺し込んだり、粉砕したりする恐れが少ない。   As the transfer method, for example, first, a laminated film having a layer structure of (curable resin composition layer / release film layer) is prepared by arranging the curable resin composition on the surface of the release film. Next, the curable resin composition layer of the laminated film is brought into contact with the pressure-sensitive adhesive surface, and the curable resin composition layer is adhered to the pressure-sensitive adhesive surface using the adhesiveness before curing, and the laminated film A method of transferring the curable resin composition layer to the pressure-sensitive adhesive surface by pulling off the release film layer. Also in this transfer method, there is little risk of foreign matter adhering to the adhesive surface being pierced or crushed into the rubber elastic member.

前記粘着面における前記硬化性樹脂組成物を配する領域は、少なくとも粘着面に付着した異物が存在する領域の全体を覆う領域が好ましく、粘着面の全面に配してもよい。また、配した領域を上方から見たときの形状は、硬化後の硬化物を上方から見たときの形状に対応する。この形状は硬化物を剥離することを考慮して決定され、例えば、矩形、楕円形、円形、その他の多角形等の任意の形状に設定される。その形状が剥離方向に沿って充分に長い(例えば50〜200mm)と、硬化物を剥離することが容易になり、粘着面上の異物の除去も容易になる。したがって、前記硬化性樹脂組成物を配する領域の長手方向、即ち硬化物の長手方向は、剥離方向と一致していることが好ましい。   The region where the curable resin composition is disposed on the adhesive surface is preferably a region that covers at least the entire region where foreign substances attached to the adhesive surface are present, and may be disposed on the entire surface of the adhesive surface. Moreover, the shape when the arranged area is viewed from above corresponds to the shape when the cured product after curing is viewed from above. This shape is determined in consideration of peeling of the cured product, and is set to an arbitrary shape such as a rectangle, an ellipse, a circle, and other polygons. If the shape is sufficiently long (for example, 50 to 200 mm) along the peeling direction, the cured product can be easily peeled off, and foreign matter on the adhesive surface can be easily removed. Therefore, it is preferable that the longitudinal direction of the region where the curable resin composition is disposed, that is, the longitudinal direction of the cured product coincides with the peeling direction.

前記粘着面に配した前記硬化性樹脂組成物の厚みは、目的の硬化物の厚みに合わせて適宜設定すればよく、粘着面に付着した異物の全体を覆う程度の厚みで配することが好ましく、例えば、5μm〜1000μm程度、好ましくは10μm〜500μmの厚みで配することができる。   The thickness of the curable resin composition disposed on the adhesive surface may be appropriately set according to the thickness of the target cured product, and is preferably disposed with a thickness that covers the entire foreign matter attached to the adhesive surface. For example, it can arrange | position with thickness of about 5 micrometers-1000 micrometers, Preferably it is 10 micrometers-500 micrometers.

(硬化性樹脂組成物の硬化方法)
ゴム弾性部材の粘着面に配した前記硬化性組成物を硬化させる方法としては、例えば、大気圧又は真空下で乾燥する方法、加熱する方法、紫外線等のエネルギー線を照射する方法等の公知方法が適用される。硬化の程度は、完全硬化であってもよいし、半硬化であってもよい。上記の硬化方法うち、ゴム弾性部材を繰り返し使用する目的のために、粘着面を劣化させることを防止する観点から、大気圧又は真空下で乾燥する方法が好ましい。
(Curing method of curable resin composition)
As a method for curing the curable composition disposed on the adhesive surface of the rubber elastic member, for example, a known method such as a method of drying under atmospheric pressure or vacuum, a method of heating, a method of irradiating energy rays such as ultraviolet rays, etc. Applies. The degree of curing may be complete curing or semi-curing. Among the above curing methods, for the purpose of repeatedly using the rubber elastic member, a method of drying under atmospheric pressure or vacuum is preferable from the viewpoint of preventing the adhesive surface from being deteriorated.

硬化後の硬化物をプレスして、硬化物の粘着面に対する接着力を強化しても構わないが、プレスによって、粘着面に付着している異物を、ゴム弾性部材の内部へ刺し込んだり、粉砕したりする可能性を検討すべきである。   The cured product after curing may be pressed to strengthen the adhesive force to the adhesive surface of the cured product, but by pressing, foreign matter adhering to the adhesive surface can be inserted into the rubber elastic member, The possibility of crushing should be considered.

硬化物の厚みは、少なくとも粘着面に付着した異物の全体を覆う程度の厚みであることが好ましく、例えば、5μm〜1000μm程度、好ましくは10μm〜500μmの厚みにすることができる。このような厚みであると、硬化物は粘着面上で被膜を形成する。被膜の剥離は容易であり、被膜に取り込まれた異物の除去も容易である。
硬化物を上方から見たときの形状は硬化物を剥離することを考慮して決定され、例えば、矩形、楕円形、円形、その他の多角形等の任意の形状に設定される。その形状が剥離方向に沿って充分に長い(例えば50〜200mm)と、硬化物を剥離することが容易になり、粘着面上の異物の除去も容易になる。したがって、硬化物の長手方向は、剥離方向と一致していることが好ましい。硬化物の形状は、硬化性樹脂組成物の塗工時に調整してもよいし、硬化後にナイフやレーザー加工等で成形してもよい。
The thickness of the cured product is preferably a thickness that covers at least the entire foreign matter attached to the adhesive surface, and can be, for example, about 5 μm to 1000 μm, preferably 10 μm to 500 μm. With such a thickness, the cured product forms a film on the adhesive surface. The film can be easily peeled off, and the foreign matter taken in the film can be easily removed.
The shape when the cured product is viewed from above is determined in consideration of peeling the cured product, and is set to an arbitrary shape such as a rectangle, an ellipse, a circle, and other polygons. If the shape is sufficiently long (for example, 50 to 200 mm) along the peeling direction, the cured product can be easily peeled off, and foreign matter on the adhesive surface can be easily removed. Therefore, it is preferable that the longitudinal direction of the cured product coincides with the peeling direction. The shape of the cured product may be adjusted when the curable resin composition is applied, or may be molded with a knife or laser processing after curing.

(硬化物の剥離方法)
粘着面上で硬化した硬化物を粘着面から剥離する方法は特に限定されず、例えば、硬化物の開放端をつかみ、上方へ向かって又は硬化物の長手方向に沿って平行に、分離が進行するように任意の速度で引き剥がす方法が挙げられる。
引き剥がす速度としては、例えば、50〜300mm/分程度が好ましい。
上記速度範囲であると、硬化物の破れが生じ難く、硬化物が異物を取り込んだ状態で容易に剥離することができる。
(Method of peeling cured product)
The method for peeling the cured product cured on the adhesive surface from the adhesive surface is not particularly limited. For example, the separation proceeds by grabbing the open end of the cured product upward or in parallel along the longitudinal direction of the cured product. The method of peeling off at arbitrary speeds is mentioned.
The peeling speed is preferably about 50 to 300 mm / min, for example.
Within the above speed range, the cured product hardly breaks and can be easily peeled in a state in which the cured product takes in foreign matter.

硬化物を粘着面から剥離する際の剥離力は、硬化物が異物を保持する保持力に相関する場合がある。上記の剥離力は、JISZ0237:2009 「粘着テープ・粘着シート試験方法の90度はく離」に準じて測定され、例えば0.2〜3N/10mmが好ましく、0.5〜2N/10mmがより好ましい。上記範囲の下限値以上であると、硬化物が異物を保持した状態で剥離することが容易になり、異物除去効率を高められる。上記範囲の上限値以下であると、硬化物を剥離する操作が容易になり、ゴム弾性部材の変形や破損を防ぐことができる。   The peeling force when peeling the cured product from the pressure-sensitive adhesive surface may correlate with the holding force with which the cured product holds foreign matter. Said peeling force is measured according to JISZ0237: 2009 "90 degree peeling of an adhesive tape and an adhesive sheet test method", For example, 0.2-3N / 10mm is preferable and 0.5-2N / 10mm is more preferable. When it is at least the lower limit of the above range, it becomes easy for the cured product to peel in a state of holding foreign matter, and foreign matter removal efficiency can be improved. When it is not more than the upper limit of the above range, the operation of peeling the cured product becomes easy, and deformation and breakage of the rubber elastic member can be prevented.

(粘着面から除去される異物)
ゴム弾性部材の粘着面から除去される異物とは、そのゴム弾性部材の本来の用途において粘着面に粘着させる被粘着物とは異なる物であり、その被粘着物を粘着させることを妨げる恐れのある物である。例えば、被粘着物がセラミックコンデンサ、チップ抵抗、コイル、半導体ウエハ、ガラス基板等の電子部品である場合、異物としては、例えば、埃、塵、金属片、ガラス片、シリコンウエハ片等が挙げられる。
(Foreign matter removed from the adhesive surface)
The foreign matter removed from the adhesive surface of the rubber elastic member is different from the object to be adhered to the adhesive surface in the original use of the rubber elastic member, and there is a risk of preventing the adhesion of the object to be adhered. It is a certain thing. For example, when the adherend is an electronic component such as a ceramic capacitor, a chip resistor, a coil, a semiconductor wafer, or a glass substrate, examples of the foreign material include dust, dust, metal pieces, glass pieces, and silicon wafer pieces. .

異物が上記の小片である場合、その最大径が5mm以下、好ましくは3mm以下、より好ましくは1mm以下であると、本態様の方法により容易に除去することができる。ここで、小片の最大径とは、小片の全体を含む最小の仮想球の直径をいう。小片の最大径の測定方法としては、粘着面の上方から小片を顕微鏡で観察し、仮想球を円で代用して設定し、その直径を定規で測定する方法が挙げられる。   When the foreign material is the above-mentioned small piece, the maximum diameter thereof is 5 mm or less, preferably 3 mm or less, more preferably 1 mm or less, and it can be easily removed by the method of this embodiment. Here, the maximum diameter of the small piece means the diameter of the smallest phantom sphere including the entire small piece. As a measuring method of the maximum diameter of the small piece, there is a method in which the small piece is observed with a microscope from above the adhesive surface, a virtual sphere is substituted with a circle, and the diameter is measured with a ruler.

本発明にかかるゴム弾性部材の再生方法は、異物が粘着面の表面に対して単に粘着している場合に限られず、異物の一部分が粘着面を突き刺して、粘着面の内部(ゴム弾性部材の内部)にその一部分が存在する場合にも有効であり、粘着面から容易に異物を除去することができる。   The method for regenerating a rubber elastic member according to the present invention is not limited to the case where a foreign object simply adheres to the surface of the adhesive surface. A part of the foreign object pierces the adhesive surface and the inside of the adhesive surface (of the rubber elastic member) It is also effective when a part of the inside exists), and foreign matters can be easily removed from the adhesive surface.

<作用効果>
本発明のゴム弾性部材の再生方法によれば、その粘着面上で硬化物を形成することよって、粘着面に付着した異物を硬化物が確実に保持することができ、この硬化物を剥離することによって、異物を充分に除去することができる。粘着テープを利用した従来の異物除去方法とは異なり、剥離した硬化物を再度粘着面に押し付ける操作は必要ない。
また、本発明の方法において、硬化性樹脂組成物の配置、及びその硬化物の剥離からなる一連の操作は、ゴム弾性部材の粘着面が大面積である場合にも、小面積である場合と同様に容易に行うことができる。
<Effect>
According to the method for regenerating a rubber elastic member of the present invention, by forming a cured product on the adhesive surface, the cured product can reliably hold the foreign matter attached to the adhesive surface, and the cured product is peeled off. In this way, foreign matters can be sufficiently removed. Unlike the conventional foreign matter removing method using an adhesive tape, there is no need to press the peeled cured product against the adhesive surface again.
Further, in the method of the present invention, the series of operations consisting of the arrangement of the curable resin composition and the separation of the cured product includes a case where the adhesive surface of the rubber elastic member has a large area and a case where the area is small. It can be done easily as well.

[実施例1]
(電子部品保持治具の準備)
粘着面を有するゴム弾性シートを備えた電子部品保持治具を次のように準備した。
まず、120mm四方のステンレス鋼板の一方の表面をアセトンで脱脂処理した後、シリコーンゴム接着用プライマー(商品名「X−33−156−20」、信越化学工業株式会社製)を適量塗布して、23℃の環境中で乾燥し、プライマー層(厚さ3μm)を形成した。そのステンレス鋼板を金型に収納して、下記のシリコーン組成物を金型に注入し、120℃、10MPaでトランスファー成形し、200℃で4時間の硬化を行った。これにより、基材のステンレス鋼板の表面にシリコーン製粘着シートが形成された、電子部品保持治具を得た。
[Example 1]
(Preparation of electronic component holding jig)
An electronic component holding jig provided with a rubber elastic sheet having an adhesive surface was prepared as follows.
First, after degreasing one surface of a 120 mm square stainless steel plate with acetone, an appropriate amount of a silicone rubber adhesion primer (trade name “X-33-156-20”, manufactured by Shin-Etsu Chemical Co., Ltd.) was applied, It dried in the environment of 23 degreeC and formed the primer layer (thickness 3 micrometers). The stainless steel plate was housed in a mold, the following silicone composition was poured into the mold, transfer molded at 120 ° C. and 10 MPa, and cured at 200 ° C. for 4 hours. Thereby, the electronic component holding jig in which the silicone adhesive sheet was formed on the surface of the stainless steel plate as the base material was obtained.

(付加反応硬化型粘着性シリコーン組成物の組成)
・シリコーンゴム(商品名「X−34−632 A/B」、信越化学工業株式会社製)9
9質量%及びシリカ系充填材(株式会社龍森製、商品名「クリスタライト」)1質量%を
含有する粘着性シリコーン組成物 60質量部
・粘着力調整組成物として液状シリコーンゴム組成物(商品名「KE−1950/40
A/B」、信越化学工業株式会社製) 40質量部
(Composition of addition reaction curable adhesive silicone composition)
Silicone rubber (trade name “X-34-632 A / B”, manufactured by Shin-Etsu Chemical Co., Ltd.) 9
Adhesive silicone composition containing 9% by mass and 1% by mass of silica-based filler (trade name “Crystallite” manufactured by Tatsumori Co., Ltd.) Liquid silicone rubber composition (commercial product) Name KE-1950 / 40
A / B ", manufactured by Shin-Etsu Chemical Co., Ltd.) 40 parts by mass

上記で作製した電子部品保持治具の粘着面に、被粘着物として縦0.3mm×横0.3mm×高さ0.6mmのチップコンデンサ20,000個を高さ方向に起立状態となるように縦横方向に等間隔で配置し、粘着した状態で保持させた。次に、この粘着面上で掻き取りブレードを摺動させて、粘着面からチップコンデンサを取り外した。
このチップコンデンサの粘着及び取り外しの操作を複数回繰り返した後、粘着面を拡大鏡で観察したところ、コンデンサの電極と思われる金属片が粘着面上に散見された。金属片の最大径は、約0.05mmであった。複数の金属片の一部分は、粘着面に突き刺さった状態であった。
On the adhesive surface of the electronic component holding jig produced as described above, 20,000 chip capacitors having a height of 0.3 mm, a width of 0.3 mm, and a height of 0.6 mm are erected in the height direction as objects to be adhered. Were arranged at equal intervals in the vertical and horizontal directions and held in a sticky state. Next, the scraping blade was slid on the adhesive surface to remove the chip capacitor from the adhesive surface.
After this chip capacitor adhesion and removal operation was repeated a plurality of times, the adhesive surface was observed with a magnifying glass, and metal pieces thought to be electrodes of the capacitor were scattered on the adhesive surface. The maximum diameter of the metal piece was about 0.05 mm. A part of the plurality of metal pieces was stuck into the adhesive surface.

(粘着面に付着した異物の除去(1))
上記の金属片(金属の粉)が付着した粘着面の全体に対して、水に酢酸ビニル樹脂及び酢酸ビニルモノマーが分散されたエマルジョン形接着剤を厚さ約100μmとなるように、バーコーターで塗布した。室温で12時間自然乾燥させると、厚さ約70μmの透明な被膜になった。
粘着面上で硬化した上記被膜の端部を治具でつかみ、前述した方法ではく離接着強さ試験を行いながら、被膜の長手方向へ剥離速度300mm/分で剥離した。この被膜を剥離する際の剥離力は、約1.1N/10mmであった。
上記の方法によって再生した粘着面を拡大顕微鏡で観察したところ、粘着面に粘着したり突き刺さったりしていた金属片は、殆ど全て被膜とともに粘着面から除去されていた。
(Removal of foreign matter adhering to the adhesive surface (1))
With a bar coater, the emulsion type adhesive in which vinyl acetate resin and vinyl acetate monomer are dispersed in water is applied to the entire adhesive surface to which the above metal piece (metal powder) is attached. Applied. When it was naturally dried at room temperature for 12 hours, it became a transparent film having a thickness of about 70 μm.
The edge part of the said film | cured hardened | cured on the adhesive surface was grasped with the jig | tool, and it peeled in the longitudinal direction of the film at the peeling speed of 300 mm / min, performing the peeling adhesion strength test by the method mentioned above. The peeling force when peeling this film was about 1.1 N / 10 mm.
When the adhesive surface regenerated by the above method was observed with a magnifying microscope, almost all of the metal pieces that had adhered to or stuck into the adhesive surface were removed from the adhesive surface together with the coating.

(十点平均粗さRzの測定(1))
上記の電子部品保持治具の粘着面の十点平均粗さRz(JIS B 0601−1994)を非接触式表面粗さ計(商品名「カラー3Dレーザー顕微鏡」、型番「VK−8710」、株式会社キーエンス製)を用いて測定した。
その結果、未使用品(新品)の粘着面のRzの実測値は0.7〜1.2μmであり、上記の金属片が付着した粘着面のRzの実測値は1.3〜5.6μmであり、本発明にかかる再生方法によって金属片を除去した粘着面のRzの実測値は0.8〜1.5μmであった。この測定結果から、再生された粘着面には金属片や被膜がほとんど残留していないことが確認された。
(Measurement of ten-point average roughness Rz (1))
The ten-point average roughness Rz (JIS B 0601-1994) of the adhesive surface of the electronic component holding jig described above was measured using a non-contact type surface roughness meter (trade name “Color 3D Laser Microscope”, model number “VK-8710”, stock Measured using a company KEYENCE).
As a result, the measured value of Rz of the adhesive surface of the unused product (new article) is 0.7 to 1.2 μm, and the measured value of Rz of the adhesive surface to which the metal piece is attached is 1.3 to 5.6 μm. The measured value of Rz of the adhesive surface from which the metal piece was removed by the regeneration method according to the present invention was 0.8 to 1.5 μm. From this measurement result, it was confirmed that almost no metal piece or film remained on the regenerated adhesive surface.

(粘着力の測定(1))
上記の電子部品保持治具の粘着面の粘着力を前述した方法で測定した。
その結果、未使用(新品)の保持治具における粘着面の粘着力の実測値は33〜37g/mmであり、本発明にかかる再生方法によって金属片を除去した粘着面における粘着力の実測値は30〜37g/mmであった。この測定結果から、再生された粘着面は新品と同様の優れた粘着力を有することが確認された。
(Measurement of adhesive strength (1))
The adhesive force of the adhesive surface of the electronic component holding jig was measured by the method described above.
As a result, the measured value of the adhesive force of the adhesive surface in the unused (new) holding jig is 33 to 37 g / mm 2 , and the measured adhesive force of the adhesive surface from which the metal piece has been removed by the recycling method according to the present invention. The value was 30 to 37 g / mm 2 . From this measurement result, it was confirmed that the regenerated adhesive surface has the same excellent adhesive force as a new article.

[実施例2]
実施例1と同様に、ゴム弾性シートを備えた電子部品保持治具を準備して、さらにチップコンデンサの取り付け及び取り外しを複数回行って、金属片(金属の粉)をゴム弾性シートの粘着面に付着させた。
[Example 2]
As in Example 1, an electronic component holding jig provided with a rubber elastic sheet was prepared, and chip capacitors were attached and removed several times, and a metal piece (metal powder) was adhered to the rubber elastic sheet. Adhered to.

(粘着面に付着した異物の除去(2))
上記の金属片が付着した粘着面の全体に対して、フッ素系エラストマーを厚さ約400μmとなるように、バーコーターで塗布した。その後、オーブン中130℃で1時間乾燥させると、厚さ約300μmの透明な被膜になった。
粘着面上で硬化した上記被膜の端部を治具でつかみ、前述した方法ではく離接着強さ試験を行いながら、被膜の長手方向へ剥離速度300mm/分で剥離した。この被膜を剥離する際の剥離力は、約0.6N/10mmであった。
上記の方法によって再生した粘着面を拡大顕微鏡で観察したところ、粘着面に粘着したり突き刺さったりしていた金属片は、殆ど全て被膜とともに粘着面から除去されていた。
(Removal of foreign matter adhering to the adhesive surface (2))
The fluoroelastomer was applied to the entire adhesive surface to which the above metal piece had adhered with a bar coater so as to have a thickness of about 400 μm. Then, when it dried in oven at 130 degreeC for 1 hour, it became a transparent film about 300 micrometers thick.
The edge part of the said film | cured hardened | cured on the adhesive surface was grasped with the jig | tool, and it peeled in the longitudinal direction of the film at the peeling speed of 300 mm / min, performing the peeling adhesion strength test by the method mentioned above. The peeling force when peeling this film was about 0.6 N / 10 mm.
When the adhesive surface regenerated by the above method was observed with a magnifying microscope, almost all of the metal pieces that had adhered to or stuck into the adhesive surface were removed from the adhesive surface together with the coating.

(十点平均粗さRzの測定(2))
上記の電子部品保持治具の粘着面の十点平均粗さRz(JIS B 0601−1994)を実施例1と同様に測定した。
その結果、未使用品(新品)の粘着面のRzの実測値は0.7〜1.2μmであり、上記の金属片が付着した粘着面のRzの実測値は1.3〜5.6μmであり、本発明にかかる再生方法によって金属片を除去した粘着面のRzの実測値は0.8〜1.5μmであった。この測定結果から、再生された粘着面には金属片や被膜がほとんど残留していないことが確認された。
(Measurement of ten-point average roughness Rz (2))
The ten-point average roughness Rz (JIS B 0601-1994) of the adhesive surface of the electronic component holding jig was measured in the same manner as in Example 1.
As a result, the measured value of Rz of the adhesive surface of the unused product (new article) is 0.7 to 1.2 μm, and the measured value of Rz of the adhesive surface to which the metal piece is attached is 1.3 to 5.6 μm. The measured value of Rz of the adhesive surface from which the metal piece was removed by the regeneration method according to the present invention was 0.8 to 1.5 μm. From this measurement result, it was confirmed that almost no metal piece or film remained on the regenerated adhesive surface.

(粘着力の測定(2))
上記の電子部品保持治具の粘着面の粘着力を前述した方法で測定した。
その結果、未使用(新品)の保持治具における粘着面の粘着力の実測値は33〜37g/mmであり、本発明にかかる再生方法によって金属片を除去した粘着面における粘着力の実測値は30〜37g/mmであった。この測定結果から、再生された粘着面は新品と同様の優れた粘着力を有することが確認された。
(Measurement of adhesive strength (2))
The adhesive force of the adhesive surface of the electronic component holding jig was measured by the method described above.
As a result, the measured value of the adhesive force of the adhesive surface in the unused (new) holding jig is 33 to 37 g / mm 2 , and the measured adhesive force of the adhesive surface from which the metal piece has been removed by the recycling method according to the present invention. The value was 30 to 37 g / mm 2 . From this measurement result, it was confirmed that the regenerated adhesive surface has the same excellent adhesive force as a new article.

[実施例3]
実施例1と同様に、ゴム弾性シートを備えた電子部品保持治具を準備して、さらにチップコンデンサの取り付け及び取り外しを複数回行って、金属片(金属の粉)をゴム弾性シートの粘着面に付着させた。
[Example 3]
As in Example 1, an electronic component holding jig provided with a rubber elastic sheet was prepared, and chip capacitors were attached and removed several times, and a metal piece (metal powder) was adhered to the rubber elastic sheet. Adhered to.

(粘着面に付着した異物の除去(3))
上記の金属片が付着した粘着面の全体に対して、囲いを設けて、ポリビニルアルコール系液状糊を注入し、全面に塗布した後に余剰な分を除去した。その後、室温で24時間自然乾燥させると、厚さ約20μmの透明な被膜になった。
粘着面上で硬化した上記被膜の端部を治具でつかみ、前述した方法ではく離接着強さ試験を行いながら、被膜の長手方向へ剥離速度300mm/分で剥離した。この被膜を剥離する際の剥離力は、約1.0N/10mmであった。
上記の方法によって再生した粘着面を拡大顕微鏡で観察したところ、粘着面に粘着したり突き刺さったりしていた金属片は、殆ど全て被膜とともに粘着面から除去されていた。
(Removal of foreign matter adhering to the adhesive surface (3))
An enclosure was provided on the entire adhesive surface to which the above metal piece adhered, and a polyvinyl alcohol-based liquid paste was injected, and after applying to the entire surface, excess portions were removed. Thereafter, when it was naturally dried at room temperature for 24 hours, a transparent film having a thickness of about 20 μm was formed.
The edge part of the said film | cured hardened | cured on the adhesive surface was grasped with the jig | tool, and it peeled in the longitudinal direction of the film at the peeling speed of 300 mm / min, performing the peeling adhesion strength test by the method mentioned above. The peeling force when peeling this film was about 1.0 N / 10 mm.
When the adhesive surface regenerated by the above method was observed with a magnifying microscope, almost all of the metal pieces that had adhered to or stuck into the adhesive surface were removed from the adhesive surface together with the coating.

(十点平均粗さRzの測定(3))
上記の電子部品保持治具の粘着面の十点平均粗さRz(JIS B 0601−1994)を実施例1と同様に測定した。
その結果、未使用品(新品)の粘着面のRzの実測値は0.7〜1.2μmであり、上記の金属片が付着した粘着面のRzの実測値は1.3〜5.6μmであり、本発明にかかる再生方法によって金属片を除去した粘着面のRzの実測値は0.8〜1.5μmであった。この測定結果から、再生された粘着面には金属片や被膜がほとんど残留していないことが確認された。
(Measurement of ten-point average roughness Rz (3))
The ten-point average roughness Rz (JIS B 0601-1994) of the adhesive surface of the electronic component holding jig was measured in the same manner as in Example 1.
As a result, the measured value of Rz of the adhesive surface of the unused product (new article) is 0.7 to 1.2 μm, and the measured value of Rz of the adhesive surface to which the metal piece is attached is 1.3 to 5.6 μm. The measured value of Rz of the adhesive surface from which the metal piece was removed by the regeneration method according to the present invention was 0.8 to 1.5 μm. From this measurement result, it was confirmed that almost no metal piece or film remained on the regenerated adhesive surface.

(粘着力の測定(3))
上記の電子部品保持治具の粘着面の粘着力を前述した方法で測定した。
その結果、未使用(新品)の保持治具における粘着面の粘着力の実測値は33〜37g/mmであり、本発明にかかる再生方法によって金属片を除去した粘着面における粘着力の実測値は30〜37g/mmであった。この測定結果から、再生された粘着面は新品と同様の優れた粘着力を有することが確認された。
(Measurement of adhesive strength (3))
The adhesive force of the adhesive surface of the electronic component holding jig was measured by the method described above.
As a result, the measured value of the adhesive force of the adhesive surface in the unused (new) holding jig is 33 to 37 g / mm 2 , and the measured adhesive force of the adhesive surface from which the metal piece has been removed by the recycling method according to the present invention. The value was 30 to 37 g / mm 2 . From this measurement result, it was confirmed that the regenerated adhesive surface has the same excellent adhesive force as a new article.

[比較例1]
実施例1と同様に、ゴム弾性シートを備えた電子部品保持治具を準備して、さらにチップコンデンサの取り付け及び取り外しを複数回行って、金属片(金属の粉)をゴム弾性シートの粘着面に付着させた。
[Comparative Example 1]
As in Example 1, an electronic component holding jig provided with a rubber elastic sheet was prepared, and chip capacitors were attached and removed several times, and a metal piece (metal powder) was adhered to the rubber elastic sheet. Adhered to.

(粘着面に付着した異物の除去)
上記の金属片が付着した粘着面の全体に対して、ビニールテープ(スコッチプロ印包装用テープ#375、スリーエムジャパン株式会社)を2kgローラーにて貼り付けた。
粘着面上で上記テープの端部を治具でつかみ、前述した方法ではく離接着強さ試験を行いながら、被膜の長手方向へ剥離速度300mm/分で剥離した。この被膜を剥離する際の剥離力は、約2.1Nであった。
上記の方法によって再生した粘着面を拡大顕微鏡で観察したところ、粘着面に粘着したり突き刺さったりしていた金属片のうち、一部は除去されていたが、残部は粘着面上で破砕され、小さな金属片として残っていた。
(Removal of foreign matter adhered to the adhesive surface)
A vinyl tape (Scotch Pro Mark Packaging Tape # 375, 3M Japan Co., Ltd.) was attached to the entire adhesive surface to which the above-mentioned metal piece adhered with a 2 kg roller.
The end of the tape was held with a jig on the adhesive surface, and peeled in the longitudinal direction of the coating at a peeling speed of 300 mm / min while performing the peel adhesion strength test by the method described above. The peeling force when peeling the film was about 2.1N.
When the adhesive surface regenerated by the above method was observed with a magnifying microscope, a part of the metal piece that had adhered or stuck to the adhesive surface was removed, but the rest was crushed on the adhesive surface, It remained as a small piece of metal.

(十点平均粗さRzの測定(4))
上記の電子部品保持治具の粘着面の十点平均粗さRz(JIS B 0601−1994)を実施例1と同様に測定した。
その結果、未使用品(新品)の粘着面のRzの実測値は0.7〜1.2μmであり、上記の金属片が付着した粘着面のRzの実測値は1.3〜5.6μmであり、本発明にかかる再生方法によって金属片を除去した粘着面のRzの実測値は1.2〜5.0μmであった。また再生された粘着面を顕微鏡で拡大したところ金属片や被膜の一部が残留していることが確認できた。
(Measurement of ten-point average roughness Rz (4))
The ten-point average roughness Rz (JIS B 0601-1994) of the adhesive surface of the electronic component holding jig was measured in the same manner as in Example 1.
As a result, the measured value of Rz of the adhesive surface of the unused product (new article) is 0.7 to 1.2 μm, and the measured value of Rz of the adhesive surface to which the metal piece is attached is 1.3 to 5.6 μm. The measured value of Rz of the adhesive surface from which the metal piece was removed by the regeneration method according to the present invention was 1.2 to 5.0 μm. Further, when the regenerated adhesive surface was magnified with a microscope, it was confirmed that a piece of metal or a part of the coating remained.

(粘着力の測定(4))
上記の電子部品保持治具の粘着面の粘着力を前述した方法で測定した。
その結果、未使用(新品)の保持治具における粘着面の粘着力の実測値は33〜37g/mmであり、本発明にかかる再生方法によって金属片を除去した粘着面における粘着力の実測値は15〜30g/mmであった。この測定結果から、再生された粘着面には金属片や皮膜の一部が残留して粘着力の低下を引き起こしていることが確認できた。
(Measurement of adhesive strength (4))
The adhesive force of the adhesive surface of the electronic component holding jig was measured by the method described above.
As a result, the measured value of the adhesive force of the adhesive surface in the unused (new) holding jig is 33 to 37 g / mm 2 , and the measured adhesive force of the adhesive surface from which the metal piece has been removed by the recycling method according to the present invention. The value was 15-30 g / mm 2 . From this measurement result, it was confirmed that a part of the metal piece or the film remained on the regenerated adhesive surface and caused a decrease in the adhesive strength.

以上の結果から、本発明にかかるゴム弾性部材の再生方法において、硬化物の剥離を1回のみ行うことによって、ゴム弾性部材の粘着面に付着した金属片、ガラス片、シリコンウエハ片等の異物を容易に除去できることは明らかである。   From the above results, in the method for regenerating a rubber elastic member according to the present invention, the foreign matter such as a metal piece, a glass piece, a silicon wafer piece, etc. attached to the adhesive surface of the rubber elastic member by removing the cured product only once. It is clear that can be easily removed.

Claims (6)

ゴム弾性部材が有する粘着面に、硬化性樹脂組成物を配し、前記硬化性樹脂組成物を硬化させ、前記粘着面に形成された硬化物を剥離することによって、前記粘着面に付着していた異物を前記硬化物とともに除去する、ゴム弾性部材の再生方法。   The curable resin composition is disposed on the adhesive surface of the rubber elastic member, the curable resin composition is cured, and the cured product formed on the adhesive surface is peeled off to adhere to the adhesive surface. A method for regenerating a rubber elastic member, wherein the foreign matter is removed together with the cured product. 前記粘着面は、シリコーンゴム又はフッ素系エラストマーで形成されている、請求項1に記載のゴム弾性部材の再生方法。   The method for regenerating a rubber elastic member according to claim 1, wherein the adhesive surface is formed of silicone rubber or fluorine-based elastomer. 前記硬化性樹脂組成物は、ポリビニルアルコール、ポリ酢酸ビニル又は酢酸ビニルモノマーを含む、請求項1又は2に記載のゴム弾性部材の再生方法。   The method for regenerating a rubber elastic member according to claim 1 or 2, wherein the curable resin composition contains polyvinyl alcohol, polyvinyl acetate, or a vinyl acetate monomer. 前記硬化性樹脂組成物は、フッ素系エラストマーを含む、請求項1又は2に記載のゴム弾性部材の再生方法。   The method for regenerating a rubber elastic member according to claim 1, wherein the curable resin composition contains a fluorine-based elastomer. 前記硬化性樹脂組成物を配する前の前記粘着面に前記異物の一部分が刺さっている、請求項1〜4の何れか一項に記載のゴム弾性部材の再生方法。   The method for regenerating a rubber elastic member according to any one of claims 1 to 4, wherein a part of the foreign matter is stuck in the adhesive surface before the curable resin composition is disposed. 前記異物が、ガラス、金属又は半導体によって形成された小片であり、その小片の最大径が5mm以下である、請求項1〜4の何れか一項に記載のゴム弾性部材の再生方法。   The method for regenerating a rubber elastic member according to any one of claims 1 to 4, wherein the foreign matter is a small piece formed of glass, metal, or semiconductor, and the maximum diameter of the small piece is 5 mm or less.
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JP2018187895A (en) * 2017-05-11 2018-11-29 信越ポリマー株式会社 Method for regenerating rubber elastic member
JP2020138115A (en) * 2019-02-27 2020-09-03 信越ポリマー株式会社 Adhesive surface regeneration method of part holding jig

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JP2013229475A (en) * 2012-04-26 2013-11-07 Dainippon Printing Co Ltd Foreign object removal method
JP5887151B2 (en) * 2012-01-30 2016-03-16 信越ポリマー株式会社 Recovery method for removing foreign substances from adhesive surfaces

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JPS6190434A (en) * 1984-10-11 1986-05-08 Hitachi Ltd Manufacture of electronic element
JPH05107744A (en) * 1991-10-18 1993-04-30 Mitsubishi Electric Corp Method for removing foreign matter of photomask
JPH0888207A (en) * 1994-09-14 1996-04-02 Nitto Denko Corp Method for removing foreign matters adhering to semiconductor wafer
JP5887151B2 (en) * 2012-01-30 2016-03-16 信越ポリマー株式会社 Recovery method for removing foreign substances from adhesive surfaces
JP2013229475A (en) * 2012-04-26 2013-11-07 Dainippon Printing Co Ltd Foreign object removal method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018187895A (en) * 2017-05-11 2018-11-29 信越ポリマー株式会社 Method for regenerating rubber elastic member
JP2020138115A (en) * 2019-02-27 2020-09-03 信越ポリマー株式会社 Adhesive surface regeneration method of part holding jig

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