JP2018077167A - Environmental test device and air conditioner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an environmental test device capable of creating a circumstance of low temperature and high humidity and stably maintaining the circumstance.SOLUTION: The environmental test device includes: a test chamber 2; an air conditioning part 50 separated from the test chamber 2; an additional humidifier 65; and return air dehumidification means 88 for dehumidifying the air returned from the test chamber 2 to the air conditioning part 50. The additional humidifier 65 appropriately humidifies the air humidifier 67 via an outside air intake 70. The humidified air is supplied to an incoming air duct 22 via a humidifying piping 72. The return air dehumidification means 88 is functioned to remove vapor equivalent to the vapor added by the additional humidifier 65 and the air is returned to air conditioning part 50.SELECTED DRAWING: Figure 1

Description

The present invention relates to an environmental test apparatus capable of creating a specific environment in a test chamber and exposing a device under test to a desired environment. The present invention is particularly suitable as an environmental test apparatus that is required to create a low temperature and high humidity environment.
The present invention also relates to an air conditioner that is connected to a test space to circulate air and maintain the test space in a specific environment.

  Environmental tests are known as tests for examining the performance and durability of products and parts. Environmental tests are performed using equipment called environmental test equipment. The environmental test apparatus artificially creates, for example, a high temperature environment, a low temperature environment, a high humidity environment, and the like. In the present specification, the simple term “humidity” means relative humidity.

The environmental test equipment has an air conditioning unit with air conditioning equipment and a test room in which the DUT is installed, and circulates air between the air conditioning unit and the test room to adjust the test chamber to the desired target temperature and target humidity. To do.
Here, in a normal environmental test apparatus as described in Patent Document 1, the air conditioning unit includes a humidifier and a cooling device as means for adjusting the humidity (hereinafter referred to as a normal environmental test apparatus).
A humidifier heats water with a heater or promotes vaporization of water using ultrasonic waves to increase the amount of water vapor contained in the air.
The cooling device condenses water vapor in the air by cooling the air and reduces the amount of water vapor contained in the air.
In the normal environmental test apparatus, the operating amounts of the cooling device and the humidifying device are adjusted, and the humidity of the air discharged from the air conditioning unit is adjusted.

On the other hand, Patent Document 2 proposes a method for controlling the surface temperature of a cooler (evaporator) constituting a cooling device and adjusting the humidity of air discharged from an air conditioning unit (hereinafter, referred to as “cooling device”). Called energy-saving environmental testing equipment).
In the energy-saving environmental test equipment, the cooler exhibits functions of temperature drop, humidity drop, and humidity adjustment.
In the energy-saving environmental test equipment, the surface temperature of the cooler is lowered to reduce the temperature of the air, and at the same time, dew condensation occurs on the surface of the cooler.
Thereafter, the surface temperature of the cooler is raised to evaporate or sublimate part or all of the water adhering to the surface of the cooler, and the humidity of the air is adjusted to a desired humidity.

Japanese Patent Laid-Open No. 2006-176793 JP 2012-251716 A

The conventional environmental test apparatus has a problem that it may be difficult to stably create a low-temperature and high-humidity environment. For example, it may be difficult to stably create an environment such as minus 10 degrees Celsius and 95 percent humidity (relative humidity) in the test room.
For example, in the case of the normal environmental test apparatus described above, water vapor evaporated by the humidifier is mixed in the air that has passed through the cooler (evaporator) of the cooling apparatus and returned from the test room in a state where the temperature has decreased. And increase the humidity.
The high-humidity air further circulates and passes through the region where the cooler is installed again, but the air returned after circulation contains a large amount of water vapor. This high humidity air condenses in contact with the surface of the cooler. If the target environment is a low temperature environment such as minus 10 degrees Celsius, the surface temperature of the cooler is naturally below the freezing point, so that the water below the freezing point sublimates on the surface of the cooler and forms frost.
As a result, frost on the surface of the cooler grows within a short period of time, and the heat exchange capacity of the cooler may decrease, and a stable environment of low temperature and high humidity may not be maintained.

Similarly, frost may grow within a short time even in an energy-saving environmental test apparatus. The energy-saving environment test equipment may not be able to maintain a stable environment of low temperature and high humidity for other reasons.
In other words, the energy-saving environmental testing device adjusts the humidity of air to a desired humidity by raising the surface temperature of the cooler and sublimating part or all of the water adhering to the surface of the cooler as described above. It is.
Therefore, when adjusting the humidity, it is necessary to raise the surface temperature of the cooler above the dew point of the surrounding air.

However, in a high-humidity environment, the difference between the ambient temperature and the dew point is small, and if the surface temperature of the cooler exceeds the dew point of the surrounding air, the surface temperature of the cooler will exceed the ambient temperature. In some cases, it may be difficult to lower the temperature of the surrounding air by the cooler.
As an extreme example, if the target temperature is minus 10 degrees Celsius and the target humidity is 100 percent, the dew point is minus 10 degrees Celsius, which is the same as the target temperature. In order to exchange heat between the air and the cooler and cool the air by the cooler, naturally, the surface temperature of the cooler must be lower than the temperature of the air. In the example described above, the air temperature may not be lowered to the target temperature unless the surface temperature of the cooler is set to −10 degrees Celsius or less of the target temperature.
On the other hand, if the surface temperature of the cooler is set to minus 10 degrees Celsius or less of the target temperature, the water vapor is condensed on the surface of the cooler, the air humidity is lowered, and it becomes difficult to maintain the target humidity.
As in the example described above, even if the target humidity is 95%, the difference between the dew point and the target temperature is small.
Therefore, when creating a high-humidity environment with an energy-saving environmental testing device, the difference between the target temperature and the surface temperature of the cooler becomes small, and heat transfer from the air side to the cooler side must be reduced. It may be difficult for the vessel to exert its cooling capacity. Therefore, it may be difficult to create and maintain a low-temperature and high-humidity environment using an energy-saving environment test apparatus.

  The present invention focuses on the above-described problems of the prior art, and aims to develop an environment test apparatus that can create a low-temperature and high-humidity environment and that can stably maintain this environment. Is.

  Invention of Claim 1 for solving an above-described subject has an air-conditioning part which has air-conditioning equipment which controls temperature and humidity, and a test room which installs a to-be-tested object, between an air-conditioning part and a test room In an environmental test apparatus that circulates air to adjust the test chamber to a desired target temperature and target humidity, additional humidification means for humidifying the air supplied from the air conditioning unit to the test chamber, and the test chamber returns to the air conditioning unit An environmental test apparatus comprising return air dehumidifying means for dehumidifying air.

It is desirable that the air conditioning unit and the test room are separate, but they may be integrated.
The additional humidification means may be separate from the air conditioning unit or the test room, and the additional humidification means may be attached to the air conditioning unit or the test room.
The environmental test apparatus of the present invention has additional humidifying means. The additional humidification means introduces air having a higher water vapor content than air blown from the air conditioning unit.
The environmental test apparatus of the present invention humidifies the air exhausted from the air conditioning unit with additional humidification means and supplies the humidified air to the test chamber, thereby adjusting the humidity in the test chamber to a desired humidity.
Moreover, in the environmental test apparatus of this invention, since the air returned from a test room to an air-conditioning part can be dehumidified with an air dehumidification means, the growth of the frost in an air-conditioning part can be suppressed.

  The environmental test according to claim 1, wherein the air conditioning unit has a cooler, and the return air dehumidifying means is controlled so that the dew point of the air supplied to the cooler is equal to or lower than the surface temperature of the cooler. Device.

According to the present invention, the dew point of the air in contact with the cooler in the air conditioning unit can be made equal to or lower than the surface temperature of the cooler.
If the dew point of the air in contact with the cooler is equal to or lower than the surface temperature of the cooler, frost is hardly generated on the surface of the cooler.

  The invention according to claim 3 is characterized in that the air conditioning unit has a cooler, and the additional humidifying means is controlled so that the dew point of the air supplied to the cooler is not more than the surface temperature of the cooler. An environmental test apparatus according to claim 1.

Also by this invention, the dew point of the air which contacts a cooler in an air-conditioning part can be made below into the surface temperature of a cooler.
If the dew point of the air in contact with the cooler is equal to or lower than the surface temperature of the cooler, the generation of frost on the cooler surface is reduced.

  The invention according to claim 4 controls the inside of the test chamber by controlling at least one of the additional humidification means, the amount of air supplied from the air conditioning unit to the test chamber, and the humidity of the air supplied from the air conditioning unit to the test chamber. The environmental test apparatus according to claim 1, wherein the environmental test apparatus is adjusted to a predetermined humidity.

  According to the present invention, the test chamber can be adjusted to a desired humidity.

  The invention according to claim 5 has a cooling device as an air conditioner, and the cooling device includes a compressor, a condenser, an expansion means, an evaporator, and a downstream throttle means capable of changing an opening degree. These are connected in an annular shape, and a phase change refrigerant is filled inside the cooling device to realize a series of refrigeration cycles. The surface temperature of the evaporator is controlled by controlling the downstream throttle means. The environmental test apparatus according to claim 1, wherein the environmental test apparatus is capable of adjusting the humidity of air supplied to the test chamber from the air conditioning unit.

According to the present invention, power consumption can be reduced.
In the present invention, the evaporator of the cooling device functions as a cooler and a humidifying device.
In the present invention, the cooling device “controls the downstream throttle means to change the surface temperature of the evaporator so that the current humidity in the test chamber matches the target humidity”. Thus, the current humidity may be matched with the target humidity.
The environmental test apparatus according to the present invention has a humidity adjusting function for changing the surface temperature of the evaporator (cooler) by controlling the downstream-side throttling means so that the humidity in the test chamber matches the target humidity. That is, by increasing the opening degree of the downstream throttle means, the refrigerant pressure in the evaporator can be lowered and the surface temperature of the evaporator can be lowered.
Conversely, the downstream throttle means can be throttled, the refrigerant pressure in the evaporator can be raised, and the surface temperature of the evaporator can be raised.
In the environmental test apparatus of this invention, the water vapor | steam contained in the air in space can be condensed on the surface of an evaporator, and the humidity of space can be reduced. Further, the humidity of the space can be maintained or increased by suppressing the amount of condensation of water vapor contained in the air in the space. For example, the humidity of the air can be increased by reducing only the temperature without condensing water vapor in the air.
Further, the condensed water adhering to the surface of the evaporator can be re-evaporated to positively increase the humidity of the space.

If the humidity in the test room is higher than the target humidity or if the humidity of the air sent from the air-conditioning unit to the test room is high, the surface temperature of the evaporator is set to the dew point of the current environment (the current environment of the surrounding space). It is recommended that water vapor contained in the atmosphere is condensed on the surface of the evaporator by controlling the temperature to be lower than the temperature.
Conversely, when the humidity in the test chamber is lower than the target humidity, or when the humidity of the air sent from the air conditioning unit to the test chamber is low, the surface temperature of the evaporator is controlled to be equal to or higher than the dew point temperature of the target environment. Therefore, it is recommended to adjust the humidity of air sent from the air-conditioning unit to the test chamber by evaporating water droplets remaining on the surface of the evaporator or sublimating frost to increase the humidity of the air.

In the environmental control device of the present invention, when the current humidity in the test chamber or the air conditioning unit is higher than the target humidity, the surface temperature of the evaporator is controlled so as to be lower than the dew point temperature of the current environment. Water vapor contained in the space is condensed. As a result, the current humidity decreases and approaches the target humidity.
On the other hand, when the current humidity in the test chamber or the air conditioning unit is lower than the target humidity, the surface temperature of the evaporator is controlled to be equal to or higher than the dew point temperature of the target environment. Even when the surface temperature of the evaporator is controlled to be equal to or higher than the dew point temperature of the target environment, if the changed evaporator surface temperature is lower than the dew point temperature of the current environment, water vapor is generated on the surface of the evaporator. Condensation reduces absolute humidity. However, when the surface temperature of the evaporator is controlled to be equal to or higher than the dew point temperature of the target environment, the humidity in the test chamber will increase as a result because it does not become lower than the absolute humidity in the target environment.
Of course, if the surface temperature of the changed evaporator is higher than the dew point temperature of the current surrounding environment, only the air temperature will decrease without condensation of the water vapor, so the humidity in the test chamber will increase relatively. It becomes.

  According to a sixth aspect of the present invention, in the environmental test according to any one of the first to fifth aspects, the additional humidifying means mixes the outside air into the air supplied from the air conditioning unit to the test chamber. Device.

  According to the environmental test apparatus of the present invention, a higher humidity environment can be created.

  An invention relating to an air conditioner is an air conditioner that is connected to a test space and controls the temperature and humidity in an air conditioner that circulates air between the test space and adjusts the test space to a desired target temperature and target humidity. And an additional humidifying means for humidifying the air supplied from the air conditioning section to the test space, and a return air dehumidifying means for dehumidifying the air returned from the test space to the air conditioning section.

In the air conditioner of the present invention, the air discharged from the air conditioning unit is humidified by the additional humidification means and supplied to the test chamber, and the humidity in the test chamber is adjusted to a desired humidity.
Moreover, in the air conditioner of this invention, since the air returned from a test space to an air conditioning part can be dehumidified with an air dehumidification means, the growth of the frost in an air conditioning part can be suppressed.

  According to the environmental test apparatus and the air conditioner of the present invention, it is possible to create a stable environment which is a low temperature and high humidity environment.

It is a block diagram of the environmental test apparatus of embodiment of this invention. It is a flowchart which shows the operation | movement of the driving | operation initial stage of the environmental test apparatus of FIG. It is a block diagram of the environmental test apparatus of other embodiment of this invention. It is a block diagram of the environmental test apparatus of further another embodiment of this invention. It is a block diagram of the environmental test apparatus of further another embodiment of this invention. It is a block diagram of the environmental test apparatus of further another embodiment of this invention. It is a block diagram of the environmental test apparatus of further another embodiment of this invention. It is a block diagram of the environmental test apparatus of further another embodiment of this invention. It is a block diagram of the environmental test apparatus of further another embodiment of this invention.

Embodiments of the present invention will be further described below.
In the environmental test apparatus 1 of the present embodiment, the test chamber 2 and the air conditioning unit 50 are separate bodies, and both are connected by a circulation flow path 5. Moreover, the environmental test apparatus 1 of this embodiment has the additional humidification apparatus 65 and the return air dehumidification means 88 as a characteristic structure. The air conditioning unit 100 is configured by the air conditioning unit 50, the additional humidifier 65, and the return air dehumidifying means 88.

The test chamber 2 has a test space 6 in which a DUT is installed. The test space 6 is covered with a heat insulating wall 7.
The test chamber 2 includes a test chamber temperature sensor 30 for detecting the temperature of the space and a test chamber humidity for detecting the humidity of the space in a test space in which equipment, parts, and the like serving as samples are arranged when performing an environmental test. A sensor 31 is provided. The test chamber temperature sensor 30 is a temperature sensor such as a conventionally known resistance temperature detector, for example. On the other hand, the test chamber humidity sensor 31 is, for example, a conventionally known humidity sensor.
In the present embodiment, a wind speed sensor 8 is also installed in the test chamber 2.
The test chamber 2 has an air inlet 10 and an air outlet 11.

The air conditioning unit 50 has a circulation path formed of an air chamber 27 and a ventilation space 17 formed therein. An air conditioner 51 is built in the ventilation space 17. The air conditioner 51 includes a cooler (evaporator) 12 and a heater 15 of the cooling device 52. A circulation fan 18 is provided at the end of the ventilation space 17. A dew point meter 45 is provided on the introduction side of the ventilation space 17. In place of the dew point meter 45, a humidity sensor may be used.
An air conditioning side temperature sensor 42 and an air conditioning side humidity sensor 43 are provided in the air chamber 27 of the air conditioning unit 50.
Further, the air conditioning unit 50 includes an air supply port 20 for sending air to the test chamber 2 side, a first air return port 21 and a second air return port 37 for introducing the air returned from the test chamber 2 into the air conditioning unit 50. Have. In the present embodiment, an exhaust fan 16 is provided at the air supply port 20.

The air conditioning unit 50 circulates the air in the air chamber 27 into the ventilation space 17 by the circulation fan 18 and passes the air through the ventilation space 17 to adjust the air in the air chamber 27 to a predetermined temperature and humidity. can do.
That is, as described above, the air conditioning side temperature sensor 42 and the air conditioning side humidity sensor 43 are provided in the air chamber 27 of the air conditioning unit 50, and the detected temperature of the air conditioning side temperature sensor 42 and the detected humidity of the air conditioning side humidity sensor 43 are predetermined. The air conditioner 51 is controlled so as to be in the range.

  The air conditioning unit 50 is connected to the test chamber 2 by the circulation flow path 5, and the air in the test chamber 2 is fed into the air conditioning unit 50 from the first air return port 21 or the second air return port 37 of the air conditioning unit 50. The air that has been introduced and circulates in the air conditioning unit 50 is blown from the air supply port 20 to the test chamber 2 side by the exhaust fan 16.

As described above, the cooler (evaporator) 12 of the cooling device 52 is built in the ventilation space 17 of the air conditioning unit 50.
Since the structure and function of the cooling device 52 employed in this embodiment are different from the conventional ones, they will be described in detail.
The cooling device 52 includes a refrigerant circulation circuit 53 through which a refrigerant that changes phase between gas and liquid flows. The refrigerant circulation circuit 53 executes a series of cycles (refrigeration cycle) for compressing and condensing the phase-change refrigerant, evaporating the refrigerant, and cooling it. The compressor 33, the condenser 35, the expansion valve 36, the cooling The refrigerator (evaporator) 12, the downstream throttle means 55, and a refrigerant circulation pipe 56 that connects these devices in an annular shape.
The expansion valve 36 and the downstream side throttle means 55 can each adjust an opening degree. The downstream throttle means 55 is a diverted valve that is normally used as an expansion valve, and is structurally the same as an electronic expansion valve. The downstream throttle means 55 can change the opening according to the signal voltage. The same applies to the expansion valve 36, and a valve whose opening degree changes according to the signal voltage is used.

A first refrigerant temperature detection means 60 is provided on the upstream side of the cooler 12. The first refrigerant temperature detection means 60 is, for example, a conventionally known thermocouple or temperature sensor. The first refrigerant temperature detection means 60 can detect the temperature of the refrigerant flowing into the cooler 12.
On the other hand, a second refrigerant temperature detection means 61 and a refrigerant pressure detection means 62 are provided on the downstream side of the cooler 12. Similar to the first refrigerant temperature detection means 60, the second refrigerant temperature detection means 61 is a conventionally known thermocouple or temperature sensor. The second refrigerant temperature detection means 61 can detect the temperature of the refrigerant gas after passing through the cooler 12. That is, the evaporator outlet temperature of the cooler 12 can be detected.
The refrigerant pressure detection means 62 detects the pressure of the refrigerant in the cooler (evaporator) 12 and is a means for knowing the evaporation pressure of the refrigerant.
The refrigerant pressure detecting means 62 is, for example, a conventionally known pressure sensor.

Next, the operation principle of the cooling device 52 employed in this embodiment will be described.
When the compressor 33 of the refrigerant circulation circuit 53 is started, the gas-phase refrigerant is compressed, cooled by the condenser 35, and liquefied. The liquid refrigerant enters the cooler (evaporator) 12 through the expansion valve 36 and is vaporized. Then, the temperature of the cooler 12 is lowered by the refrigerant, and the air passing through the ventilation space 17 can be cooled. The temperature of the refrigerant flowing into the cooler 12 is detected by first refrigerant temperature detection means 60 provided on the upstream side of the cooler 12.

  As is well known, when the cooling device 52 is operated with the opening of the expansion valve 36 being large, a large amount of refrigerant circulates in the refrigerant circulation circuit 53 and exhibits a large refrigerating capacity. In this specification, this state is referred to as “cooling operation”. In the “cooling operation”, since the opening degree of the expansion valve 36 is largely opened, the amount of refrigerant flowing through the cooler 12 is increased, and the cooling capacity of the cooler 12 is increased.

  Further, when the cooling device 52 is operated in a state where the opening degree of the expansion valve 36 is reduced, the evaporation pressure of the refrigerant is lowered and the surface temperature of the cooler 12 is lowered. On the other hand, the amount of refrigerant circulating in the refrigerant circulation circuit 53 decreases, and the refrigerating capacity decreases. In this specification, this state is referred to as “dehumidifying operation”. That is, when the expansion valve 36 is throttled while the above-described “cooling operation” is being performed, the refrigerant discharged through the expansion valve 36 has a very low temperature. As a result, the surface temperature of the cooler 12 is lowered to below the dew point of air, and water vapor contained in the air is condensed and condensed on the surface of the cooler 12. At this time, since the opening degree of the expansion valve 36 is reduced, the amount of the refrigerant flowing through the cooler 12 is small, and the cooling capacity of the cooler 12 is small.

  In the environmental test apparatus 1 of this embodiment, the downstream throttle means 55 is provided downstream of the cooler 12, and the outlet of the cooler 12 can be throttled by adjusting the opening degree of the downstream throttle means 55. is there. In the “cooling operation” or “dehumidification operation”, when the opening of the downstream throttle means 55 is throttled while the refrigerant is continuously being injected into the cooler 12, the evaporation pressure of the refrigerant in the cooler 12 increases, The temperature of the surface of the cooler 12 rises.

Water on the surface of the cooler 12 that is executing the “cooling operation” or the “dehumidifying operation” is condensed or solidified by the water vapor in the air. Part or all of the water adhering to the surface of the cooler 12 evaporates or sublimates as the temperature of the surface of the cooler 12 rises. As a result, the air passing through the ventilation space 17 is humidified.
In other words, the cooler 12 serves as a “substantially humidifier”.
In this specification, the humidification operation performed by increasing the surface temperature of the cooler 12 is referred to as “humidification operation by a refrigerator”.

The environmental test apparatus 1 of the present embodiment has a temperature drop program for controlling the expansion valve 36 so that the surface temperature of the cooler 12 is “near the dew point of the target environment” as a program for performing “cooling operation”. Yes.
Here, “near the dew point” is a temperature in the range of plus or minus 5 degrees of the dew point temperature of the target environment, and more preferably in the range of plus or minus 3 degrees of the dew point temperature of the target environment. The surface temperature of the cooler 12 is obtained based on the detection signals from the refrigerant temperature detection means 60 and 61 and the refrigerant pressure detection means 62 as described above.
If the surface temperature of the cooler 12 is too high to function as the cooler 12 at the above-described temperature near the dew point of the target environment, the cooler 12 reaches the highest temperature that can function as the cooler 12. The surface temperature of is controlled.

  Further, the environmental test apparatus 1 of the present embodiment has a humidity lowering program for controlling the expansion valve 36 so that the surface temperature of the cooler 12 becomes “below the dew point of the target environment” as a program for performing the “dehumidifying operation”. ing. Here, “below the dew point” is a temperature in a range from the dew point of the target environment to about minus 20 degrees. Note that the temperature “below the dew point of the target environment” is at least lower than the temperature of “near the dew point of the target environment” described above.

Further, in the environmental test apparatus 1 of the present embodiment, as a program for performing the “humidification operation by the refrigerator”, the expansion valve 36 and the downstream throttle means are set so that the surface temperature of the cooler 12 becomes “above the dew point of the target environment”. 55 has a humidity control program for controlling 55. Here, “dew point or higher” is a temperature that is about 2 to 5 degrees Celsius higher than the dew point of the target environment. It is not preferable that the temperature “beyond the dew point of the target environment” is excessively higher than the temperature of the target environment.
Each program described above is stored in a storage unit (not shown) of the control device 40.

The environmental test apparatus 1 of the present embodiment has a humidifying air supply means 38 as a unique configuration. In the present embodiment, the humidifying air supply means 38 includes an additional humidifying device 65, a humidifying pipe 72 and an actuator valve 73.
The additional humidifier 65 includes a humidifying nozzle of the humidifier 67 and a humidifying fan 68 in a housing 66.
The casing 66 is provided with an outside air inlet 70 and a humidified air outlet 71, and a series of air flow paths 41 are formed therein. A humidifying nozzle of the humidifier 67 and a humidifying fan 68 are arranged in the air flow path 41.
Although the structure of the humidifier 67 is not limited, it is desirable to employ an ultrasonic humidifier.

  In the environmental test apparatus 1 of the present embodiment, the air supply port 20 of the air conditioning unit 50 and the air introduction port 10 of the test chamber 2 are connected by the forward air passage 22 as described above. Further, an additional humidifier 65 is connected in the middle of the outgoing air passage 22. More specifically, the humidifying air discharge port 71 of the additional humidifying device 65 and the outgoing air passage 22 are connected by a humidifying pipe 72. An actuator valve 73 is provided in the middle of the humidifying pipe 72. The actuator valve 73 is specifically a motor damper and is a device that adjusts the opening degree.

The additional humidifier 65 takes air into the housing 66 from the outside air inlet 70 and moderately humidifies the air with the humidifier 67. In the present embodiment, the humidifier 67 controls the air to have a constant humidity or water vapor content. The humidified air is pressurized by the humidifying fan 68 and discharged from the humidified air discharge port 71. The exhausted humidified air passes through the humidifying pipe 72 and is supplied to the forward air blowing path 22. That is, the humidified air is supplied to the downstream side of the exhaust fan 16 and before the test chamber 2 is reached. The supply location of the humidified air is not particularly limited as long as it is downstream of the exhaust fan 16, and may be immediately after the discharge port of the exhaust fan 16. It may be just before the test room 2.
Further, humid air may be supplied in the test chamber 2 until reaching the test space 6. When the exhaust fan 16 and the air supply port 20 are separated from each other, humidified air may be supplied into the air conditioning unit 50.

  In the present embodiment, since the actuator valve 73 is provided between the humidified air discharge port 71 of the additional humidifier 65 and the forward-side air passage 22, supply of humidified air by adjusting the opening degree of the actuator valve 73. The amount can be increased or decreased.

Moreover, in the environmental test apparatus 1 of this embodiment, the return side ventilation path 28 is divided into two flow paths, a dehumidification ventilation path 86 and a bypass ventilation path 97, as another specific configuration.
Switching means 26 is provided at a branch portion between the bypass air passage 97 and the dehumidifying air passage 86. The switching means 26 is a motor valve. The switching means 26 is a three-way switching valve or a switching damper.
The bypass air passage 97 is a flow passage for returning the air to the air conditioning unit 50 without passing through the equipment in the dehumidifying air passage 86, and is merely a duct. The bypass air passage 97 is connected to the second air return port 37 of the air conditioning unit 50. In the present embodiment, the second air return port 37 is open in the air chamber 27 of the air conditioning unit 50.

The dehumidifying air passage 86 is a flow path branched with the switching means 26 as a base end, and is provided with an air / air heat exchanger 87 and a return air dehumidifying means 88.
The flow path that constitutes the dehumidifying air passage 86 is connected to the first air return port 21 of the air conditioning unit 50. In the present embodiment, the first air return port 21 is open in the ventilation space 17 of the air conditioning unit 50. That is, the dehumidifying air passage 86 is branched from the middle of the return side air passage 28 by the switching means 26, and the air / air heat exchanger 87 and the return air dehumidifying means 88 are provided in this order. 17 is connected.

The return air dehumidifying means 88 is, for example, a known rotary type desiccant dehumidifying device, and is an adsorption-type drying device.
The return air dehumidifying means 88 includes a main flow channel 91 that allows air for dehumidification to pass therethrough and an auxiliary flow channel 92 that allows hot air to dry the moisture adsorbent incorporated in the desiccant rotor.
The return side air passage 28 passes through the secondary side flow path 101 of the air / air heat exchanger 87 via the switching means 26 and is connected to the main flow path 91 of the return air dehumidifying means 88. The discharge side of the main flow path 91 of the return air dehumidifying means 88 is connected to the air return port 21 of the air conditioning unit 50.

The auxiliary flow path 92 of the return air dehumidifying means 88 is connected to a hot air supply device (not shown) on the introduction side, and connected to the primary flow path 102 of the air / air heat exchanger 87 on the discharge side.
The return side air passage 28 is provided with the bypass air passage 97 that bypasses the dehumidifying air passage 86 as described above.

The environmental test apparatus 1 according to the present embodiment includes a temperature / humidity control device 77. In FIG. 1, the temperature / humidity control device 77 is illustrated at a position different from the control device 40, but the temperature / humidity control device 77 may be a part of the control device 40.
The temperature / humidity control device 77 is a control device that performs PID control. In the environmental test apparatus 1 of the present embodiment, signals from the test chamber temperature sensor 30 provided in the test chamber 2 and the test chamber humidity sensor 31 are input to the temperature / humidity control device 77.

In this embodiment, the air conditioning side temperature sensor 42 and the air conditioning side humidity sensor 43 are also provided on the air conditioning unit 50 side as described above, and the detected temperature of the air conditioning side temperature sensor 42 and the detected humidity of the air conditioning side humidity sensor 43 are also temperature. -It is input to the humidity control device 77.
On the other hand, a control signal is output from the temperature / humidity control device 77, and the air conditioner 51 of the air conditioning unit 50 is controlled by the control signal.

In the present embodiment, the temperature in the air chamber 27 of the air conditioning unit 50 is controlled by feeding back the detected temperature of the air conditioning side temperature sensor 42, and is controlled so that the detected temperature of the air conditioning side temperature sensor 42 becomes the set temperature. The The set temperature of the air chamber 27 of the air conditioning unit 50 is corrected by the detected temperature of the test chamber temperature sensor 30 provided in the test chamber 2.
In principle, the humidity in the air chamber 27 of the air conditioning unit 50 is controlled by giving priority to the detection humidity of the air conditioning side humidity sensor 43 on the air conditioning unit 50 side, and the detection humidity of the air conditioning side humidity sensor 43 on the air conditioning unit 50 side is set. The humidity is controlled to be a value close to the humidity (the humidity of the target environment of the test chamber 2).
In the present embodiment, the humidity in the air-conditioning unit 50 is controlled so as to be a humidity close to the set humidity, without aiming to coincide with the set humidity.
However, when the set humidity is low and the set humidity can be maintained without causing the additional humidifier 65 to function, the humidity in the air conditioning unit 50 is detected by the test chamber humidity sensor 31 in the test chamber 2. The humidity in the air chamber 27 of the air conditioning unit 50 is controlled so as to match the set humidity.

  Further, an actuator valve 73 provided between the additional humidifier 65 and the forward air passage 22 is controlled by the temperature / humidity controller 77.

In the present embodiment, the signal of the dew point meter 45 provided in the air conditioning unit 50 is further input to the temperature / humidity control device 77.
Further, a control signal is output from the temperature / humidity control device 77, and the return air dehumidifying means 88 and the like are controlled by the control signal.
In the present embodiment, the return air dehumidifying means 88 is set so that the dew point temperature of the air returned from the test chamber 2 side to the air conditioning unit 50, that is, the dew point of the air supplied to the cooler 12 is equal to or lower than the surface temperature of the cooler 12. Be controlled.

As described above, the control signal is output from the temperature / humidity control device 77, and the air conditioning device 51 of the air conditioning unit 50 is controlled by the control signal. That is, detection information of the test chamber temperature sensor 30, the test chamber humidity sensor 31, the air conditioning side temperature sensor 42, and the air conditioning side humidity sensor 43 provided in the test chamber 2 is fed back to the air conditioning equipment 51 by the temperature / humidity control device 77, The cooler (evaporator) 12 and the heater 15 are controlled.
Further, an actuator valve 73 provided between the additional humidifier 65 and the forward air passage 22 is controlled by the temperature / humidity controller 77.
Further, the return air dehumidifying means 88 and the like are controlled by the temperature / humidity control device 77.

Next, functions of the environmental test apparatus 1 of the present embodiment will be described.
In the environmental test apparatus 1 of this embodiment, general air conditioning control and additional humidification air conditioning control can be performed.
In the environmental test apparatus 1 of the present embodiment, both the cooling device 52 and the heater 15 are driven to balance both the general air conditioning control and the additional humidification air conditioning control. The temperature in the test chamber 2 is adjusted.
The general air conditioning control is a control method similar to that of the conventional energy-saving environmental test apparatus, and the detection signals of the test chamber temperature sensor 30 and the test chamber humidity sensor 31 provided in the test chamber 2 are sent to the air conditioning equipment 51 of the air conditioning unit 50. Provide feedback. Focusing on humidity control, in general air conditioning control, the cooling device 52 in the air conditioning equipment 51 is operated so that the humidity in the test chamber 2 becomes the set humidity.

  Moreover, in the environmental test apparatus 1 of this embodiment, the "humidification operation by a refrigerator" can also be performed during general air conditioning control.

The additional humidification air conditioning control is a control method that is preferably performed when the set temperature of the test chamber 2 is low and the set humidity is high. In the additional humidification air conditioning control, the air conditioning unit 50 creates medium or high humidity air, and further mixes the high humidity air produced by the additional humidification device 65 to make the air into the test chamber 2. Supply.
As described above, the environmental test apparatus 1 of the present embodiment does not have a humidifier and adjusts the humidity with a refrigerator.
Although the environmental test apparatus 1 of this embodiment can also perform "humidification operation with a refrigerator", when the humidity of the target environment is high, the difference between the surface temperature of the cooler 12 and the ambient temperature is small. Thus, the cooling function of the cooler 12 is hindered.
Therefore, in the present embodiment, when the humidity of the target environment is high, high humidity air produced by the additional humidifier 65 is mixed to increase the humidity, and the air is supplied to the test chamber 2.

Here, when the target environment is a low temperature environment, the amount of water vapor contained in the air is small even if the target humidity is high.
On the other hand, although the outside air has a low humidity (relative humidity), the air temperature is higher than the temperature of the air discharged from the air-conditioning unit 50, so that the amount of saturated water vapor is large and the water vapor content is large. The outside air has a relative humidity lower than that of air discharged from the air conditioning unit 50, but has an absolute humidity higher than that of air discharged from the air conditioning unit 50.
In the present embodiment, the additional humidifier 65 introduces outside air into the housing 66, humidifies the outside air with the humidifier 67, and discharges it.
Therefore, the air discharged from the additional humidifier 65 has a significantly higher water vapor content than the air discharged from the air conditioning unit 50.
In the additional humidification air-conditioning control, high-humidity air (air having a high water vapor partial pressure) produced by the additional humidification device 65 is mixed into the air discharged from the air-conditioning unit 50, so that the amount of water vapor held by the air increases. The humidity of the air discharged from the air conditioning unit 50 increases. Then, air with increased humidity is supplied to the test chamber 2.

In the present embodiment, when the additional humidification air conditioning control is executed, the return air dehumidifying means 88 is made to function, and the water vapor corresponding to the water vapor added by the additional humidifier 65 is removed by the return air dehumidifying means 88. And return to the air conditioning unit 50.
That is, when additional humidification air conditioning control is executed, a return air dehumidifying operation is performed accompanying this. In the return air dehumidifying operation, the switching means 26 of the return side air passage 28 is opened to the dehumidification air passage 86 side, the main dehumidification air passage 86 of the return side air passage 28 is opened, and the bypass air passage 97 is closed.

The air discharged from the air conditioning unit 50 and supplied to the test chamber 2 is discharged from the blower outlet 11 of the test chamber 2 and flows through the dehumidifying air passage 86.
The air introduced into the dehumidifying air passage 86 passes through the secondary flow path 101 of the air / air heat exchanger 87 and is heat-exchanged with the hot air flowing through the primary flow path 102 of the air / air heat exchanger 87. The temperature is raised.
That is, the return air dehumidifying means 88 provided in the dehumidifying air passage 86 is a rotary type desiccant dehumidifying device and allows hot air to pass therethrough because the built-in moisture adsorbent needs to be dried. In the present embodiment, the waste heat is passed through the primary flow path 102 of the air / air heat exchanger 87, and the air discharged from the test chamber 2 and introduced into the return air dehumidifying means 88 is heated.

  Therefore, even if the temperature in the test chamber 2 is low and the temperature of the air introduced into the dehumidifying air passage 86 is low, the temperature of the air introduced into the return air dehumidifying means 88 is increased. In the present embodiment, the air that has been heated through the air / air heat exchanger 87 is introduced into the return air dehumidifying means 88. Therefore, the temperature of the air supplied to the return air dehumidifying means 88 does not become excessively low, and the return air dehumidifying means 88 is not damaged.

The return air dehumidifying means 88 dehumidifies the air discharged from the test chamber 2. Here, since the return air dehumidifying means 88 is an adsorption-type dehumidifying device, water vapor in the air is removed, and the dew point temperature of the air itself is lowered.
In the present embodiment, the dew point of the air introduced into the air conditioning unit 50 is monitored by the dew point meter 45, and the return air dehumidifying means 88 is controlled so that the dew point becomes equal to or lower than the surface temperature of the cooler 12.

The air that has passed through the return air dehumidifying means 88 is returned to the air conditioning unit 50 and immediately introduced into the ventilation space 17 and supplied to the cooler 12. The dew point of the air in contact with the cooler 12 is the surface temperature of the cooler 12. Therefore, condensation and frost are hardly generated in the cooler 12.
Therefore, the growth of frost on the surface of the cooler 12 is suppressed, and the cooler 12 can maintain the cooling capacity for a long time.

  Next, an initial operation of the environmental test apparatus 1 according to the present embodiment will be described with reference to the flowchart of FIG. The operation program for executing the operation of the flowchart of FIG. 2 is stored in the storage means of the control device 40, and a series of operations are automatically executed.

  When it is confirmed in step 1 of the flowchart that the operation of the environmental test apparatus 1 has been started, the process proceeds to step 2 where the set value of the target temperature and the set value of the target humidity in the test chamber 2 are checked. When the set temperature is low and the set humidity is high, the environmental test apparatus 1 is controlled by a control method including additional humidification air conditioning control. On the other hand, for example, when the set temperature is high, the process proceeds to step 16 and the environmental test apparatus 1 is controlled by another control method.

If the set temperature is low and the set humidity is high, the process proceeds to step 3 and the temperature drop program is executed. That is, the expansion valve 36 is controlled so that the surface temperature of the cooler 12 becomes “near the dew point of the target environment”.
As a result, the surface temperature of the cooler 12 becomes “near the dew point of the target environment”. In the temperature drop program, the surface temperature of the cooler 12 is controlled to be close to the dew point of the target environment, so that the absolute humidity (water vapor concentration, water vapor partial pressure) in the test chamber 2 is not excessively lowered. . That is, the dew point of the target environment is naturally lower than the temperature in the initial environment. Therefore, the temperature of the test chamber 2 can be lowered by controlling the surface temperature of the cooler to be close to the dew point of the target environment. Moreover, since the surface temperature of the cooler 12 is in the vicinity of the dew point of the target environment, there is little condensation of water vapor on the surface of the cooler 12, and the water vapor concentration in the test chamber 2 is not excessively reduced.
Moreover, since there is little condensation of the water vapor | steam on the surface of the cooler 12, there is also little frost formation and it is hard to become a hindrance to performing a continuous operation.

  When the set temperature is low and the set humidity is high, the dew point temperature is close to the set temperature. For example, if the set humidity is 100%, the dew point temperature matches the set temperature. Therefore, instead of using the dew point temperature as a reference, the surface temperature of the cooler 12 may be controlled so that the temperature is simply a few degrees lower than the set temperature. For example, the surface temperature of the cooler 12 may be controlled to be a temperature that is about 1 to 4 degrees Celsius lower than the set temperature.

Subsequently, the routine proceeds to step 4 where the heater 15 is energized. The heater 15 activated in step 4 has a lower limit in output. That is, the output of the heater 15 is controlled so that the actual output of the heater 15 is, for example, an output of 10% or more with respect to the capability of the heater 15. That is, the operation rate of the heater 15 is controlled so as to be an output of 10% or more.
In the present embodiment, the actual output of the heater 15 is set to a constant value based on the ability of the heater 15, but may be defined by the amount of power. Further, compared with the actual output of the cooling device 52, the actual output of the heater 15 may be an output that only cancels a few percent of the actual output of the cooling device 52.

Even in the normal type environmental test apparatus, the temperature of the air is slightly reduced by the cooling device 52, and the air is heated by the heater 15 to finely adjust the temperature of the air to the set temperature. The heater 15 is driven with an output larger than the output of the heater 15 executed by the control.
As described above, when performing general air conditioning control, both the cooling device 52 and the heater 15 are driven, and the temperature in the test chamber 2 is adjusted by balancing both of them. In this step, there is a lower limit in the output of the heater 15 and there is a certain amount of heat generation, so the cooling device 52 is driven with a higher output to offset this.
That is, in the environmental test apparatus 1 of this embodiment, the detection information of the test room temperature sensor 30 is fed back to the air conditioning equipment 51 by the temperature / humidity control device 77 and the cooling device 52 is controlled. If it raises more than before, the output of the cooling device 52 will follow and increase.

In step 5, it waits for the temperature in the test chamber 2 to become the set temperature.
When it is confirmed in step 5 that the temperature in the test chamber 2 has reached the set temperature, the process proceeds to step 6 where the operating rate of the heater 15 is 10% or more of the capacity of the heater 15. It is confirmed whether or not there is.
If the operating rate of the heater 15 is 10% or more with respect to the capacity of the heater 15, the process proceeds to step 7, the control method program is switched to the humidity adjustment program, and the “humidification operation by the refrigerator” is performed. Done. As a result, the expansion valve 36 and the downstream throttle means 55 are controlled so that the surface temperature of the cooler 12 becomes “dew point or higher of the target environment”. In the present embodiment, the target environment is a set environment.
Further, a part or all of the water adhering to the surface of the cooler 12 evaporates or sublimates as the temperature of the surface of the cooler 12 rises. As a result, the air passing through the ventilation space 17 is humidified.

In step 8, it is confirmed that the temperature in the test chamber 2 maintains the set temperature. If the temperature in the test chamber 2 maintains the set temperature, the process proceeds to step 9 and the timer is started. This timer measures the time for waiting for the environment in the test chamber 2 and the operation of each device to stabilize, and measures a time of about 1 to 5 minutes.
If the temperature in the test chamber 2 does not maintain the set temperature, the process returns to step 3 and the above-described process is executed again.
If it is confirmed in step 10 that the timer has completed, the process proceeds to step 11 where it is confirmed that the temperature in the test chamber 2 maintains the set temperature.
If the temperature in the test chamber 2 does not maintain the set temperature, the process returns to step 3 and the above-described process is executed again.

  Next, it transfers to step 12 and it is confirmed that the humidity in the test chamber 2 is below a setting humidity. If the humidity in the test chamber 2 exceeds the set humidity, it is not necessary to humidify further, so the routine proceeds to step 14 and thereafter normal control is executed.

On the other hand, if the humidity in the test chamber 2 is equal to or lower than the set humidity, the air supplied to the test chamber 2 needs to be further humidified, so the routine proceeds to step 13 where additional humidification air conditioning control is performed. Along with this, a return air dehumidifying operation is performed.
When performing additional humidification air conditioning control, the humidity in the air chamber 27 of the air conditioning unit 50 is controlled with priority given to the humidity detected by the air conditioning side humidity sensor 43 on the air conditioning unit 50 side, and the air conditioning side humidity on the air conditioning unit 50 side is controlled. Control is performed so that the humidity detected by the sensor 43 is a constant humidity close to the set humidity (the humidity of the target environment of the test chamber 2).
That is, when performing additional humidification air conditioning control, in principle, the humidity in the air chamber 27 of the air conditioning unit 50 is kept at a constant value, and the air discharged from the air conditioning unit 50 has high humidity (high water vapor partial pressure and high absolute humidity). Adjust the humidity in the test chamber 2 by mixing in (high) air.
Specifically, air of constant humidity is adjusted and circulated in the air conditioning unit 50, and the circulating air is taken out and blown to the test chamber 2 side. Then, the high-humidity air produced by the additional humidifier 65 is mixed into the air passing through the outgoing air passage 22.

Here, the air mixed into the air passing through the forward air passage 22 by executing the additional humidification air conditioning control is humidified air and has a significantly higher water vapor content than the air discharged from the air conditioning unit 50. . For this reason, the humidity of the air passing through the forward air passage 22 increases due to the mixing of humidified air.
During the additional humidification air conditioning control, the detected humidity of the test chamber humidity sensor 31 is fed back to the actuator valve 73 by the temperature / humidity control device 77, and the detected humidity of the test chamber humidity sensor 31 becomes the set humidity. The opening degree of the valve 73 is PID controlled.
Therefore, the humidity in the test chamber 2 converges to the set humidity.
By additional humidification air conditioning control, water vapor is added to the air flowing in the forward air passage 22, but at the same time the return air dehumidifying operation is performed, so the added water vapor is removed by the return air dehumidifying means 88 and the cooler 12 is attached. Frost is suppressed.

The humidified air mixed in the air passing through the forward air passage 22 by executing the additional humidification air conditioning control has a higher temperature than the air discharged from the air conditioning unit 50. For this reason, the temperature of the air passing through the forward-side air passage 22 rises due to the mixing of humidified air.
However, in the present embodiment, even during the additional humidification air conditioning control, the detection information of the test chamber temperature sensor 30 is fed back to the air conditioning equipment 51 by the temperature / humidity control device 77, and the target temperature of the air conditioning unit 50 is corrected.

Here, in step 4 described above, the heater 15 was energized, and the output of the heater 15 was maintained higher than usual.
In the additional humidification air conditioning control, the lower limit of the output of the heater 15 is eliminated, and the control of the heater 15 is returned to the normal control.
As described above, in the present embodiment, even during the additional humidification air conditioning control, both the cooling device 52 and the heater 15 are driven, and the temperature in the test chamber 2 is adjusted by balancing both of them. Therefore, the detection information of the test chamber temperature sensor 30 is fed back to the air conditioner 51 by the temperature / humidity control device 77, the output of the heater 15 is reduced, and the temperature rise of the air passing through the outgoing air passage 22 is suppressed. .
Prior to the additional humidification air-conditioning control, the heating value of the heater 15 was controlled to be slightly excessive. Therefore, a sufficient lowering margin was secured for the output of the heater 15, and the output of the heater 15 was reduced. The temperature of the air passing through the forward-side air passage 22 can be maintained at the set temperature only by decreasing.

  Since the response speed of the heater 15 is faster than the response speed of the cooling device 52, the thermal energy supplied from the additional humidifier 65 to the air passing through the outgoing air passage 22 reduces the output of the heater 15. And the temperature of the air supplied to the test chamber 2 is maintained at the set temperature. The humidity of the air supplied to the test chamber 2 is also maintained at the set humidity.

In the embodiment described above, a configuration is adopted in which the amount of water vapor supplied from the additional humidifier 65 to the downstream side of the exhaust blower 16 is controlled by adjusting the opening of the actuator valve 73. That is, in the previous embodiment, the amount of steam supplied to the downstream side of the exhaust fan 16 is controlled by increasing or decreasing the amount of humidified air. However, the present invention is not limited to this configuration.
For example, the amount of steam supplied to the downstream side of the exhaust fan 16 may be controlled by increasing or decreasing the output of the humidifier 67 built in the additional humidifier 65. In this measure, the amount of water vapor supplied to the downstream side of the exhaust fan 16 is controlled by adjusting the water vapor concentration of the humidified air.
Further, the amount of steam supplied to the downstream side of the exhaust fan 16 may be controlled by increasing or decreasing the number of rotations of the humidifier fan 68 incorporated in the additional humidifier 65.

In the embodiment described above, the return air dehumidifying means 88 is controlled to adjust the dew point of the air supplied to the cooler 12 to be equal to or lower than the surface temperature of the cooler 12, but instead, The additional humidifier 65 may be controlled to adjust the dew point of the air supplied to the cooler 12 to be equal to or lower than the surface temperature of the cooler 12.
For example, the operation amount of the return air dehumidifying means 88 is limited to a fixed value or a fixed range. And the dew point of the air returned to the air-conditioning part 50 by the dew point meter 45 is monitored, and if the dew point rises, the operation amount of the additional humidifier 65 will be suppressed.

As described above, the means for adjusting the humidity in the test chamber 2 can be performed by controlling the additional humidifier 65 and adjusting the amount of added water vapor or the amount of added air.
Of course, the humidity in the test chamber 2 can also be adjusted by increasing or decreasing the humidity of the air supplied from the air-conditioning unit 50 to the test chamber 2 side by the “humidification operation by the refrigerator”.
Furthermore, the humidity in the test chamber 2 can be adjusted by increasing or decreasing the amount of air supplied from the air conditioning unit 50 to the test chamber 2 side and changing the mixing ratio with the air supplied from the additional humidifier 65.

  In the above-described embodiment, the exhaust fan 16 is provided on the air supply port 20 side of the air conditioning unit 50, and the push-in method in which the air of the air conditioning unit 50 is pressurized and energized and supplied to the test chamber 2 side is employed. A suction blower may be provided on the air return ports 21 and 37 side, and air may be drawn from the test chamber 2 side to the air conditioning unit 50 side by negative pressure.

  Moreover, a flow path structure like the environmental test apparatus 1 'shown in FIG. 3 may be used. Since the environmental test apparatus 1 'shown in FIG. 3 is the same as the above-described embodiment except for the position of the blower, the same reference numerals are assigned to the same members, and duplicate descriptions are omitted.

Further, in the above-described embodiment, the return side air passage 28 is branched into two channels of the dehumidifying air passage 86 and the bypass air passage 97, the dehumidifying air passage 86 is opened in the ventilation space 17 of the air conditioning unit 50, and the bypass air passage 97 is opened. Opened in the air chamber 27 of the air conditioning unit 50.
However, the present invention is not limited to this configuration, and air conditioning is performed by joining the ends of the dehumidifying air passage 86 and the bypass air passage 97 outside as in the environmental test apparatuses 110, 111, and 112 shown in FIGS. You may connect to the part 50.

Since the environmental test apparatuses 110, 111, and 112 shown in FIGS. 7, 8, and 9 are the same as the environmental test apparatus 1 of the above-described embodiment except for the flow path configuration, the same members are assigned the same numbers and are duplicated. The description which was made is abbreviate | omitted.
In the environmental test apparatuses 110 and 111 shown in FIGS. 7 and 8, opening / closing means 90 and 98 such as an opening / closing valve and an opening / closing damper are employed in place of the switching means 26 for three-way switching.
In the environmental test apparatuses 110 and 111 shown in FIGS. 7 and 8, the ends of the dehumidifying air passage 86 and the bypass air passage 97 are joined together and connected to the ventilation space 17 of the air conditioning unit 50.
In the environmental test apparatus 112 shown in FIG. 9, the ends of the dehumidifying air passage 86 and the bypass air passage 97 are joined together and connected to the air chamber 27 of the air conditioning unit 50.

In the environmental test apparatuses 1 and 1 ′ in FIGS. 1 and 3, the flow path through which air flows is switched by the switching means 26 to either the bypass air passage 97 or the dehumidifying air passage 86. In the environmental test apparatuses 110 and 111 shown in FIGS. 7 and 8, the flow path through which the air flows is switched between the bypass air passage 97 and the dehumidifying air passage 86 by the opening / closing means 90 and 98.
In each of the above-described embodiments, the flow path switching is such that the entire air flow is passed through one of the bypass air passage 97 and the dehumidifying air passage 86 and the other passage is closed. However, this invention is not limited to this structure, You may distribute ventilation to several flow paths.
For example, the switching means 26 and the opening / closing means 90 and 98 may be in a half-open state, and 50% of the total air flow may be allowed to flow through the bypass air passage 97 and the dehumidifying air passage 86, respectively. Or you may provide a difference in ventilation volume so that one side may be 60% and the other side may be 40%.
In this way, it is also recommended to control the flow rate of the airflow flowing through the bypass airflow path 97 and the dehumidification airflow path 86.

  In the above-described embodiment, the air conditioning unit 50 has a circulation path including the air chamber 27 and the ventilation space 17 inside, and employs a structure in which air is circulated by the air conditioning unit 50. However, the present invention is limited to this configuration. For example, the air-conditioning units 81, 105, and 96 having a passage-type air-conditioning unit as shown in FIGS.

In the embodiment described above, the additional humidifying device 65 is a device separate from the test chamber 2 and the air conditioning unit 50. However, for example, the additional humidifying device 80 may be built in the air conditioning unit 81 as shown in FIG. .
In the configuration shown in FIG. 4, a small room 82 is provided in the casing of the air conditioning unit 81, and a humidifier 67 and a humidifying fan 68 are built in the small room 82.
The discharge side of the humidifying fan 68 is connected to the discharge side of the exhaust fan 16. A damper 83 with an actuator is provided on the discharge side of the humidifying fan 68, and the amount of water vapor supplied to the downstream side of the exhaust fan 16 is controlled by opening and closing the damper 83.
Further, an additional humidifier 80 may be provided on the test chamber 2 side (not shown).

In the embodiment described above, the test chamber 2 and the air conditioning unit 50 are separate bodies, but the test chamber 2 and the air conditioning unit 105 may be integrated like an environmental test apparatus 85 shown in FIG.
In the environmental test apparatus 85, an air conditioner 51 is built in the lower part of the test chamber 2. The discharge side of the humidifying fan 68 is connected to the discharge side of the exhaust fan 16. In the description of each device of the environmental test apparatus 85, the same device as in the previous embodiment is assigned the same number, and the detailed description is omitted.

  In the embodiment described above, humidified air is supplied to the downstream side of the exhaust fan 16. However, when the outlet 29 is long like the circulation fan 94 employed in the air conditioning unit 96 shown in FIG. A horizontal hole 99 may be provided in the outlet 29 of the blower 94 and the humidifying pipe 72 may be connected to supply the humidified air into the circulation blower 94. That is, humidified air may be introduced directly to the discharge side of the circulation fan 94.

In the embodiment described above, the humidifier 67 is built in the additional humidifier 65, but the humidifier 67 is not essential. That is, the structure which supplies directly to the downstream of the air-conditioning part 50, without humidifying external air may be sufficient.
In the above-described embodiments, the present invention is applied to an energy-saving environmental test apparatus. However, the present invention may be applied to an environmental test apparatus having a humidifier such as a normal environmental test apparatus. .

  In the embodiment described above, a rotary desiccant dehumidifier is used as the return air dehumidifier 88, but other dry dehumidifiers may be used. Further, dehumidification may be performed by a refrigerator or the like.

1, 1 ', 85, 110, 111, 112 Environmental test apparatus 2 Test chamber 5 Circulating flow path 12 Cooler (evaporator)
50, 81, 105, 96 Air-conditioning section 51 Air-conditioning equipment 52 Cooling device 55 Downstream-side restricting means 65, 80 Additional humidifying device 68 Humidifying fan 86 Dehumidifying air passage 87 Air / air heat exchanger 88 Return air dehumidifying means 100 Air-conditioning device

Claims (7)

It has an air-conditioning unit with air-conditioning equipment that controls temperature and humidity, and a test room in which the DUT is installed, and circulates air between the air-conditioning unit and the test room to bring the test chamber to the desired target temperature and target humidity. In the environmental test equipment to be adjusted,
An environmental test apparatus comprising: an additional humidifying unit that humidifies air supplied from the air conditioning unit to the test chamber; and a return air dehumidifying unit that dehumidifies air returned from the test chamber to the air conditioning unit.   The environmental test according to claim 1, wherein the air conditioning unit has a cooler, and the return air dehumidifying means is controlled so that the dew point of the air supplied to the cooler is equal to or lower than the surface temperature of the cooler. apparatus.   The environmental test apparatus according to claim 1, wherein the air conditioning unit includes a cooler, and the additional humidification means is controlled so that a dew point of air supplied to the cooler is equal to or lower than a surface temperature of the cooler. .   Controlling at least one of the additional humidifying means, the amount of air supplied from the air conditioning unit to the test chamber, and the humidity of the air supplied from the air conditioning unit to the test chamber, to adjust the test chamber to a desired humidity The environmental test apparatus according to any one of claims 1 to 3. Has a cooling device as air conditioning equipment,
The cooling device has a compressor, a condenser, an expansion means, an evaporator, and a downstream throttle means whose degree of opening can be changed. These are connected in a ring shape and change in phase inside the cooling apparatus. It is filled with refrigerant and realizes a series of refrigeration cycles,
5. The humidity of the air supplied from the air conditioning unit to the test chamber can be adjusted by changing the surface temperature of the evaporator by controlling the downstream throttle means. The environmental test apparatus according to the above.   The environmental test apparatus according to claim 1, wherein the additional humidifying means mixes outside air into the air supplied from the air conditioning unit to the test chamber. In an air conditioner that is connected to a test space and circulates air between the test space and adjusts the test space to a desired target temperature and target humidity.
An air conditioning unit having an air conditioning device for controlling temperature and humidity, an additional humidifying unit for humidifying air supplied from the air conditioning unit to the test space, and a return air dehumidifying unit for dehumidifying the air returned from the test space to the air conditioning unit An air conditioner characterized by that.

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