JP2018063153A - Shape measurement apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shape measurement apparatus capable of being installed in a desired orientation and easily adjusted in the distance from measurement object.SOLUTION: A housing part 120 has an X reference plane and a Y reference plane each formed with mounting holes into which a fixing member can be inserted. A movable part 141 is housed in the housing part and is reciprocally driven to move with respect to the housing part. The movable part has a beam splitter 12 and a mirror 9 attached thereto. The beam splitter guides a measuring beam L1 and a reference beam L2 to a measurement object S and the mirror respectively, and a beam of interference light of the measuring beam which is reflected by the measurement object and the reference beam which is reflected by the mirror is guided to light receiving parts 2 and 3. When the movable part is reciprocally driven to move, the difference between the optical path length of the measuring beam and the optical path length of the reference beam changes. The surface shape in plural parts of the measurement object is acquired based on the relative position of the movable part with respect to the housing part and the amount light received by plural pixels in the light receiving part.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a shape measuring apparatus for measuring the surface shape of a measurement object.

  In order to measure the surface shape of the measurement object, an interference type shape measuring device is used. In the coherence scanning interferometer described in Patent Document 1, light generated from a light source is divided into measurement light applied to an object and reference light applied to a reference mirror. The measurement light reflected by the object and the reference light reflected by the reference mirror are superimposed and detected by the camera. An image is acquired by the camera while the optical system including the light source and the camera is moved relative to the object. The surface height of the object is calculated based on the interval between the interference fringes in the acquired image.

JP2013-83649A

  The shape measuring device may be used to inspect the surface shape of a measurement object. Therefore, it is preferable to inline the inspection process of the surface shape of the produced product by installing the shape measuring device in a production line of a factory, for example. In this case, it is required that the shape measuring device can be installed in a desired direction and that the distance between the shape measuring device and the measurement object can be easily adjusted.

  However, in the configuration in which the optical system is moved relative to the object to be measured, such as the coherence scanning interferometer of Patent Document 1, the shape measuring device becomes larger and heavier. It has been developed as a device. For this reason, it is difficult to install the coherence scanning interferometer in a desired direction and to easily adjust the distance between the coherence scanning interferometer and the measurement object.

  An object of the present invention is to provide a shape measuring apparatus that can be installed in a desired direction and that can easily adjust the distance from a measurement object.

  (1) A shape measuring apparatus according to the present invention is a shape measuring apparatus for measuring a surface shape of a measurement object, and includes a light projecting unit that emits light having a plurality of peak wavelengths, a reference body, and a two-dimensional view. A light receiving unit including a plurality of arranged pixels, and the light emitted from the light projecting unit is guided to the measurement object as measurement light, and the light emitted from the light projecting unit is guided to the reference body as reference light to be measured. An optical system that generates interference light between the measurement light reflected by the reference light and the reference light reflected by the reference body, and at least one of the optical system and the reference body is attached to and reciprocates. A movable part that changes the difference between the optical path length of the measurement light and the optical path length of the reference light by moving, a housing part that has a mounting outer surface and supports the movable part so as to be able to reciprocate, and movable relative to the housing part Position detection unit for detecting the relative position of the part, and position detection unit A shape acquisition unit that acquires the surface shape of a plurality of portions of the measurement object based on the relative position detected by the plurality of pixels of the light reception unit, and the housing unit includes a light projecting unit, a reference The body, the light receiving unit, the optical system, the movable unit, and the position detecting unit are accommodated, and a mounting hole into which the fixing member can be inserted is formed on the mounting outer surface of the housing unit.

  In this shape measuring apparatus, the light projecting unit, the reference body, the light receiving unit, the optical system, the movable unit, and the position detecting unit are accommodated in the housing unit. At least one of the optical system and the reference body is attached to the movable part. The light emitted from the light projecting unit is guided to the measurement object as measurement light by the optical system, and the light emitted from the light projecting unit is guided to the reference body as reference light by the optical system. Interference light between the measurement light reflected by the measurement object and the reference light reflected by the reference body is generated by the optical system and guided to the light receiving unit.

  As the movable portion reciprocates, the difference between the optical path length of the measurement light and the optical path length of the reference light (hereinafter referred to as an optical path length difference) changes. From each of the plurality of pixels of the light receiving unit, an interference pattern of the received light amount that changes due to the optical path length difference is acquired. Here, since the measurement light and the reference light have a plurality of peak wavelengths, the interference pattern of the amount of received light does not show spatial periodicity. Therefore, based on the relative position of the movable part relative to the casing detected by the position detector and the amount of light received by each pixel of the light receiving part, the surface shape of the corresponding part of the measurement object is uniquely identified with high accuracy. can do.

  Further, since the plurality of pixels are two-dimensionally arranged in the light receiving unit, the light receiving unit can simultaneously receive the interference light including the measurement light reflected by the plurality of portions of the measurement object. Therefore, the surface shape of the plurality of portions of the measurement object can be acquired at high speed.

  Furthermore, a mounting hole is formed on the mounting outer surface of the casing. The user can attach the shape measuring device to any attachment device by inserting the fixing member into the attachment hole. According to this configuration, by using an appropriate fixture according to the object to be measured and the measurement situation, the measurement light can be emitted in a desired direction without being restricted by the fixture. The part can be attached to a fixture. Further, the housing portion can be attached to the attachment device in a state where the distance between the housing portion and the measurement object is maintained at a desired value without being restricted by the attachment device. As a result, the shape measuring apparatus can be installed in a desired orientation and with the distance from the measurement object easily adjusted.

  (2) The light projecting unit may emit light having higher coherence than white light and lower than laser light. In this case, an interference pattern of the amount of received light is acquired from a plurality of pixels of the light receiving unit in a wide optical path length difference region. Thereby, the surface shape of the measurement object can be measured at higher speed.

  (3) The mounting outer surface of the housing part may be formed in parallel to the optical path of the measurement light. In this case, the shape measuring apparatus can be easily installed in a desired direction by adjusting the posture of the housing portion so that the mounting outer surface is parallel to the desired direction.

  (4) The housing portion may have an emission surface that emits the measurement light to the measurement object, and the emission surface may be formed perpendicular to the optical path of the measurement light. In this case, the shape measuring device can be installed in a state where the distance from the measurement object is easily maintained by positioning the casing so that the distance between the emission surface and the measurement object becomes a desired value. it can.

  (5) A locking hole into which the locking member can be fitted may be formed on the mounting outer surface of the casing. In this case, the housing part can be locked to the mounting member by providing the locking member on the mounting member. Therefore, the user does not need to support the entire weight of the casing when attaching or removing the casing. Thereby, a user's burden can be reduced and work efficiency can be improved. In addition, the casing portion can be prevented from being dropped and damaged due to carelessness of the user.

  (6) The housing unit includes a first housing that houses the light projecting unit, the reference body, the light receiving unit, the optical system, the movable unit, and the position detecting unit, and a second housing that houses the shape acquisition unit, A connection portion that connects the first housing and the second housing in a separated state may be included.

  According to this configuration, even when the shape acquisition unit generates heat, heat transfer from the second casing to the first casing is suppressed. Therefore, the components such as the light projecting unit and the light receiving unit housed in the first housing are prevented from becoming high temperature. Thereby, deterioration of the component accommodated in the 1st housing | casing can be prevented and lifetime can be extended. In addition, since the temperatures of the light projecting unit and the light receiving unit are stabilized in a short time after the shape measuring apparatus is turned on, the rise time of the shape measuring apparatus can be shortened.

  (7) A heat radiating fin may be formed on the outer surface of the second casing. In this case, the heat generated from the shape acquisition unit can be efficiently dissipated and the shape acquisition unit can be efficiently air-cooled.

  (8) The connecting portion may be formed of a material having a thermal conductivity equal to or lower than a predetermined thermal conductivity. In this case, heat transfer from the second housing to the first housing can be more efficiently prevented.

  (9) The housing part may further include a covering part attached to the outer surface of the first housing so as to cover the second housing. In this case, the user can be prevented from coming into contact with the second housing that generates heat.

  (10) A vent hole for air-cooling the second housing may be formed in the covering portion. In this case, the second casing can be air-cooled while preventing the user from coming into contact with the second casing.

  (11) The shape measuring device further includes a processing device provided separately from the housing unit, and the shape acquiring unit stores data indicating the acquired surface shape of the measuring object and the image of the measuring object in the processing device. The processing device performs measurement of a part specified by the operation unit based on the operation unit operated by the user to specify an arbitrary part on the image of the measurement object and the acquired data. And an arithmetic unit. In this case, a measurement result of a desired portion of the measurement object can be obtained.

  (12) The calculation unit may correct the data so that the inclination of the portion specified by the operation unit becomes a desired inclination. According to this configuration, an accurate measurement result of a desired portion of the measurement object can be obtained even when the casing is attached in a state inclined from a desired direction.

  (13) The shape measuring apparatus further includes a guide unit that emits first and second guide lights, and the guide unit is configured to detect the measurement object when the surface of the measurement object is at the focal point of the light receiving unit. The pattern of the first guide light projected on the surface and the pattern of the second guide light may be arranged so as to have a specific positional relationship.

  In this case, the user can change the shape measuring device and the measurement object so that the first guide light pattern and the second guide light pattern projected on the surface of the measurement object have a specific positional relationship. By changing the relative distance, the surface of the measurement object can be accurately and easily positioned at the focal point of the light receiving unit.

  (14) Each cycle of the reciprocating movement of the movable portion includes a first period in which the plurality of pixels of the light receiving unit receive the interference light and a second period in which the plurality of pixels of the light receiving unit do not receive the interference light. The guide unit may emit the first and second guide lights in the first period and stop emitting the first and second guide lights in the second period. In this case, it is easily prevented that the measurement of the measurement object is affected by the first and second guide lights.

  (15) The light receiving unit identifies, for each of the plurality of pixels, an envelope of the interference pattern of the received light amount that varies depending on the difference between the optical path length of the measurement light and the optical path length of the reference light. The peak position of the envelope specified by (1) may be specified, and the surface shapes of a plurality of portions of the measurement object may be acquired based on the specified peak position.

  According to this configuration, the peak position of the interference pattern envelope can be specified even when the interval of the optical path length difference from which the interference pattern is to be acquired is not sufficiently close and rough. Thereby, the surface shape of the measurement object can be measured at higher speed.

  According to the present invention, it is possible to install the shape measuring apparatus in a desired direction and in a state in which the distance from the measurement object is easily adjusted.

It is a block diagram which shows the structure of the shape measuring apparatus which concerns on one embodiment of this invention. It is a schematic diagram of a measuring head mainly showing a configuration of a measuring unit. It is a figure which shows the vibration of a movable part. It is a figure which shows the light reception amount distribution which should be acquired by the light-receiving part about arbitrary pixels. It is a typical front view of the measuring head mainly showing the configuration of the reciprocating mechanism. It is a typical left view of the measuring head mainly showing the configuration of the reciprocating mechanism. FIG. 6 is a cross-sectional view of the measurement head of FIG. 5 taken along line AA. It is sectional drawing which shows the structure of the plate part in a modification. It is a schematic diagram which shows the internal structure of a housing | casing part. It is a typical right view of the housing | casing part which shows an attachment structure. It is a typical back view of the housing | casing part which shows an attachment structure. It is a figure for demonstrating the procedure which attaches the X reference plane of a housing | casing part to a fixture. It is a figure for demonstrating the procedure which attaches the Y reference plane of a housing | casing part to a fixture.

(1) Basic Configuration of Shape Measuring Device Hereinafter, a shape measuring device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a shape measuring apparatus according to an embodiment of the present invention. As shown in FIG. 1, the shape measuring apparatus 300 includes a measuring head 100 and a processing apparatus 200. The measurement head 100 is, for example, an optical displacement meter, and includes a support structure 110, a casing unit 120, a measurement unit 130, a reciprocating mechanism 140, a drive unit 150, a control board 160, and a communication unit 170.

  The support structure 110 has an L-shaped longitudinal section and includes an installation part 111 and a holding part 112. The installation part 111 and the holding part 112 are made of metal, for example. The installation unit 111 has a horizontal flat plate shape and is installed on the installation surface. The measuring object S is placed on the upper surface of the installation unit 111. The holding part 112 is provided so as to extend upward from one end of the installation part 111. The casing unit 120 is held by the holding unit 112 of the support structure 110. The casing 120 has a rectangular parallelepiped shape, and houses the measuring unit 130, the reciprocating mechanism 140, the driving unit 150, the control board 160, and the communication unit 170.

  The measurement unit 130 includes optical elements such as a light projecting unit, a light receiving unit, a lens, and a mirror. The measurement unit 130 is attached to the reciprocating mechanism 140 except for some elements such as the mirror 11 of FIG. The reciprocating mechanism 140 reciprocates (vibrates) in one direction with respect to a support portion 125 of FIG. The drive unit 150 is an actuator, and is a voice coil motor in this example.

  The control board 160 acquires measurement data described later from the measurement unit 130, generates pixel data based on the acquired measurement data, and generates image data. Image data is a set of a plurality of pixel data. The control board 160 supplies the generated image data to the processing device 200 and controls the operations of the measurement unit 130, the reciprocating mechanism 140, and the driving unit 150 based on instructions from the processing device 200.

  Communication unit 170 includes a communication interface. The same applies to a communication unit 250 of the processing device 200 described later. The communication unit 170 transmits and receives various data and commands between the measurement head 100 and the processing device 200 through the communication unit 250. Details of the measuring head 100 will be described later.

  The processing device 200 includes a control unit 210, a storage unit 220, an operation unit 230, a display unit 240, and a communication unit 250. The control unit 210 includes, for example, a CPU (Central Processing Unit). The storage unit 220 includes, for example, a ROM (read only memory), a RAM (random access memory), and an HDD (hard disk drive). The storage unit 220 stores a system program. The storage unit 220 is used for storing various data and processing data.

  Based on the system program stored in the storage unit 220, the control unit 210 gives a command for controlling the operations of the measurement unit 130, the reciprocating mechanism 140, and the drive unit 150 of the measurement head 100 to the control board 160. In addition, the control unit 210 acquires image data from the control board 160 and stores it in the storage unit 220. Further, the control unit 210 measures a portion designated by the user on the image based on the image data.

  At the time of measurement, the control unit 210 can correct the image data so that the inclination of the portion designated by the user on the image based on the image data becomes a desired inclination (for example, horizontal). Thereby, even when the housing 120 is attached to the support structure 110 or an attachment device described later in an inclined state, an accurate measurement result of a desired portion of the measurement object S can be obtained.

  The operation unit 230 includes a mouse, a touch panel, a pointing device such as a trackball or a joystick, and a keyboard, and is operated by a user to give an instruction to the control unit 210. The display unit 240 includes, for example, an LCD (liquid crystal display) panel or an organic EL (electroluminescence) panel. The display unit 240 displays an image based on the image data stored in the storage unit 220, a measurement result, and the like.

(2) Configuration of Measurement Unit FIG. 2 is a schematic diagram of the measurement head 100 mainly showing the configuration of the measurement unit 130. As shown in FIG. 2, a support part 125 is accommodated in the housing part 120. The support part 125 may be formed integrally with the housing part 120 or may be a part of the housing part 120. The reciprocating mechanism 140 includes a movable portion 141 that can vibrate in parallel with the support portion 125 in one direction. In FIG. 2, the vibration direction of the movable portion 141 is indicated by a thick arrow. In the example of FIG. 2, the vibration direction of the movable part 141 is the vertical direction.

  The measuring unit 130 includes a light projecting unit 1, light receiving units 2 and 3, a plurality of lenses 4 to 8, a plurality of mirrors 9 to 11, a beam splitter 12, an anamorphic prism pair 13, a position detecting unit 14, and a guide light source 15. Including. Part of the mirror 11 and the position detection unit 14 of the measurement unit 130 are attached to the support unit 125. On the other hand, the measurement unit 130 excluding a part of the mirror 11 and the position detection unit 14 is attached to the movable unit 141.

  The light projecting unit 1 includes, for example, an SLD (super luminescent diode) and emits light. The light emitted from the light projecting unit 1 is referred to as outgoing light L0. The coherence of the emitted light L0 is relatively low. Specifically, the coherence of the emitted light L0 is higher than the light emitted from the LED (light emitting diode) or white light, and lower than the coherence of the laser light. Therefore, the emitted light L0 has a plurality of peak wavelengths. The lens 4 is a collimator lens. The outgoing light L0 is collimated by passing through the lens 4 and shaped so as to have a circular cross section by passing through the anamorphic prism pair 13.

  A part of the emitted light L0 is reflected without passing through the anamorphic prism pair 13. The outgoing light L0 reflected by the anamorphic prism pair 13 is received by the light receiving unit 3, and a received light signal indicating the amount of received light is output to the control board 160 (FIG. 1). Based on the light reception signal output from the light receiving unit 3, the amount of the emitted light L 0 is measured by the control board 160. When the measured amount of the emitted light L0 indicates an abnormal value, the operation of the light projecting unit 1 is stopped by the control board 160. In this way, the amount of emitted light can be managed using the emitted light that is not used for measurement.

  The reflectivity of the mirror 9 has wavelength selectivity. Specifically, the mirror 9 has a high reflectance (preferably 100%) in the wavelength region of the outgoing light L0, and has a reflectance lower than 100% in the wavelength region of the guide light G described later. The outgoing light L0 that has passed through the anamorphic prism pair 13 is reflected by the mirror 9, and then enters the beam splitter 12 while being condensed by passing through the lens 5.

  A part of the emitted light L0 is reflected by the beam splitter 12 and the remaining part of the emitted light L0 is transmitted through the beam splitter 12. The outgoing light L0 reflected by the beam splitter 12 and the outgoing light L0 transmitted through the beam splitter 12 are referred to as measurement light L1 and reference light L2, respectively.

  The lens 6 is an objective lens. The measurement light L1 is collimated by passing through the lens 6. At this time, the spot diameter of the measurement light L1 is relatively large, for example, 4 mm or 10 mm. Thereafter, the measurement light L1 travels in substantially the same direction as the vibration direction of the movable portion 141, and is irradiated to a relatively large circular region of the measurement object S. A part of the measurement light L1 reflected by the measurement object S enters the beam splitter 12 while being condensed by passing through the lens 6.

  The mirror 10 is a so-called reference mirror. The reference light L <b> 2 is collimated by passing through the lens 7 and is applied to the mirror 10. The reference light L2 reflected by the mirror 10 enters the beam splitter 12 while being condensed by passing through the lens 7. The measurement light L1 incident on the beam splitter 12 interferes with the reference light L2, and is guided to the light receiving unit 2 as interference light L3. The operation of the light receiving unit 2 will be described later.

  The position detection unit 14 includes reading units 14a and 14b, a scale 14c, and a magnet 14d. The reading units 14 a and 14 b are attached to the movable unit 141, and the scale 14 c and the magnet 14 d are attached to the support unit 125. The scale 14c has a plurality of scales and is formed of glass extending in one direction. The reading unit 14a is arranged to face a part of the scale 14c. The reading unit 14a includes a light projecting element and a light receiving element, and detects the relative position of the movable unit 141 with respect to the support unit 125 by optically reading the scale of the opposing scale 14c.

  The reading unit 14b is a Hall element and is arranged to detect magnetism by the magnet 14d. In the present embodiment, the origin of the portion of the scale 14c read by the reading unit 14a when the reading unit 14b detects the maximum magnetism. The origin of the scale 14c may be updated as appropriate when the measuring head 100 is activated or at other times. Based on the detection results of the reading units 14a and 14b, the absolute position of the movable unit 141 can be specified.

  In the present embodiment, the reading units 14a and 14b are attached to the movable unit 141, and the scale 14c and the magnet 14d are attached to the support unit 125, but the present invention is not limited to this. The reading units 14 a and 14 b may be attached to the support unit 125, and the scale 14 c and the magnet 14 d may be attached to the movable unit 141.

  In the present embodiment, the reading unit 14a optically detects the position of the movable unit 141, but the present invention is not limited to this. The reading unit 14a may detect the position of the movable unit 141 by, for example, other mechanical, electrical, or magnetic methods. Furthermore, when the reading unit 14a can detect the absolute position of the movable unit 141, or when it is not necessary to detect the absolute position of the movable unit 141, the position detection unit 14 includes the reading unit 14b and the magnet. 14d may not be included.

  The guide light source 15 is a laser light source that emits laser light having a wavelength in the visible region (red region in this example). The laser light emitted from the guide light source 15 is referred to as guide light G. In FIG. 2, the guide light G is illustrated by a one-dot chain line. As described above, since the reflectance of the mirror 9 is lower than 100% in the wavelength region of the guide light G, a part of the guide light G is transmitted through the mirror 9 and the remaining part of the guide light G is the mirror 9. It is reflected by. The guide light G transmitted through the mirror 9 and the guide light G reflected by the mirror 9 will be referred to as first and second guide lights G1, respectively.

  The first guide light G1 is collected by passing through the lens 5 and reflected by the beam splitter 12, thereby being superimposed on the measurement light L1. As a result, the first guide light G1 travels in substantially the same direction as the vibration direction of the movable portion 141, is collimated by passing through the lens 6, and then irradiates the measurement object S.

  The second guide light G2 travels in a direction crossing the first guide light G1 by being reflected by the mirror 11 attached to the support portion 125. When the movable portion 141 is at a predetermined position in the vibration direction (for example, near the origin of the scale 14c), the first guide light G1 and the second guide light G2 intersect at the focal position of the light receiving portion 2. A mirror 11 is arranged.

  Thus, the guide part 16 is comprised by the mirror 9, the mirror 11, the beam splitter 12, and the guide light source 15. FIG. According to this configuration, the user arranges the surface of the measurement object S at a position where the first guide light G1 and the second guide light G2 intersect, so that the surface of the measurement object S is received by the light receiving unit. It can be easily located at the two focal points.

  In the present embodiment, emission of the guide light G by the guide light source 15 is performed during a non-measurement period T2 in FIG. 3 to be described later, and is not performed during the measurement period T1. Therefore, the measurement of the measuring object S is prevented from being affected by the guide light G. On the other hand, when the guide light G does not affect the measurement of the measurement object S, such as when the light receiving unit 2 is configured not to detect light in the wavelength band of the guide light G, the guide light source 15 is used for the measurement period T1. Alternatively, the guide light G may be controlled to be emitted.

  In the present embodiment, the guide unit 16 is arranged so that the first and second guide lights G1 and G2 intersect at the focal point of the light receiving unit 2, but the present invention is not limited to this. The guide unit 16 includes a pattern of the first guide light G1 and the second guide light G2 projected onto the surface of the measurement target S when the surface of the measurement target S is at the focal point of the light receiving unit 2. The pattern may be arranged to have a specific positional relationship.

(3) Operation of Measurement Unit The movable unit 141 is periodically oscillated in parallel with one direction with respect to the support unit 125 in synchronization with the sampling signal by the driving unit 150. The sampling signal may be generated inside the processing apparatus 200 (FIG. 1), or may be given to the movable unit 141 from the outside of the processing apparatus 200. FIG. 3 is a diagram illustrating the vibration of the movable portion 141. The horizontal axis in FIG. 3 indicates time and indicates the position of the movable portion 141.

  As shown in FIG. 3, in the present embodiment, the position of the movable portion 141 changes in a sinusoidal shape. Here, the measurement object S is measured during a part of the period in which the position of the movable portion 141 changes, and the measurement object S is not measured during the other period. A period during which measurement of the measuring object S is performed is referred to as a measurement period T1, and a period during which measurement is not performed is referred to as a non-measurement period T2. In the present embodiment, a period corresponding to a substantially linearly changing portion of the sine curve in FIG. 3 is assigned as the measurement period T1, and a period corresponding to the vicinity of the inflection portion of the sine curve is set as the measurement period T2. Assigned.

  The control board 160 (FIG. 1) controls the light reception timing of the light receiving unit 2 based on the sampling signal. The light receiving unit 2 includes a two-dimensional area sensor in which a plurality of pixels are arranged in the vertical direction and the horizontal direction. In the present embodiment, the area sensor has 300 pixels in the vertical direction and 300 pixels in the horizontal direction, and the total number of pixels is 90000. Thereby, the interference light L3 having a relatively large spot diameter can be received. Based on the control by the control board 160, the light receiving unit 2 detects the received light amount for each position of the movable unit 141 for each pixel during the measurement period T1. On the other hand, the light receiving unit 2 does not detect the amount of received light during the non-measurement period T2.

  4A and 4B are diagrams showing the received light amount distribution to be acquired by the light receiving unit 2 for an arbitrary pixel. 4A and 4B, the horizontal axis indicates the difference between the optical path length of the measurement light L1 and the optical path length of the reference light L2, and the vertical axis indicates the amount of received light detected. Hereinafter, the difference between the optical path length of the measurement light L1 and the optical path length of the reference light L2 is referred to as an optical path length difference. When the position of the movable portion 141 changes, the optical path length of the reference light L2 does not change, but the optical path length of the measurement light L1 changes, so that the optical path length difference changes.

  If the output light L0 has high coherence and the output light L0 has a single peak wavelength λ, the measurement light L1 and the reference light L2 reinforce each other when the optical path length difference is n × λ. When the optical path length difference is (n + 1/2) × λ, they weaken each other. Here, n is an arbitrary integer. For this reason, as shown in FIG. 4A, the amount of received light varies between the maximum value and the minimum value every time the optical path length difference changes by half the peak wavelength.

  On the other hand, when the outgoing light L0 has a plurality of peak wavelengths, the optical path length difference when the measurement light L1 and the reference light L2 strengthen each other and weaken each other differs for each peak wavelength. Therefore, a received light amount distribution obtained by adding the same received light amount distribution as in FIG. 4A, which differs for each peak wavelength, is acquired. Specifically, as shown by a solid line in FIG. 4B, a plurality of peaks appear in the received light amount distribution in the range of a small optical path length difference. The peak received light amount when the optical path length difference is 0 is maximized, and the peak received light amount decreases as the optical path length difference increases. The range of the optical path length difference where the peak appears is wider as the coherence of the emitted light L0 is higher.

  In the present embodiment, the light receiving unit 2 specifies an envelope of the received light amount distribution as shown by a dotted line in FIG. 4B, and the control board 160 uses the data indicating the specified envelope as measurement data. give. The control board 160 specifies the time point when the optical path length difference becomes 0 and the maximum received light amount Im based on the envelope indicated by the acquired measurement data. Here, since the coherence of the emitted light L0 is higher than the coherence of the light emitted by the LED, a peak appears in a wider range of optical path lengths than when the LED is used. Therefore, even when the frequency of detecting the amount of received light is reduced, the time when the optical path length difference becomes 0 and the maximum amount of received light Im can be accurately specified. Thereby, the measurement can be speeded up.

  In addition, the control board 160 specifies the position of the movable unit 141 at the specified time point based on the detection result of the position detection unit 14 (FIG. 2). Furthermore, the control board 160 generates pixel data based on the specified position of the movable part 141 and the acquired maximum received light amount Im. Pixel data generated based on the position of the movable portion 141 is referred to as height data, and pixel data generated based on the maximum received light amount Im is referred to as luminance data.

  Further, the control board 160 generates image data based on the plurality of pixel data. Image data generated based on the height data is referred to as height image data, and image data generated based on the luminance data is referred to as luminance image data. The height image data indicates the shape (height) of each part of the surface of the measuring object S, and the luminance image data indicates the luminance of each part of the surface of the measuring object S. The control board 160 generates distance data indicating the distance from the measurement head 100 to the measurement object S based on the absolute position of the movable unit 141 detected by the position detection unit 14. The control board 160 gives the generated height image data, luminance image data, and distance data to the processing device 200 (FIG. 1).

(4) Damping structure of the reciprocating mechanism Hereinafter, the direction from one end portion to the other end portion of the installation portion 111 provided with the holding portion 112 of FIG. It will be backward. Further, the direction orthogonal to the front-rear direction and the up-down direction is defined as the left-right direction. FIG. 5 is a schematic front view of the measuring head 100 mainly showing the configuration of the reciprocating mechanism 140. As shown in FIG. 5, the measurement head 100 further includes a rotation support unit 180. The rotation support unit 180 includes a rotation shaft 181, fixed arms 182 and 183, and swing arms 184 and 185.

  The rotation shaft 181 has a substantially cylindrical shape, and is provided so as to protrude forward from the support portion 125 in a state of being rotatable around an axis perpendicular to the support portion 125. The fixed arms 182 and 183 are provided so as to protrude from the side surface of the rotating shaft 181 in one direction and the other direction, respectively. The swing arms 184 and 185 are swingably attached to the tips of the fixed arms 182 and 183 so as to extend downward.

  The reciprocating mechanism 140 further includes a balance portion 142 and an elastic member 146 in addition to the movable portion 141. A measuring unit 130 excluding a part of the mirror 11 and the position detecting unit 14 in FIG. 2 is attached to the movable unit 141. The balance part 142 is a counterweight, for example, and has a weight substantially equal to the weight of the movable part 141. The movable portion 141 and the balance portion 142 are attached to the lower ends of the swing arms 184 and 185, respectively.

  The drive unit 150 includes a coil unit 151 and a yoke unit 152. The coil portion 151 is fixed to the movable portion 141 while being wound around the yoke portion 152. On the other hand, the yoke portion 152 is fixed to the balance portion 142. By causing a current to flow through the coil portion 151, a driving force that vibrates the yoke portion 152 in the vertical direction is generated. Further, as a reaction, a driving force that vibrates the coil portion 151 in a direction opposite to the driving force that vibrates the yoke portion 152 is generated.

  As described above, the driving unit 150 is not attached to the housing unit 120 but is attached between the movable unit 141 and the balancing unit 142 so as to be mechanically insulated from the housing unit 120. In this case, the driving force for vibrating the reciprocating mechanism 140 is not transmitted to the casing 120 and the support structure 110. Therefore, no vibration is generated in the support structure 110. Therefore, it is not necessary to increase the size and weight of the support structure 110 in order to increase the rigidity of the support structure 110. Thereby, the measurement head 100 can be reduced in size and weight.

  In the present embodiment, the coil portion 151 is attached to the movable portion 141 and the yoke portion 152 is attached to the balance portion 142, but the present invention is not limited to this. The coil part 151 may be attached to the balance part 142 and the yoke part 152 may be attached to the movable part 141.

  When the movable portion 141 vibrates upward as indicated by an arrow a1, the balancing portion 142 vibrates downward as indicated by an arrow b1. Further, the driving force of the driving unit 150 is transmitted to the rotating shaft 181 via the fixed arms 182 and 183 and the swinging arms 184 and 185, whereby the rotating shaft 181 rotates clockwise as indicated by an arrow c1.

  Similarly, when the movable portion 141 vibrates downward as indicated by an arrow a2, the balancing portion 142 vibrates upward as indicated by an arrow b2. Further, the driving force of the driving unit 150 is transmitted to the rotating shaft 181 via the fixed arms 182 and 183 and the swinging arms 184 and 185, whereby the rotating shaft 181 rotates counterclockwise as indicated by an arrow c2. .

  By repeating this operation alternately, the movable portion 141 and the balance portion 142 vibrate in the vertical direction. The vibration directions of the movable portion 141 and the balance portion 142 are opposite to each other, and the vibration displacements are equal to each other. Vibrations other than the vertical direction of the movable part 141 and the balance part 142 are regulated by a sliding part 144 shown in FIG. Therefore, the movable part 141 and the balance part 142 can be vibrated stably. Details will be described later.

  According to this configuration, even when the movable part 141 is vibrated, the position of the center of gravity of the measuring head 100 hardly changes. Therefore, even when the movable part 141 is vibrated at high speed and when the movable part 141 is vibrated greatly, the measurement head 100 does not vibrate. Thereby, the movable part 141 can be vibrated at high speed and greatly. Thereby, while being able to measure the measuring object S at high speed, the measuring range in the height direction of the measuring object S can be enlarged.

  In the present embodiment, the measurement head 100 can be selectively operated in a low speed mode in which the movable portion 141 is vibrated at a low speed and a high speed mode in which the movable portion 141 is vibrated at a high speed. The measurement range in the low speed mode is, for example, ± 0.7 mm. The measurement range in the high speed mode is, for example, ± 0.35 mm. Therefore, the user can measure the measuring object S that is large in the height direction by selecting the low speed mode. On the other hand, the user can measure the measuring object S that is small in the height direction at high speed by selecting the high speed mode.

  In the present embodiment, the movable portion 141 and the balance portion 142 are connected by the elastic member 146. The elastic member 146 is a spring member having a spring constant k, for example. In other words, in the reciprocating mechanism 140, the movable portion 141 having the mass m and the balance portion 142 having the mass m are attached to both ends of the elastic member 146 having the spring constant k. The movable portion 141 and the balance portion 142 each vibrate so that the center of the elastic member 146 becomes a fixed point.

  Here, the mass m of the movable portion 141 is equal to the mass m of the balance portion 142. Therefore, the natural frequency of the vibration system constituted by the part from the movable part 141 to the fixed point of the elastic member 146 and the natural frequency of the vibration system constituted by the part from the balanced part 142 to the fixed point of the elastic member 146 The frequency matches. In this case, since the entire reciprocating mechanism 140 has a single natural frequency, the reciprocating mechanism 140 can be easily single-vibrated. Thereby, the energy given to the drive unit 150 to vibrate the reciprocating mechanism 140 (current flowing through the coil unit 151) can be reduced.

  The spring constant of the elastic member 146 is preferably set so that the natural frequency of the reciprocating mechanism 140 is within a certain range from the vibration frequency of the reciprocating mechanism 140. In the present embodiment, for example, if the natural frequency of the reciprocating mechanism 140 is 1, the vibration frequency of the reciprocating mechanism 140 in the low speed mode is 2/3, for example, and the vibration frequency of the reciprocating mechanism 140 in the high speed mode is, for example, 4 The spring constant is set to be / 3.

  Thus, the spring constant of the elastic member 146 is set such that the natural frequency of the reciprocating mechanism 140 is larger than the vibration frequency of the reciprocating mechanism 140 in the low speed mode and smaller than the vibration frequency of the reciprocating mechanism 140 in the high speed mode. The Thereby, the energy efficiency of the reciprocating mechanism 140 in the low speed mode and the energy efficiency of the reciprocating mechanism 140 in the high speed mode can be improved to the same extent.

  In addition, when the natural frequency of the reciprocating mechanism 140 is matched with the vibration frequency of the reciprocating mechanism 140, the reciprocating mechanism 140 may exhibit an unstable behavior depending on the damping characteristics of the reciprocating mechanism 140. In the present embodiment, the natural frequency of the reciprocating mechanism 140 is set to a value slightly separated from the vibration frequency of the reciprocating mechanism 140. Thereby, the energy efficiency of the reciprocating mechanism 140 can be improved, and the behavior of the reciprocating mechanism 140 can be stabilized.

  According to said structure, the energy given to the drive part 150 in order to vibrate the reciprocation mechanism 140 can be minimized. Thus, since the energy for vibrating the movable part 141 is extremely small, in the present embodiment, when the measuring head 100 is in operation, the reciprocating mechanism 140 is not related to the measurement period T1 and the non-measurement period T2 in FIG. Always vibrated.

  Furthermore, in the present embodiment, the swing arms 184 and 185 can swing, so the direction of the swing arms 184 and 185 does not change even if the swing arms 184 and 185 swing vertically. Therefore, even if the movable part 141 vibrates in the vertical direction, the orientation of the measuring part 130 attached to the movable part 141 is maintained constant. Thereby, it can prevent that the direction of the measurement light L1 irradiated to the measuring object S from the measurement part 130 changes.

  In the present embodiment, the balancer 142 is a counterweight, but the present invention is not limited to this. The balancing unit 142 is a movable unit having the same configuration as the movable unit 141, and a measurement unit similar to the measurement unit 130 may be attached to the movable unit. In this case, two regions can be measured simultaneously without increasing the weight of the measuring head 100.

(5) Long-life structure of the reciprocating mechanism FIG. 6 is a schematic side view of the measuring head 100 mainly showing the configuration of the reciprocating mechanism 140. FIG. 7 is a cross-sectional view of the measurement head 100 of FIG. As shown in FIG. 6, the reciprocating mechanism 140 further includes a plate portion 143, three sliding portions 144, and a driving portion 145 in addition to the movable portion 141, the balancing portion 142, and the elastic member 146. Each sliding portion 144 is a linear motion bearing and includes a fixed rail 144a, a movable table 144b, and a plurality of rolling members 144c.

  The plurality of rolling members 144c are arranged at substantially equal intervals between the fixed rail 144a and the movable table 144b, and are held by a holder (retainer) (not shown). A lubricant such as viscous grease is applied to the plurality of rolling members 144c. As the plurality of rolling members 144c rotate around the rotation axis, the movable table 144b smoothly slides parallel to the fixed rail 144a in one direction. Hereinafter, when the three sliding portions 144 are distinguished, the three sliding portions 144 are referred to as sliding portions 144A, 144B, and 144C, respectively.

  The plate part 143 is attached to the support part 125 of the housing part 120 via the sliding part 144C so as to be slidable in the vertical direction. 6 and 7, the fixed rail 144a of the sliding portion 144C is attached to the support portion 125, and the movable table 144b of the sliding portion 144C is attached to one surface of the plate portion 143.

  The movable portion 141 and the balance portion 142 are attached to the other surface of the plate portion 143 through the sliding portions 144A and 144B so as to be slidable in the vertical direction. 6 and 7, the fixed rail 144a of the sliding portion 144A is attached to the other surface of the plate portion 143, and the movable table 144b of the sliding portion 144A is attached to the movable portion 141. Further, the fixed rail 144a of the sliding part 144B is attached to the other surface of the plate part 143, and the movable table 144b of the sliding part 144B is attached to the balance part 142. Thereby, vibrations other than the vertical direction of the movable part 141 and the balance part 142 are restricted.

  In this example, the fixed rail 144a and the movable table 144b of the sliding portion 144C are attached to the support portion 125 and the plate portion 143, respectively, but the present invention is not limited to this. The fixed rail 144a and the movable table 144b of the sliding portion 144C may be attached to the plate portion 143 and the support portion 125, respectively. That is, the positional relationship between the fixed rail 144a of the sliding portion 144C and the movable table 144b may be reversed. The same applies to the sliding portions 144A and 144B.

  As described above, the lubricant is applied to the plurality of rolling members 144c of each sliding portion 144. However, the movable range (for example, ± 0.7 mm) of the movable portion 141 and the balanced portion 142 is smaller than the circumferential length (for example, several mm) around the rotation axis of each rolling member 144c. Therefore, only a part of the area around the rotation axis of each rolling member 144c is in contact with the fixed rail 144a or the movable table 144b, and the other area around the rotation axis of each rolling member 144c is in contact with the fixed rail 144a and the movable table 144b. do not do. In this case, the circulation of the lubricant does not occur around each rolling member 144c, and the lubricant in a partial region of each rolling member 144c is depleted.

  Therefore, in the present embodiment, the drive unit 145 is attached to the support unit 125 of the housing unit 120 so that the plate unit 143 can vibrate. Note that the vibration period of the plate portion 143 is larger than the vibration period of the reciprocating mechanism 140. The drive unit 145 is an actuator, and vibrates the plate unit 143 in a range larger than the circumferential length around the rotation axis of each rolling member 144c. Accordingly, the plurality of rolling members 144c of each sliding portion 144 rotate one or more times around the rotation axis.

  According to this structure, since all the area | regions around the rotating shaft of each rolling member 144c contact with the fixed rail 144a or the movable table 144b, a lubricant is circulated around each rolling member 144c. Thereby, the friction between each rolling member 144c and the fixed rail 144a or the movable table 144b is reduced, and baking is prevented. As a result, even when the reciprocating mechanism 140 is constantly vibrated during operation of the measuring head 100 as in the present embodiment, the life of the reciprocating mechanism 140 can be extended.

  In the present embodiment, the drive unit 145 is controlled so as to be driven during the non-measurement period T2 of FIG. 3 and not during the measurement period T1. This reliably prevents the measurement of the measuring object S from being affected by the vibration of the plate portion 143. On the other hand, even if the plate portion 143 vibrates, the vibration is absorbed by the sliding portions 144A and 144B, and therefore is hardly transmitted to the movable portion 141 and the balance portion 142, and is hardly used for measuring the measuring object S. It does not affect. Therefore, the drive unit 145 may be controlled to be driven also during the measurement period T1.

  Moreover, in this Embodiment, although the plate part 143 is formed flat generally, this invention is not limited to this. FIG. 8 is a cross-sectional view showing a configuration of the plate portion 143 in the modified example. As shown in FIG. 8, in the present embodiment, the plate portion 143 has flat portions 143a, 143b, 143c and protrusions 143d, 143e. The flat portions 143a and 143b are arranged so as to be aligned in the left-right direction. The protrusions 143d and 143e are provided so as to protrude forward from the inner ends of the flat portions 143a and 143b, respectively. The flat part 143c is provided so as to connect the front ends of the protrusions 143d and 143e.

  The sliding portion 144C is disposed in a region surrounded by the flat portion 143c and the protruding portions 143d and 143e, and is attached to one surface of the flat portion 143c. The sliding portions 144A and 144B are disposed in front of the flat portions 143a and 143b, respectively, and are attached to the other surfaces of the flat portions 143a and 143b, respectively. According to this configuration, since the flat portions 143a and 143b do not protrude forward, the forward protrusion amount of the sliding portions 144A and 144B can be reduced. Thereby, it can prevent that the reciprocating mechanism 140 enlarges in the front-back direction.

  In the example of FIG. 8, the protruding portions 143d and 143e protrude vertically forward from the flat portions 143a and 143b, but the present invention is not limited to this. The protrusions 143d and 143e may protrude forward while being inclined or curved from the flat portions 143a and 143b.

  That is, the distance between one surface of the flat portion 143c and the support portion 125 may be larger than the distance between one surface of the flat portion 143a and the support portion 125 and the distance between one surface of the flat portion 143b and the support portion 125. Further, the distance between the other surface of the flat portion 143a and the movable portion 141 is larger than the distance between the other surface of the flat portion 143c and the movable portion 141, and the distance between the other surface of the flat portion 143b and the balance portion 142 is flat portion 143c. What is necessary is just to be larger than the space | interval of the other surface and the balance part 142. FIG.

  In the present embodiment, the reciprocating mechanism 140 includes a plate portion 143 and sliding portions 144A to 144C, but the present invention is not limited to this. When the sliding portions 144A and 144B have a sufficiently long life, the reciprocating mechanism 140 may not include the plate portion 143 and the sliding portion 144C. In this case, the fixed rail 144a of the sliding portions 144A and 144B is attached to the support portion 125. Further, when the movable portion 141 and the balance portion 142 are configured to vibrate only in one direction, the reciprocating mechanism 140 may not include the sliding portions 144A and 144B.

(6) Thermal Separation Structure of Housing Unit FIG. 9 is a schematic diagram showing an internal configuration of the housing unit 120. As illustrated in FIG. 9, the housing unit 120 includes a measurement housing 121, a control housing 122, a connection unit 123, and a covering unit 124. The measurement housing 121 has a large volume and accommodates the measurement unit 130, the reciprocating mechanism 140, the drive unit 150, the communication unit 170, and the rotation support unit 180. In addition, the measurement housing | casing 121 also accommodates the support part 125 of FIG. A portion of the connection terminal 171 in the communication unit 170 is exposed from the measurement housing 121 to the outside.

  The control housing 122 accommodates the control board 160. In the present embodiment, the amount of heat generated by the control board 160 is large. Therefore, heat radiating fins 122 a (heat sinks) are formed on the outer surface of the control housing 122. Thereby, the heat generated from the control board 160 can be efficiently dissipated and the control board 160 can be air-cooled. The connection part 123 is formed of a material having low thermal conductivity, and connects the measurement housing 121 and the control housing 122 in a state of being separated from each other. In this example, the connection part 123 is formed of polycarbonate resin (thermal conductivity 0.19 W / mK).

  According to this configuration, almost no heat is transferred from the control housing 122 to the measurement housing 121. For this reason, it is possible to prevent the measurement accuracy of the measuring object S from being lowered. In addition, the temperature around the measurement unit 130 can be easily maintained within the range of the specified temperature. Thereby, deterioration of the measurement part 130 can be prevented and the lifetime of the measurement part 130 can be extended.

  Furthermore, since the measurement unit 130 and the control board 160 are provided spatially separated and heat transfer is prevented, there is no need to accommodate the measurement unit 130 in the large casing 120. Therefore, the housing part 120 can be reduced in size. In addition, since the temperature of the measurement unit 130 is stabilized in a short time after the measurement head 100 is turned on, the rise time of the measurement head 100 can be shortened.

  The covering portion 124 is attached to the outer surface of the measurement housing 121 so as to cover the control housing 122. A plurality of vent holes 124 a are formed in the covering portion 124. The diameter of each vent 124a is set to a value that allows heat exchange by airflow between the inside and the outside of the covering portion 124 and does not allow the finger of the user's body to pass through. Thereby, it can prevent that a user contacts the control housing | casing 122 which heat | fever-generated, cooling the control housing | casing 122 by air.

  The housing unit 120 is supported by the support structure 110 (FIG. 1) or a fixture described later in a state where the measurement housing 121 is in contact with the holding unit 112 (FIG. 1). Since the control housing 122 does not contact the support structure 110 and the fixture, heat generated from the control housing 122 is not transferred to the support structure 110 and the fixture. Thereby, it is prevented that the temperature of the whole measuring head 100 rises. As a result, the measurement head 100 can be prevented from being deteriorated and the life of the measurement head 100 can be extended.

(7) Mounting structure of housing portion In the present embodiment, the housing portion 120 is attached to the support structure 110 so that the measurement unit 130 emits the measurement light L1 (FIG. 2) downward. It is not limited to this. The housing part 120 may be detached from the support structure 110 and attached to any attachment device in a desired orientation. The housing | casing part 120 has an attachment structure for attaching to an attachment tool.

  FIG. 10 is a schematic right side view of the casing 120 showing the mounting structure. FIG. 11 is a schematic rear view of the casing 120 showing the mounting structure. 10 and 11, the X direction, the Y direction, and the Z direction that are orthogonal to each other are defined and indicated by arrows X, Y, and Z, respectively. The Z direction is a direction in which the measurement light L1 is emitted from the casing 120, and corresponds to the vertical direction in FIGS. The X direction corresponds to the front-rear direction in FIG. 6, and the Y direction corresponds to the left-right direction in FIG.

  As shown in FIGS. 10 and 11, the housing unit 120 has an X reference plane 126, a Y reference plane 127, and a Z reference plane 128. The X reference surface 126 is a surface of the measurement housing 121 orthogonal to the X direction, for example, the back surface. The Y reference surface 127 is a surface of the measurement housing 121 orthogonal to the Y direction, and is, for example, the left side surface. The Z reference surface 128 is a surface of the measurement housing 121 orthogonal to the Z direction, for example, the lower surface. The X reference plane 126 and the Y reference plane 127 are parallel to the optical path of the measurement light L1, and the Z reference plane 128 is perpendicular to the optical path of the measurement light L1.

  A plurality (four in this example) of mounting holes 126a and locking holes 126b are formed in the X reference surface 126. In this example, the locking hole 126b is a bottomed hole, but may be a through hole. Further, depending on the structure of the attachment device, each attachment hole 126a may be a bottomed hole or a through hole. Each mounting hole 126a may be a screw hole or a through hole that is not a screw hole. In this example, each attachment hole 126a is a bottomed hole and a screw hole.

  A plurality (three in this example) of mounting holes 127a and locking holes 127b are formed in the Y reference surface 127. In this example, the locking hole 127b is a bottomed hole, but may be a through hole. Further, depending on the structure of the mounting device, each mounting hole 127a may be a bottomed hole or a through hole. Further, each mounting hole 127a may be a screw hole or a through hole. In this example, each attachment hole 127a is a through hole and a through hole.

  FIGS. 12A and 12B are diagrams for explaining a procedure for attaching the X reference plane 126 of the housing 120 to the attachment device. As shown in FIG. 12A, the attachment device 20 has an attachment surface 21. The X reference plane 126 in FIG. 12B is brought into contact with the mounting surface 21 so that the housing unit 120 faces a desired direction. In this state, the two pins 22 and 23 are attached to the attachment surface 21 so as to be in contact with the Y reference surface 127, whereby the emission direction of the measurement light L1 (hereinafter referred to as the measurement direction) is determined. Further, the pin 24 is attached to the attachment surface 21 so as to be in contact with the Z reference surface 128, whereby the distance from the Z reference surface 128 to the measurement object S (hereinafter referred to as a measurement distance) is determined.

  After the measurement direction and the measurement distance are determined, a plurality of through holes 25 corresponding to the plurality of attachment holes 126a and penetrating to the back surface are formed in the attachment surface 21. Further, a substantially cylindrical protrusion 26 corresponding to the locking hole 126 b is formed on the mounting surface 21. The protruding amount of the protruding portion 26 is slightly smaller than the depth of the locking hole 126b, and the diameter of the protruding portion 26 is slightly smaller than the diameter of the locking hole 126b.

  A plurality of fixing members 27 respectively corresponding to the plurality of through holes 25 are prepared. Each fixing member 27 is, for example, a screw member. The nominal length of each fixing member 27 is larger than the depth of the corresponding through hole 25 and smaller than the sum of the depth of the through hole 25 and the depth of the mounting hole 126a. With the protrusions 26 inserted into the locking holes 126b, the fixing members 27 are screwed into the mounting holes 126a through the corresponding through holes 25. As a result, the X reference surface 126 of the housing 120 is attached to the attachment device 20.

  FIGS. 13A and 13B are views for explaining a procedure for attaching the Y reference surface 127 of the housing 120 to the attachment device. As shown in FIG. 13A, the attachment device 30 has an attachment surface 31. The Y reference surface 127 of FIG. 13B is brought into contact with the mounting surface 31 so that the housing unit 120 faces a desired direction. In this state, the two pins 32 and 33 are attached to the attachment surface 31 so as to come into contact with the X reference surface 126, whereby the measurement direction is determined. Further, the measurement distance is determined by attaching the pin 34 to the attachment surface 31 so as to contact the Z reference surface 128.

  After the measurement direction and the measurement distance are determined, a plurality of screw holes 35 respectively corresponding to the plurality of attachment holes 127 a are formed in the attachment surface 31. In the example of FIG. 13B, the screw hole 35 is a bottomed hole, but may be a through hole. Further, a substantially cylindrical protrusion 36 corresponding to the locking hole 127 b is formed on the mounting surface 31. The protruding amount of the protruding portion 36 is slightly smaller than the depth of the locking hole 127b, and the diameter of the protruding portion 36 is slightly smaller than the diameter of the locking hole 127b.

  A plurality of fixing members 37 respectively corresponding to the plurality of screw holes 35 are prepared. Each fixing member 37 is, for example, a screw member. The nominal length of each fixing member 37 is larger than the depth of the corresponding mounting hole 127a, and smaller than the total of the depth of the screw hole 35 and the depth of the mounting hole 127a. With the protrusion 36 inserted into the locking hole 127b, each fixing member 37 is screwed into the screw hole 35 through the corresponding mounting hole 127a. As a result, the Y reference surface 127 of the housing 120 is attached to the attachment device 30.

  As described above, the shape measuring apparatus 300 can be easily installed in a desired direction by adjusting the posture of the casing unit 120 so that the X reference surface 126 or the Y reference surface 127 is parallel to the desired direction. it can. In addition, by positioning the housing unit 120 so that the distance between the Z reference surface 128 and the measurement object S becomes a desired value, the shape measuring apparatus 300 is maintained while maintaining the distance from the measurement object S easily. Can be installed.

  According to this configuration, the measurement direction and the measurement distance of the measurement head 100 are not spatially limited by the attachment devices 20 and 30. Therefore, the measurement head 100 can be installed in a production line such as a factory as a product inspection device while easily maintaining the optimum measurement direction and measurement distance according to the shape of the measurement object S. In the production line, it is possible to inspect a plurality of measurement objects S that are automatically and sequentially conveyed by a conveying device such as a belt conveyor, without being spatially limited by the fixtures 20 and 30.

  Further, when the X reference surface 126 of the housing 120 is attached to the attachment device 20, the protrusion 26 engages with the locking hole 126 b. Alternatively, when the Y reference surface 127 of the housing 120 is attached to the attachment tool 30, the protrusion 36 engages with the locking hole 127 b. Thereby, the operator does not need to support the entire weight (for example, 3 kg) of the casing 120 when the casing 120 is attached or detached. Thereby, an operator's burden can be reduced and work efficiency can be improved. In addition, the casing 120 can be prevented from being dropped and damaged due to carelessness of the operator.

  A plurality of locking holes 126b, 127b may be provided. In this case, by forming a plurality of protrusions 26 and 36 on the mounting devices 20 and 30 corresponding to the locking holes 126b and 127b, the housing 120 can be reliably locked to the mounting devices 20 and 30. . Further, even when the operator does not support the casing 120, the casing 120 is prevented from rotating on the attachment surfaces 21 and 31 of the attachment devices 20 and 30. Thereby, an operator's burden can reduce more and work efficiency can be improved more.

  Further, the locking holes 126b and 127b may have an L-shaped cross section. In this case, the L-shaped projections 26 and 36 having an L shape can be inserted into the locking holes 126b and 127b, respectively. Thereby, the housing | casing part 120 can be latched to the fixtures 20 and 30 reliably.

(8) Effect In the shape measuring apparatus 300 according to the present embodiment, the measurement unit 130, the reciprocating mechanism 140, the drive unit 150, the control board 160, the communication unit 170, and the rotation support unit 180 are accommodated in the casing unit 120. . Measuring unit 130 excluding a part of mirror 11 and position detecting unit 14 is attached to movable unit 141. The measurement light L1 emitted from the light projecting unit 1 is guided to the measurement object S, and the reference light L2 is guided to the mirror 10. Interference light L3 between the measurement light L1 reflected by the measurement object S and the reference light L2 reflected by the mirror 10 is guided to the light receiving unit 2.

  When the movable portion 141 is reciprocated by the driving portion 150, the optical path length difference between the measurement light L1 and the reference light L2 changes. From each of the plurality of pixels of the light receiving unit 2, an interference pattern of the received light amount that changes due to the optical path length difference is acquired. Here, since the measurement light L1 and the reference light L2 have a plurality of peak wavelengths, the interference pattern of the amount of received light does not show spatial periodicity. Therefore, based on the relative position of the movable part 141 with respect to the housing part 120 detected by the position detection part 14 and the amount of light received by each pixel of the light receiving part 2, the surface shape of the corresponding part of the measuring object S is highly accurate. Can be uniquely identified.

  In addition, since the plurality of pixels are two-dimensionally arranged in the light receiving unit 2, the light receiving unit 2 simultaneously receives the interference light L3 including the measurement light L1 reflected by the plurality of portions of the measurement object S. Can do. Therefore, the surface shape of the plurality of portions of the measuring object S can be acquired at high speed.

  Furthermore, attachment holes 126 a and 127 a are formed in the X reference surface 126 and the Y reference surface 127 of the housing unit 120, respectively. The user can attach the housing part 120 to the arbitrary attachment devices 20 and 30 by inserting the fixing members 27 and 37 into the attachment holes 126a and 127a.

  According to this configuration, by using the appropriate fixtures 20 and 30 according to the measurement object S and the measurement situation, the housing can be mounted in a desired measurement direction without being spatially limited by the fixtures 20 and 30. The part 120 can be attached to the fixtures 20,30. Moreover, the housing | casing part 120 can be attached to the fixtures 20 and 30 by desired measurement distance, without receiving the spatial restriction | limiting by the fixtures 20 and 30. FIG. As a result, the shape measuring apparatus 300 can be installed in a desired orientation and with the distance from the measuring object S easily adjusted.

  In the present embodiment, the light receiving unit 2 identifies the envelope of the interference pattern of the received light amount for each of the plurality of pixels. The control board 160 specifies the peak position of the specified envelope. According to this configuration, the peak position of the interference pattern envelope can be specified even when the interval of the optical path length difference from which the interference pattern is to be acquired is not sufficiently close and rough. Thereby, the surface shape of the measuring object S can be measured at high speed. Moreover, since it is not necessary for the control board 160 to specify the envelope of the interference pattern, it is possible to reduce the burden on the control board 160 and prevent the operation speed of the control board 160 from being lowered.

  In the present embodiment, the control board 160 performs various arithmetic processes and controls, but the present invention is not limited to this. Part or all of the arithmetic processing and control of the control board 160 may be performed by the control unit 210 of the processing apparatus 200. Here, when the heat generation of the control board 160 is small, the control housing 122, the connection part 123, and the covering part 124 are not provided in the housing part 120, and the control board 160 may be accommodated in the measurement housing 121. .

(9) Other Embodiments In the above embodiment, the measurement unit 130 is configured such that the optical path length of the measurement light L1 changes and the optical path length of the reference light L2 does not change, but the present invention is limited to this. Not. The measurement unit 130 may be configured such that the optical path length of the reference light L2 changes and the optical path length of the measurement light L1 does not change. In this case, the mirror 10 is configured to vibrate relative to the beam splitter 12 along the traveling direction of the reference light L2.

(10) Correspondence between each component of claim and each part of embodiment The following describes an example of a correspondence between each component of the claim and each part of the embodiment. It is not limited.

  In the above embodiment, the measuring object S is an example of the measuring object, the shape measuring device 300 is an example of the shape measuring device, the light projecting unit 1 is an example of the light projecting unit, and the mirror 10 is referred to. The light receiving unit 2 is an example of a light receiving unit. The measurement light L1 is an example of measurement light, the reference light L2 is an example of reference light, the interference light L3 is an example of interference light, the beam splitter 12 is an example of an optical system, and the movable part 141 is a movable part. It is an example.

  The X reference plane 126 or the Y reference plane 127 is an example of an attachment outer surface, the casing unit 120 is an example of a casing unit, the position detection unit 14 is an example of a position detection unit, and the control board 160 is a shape acquisition unit. The fixing members 27 and 37 are examples of fixing members. The mounting holes 126a and 127a are examples of mounting holes, the Z reference surface 128 is an example of an emission surface, the protrusions 26 and 36 are examples of locking members, and the locking holes 126b and 127b are locking holes. It is an example and the measurement housing | casing 121 and the control housing | casing 122 are examples of the 1st and 2nd housing | casing, respectively.

  The connection part 123 is an example of a connection part, the radiation fin 122a is an example of a radiation fin, the covering part 124 is an example of a covering part, the vent hole 124a is an example of a vent hole, and the processing apparatus 200 is a processing apparatus. The operation unit 230 is an example of the operation unit. The control unit 210 is an example of a calculation unit, the guide lights G1 and G2 are examples of first and second guide lights, respectively, the guide unit 16 is an example of a guide unit, the measurement period T1 and the non-measurement period T2 Are examples of the first and second periods, respectively.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used for various shape measuring apparatuses.

DESCRIPTION OF SYMBOLS 1 Light projection part 2,3 Light-receiving part 4-8 Lens 9-11 Mirror 12 Beam splitter 13 Anamorphic prism pair 14 Position detection part 14a, 14b Reading part 14c Scale 14d Magnet 15 Guide light source 16 Guide part 20, 30 Mounting tool 21 and 31 Mounting surface 22 to 24 and 32 to 34 Pin 25 Through hole 26 and 36 Protrusion part 27 and 37 Fixing member 35 Screw hole 100 Measuring head 110 Support structure 111 Installation part 112 Holding part 120 Case part 121 Measurement case 122 Control housing 122a Radiating fin 123 Connection portion 124 Cover portion 124a Vent hole 125 Support portion 126 X reference surface 126a, 127a Mounting hole 126b, 127b Locking hole 127 Y reference surface 128 Z reference surface 130 Measuring portion 140 Reciprocating mechanism 141 Movable portion 142 Balance section 143 143a to 143c Flat part 143d, 143e Protruding part 144, 144A to 144C Sliding part 144a Fixed rail 144b Movable table 144c Rolling member 145 Driving part 146 Elastic member 150 Driving part 151 Coil part 152 Yoke part 160 Control board 170 250 Communication unit 171 Connection terminal 180 Rotation support unit 181 Rotating shaft 182, 183 Fixed arm 184, 185 Swing arm 200 Processing device 210 Control unit 220 Storage unit 230 Operation unit 240 Display unit 300 Shape measuring device G, G1, G2 Guide light Im Maximum received light amount L0 Emission light L1 Measurement light L2 Reference light L3 Interference light S Measurement object T1 Measurement period T2 Non-measurement period

Claims (15)

A shape measuring device for measuring the surface shape of a measurement object,
A light projecting unit that emits light having a plurality of peak wavelengths;
A reference body,
A light receiving unit including a plurality of pixels arranged two-dimensionally;
The light emitted from the light projecting unit is guided to the measurement object as measurement light, and the light emitted from the light projecting unit is guided to the reference body as reference light, and reflected by the measurement object. And an optical system that generates interference light with the reference light reflected by the reference body and guides the generated interference light to the light receiving unit,
At least one of the optical system and the reference body is attached, and a movable part that changes a difference between an optical path length of the measurement light and an optical path length of the reference light by reciprocating,
A housing portion having an outer surface for mounting and supporting the movable portion in a reciprocating manner;
A position detection unit that detects a relative position of the movable unit with respect to the housing unit;
A shape acquisition unit that acquires surface shapes of a plurality of portions of the measurement object based on a relative position detected by the position detection unit and a light reception amount of the plurality of pixels of the light reception unit;
The housing unit houses the light projecting unit, the reference body, the light receiving unit, the optical system, the movable unit, and the position detecting unit,
A shape measuring device in which a mounting hole into which a fixing member can be inserted is formed on the mounting outer surface of the casing. The shape measuring device according to claim 1, wherein the light projecting unit emits light having coherence higher than white light and lower than laser light. The shape measuring apparatus according to claim 1, wherein the mounting outer surface of the housing portion is formed in parallel with an optical path of the measurement light. The housing portion has an emission surface for emitting the measurement light to the measurement object,
The shape measurement apparatus according to claim 1, wherein the emission surface is formed perpendicular to an optical path of the measurement light. The shape measuring device according to any one of claims 1 to 4, wherein a locking hole into which a locking member can be fitted is formed in the mounting outer surface of the housing portion. The housing portion is
A first housing that houses the light projecting unit, the reference body, the light receiving unit, the optical system, the movable unit, and the position detecting unit;
A second housing that houses the shape acquisition unit;
The shape measuring device according to any one of claims 1 to 5, further comprising a connection portion that connects the first housing and the second housing in a separated state. The shape measuring apparatus according to claim 6, wherein heat radiation fins are formed on an outer surface of the second casing. The shape measuring device according to claim 6 or 7, wherein the connecting portion is formed of a material having a thermal conductivity equal to or lower than a predetermined thermal conductivity. The shape measuring device according to any one of claims 6 to 8, wherein the housing portion further includes a covering portion attached to an outer surface of the first housing so as to cover the second housing. The shape measuring apparatus according to claim 9, wherein a vent hole for air-cooling the second casing is formed in the covering portion. The apparatus further includes a processing device provided separately from the housing unit,
The shape acquisition unit provides the processing apparatus with data indicating the acquired surface shape of the measurement object and an image of the measurement object,
The processor is
An operation unit operated by a user to designate an arbitrary part on an image of the measurement object;
The shape measuring apparatus according to claim 1, further comprising: a calculation unit that measures a portion specified by the operation unit based on the acquired data. The shape measuring apparatus according to claim 11, wherein the calculation unit corrects the data so that a slope of a portion specified by the operation unit becomes a desired slope. A guide portion for emitting first and second guide light;
The guide unit includes a pattern of the first guide light and the second guide light projected onto the surface of the measurement target when the surface of the measurement target is at the focal position of the light receiving unit. The shape measuring apparatus according to claim 1, wherein the shape measuring apparatus is arranged so as to have a specific positional relationship with the pattern. Each cycle of the reciprocating movement of the movable part includes a first period in which the plurality of pixels of the light receiving part receive the interference light, and a second period in which the plurality of pixels of the light receiving part do not receive the interference light. Including period,
The said guide part emits the said 1st and 2nd guide light in the said 1st period, and stops the emission of the said 1st and 2nd guide light in the said 2nd period. Shape measuring device. The light receiving unit specifies an envelope of an interference pattern of a received light amount that varies depending on a difference between an optical path length of the measurement light and an optical path length of the reference light for each of the plurality of pixels.
The shape acquisition unit specifies a peak position of an envelope specified by the light receiving unit, and acquires surface shapes of a plurality of portions of the measurement object based on the specified peak position. The shape measuring device according to any one of the above.

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