JP2014219328A - Device and method for measuring displacement - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure displacement in three dimensional directions and rotational direction of an object to be measured in a non-contact manner.SOLUTION: A method for measuring displacement comprises: mounting a biaxial reflective plate 13 and reflective plates 14 and 15 on an object 10 to be measured; dividing incident light by a light source 11 into lights in two axes directions by the biaxial reflective plate 13; reflecting the respective lights by the reflective plates 14 and 15; receiving a plurality of lights reflected through return reflective plates 16 and 17 with a camera 18; and calculating the displacement of the object 10 to be measured from the displacements of the plurality of received reflected lights. Thereby, the displacements of the object 10 to be measured in three dimensional directions including two axes divided by the biaxial reflective plate 13 and the displacement of rotation using an axis perpendicular to the two axes as the center of rotation can be detected in a non-contact manner with the camera 18.

Description

  The present invention relates to a displacement measuring apparatus and a displacement measuring method for measuring the displacement of the measurement object in a non-contact manner.

  Conventionally, a non-contact type displacement meter measuring apparatus that measures displacement or vibration without contacting an object has been proposed. For example, by applying irradiation light parallel to the object, capturing the reflected light with an imaging element such as a camera, and detecting the movement of the reflected light in conjunction with the movement of the object with the imaging element, the displacement of the object or A method for measuring vibration has been proposed (see, for example, Patent Document 1). Here, FIG. 11 shows a configuration for measuring displacement of an object in a non-contact manner in Patent Document 1. In FIG. 11, laser light is emitted from a laser light source 102 under the control of the laser driver 101. The laser light source 102 is provided with an irradiation light side filter that limits the wavelength of light. 103 is a collimator lens A that squeezes the irradiated light, WK is an object to be measured, 104 is a collimator lens B that squeezes the reflected light, and 105 is an image sensor that images the reflected light. When the measurement object WK moves as indicated by a broken line (it is assumed to move in the Z direction), the light receiving position on the image sensor 105 changes before and after the movement. By calculating the fluctuation amount of the light receiving position on the reading circuit 106 side, the displacement of the measuring object WK in the Z direction is detected.

  As another configuration example of the non-contact type displacement measuring device, the surface roughness of the measurement object is displaced by receiving the laser light reflected by the mirror mounted on the measurement object multiple times by the imaging device. (For example, see Patent Document 2).

JP 2008-96123 A Japanese Patent Laid-Open No. 06-102030

  However, in the configuration of the displacement measuring apparatus shown in FIG. 11, when the measurement object WK is displaced up and down (perpendicular to the optical axis) in the figure, the image sensor 105 cannot detect the displacement. In the other conventional configuration, the displacement can be detected by the imaging device even when the measurement object is displaced in the direction perpendicular to the optical axis of the measurement light. When an object is displaced in the optical axis direction, the displacement cannot be detected. In other words, conventional non-contact type displacement measuring devices can only measure displacement in the plane of the measurement object or only in the vertical direction, and detect displacement due to movement or rotation in the three-dimensional direction. I couldn't.

  In order to solve the above-described problems, an object of the present invention is to measure the three-dimensional direction and rotational displacement of a measurement object in a non-contact manner.

  As a means for achieving the above object, the displacement measuring apparatus of the present invention comprises the following arrangement. That is, with respect to a measurement object equipped with a dividing unit that reflects incident light so as to be divided in a plurality of directions, and a plurality of reflecting units that reflect each of the divided lights in a predetermined range of angular directions, A displacement measuring apparatus for measuring the displacement in three dimensions, the light emitting means for generating incident light on the measurement object, and the measurement object divided by the dividing means, and the plurality of reflecting means respectively A light receiving means for receiving a plurality of reflected light, and a calculating means for calculating a three-dimensional displacement of the measurement object from each displacement of the plurality of reflected lights received by the light receiving means. It is characterized by having.

  According to the present invention, the three-dimensional direction and rotational displacement of a measurement object can be measured in a non-contact manner.

The figure which shows the structural example of the displacement measuring apparatus in 1 embodiment which concerns on this invention, The figure which shows the structure of the biaxial reflector in this embodiment, The figure which shows an example of the image of the camera imaging surface in this embodiment, The figure which shows the example of a displacement of the image on an imaging surface, The figure for demonstrating the geometric principle of the displacement amount detection in this embodiment, The figure explaining the displacement measurement in three dimensions in this embodiment, The figure explaining the motion of the image on the camera imaging surface by each displacement direction, The figure which shows the other structural example of a displacement measuring device, The figure which shows an example of the image of the camera imaging surface in another structural example, The figure which shows the other structural example of a displacement measuring device, It is a figure which shows the structural example of the conventional non-contact-type displacement measuring device.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The following embodiments do not limit the present invention related to the scope of claims, and all combinations of features described in the present embodiments are essential to the solution means of the present invention. Not exclusively.

<First Embodiment>
In the present embodiment, a displacement measuring device that can detect the movement and rotation of a measurement object in a three-dimensional direction without contact is shown. Since this displacement measuring apparatus can detect minute vibrations of the measurement object, it can be applied to various scenes. For example, it can be applied to an imaging projection system that captures and projects an object and converts the projected image into electronic data. In this case, it is necessary to install a projection imaging system with respect to the object to be measured at a predetermined distance. For example, when shooting the object from the lower side, the object is used in the upper space of the imaging system using a frame or the like. Need to be fixed. In such a case, it becomes possible to measure the relative vibration between the object and the projection imaging system accompanying the vibration of the mounting frame, and further, the projection that feeds back the measurement result of the vibration in the imaging projection system. It is also possible to perform control.

  Below, the structure and method for detecting the displacement of a target object are demonstrated supposing the case where the displacement measuring apparatus of this embodiment is applied to an imaging projection system.

Device Configuration FIG. 1 shows a configuration example of a displacement measuring device according to this embodiment. In the figure, reference numeral 10 denotes an object to be measured (hereinafter referred to as an object), which is not shown in the figure, but is fixed by a column in contact with the ground. 11 is a light source that emits light by light emission, and 12 is a collimator lens for making the light from the light source 11 parallel light. Hereinafter, the parallel light obtained by the collimator lens 12 is referred to as incident light L1. If a laser is used as the light source 11, the installation of the collimator lens 12 becomes unnecessary. Reference numeral 13 denotes a biaxial reflector that divides light from the light source 11 in two directions at right angles, and generates light L2 and L3 obtained by dividing the incident light L1 in the X and Y biaxial directions of the object 10. The biaxial reflector 13 is mounted on the object 10 in advance, and the detailed configuration thereof will be described later.

  The light L2 divided in the X-axis direction by the biaxial reflecting plate 13 is in the angle direction of aθ with respect to L2 within the plane determined by L1 and L2 by the reflecting plate 14 mounted in advance on the object 10. reflect. In this embodiment, although details will be described later, in order to detect the displacement of the reflected light by the reflecting plate 14 by geometric calculation based on the optical path, aθ is an angle within a predetermined range, specifically, from 0 degree. The angle is less than 90 degrees. In addition, the other light L3 divided in the Y-axis direction by the biaxial reflector 13 is in the plane determined by L1 and L3 by the reflector 15 attached to the object 10, similarly to L2. Reflects in the angle direction of bθ with respect to L3. Similarly to aθ, bθ is an angle greater than 0 degree and less than 90 degrees. In other words, each of the reflectors 14 and 15 with respect to the object 10 has an optical axis that is incident on the object 10 and an optical axis that returns from the object 10 to the camera 18 that is the light receiving device after reflection is not parallel to each other. It is arrange | positioned so that it may have an angle.

  The reflected light from the reflectors 14 and 15 is aligned by the return reflectors 16 and 17, respectively, and then an appropriate amount of light enters the camera 18 having a plurality of imaging elements via the light amount adjustment filter 19. Images taken by the camera 18 are sent to the control unit 100 such as a PC as needed. The control unit 100 detects the displacement of the reflected light from a plurality of captured images, and calculates the amount of displacement of the object 10 based on the amount of displacement of the reflected light, details of which will be described later.

  As shown in FIG. 1, in the displacement measuring apparatus of the present embodiment, the object 10 is irradiated with light from the light source 11, and the reflected light after being divided in the predetermined biaxial direction on the object 10 is received by the camera 18. In addition, the amount of displacement of the object 10 can be detected from the displacement of the reflected light.

  FIG. 2 is a diagram showing a detailed configuration of the biaxial reflector 13. In the figure, the incident light L1 that enters perpendicularly from the lower surface 21 is half-divided by 90 degrees in the optical path at the two-divided reflecting surface 22, and is emitted from the lateral surface 20, so that the first direction (X-axis direction) The light L2 parallel to is obtained. On the other hand, the remainder of the incident light L1 from the lower surface 21 is at a 90 degree angle with respect to the first direction by the total reflection mirror 24 installed at an inclination of 45 degrees with respect to the optical axis. By reflecting in the direction, light L3 parallel to the Y-axis direction is obtained.

  FIG. 3 is a diagram showing a pattern image formed by reflected light on a light receiving surface (hereinafter, imaging surface) of the camera 18. Note that a region a on the right side in the figure is a region corresponding to the reflected light from the X axis side of the object 10, that is, the image 31 is an image of the light L2 divided in the X axis direction of the object 10. Similarly, the area b on the left in the figure is an area corresponding to the reflected light from the Y axis side of the object 10, that is, the image 32 is an image of the object 10 by the light L3 divided in the Y axis direction. . In the present embodiment, the camera 18 needs to detect the displacement amount of the light receiving position. Therefore, by using a light beam that forms a predetermined pattern image such as a cross shape shown in FIG. 3 as incident light from the light source 11, it is easy to detect the amount of displacement of the light receiving position on the imaging surface.

  Also, the amount (displacement) that the L31 image 31 moves in the X-axis direction and Y-axis direction on the imaging surface is ax and ay, respectively, and similarly the amount that the L3 image 32 moves in the X-axis direction and Y-axis direction (displacement) (Quantity) is bx and by, respectively. In the present embodiment, it is assumed that the imaging surface of the camera 18 is installed in parallel to the object 10, and therefore the X-axis direction and the Y-axis direction on the imaging surface are the X-axis direction of the object 10, Y Match the axial direction.

● Displacement detection (outline)
Hereinafter, an outline of the displacement detection operation in the displacement measuring apparatus of the present embodiment having the above-described configuration will be described first.

  In the configuration shown in FIG. 1, it is assumed that the reflecting plate 14 is mounted on the object 10 at aθ = 60 °, and the object 10 has only moved a distance X in the X-axis direction (X parallel movement). In this case, the amount of displacement of the image on the imaging surface of the camera 18 shown in FIG. 3 is as shown in FIG. 4 (a) according to the optical path calculation. That is, in this case, each displacement amount is obtained as follows.

ax ＝ P ・ X
ay = 0… (1)
bx = 0
by = 0
P = -1.87
In Equation (1), P is a coefficient. When aθ is 45 degrees, P = -1.71, and when 30 is 30 degrees, P = −1.5. The reason why the coefficient P is a negative value is that the movement direction of the object 10 with respect to the X axis is reversed on the imaging surface by the return reflector 16.

  Similarly, when the reflecting plate 15 is mounted on the object 10 at bθ = 60 ° and the object 10 has only moved a distance Y in the Y-axis direction (Y parallel movement), on the imaging surface. The displacement amount of the image is as shown in FIG. 4B according to the optical path calculation. That is, in this case, each displacement amount is obtained as follows.

ax = 0
ay = 0… (2)
bx = 0
by ＝ P ・ Y ＝ (-1.87) ・ Y
According to the above equations (1) and (2), in order to detect the movement amount of the object 10 from the displacement amount of the image on the imaging surface, it is necessary to determine the coefficient P in advance. That is, P is a magnification of the displacement amount of the image on the imaging surface with respect to the movement amount of the object 10.
Here, FIG. 5 shows the geometric principle of displacement amount detection in the present embodiment, and a method for determining the coefficient P will be described. Note that FIG. 5 shows a state in which the Y-axis direction and the X-axis direction are expanded in the same plane in order to simplify the expression.

  In FIG. 5, the incident light L1 is divided into two by the biaxial reflector 13 into light L2 in the X-axis direction (X direction in the figure) and light L3 in the Y-axis direction (Y direction in the figure). Here, when the object 10 moves by the distance X in the X direction, the biaxial reflecting plate 13 and the reflecting plate 14 also move to the position indicated by the dotted line in the figure, so that the reflecting surface 1 and the reflecting surface of the two-divided reflecting surface 22 are reflected. The reflecting surface 2 of the plate 14 also moves a distance X, and the optical axis in the X-axis direction is L2 ′ indicated by a broken line. The reflected light from the reflecting surface 2 is reflected by the return reflecting plate 16, and enters the imaging surface of the camera 18 arranged in parallel with the incident light L1 perpendicularly. In this case, the inclination of the return reflection plate 16 is (90 ° −aθ) / 2 with respect to the optical axis incident on the camera 18. Thereby, the displacement amount ax of the image on the imaging surface is detected with respect to the movement of the object 10 by the distance X.

  At this time, since the reflecting surface 1 is inclined by 45 degrees with respect to the incident light L1, the distance between L2 and L2 ′ is also X. When the intersections of L2 and L2 'with respect to the reflecting surface 2 are e and g, and the intersection of the reflected light of L2 and L2' is f, the length K of fg is obtained geometrically by the following equation (3). It is done.

K = (1+ (1 / tan (aθ)) + (1 / tan (90 °-(aθ / 2)))) ・ X… (3)
On the other hand, the lights L2 and L2 ′ incident on the return reflecting plate 16 are reflected and reach the imaging surface. When the distance between the intersection of the reaching light and the return reflection plate 16 and the intersection of the reflected light from the return reflection plate 16 and the imaging surface is Z, the distance Z is L2 ′ when the incident light is L2. From a certain case, it is expressed by the following two formulas (4) and (5) using the image displacement amount ax on the imaging surface.

Z ＝ (ax + K) ・ tan (aθ)… (4)
Z ＝ ax ・ tan (45 ° + (aθ / 2))… (5)
From these equations (4) and (5), ax is represented by K and aθ as in the following equation (6).

ax ＝ K ・ tan (aθ) / (tan (45 ° + (θ / 2))-tan (aθ))… (6)
Here, by substituting equation (3) into equation (6) and multiplying by -1 to match the direction, the following equation (7) is obtained.

ax = (1+ (1 / tan (aθ)) + (1 / tan (90 °-(aθ / 2)))) ・ tan (aθ) / (tan (45 ° + (θ / 2))-tan (aθ)) ・ X ・ (-1) ... (7)
Here, by substituting the value of aθ into the equation (7), the displacement amount ax in the X direction on the imaging surface can be obtained as follows.

When aθ = 60 °, ax = X ・ (-1.87)
When aθ = 45 °, ax = X ・ (-1.71)
When aθ = 30 °, ax = X ・ (-1.5)
The value of ax thus obtained coincides with the optical path calculation result shown in FIG. 4 (a), that is, equation (1). At this time, for ay and by, since the object 10 has not moved in the Y-axis direction, ay = by = 0. For bx, the path of the optical axis (optical path length) does not change, so bx = 0.

  On the other hand, the light L3 divided in the Y-axis direction is considered to be arranged in line symmetry with the light L2 with respect to the incident light L1, and therefore, the same calculation as in the case of the light L2 can be performed. That is, when the object 10 moves by the distance Y in the Y-axis direction, the bx calculation formula is obtained as the following formula (8), similarly to the above formula (7) for calculating ax.

by = (1+ (1 / tan (bθ)) + (1 / tan (90 °-(bθ / 2)))) ・ tan (bθ) / (tan (45 ° + (θ / 2))-tan (bθ)) ・ Y ・ (-1) ... (8)
Here, by substituting bθ = 60 ° into the equation (8), “by” is obtained as follows, which agrees with the experimental result shown in FIG. 4B, that is, the equation (2).

by ＝ (-1.87) ・ Y
As described above, as shown in the equations (7) and (8), in the present embodiment, the imaging surface with respect to the displacement of the object 10 depends on the values of aθ and bθ that depend on the mounting angles of the reflectors 14 and 15 with respect to the object 10, respectively. A coefficient P that is the magnification of the displacement at is determined. As can be seen from the equations (7) and (8), in order to detect the displacement of the object 10 more sensitively, the values of aθ and bθ may be made closer to 90 degrees.

● Displacement detection (3D)
As described above, in the case where the object 10 moves only in the X-axis direction or only in the Y-axis direction, the amount of displacement of the image on the imaging surface of the camera 18 is determined as the X or Y direction of the object 10. Explained that motion can be detected. In the present embodiment, it is further possible to detect the displacement amount in each axial direction including the Z axis and the rotation amount with respect to each axis even when the target object 10 performs a complex movement in three dimensions. It is characterized by. That is, the object 10 in this embodiment can be displaced in each axial direction (X, Y, Z) and each rotational direction (Xθ, Yθ, Zθ) as shown in FIG. Explanation will be made assuming that bθ = 60 °.

  As described above, the object 10 is fixed in the air by being supported by a support (not shown) from the ground. It is appropriate that the support positions of the pillars in the object 10 are arranged so that the object 10 is kept horizontal, and it is considered to be an arrangement in which the position of the center of gravity of the object 10 is taken into consideration. Here, simply, if the object 10 has a uniform composition and has a square shape with a constant thickness as shown in FIG. 6, it is supported at its four vertices and four sides, or two opposite vertices and two sides. It is assumed that a position is provided. Considering such a characteristic of the support position with respect to the object 10, the rotation center (rotation axis) parallel to each axis is expected to be an axis passing through the center of the object. For example, when Zθ rotates at a rotation center parallel to the Z axis, the center of the object 10 becomes the rotation center axis. Therefore, in the following description, it is assumed that the object 10 has a square shape with one side of 2R, and the distance from the rotation center axis of the rotation Zθ to each side is R.

  First, the displacement amount on the imaging surface when the object 10 moves by X in the X-axis direction is obtained as shown in the above equation (1) by experiment. Similarly, when moving in the Y-axis direction by Y, the amount of displacement can be obtained as in the above equation (2).

  When the object 10 moves by Z in the Z-axis direction, the displacement amount of the image on the imaging surface can be obtained from the following equation (9) by optical path calculation.

ax ＝ Z ・ (-0.5)
ay = 0 (9)
bx = 0
by ＝ Z ・ (-0.5)
Here, FIG. 7 (a) shows an experimental example of image displacement on the imaging surface with respect to the movement of the object 10 in this case. According to the figure, when the object 10 moves 0.3 mm in the Z-axis direction, the image on the imaging surface (region a) moves 0.15 mm in the X-axis direction. In this case, although not shown, the image on the imaging surface (region b) moves 0.15 mm in the Y-axis direction in the same manner in the Y-axis direction. This experimental result agrees with the above equation (9).

  Further, when the object 10 is rotated by Xθ about the rotation center parallel to the X axis, the amount of displacement of the image on the imaging surface can be obtained as follows by optical path calculation. L is the distance from the light source 11 to the biaxial reflector 13.

ax ＝ sin (Xθ) ・ L ・ (-0.15)
ay ＝ sin (Xθ) ・ L ・ (4.46)… (10)
bx = 0
by ＝ sin (Xθ) ・ L ・ (0.65)
Here, FIG. 7C shows an experimental example of the displacement of the image on the imaging surface with respect to the movement of the object 10 in this case. According to the figure, when the object 10 rotates at Xθ = 0.1 ° at the X axis rotation center, the image on the imaging surface (region a) moves 0.354 mm in the X axis direction and 10.487 mm in the Y axis direction. Yes. In the example shown in the figure, L = 1350 mm. This experimental result agrees with the above equation (10).

  Similarly, when the object 10 rotates Yθ about the rotation center parallel to the Y axis, the amount of displacement of the image on the imaging surface can be obtained as follows by optical path calculation.

ax ＝ sin (Yθ) ・ L ・ (-0.65)
ay = 0 (11)
bx ＝ sin (Yθ) ・ L ・ (-4.46)
by ＝ sin (Yθ) ・ L ・ (-0.15)
Here, FIG. 7D shows an experimental example of the displacement of the image on the imaging surface with respect to the movement of the object 10 in this case. According to the figure, when the object 10 rotates Yθ = 0.1 ° at the Y axis rotation center, the image on the imaging surface (region a) moves 1.53 mm in the X axis direction. This experimental result agrees with the above equation (11).

  Similarly, when the object 10 is rotated by Zθ at the rotation center parallel to the Z axis, the displacement amount of the image on the imaging surface can be obtained as follows by optical path calculation. Note that R is the distance from the center of rotation of the object 10 to each side.

ax ＝ sin (Zθ) ・ R ・ (-1.77)
ay ＝ sin (Zθ) ・ R ・ (0.037)… (12)
bx ＝ sin (Zθ) ・ R ・ (-0.037)
by ＝ sin (Zθ) ・ R ・ (1.77)
Here, FIG. 7B shows an experimental example of the displacement of the image on the imaging surface with respect to the movement of the object 10 in this case. According to the figure, when the object 10 rotates at Zθ = 0.1 ° at the Z-axis rotation center, the image on the imaging surface (region a) moves 1.626 mm in the X-axis direction and 0.04 mm in the Y-axis direction. Yes. In the example shown in the figure, R = 525 mm. This experimental result agrees with the above equation (12).

  Even when the object 10 moves in a three-dimensional manner, certain values are detected as image displacement amounts ax, ay, bx, and by on the imaging surface. At that time, ax, ay, bx, and by adding the above formulas (1), (2) and formulas (9) to (12) according to the displacement of the object 10, the following formula (13) It is calculated as follows.

ax = {X ・ (-1.87)} + {Z ・ (-0.5)} + {sin (Xθ) ・ L ・ (-0.15)} + {sin (Yθ) ・ L ・ (-0.65)} + {sin (Zθ) ・ R ・ (-1.77)}
ay ＝ {sin (Xθ) ・ L ・ (4.46)} + {sin (Zθ) ・ R ・ (0.037)}… (13)
bx ＝ {sin (Yθ) ・ L ・ (-4.46)} + {sin (Zθ) ・ R ・ (-0.037)}
by = {Y ・ (-1.87)} + {Z ・ (-0.5)} + {sin (Xθ) ・ L ・ (0.65)} + {sin (Yθ) ・ L ・ (-0.15)} + {sin ( Zθ) ・ R ・ (1.77)}
Here, the case where aθ = bθ = 60 ° has been described as an example, but even when aθ and bθ take other values, only the coefficient of each value changes. Will not be lost.

  Here, the rotation angles Xθ, Yθ are the columns (not shown) for fixing the object 10 and the columns at the rotation target position with respect to the X axis and the Y axis are alternately expanded or contracted in synchronization with the rotation. This can occur depending on whether bending occurs. According to the experiment and simulation results, the generated rotation angles Xθ and Yθ are sufficiently smaller than the other four variables (X, Y, Z, and Zθ), and therefore can be regarded as Xθ = Yθ = 0. Therefore, the above equation (13) is equivalent to the following equation (14), and the displacement amounts ax, ay, bx, and by on the imaging surface can be expressed by four variables (X, Y, Z, Zθ).

さらに、この行列式(15)の両辺に逆行列を乗じて左辺と右辺を入れ替えることで、4変数(X,Y,Z,Zθ)を求めるための行列式(16)が得られる。

すなわち上記(16)式によれば、カメラ18の撮像面上における像の変位量を検知することで、対象物10の3次元空間での移動量が検出される。具体的には、カメラ18から得られる信号を画像処理によって数値化することでax、ay、bx、byの値を取得し、PC等の演算装置(不図示)によって上記(16)式に基づく演算を行えば良い。 ax = {X ・ (-1.87)} + {Z ・ (-0.5)} + {sin (Zθ) ・ R ・ (-1.77)}
ay ＝ {sin (Zθ) ・ R ・ (0.037)}… (14)
bx ＝ {sin (Zθ) ・ R ・ (-0.037)}
by ＝ {Y ・ (-1.87)} + {Z ・ (-0.5)} + {sin (Zθ) ・ R ・ (1.77)}
That is, equation (14) is expressed by the following determinant (15).

Further, the determinant (16) for obtaining the four variables (X, Y, Z, Zθ) is obtained by multiplying both sides of the determinant (15) by the inverse matrix and switching the left side and the right side.

That is, according to the above equation (16), the amount of movement of the object 10 in the three-dimensional space is detected by detecting the amount of displacement of the image on the imaging surface of the camera 18. Specifically, the signals obtained from the camera 18 are digitized by image processing to obtain values of ax, ay, bx, by, and based on the above equation (16) by a computing device (not shown) such as a PC What is necessary is just to perform an operation.

  The equation (16) includes the coefficient when aθ = bθ = 60 °, but the coefficient value in the 4 × 4 matrix in the equation (16) also when aθ and bθ take other values. However, the coefficient value can be calculated in advance.

  As described above, according to the present embodiment, the displacement amount of the measurement object in the three-dimensional direction and the displacement caused by the rotation about the Z-axis direction as a rotation center are simultaneously measured in a non-contact manner with a single measurement device. can do.

<Other embodiments>
Hereinafter, other embodiments of the present invention will be described.

  FIG. 8 is a diagram showing another configuration example of the displacement measuring apparatus according to the present invention. In the figure, the same components as those in FIG. 1 described above are denoted by the same reference numerals and description thereof is omitted. That is, in the configuration of FIG. 8, the displacement of two objects is measured by placing the object 25 in parallel in the optical axis direction of the incident light for measuring the object 10 in FIG. Although not shown in the figure, the objects 10 and 25 are fixed by supporting columns in contact with the ground.

  The light emitted from the light source 11 is first divided into two directions at right angles by the biaxial reflector 26 for the object 25, reflected by the reflectors 27 and 28 having a predetermined angle, and then returned to the reflectors 16 and 17. And enters the imaging device 18 (camera). In the above-described embodiment, the example in which the total reflection mirror is used for the division in the Y-axis direction in the biaxial reflector 13 for the object 10 is shown. However, the biaxial reflector 26 for the object 25 is a half-axis. Use a mirror. Thereby, the incident light from the light incident surface of the biaxial reflector 26 enters the biaxial reflector 13 mounted on the object 10 at the upper part thereof. Thereafter, similarly to the above-described embodiment, the reflected light from each of the object 10 and the object 25 is incident on the imaging device 18 together.

  The light incident on the imaging device 18 with the configuration shown in FIG. 8 forms the image shown in FIG. 9 on the imaging surface. In FIG. 9, regions 28 and 29 correspond to the objects 10 and 25, respectively, and the images in each region are displaced independently. Therefore, the displacement amount in three dimensions of the objects 10 and 25 can be obtained for each region using the above equation (16).

  FIG. 10 is a diagram showing another configuration example of the displacement measuring apparatus according to the present invention. In this figure, the same components as those in FIG. 8 described above are denoted by the same reference numerals and description thereof is omitted. That is, in the configuration of FIG. 10, the displacement of the two objects 10 and 25 is measured as in FIG. 8, but the arrangement is different.

  Even in the arrangement as shown in FIG. 10, the three-dimensional displacement amount of the objects 10 and 25 can be obtained as in the case of FIG. However, in this case, the minimum resolution of the displacement in the Z direction is improved by reducing aθ and bθ, which is different from the above embodiment. Furthermore, in the configuration example shown in FIG. 10, it is not necessary to install the light source 11 and the camera 18 at the bottom, so it is possible to effectively use the space only by placing the object 25 on the work table, for example. It becomes.

  Further, the present invention provides a storage medium storing a program code of software for realizing the functions of the above-described embodiments (for example, processing shown by a flowchart in which processing of each unit described above is associated with each process), a system or an apparatus It can also be realized by supplying to. In this case, the function of the above-described embodiment is realized by the computer (or CPU or MPU) of the system or apparatus reading and executing the program code stored in the storage medium so that the computer can read it.

Claims (15)

3 for a measuring object equipped with a dividing means for reflecting incident light so as to be divided in a plurality of directions and a plurality of reflecting means for reflecting each of the divided lights in a predetermined range of angular directions. A displacement measuring device for measuring displacement in dimension,
A light emitting means for generating incident light on the measurement object;
A light receiving means for receiving a plurality of reflected lights which are divided by the dividing means in the measurement object and respectively reflected by the plurality of reflecting means;
From each displacement of the plurality of reflected light received by the light receiving means, calculating means for calculating a three-dimensional displacement of the measurement object;
A displacement measuring apparatus comprising:   2. The displacement measuring apparatus according to claim 1, wherein the calculating unit calculates a movement amount and a rotation amount of the measurement object with respect to each of three-dimensional axes.   3. The displacement measuring apparatus according to claim 2, wherein the dividing unit divides the incident light in first and second directions corresponding to two of the three-dimensional axes.   4. The displacement measuring apparatus according to claim 3, wherein the calculating unit calculates a rotation amount with respect to an axis that does not correspond to the first and second directions among the three-dimensional axes.   5. The displacement measurement according to claim 1, further comprising return reflection means for reflecting light reflected by the reflection means so as to be incident perpendicularly to a light receiving surface of the light receiving means. apparatus.   Each of the reflecting means is mounted on the measurement object so that an angle formed between incident light and reflected light on the reflecting means is larger than 0 degree and smaller than 90 degrees. 6. The displacement measuring device according to any one of 1 to 5.   7. The displacement measuring apparatus according to claim 1, wherein the incident light is light that forms a predetermined pattern image.   The light receiving surface of the light receiving means includes a plurality of imaging elements, and each of the plurality of reflected light is received by different areas of the light receiving surface, and the pattern image corresponding to each reflected light is detected. 8. The displacement measuring device according to claim 7.   9. The displacement measuring apparatus according to claim 1, wherein the light emitting means generates the incident light by a laser. The measurement object is plural,
10. The displacement measuring apparatus according to claim 1, wherein the dividing unit and the plurality of reflecting units are attached to each of the measurement objects. The light emitting means generates the incident light for each of the plurality of measurement objects,
11. The displacement measuring apparatus according to claim 10, wherein the light receiving unit receives the plurality of reflected lights from each of the plurality of measurement objects. The plurality of measurement objects are juxtaposed in the optical axis direction of the incident light,
The dividing means attached to the first measurement object includes the dividing light attached to the second measurement object and the direction of the reflecting means attached to the first measurement object. 12. The displacement measuring device according to claim 11, wherein the displacement measuring device is divided into directions of means.   An object to be measured in the displacement measuring apparatus according to any one of claims 1 to 12. A dividing unit that includes a light emitting unit, a light receiving unit, and a calculating unit, and that reflects incident light so as to be divided into a plurality of directions; and a plurality of reflections that reflect each of the divided lights in a predetermined range of angular directions. A displacement measuring method for measuring displacement in three dimensions for a measurement object to which a means is attached,
The light emitting means generates incident light on the measurement object;
The light receiving means receives a plurality of reflected lights that are divided by the dividing means in the measurement object and are respectively reflected by the plurality of reflecting means;
The calculation means calculates the three-dimensional displacement of the measurement object from the displacements of the plurality of reflected lights received by the light receiving means,
Displacement measuring method characterized by the above.   13. A non-transitory computer-readable storage medium storing a program for causing a computer device to function as the calculation unit in the displacement measuring device according to claim 1 when executed by the computer device.

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