JP2007292617A - Three-dimensional shape measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique capable of supporting a measuring sensor from a plurality of directions, and capable of regulating an inclination (parallelism) of a measured face with respect to an optical axis. <P>SOLUTION: In this three-dimensional shape measuring instrument, a case 105 for storing an optical path forming part 5 constituting a measuring sensor 40 is provided with the first holding mechanism 103 provided with X-axial pinholes 101a on respective faces 2 with a measuring optical path 5a therebetween and opposed in parallel to the measuring optical path, having a shape (U-shape)surrounding two opposed faces of the case and other face between the two faces, having a Y-axial pinhole 102a in a position corresponding to the central part of a direction surrounding the other face, and for supporting X-axial parallel pins 101 inserted into the X-axial pinholes to tiltably hold the case , and the second holding mechanism 104 for supporting a Y-axial parallel pin 102 inserted into the Y-axial pinhole from a direction orthogonal to an axial direction of the X-axial parallel pins, and having a holding member 104a for tiltably holding the first holding mechanism. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention uses the interference phenomenon of broadband light (for example, white light) having a plurality of spectral components (hereinafter, spectral components are expressed by wavelength components) of the planar object to be measured (work). The present invention relates to a three-dimensional shape measuring apparatus that three-dimensionally measures a detailed shape. In particular, one of the broadband light (eg, white light) is incident on a reference optical path having a reference mirror at the far end, and the other of the broadband light is incident on a measurement optical path having an object to be measured at the far end. ) And an interference unit (interferometer) that generates interference due to each return light from the object to be measured, based on the optical path length in which interference fringes obtained by changing the optical path length of either the reference optical path or the measurement optical path are generated. Further, the present invention relates to a three-dimensional shape measuring apparatus that measures the detailed shape of the plane of the object to be measured, and relates to a technique for adjusting the inclination of the measurement optical path from the interference unit with respect to the plane of the object to be measured.

In general, in the shape measuring apparatus using the interference phenomenon by the white light source described above, the fact that the interference fringes exhibit the maximum luminance when the optical path lengths of both the reference optical path and the measurement optical path are equal is utilized. Yes. That is, the position of the optical path length at which the interference fringe exhibits the maximum luminance when the optical path length of either the reference optical path or the measurement optical path is changed is measured as the displacement of the object to be measured in the optical path length change direction.
However, conventionally, since the optical path lengths of both the reference optical path and the measurement optical path are equal, that is, it is difficult to specify the position of the optical path length at which the interference fringe exhibits the maximum luminance, various ideas have been elaborated. (Patent Documents 1 and 2).

  In Patent Document 1, an imaging device captures an interference fringe corresponding to a change in the optical path length at a measurement point of the object to be measured, and the interference fringe has the maximum luminance (peaks) from the imaging data. The position (or the change amount of the optical path length, hereinafter referred to as “peak position”) is directly detected.

  The technique of Patent Document 2 changes the optical path length step by step by a predetermined distance (for each sampling pitch), and takes discrete imaged data and its differential value (difference) for each of the changed predetermined distances. Value) to obtain the peak position by calculation. In the technique of Patent Document 2, in order to prevent the response delay of the measurement system as described above, the optical path length is changed in steps with respect to the time during which the optical path length is changed, and the measurement system responds. A sufficient settling time is provided, and after the settling time, sampled imaging data is acquired, and similarly, settling times are set one after another to acquire data. Then, after the acquisition, the peak position is obtained by discrete processing calculation based on these data.

  Incidentally, Patent Documents 1 and 2 describe the technique of the measurement itself as described above, but before the measurement, the relationship between the surface of the object to be measured and the optical axis of the light irradiating the object to be measured is described. It is necessary to adjust (or calibrate). In particular, when the reflected light from a part of the surface of the object to be measured is imaged and measured by a detection camera as in Patent Document 2, the surface of the object to be measured and the surface to be detected are parallel to each other. If the degree (in other words, the surface to be detected is in a direction orthogonal to the optical axis, the inclination of the optical axis with respect to the surface of the object to be measured) is poor, the shape of the object to be measured is measured as a slope. There is a problem. Adjustment for that is required before measurement. Hereinafter, this “adjustment of the degree of parallelism or the inclination of the optical axis” is simply expressed as “adjustment of parallelism” in order to express it simply.

  Although Patent Document 3 is not a shape measuring apparatus using interference, it is adjusted by using a goniometer and a moving table so that the normal vector of the surface to be measured and the light vector match.

  Therefore, if the adjustment mechanism which employ | adopted the goniometer like patent document 3 is employ | adopted for patent document 1 or 2, desired calibration can be performed after calibrating.

JP-A-1-288702 Japanese Patent No. 3220955 JP 2002-257523 A

  However, for example, the object to be measured measures a detailed shape of a large area such as the surface of a glass plate used for a liquid crystal display (for example, a wide plane having a side exceeding 1 m). In this case, measurement is performed by moving the measurement sensor including the interference portion of the optical system of Patent Document 1 or 2 on the surface of the object to be measured (hereinafter sometimes referred to as “measurement surface”).

  Therefore, for example, a goniometer as in Patent Document 3 can be supported by a part of the measurement sensor and can be configured to change and adjust the direction (optical axis direction) of the measurement sensor. It is easy to be held and susceptible to vibration, and once it is tilted between the optical axis and the surface to be measured, it becomes unnecessary at the time of measurement, but there is a disadvantage that it is easily affected by vibration during measurement. . Further, since the movement is repeated, there is a possibility that the state after the adjustment cannot be maintained by the movement after the adjustment and shifts. On the other hand, a method of fixing the measurement sensor side and moving the object to be measured is conceivable, but the measurement space is doubled and it is difficult to move the wide range with high accuracy.

  The plane referred to here is an average plane, and does not mean a plane with fine measurement accuracy. The three-dimensional shape measuring apparatus uses the detailed shape of the plane (the shape of fineness with measurement accuracy) as a measurement target.

  An object of the present invention is to provide a technique capable of supporting a measurement sensor from a plurality of directions and capable of adjusting the inclination (parallelism adjustment) between a surface to be measured and an optical axis. Further, the parallelism adjustment can be performed while viewing the picked-up interference fringes.

In order to achieve the above object, the invention described in claim 1 includes a broadband light source (1) that outputs broadband light, and a measurement object having a reference optical path and a plane each having a reference mirror at the far end. An optical path forming unit (5) for causing the broadband light to enter both of the arranged measurement optical paths, and combining and outputting the reflected light from the reference mirror and the reflected light from the plane of the object to be measured; A three-dimensional shape measuring apparatus comprising: (10) an imaging unit that images the multiplexed reflected light output from the optical path forming unit; and measuring the planar shape of the object to be measured based on the interference fringes based on the multiplexed signal In
A case (105) containing at least the optical path forming portion, sandwiching the measurement optical path, and provided with a first hole (101a) on each of two surfaces facing in parallel to the measurement optical path;
The second hole (102a) has a shape surrounding the two opposite surfaces of the case and the other surface between the two surfaces, and a second hole (102a) at a position corresponding to a central portion of the other surface in the surrounding direction. A first holding mechanism (103) for supporting the first shaft member (101) inserted into each of the first holes and holding the case in a tiltable manner;
A first holding member that supports the second shaft member (102) inserted into the second hole from a direction orthogonal to the axial direction of the first shaft member and holds the first holding mechanism in a tiltable manner. A three-dimensional shape measuring apparatus comprising two holding mechanisms (104).

According to a second aspect of the present invention, in the first aspect of the present invention, the first spring member (104d) and the first pressure adjusting member (the first pressure adjusting member) that press the case oppositely from the second axial direction. 104e)
A second spring member (104d) and a second pressing adjustment member (104e) for pressing the first holding mechanism in opposition from the axial direction of the first shaft member;
A configuration in which the inclination of the case can be adjusted by the first pressing adjustment member, and a configuration in which the inclination of the first holding mechanism can be adjusted by the second pressing adjustment member.

The invention according to claim 3 is the invention according to claim 2, wherein the display means (18a)
Display control for displaying the change in interference fringes based on the combined image picked up by the image pickup means so as to be visible when the inclination is adjusted by the first pressure adjusting member and / or the second pressure adjusting member. Means (18c).

  According to a fourth aspect of the invention, in the invention of the second or third aspect, the case whose inclination is adjusted by the first pressing adjusting means is configured to be fixable to the first holding mechanism, The first holding mechanism whose inclination is adjusted by the second pressing adjusting means is configured to be fixable to the second holding mechanism.

  The invention according to claim 5 is the second spring member according to claim 4, wherein the first spring member and the first pressing adjustment member are detachable from the first holding mechanism. And the 2nd press adjustment member is comprised so that attachment or detachment with respect to the said 2nd holding mechanism is possible.

  According to the first or second aspect of the invention, the measurement sensor is supported by the plurality of shaft members and the holding mechanism that supports them, and the tilt adjustment is possible. , Can maintain the adjusted result state.

  According to the third aspect of the present invention, the operator can adjust while observing the interference fringes, so that the adjustment is easy.

  According to invention of Claim 4, since it is the structure which can be fixed in the inclination state adjusted after adjustment, the adjusted inclination can be maintained more stably.

  According to the fifth aspect of the present invention, since the adjustment jigs such as the spring member and the pressure adjusting means are detachable, there is no uselessness in measurement, and the weight becomes light.

  An embodiment according to the present invention will be described with reference to the drawings. 1-3 is a figure for demonstrating the optical structure and operation | movement of this embodiment, and FIGS. 4-7 is a figure for demonstrating the parallelism adjustment mechanism which concerns on this embodiment. FIG. 1 is a diagram showing an optical functional configuration, FIG. 2 is a diagram for explaining measurement by the configuration of FIG. 1, and FIG. 3 is a diagram showing an array of imaging elements. 4 is a perspective view showing the structure of the parallelism adjusting mechanism, FIG. 5 is a cross-sectional view seen from the top of FIG. 4, and FIG. 6 is a diagram for explaining the tilt adjustment of the first holding mechanism including the case. FIG. 7 is a diagram for explaining interference fringe adjustment (parallelism adjustment).

  Hereinafter, the embodiments are divided into “1. optical configuration and operation” based on FIGS. 1 to 3, “2. arrangement structure of measurement sensors”, and “3. parallelism adjusting mechanism” based on FIGS. I will explain.

"1. Optical configuration and operation"
The light source 1 in FIG. 1 is a light source that emits broadband light having a large number of wavelength components (spectrums) over a wide band and low coherency. Here, for example, a white light source is used. The collimator lens 2 collects the white light (broadband light) from the light source 1 and sends it to the beam splitter 3. The beam splitter 3 converts the direction of white light and sends it to the objective lens 4. The objective lens 4 condenses the white light and sends it to the beam splitter 5 (optical path forming unit). The beam splitter 5 branches the white light received from the objective lens 4 in two directions, and one is sent as measurement light to the measurement object 7 (the optical path from the beam splitter 5 to the measurement object 7 is a measurement optical path 5a). The other one is sent as reference light to the reference mirror 6 (the optical path from the beam splitter 5 to the reference mirror 6 is referred to as a reference optical path 5b). In this example, the distance between the beam splitter 5 and the reference mirror 6 is fixed, that is, the optical path length of the reference optical path 5b is fixed. The beam splitter 5 can also be configured by other means such as a half mirror.

  The measurement optical path 5a is configured to simultaneously irradiate a desired irradiation range to be measured on the surface of the object 7 to be measured. The range that is irradiated at a time is a range that can be sensed by the image sensor of the camera 10 that is an imaging means as described later (see FIG. 3).

  The object to be measured 7 (workpiece) has a flat surface, and in the shape measurement here, the detailed shape of the flat surface is a measurement target. For example, a liquid crystal screen having a side of 1 m is the object to be measured. Therefore, the plane referred to here means an average plane, and does not mean a plane with fine measurement accuracy. The DUT 7 is mounted on the piezo 8. The piezo 8 is composed of a piezoelectric element driven by a voltage, and in accordance with an instruction from the optical path length control means 16, the measured object 7 is continuously Z with respect to the XY plane (a plane orthogonal to the paper surface of FIG. 1). The optical path length of the measurement optical path 5a is variably controlled by changing (moving) in the axial direction (vertical direction of the paper surface of FIG. 1).

  In the variable control of the optical path length of the measurement optical path 5a, as explained in the prior art, a method of controlling slowly and densely, a method of controlling by setting a settling time step by step, or a measurement time in them. Any of the methods of continuous control may be used.

  In this embodiment, a case where variable control is continuously performed will be described. Here, the continuous change (or continuous change) of the optical path length includes a case where the optical path length is changed stepwise as follows. In other words, it is changed in steps by a certain fine distance at regular time intervals. That is, a case where the distance is changed in a minute distance step and changed substantially continuously is also included. As described later, the continuous change is captured at a predetermined time interval (timing) by the camera 10 (imaging means) and data is acquired, but compared with the optical path length change interval changed at the time interval. Thus, a mode in which the step is changed in a relatively narrow distance interval is included. In this case, the predetermined time interval does not include the settling time described in the related art.

  The piezo 8 is a means (optical path length variable means) that changes the optical path length of the measurement optical path 5a with respect to the fixed position of the beam splitter 5 under the control of the optical path length control means 16. Here, description will be made by fixing the optical path length of the reference optical path 5b and changing the optical path length of the measurement optical path 5a. However, in order to generate interference fringes described later, the piezo 8 is attached to the reference mirror 6 and the measurement optical path is measured. A configuration in which 5a is fixed and the optical path length of the reference optical path 5b is changed is also possible.

  Each white light reflected from the reference mirror 6 and the object to be measured 7 (hereinafter sometimes referred to as “return white light”) is combined (combined) by the beam splitter 5 and further collected by the objective lens 4. The light passes through the beam splitter 3, is converted into parallel light by the imaging lens 9, and is input to the camera 10 (imaging means). At this time, in response to an instruction from the optical path length control means 16, the camera 10 returns and captures white light according to the distance (or a predetermined time during which the piezo 8 changes the optical path length of the measurement optical path 5a). The interference fringes due to the returning white light are imaged. The captured interference fringes are stored in the memory 13. At this time, the measurement optical path 5a is configured to simultaneously irradiate the desired irradiation range of the object to be measured 7 as described above. Therefore, each irradiation position of the irradiation range, that is, a position to be measured (hereinafter referred to as “measurement position”). The interference fringes corresponding to the returning white light from the image are captured.

  As a modification of the optical system in FIG. 1, an optical system in which an objective lens is arranged in each of the measurement optical path 5a and the reference optical path 5b can be configured. Therefore, the present invention is not limited to the optical system in FIG. The following description will be given with reference to FIG.

  Since the optical path length control means 16 generates a timing signal at a predetermined time interval and instructs the piezo 8 to change the optical path length in accordance with the time interval, the memory 13 returns white light imaging data at the timing of the timing signal. (Returns to brightness data indicating the brightness of white light) is captured and stored. For example, if the optical path length changes linearly in time, the imaging data is stored using the time interval of the timing signal as an address. These timing advance directions (that is, address directions) represent the Z-axis direction. At that time, the imaging data is stored together with the measurement position (Xm, Yp). The information of the measurement position (Xm, Yp) is the position of the pixel in the XY direction corresponding to the position of the image sensor of the camera 10 (see the arrangement in FIG. 3). Since the data is stored in the memory 13 in this way, for example, if the imaging data is extracted from the memory 13 in the order of the addresses and reproduced, the interference fringe data as shown in FIG. 2A can be obtained.

  The position of the peak at the center of the interference fringes in FIG. 2A is a case where the optical path length of the reference optical path 5b and the optical path length of the measurement optical path 5a are the same. Further, the interval between the interference fringes is approximately ½ of the center of the band having white light (broadband light). Further, the spread of the interference fringes in FIG. 2A in the optical path length direction depends on the degree of coherency of white light. The lower the coherency, the narrower the spread.

  The “peak position” (or “peak position”) is defined above, but the luminance (amplitude) of the interference fringes due to white light is maximum (hereinafter referred to as “peak”). 2 (A) is a position on the horizontal axis, and the horizontal axis is the optical path length direction of the measurement optical path (the Z-axis direction in FIG. 1: the vertical direction of the paper in FIG. 1), and when the optical path length is changed The time axis direction (time axis direction when images are captured by the camera 10 at predetermined time intervals).

  The signal processing means 20 includes an optical path length detection means 14 and a displacement calculation means 15. The optical path length detection unit 14 reads out the imaging data at the measurement position (Xm, Yp), for example, from the memory 13 in the order of addresses, detects the peak as the position of the interference pattern of white light, and specifies the time position at which the peak appears. Determine as the optical path length. Specifically, first, an address position (timing) at the peak, that is, a time position at a predetermined time interval is determined (t1 in FIG. 2A). Further, the optical path length control means 16 determines the optical path length with respect to the time position (t1) from the optical path length change speed at which the optical path length is changed for a certain time interval, and sets it as the specific optical path length Z1 (FIG. 2 (see (A) and (B)). Similarly, the interference fringes are similarly measured at the reference measurement position (Xs, Ys), and the specific optical path length Zs indicating the peak value at that time is obtained.

  FIG. 2B shows the change in the optical path length with respect to the time change controlled by the optical path length control means 16 with respect to the piezo 8 (also the speed at which the optical path length is changed). The horizontal axis in FIG. 2B is also the time, but also the amount of change in the optical path length of the measurement optical path from the reference position (position before changing the optical path length, for example, this is zero).

  And the displacement calculating means 15 calculates | requires those differences Zs-Z1, and becomes displacement with respect to the reference | standard measurement position (Xs, Ys) of a measurement position (Xm, YP), ie, height. Similarly, if processing is performed for each measurement position, the height (distance in the Z-axis direction) can be measured for the entire surface of the DUT 7. By taking the difference between the specific optical path lengths between the measurement positions, a relative displacement in the height direction is obtained, so that even if there is a response delay of the camera 10, it can be eliminated.

  Further, the imaging data stored in the memory 13 is stored at predetermined time intervals as described above (FIG. 2A is a continuous representation by connecting them). Becomes discrete. If this time interval (timing) is fine enough to be ignored with respect to the period of interference fringes (interval between fringe amplitudes) in FIG. The point indicating the maximum value among the maximum points of (luminance data) may be obtained as the peak position, or the peak position of the envelope obtained by connecting the maximum points may be obtained by calculation. Since it is discrete, the maximum point may not match the peak position of the envelope. In this case, it is necessary to estimate and determine. For example, since the interference fringe characteristic is smooth, it may be obtained by interpolation calculation from the front and rear local maximum points. Regardless of the time interval of the imaging data and the period of the interference fringes, the signal processing means 20 may be obtained by discrete processing as described in JP-A-9-318329.

  As described above, according to the present embodiment, the specific optical path length can be measured even when the camera 10 has a response delay. However, when the speed of changing the optical path length is high, the horizontal axis of the interference fringes is shifted, and Since the amplitude is crushed, there is a limit to the rate of change at which interference fringe peaks can be identified. Therefore, the speed at which the optical path length is changed is set to a speed at which the peak (position) of the interference fringes can be specified as will be described below.

  Next, when reproducing interference fringes from discrete imaging data and obtaining the peak (the position) of the interference fringes, a predetermined time interval (sampling interval) when acquiring the imaging data at that time, an optical path length change rate Next, the relationship such as the accumulation time of the camera 10 will be described.

  In order to reproduce interference fringes from discrete imaging data and to obtain the peak (position) of the interference fringes, the predetermined time interval of the imaging data, that is, the sampling interval is ½ or less of the period of the interference fringes according to the sampling theorem. Need to be. More precisely, since the spectrum of interference fringes has a spread, it is necessary to make the sampling interval finer accordingly. Therefore, in practice, it is desirable to use it with 1/3 or less of the period of interference fringes.

  The storage time (so-called exposure time) of the camera 10 is a maximum of the sampling interval, assuming that the transfer time of imaging data of the elements (photodetection elements) constituting the camera 10 is sufficiently short and can be ignored. Although accumulation (exposure) is possible, it is preferable to set it in consideration of the S / N and saturation level in a time range shorter than 1/3 of the period of interference fringes.

  As another problem in continuously changing the optical path length, the camera 10 has been described as imaging a desired area at one time. However, in practice, since the imaging data shown in FIG. There is a problem that the data between the image sensors is acquired at different times by the time required for scanning, and the change of the optical path length proceeds during that time. One method for solving this temporal data shift is to correct from these values because the position of the image sensor, the scan order, and the optical path length variable speed are known.

"2. Measurement sensor layout"
FIG. 1 is a diagram illustrating an optical functional configuration. In FIG. 1, the measurement sensor 40 includes a collimator lens 2, a beam splitter 3, an objective lens 4, a beam splitter 5 (optical path forming unit), and an imaging lens 9. , And a camera 10. There are several possible modifications, such as inserting the light source 1 into the measurement sensor 40 or taking the camera 10 out, but at least the beam splitter 5 (which forms interference with the object to be measured 7) that forms the measurement optical path 5 a. It is essential that the optical path forming part to be raised is also incorporated. Each element included in the measurement sensor 40 is housed in or built in the optical system outer casings 105a and 105b of FIG. The optical axis of the optical path extended from the measurement optical path 5a in FIG. 1 to the camera 10 corresponds to the optical axis 100 in FIG. 4 (Z axis in FIG. 4). In FIG. 4, the optical path from the lower end on the Z axis of the optical system outer casing 105b to the DUT 7 corresponds to the measurement optical path 5a.

“3. Parallelism adjustment mechanism”
The configuration and operation of the parallelism adjusting mechanism will be described with reference to FIGS. 4, 5, and 6.

“3.1 Tilt mechanism”
The reference position of the parallelism adjusting mechanism in FIG. 4, that is, the position that becomes the base of the inclination, is fixed to a base (not shown) on which the object to be measured 7 is mounted and substantially perpendicular to the Z-axis direction. In this embodiment, the position of the holding member 104a (fixed portion is not shown) will be described.

  A part of the center of gravity in the length direction of the optical system outer casings 105 a and 105 b incorporating the measurement sensor 40 is accommodated in the case 105. In FIG. 4, the optical system outer casings 105 a and 105 b are cylindrical and the case 105 is rectangular. However, these may be an integral case and may be all rectangular, or all circular. Or an elliptical cylinder may be sufficient. The former is easier to fix after adjusting the parallelism.

  The parallelism adjustment is to adjust the degree of orthogonality (parallelism) between the optical axis of the measurement sensor 40 (a plane parallel to the measurement sensor 40) and the plane portion of the DUT 7 as described above. Is housed and fixed in the case 105 and can be adjusted by changing the inclination of the case 105 as a result. Therefore, the following description will be made with the inclination of the case.

  The case 105 has a circular X-axis pin hole 101a in the vicinity of the center of gravity thereof and in a direction intersecting with the optical axis 100 at substantially the center of the width in the Y-axis direction on both sides in the X-axis direction. Is provided. Then, two pin support members 103 a made of a flat plate are disposed so as to surround the sides of the both sides of the case 105 in parallel with the optical axis 100. The two pin support members 103a include X-axis parallel pins 101 that are inserted into the X-axis pin holes 101a. The pin support member 103a supports the X-axis parallel pin 101 so that the case 105 can be inclined (rotated) about the X-axis.

  Further, the two pin support members 103a are coupled and fixed by an X-axis holding member 103b that is a flat plate disposed therebetween. Therefore, with the two pin support members 103a and the X-axis holding member 103b (hereinafter, the configuration including these is referred to as the “first holding mechanism 103”), the substantially center of gravity portion of the case 105 is centered from three directions. The shape is covered in a letter shape. The Y-axis pin hole is directed from the approximate center of the width in the X-axis direction of the X-axis holding member 103b to the direction intersecting the optical axis 100 and intersecting the line connecting the two X-axis pin holes 101a. 102a is provided (see FIG. 5), and the Y-axis parallel pin 102 can be inserted. The holding member 104a (second holding mechanism) supports the Y-axis parallel pin 102 so that the first holding mechanism 103 can be tilted (rotated) around the Y axis.

  Since the first holding mechanism 103 holds the case 105 so as to be tiltable about the X-axis parallel pin 101 (X-axis), there is a spatial margin between the first holding mechanism 103 and the case 105 as shown by point A in FIG. (It may be a gap, or there may be an allowance for sliding rotation although there is no gap.). Similarly, between the first holding mechanism 103 and the holding member 104a, as shown by a point B in FIG. 5, the first holding mechanism 103 with respect to the holding member 104a is provided with a spatial margin. The Y axis parallel pin 102 (Y axis) can be tilted (rotated).

“3.2 Adjustment mechanism”
In the present embodiment, as means for adjusting the parallelism, the same ball plungers 103d and 104d as spring members and the same micrometers 103e and 104e as pressure adjusting members are used.

  The ball plunger 103d and the micrometer 103e sandwich the first holding mechanism 103 with the holding member 104a by the attachment member 104f, face each other along the X axis, and are separated from the Y axis parallel pin 102 on the Z axis. It is attached to a position (because it is easier to apply a rotational torque when separated at a higher or lower position).

  The ball plunger 103d is threaded on the outside of the cylindrical shape, and the degree of insertion into the screw hole provided in the attachment member 104f attached to one of the holding members 104a can be adjusted. A ball is held at the tip by an internal spring so as to push against the side surface of the first holding mechanism 103. The micrometer 103e is attached to an attachment member 104f attached to the other of the holding members 104a. When the operator turns the outer knob (the stitch portion in FIG. 5), the inner core portion becomes the first one. The side surface of the holding mechanism 103 is pressed. Therefore, by turning the knob of the micrometer 103e and adjusting the pressing force, the inclination can be adjusted as shown in FIG.

  The ball plunger 104d is attached to the X-axis holding member 103b, and the micrometer 104e is attached between the two pin support members 103a by the attachment member 103f, and is opposed to each other along the Y-axis and on the Z-axis. It is attached at a position distant from the X-axis parallel pin 101 (because it is easier to apply rotational torque when it is separated at a higher or lower position).

  The ball plunger 104d is threaded on the outside of the cylindrical shape, and the degree of insertion into the screw hole provided in the X-axis holding member 103b can be adjusted. A ball is held at the tip by an internal spring so as to push against the side surface of the case 105. The micrometer 104e is attached to the attachment member 103f, and the inner core portion presses the side surface of the case 105 when the operator turns an outer knob (knitting portion in FIG. 5). Therefore, by turning the knob of the micrometer 104e to adjust the pressing force, the inclination can be adjusted as shown in FIG. 6B.

  FIG. 6 is a diagram illustrating how the parallelism is adjusted. In FIG. 6B, the inclination of one side of the case 105 is adjusted by rotating the micrometer 104e to change the pressing force along the Y-axis to the case 105 and rotating it around the X-axis parallel pin 101. It shows what you can do. At this time, the holding member 104a and the first holding mechanism 103 do not move. FIG. 6A shows the other inclination of the case 105 by turning the micrometer 103e to change the pressing force in the X-axis direction to the first holding mechanism 103 and rotating it around the Y-axis parallel pin 102. Indicates that it can be adjusted. At this time, the holding member 104a does not move.

  After the parallelism adjustment, the screw between the case 105 and the first holding mechanism 103 is screwed into the screw hole (not shown) provided in the case 105 from the X-axis fixing hole 103c provided in the two pin support members 103a. Are inserted and fixed (in this example, each of the two pin support members 103a is four places). The first holding mechanism 103 and the holding member 104a are passed through a Y-axis fixing hole 104b provided in the X-axis holding member 103b and fixed to a screw hole (not shown) provided in the holding member 104a with a screw (this) In the example, four places above and below the case 105a). Each of the X-axis fixing hole 103c and the Y-axis fixing hole 104b has a slight adjustment because the inclination adjustment range is 1 to 2 degrees, and at most several degrees.

  After fixing the inclination of the case 105 to the holding member 104a, the ball plunger 103d and the micrometer 103e can be removed by removing the mounting member 104f from the holding member 104a. The micrometer 104e can be removed by removing the attachment member 103f from the pin holding member 103a. Thus, after adjusting the inclination of the case 105, that is, after adjusting the parallelism, the shape can be measured by removing the adjusting jig.

"3.3 Adjustment method"
In the parallelism adjustment, the measurement object 7 having a flat surface on average, or a flat plate member for calibration instead, is arranged as a measurement object, and the shape is actually measured with the functional configuration of FIG. At that time, the output of the camera 10 of FIG. 1 is displayed on the display means 18a via the display control means 18c. Then, the Z-axis stage 41 on which the measurement sensor 40 is mounted is manually driven from the operation means 18b and moved in the Z-axis direction to set the optical path length of the measurement optical path 5a so that an interference fringe is generated at the center of the display surface. To do. FIG. 7A shows an interference fringe waveform by the measurement sensor 40 captured by the camera 10 at that time. Then, the micrometers 103e and 104e are rotated so that the number of interference fringes on the display surface is minimized and the width of each interference fringe is maximized (see FIG. 7B). The adjustment ends when both are minimum and maximum. As a general rule, if the plane of the object to be measured is ideally flat and the parallelism is ideally adjusted, only one point of the interference fringe displayed is the peak value in FIG. Therefore, the entire display screen appears to be present in one interference fringe. However, there is actually some error (in the case of the object to be measured, since it is an average plane, naturally interference fringes appear uneven), so as described above, the inclination is adjusted at the minimum and maximum points. Finish.

  Thus, by actually observing the interference fringes, the inclination of the device under test 7 and the measurement sensor 40 can be adjusted, so that the adjustment is easy.

  Of the above configuration, the signal processing unit 20, the optical path length control unit 16, and the display control unit 18c can be configured by a CPU and a memory.

It is a figure showing the optical function structure of this invention. It is a figure for demonstrating the measurement by the structure of FIG. It is a figure which shows the arrangement | sequence of an image pick-up element. It is a perspective view which shows the structure of a parallelism adjustment mechanism. It is sectional drawing seen from the upper part of FIG. It is a figure for demonstrating the inclination adjustment of the 1st holding | maintenance mechanism containing a case. It is a figure for demonstrating the adjustment (balance degree adjustment) of an interference fringe.

Explanation of symbols

1 light source, 2 collimator lens, 3 beam splitter, 4 objective lens,
5 Beam splitter, 5a Measurement optical path, 5b Reference optical path, 6 Reference mirror,
7 DUT, 8 Piezo, 9 Imaging lens, 10 Camera,
13 memory, 14 optical path length detection means,
15 displacement calculation means, 16 optical path length control means, 18 user interface,
20 signal processing means, 40 measurement sensor, 41 Z-axis stage 100 optical axis, 101 X-axis parallel pin, 101a X-axis pin hole,
102 Y-axis parallel pin, 102a Y-axis pin hole 103 First holding mechanism, 103a Pin support member,
103b X-axis holding member, 103c X-axis fixing hole,
103d Ball plunger, 103e Micrometer, 103f Mounting member,
104 second holding mechanism, 104a holding member, 104b Y axis fixing hole,
104d ball plunger, 104e micrometer, 105 case,
105a, 105b Optical outer casing

Claims (5)

The broadband light is incident on both the broadband light source (1) that outputs broadband light, and the reference optical path in which the reference mirror is disposed at the far end and the measurement optical path in which the object to be measured having a plane is disposed at the far end. An optical path forming unit (5) for combining and outputting the reflected light from the plane of the object to be measured and an imaging means (10) for imaging the combined reflected light output from the optical path forming unit And a three-dimensional shape measuring apparatus that measures the shape of the plane of the object to be measured based on the interference fringes based on the combined wave,
A case (105) containing at least the optical path forming portion, sandwiching the measurement optical path, and provided with a first hole (101a) on each of two surfaces facing in parallel to the measurement optical path;
The second hole (102a) has a shape surrounding the two opposite surfaces of the case and the other surface between the two surfaces, and a second hole (102a) at a position corresponding to a central portion of the other surface in the surrounding direction. A first holding mechanism (103) for supporting the first shaft member (101) inserted into each of the first holes and holding the case in a tiltable manner;
A first holding member that supports the second shaft member (102) inserted into the second hole from a direction orthogonal to the axial direction of the first shaft member and holds the first holding mechanism in a tiltable manner. A three-dimensional shape measuring apparatus comprising two holding mechanisms (104). A first spring member (104d) and a first pressure adjusting member (104e) for pressing the case oppositely from the second axial direction;
A second spring member (103d) and a second pressing adjustment member (103e) for pressing the first holding mechanism in opposition from the axial direction of the first shaft member;
2. The configuration in which the inclination of the case can be adjusted by the first pressing adjustment member, and the configuration in which the inclination of the first holding mechanism can be adjusted by the second pressing adjustment member. The three-dimensional shape measuring apparatus described in 1. Display means (18a);
Display control for displaying the change in interference fringes based on the combined image picked up by the image pickup means so as to be visible when the inclination is adjusted by the first pressure adjusting member and / or the second pressure adjusting member. The three-dimensional shape measuring apparatus according to claim 2, further comprising means (18c).   The case whose inclination is adjusted by the first pressure adjusting means is configured to be fixed to the first holding mechanism, and the first holding mechanism whose inclination is adjusted by the second pressure adjusting means is the first holding mechanism. The three-dimensional shape measuring apparatus according to claim 2 or 3, wherein the three-dimensional shape measuring apparatus is configured to be fixed to the second holding mechanism.   The first spring member and the first pressing adjustment member can be attached to and detached from the first holding mechanism, and the second spring member and the second pressing adjustment member can be attached to the second holding mechanism. The three-dimensional shape measuring apparatus according to claim 4, wherein the three-dimensional shape measuring apparatus is configured to be detachable.

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