JP2018054525A - Defect inspection device and defect inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a defect inspection device which facilitates recognizing relevance between a result of defect inspection and a result of film thickness measurement of an inspection object.SOLUTION: The defect inspection device for inspecting an inspection object while transporting the inspection object in a transport direction, includes: a defect detection unit which detects defects of the inspection object on the basis of image data obtained from a line sensor; a film thickness measuring unit which measures a film thickness of the inspection object in a direction orthogonal to the transport direction of the inspection object; and an inspection result generation unit which generates an inspection result map where the defect detection result obtained by the defect detection unit and the film thickness measured by the film thickness measuring unit are represented on a map representing coordinates corresponding to the inspection object, on the basis of the defect inspection result including the defect detection result and first coordinates indicating a position of the defect detection result on the inspection object and the film thickness measurement result including the film thickness and second coordinates indicating a position where the film thickness is measured on the inspection object.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a defect inspection apparatus and a defect inspection method for obtaining a measurement result and a defect inspection result of a film thickness apparatus.

  Detects continuous sheet-like material such as optical film, and measures the film thickness of the continuous sheet-like material with a film thickness device in parallel with the device that detects defects such as dirt and scratches on the continuous sheet. There is known a defect inspection apparatus that acquires information on the length. Such a defect inspection apparatus is disclosed in Patent Document 1, for example. In this Patent Document 1, a sheet-like object is sandwiched between a receiving roll and a touch roll, and the thickness of the sheet-like object is measured according to the movement of the touch roll, and the defect inspection result and film thickness measurement obtained from the defect inspection apparatus are measured. The configuration for obtaining the results is described.

JP-A-9-304026

  Here, when the inspection of the inspection object is performed, when both the defect inspection result and the film thickness measurement result are obtained, there is a relationship between the defect inspection result and the film thickness measurement result. It may be determined whether or not. For example, if the position on the inspection object where the defect is detected as the defect inspection result and the position on the inspection object where it is detected that there is an abnormality in the film thickness as a result of the film thickness measurement, There may be relevance in these measurements. On the other hand, there is a possibility that there is no relevance when those positions are separated to some extent. It is desirable that such a relationship can be easily determined.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a defect inspection apparatus and a defect inspection method that can easily grasp the relationship between the result of defect inspection of an object to be inspected and the result of film thickness measurement. It is to provide.

In order to solve the above-described problems, the present invention is a defect inspection apparatus that inspects an object to be inspected while being conveyed in the conveyance direction, and is based on image data obtained from a line sensor. A defect detection unit that performs detection, a film thickness measurement unit that measures a film thickness of the inspection object with respect to a direction orthogonal to a conveyance direction of the inspection object, and defect detection obtained by the defect detection unit A defect inspection result including a result and a first coordinate representing a position of the defect detection result in the inspection object, a film thickness measured by the film thickness measurement unit, and the inspection object in which the film thickness is measured. Based on the film thickness measurement result including the second coordinates representing the position, the defect detection result and the film thickness measurement result are represented with respect to a map representing coordinates corresponding to the inspection object Generate result map It has a 査 result generation unit, and an output unit for outputting a test result map generated by the inspection result generation unit.
For example, if the film thickness measurement result and the defect detection result overlap the position where the film thickness abnormality is present and the position where the defect is detected in the inspection result map, the defect is caused by the film thickness abnormality. It can be judged.

Further, the present invention provides the above-described defect inspection apparatus, wherein the film thickness measurement unit is provided on the downstream side of the defect detection unit in the conveyance direction of the inspection object, and the film thickness measurement unit is the defect detection unit The film thickness is measured with respect to the position corresponding to the coordinates where the defect is detected.
As a result, the film thickness can be measured at a position corresponding to the coordinates where the defect is detected by the defect detection unit, so that the film thickness can be grasped for the position of the defect, and the relationship between the defect and the film thickness can be determined. I can grasp it.

Further, the present invention is the above-described defect inspection apparatus, wherein the film thickness measurement unit is a measurement section that performs measurement on a measurement target portion of the inspection object, and is approximately at the center of the measurement section in the conveyance direction of the inspection object. Measure so that the defect is located.
As a result, since the measurement is performed so that the defect is positioned substantially in the center of the measurement section in the conveyance direction of the inspection object, even if the conveyance speed of the inspection object is being accelerated or decelerated, The film thickness can be measured with the position being the center.

Further, according to the present invention, in the above-described defect inspection apparatus, the inspection result generation unit generates the inspection result map in which the film thickness measurement result is in an aspect corresponding to the measured film thickness.
In the defect inspection apparatus described above, the inspection object may have a multilayer structure, the film thickness measurement unit may measure the film thickness of each layer of the inspection object, and the inspection result generation unit may The inspection result map is different for each layer, and each inspection result map generates an inspection result map including the film thickness of the corresponding layer and the defect inspection result.
In the defect inspection apparatus according to the present invention, the film thickness measurement unit is provided on the downstream side of the first film thickness measurement unit and the first film thickness measurement unit in the conveyance direction of the inspection object. A second film thickness measurement unit, and the first film thickness measurement unit measures the plurality of measurement target sites with respect to the conveyance direction of the inspection object, and includes the second film between the measurement target sites. The thickness measuring unit measures the film thickness at a plurality of locations as the measurement object in the transport direction.

  According to the present invention, since the inspection result map in which the film thickness measurement result and the defect detection result are represented on the same map is generated, the film thickness measurement result and the defect detection result are coordinated on the inspection object. Since the positional relationship can be easily grasped, it is easy to grasp the relationship between the film thickness and the defect based on this positional relationship.

It is a schematic block diagram which shows the structure of the defect inspection apparatus 1 by one Embodiment of this invention. It is a flowchart explaining the flow of the process of the film thickness measurement of a defect inspection apparatus 1, and a defect detection. It is a figure which shows the control timing of the test | inspection part 17 and the film thickness measurement part 16. FIG. It is a figure which shows an example of a film thickness measurement. It is a figure which shows an example of a film thickness measurement. It is a figure which shows an example of a film thickness map display. It is a figure which shows an example of a film thickness map display. It is a figure which shows an example of the defect detection map which the test | inspection part 17 produces | generates. It is a figure which shows an example of the inspection map which combined the defect detection result and film thickness information. It is a figure which shows an example of the inspection map which combined the defect detection result and film thickness information. It is a figure which shows the film thickness measurement and the process step of a defect detection in 2nd Embodiment. It is a figure which shows the control timing of the film thickness measurement part 16 in the defect inspection apparatus of 2nd Embodiment. It is a figure which shows the relationship between the imaging part 11 and the film thickness sensor 14 in 2nd Embodiment. It is a figure which shows the relationship between the imaging part 11 and the film thickness sensor 14 in 2nd Embodiment. It is a figure which shows the relationship between the position of the defect classified into a film thickness, and the range where a film thickness sensor 14 performs a measurement. It is a figure which shows an example of the map which combined the defect detection and film thickness information of 2nd Embodiment. It is a figure showing the structure of the defect inspection apparatus in 3rd Embodiment. It is a figure which shows the film thickness measurement in 3rd Embodiment, and the process step of a defect detection. It is a figure explaining the film thickness measurement and the process step of a defect detection in 4th Embodiment. It is a figure which shows the control timing of the defect inspection apparatus and film thickness apparatus in 4th Embodiment. It is a figure which shows an example of the film thickness map which is a result of the film thickness measurement in 4th Embodiment. In 4th Embodiment, it is a figure which shows an example of the film thickness map which is a result of the film thickness measurement at the time of using a multipoint film thickness apparatus.

Hereinafter, a defect inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram showing a configuration of a defect inspection apparatus 1 according to an embodiment of the present invention.
The defect inspection apparatus 1 includes an imaging unit 11, a defect detection unit 12, a rotary encoder 13, an inspection unit 17, a film thickness sensor 14, a robot 15, and a film thickness measurement unit 16, and inspects the inspection object 50.
The object to be inspected 50 is a continuous sheet, such as a metal plate coated with a film or a transparent film, a rubber plate, a resin plate, or the like. In the following embodiments, a case where the inspection object 50 is a film will be described as an example. The inspection object 50 has a long shape in the conveyance direction described later. The short axis direction of the inspection object 50 corresponds to the width direction (X axis direction), and the long axis (long length) direction (Y axis direction) corresponds to the transport direction.

The imaging unit 11 is configured to include a line illumination device that illuminates the entire width of the inspection object 50 and a line sensor that receives the transmitted light or reflected light. The longitudinal direction of the imaging range of the imaging unit 11 is arranged to be orthogonal to the traveling direction of the inspection object 50.
For example, a fluorescent lamp, quartz rod illumination, LED illumination, or the like is used for the line illumination device. As this line sensor, for example, one having 2048 to 8192 elements is used. As for the number of elements, a predetermined number of elements and speeds (for example, data rate, scan rate, etc.) are used according to the width, traveling speed, resolution, installation space, etc. of the inspection object 50. . Further, the line sensor receives the transmitted light that is transmitted from the inspected object 50 by the light emitted from the line illumination device. Receiving of the transmitted light by the line sensor is performed in a state where the inspection object 50 is transported in the transport direction. The line sensor outputs an electrical signal (defect data) corresponding to the color tone of the surface of the inspection object 50 to the defect detection unit 12. In other words, the line sensor outputs an electrical signal corresponding to the light intensity distribution on the surface of the inspection object 50 in units of lines (hereinafter referred to as inspection lines) in a direction orthogonal to the traveling direction of the inspection object 50. Examples of the line sensor include a CMOS (complementary MOS) camera and a CCD (Charge-Coupled Device) camera.

  The line illumination device of the imaging unit 11 is disposed on the back side of the inspection object 50, and the line sensor of the imaging unit 11 is disposed on the front side of the inspection object 50. Here, the case where the transmitted light that has passed through the inspection object 50 is received by the line sensor will be described. However, the line illumination device is arranged on the surface side of the inspection object 50, and the light from the line illumination device is inspected. A configuration may also be adopted in which the reflected light reflected by the object 50 is received by a line sensor.

  The defect detection unit 12 includes an image processing computer and an image board connected to the line sensor of the imaging unit 11 and detects a defect of the inspection object 50 based on image data obtained from the line sensor. The defect detection unit 12 includes, for example, a binarization unit, a run length encoding unit, and a connectivity processing unit. The defect detection unit 12 binarizes the defect data input from the line sensor of the imaging unit 11 based on a predetermined threshold, compresses the defect data, performs connectivity processing, and performs defect feature values ( Information indicating the feature of the defect shape (for example, the perimeter, area, width, length, aspect ratio, area ratio of the defect) is measured. As this defect detection unit 12, an image processing apparatus LSC-6000 manufactured by MEC Co., Ltd. can be used.

  The rotary encoder 13 measures the inspection length based on the number of rotations of the transport roll by bringing the wheels of the measuring unit included in the rotary encoder 13 mainly into contact with the transport roll. This transport roll transports the inspection object 50 in the transport direction. Here, the inspection length represents a distance from the inspection start position in the Y-axis direction of the inspection object 50.

The film thickness sensor 14 is reciprocated in the width direction of the inspection object 50 by being conveyed by the robot 15 in a direction orthogonal to the conveyance direction of the inspection object. The moving range of the film thickness sensor 14 is determined according to the product width obtained by the inspection unit 17. This product width can detect the positions of both ends of the inspection object 50 when the imaging result obtained from the imaging unit 11 is subjected to data analysis in the defect detection unit 12.
The film thickness sensor 14 has an optical fiber that irradiates the object 50 with light from a light source. The film thickness sensor 14 reflects light reflected from the surface of the inspection object 50 and each layer in the laminated structure of the inspection object 50 by the light receiving portion of the incident probe head. Receive light. The received light is incident on the film thickness measuring unit 16 through an optical fiber.

  The robot 15 has a linear guide rail provided along a direction along the width direction of the inspection object 50 (a direction orthogonal to the transport direction), and a moving table that moves along the guide rail. The moving table is moved according to the control signal from the inspection unit 17. The robot 15 is, for example, a uniaxial robot. The film thickness sensor 14 is placed on the moving table, and the film thickness sensor 14 is reciprocated in the width direction of the inspection object 50 along the guide rail. In this embodiment, the case where the robot 15 is arranged on the downstream side of the imaging unit 11 in the conveyance direction of the inspection object 50 will be described. However, the robot 15 may be arranged on the upstream side of the imaging unit 11. Good.

The film thickness measurement unit 16 is a spectroscopic film thickness measurement device. Visible light halogen is used as the light source, and light is emitted to the optical fiber of the film thickness sensor 14. Further, the film thickness measuring unit 16 enters the light emitted from the optical fiber and reflected from the inspection object 50 through the incident probe head of the film thickness sensor 14, and splits the incident light to measure the film thickness. Do. In this case, since the film thickness measurement unit 16 is a film thickness measurement device that utilizes reflection of visible light, only the transparent film and the transparent coating layer are measured. However, the inspection object 50 is composed of a plurality of layers. Even if it is, the film thickness can be measured for each layer.
The film thickness measuring unit 16 measures the thickness of the inspection object 50 while moving the film thickness sensor 14 for measuring the thickness of the inspection object 50 in the width direction of the inspection object 50.

Based on the encoder value obtained from the rotary encoder 13, the inspection unit 17 calculates the distance by which the inspection object 50 is transported in the transport direction, and obtains the coordinate value of the y coordinate.
In addition, the inspection unit 17 outputs a control signal indicating an instruction to perform film thickness measurement and the film thickness measurement unit 16 to the robot 15. The inspection unit 17 obtains the coordinate position x in the X-axis direction of the robot 15 and the control signal when the control signal is output with respect to the film thickness information obtained from the film thickness measurement unit 16 according to the control signal. Coordinates (x, y) consisting of the encoder values obtained from the rotary encoder 13 at the time of output are stored in association with each other. However, here, the coordinates stored in association with each other are corrected as described later.

The inspection unit 17 includes a defect inspection result including the defect detection result obtained by the defect detection unit 12 and a first coordinate indicating a position of the defect detection result on the inspection object, and a film measured by the film thickness measurement unit 16. The defect detection result and the film thickness measurement result correspond to the inspection object 50 based on the film thickness measurement result including the thickness and the second coordinate representing the position in the inspection object where the film thickness is measured. An inspection result map represented for a map representing coordinates is generated.
The inspection unit 17 outputs the obtained inspection result on the screen of the display device. This display device may be included in the inspection unit 17, or a display such as a liquid crystal display device may be connected to the outside. The output may be not only display on the screen but also output of electronic data or printing.

The inspection unit 17 acquires the defect inspection result output from the defect detection unit 12, the film thickness information output from the film thickness measurement unit 16, and the robot position (x, y) at the time of film thickness measurement.
When the coordinates of the defect center detected by the imaging unit 11 are (X, Y) and the coordinates of the robot 15 (film thickness sensor 14) are (x, y), the inspection unit 17 uses the coordinates as follows. Make corrections.
When the origin of the robot 15 (film thickness sensor 14) in the X-axis direction is 0, and the product end (product start point end) in the X coordinate of the imaging unit 11 is W ₀ = ₀ mm, the robot 15 (film thickness sensor 14) The x coordinate of the (film thickness sensor 14) (x coordinate of the robot 15 corresponding to the product end W ₀ = ₀ mm) is x = Δx mm. Therefore, the inspection unit 17 obtains the x coordinate of the robot 15 (film thickness sensor 14) based on X = x−Δx.
If the y coordinate of the film thickness sensor 14 is assumed to be L mm away from the Y coordinate of the imaging unit 11, an offset process of L mm is performed from the current position of the film thickness sensor 14 to correct the coordinate deviation with the imaging unit 11. . Therefore, the inspection unit 17 obtains the y coordinate of the robot 15 (film thickness sensor 14) based on Y = y−L (y = Y + L). Here, L represents the distance between the imaging unit 11 and the film thickness sensor 14.
The inspection unit 17 corrects such coordinates, thereby matching the coordinates (x, y) of the film thickness sensor 14 with the coordinates (X, Y) of the imaging unit 11. This defect inspection result includes a coordinate X in the X-axis direction that represents the coordinates of the inspection object 50 in which the defect is detected, a coordinate Y in the Y-axis direction, and the result of the defect inspection.

  Table 1 shown below is a table for explaining examples of equipment and inspected object 50 used when inspecting in the defect inspection apparatus 1 described above. Although this embodiment has been described with reference to this table, the present invention is not limited to this, and various devices and inspected objects 50 can be applied.

FIG. 2 is a flowchart for explaining the flow of film thickness measurement and defect detection processing (the first pass of film thickness measurement from the start of inspection) of the defect inspection apparatus 1 in FIG.
Step S11: The inspection unit 17 starts defect inspection. Here, the inspection unit 17 resets the value of the Y coordinate of the inspection object 50 as Y = 0 at the start of the defect inspection, and obtains the distance that the inspection object 50 is conveyed by the conveyance roll from the rotary encoder 13. Measure based on the encoder value to be obtained. The reset timing is performed, for example, at a timing when an inspection start signal is input by an inspection start button.
The inspection unit 17 detects both ends of the inspection object 50 in the width direction based on the imaging result of the inspection object 50 obtained through the imaging unit 11 and the defect detection unit 12 at the start of inspection. Then, the inspection width (corresponding to the product width) W of the inspection object 50 is measured. Based on this, the inspection unit 17 obtains the X coordinate (Δx) of the product end W _{0 and} sets X = 0.

Step S12: When the robot 15 receives the inspection start control signal from the inspection unit 17, based on the measurement result of the inspection width W, the range in the X-axis direction corresponding to the inspection width W (x = Δx + D to Δx + WD). ). Here, the distance (distance from the product end) D is the position at which film thickness measurement (defect inspection) is actually started from the coordinates of one end of the product end (product end that is a reference for starting defects) in the X-axis direction. The distance to the coordinates to represent.
Here, when the robot 15 moves with the film thickness sensor 14 mounted, the measurement position of the film thickness sensor 14 corresponds to a range in the X-axis direction corresponding to the inspection width W (x = Δx + D to Δx + WD). Move back and forth as you do.

  Step S13: The inspection unit 17 outputs a control signal indicating an instruction to cause the film thickness measurement unit 16 to perform measurement. The film thickness measurement unit 16 performs film thickness measurement based on the result obtained from the film thickness sensor 14 based on the control signal from the inspection unit 17.

  Step S <b> 14: The inspection unit 17 acquires the y-coordinate corresponding to the robot position (measurement position (x coordinate)) when the control signal is output to the film thickness measuring unit 16 and the encoder value of the rotary encoder 13. The film thickness measuring unit 16 is a film thickness measurement result based on the value obtained from the film thickness sensor 14, and coordinates (x, y) representing coordinates in the inspection object 50 that has measured the film thickness. Is output to the inspection unit 17.

  Step S15: The inspection unit 17 outputs an inspection map in real time on the screen of a display device provided inside or outside. Here, the inspection unit 17 displays the defect inspection result and the film thickness measurement result on the inspection map.

Here, the inspection unit 17 obtains the result of the defect inspection obtained from the defect detection unit 12, the coordinate position where the defect inspection was performed, and the coordinates included in the film thickness information output from the film thickness measurement unit 16. Based on the above, the result of the defect inspection and the measurement result of the film thickness are displayed on the same inspection map. In displaying the images in an overlapping manner, the inspection unit 17 corrects the coordinates.
Here, the coordinates (x, y) of the film thickness sensor 14 are
X = x−Δx, Y = y−L
By calculating based on the above equation, the coordinate position is corrected so that the imaging unit 11 has a position corresponding to the (X, Y) coordinate system of the defect inspection result.

FIG. 3 is a diagram illustrating control timings of the inspection unit 17 and the film thickness measurement unit 16 in the above-described embodiment. The horizontal axis represents time results, and the vertical axis represents each part or control item in the defect inspection apparatus 1.
When the defect inspection is started at time T1, the inspection unit 17 measures the product width (inspection width) of the inspection object 50 (inspection width measurement) at the inspection start timing (inspection start).
When the measurement of the product width of the inspection object 50 is completed, at the time T2 when the measurement is completed, the robot 15 moves (robot movement) and moves to the film thickness measurement start position (the product end on the imaging unit reference side). . In addition, at time T3 when the movement of the robot 15 to the film thickness measurement start position is completed, the film thickness measurement unit 16 starts counting the measurement interval (30 mm) based on the signal obtained from the rotary encoder 13. This measurement interval is a distance in the Y-axis direction (a distance by which the inspection object 50 is conveyed). This measurement interval (30 mm) is counted a predetermined number of times (38 times) until the robot 15 reaches the other end side from one end side of the inspection object 50. For example, when the product width is 380 mm and the x-direction measurement interval is 10 mm, the predetermined number of times is 38 times.

  Further, the inspection unit 17 outputs a control signal for requesting film thickness measurement to the film thickness measurement unit 16 at time T3. At time T3, the film thickness measurement unit 16 starts film thickness measurement based on this control signal and performs film thickness data analysis. The inspection unit 17 acquires the position (x coordinate) in the width direction of the robot 15 and the y coordinate of the encoder value obtained from the rotary encoder 13 when the control signal for requesting film thickness measurement is output. The inspection unit 17 calculates the correction of the position of each of the imaging unit 11 and the film thickness sensor 14 based on the formulas X = x−Δx and Y = y−L. At time T4 when the film thickness data analysis in the film thickness measuring unit 16 is completed, the film thickness measuring unit 16 uses the film thickness measurement result obtained as the film thickness data analysis result as the film thickness data. Transmit (transmit film thickness information). Further, the robot 15 is moved to the next film thickness measurement position in the x coordinate (robot movement).

  When the inspection unit 17 detects that the predetermined measurement interval (30 mm) has arrived after starting measurement of the measurement interval at the time T3 based on the encoder value from the rotary encoder 13, it indicates that this measurement interval has arrived. At time T3 ′, which is the detected timing, a control signal for requesting film thickness measurement is output to the film thickness measuring unit 16 to cause the film thickness measuring unit 16 to perform film thickness measurement and film thickness data analysis. At time T3 ', the film thickness measurement unit 16 starts film thickness measurement based on this control signal and performs film thickness data analysis. The position in the X direction where the film thickness is measured at this timing is the position moved to the other end side in the X axis direction of the inspection object 50 by 10 mm from the position in the X direction where the previous measurement was performed.

The inspection unit 17 acquires the position (x coordinate) in the width direction of the robot 15 and the y coordinate of the encoder value obtained from the rotary encoder 13 at the time (time T3 ′) when the control signal for requesting film thickness measurement is output. The inspection unit 17 calculates the correction of the position of each of the imaging unit 11 and the film thickness sensor 14 based on the formulas X = x−Δx and Y = y−L.
The film thickness measurement unit 16 transmits the film thickness data to the inspection unit 17 at time T4 ′, which is the timing when the film thickness data analysis is completed, and moves the robot 15 to the next film thickness measurement position in the X-axis direction. Further, the processing from time T3 ′ to time T4 ′ (time T3 ″ to time T4 ″) is performed, and thereafter, the film thickness sensor 14 is inspected at the inspection start position in the X-axis direction of the inspection object 50 (inspection of the imaging unit 11). Repeat until it reaches the other end side that is opposite to the one end side corresponding to the start reference side end (for example, until the measurement interval count reaches 38). When the film thickness sensor 14 completes the measurement of the film thickness up to the other end side opposite to the inspection start position in the X-axis direction of the inspection object 50, the film thickness measurement unit 16 moves the robot 15 to the inspection object 50. It is moved to the inspection start position in the X-axis direction (the end of the imaging unit 11 on the inspection start reference side).

  In other words, the measurement of the film thickness in the X-axis direction is performed 38 times between time T3 and time T3 ''. Since the distance of the inspection object 50 transported in the Y-axis direction per film thickness measurement is 30 mm, the robot 15 moves 10 mm × 10 mm in the X-axis direction from time T3 to time T3 ″. Since it is 38 times, it advances 380 mm, and the inspection object 50 advances 30 mm × 38 times = 1140 mm in the Y-axis direction.

Here, the conveyance distance (inspection object 50) in which the inspection object 50 is conveyed in the conveyance direction from the time T3 '' when the measurement interval counting ends to the time T3 '''when the next measurement interval counting starts. The conveyance distance (in which the inspection object 50 is conveyed in the conveyance direction) until the robot 15 that has reached the other end of the movement returns to the one end side of the inspection object 50 is 150 mm.
In this embodiment, when the width of the inspection object 50 in the X-axis direction is 380 mm, the robot 15 that has reached the other end side in the X-axis direction of the inspection object 50 is in the X-axis direction of the inspection object 50. The moving time until returning to one end side (inspection start reference side of the imaging unit 11) is 1.5 sec.

  Therefore, when the conveyance speed of the inspection object 50 is 5 m / min, the inspection object 50 is conveyed 125 mm in the Y-axis direction in the movement time 1.5 seconds until the robot 15 returns. Therefore, in this embodiment, the object 50 is transported in the Y-axis direction from time T3 ″ when the measurement interval (30 mm) is counted 38 times to time T3 ′ ″ when the next film thickness measurement is started. The distance was 150 mm with a margin. That is, based on the encoder value of the rotary encoder 13, the film thickness sensor 14 returns from the other end side of the inspection object 50 to the one end side while the inspection object 50 is conveyed 150 mm in the Y-axis direction. Wait until the next film thickness measurement starts.

  Next, the film thickness measurement unit 16 starts counting the measurement interval (30 mm) in the Y-axis direction based on the encoder value from the rotary encoder 13 at time T <b> 3 ″ ″. Similarly, at time T3 ′ ″, a control signal for requesting film thickness measurement is output from the inspection unit 17 to the film thickness measuring unit 16, and upon receipt of this control signal, the film thickness measuring unit 16 performs film thickness measurement and film measurement. Perform thickness data analysis. The inspection unit 17 acquires the coordinates (x, y) of the inspection object 50 when the signal for requesting film thickness measurement is output.

From time T3 to time T4 (or from time T3 ′ to time T4 ′, from time T3 ″ to time T4 ″, or from time T3 ′ ″ to time T4 ′ ″), the measurement time of the film thickness measuring unit 16 It depends on the analysis time required for film thickness data analysis.
For example, the time required for the film thickness measuring unit 16 to measure the film thickness once (one place in the X-axis direction) is 3 msec, the time for analyzing the film thickness data is about 100 msec, and the robot moving time (when the x-direction measurement interval is 10 mm) ) Is 50 msec, the time required from T3 to T3 ′ is about 0.2 sec (= 153 msec). When the inspection speed is 5 m / min, 17 mm is conveyed for 0.2 sec. That is, while the film thickness measuring unit 16 performs measurement at one place in the X-axis direction, the transport distance that is the distance by which the inspection object 50 is transported in the Y-axis direction is 17 mm. Therefore, the measurement interval is set to 30 mm with a margin. Therefore, the film thickness measurement at one place is completed while the inspection object 50 is conveyed 30 mm in the Y-axis direction.

4 and 5 are diagrams illustrating an example of film thickness measurement in the above-described embodiment.
The film thickness measuring unit 16 has a robot movement width 9 corresponding to the inspection width measured by the defect inspection apparatus 1 (the distance that the robot 15 moves from one end side to the other end side in the X-axis direction of the inspection object 50). The film thickness measuring unit 16 repeatedly moves and stops until it reaches the other end side in the X-axis direction of the inspection object 50 in the forward path while 15 reciprocates once, and then the X of the inspection object 50 is measured. Return to one end in the axial direction.
The film thickness sensor 14 measures only the forward path from the film thickness measurement position (start position) 101 to the film thickness measurement position (end position) 103 in the X-axis direction, and does not stop at the film thickness measurement position (intermediate) 102 in the return path. Return to the film thickness measurement position (start position) 101 (without measuring the film thickness). The measurement interval A for measuring the film thickness in the x direction may be arbitrarily set. Note that the film thickness sensor 14 is not measured between the robot zero position 15a and the film thickness measurement position (start position) 101.

In this embodiment, the film thickness of the inspection object 50 whose width (distance in the X-axis direction) from the product end W ₀ to the product end (product end point) W ₁ is 380 mm was measured. The film thickness measurement position (start position) 101 is set to 5 mm (distance D) from the product edge W ₀ , the x-direction measurement interval A is set at 10 mm intervals, and the film thickness measurement is performed 38 times in the X-axis direction in one reciprocation. went.
The film thickness sensor 14 measures while moving in the width direction while the continuous sheet-like object (inspection object 50) is being conveyed in the Y-axis direction. For this reason, the measurement area 131 on the inspection object for measuring the film thickness once shifts in an oblique direction for each measurement.
The width B in the X-axis direction of the measurement area 131 depends on the fiber diameter of the film thickness sensor 14. The film thickness measurement length C in the Y-axis direction of the measurement area 131 depends on the exposure time of the film thickness measurement unit 16 and the conveyance speed of the inspection object 50. The measurement interval E, which is the distance from the measurement start in the Y-axis direction of the measurement area to the measurement start position in the Y-axis direction of the next measurement area, is 30 mm as described with reference to FIG. Become.

6 and 7 are diagrams showing an example of a film thickness map display showing the result of the film thickness measurement in the embodiment described in FIG. 4 and FIG.
According to the measurement method shown in FIGS. 4 and 5, the film thickness is measured on the track 151 (outward path) of the film thickness sensor 14, and the film thickness is not measured on the track 152 (return path) of the film thickness measuring unit.
In FIG. 6, the film thickness map shows the measured area when the film thickness in the region of the normal film thickness is 2.1 μm to 1.9 μm, and when the film thickness is measured to be 1.9 μm or less. Displayed as white (film thickness display F). When the film thickness is measured to be 2.1 μm or more, the measured area is displayed as black (film thickness display G). The film thickness normal part (2.1 μm to 1.9 μm) is displayed as gray (film thickness display H). Then, the film thickness measurement unit 16 follows a display rule that sets the film thickness measurement result to a display mode corresponding to the measured film thickness. For example, the vertical axis indicates the X-axis direction of the inspection object 50 and the horizontal axis indicates the inspection target. The film thickness map 141 displayed in the display mode corresponding to the measurement result of the film thickness is displayed at the position (x, y) corresponding to the X axis and the Y axis in the Y axis direction of the object 50.
Here, the normal thickness portion is determined by the sheet-like product used as the inspection object 50, and is, for example, a value determined as normal in the specification (or standard) of the sheet-like product to be inspected. Determined based on the range.

In FIG. 7, the film thickness map 141 is a film thickness display block 161 that is surrounded by a width I centered on the x position of the measurement start position in the X-axis direction and a distance J from the measurement start position to the next measurement. On the inspection map, the respective film thickness display blocks are sequentially arranged and displayed according to the coordinates measured in the X-axis direction and the Y-axis direction. The width I is the same as the x-direction measurement interval (symbol A in FIG. 5). The distances J are equally spaced.
In the film thickness display block 161, the measurement area 131 is displayed so as to be located at the boundary between the measurement area start position and the next measurement area start position. The measurement area 131 is the center of the film thickness display block 161 (width I and distance). It is also possible to display so as to be positions corresponding to the centers of J).
The film thickness map 141 is generated and displayed by the inspection unit 17 based on the inspection result of the defect detection unit 12 and the measurement result of the film thickness measurement unit 16.

FIG. 8 is a diagram illustrating an example of a defect detection map generated by the inspection unit 17 in the above-described embodiment.
The inspection unit 17 performs defect detection processing based on the image data obtained from the line sensor of the imaging unit 11, generates a defect detection map 170, and displays it on the screen of the display device. The position of the defect displayed on the defect detection map 170 and the symbol indicating the type can be set under the condition of the inspection unit 17.
For example, it can be set as follows.
When a foreign object defect is detected, it is displayed as “◯”. In this figure, the foreign object defect 181 is displayed by “◯” corresponding to the position where this defect is detected. The foreign object defect is, for example, a defect in which the foreign object is attached to the inspection object.
If a mura defect is detected, it is displayed as “☆”. In this figure, the mura defect 182 is displayed by “☆” corresponding to the position where this defect is detected. The uneven defect is a defect in which a convex or concave shape is generated on the surface of the inspection object 50 without being flat.
When a streak defect is detected, it is displayed as “□”. In this figure, the streak defect 183 is displayed by “□” in correspondence with the position where this defect is detected. A streak defect is unevenness or dirt generated continuously in parallel with the transport direction.
Based on this display condition, the inspection unit 17 generates and displays a defect detection map 170 in which a symbol corresponding to the detected defect type is displayed at a position corresponding to the coordinates where the defect is detected. To do.

9 and 10 are diagrams illustrating an example of an inspection map that combines the defect detection result and the film thickness information in the above-described embodiment. FIG. 9 shows an example of the inspection map 23 displaying the first layer among the plurality of layers of the inspection object 50, and FIG. 10 shows the second layer among the plurality of layers of the inspection object 50. It is a figure showing an example of the inspection map 24.
Here, when the inspection object 50 is composed of a plurality of layers, the defect inspection apparatus 1 can perform film thickness measurement for each layer. For example, in the case where the inspection object 50 is constituted by a plurality of layers, a coating layer is formed on one main surface (for example, the surface) of the base film, and the other main surface of the base film In some cases, a coating layer is formed on the back surface (for example, the back surface). In such a case, the thickness of each layer can be measured by performing a curve fitting method or FFT (Fast Fourier Transform) and analyzing the spectrum of the reflected light (or transmitted light) from the inspection object 50. . In this case, a film thickness map is obtained for each layer. For example, when the inspection map 23 (FIG. 9) displaying the first layer among the plurality of layers of the inspection object 50 is compared with the inspection map 24 (FIG. 10) displaying the second layer, the mura defect In addition, it is possible to easily determine in which layer the streak defect has occurred.
Such an inspection map for each layer can select which layer is displayed in accordance with an instruction input via an input device (keyboard or mouse) provided in the inspection unit 17, for example. Specifically, an inspection map for a specific layer may be selected and displayed, or two or more arbitrary layers may be selected and displayed side by side.

In FIG. 9, the inspection map 23 is a result map when the film thickness map and the defect detection map in the first layer are overlaid. In FIG. 10, an inspection map 24 is a result map when the film thickness map and the defect detection map in the second layer are overlaid. 9 and 10, the vertical axis corresponds to the X-axis direction of the inspection object 50, and the horizontal axis corresponds to the Y-axis direction of the inspection object 50. When the coordinates of uneven defects (marks of uneven defects 182, ☆) and streak defects (marks of streaks 183, □) that occur due to abnormal film thickness are within the area of abnormal film thickness obtained by film thickness measurement Is easily confirmed by the inspection map 23 and the inspection map 24. If the coordinates match, it can be classified as a “film thickness defect”.
Here, the inspection unit 17 determines whether or not the coordinates match, for example, when the coordinates of the film thickness information are within a predetermined range of the defect coordinates in the defect inspection result. You may judge.
In FIG. 9, an area having a film thickness different from other areas in the first layer is displayed in a display mode different from the display mode of the other areas. That is, in FIG. 10, in the second layer, it can be seen that the film thickness is within the standard range in any area. In FIG. 9, in the second, the film in the area where the mura defect 182 exists. It can be seen that the thickness is thinner than the other areas, and the film thickness of the area where the streak defect 183 is present is thicker than the other areas.

The second embodiment of the present invention will be described below with reference to the drawings.
The configuration of the defect inspection apparatus 1 in the second embodiment is substantially the same as the configuration in the first embodiment, but the robot 15 installed downstream from the imaging unit 11 has a film at regular intervals in the X-axis direction. Rather than measuring the thickness, based on the fact that the defect detection unit 12 has detected the defect, the film thickness is measured for the coordinates where the defect is detected. That is, the measurement interval A is not applied.

FIG. 11 is a diagram illustrating processing steps of film thickness measurement and defect detection in the second embodiment.
In step S21, the inspection unit 17 starts defect detection, and resets the coordinate Y in the Y-axis direction (Y = 0). Further, the inspection unit 17 measures the inspection width (product width) W to be inspected, obtains the X coordinate (Δx) in the case of the product end W ₀ , and sets X = 0.
In step S <b> 22, when the defect detection unit 12 detects a defect based on the imaging result obtained by the imaging unit 11, the result is classified into a film thickness (unevenness / streaks, etc.). It is determined whether or not it is a defect. When the inspection unit 17 classifies that there is a defect related to the film thickness based on the inspection result of the defect detection unit 12 (when a defect related to the film thickness is detected), the inspection unit 17 moves to the X coordinate where the defect is detected. A signal is output to the robot 15. The robot 15 moves to the designated X coordinate (x = X + Δx) according to this control signal.

  In step S <b> 23, the inspection unit 17 measures the conveyance speed of the inspection object 50 immediately before performing the film thickness measurement, and calculates the film thickness measurement length C (C = conveyance speed × measurement time). The conveyance speed is measured based on, for example, a pulse obtained from a rotary encoder. The inspection unit 17 calculates the position of y = Y + LC−2 based on the encoder value of the rotary encoder 13 from the Y coordinate where the defect is detected, and measures the film thickness sensor 14 at the coordinate y. Output a control signal. Upon receiving this control signal, the film thickness sensor 14 measures the film thickness.

  In step S <b> 24, the film thickness measurement unit 16 outputs the film thickness information obtained by the measurement by the film thickness sensor 14 to the inspection unit 17. In step S25, the inspection unit 17 displays the result map based on the defect detection result, and also superimposes the film thickness information sent from the film thickness measurement unit 16 on the same result map based on the measurement position. To display.

FIG. 12 is a diagram illustrating the control timing of the film thickness measurement unit 16 in the defect inspection apparatus according to the second embodiment.
When a defect classified as a film thickness (unevenness, streaks, etc.) is detected at time T1, the inspection unit 17 causes the robot 15 to detect the coordinate X (x = x = X position) where the defect is detected at time T2. X + Δx).
After the robot 15 moves to the coordinate X (x = X + Δx) at time T2, the conveyance speed is measured at time T3 until the film thickness is measured, and the film thickness measurement length (C = conveyance speed × measurement time). ) Is calculated. Then, based on the Y coordinate when the defect is detected, a control signal for requesting film thickness measurement is output from the inspection unit 17 to the film thickness measuring unit 16 at time T4 obtained from Y + LC−2, and the film thickness is calculated. The measurement unit 16 performs film thickness measurement and film thickness data analysis based on this control signal.
The film thickness measurement unit 16 transmits the film thickness data to the inspection unit 17 at time T5 when the film thickness data analysis ends.

FIGS. 13 and 14 are diagrams illustrating the relationship between the imaging unit 11 and the film thickness sensor 14 in the second embodiment. Here, the film thickness measurement unit 16 starts the measurement so that the defect is located at the approximate center of the measurement section in the conveyance direction of the inspection object 50 in which the measurement target portion of the inspection object 50 is measured. The timing is determined according to the conveyance speed and measured.
When the imaging unit 11 detects a defect classified as a film thickness (unevenness, streaks, etc.), the defect moves to the X coordinate of the defect before reaching the robot 15 (the film thickness sensor 14) (FIG. 13). ). After the robot 15 (the film thickness sensor 14) has moved, the film thickness sensor 14 waits until the defect arrives and measures the film thickness at a timing obtained from Y + LC / 2 (FIG. 14). Thereby, for example, the film thickness sensor 14 can measure the film thickness at the coordinates where the mura defect 182 is detected.
By measuring the film thickness under the above conditions, the film thickness can be measured immediately above the target defect even if the conveyance speed of the inspection object 50 varies. Examples of the case where the conveyance speed of the inspection object 50 fluctuates include the acceleration of the conveyance speed immediately after the start of conveyance of the inspection object 50 and the deceleration of the conveyance speed immediately before the completion of conveyance of the inspection object 50. Or there is an instruction to change the transport speed during transport.

FIG. 15 is a diagram showing the relationship between the position of a defect classified as a film thickness and the range in which measurement is performed by the film thickness sensor 14. In FIG. 15A, when the transport speed is slower than a predetermined speed, the measurement area 131 (so-called range of the inspection object 50 to be exposed) measured by the film thickness sensor 14 is Y of the inspection object 50. This is the range of the distance C1 in the axial direction. The position before C1 / 2 of the mura defect 182 is determined as the film thickness measurement start position (reference numeral 221) so that the mura defect 182 is located at the center of the distance C1, (Y + L-C1 / 2). Measurements are taken from the position. In FIG. 15B, when the transport speed is faster than a predetermined speed, the measurement area 131 (so-called range of the inspection object 50 to be exposed) measured by the film thickness sensor 14 is Y of the inspection object 50. This is the range of the distance C2 in the axial direction. Then, the position before C2 / 2 of the mura defect 182 is determined as the film thickness measurement start position (reference numeral 222) so that the mura defect 182 is located at the center of the distance C2, (Y + L-C2 / 2). Measurements are taken from the position.
Here, when the exposure time is constant, the distance C2 is longer at the distance C1 and the distance C2 because the conveyance speed is faster.

FIG. 16 is a diagram illustrating an example of a map (inspection map 25) obtained by combining defect detection and film thickness information in the second embodiment.
By displaying the defect detection results and the film thickness information obtained in FIGS. 13 and 14 on the result map, it can be easily determined that a film thickness abnormality has occurred at the defect site. Further, when a film thickness abnormality is measured at a position where the defect inspection result is classified as having a film thickness defect, it can be classified as a “film thickness abnormality defect”. In the result map display, when the normal thickness part is 2.1 μm to 1.9 μm, the coordinates measured with the film thickness of 1.9 μm or less are displayed in white as the area including the measured coordinates (film) Thickness display F). When the film thickness is measured as 2.1 μm or more, the area including the measured coordinates is displayed as black (in FIG. 16, there is no defect displayed in black). The measurement area where the film thickness is within the normal value range (2.1 μm to 1.9 μm) is displayed as gray (symbol H). The display of defect detection is set as follows. Further, here, as a defect inspection result, the foreign object defect 181 is displayed by the symbol ◯, the mura defect 182 is displayed by the symbol ☆, and the streak defect 183 is displayed by the symbol □.
Here, the size when the measurement area representing the film thickness measurement position is displayed on the result map is arbitrarily set as the film thickness display block width K in the X-axis direction and the film thickness display block length M in the Y-axis direction. Is possible. The map display of the film thickness measurement position can be centered on the defect center coordinate.

Hereinafter, the third embodiment will be described in detail with reference to the drawings.
FIG. 17 is a diagram illustrating a configuration of a defect inspection apparatus according to the third embodiment. In the third embodiment, the description of the same configuration as that of the first (second) embodiment is omitted, and different points will be mainly described. The third embodiment is different from the first (second) embodiment in that a film thickness sensor 18, a robot 19, and a film thickness measurement unit 20 are provided on the upstream side of the imaging unit 11. . Here, the rotary encoder 13 is illustrated as being located between the robot 19 and the imaging unit 11 in the Y-axis direction. However, if the rotary encoder 13 is at the same conveyance speed as the imaging unit 11 and the film thickness sensors 14 and 18. Anywhere.

FIG. 18 is a diagram illustrating processing steps of film thickness measurement and defect detection according to the third embodiment.
In step S31, the inspection unit 17 starts defect detection. At that time, the Y coordinate is reset (Y = 0). The inspection unit 17 measures the inspection width (product width) W to be inspected, and determines the difference (Δx ₁ , Δx ₂ ) from the x-coordinate when the product end W ₀ is ₀ in the coordinate X, and the robot 15 (Δx ₂ ) and the robot 19 (Δx ₁ ) are calculated. Next, in step S32, based on the measurement of the test width W, the robot 19 (thickness sensor 18) reciprocates the range of _{(x 1 = Δx 1 + D~Δx} 1 + W-D) in the width direction movement To start. Next, in step S <b> 33, the inspection unit 17 issues a control signal to be measured to the film thickness measurement unit 20, and the film thickness measurement unit 20 uses the film thickness sensor 18 based on the control signal from the inspection unit 17. Measure.
In step S <b> 34, the inspection unit 17 determines the position of the robot 19 (measurement position (x ₁ coordinate)) and the y ₁ coordinate of the encoder value at the time of outputting the control signal that causes the film thickness measurement unit 20 to perform measurement. Obtained from the rotary encoder 13.
The film thickness measurement unit 20 outputs the measured film thickness information to the inspection unit 17.

Next, in step S35, the inspection unit 17 displays the defect detection result on the result map. Further, the film thickness information transmitted from the film thickness measuring unit 20 is also displayed on the same result map based on the measurement position.
Here, the coordinates (x ₁ , y ₁ ) of the film thickness sensor 18 are
X = x ₁ −Δx ₁ , Y = y ₁ + L ₁
The coordinates are corrected based on the (X, Y) coordinates of the image pickup unit 11. Here, L ₁ is the distance from the film thickness sensor 18 to the imaging unit 11 in the Y-axis direction.
Next, in step S36, if it is determined that there is a defect classified as "film thickness abnormality defect" based on the above measurement result, a control signal that moves to the X coordinate of the defect is output to the robot 15, The robot 15 moves to the X coordinate (x ₂ = X + Δx ₂ ) where the defect is detected.
The inspection unit 17 measures the conveyance speed of the inspection object 50 immediately before performing the film thickness measurement, and calculates the film thickness measurement length C (C = conveyance speed × measurement time).
Further, the inspection unit 17 outputs a control signal for causing the film thickness sensor 14 to measure the film thickness at a position of y ₂ = Y + L ₂ −C / 2 based on the Y coordinate of the defect obtained from the encoder value. The film thickness sensor 14 measures the film thickness based on this control signal. Here, L ₂ is the distance from the imaging unit 11 to the film thickness sensor 14 in the Y-axis direction.

  In the third embodiment, the control timing of the defect detection unit 12 and the film thickness sensor 14 is the same as that in FIG. 3, and the control timing of the defect detection unit 12 and the film thickness sensor 18 is the same as that in FIG. The relationship between the imaging unit 11 and the film thickness sensor 14 is the same as in FIGS. 13 and 14.

Next, a fourth embodiment of the present invention will be described. The configuration in the fourth embodiment is the same as the configuration in FIG. 17, but some processing contents are different.
FIG. 19 is a diagram for explaining processing steps of film thickness measurement and defect detection in the fourth embodiment.
In step S41, the inspection unit 17 starts detecting defects and resets the coordinate Y in the Y-axis direction (Y = 0). The inspection unit 17 measures the inspection width (product width of the inspection target) W to be inspected, and the difference (Δx ₁ , X) when the X coordinate in the case of the product end W ₀ is X = 0. Δx ₂ ) is calculated for the robot 15 (Δx ₂ ) and the robot 19 (Δx ₁ ).
In step S42, based on the measurement of the test width W, the robot 19 (thickness sensor 18) starts moving back and forth the range in the width direction of the _{(x 1 = Δx 1 + D~Δx} 1 + W-D) . Next, in step S <b> 43, the inspection unit 17 issues a control signal to be measured to the film thickness measurement unit 20, and the film thickness measurement unit 20 uses the control signal from the defect inspection apparatus from the inspection unit 17 by the film thickness sensor 18. The film thickness is measured.
In step S44, the inspection unit 17, the position of the robot 19 when outputting a control signal to the film thickness measuring unit 20 (measuring position _{(x 1} coordinates)) and _{y 1} coordinate encoder values robot 19, from the rotary encoder 13 get.
The film thickness measurement unit 20 outputs the measured film thickness information to the inspection unit 17.

Next, in step S45, the inspection unit 17 displays the defect detection result on the result map. Further, the film thickness information transmitted from the film thickness measuring unit 20 is also displayed on the same result map based on the measurement position.
Here, the coordinates (x ₁ , y ₁ ) of the film thickness sensor 18 are
X = x ₁ −Δx ₁ , Y = y ₁ + L ₁
The coordinates are corrected based on the (X, Y) coordinates of the image pickup unit 11.
Next, when “film thickness abnormality” is measured by the film thickness measuring unit 20 in step S46, a control signal for moving to the X coordinate where “film thickness abnormality” is measured is sent to the robot 15, and the robot 15 Then, it moves to the X coordinate (x ₂ = X + Δx ₂ ) where a defect with an abnormal film thickness is detected.
The inspection unit 17 outputs a control signal for measuring the film thickness from the position y ₂ = Y + L ₂ −J based on the Y coordinate where the film thickness abnormality has occurred. Based on the control signal from the inspection unit 17, the film thickness is measured at the position of the X coordinate (x ₂ = X + Δx ₂ ). The Y axis in this film thickness measurement is performed a plurality of times at equal intervals up to the position y ₂ = Y + L ₂ + J.
Therefore, the measurement interval of the film thickness sensor 14 is finely measured in a range narrower than the measurement interval of the film thickness sensor 18. Here, J is the distance from the measurement position to the next measurement position in the Y-axis direction of the film thickness measurement performed by the film thickness measurement unit 20, and the coordinate on the X-axis is not changed during this period. Therefore, when the “film thickness abnormality” is measured by the film thickness measuring unit 20, the X-axis coordinates where the “film thickness abnormality” is found are the same, and are equally spaced within a certain range in the Y-axis direction. A plurality of film thickness measurements are performed. Thereby, the film thickness can be measured finely within a specific range including the area where the “film thickness abnormality” is measured.

FIG. 20 is a diagram illustrating control timings of the defect inspection apparatus and the film thickness apparatus in the fourth embodiment.
The timing when the film thickness measurement unit 20 measures the film thickness abnormality is time T1.
At time T2, based on the control signal from the inspection unit 17, the robot 15 moves to the X (x ₂ = X + Δx ₂ ) position where the film thickness is abnormal. The inspection unit 17 outputs a control signal for causing the film thickness measurement unit 16 to perform film thickness measurement at time T3 of y ₂ = Y + L ₂ −J based on the Y coordinate of the film thickness abnormality. Upon receiving this control signal, the film thickness measurement unit 16 performs film thickness measurement and film thickness data analysis. Further, at the time T3, counting of the measurement interval (30 mm) is started. At time T4 when the film thickness data analysis is completed in the film thickness measurement unit 16, the film thickness measurement unit 16 transmits the film thickness information to the inspection unit 17.
On the other hand, when the time T3 ′ (T3 ″) of the measurement interval (30 mm) arrives, the inspection unit 17 outputs a control signal for requesting film thickness measurement to the film thickness measurement unit 16, and the film thickness measurement unit 16 Perform measurement and film thickness data analysis.
At time T4 ′ (T4 ″) when the film thickness data analysis in the film thickness measurement unit 16 is completed, the film thickness measurement unit 16 transmits the film thickness information to the inspection unit 17. The measurement interval count is y ₂ = Y + L. performed until ₂ + J. _Accordingly, y 2 = Y ₊ thickness measuring _L from 2 -J at regular intervals in the range of _{y 2 = Y + L 2 +} J is performed. here, the film thickness measurement section 20 at the same X coordinate positions However, when the film thickness abnormality is continuously measured as the defect detection result, the inspection unit 17 keeps counting the measurement interval for the film thickness measurement unit 16 until the film thickness abnormality ends (until the film thickness abnormality disappears). It is possible.
On the other hand, regardless of the measurement timing of the film thickness measurement unit 16, the film thickness measurement unit 20 continuously measures the film thickness. The control timing of the film thickness measuring unit 20 is the same as the timing shown in FIG.

FIG. 21 is a diagram illustrating an example of a film thickness map which is a result of film thickness measurement in the fourth embodiment.
Based on the measurement conditions of the first embodiment described above, when the product width is 380 mm and the measurement is performed at a conveyance speed of 5 m / min, the film thickness measurement unit 20 uses the measurement start position (for example, the first measurement position). 300) to the next measurement position (eg, the second measurement position 301) is 1290 mm (1140 mm when 38 measurements are performed at 30 mm intervals), and 150 mm when the robot moves from the measurement end point to the next measurement start point. Since the distance between the first measurement position and the next measurement position (for example, the third measurement position 302) is adjusted, a distance of 2580 mm is obtained. When the film thickness measurement unit 20 measures the film thickness abnormality in the divided film thickness display block 310 that is a part of the film thickness display block at the second measurement position 301, the film thickness abnormality in the divided film thickness display block 310 is detected. Using the measurement position on the Y axis (second measurement position 301) as a reference, the film thickness measurement unit 16 finely measures the front and rear range in the Y axis direction (from the first measurement position 300 to the third measurement position 302). can do.

More specifically, the film thickness measurement unit 16 determines the film from the Y coordinate (first measurement position 300) that goes back a distance J from the position where the film thickness abnormality is detected by the film thickness measurement unit 20 (second measurement position 301). The thickness measurement is started and the film thickness measurement is performed until the measurement area including the position where the film thickness measurement unit 20 no longer detects the film thickness abnormality is completed (here, up to the third measurement position 302).
In the film thickness measuring unit 20, an area that can be measured only three times (the positions of the first measurement position 300, the second measurement position 301, and the third measurement position 302) is set to 30 mm using the film thickness measurement unit 16. In the case of measurement, a total of 76 measurements from the first measurement position 300 to the third measurement position 302 can be performed. In addition, the measurement area measured by the film thickness measurement unit 16 can be displayed in more detail (with a shorter interval) than the measurement area measured by the film thickness measurement unit 20 in the map display of the film thickness information. Become. For example, when film thickness measurement is performed using only the film thickness measurement unit 20 without using the film thickness measurement unit 16, the range shown from the second measurement position 301 to the third measurement position 302 is regarded as a film thickness abnormality. Although displayed on the screen, the film thickness measurement unit 16 further performs film thickness measurement, and the film thickness information is determined based on the measurement result. The area measured as is displayed as a map in white in a measurement area (divided film thickness display block group 320) narrower than the measurement area from the second measurement position 301 to the third measurement position 302.

In addition, when a multi-point film thickness device (for example, C11295 (manufactured by Hamamatsu Photonics)) different from the film thickness measuring unit 20 is applied to the film thickness measuring unit 16, a plurality of points (2 to 15 in the width direction) are applied. Point) can be measured simultaneously.
FIG. 22 is a diagram showing an example of a film thickness map which is a result of film thickness measurement when a multipoint film thickness apparatus is used in the fourth embodiment. In this example, when a film thickness abnormality is measured in the region 330 in the width direction by the film thickness measuring unit 20 using a multipoint film thickness device as the film thickness measuring unit 16, this is shown in the region 330 in the width direction. In the range, the film thickness can be measured by the multipoint film thickness apparatus (film thickness measuring unit 16), and a plurality of locations (three locations in FIG. 22) can be measured simultaneously in the X-axis direction. As a result, the measurement area measured by the film thickness measuring unit 20 can be divided more finely in the X-axis direction (here, divided into three), the film thickness can be measured for each of the divided areas, and a film thickness map can be created. .

  In the above-described embodiment, since the spectrum of the reflected light from the inspection object is analyzed based on the spectral interference method as the film thickness sensor, the film thickness can be measured without contact with the inspection object. it can. Thereby, when a measuring device using a touch roll is used, it is possible to avoid a decrease in measurement accuracy due to the fact that the position in the height direction does not change mechanically.

In the above-described embodiment, the defect inspection apparatus determines that the film thickness defect (unevenness, streaks, etc.) detected by the defect detection unit matches the film thickness abnormality area obtained from the film thickness measurement unit. It can be classified as an abnormal defect.
Further, the defect inspection apparatus can classify in which coating layer a film thickness defect (unevenness, streaks, etc.) detected by the defect detection unit is generated.

  You may make it implement | achieve the defect inspection apparatus in embodiment mentioned above with a computer. In that case, a program for realizing this function may be recorded on a computer-readable recording medium, and the program recorded on this recording medium may be read into a computer system and executed. Here, the “computer system” includes an OS and hardware such as peripheral devices. The “computer-readable recording medium” refers to a storage device such as a flexible medium, a magneto-optical disk, a portable medium such as a ROM and a CD-ROM, and a hard disk incorporated in a computer system. Furthermore, the “computer-readable recording medium” dynamically holds a program for a short time like a communication line when transmitting a program via a network such as the Internet or a communication line such as a telephone line. In this case, a volatile memory inside a computer system serving as a server or a client in that case may be included and a program held for a certain period of time. Further, the program may be a program for realizing a part of the above-described functions, and may be a program capable of realizing the functions described above in combination with a program already recorded in a computer system. You may implement | achieve using programmable logic devices, such as FPGA (Field Programmable Gate Array).

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and includes designs and the like that do not depart from the gist of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Defect inspection apparatus, 9 ... Robot moving range, 11 ... Imaging part, 12 ... Defect detection part, 13 ... Rotary encoder, 14, 18 ... Film thickness sensor, 15, 19 ... Robot, 15a ... Robot zero position, 16, DESCRIPTION OF SYMBOLS 20 ... Film thickness measurement part, 17 ... Inspection part, 23, 24, 25 ... Inspection map, 50 ... Inspection object, 101 ... Film thickness measurement position (start position), 102 ... Film thickness measurement position (middle), 103 ... Film thickness measurement position (end point position), 131 ... measurement area, 141 ... film thickness map, 161 ... film thickness display block, 151 ... start (outward path), 152 ... orbit (return path), 170 ... defect detection map, 181 ... foreign matter Defect, 182 ... unevenness defect, 183 ... streak defect, 221, 222 ... measurement start position, 300 ... first measurement position, 301 ... second measurement position, 302 ... third measurement position, 310 ... divided film thickness display block, 3 0 ... divided film thickness display block group, 330 ... width direction region, A ... measurement interval, B ... width, C ... film thickness measurement length, C1, C2 ... distance (distance in the Y-axis direction), D ... distance ( ) E ... Measurement interval, F ... Film thickness display (result thinner than normal part), G ... Film thickness display (result thicker than normal part), H ... Film thickness display (normal part), I ... Width (film thickness display block width, first embodiment), J ... distance (film thickness display block length, first embodiment), K ... film thickness display block width, L ... distance (imaging unit and film thickness sensor) ), L ₁ ... distance (distance between film thickness sensor and imaging unit), L ₂ ... distance (distance between imaging unit and film thickness sensor), M ... film thickness display block length, W ... inspection width ( Product width to be inspected), W ₀ ... Product end (product start point end), W ₁ ... Product end (product end point end)

Claims (7)

A defect inspection apparatus that performs inspection while conveying an inspection object in the conveyance direction,
A defect detector for detecting defects in the inspection object based on image data obtained from a line sensor;
A film thickness measuring unit that measures the film thickness of the inspection object with respect to a direction orthogonal to the conveyance direction of the inspection object;
Defect inspection result including the defect detection result obtained by the defect detection unit and the first coordinate indicating the position of the defect detection result in the inspection object, the film thickness measured by the film thickness measurement unit, and the film Based on a film thickness measurement result including a second coordinate representing a position in the inspection object whose thickness is measured, the defect detection result and the film thickness measurement result correspond to the inspection object. A test result generation unit that generates a test result map represented for a map representing
A defect inspection apparatus comprising: an output unit that outputs an inspection result map generated by the inspection result generation unit. The film thickness measurement unit is provided on the downstream side of the defect detection unit in the conveyance direction of the inspection object,
The defect inspection apparatus according to claim 1, wherein the film thickness measurement unit measures the film thickness for a position corresponding to a coordinate in which a defect is detected by the defect detection unit. 2. The film thickness measuring unit is a measurement section in which measurement is performed on a measurement target portion of the inspection object, and the measurement is performed such that the defect is positioned at a substantially center of the measurement section in the conveyance direction of the inspection object. Or the defect inspection apparatus of Claim 2. The defect inspection according to any one of claims 1 to 3, wherein the inspection result generation unit generates the inspection result map in which the film thickness measurement result is in an aspect corresponding to the measured film thickness. apparatus. The inspection object has a multilayer structure,
The film thickness measurement unit measures the film thickness of each layer of the inspection object,
The inspection result generation unit is an inspection result map that is different for each layer, and each inspection result map generates an inspection result map including a film thickness of the corresponding layer and the defect inspection result. The defect inspection apparatus according to any one of claims 1 to 4. The film thickness measurement unit includes a first film thickness measurement unit and a second film thickness measurement unit provided downstream of the first film thickness measurement unit in the conveyance direction of the inspection object,
Between the said measurement object site | parts when the said 1st film thickness measurement part measures several measurement object site | parts with respect to the conveyance direction of the said to-be-inspected object, a said 2nd film thickness measurement part is with respect to the said conveyance direction. The defect inspection apparatus according to any one of claims 1 to 5, wherein the film thickness is measured using a plurality of locations as measurement targets. A defect inspection method in a defect inspection apparatus that performs inspection while conveying an inspection object in the conveyance direction,
The defect detection unit detects defects in the inspection object based on the image data obtained from the line sensor,
The film thickness measuring unit measures the film thickness of the inspection object with respect to the direction orthogonal to the conveyance direction of the inspection object,
The inspection result generation unit is measured by the defect inspection result including the defect detection result obtained by the defect detection unit and the first coordinates indicating the position of the defect detection result in the inspection object, and the film thickness measurement unit. And the film thickness measurement result including the second coordinate indicating the position in the inspection object where the film thickness is measured, the defect detection result and the film thickness measurement result are A defect inspection method for generating an inspection result map represented for a map representing coordinates corresponding to an inspection object, and for outputting an inspection result map generated by the inspection result generation unit.

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