JP2018049961A - Method for manufacturing electronic device and air-permeable sheet used in the same - Google Patents
Method for manufacturing electronic device and air-permeable sheet used in the same Download PDFInfo
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Abstract
Description
本発明は、プリンテッドエレクトロニクスで真空吸着装置の吸着ステージに吸引固定された基材の表面へ印刷を施す際に、前記吸着ステージと前記基材との間に介在使用する、通気性シートを用いた電子デバイスの製造技術に関するものである。 The present invention uses a breathable sheet that is used between the suction stage and the base material when printing is performed on the surface of the base material sucked and fixed to the suction stage of the vacuum suction device by printed electronics. The present invention relates to the manufacturing technology of electronic devices.
電気機器の小型化に伴い、小型で軽量な、或いは厚さの薄い、例えば集積回路や配線材あるいは電子基板などの電子部品（以降、包括的に電子部品と称することがある）の開発が進められている。このような要請に応える技術として、近年、プリンテッドエレクトロニクスが注目を浴びている。プリンテッドエレクトロニクスとは、導電性成分或いは半導体成分などを配合した各種インク（以降、プリンテッドエレクトロニクスに使用される各種インクを単にインクと称することがある）を、フィルム（以下、非通気性基材と称する）などの基材表面に印刷し、この基材に種々の電子部品を作り込む技術分野である。
プリンテッドエレクトロニクスを用いることで、例えば、フィルムや布帛などの軽くて薄い基材や、柔軟性を有する基材の表面に電子部品を形成し、小型・軽量化された、或いはフレキシブルな電気機器を提供することができる。
With the downsizing of electrical equipment, the development of electronic components (hereinafter, sometimes collectively referred to as electronic components) such as integrated circuits, wiring materials, and electronic boards has progressed along with the downsizing of electronic devices. It has been. In recent years, printed electronics has attracted attention as a technology that meets such demands. Printed electronics refers to various inks containing conductive components or semiconductor components (hereinafter, various inks used in printed electronics may be simply referred to as inks), films (hereinafter referred to as non-breathable substrates). This is a technical field in which various electronic components are made on the base material surface.
By using printed electronics, for example, electronic parts are formed on the surface of a light and thin base material such as a film or fabric, or a flexible base material. Can be provided.
本出願人らは、このプリンテッドエレクトロニクスに関連する技術として、上記非通気性基材に形成する画像の鮮明度を向上させるため、国際公開番号ＷＯ２０１６／０２１２３９Ａ１公報（以下、特許文献１）を提案している。図１に、この公報に開示された通気性シートの使用時における模式的断面図を示す。この公報に提案している通気性シート１１は、少なくとも１層の不織布層１１ａと、少なくとも１層の支持層１１ｂとを含んで構成され、同図に示す２層のほか、他の通気性部材を更に含んで積層構成し得る。図１に示すとおり、使用時の通気性シート１１は真空吸着装置（詳細な装置構成は不図示）に備えられた平坦な吸着ステージ１５上に載置される。通気性シート１１に非通気性基材１３を載せた状態で真空吸着装置を稼働させることで、当該通気性シート１１を構成する各構成成分が通気性を有するため、非通気性基材１３が間接的に吸着ステージ１５上に固定される。この技術では、インク付与部材１９から付与されたインクは、非通気性基材１３上に配置した不図示のメッシュスクリーンを介して、非通気性基材１３の表面に所望のパターン形状で印刷される。 As a technique related to the printed electronics, the present applicants proposed International Publication No. WO2016 / 021239A1 (hereinafter referred to as Patent Document 1) in order to improve the sharpness of an image formed on the non-breathable substrate. doing. FIG. 1 is a schematic cross-sectional view when the breathable sheet disclosed in this publication is used. A breathable sheet 11 proposed in this publication includes at least one nonwoven fabric layer 11a and at least one support layer 11b. In addition to the two layers shown in FIG. Can be further laminated. As shown in FIG. 1, the breathable sheet 11 in use is placed on a flat suction stage 15 provided in a vacuum suction device (detailed device configuration is not shown). By operating the vacuum suction device with the air-impermeable base material 13 placed on the air-permeable sheet 11, each component constituting the air-permeable sheet 11 has air permeability. It is indirectly fixed on the suction stage 15. In this technique, the ink applied from the ink application member 19 is printed in a desired pattern shape on the surface of the non-breathable substrate 13 through a mesh screen (not shown) disposed on the non-breathable substrate 13. The
ここで、通気性シート１１の吸引口１７側に接している支持層１１ｂには吸引作用を直接受けることから、織物又は編物のように形態変化を来しにくいメッシュ状の素材が用いられ、好適にはＳＵＳ製の平織りメッシュが用いられる。また、プリンテッドエレクトロニクスに従前用いられていた燒結金属や多孔質セラミックスを直接吸着ステージ１５に載置する場合、これら従前の素材表面の凹凸が非通気性基材の印刷面に影響し、鮮明な画像を形成することが難しかった。従って特許文献１の技術では、非通気性基材１３の表面に形成される画像を鮮明とするため、吸着ステージ１５に接する支持層１１ｂに、非通気性基材１３を載置する不織布層１１ａが積層配置され、吸引固定された非通気性基材１３の表面を平滑に保つ構成としている。 Here, since the support layer 11b that is in contact with the suction port 17 side of the breathable sheet 11 is directly subjected to a suction action, a mesh-like material that is unlikely to change its shape like a woven fabric or a knitted fabric is used. For SUS, plain woven mesh made of SUS is used. In addition, when the sintered metal or porous ceramics previously used in accordance with printed electronics is directly placed on the adsorption stage 15, the unevenness of the surface of the previous material affects the printed surface of the non-breathable base material, and is clear. It was difficult to form an image. Therefore, in the technique of Patent Document 1, in order to make the image formed on the surface of the non-breathable substrate 13 clear, the nonwoven fabric layer 11a on which the non-breathable substrate 13 is placed on the support layer 11b in contact with the suction stage 15. Are arranged so as to keep the surface of the non-breathable substrate 13 sucked and fixed smooth.
印刷を終えた非通気性基材のみを取り除き、通気性シート上に新たな非通気性基材を吸引固定することで、繰り返して印刷を行うことも可能で有る。図２は通気性シート使用時における各構成成分の配置関係をさらに詳細に説明するため、紙面上側に吸着ステージに載置された通気性シートの平面に着目した説明図を示すと共に、紙面下側には、上記平面をＩ−Ｉの一点鎖線で切り取った断面を示す説明図である。尚、図１と同一の構成成分には同一のハッチング並びに符号を付してある。この図２に示すように、略正方形の通気性シート１１の四辺には、二点鎖線で透視的に示す固定用テープ２１を貼付し、不図示の非通気性基材を載置吸着した際、吸引口（同図中の図示省略）からの吸引力が通気性シート１１の端部断面部分から漏れないようにして印刷を行う。 It is also possible to repeatedly perform printing by removing only the non-breathable base material after printing and suction-fixing a new non-breathable base material on the breathable sheet. FIG. 2 shows an explanatory diagram focusing on the plane of the air-permeable sheet placed on the suction stage on the upper side of the paper, and further on the lower side of the paper in order to explain the arrangement relationship of each component when using the air-permeable sheet. FIG. 3 is an explanatory view showing a cross section of the plane taken along a dashed line II. In addition, the same hatching and code | symbol are attached | subjected to the component same as FIG. As shown in FIG. 2, when a fixing tape 21, which is perspectively shown by a two-dot chain line, is pasted on four sides of a substantially square breathable sheet 11 and a non-breathable base material (not shown) is placed and adsorbed. The printing is performed so that the suction force from the suction port (not shown in the figure) does not leak from the end cross section of the breathable sheet 11.
本明細書では、このテープ固定による作業を封止または貼着封止と称し、実質的に吸引力が漏れない状態を封止と称する。また、この固定用テープ２１による通気性シート１１の吸着ステージへの固定は、実際に非通気性基材を載置した状態で真空吸着装置を稼働して吸引固定するまでの間、通気性シート１１の吸着ステージ面内での位置ずれを防ぐためにも実施されている。このような各構成成分の配置関係によって印刷を終えた後、通気性シート１１が吸着ステージ１５から取り除かれる。これら一連の印刷は、１枚の通気性シートで、不織布層１１ａ上に印刷ミス等でインクが構成繊維交点に入り込み通気性が損なわれる、もしくは平坦性が損なわれるまで当該シートを交換せずに繰り返し行うことができる。 In this specification, this tape fixing operation is referred to as sealing or sticking sealing, and a state in which suction force does not substantially leak is referred to as sealing. Further, the air-permeable sheet 11 is fixed to the suction stage by the fixing tape 21 until the vacuum suction device is operated and sucked and fixed while the non-air-permeable base material is actually placed. 11 is also carried out in order to prevent positional displacement within the surface of the suction stage. After the printing is finished by such an arrangement relationship of each constituent component, the breathable sheet 11 is removed from the suction stage 15. A series of these printings is one breathable sheet, and the ink enters the intersection of the constituent fibers due to a printing mistake or the like on the nonwoven fabric layer 11a without changing the sheet until the breathability is impaired or the flatness is impaired. Can be repeated.
上述のとおり、特許文献１に開示される通気性シートは、所定回数の印刷を終えた後、他の印刷パターンに切り替えを行う場合、または別の吸着ステージに取り付けて使用する場合には、印刷を行った当該シートを、一度、吸着ステージ１５から取り除く必要がある。また、同文献に開示のとおり、不織布層１１ａと支持層１１ｂとは、素材固有の通気性低下を極力抑えるため、熱圧着などによる積層一体化を図るのが最も望ましい。従って、上述の除去作業時に不織布層１１ａと支持層１１ｂとが剥離してしまう、或いは通気性シート１１と固定用テープ２１とを剥離させる作業によって、当該テープが直接貼着されている不織布層１１ａの繊維構造が損なわれ、真空装置の設置環境を汚染する場合が有った。加えて、通気性シートの構造上の損傷は、通気性シートの除去時のみならず、吸着ステージ上の所定位置に固定用テープで固定する際、位置ズレを修正するためのテープの貼り直し作業でも生じる場合がある。このため、吸着ステージと通気性シートの位置合わせ作業、並びに、テープによる通気性シートの固定作業を慎重に行う必要があった。 As described above, the breathable sheet disclosed in Patent Document 1 is printed when switching to another print pattern after printing a predetermined number of times or when attached to another suction stage and used. It is necessary to remove the sheet that has been subjected to the suction stage 15 once. Moreover, as disclosed in the same document, it is most desirable that the nonwoven fabric layer 11a and the support layer 11b are laminated and integrated by thermocompression bonding or the like in order to suppress a decrease in air permeability inherent to the material as much as possible. Therefore, the nonwoven fabric layer 11a to which the nonwoven fabric layer 11a and the support layer 11b are peeled off at the time of the above-described removal work or the tape is directly attached by the work of peeling the breathable sheet 11 and the fixing tape 21. In some cases, the fiber structure was damaged, and the installation environment of the vacuum apparatus was contaminated. In addition, the structural damage of the breathable sheet is not only when removing the breathable sheet, but also when re-attaching the tape to correct the misalignment when fixing it to a predetermined position on the suction stage with fixing tape. But it can happen. For this reason, it is necessary to carefully perform an alignment operation between the suction stage and the air permeable sheet and a fixing operation of the air permeable sheet with a tape.
本発明は、上述した通気性シートの取り扱いに伴う種々の問題点に鑑みてなされたものであり、通気性シートの吸着ステージ上の適正位置への固定、或いは、通気性シートを一度取り外し再び固定用テープで固定する場合であっても、上述の設置環境汚染や剥離の解消を図り、各種の電子デバイスを効率的に製造し得る技術を提供することを目的としている。 The present invention has been made in view of various problems associated with the handling of the above-described air permeable sheet, and fixing the air permeable sheet to an appropriate position on the suction stage, or once removing the air permeable sheet and fixing it again. Even if it is a case where it fixes with the tape for the purpose, it aims at eliminating the above-mentioned installation environment pollution and peeling, and providing the technique which can manufacture various electronic devices efficiently.
この目的の達成を図るため、本発明に係る電子デバイスの製造方法によれば、
平坦な吸着ステージ上に、この吸着ステージと接し、メッシュ状素材からなる支持層と、不織布層とを積層構成した通気性シートを貼着固定し、この不織布層に非通気性基材を載置して吸着固定し、印刷を施す電子デバイスの製造方法であって、
前述した支持層の周縁にはメッシュ状素材が露出し、かつ、このメッシュ状素材を目止めした非通気性貼着部を設け、この非通気性貼着部と前述した吸着ステージとにわたって固定用テープを貼着することによって、前記吸着ステージ表面と通気性シートとの間を封止することを特徴としている。
In order to achieve this object, according to the method for manufacturing an electronic device according to the present invention,
On the flat adsorption stage, an air-permeable sheet that is in contact with this adsorption stage and laminated with a support layer made of mesh material and a nonwoven fabric layer is stuck and fixed, and a non-breathable substrate is placed on this nonwoven fabric layer. A method of manufacturing an electronic device to be fixed by suction and printing,
A mesh-like material is exposed at the periphery of the support layer described above, and a non-breathable sticking portion is provided for sealing the mesh-like material. For fixing between the non-breathable sticking portion and the aforementioned suction stage. By sticking a tape, the space between the adsorption stage surface and the breathable sheet is sealed.
また、本発明に係る通気性シートの構成によれば、前述の非通気性基材に接して使用するための不織布層と、吸着ステージに接して使用する前述の支持層とが積層構成されている通気性シートであり、上述の不織布層側から平面視した通気性シートの周縁には、上述の非通気性貼着部を設け、しかも、この非通気性貼着部と前述した不織布層とが平面視した場合に重なる重畳部を設けたことを特徴としている。 Further, according to the configuration of the breathable sheet according to the present invention, the nonwoven fabric layer for use in contact with the above-described non-breathable substrate and the above-described support layer for use in contact with the adsorption stage are laminated. The above-mentioned non-breathable sticking portion is provided on the periphery of the breathable sheet as viewed from above the non-woven fabric layer, and the non-breathable sticking portion and the non-woven fabric layer described above Is provided with an overlapping portion that overlaps when viewed from above.
さらに、この通気性シートに係る発明の実施にあたり、前述した非通気性貼着部は、前述の支持層を構成するメッシュ状素材の平面視で露出する周縁部分に熱可塑性樹脂による目止めが施された状態で非通気性を付与されていることが好ましい。 Further, in carrying out the invention relating to the breathable sheet, the non-breathable sticking portion described above is sealed with a thermoplastic resin at a peripheral portion exposed in a plan view of the mesh material constituting the support layer. In this state, it is preferable that air permeability is imparted.
本発明に係る技術を適用することによって、作業に伴う通気性シートの繊維構造の破壊や層間剥離などを実質的に回避することができ、各種の電子デバイスを効率的に製造することが可能となる。 By applying the technology according to the present invention, it is possible to substantially avoid the destruction of the fiber structure and delamination of the breathable sheet accompanying the work, and to efficiently manufacture various electronic devices. Become.
以下、図面を参照して本発明の技術に関する好適な実施形態を説明する。尚、以下の説明では、本発明の理解を容易とするため、特定の形状、数値的条件、及び配置関係を例示して説明するが、本発明に係る技術は、これら特定の条件にのみ限定されるものではなく、この発明の目的の範囲内で任意好適に設計の変更または変形を行うことができる。さらに、以下で参照する図面には、前述のとおり同一の機能を有する構成成分には同一の符号とハッチングとを付すと共に、一部構成成分には断面を表すハッチングを省略する。 DESCRIPTION OF EXEMPLARY EMBODIMENTS Preferred embodiments relating to the technology of the invention will be described below with reference to the drawings. In the following description, in order to facilitate understanding of the present invention, specific shapes, numerical conditions, and arrangement relationships will be exemplified and described. However, the technology according to the present invention is limited only to these specific conditions. However, the design can be changed or modified arbitrarily and appropriately within the scope of the object of the present invention. Furthermore, in the drawings referred to below, components having the same functions are given the same reference numerals and hatching as described above, and hatching that represents a cross section is omitted for some components.
図３は、図２と同様、通気性シートを吸着ステージに載せ、固定用テープで固定した状態を示す説明図であって、紙面上側に平面視した図、同図に一点鎖線ＩＩ-ＩＩとした部分の断面を紙面下側に示している。この図３においても吸着ステージに設けられた吸引口の図示は省略し、平面図中の構成成分の符号は一部省略してある。 FIG. 3 is an explanatory view showing a state in which a breathable sheet is placed on an adsorption stage and fixed with a fixing tape, as in FIG. 2, and is a plan view on the upper side of the drawing. A cross section of the part is shown on the lower side of the drawing. Also in this FIG. 3, illustration of the suction port provided in the adsorption stage is abbreviate | omitted, and the code | symbol of the component in the top view is abbreviate | omitted partially.
まず、本発明に係る通気性シート２３では、メッシュ状素材を略正方形に裁断した支持層２３ｂ（図中、一辺の長さにａの符号を付す）に対して、寸法形状を一回り小さく採った略正方形の不織布層２３ａ（一辺の長さｂ）を、市販されているスチレンブタジエンゴム、ポリビニルアルコール、ナイロンホットメルトなどを主成分とするスプレー状接着剤により、通気性を損なわないように積層一体化する。図示例では、このような寸法を有する２つの構成成分は、各々の中心が重なり、かつ各正方形の頂点同士が実質的に一直線となるように構成されている。このうち、不織布層を構成する素材は、特許文献１に開示されるポリオレフィン系樹脂を始めとする種々の合成樹脂を周知の不織布技術でシート状に構成したものを用いることができる。 First, in the breathable sheet 23 according to the present invention, the size and shape are made slightly smaller than the support layer 23b (the length of one side is given a symbol in the figure) obtained by cutting the mesh material into a substantially square shape. The substantially square nonwoven fabric layer 23a (length b on one side) is laminated with a commercially available spray adhesive mainly composed of styrene butadiene rubber, polyvinyl alcohol, nylon hot melt or the like so as not to impair air permeability. Integrate. In the illustrated example, the two components having such dimensions are configured such that their centers overlap and the vertices of each square are substantially aligned. Among these, the material which comprises a nonwoven fabric layer can use what comprised various synthetic resins including the polyolefin-type resin disclosed by patent document 1 in the sheet form with the well-known nonwoven fabric technique.
また図３に示すとおり、支持層２３ｂには、外縁から幅ｃにわたって非通気性貼付部２５を設けている。この支持層に用いるメッシュ状素材としても前述特許文献１に開示されるように、通気性を有する種々の布帛を用いることができる。具体的には同文献に記載されるとおり、７０メッシュ以上４００メッシュ以下のステンレス鋼（ＳＵＳ）製平織りメッシュなどを用いるのが良い。ここで、この支持層２３ｂに非通気性貼付部２５を設けるに当たっては、例えばナイロン、ポリオレフィンなどの合成樹脂からなるホットメルトフィルムを図示の幅ｃとした帯状に裁断し、これを支持層の周縁部に加熱加圧する手段、或いは、周知のバインダーや接着剤を幅ｃで塗布した後に硬化して、メッシュの目開きを封止する手段など、周知の手段によって「目止め」が達成できる。この際、上述した幅ｃは、不織布層２３ａの寸法や積層一体化する位置などで種々に設計することができるが、当該幅ｃの寸法条件として、固定用テープ２１の幅に応じて、不織布層２３ａとは離間する位置に貼着封止するために十分な広さを持たせれば良い。この離間距離は任意好適な値で採り得るが、このような形態で貼着封止を行うことで、通気性シートの再使用に際して、不織布層２３ａを毛羽立たせ、あるいは支持層２３ｂとの剥離を生じるなどの損傷を来すことなく本発明の方法を実施することができる。 Further, as shown in FIG. 3, the support layer 23b is provided with a non-breathable sticking portion 25 from the outer edge to the width c. As the mesh material used for the support layer, various fabrics having air permeability can be used as disclosed in Patent Document 1 described above. Specifically, as described in the same document, a stainless steel (SUS) plain woven mesh of 70 mesh or more and 400 mesh or less may be used. Here, in providing the non-breathable pasting portion 25 on the support layer 23b, for example, a hot melt film made of a synthetic resin such as nylon or polyolefin is cut into a strip shape having a width c as shown in the figure, and this is cut to the periphery of the support layer. The “sealing” can be achieved by a known means such as a means for heating and pressurizing the part, or a means for applying a known binder or adhesive with a width c and then curing to seal the mesh openings. At this time, the width c described above can be variously designed depending on the dimensions of the nonwoven fabric layer 23a, the position where the layers are integrated, and the like. What is necessary is just to give enough space to stick and seal in the position away from the layer 23a. The separation distance may be any suitable value. By sticking and sealing in such a form, the nonwoven fabric layer 23a is fluffed or peeled off from the support layer 23b when the breathable sheet is reused. The method of the present invention can be carried out without causing damage such as occurring.
さらに、支持層２３ｂに行った「目止め」で実現する、非通気性貼着部２５の「非通気性」とは、全く通気しない状態とする必要はない。即ち、吸着ステージに設けられた複数の吸引口がすべて通気性シート２３で覆われ、しかも、当該シート２３を構成する非通気性貼着部２５と吸着ステージ１５との間を固定用テープ２１で封止する状態とすれば、非通気性基材に働く吸引力は、不織布層２３ａのうち非通気性貼着部２５を除く支持層２３ｂの領域のみを介して作用することとなる。従って、非通気性貼着部２５に僅かな通気性が残ってしまった場合であっても、固定用テープが非通気性であれば「封止」が良好に機能し、通気性基材の吸引固定を確実に図ることができる。 Furthermore, “non-breathable” of the non-breathable adhesive portion 25 realized by “sealing” performed on the support layer 23 b does not need to be in a state of not allowing any air to pass through. That is, all of the plurality of suction ports provided in the suction stage are covered with the air permeable sheet 23, and the non-breathable adhering portion 25 constituting the sheet 23 and the suction stage 15 are fixed with the fixing tape 21. If it is set as the state to seal, the suction | attraction force which acts on a non-breathable base material will act only through the area | region of the support layer 23b except the non-breathable sticking part 25 among the nonwoven fabric layers 23a. Therefore, even if a slight air permeability remains in the non-breathable adhesive part 25, if the fixing tape is non-breathable, “sealing” functions well, and the breathable base material Suction fixation can be achieved reliably.
非通気性基材には、種々の材質や厚さを用いるが、本出願に係る通気性シートは、図３に例示するように、非通気性貼着部２５と不織布層２３ａとの間に、当該層２３ａの厚さに相当する段差を持っている。この厚さは、吸着ステージ１５に載置、封止し、非通気性基材を載置後に実際に印刷を行う状態では不織布層２３ａが圧縮され、比較的小さくなる。ここで、封止に用いた固定用テープ２１の厚さと圧縮された不織布層２３ａとの関係によっては、通気性シート２３の周縁に相当する非通気性基材の部分で、当該基材表面に多少の凹凸を生じる場合がある。 Although various materials and thicknesses are used for the non-breathable base material, the breathable sheet according to the present application is, as illustrated in FIG. 3, between the non-breathable sticking portion 25 and the nonwoven fabric layer 23a. And a step corresponding to the thickness of the layer 23a. This thickness is relatively small because the nonwoven fabric layer 23a is compressed in a state in which printing is actually performed after placing the non-breathable substrate after placing and sealing on the suction stage 15. Here, depending on the relationship between the thickness of the fixing tape 21 used for sealing and the compressed non-woven fabric layer 23a, the portion of the non-breathable base material corresponding to the periphery of the breathable sheet 23 is the surface of the base material. Some unevenness may occur.
このような通気性シート２３には、支持層２３ｂ及びこれに設けた非通気性貼着部２５の寸法条件と、不織布層２３ａの寸法条件とを調整することによって、幅ｄにわたる重畳部２７を画成するのが好適である。この重畳部２７の幅ｄは、設計に応じて任意好適に設計することができ、不図示の非通気性基材を載置、吸引した際に不織布層２３ａが圧縮されて厚さが減り、図示水平方向に非通気性の状態を実現することで、通気性シート２３と非通気性基材１３とを密着固定することができる（後段で詳述）。 In such a breathable sheet 23, the overlapping portion 27 over the width d is adjusted by adjusting the dimensional condition of the support layer 23b and the non-breathable sticking portion 25 provided thereon and the dimensional condition of the nonwoven fabric layer 23a. It is preferable to define. The width d of the overlapping portion 27 can be arbitrarily suitably designed according to the design, and when the non-breathable base material (not shown) is placed and sucked, the nonwoven fabric layer 23a is compressed and the thickness is reduced. By realizing a non-breathable state in the illustrated horizontal direction, the breathable sheet 23 and the non-breathable base material 13 can be tightly fixed (detailed later).
以上、本発明の好適形態について、具体的な構成を挙げて説明したが、本発明の技術はこれら特定条件にのみ限定されるものではない。例えば、通気性シート２３として略正方形の形状を例示しているが、これに代えて長方形などの矩形、円形、楕円形、三角形及びその他の多角形とすることもでき、吸着ステージに孔設された吸引口の形状、又は、不図示のメッシュスクリーンに設けられた印刷パターンの設計などに応じて形状変更することも可能である。これら形状、配置関係、数値的条件などは、この発明の目的の範囲内で任意好適に設計の変更または変形を行い得る。 Although the preferred embodiments of the present invention have been described with specific configurations, the technology of the present invention is not limited only to these specific conditions. For example, although the substantially square shape is illustrated as the air-permeable sheet 23, it can be replaced by a rectangle such as a rectangle, a circle, an ellipse, a triangle, and other polygons. It is also possible to change the shape according to the shape of the suction port or the design of a printing pattern provided on a mesh screen (not shown). These shapes, arrangement relations, numerical conditions, and the like can be appropriately changed or modified within the scope of the object of the present invention.
以下、本発明の実施例として、本発明の好適態様を含む種々の通気性シート（以下、包括的に評価サンプルと称する）を調製し、評価した結果を記載する。尚、各構成成分の名称に符号を付す場合があるが、これは図３に示したものである。 Hereinafter, as examples of the present invention, various air-permeable sheets (hereinafter referred to as evaluation samples) including preferred embodiments of the present invention are prepared and evaluated results are described. In addition, although the code | symbol may be attached | subjected to the name of each structural component, this is what was shown in FIG.
（不織布の調製）
不織布層は、前述特許文献１に開示された静電紡糸技術によって作製した。始めに、重量平均分子量２０万の市販されているポリアクリロニトリルを、Ｎ，Ｎ−ジメチルホルムアミドに濃度１６ｗｔ％になるように溶解させ、ポリマー溶液（粘度：２０００ｍＰａ・ｓ）とした。次いで、ケースに周囲を囲われた空間（縦：１０００ｍｍ、横：１０００ｍｍ、高：１０００ｍｍ）内に、ポリマー溶液を吐出できる内径０．４１ｍｍの金属製ノズルを直流高電圧装置に接続した状態で配置し、吐出されたポリマー溶液を捕集するための無端ベルトをアースし、ケース内に配置した。この金属製ノズルに１７ｋＶの電圧を印加することで、ポリマー溶液を３ｇ／ｈの速度で吐出させて繊維化し、１７ｇ／ｍ２の目付を有する不織布を得た。このようにして得られた不織布の主体となる構成繊維の平均繊維径を電子顕微鏡によって測定したところ、０．４μｍ（４００ｎｍ）であった。これによって得られた不織布を１５５ｍｍ角に裁断し、不織布層２３ａとなる不織布を準備した。
(Preparation of non-woven fabric)
The nonwoven fabric layer was produced by the electrospinning technique disclosed in Patent Document 1 described above. First, a commercially available polyacrylonitrile having a weight average molecular weight of 200,000 was dissolved in N, N-dimethylformamide so as to have a concentration of 16 wt% to obtain a polymer solution (viscosity: 2000 mPa · s). Next, a metal nozzle having an inner diameter of 0.41 mm capable of discharging a polymer solution is connected to a DC high voltage device in a space surrounded by the case (vertical: 1000 mm, horizontal: 1000 mm, height: 1000 mm). The endless belt for collecting the discharged polymer solution was grounded and placed in the case. By applying a voltage of 17 kV to this metal nozzle, the polymer solution was discharged at a rate of 3 g / h to be fiberized, and a nonwoven fabric having a basis weight of 17 g / m 2 was obtained. The average fiber diameter of the constituent fibers that are the main component of the nonwoven fabric thus obtained was measured by an electron microscope and found to be 0.4 μm (400 nm). The nonwoven fabric obtained in this way was cut into 155 mm squares to prepare a nonwoven fabric to be the nonwoven fabric layer 23a.
（支持層の調製）
続いて支持層も上記特許文献１と同様、ステンレス鋼製の金属メッシュ（関西金網株式会社製、１００メッシュ平織り、線径０．１０ｍｍ、目開きの間隔０．１５ｍｍ）を用いた。ここで表記した目開きの間隔とは平織りにおけるワイヤー同士で形成される網目状の開口の一辺の長さに相当する公称値である。尚、メッシュ数とミリ単位とした線径Ｄにより、以下の式で算出したところ、当該周知の計算式と、実際に顕微鏡で観察した結果との高い相関を確認した。
目開きの間隔＝（２５．４／メッシュ数）−線径Ｄ
次いで、上述の金属メッシュを１７０ｍｍ×１７０ｍｍに裁断した。この裁断物に目止めするホットメルトフィルムとして、市販のポリウレタンホットメルトフィルム『ＳＭ１０１−ＰＵＲ』（ＮＴＷ株式会社製、商品名）を幅２０ｍｍ、長さ１５２ｍｍの短冊状に裁断した。この短冊状のホットメルトフィルムは、上述した支持層の四隅に電動シーラー『ＯＰＬ−６００−１０』（富士インパルス株式会社製、商品名）によって、１８０℃で熱プレスした。このようにして、図３に示す形態で、幅ａが１７０ｍｍの正方形であり、支持層２３ｂの中央部分に１５０ｍｍ角の通気性領域が形成されるように、幅ｃが２０ｍｍとなる非通気性貼着部２５を形成した。
(Preparation of support layer)
Subsequently, a metal mesh made of stainless steel (manufactured by Kansai Wire Mesh Co., Ltd., 100 mesh plain weave, wire diameter of 0.10 mm, gap between openings of 0.15 mm) was also used for the support layer as in Patent Document 1. The interval between the openings described here is a nominal value corresponding to the length of one side of a mesh-like opening formed by wires in a plain weave. In addition, when it calculated with the following formula | equation by the wire diameter D made into the number of meshes and the millimeter unit, the high correlation with the result actually observed with the microscope was confirmed.
Opening interval = (25.4 / number of meshes) −wire diameter D
Next, the above metal mesh was cut into 170 mm × 170 mm. A commercially available polyurethane hot melt film “SM101-PUR” (manufactured by NTW Co., Ltd., trade name) was cut into a strip shape having a width of 20 mm and a length of 152 mm as a hot melt film for sealing the cut material. This strip-shaped hot melt film was hot-pressed at 180 ° C. with an electric sealer “OPL-600-10” (trade name, manufactured by Fuji Impulse Co., Ltd.) at the four corners of the support layer. In this manner, in the form shown in FIG. 3, the non-breathable structure having a width c of 20 mm so that a square having a width a of 170 mm is formed and a breathable region of 150 mm square is formed in the central portion of the support layer 23b. The sticking part 25 was formed.
（実施例１：重畳部を有する通気性シートの調製）
上述した支持層２３ｂに接着剤『スプレーのり ７７』（スリーエムジャパン株式会社製、商品名：接着成分スチレンブタジエンゴム含有）を吹きつけ、その中央に前述の不織布を載せて積層一体化し、重畳部２７の幅ｄを５ｍｍとした実施例１の評価サンプルを得た。評価試験はスルーホール型吸着ステージ『ＷＨＴ-ラボ』（株式会社ミノグループ製、商品名）を用いて実施した。この吸着ステージは２６０ｍｍ×２９０ｍｍの矩形平板状であり、直径１．０ｍｍの円形吸引口が１０ｍｍ間隔で格子状（縦１５個、横１５個）に合計２２５個、孔設されたものである。
(Example 1: Preparation of a breathable sheet having an overlapping portion)
The above-mentioned support layer 23b is sprayed with an adhesive “Spray paste 77” (trade name: Adhesive component styrene butadiene rubber containing) manufactured by 3M Japan Co., Ltd. An evaluation sample of Example 1 with a width d of 5 mm was obtained. The evaluation test was conducted using a through-hole type adsorption stage “WHT-Lab” (manufactured by Mino Group, trade name). This suction stage has a rectangular flat plate shape of 260 mm × 290 mm, and a total of 225 circular suction ports having a diameter of 1.0 mm are provided in a lattice shape (15 vertical and 15 horizontal) at intervals of 10 mm.
（実施例１：評価試験）
始めに、印刷対象物である非通気性基材として１６０ｍｍ角に裁断したＰＥＴフィルム『ルミラー Ｓ−１００』（東レ株式会社製、厚さ１００μｍ）を吸着ステージに直接載せ、真空吸着装置の圧力ゲージが−３０ｋＰａになるように吸着して、基準となる圧力（以下、基準圧力）を測定した。次いで、非通気性基材を一度取り外し、実施例１に係る通気性シート２３を吸着ステージ１５上に全ての吸引口を覆うように載置し、支持層２３ｂの周囲を固定用テープ２１で貼着、封止した。この際、固定用テープ２１の貼着位置は、非通気性基材２５上であって、かつ、不織布層２３ａとは１〜２ｍｍ離間した位置に封止作業を行った。続いて、吸着ステージ１５に貼着封止した通気性シート２３上に非通気性基材を載せて真空吸着装置を作動させ、非通気性基材を吸着固定した。この際の到達圧力を測定したところ、評価環境に対する吸引力の漏洩がないことを示す、上述の基準圧力相当の−３０ｋＰａを示した。また、貼着封止作業の説明からも明らかなように、吸着ステージに貼付した固定用テープ部分を再貼付可能な状態で作業を行うことができる。さらに、当該テープが不織布層２３aとは離間した位置に貼着されているため、通気性シートを吸着ステージから取り外した後に、通気性シートに貼着された当該テープを利用して再び吸着ステージに載置使用しても、印刷作業が再開実施できることを確認した。
(Example 1: Evaluation test)
First, a PET film “Lumirror S-100” (manufactured by Toray Industries, Inc., thickness 100 μm) cut into a 160 mm square as a non-breathable base material to be printed is directly placed on an adsorption stage, and a pressure gauge of a vacuum adsorption device Was adsorbed so as to be −30 kPa, and a reference pressure (hereinafter referred to as a reference pressure) was measured. Next, the non-breathable substrate is once removed, the breathable sheet 23 according to Example 1 is placed on the suction stage 15 so as to cover all the suction ports, and the periphery of the support layer 23b is pasted with the fixing tape 21. Attached and sealed. At this time, the fixing position of the fixing tape 21 was on the non-breathable substrate 25 and the sealing operation was performed at a position 1 to 2 mm apart from the nonwoven fabric layer 23a. Subsequently, the non-breathable base material was placed on the breathable sheet 23 adhered and sealed to the suction stage 15 to operate the vacuum suction device, and the non-breathable base material was fixed by suction. When the ultimate pressure at this time was measured, it showed -30 kPa corresponding to the above-mentioned reference pressure, indicating that there was no leakage of suction force to the evaluation environment. Further, as is apparent from the description of the sticking and sealing work, the work can be performed in a state where the fixing tape part stuck on the suction stage can be re-sticked. Further, since the tape is attached at a position separated from the nonwoven fabric layer 23a, after removing the air permeable sheet from the adsorption stage, the tape is attached again to the adsorption stage using the tape attached to the air permeable sheet. It was confirmed that the printing work can be resumed even when mounted.
（実施例２）
次に、重畳部の幅ｄが２ｍｍとなるように不織布層２３ａを設けたことを除き、実施例１と同一の手順で評価サンプルの作製、並びに、評価を実施した。その結果、実施例１と同様に、良好な吸着状態を実現でき、しかも、再度の印刷作業再開にも支障は来たさなかった。
(Example 2)
Next, an evaluation sample was prepared and evaluated in the same procedure as in Example 1, except that the nonwoven fabric layer 23a was provided so that the width d of the overlapping portion was 2 mm. As a result, as in Example 1, a good adsorption state could be realized, and there was no trouble in resuming the printing operation again.
（比較例１）
上述した支持層に目止めを施さず、非通気性貼着部２５を備えていないこと以外は実施例１と同じ構成で通気性シートを作製し、上述の実施例と同様に評価を行った。その結果、非通気性基材の吸着固定時の到達圧力は−１５ｋＰａであり、基準圧力の２分の１に過ぎなかった。この比較例１に係る通気性シートを用いて、非通気性基材への印刷を実施したが、本来は印刷完了後に被印刷物である非通気性基材とメッシュスクリーンとが分離すべきところ、非通気性基材と通気性シートとの吸着固定不足によって、非通気性基材とメッシュスクリーンとが密着し、正常な印刷を完了することができなかった。この異常は、不織布層と、これを積層していない支持層領域との境界近傍で、吸着ステージの主面方向内での漏れを生じ、吸着力の散逸が生じたためと推定される。
(Comparative Example 1)
A breathable sheet was produced in the same configuration as in Example 1 except that the support layer described above was not sealed and the non-breathable adhesive portion 25 was not provided, and evaluation was performed in the same manner as in the above-described example. . As a result, the ultimate pressure when adsorbing and fixing the non-breathable substrate was −15 kPa, which was only a half of the reference pressure. Using the breathable sheet according to Comparative Example 1, printing on a non-breathable substrate was performed, but the place where the non-breathable substrate and the mesh screen, which are originally printed materials, should be separated after printing, Due to insufficient adsorption and fixation between the non-breathable substrate and the breathable sheet, the non-breathable substrate and the mesh screen were in close contact with each other, and normal printing could not be completed. This abnormality is presumed to be caused by the leakage of the suction force due to leakage in the main surface direction of the suction stage in the vicinity of the boundary between the nonwoven fabric layer and the support layer region where the nonwoven fabric layer is not laminated.
（比較例２）
次いで、上述した不織布層と支持層とを１７０ｍｍ角としたことを除いては、比較例１と同一の評価サンプルを調製し、比較例２とした。この評価サンプルを評価した結果、基準圧力には到達し、非通気性基材への印刷には支障を来たさなかった。しかしながら、固定用テープが不織布層の表面に貼着せざるを得ないため、印刷作業の再開を目的とした通気性シートの吸着ステージからの除去作業に際し、不織布層と支持層との剥離による通気性シートの破損を生じた。
(Comparative Example 2)
Subsequently, the same evaluation sample as Comparative Example 1 was prepared except that the above-described nonwoven fabric layer and support layer were 170 mm square, and Comparative Example 2 was obtained. As a result of evaluating this evaluation sample, the reference pressure was reached, and printing on a non-breathable substrate was not hindered. However, because the fixing tape must be attached to the surface of the nonwoven fabric layer, the breathability of the nonwoven fabric layer and the support layer can be removed when removing the breathable sheet from the adsorption stage for the purpose of resuming the printing operation. The sheet was damaged.
これら、一連の評価サンプルについて、その評価結果を表１にまとめて示す。同表中、
「通気性シートの剥離」として、通気性シートにおける不織布層と支持層との剥離の有無を確認した結果は下記のように表記した。
「○」：固定用テープ剥離時の剥離なし
「×」：固定用テープ剥離時の剥離あり
また、正常な印刷工程の完了である非通気性基材とメッシュスクリーンとの分離について、「非通気性基材の分離」として、正常な場合を「○」、分離できない異常な場合を「×」で表記してある。
The evaluation results of these series of evaluation samples are summarized in Table 1. In the same table,
As “peeling of the breathable sheet”, the result of confirming whether or not the non-woven fabric layer and the support layer were peeled in the breathable sheet was expressed as follows.
“O”: No peeling when peeling fixing tape “X”: Peeling when peeling fixing tape Also, regarding separation of non-breathable substrate and mesh screen, which is the completion of normal printing process, As “separation of the functional base material”, the normal case is indicated by “◯”, and the abnormal case that cannot be separated is indicated by “X”.
１１，２３：通気性シート、１１ａ，２３ａ：不織布層、１１ｂ，２３ｂ：支持層、
１３：非通気性基材、１５：吸着ステージ、１７：吸引口、
１９：インク付与部材、２１：固定用テープ、２５：非通気性貼着部、２７：重畳部、
ａ：支持層２３ｂの一辺の長さ、ｂ：不織布層２３ａの一辺の長さ、
ｃ：非通気性貼着部の幅、d：重畳部の幅。
11, 23: Breathable sheet, 11a, 23a: Non-woven fabric layer, 11b, 23b: Support layer,
13: Non-breathable substrate, 15: Adsorption stage, 17: Suction port,
19: ink application member, 21: fixing tape, 25: non-breathable sticking portion, 27: overlapping portion,
a: the length of one side of the support layer 23b, b: the length of one side of the nonwoven fabric layer 23a,
c: Width of non-breathable sticking part, d: Width of overlapping part.
Claims (3)
前記支持層の周縁にはメッシュ状素材が露出し、かつ、該メッシュ状素材を目止めした非通気性貼着部を設け、該非通気性貼着部と前記吸着ステージとにわたって固定用テープを貼着することによって、前記吸着ステージ表面と通気性シートとの間を封止することを特徴とする電子デバイスの製造方法。 A breathable sheet comprising a support layer made of a mesh material in contact with the adsorption stage and a nonwoven fabric layer is laminated and fixed on a flat adsorption stage, and a non-breathable substrate is placed on the nonwoven fabric layer. A method of manufacturing an electronic device that performs suction fixing and printing,
A mesh-like material is exposed at the periphery of the support layer, and a non-breathable sticking portion for sealing the mesh-like material is provided, and a fixing tape is pasted over the non-breathable sticking portion and the adsorption stage. A method for manufacturing an electronic device, comprising: sealing between the surface of the adsorption stage and the breathable sheet by wearing.
該通気性シートの前記不織布層側から平面視した周縁には、前記支持層の外縁から所定幅で目止めされた非通気性貼着部が設けられており、しかも該非通気性貼着部と前記不織布層とが平面視で重なる重畳部を設けたことを特徴とする通気性シート。 A breathable sheet formed by laminating a non-woven fabric layer for contacting a non-breathable substrate and a support layer made of a mesh material in contact with an adsorption stage,
A non-breathable adhesive portion that is sealed with a predetermined width from the outer edge of the support layer is provided on the periphery of the breathable sheet as viewed from the nonwoven fabric layer side, and the non-breathable adhesive portion and A breathable sheet, characterized in that an overlapping portion is provided that overlaps the nonwoven fabric layer in plan view.
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| JP2020025029A (en) * | 2018-08-08 | 2020-02-13 | 日本バイリーン株式会社 | Breathable sheet used for manufacturing electronic device |
| JP2021104652A (en) * | 2019-12-27 | 2021-07-26 | 日本バイリーン株式会社 | Gas permeable sheet |
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| JP7349351B2 (en) | 2019-12-27 | 2023-09-22 | 日本バイリーン株式会社 | breathable sheet |
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