JP2018035392A5 - - Google Patents
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- JP2018035392A5 JP2018035392A5 JP2016168705A JP2016168705A JP2018035392A5 JP 2018035392 A5 JP2018035392 A5 JP 2018035392A5 JP 2016168705 A JP2016168705 A JP 2016168705A JP 2016168705 A JP2016168705 A JP 2016168705A JP 2018035392 A5 JP2018035392 A5 JP 2018035392A5
- Authority
- JP
- Japan
- Prior art keywords
- flat plate
- cylindrical portion
- planar shape
- plate
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 9
- 229910052802 copper Inorganic materials 0.000 claims 9
- 239000010949 copper Substances 0.000 claims 9
- 229910000838 Al alloy Inorganic materials 0.000 claims 8
- 229910000881 Cu alloy Inorganic materials 0.000 claims 8
- 229910052782 aluminium Inorganic materials 0.000 claims 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 8
- 238000004519 manufacturing process Methods 0.000 claims 8
- 238000005304 joining Methods 0.000 claims 6
- 238000003756 stirring Methods 0.000 claims 6
- 238000003466 welding Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 2
- 238000005096 rolling process Methods 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- 239000011247 coating layer Substances 0.000 claims 1
- 230000003628 erosive Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 230000002093 peripheral Effects 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 claims 1
Claims (14)
流路を内蔵する銅、銅合金、アルミニウムまたはアルミニウム合金からなる円筒部を少なくとも有効部に有することを特徴とする処理ローラー。 A processing roller around which a workpiece to be processed in a roll-to-roll system is wound,
A processing roller having a cylindrical portion made of copper, copper alloy, aluminum, or aluminum alloy containing a flow path in at least an effective portion.
前記円筒部を平面に展開した時の前記流路と同一の平面形状を有する下部溝とこの下部溝とほぼ相似な平面形状を有し、前記下部溝より大きい上部溝とからなる溝が一方の主面に設けられた、前記円筒部を平面に展開した時の平面形状と同一の長方形または正方形の平面形状を有する第１平板の前記溝の前記上部溝に第２平板を嵌める工程と、A groove composed of a lower groove having the same planar shape as the flow path when the cylindrical portion is developed in a plane and a planar shape substantially similar to the lower groove, and an upper groove larger than the lower groove is one of the grooves. A step of fitting a second flat plate into the upper groove of the groove of the first flat plate having the same rectangular or square planar shape as the planar shape when the cylindrical portion is flattened provided on the main surface;
前記第１平板と前記第２平板との境界部を摩擦攪拌接合により接合する工程と、Joining the boundary between the first flat plate and the second flat plate by friction stir welding;
前記第１平板と前記第２平板との境界部を前記摩擦攪拌接合により接合した前記第１平板と前記第２平板とからなる長方形または正方形の平面形状を有する平板をその一辺に平行な方向に円筒状に丸め、この丸めた板の一端と他端とを接合する工程と、A rectangular or square flat plate composed of the first flat plate and the second flat plate in which the boundary between the first flat plate and the second flat plate is joined by the friction stir welding in a direction parallel to one side thereof. Rounding into a cylindrical shape and joining one end and the other end of the rounded plate;
を有することを特徴とする処理ローラーの製造方法。The manufacturing method of the processing roller characterized by having.
前記円筒部を平面に展開した時の平面形状と同一の長方形または正方形の平面形状を有する平板をその一辺に平行な方向に円筒状に丸め、この丸めた板の一端と他端とを接合する工程と、A flat plate having the same rectangular or square planar shape as the planar shape when the cylindrical portion is developed in a plane is rounded into a cylindrical shape in a direction parallel to one side, and one end and the other end of the rounded plate are joined. Process,
前記丸めた板の一方の端面から他方の端面に達する貫通孔を前記丸めた板の中心軸に平行にかつ前記丸めた板の円周方向の等間隔の複数箇所に形成することにより前記流路を形成する工程と、The flow path is formed by forming through holes reaching from one end face of the rounded plate to the other end face in parallel to the central axis of the rounded plate and at equal intervals in the circumferential direction of the rounded plate. Forming a step;
を有することを特徴とする処理ローラーの製造方法。The manufacturing method of the processing roller characterized by having.
前記処理ローラーが流路を内蔵する銅、銅合金、アルミニウムまたはアルミニウム合金からなる円筒部を少なくとも有効部に有することを特徴とする処理装置。The processing apparatus, wherein the processing roller has a cylindrical portion made of copper, a copper alloy, aluminum, or an aluminum alloy containing a flow path at least as an effective portion.
前記円筒部を平面に展開した時の前記流路と同一の平面形状を有する下部溝とこの下部溝とほぼ相似な平面形状を有し、前記下部溝より大きい上部溝とからなる溝が一方の主面に設けられた、前記円筒部を平面に展開した時の平面形状と同一の長方形または正方形の平面形状を有する第１平板の前記溝の前記上部溝に第２平板を嵌める工程と、A groove composed of a lower groove having the same planar shape as the flow path when the cylindrical portion is developed in a plane and a planar shape substantially similar to the lower groove, and an upper groove larger than the lower groove is one of the grooves. A step of fitting a second flat plate into the upper groove of the groove of the first flat plate having the same rectangular or square planar shape as the planar shape when the cylindrical portion is flattened provided on the main surface;
前記第１平板と前記第２平板との境界部を摩擦攪拌接合により接合する工程と、Joining the boundary between the first flat plate and the second flat plate by friction stir welding;
前記第１平板と前記第２平板との境界部を前記摩擦攪拌接合により接合した前記第１平板と前記第２平板とからなる長方形または正方形の平面形状を有する平板をその一辺に平行な方向に円筒状に丸め、この丸めた板の一端と他端とを接合する工程と、A rectangular or square flat plate composed of the first flat plate and the second flat plate in which the boundary between the first flat plate and the second flat plate is joined by the friction stir welding in a direction parallel to one side thereof. Rounding into a cylindrical shape and joining one end and the other end of the rounded plate;
を有することを特徴とするバッキングプレートの製造方法。The manufacturing method of the backing plate characterized by having.
前記円筒部を平面に展開した時の平面形状と同一の長方形または正方形の平面形状を有する平板をその一辺に平行な方向に円筒状に丸め、この丸めた板の一端と他端とを接合する工程と、A flat plate having the same rectangular or square planar shape as the planar shape when the cylindrical portion is developed in a plane is rounded into a cylindrical shape in a direction parallel to one side, and one end and the other end of the rounded plate are joined. Process,
前記丸めた板の一方の端面から他方の端面に達する貫通孔を前記丸めた板の中心軸に平行にかつ前記丸めた板の円周方向の等間隔の複数箇所に形成することにより前記流路を形成する工程と、The flow path is formed by forming through holes reaching from one end face of the rounded plate to the other end face in parallel to the central axis of the rounded plate and at equal intervals in the circumferential direction of the rounded plate. Forming a step;
を有することを特徴とするバッキングプレートの製造方法。The manufacturing method of the backing plate characterized by having.
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016168705A JP6795819B2 (en) | 2016-08-31 | 2016-08-31 | Processing roller and its manufacturing method and processing equipment |
| EP17773579.2A EP3438322B1 (en) | 2016-03-30 | 2017-01-25 | Sputtering device, and method for producing film-formed body |
| CN201910226747.1A CN109881166B (en) | 2016-03-30 | 2017-01-25 | Sputtering cathode, sputtering device, and method for producing film-formed body |
| US15/735,847 US20180171464A1 (en) | 2016-03-30 | 2017-01-25 | Sputtering cathode, sputtering device, and method for producing film-formed body |
| KR1020207009231A KR20200036065A (en) | 2016-03-30 | 2017-01-25 | Sputtering cathode, sputtering apparatus and manufacturing method of film forming element |
| KR1020187031762A KR20180121798A (en) | 2016-03-30 | 2017-01-25 | Sputtering cathode, sputtering apparatus and manufacturing method of film forming element |
| PCT/JP2017/002463 WO2017169029A1 (en) | 2016-03-30 | 2017-01-25 | Sputtering cathode, sputtering device, and method for producing film-formed body |
| KR1020177024162A KR20180032523A (en) | 2016-03-30 | 2017-01-25 | Sputtering cathode, sputtering apparatus and manufacturing method of film forming element |
| CN201780001627.0A CN107614747B (en) | 2016-03-30 | 2017-01-25 | The manufacturing method of sputter cathode, sputtering equipment and phragmoplast |
| US16/297,121 US10692708B2 (en) | 2016-03-30 | 2019-03-08 | Sputtering cathode, sputtering device, and method for producing film-formed body |
| US16/897,762 US20200303173A1 (en) | 2016-03-30 | 2020-06-10 | Heat-transfer roller for sputtering and method of making the same |
| US17/089,100 US20210050196A1 (en) | 2016-03-30 | 2020-11-04 | Heat-Transfer Roller for Sputtering and Method of Making the Same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016168705A JP6795819B2 (en) | 2016-08-31 | 2016-08-31 | Processing roller and its manufacturing method and processing equipment |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018075110A Division JP6360986B2 (en) | 2018-04-10 | 2018-04-10 | Device manufacturing method and film manufacturing method |
| JP2020149559A Division JP6801911B2 (en) | 2020-09-07 | 2020-09-07 | Backing plate and its manufacturing method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018035392A JP2018035392A (en) | 2018-03-08 |
| JP2018035392A5 true JP2018035392A5 (en) | 2019-10-10 |
| JP6795819B2 JP6795819B2 (en) | 2020-12-02 |
Family
ID=61565452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016168705A Active JP6795819B2 (en) | 2016-03-30 | 2016-08-31 | Processing roller and its manufacturing method and processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6795819B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019189913A (en) * | 2018-04-26 | 2019-10-31 | 京浜ラムテック株式会社 | Sputtering cathode, sputtering cathode assembly and sputtering apparatus |
| JP7244362B2 (en) * | 2019-05-28 | 2023-03-22 | 株式会社アルバック | transfer room |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3672949B2 (en) * | 1994-10-05 | 2005-07-20 | 三菱伸銅株式会社 | Vapor deposition equipment |
| JPH1060628A (en) * | 1996-08-16 | 1998-03-03 | Sony Corp | Material flying device and material flying source |
| JP6252402B2 (en) * | 2014-08-18 | 2017-12-27 | 住友金属鉱山株式会社 | Heating roll and film forming apparatus provided with the same |
| JP6417964B2 (en) * | 2015-01-23 | 2018-11-07 | 住友金属鉱山株式会社 | LAMINATED BOARD, WIRING BOARD AND METHOD FOR PRODUCING THEM |
| JP2016144873A (en) * | 2015-02-06 | 2016-08-12 | 凸版印刷株式会社 | Production method of gas barrier laminate |
-
2016
- 2016-08-31 JP JP2016168705A patent/JP6795819B2/en active Active
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