JP2018034268A - Joint structure and robot - Google Patents

Joint structure and robot Download PDF

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JP2018034268A
JP2018034268A JP2016170338A JP2016170338A JP2018034268A JP 2018034268 A JP2018034268 A JP 2018034268A JP 2016170338 A JP2016170338 A JP 2016170338A JP 2016170338 A JP2016170338 A JP 2016170338A JP 2018034268 A JP2018034268 A JP 2018034268A
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Prior art keywords
seal member
joint
members
joint structure
outside
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JP6506227B2 (en
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秀倫 榑林
Hidetomo Kurebayashi
秀倫 榑林
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Fanuc Corp
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Fanuc Corp
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Priority to JP2016170338A priority Critical patent/JP6506227B2/en
Priority to US15/674,628 priority patent/US10480695B2/en
Priority to DE102017214704.0A priority patent/DE102017214704B4/en
Priority to CN201710756534.0A priority patent/CN107791275B/en
Publication of JP2018034268A publication Critical patent/JP2018034268A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0075—Means for protecting the manipulator from its environment or vice versa
    • B25J19/0079—Means for protecting the manipulator from its environment or vice versa using an internal pressure system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/003—Auxiliary devices

Abstract

PROBLEM TO BE SOLVED: To maintain integrity of inside mechanical components by high seal performance against pressure from outside and secure prevention from breaking sealed state by inside seal members.SOLUTION: A joint structure 10 comprises: two joint members; a drive mechanism 4 which rotationally drives two joint members around a predetermined axis line relatively; two seal members 19, 20 respectively sealing between two joint members at the position surrounding outside of a lubricant holding part doubly in the drive mechanism 4; and compression means 12 which raises air pressure of a space 11 arranged between two seal members 19, 20 to be higher than atmospheric pressure.SELECTED DRAWING: Figure 2

Description

本発明は、関節構造およびロボットに関するものである。   The present invention relates to a joint structure and a robot.

従来、関節内部に備えられた減速機や軸受等の機構部品への塵埃や水滴の流入を防止し、機構部品からの潤滑剤の流出を防止するために、相対移動面同士の隙間をリップ接触により密封可能な２重のシール部材を備えた関節構造が知られている（例えば、特許文献１参照。）。
この関節構造によれば、例えば、切削済みの機械加工部品からなるワークを固定設置された洗浄液噴射ノズルにかざすことでワークを洗浄する等の用途において、洗浄液噴射ノズルから噴射された洗浄液の飛沫が勢いよく飛来する場合でも、内側のシール部材による密封状態が破壊されないように維持することができる。 Conventionally, in order to prevent the inflow of dust and water droplets into mechanism parts such as reducers and bearings provided inside the joint and to prevent lubricant from flowing out from the mechanism parts, the gap between the relative moving surfaces is lip contacted. There is known a joint structure including a double seal member that can be sealed by the above-described method (for example, see Patent Document 1).
According to this joint structure, for example, in a use such as cleaning a workpiece by holding a workpiece made of a machined machined part over a fixedly installed cleaning solution spray nozzle, splashing of the cleaning solution sprayed from the cleaning solution spray nozzle is generated. Even when flying vigorously, the sealed state by the inner sealing member can be maintained so as not to be destroyed.

特開２００９−１０７１１６号公報JP 2009-107116 A

一般的なロボットの関節部は、図８（Ａ）および図８（Ｂ）に示されるように、シール部材としてリップ３３を有するリップシールを用いることでシール部材内の密封状態が維持されている。しかしながら、図８（Ａ）に示される関節構造では、外部から飛来する洗浄液の勢いが強い場合には十分な防護能力を得ることができない。
そこで、特許文献１では、図８（Ａ）に示されるシール部材１９の外側に、もう一つのシール部材を別途配置した関節構造を開示している。このような構造とすることで、勢いの強い洗浄液が直接シール部材１９に衝突することを防ぐことは可能である。しかしながら、外部に別途設けたシール部材の防護能力は完全ではなく、勢いの強い洗浄液が飛来した場合には、外部に配置したシール部材の内側に洗浄液が侵入してしまう可能性がある。特許文献１の関節構造では、いったん外側のシール部材の内側に洗浄液が侵入すると、洗浄液を排出することができず、常にシール部材１９に洗浄液が接する状態となる。つまり、外側のシール部材を有さない構造と比較して、むしろ、シール部材１９が劣化、損傷しやすい過酷な外部環境に置かれることとなる。また、洗浄液の液性が酸性やアルカリ性に傾いた場合には、シール部材１９が劣化して液体に対する防護能力が失われてしまい、機構部品側の潤滑剤が外部に流出したりしてしまう不都合がある。 As shown in FIGS. 8A and 8B, a joint portion of a general robot maintains a sealed state in the seal member by using a lip seal having a lip 33 as the seal member. . However, in the joint structure shown in FIG. 8 (A), sufficient protective ability cannot be obtained when the momentum of the cleaning liquid flying from the outside is strong.
Therefore, Patent Document 1 discloses a joint structure in which another seal member is separately arranged outside the seal member 19 shown in FIG. By adopting such a structure, it is possible to prevent a strong cleaning liquid from directly colliding with the seal member 19. However, the protection capability of the seal member separately provided outside is not perfect, and when a strong cleaning liquid comes in, the cleaning liquid may enter the inside of the sealing member arranged outside. In the joint structure of Patent Document 1, once the cleaning liquid enters the inside of the outer seal member, the cleaning liquid cannot be discharged, and the cleaning liquid always comes into contact with the seal member 19. That is, as compared with the structure having no outer seal member, the seal member 19 is rather placed in a harsh external environment where the seal member 19 is easily deteriorated and damaged. Further, when the cleaning liquid is inclined to acidity or alkalinity, the sealing member 19 is deteriorated and the ability to protect against the liquid is lost, and the lubricant on the mechanical component side flows out to the outside. There is.

本発明は上述した事情に鑑みてなされたものであって、外部からの圧力に対してより高いシール性能を発揮でき、内側のシール部材による密封状態の破壊をより確実に防止して、内側の機構部品の健全性を維持することができる関節構造およびロボットを提供することを目的としている。   The present invention has been made in view of the above-described circumstances, can exhibit higher sealing performance against pressure from the outside, and more reliably prevent destruction of the sealed state by the inner sealing member. An object of the present invention is to provide a joint structure and a robot that can maintain the soundness of mechanical parts.

上記目的を達成するため、本発明は以下の手段を提供する。
本発明の一態様は、２つの関節部材と、２つの該関節部材を所定の軸線回りに相対的に回転駆動する駆動機構と、該駆動機構における潤滑剤保有部の外側を２重に取り囲む位置において、２つの前記関節部材の間をそれぞれ密封する２つのシール部材と、２つの該シール部材の間に設けられた空間の気圧を外気より高くする加圧手段とを備える関節構造を提供する。 In order to achieve the above object, the present invention provides the following means.
One aspect of the present invention includes two joint members, a drive mechanism that relatively drives the two joint members to rotate about a predetermined axis, and a position that surrounds the outside of the lubricant holding portion in the drive mechanism. And providing a joint structure comprising two seal members for sealing between the two joint members, respectively, and a pressurizing means for increasing the air pressure in the space provided between the two seal members to be higher than the outside air.

本態様によれば、駆動機構の潤滑剤保有部の外側を取り囲む位置に配置された内側のシール部材によって、２つの関節部材の間が密封されることにより、潤滑剤保有部からの潤滑剤の外部への漏洩が防止される。また、内側のシール部材とその外側を取り囲む位置に配置された外側のシール部材によって、潤滑剤保有部内の潤滑剤が駆動機構から漏洩しないように２重に封入される。そして、２つのシール部材の間の空間の圧力が、加圧手段の作動によって外気より高められることにより、空間内の気体が外側のシール部材を経由して空間から外側に漏れる方向に作用するので、外側のシール部材を経由した外部からの液滴等の異物の侵入が気体によって遮られ、異物の侵入を効果的に防止することができる。   According to this aspect, the seal member between the two joint members is sealed by the inner seal member disposed at a position surrounding the outer side of the lubricant holding portion of the drive mechanism, so that the lubricant from the lubricant holding portion can be sealed. Leakage to the outside is prevented. Further, the lubricant in the lubricant holding portion is double sealed so as not to leak from the drive mechanism by the inner seal member and the outer seal member disposed at a position surrounding the outer seal member. Since the pressure in the space between the two seal members is higher than the outside air by the operation of the pressurizing means, the gas in the space acts in the direction of leaking outside from the space via the outer seal member. Intrusion of foreign matters such as liquid droplets from the outside via the outer seal member is blocked by the gas, and the intrusion of foreign matters can be effectively prevented.

上記態様においては、２つの前記シール部材の少なくとも一方が、リップシールであることとしてもよい。
このように、シール部材としてリップシールを用いることで外部からの異物の侵入に対し、より優れたシール性能を発揮することができる。 In the above aspect, at least one of the two sealing members may be a lip seal.
Thus, by using a lip seal as the seal member, it is possible to exhibit better sealing performance against the entry of foreign matter from the outside.

上記態様においては、外側の前記シール部材の耐圧性能を、内側の前記シール部材の耐圧性能よりも低くしてもよい。
このようにすることで、加圧手段により空間内の圧力が高くなると、空間内の気体は、耐圧性能の高い内側のシール部材よりも耐圧性能が低い外側のシール部材から外部に漏れる。これにより、内側のシール部材を経由した潤滑剤保有部への気体の漏洩を効果的に防止することができる。 In the above aspect, the pressure resistance performance of the outer sealing member may be lower than the pressure resistance performance of the inner sealing member.
Thus, when the pressure in the space is increased by the pressurizing means, the gas in the space leaks to the outside from the outer seal member having a lower pressure resistance than the inner seal member having the higher pressure resistance. Thereby, the leakage of the gas to the lubricant holding part via the inner seal member can be effectively prevented.

上記態様においては、外側の前記シール部材の外側に、外部からの異物の侵入を防止する防護壁を備えることとしてもよい。
このようにすることで、外部から関節部に向けて噴射される液滴や異物の圧力が高い場合であっても、噴射された液滴や異物は防護壁によって遮られ、外側のシール部材に直接衝突することを防ぐ。これにより、外側のシール部材の破損を防ぐことができる。 In the said aspect, it is good also as providing the protective wall which prevents the penetration | invasion of the foreign material from the outside in the outer side of the said sealing member outside.
In this way, even when the pressure of the droplets or foreign matter ejected from the outside toward the joint is high, the ejected droplets or foreign matter is blocked by the protective wall, and the outer seal member Prevent direct collision. Thereby, damage to the outer seal member can be prevented.

上記態様においては、外側の前記シール部材が弾性材料からなり、周方向の少なくとも１箇所に切れ目を備えることとしてもよい。
このように、外側のシール部材が弾性材料により形成されるので、シール部材に備えられた切れ目を開大するだけで、シール部材に弾性変形を生じさせて容易に取り外すことができる。 In the above aspect, the outer sealing member may be made of an elastic material, and may be provided with a cut at at least one place in the circumferential direction.
Thus, since the outer seal member is formed of an elastic material, it is possible to easily remove the seal member by causing elastic deformation only by opening the cut provided in the seal member.

上記態様においては、前記切れ目が、径方向に対して傾斜していることとしてもよい。
このようにすることで、シール部材を取り付けたときに生じる切れ目の隙間を狭め、切れ目からの空気の漏洩を減らすことができる。 In the above aspect, the cut line may be inclined with respect to the radial direction.
By doing in this way, the clearance gap which arises when a sealing member is attached can be narrowed, and the leakage of the air from a cut can be reduced.

上記態様においては、外側の前記シール部材が、円環状の樹脂材料からなることとしてもよい。
例えば、シール部材として、耐油性、耐薬品性、耐候性等に優れた劣化しにくい樹脂材料を用いることで、シール部材の耐久性を高め、長期間安定してシール部材を使用することができる。
また、弾性を有する樹脂材料を用いることとすれば、シール部材の交換性が増すという利点がある。 In the above aspect, the outer sealing member may be made of an annular resin material.
For example, by using a resin material that is excellent in oil resistance, chemical resistance, weather resistance and the like and hardly deteriorates as the seal member, the durability of the seal member can be improved and the seal member can be used stably for a long period of time. .
Moreover, if the resin material which has elasticity is used, there exists an advantage that the exchange property of a sealing member increases.

上記態様においては、外側の前記シール部材が、周方向の少なくとも１箇所に切れ目を備えることとしてもよい。
このようにすることで、外側のシール部材に備えられた切れ目を開大するだけで、シール部材を容易に取り外すことができ、シール部材の交換を簡便に行うことができる。 In the above aspect, the outer sealing member may be provided with a cut at at least one place in the circumferential direction.
By doing in this way, a seal member can be easily removed and replacement | exchange of a seal member can be performed simply by opening only the cut | opening provided in the outer seal member.

上記態様においては、外側の前記シール部材が、周方向の２箇所以上の切れ目により分割された２つ以上の円弧状部材からなることとしてもよい。
このように、２つ以上に分割した複数の円弧状部材により外側のシール部材を構成することで、シール部材の着脱を容易に行うことができ、シール部材の交換性が増すという利点がある。 In the above aspect, the outer sealing member may be composed of two or more arcuate members divided by two or more cuts in the circumferential direction.
In this way, by configuring the outer seal member with a plurality of arcuate members divided into two or more, there is an advantage that the seal member can be easily attached and detached, and the exchangeability of the seal member is increased.

本発明の他の態様は、２つの関節部材と、２つの該関節部材を所定の軸線回りに相対的に回転駆動する駆動機構と、該駆動機構における潤滑剤保有部の外側を取り囲む位置において、２つの前記関節の間を密封するシール部材と、該シール部材の外側を取り囲む位置に配置され、２つの前記関節部材の隙間を狭めるスリット形成部材と、該スリット形成部材と前記シール部材との間に設けられた空間の気圧を外気より高くする加圧手段とを備える関節構造を提供する。   In another aspect of the present invention, two joint members, a drive mechanism that relatively rotationally drives the two joint members around a predetermined axis, and a position surrounding the outside of the lubricant holding portion in the drive mechanism, A seal member that seals between the two joints, a slit forming member that is disposed at a position that surrounds the outside of the seal member, and that narrows the gap between the two joint members; and between the slit forming member and the seal member There is provided a joint structure provided with pressurizing means for making the air pressure of the space provided in the air higher than the outside air.

本態様によれば、駆動機構の潤滑剤保有部の外側を取り囲む位置に配置された内側のシール部材によって、２つの関節部材の間が密封されることにより、潤滑剤保有部からの潤滑剤の外部への漏洩が防止される。
また、内側のシール部材とその外側を取り囲む位置に配置されて２つの関節部材の隙間を狭めるスリット形成部材との間の空間の圧力が、加圧手段の作動によって外気より高められることにより、空間内の気体が外側のスリット形成部材を経由して空間から外側に漏れる方向に作用するので、スリット形成部材を経由した外部からの液滴等の異物の侵入が気体によって遮られ、異物の侵入を効果的に防止することができる。 According to this aspect, the seal member between the two joint members is sealed by the inner seal member disposed at a position surrounding the outer side of the lubricant holding portion of the drive mechanism, so that the lubricant from the lubricant holding portion can be sealed. Leakage to the outside is prevented.
Further, the pressure of the space between the inner sealing member and the slit forming member that is disposed at a position surrounding the outer sealing member and narrows the gap between the two joint members is increased from the outside air by the operation of the pressurizing means, so that the space Since the inner gas acts in the direction of leaking from the space to the outside via the outer slit forming member, the intrusion of foreign matters such as liquid droplets from the outside via the slit forming member is blocked by the gas, and the invasion of foreign matters is prevented. It can be effectively prevented.

本発明の他の態様は、上記いずれかの関節構造を備えるロボットを提供する。
本態様においては、加圧手段により空間内に供給される気体の流量を測定する流量測定手段を備えることとしてもよい。 Another aspect of the present invention provides a robot including any one of the joint structures described above.
In this aspect, it is good also as providing the flow volume measuring means which measures the flow volume of the gas supplied in space by a pressurization means.

シール部材が劣化したり破損したりした場合には、外部への気体の漏洩量が増加するが、上記態様においては、流量測定手段により空間内に供給される気体の流量を測定することで、シール部材の劣化や破損が生じていることを判定することができる。この結果、簡易な構成にてシール部材の交換時期を容易に判断することができる。   When the seal member deteriorates or breaks, the amount of gas leakage to the outside increases, but in the above aspect, by measuring the flow rate of the gas supplied into the space by the flow rate measuring means, It can be determined that the seal member is deteriorated or broken. As a result, it is possible to easily determine the replacement time of the seal member with a simple configuration.

上記態様においては、前記流量測定手段により測定された気体の流量値に基づいて、前記シール部材の劣化または破損を判定する判定手段を備えることとしてもよい。
このように、測定された気体の流量値が所定の範囲内にあるか否かを判定することで、シール部材の劣化・破損状況をより詳細に判定することができる。 In the above aspect, a determination unit that determines deterioration or breakage of the seal member based on a gas flow rate value measured by the flow rate measurement unit may be provided.
Thus, by determining whether or not the measured gas flow value is within a predetermined range, it is possible to determine in more detail the deterioration / breakage state of the seal member.

本発明によれば、外部からの圧力に対してより高いシール性能を発揮でき、内側のシール部材による密封状態の破壊をより確実に防止して、内側の機構部品の健全性を維持することができるという効果を奏する。   According to the present invention, it is possible to exhibit higher sealing performance against pressure from the outside, more reliably prevent the sealing state from being broken by the inner sealing member, and maintain the soundness of the inner mechanical component. There is an effect that can be done.

本発明の第１実施形態に係るロボットを示す全体図である。1 is an overall view showing a robot according to a first embodiment of the present invention. 図１のロボットの関節部材を示す部分的な縦断面図である。It is a partial longitudinal cross-sectional view which shows the joint member of the robot of FIG. 図１のロボットの関節部材において、隙間を密封するシール部材の一例を示す（Ａ）正面図および、（Ｂ）斜視図である。2A is a front view and FIG. 2B is a perspective view illustrating an example of a seal member that seals a gap in the joint member of the robot of FIG. 1. 本発明の第１実施形態に係るロボットの関節部材を示す部分的な縦断面図であって、外側のシール部材の外側に防護壁を設けた変形例を示す図である。It is a fragmentary longitudinal cross-sectional view which shows the joint member of the robot which concerns on 1st Embodiment of this invention, Comprising: It is a figure which shows the modification which provided the protective wall in the outer side of the outer seal member. 本発明の実施形態に係るロボットの関節部材を示す部分的な縦断面図であって、シール部材が止め環で保持された円環状部材によって形成されていることを示す図である。It is a fragmentary longitudinal cross-section which shows the joint member of the robot which concerns on embodiment of this invention, Comprising: It is a figure which shows that the sealing member is formed of the annular member hold | maintained with the retaining ring. 図５のロボットの関節部材において、隙間を密封するシール部材の（Ａ）切れ目が１つ設けられた例を示す斜視図および、（Ｂ）切れ目が２つ設けられた例を示す斜視図である。FIG. 6 is a perspective view showing an example in which one (A) cut is provided in the joint member of the robot in FIG. 5 and (B) a perspective view showing an example in which two cuts are provided. . 本発明の第２実施形態に係るロボットの関節部材を示す部分的な縦断面図である。It is a partial longitudinal cross-sectional view which shows the joint member of the robot which concerns on 2nd Embodiment of this invention. 従来技術に係るロボットの関節部材を示す（Ａ）部分的な縦断面図および、（Ｂ）内側のシール部材の拡大図である。It is the (A) partial longitudinal cross-sectional view which shows the joint member of the robot which concerns on a prior art, and (B) the enlarged view of an inner side sealing member.

本発明の第１実施形態に係る関節構造１０およびロボット１について、図面を参照しながら以下に説明する。
図１には、本実施形態に係るロボット１を示す全体図が示され、図２には、図１のロボット１の関節部２ｂ（関節部材）の関節構造１０を示す部分的な縦断面図が示されている。また、図３（Ａ）には、図１のロボット１の関節部２ｂにおいて、シール部材２０の一例を示す正面図が示されており、図３（Ｂ）には斜視図が示されている。 The joint structure 10 and the robot 1 according to the first embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is an overall view showing a robot 1 according to this embodiment, and FIG. 2 is a partial longitudinal sectional view showing a joint structure 10 of a joint portion 2b (joint member) of the robot 1 of FIG. It is shown. 3A is a front view showing an example of the seal member 20 in the joint 2b of the robot 1 shown in FIG. 1, and FIG. 3B is a perspective view. .

本実施形態に係るロボット１は、図１に示されるように、ベース３と、ベース３に対して鉛直な軸線Ｌ１回りに回転可能に支持される回転台６と、軸線Ｌ１と直交する軸線Ｌ２に対して揺動可能な第１アーム７と、軸線Ｌ２と間隔をあけて平行な軸線Ｌ３に対して揺動可能な第２アーム８とを備えている。第２アーム８はまた、軸線Ｌ３と直交する軸線Ｌ４回りに回転可能に設けられている。また、第２アーム８の先端には手首部５が連結されており、手首部５は、軸線Ｌ４に直交する軸線Ｌ５回りに回転可能に設けられている。さらに、手首部５には、軸線Ｌ５に直交する軸線Ｌ６周りに回転可能であり、エンドエフェクタを取り付けることができるフランジ９が備えられている。   As shown in FIG. 1, the robot 1 according to this embodiment includes a base 3, a turntable 6 that is rotatably supported about an axis L <b> 1 perpendicular to the base 3, and an axis L <b> 2 that is orthogonal to the axis L <b> 1. The first arm 7 is swingable with respect to the axis L2, and the second arm 8 is swingable with respect to the axis L3 parallel to the axis L2. The second arm 8 is also provided to be rotatable around an axis L4 orthogonal to the axis L3. The wrist 5 is connected to the tip of the second arm 8, and the wrist 5 is rotatably provided about an axis L5 orthogonal to the axis L4. Furthermore, the wrist part 5 is provided with a flange 9 that can rotate around an axis L6 orthogonal to the axis L5 and to which an end effector can be attached.

ロボット１を構成するベース３、回転台６、第１アーム７、第２アーム８、手首部５等の部材はそれぞれ、関節部２を介して互いに連結されている。
すなわち、ベース３と回転台６は、第１関節部２ａ（関節部材）を介して回転可能に連結され、回転台６と第１アーム７は、第２関節部２ｂを介して揺動可能に連結されている。また、第１アーム７と第２アーム８は、第３関節部２ｃ（関節部材）および第４関節部２ｄ（関節部材）を介して連結されており、第２アーム８と、手首部５は、手首関節部２ｅ（関節部材）を介して連結されている。さらに、フランジ９は、最終関節部２ｆ（関節部材）を介して手首部５に連結されている。 Members such as the base 3, the turntable 6, the first arm 7, the second arm 8, and the wrist portion 5 constituting the robot 1 are connected to each other via the joint portion 2.
That is, the base 3 and the turntable 6 are rotatably connected via the first joint portion 2a (joint member), and the turntable 6 and the first arm 7 are swingable via the second joint portion 2b. It is connected. The first arm 7 and the second arm 8 are connected via a third joint 2c (joint member) and a fourth joint 2d (joint member), and the second arm 8 and the wrist 5 are Are connected via a wrist joint 2e (joint member). Furthermore, the flange 9 is connected to the wrist part 5 through the final joint part 2f (joint member).

また、このロボット１には、関節部内に供給される空気（気体）Ａの流量を測定する図示しない流量測定部３５（流量測定手段）と、該流量測定部３５により測定された空気Ａの流量値に基づいて、後述するシール部材の劣化または破損を判定する判定部３６（判定手段）とが設けられている。   The robot 1 also includes a flow rate measuring unit 35 (flow rate measuring means) (not shown) that measures the flow rate of air (gas) A supplied into the joint, and the flow rate of air A measured by the flow rate measuring unit 35. A determination unit 36 (determination unit) that determines deterioration or breakage of a seal member, which will be described later, is provided based on the value.

以下、図面を参照し、本実施形態に係る関節構造について説明する。
なお、本実施形態では、代表例として、回転台６に対して第１アーム７を回転させる関節部２ｂの関節構造１０について説明するが、その他の各関節部についても、同様の関節構造とすることができる。 Hereinafter, the joint structure according to the present embodiment will be described with reference to the drawings.
In the present embodiment, the joint structure 10 of the joint portion 2b that rotates the first arm 7 relative to the turntable 6 will be described as a representative example, but the other joint portions have the same joint structure. be able to.

図２に示されるように、本実施形態に係る関節構造１０は、回転台６および第１アーム７と、回転台６に対して水平な軸線Ｌ２回りに第１アーム７を回転駆動させる駆動機構４と、回転台６と第１アーム７との間を密封する密封手段とを備えている。駆動機構４は、モータ４ａと、該モータ４ａの回転を減速して第１アーム７に伝達する減速機４ｂとを備えている。   As shown in FIG. 2, the joint structure 10 according to this embodiment includes a turntable 6 and a first arm 7, and a drive mechanism that rotates the first arm 7 about an axis L <b> 2 that is horizontal with respect to the turntable 6. 4 and a sealing means for sealing between the turntable 6 and the first arm 7. The drive mechanism 4 includes a motor 4 a and a speed reducer 4 b that decelerates the rotation of the motor 4 a and transmits it to the first arm 7.

減速機４ｂは、内部に潤滑剤を保有する潤滑剤保有部を備え、該潤滑剤保有部内に潤滑剤を供給する潤滑剤補給口１３と、劣化した潤滑剤を外部に排出する潤滑剤排出口１４とがそれぞれ設けられている。   The speed reducer 4b includes a lubricant holding portion that holds a lubricant therein, a lubricant supply port 13 that supplies the lubricant into the lubricant holding portion, and a lubricant discharge port that discharges the deteriorated lubricant to the outside. 14 are provided.

密封手段は、回転台６に固定される減速機４ｂの固定部と、第１アーム７に固定される減速機４ｂの可動部との間に配置され、両者間の隙間を密封する内側のシール部材１９と、内側の該シール部材１９の外側を取り囲む位置において、減速機４ｂの固定部と第１アーム７との隙間を密封する外側のシール部材２０と、内側のシール部材１９と外側のシール部材２０との間に画定された空間１１を加圧する加圧部（加圧手段）１２とを備えている。
密封手段は、潤滑剤や部分摩耗による塵埃が外部に漏出することを防止するとともに、外部から関節部２ｂ内部に液滴や異物が侵入することを防ぐものである。 The sealing means is disposed between the fixed part of the speed reducer 4b fixed to the turntable 6 and the movable part of the speed reducer 4b fixed to the first arm 7, and is an inner seal that seals the gap between the two. A member 19, an outer seal member 20 that seals a gap between the fixed portion of the speed reducer 4 b and the first arm 7, and a seal between the inner seal member 19 and the outer seal at a position surrounding the outer side of the inner seal member 19. A pressurizing unit (pressurizing means) 12 that pressurizes the space 11 defined between the member 20 and the member 20 is provided.
The sealing means prevents the lubricant and dust due to partial wear from leaking to the outside, and prevents liquid droplets and foreign matter from entering the joint portion 2b from the outside.

減速機４ｂにおける潤滑剤保有空間の外側を２重に取り囲む位置には、２つの関節部の間をそれぞれ密封する２つのシール部材が設けられている。
内側のシール部材１９は、円環状の部材であり、図８（Ｂ）に示されるように、略Ｕ字状の縦断面形状を有するとともに、径方向内方に配置されるメインリップと、該メインリップの外壁面の一部から突出する先細りのリップ３３（ダストリップ）とを備えている。 Two seal members for sealing between the two joint portions are provided at positions that double surround the outside of the lubricant holding space in the speed reducer 4b.
The inner seal member 19 is an annular member, and has a substantially U-shaped vertical cross-sectional shape as shown in FIG. 8B, and a main lip disposed radially inward, A tapered lip 33 (dust strip) protruding from a part of the outer wall surface of the main lip is provided.

外側のシール部材２０は、締め具２１により減速機４ｂの固定部に取り付けられた円環状の部材であり、図３（Ａ）、および図３（Ｂ）に示されるように、径方向内方に向かって斜めに突出するフランジ状のリップを備えている。   The outer seal member 20 is an annular member attached to the fixed portion of the speed reducer 4b by a fastener 21, and is radially inward as shown in FIGS. 3 (A) and 3 (B). It has a flange-like lip projecting obliquely toward the.

また、シール部材２０には、図３（Ａ）、および図３（Ｂ）に示されるように、シール部材２０の周方向の１箇所に切れ目２６が形成されている。すなわち、シール部材２０は、この切れ目２６の部分を周方向に開大することで、容易に着脱できるようになっている。   Further, as shown in FIG. 3A and FIG. 3B, the seal member 20 has a cut 26 at one place in the circumferential direction of the seal member 20. That is, the seal member 20 can be easily attached and detached by opening the portion of the cut 26 in the circumferential direction.

本実施形態においては、シール部材２０に設けられた切れ目２６は、径方向に対して所定の角度で傾斜して、軸方向に平行に形成されている。
なお、シール部材２０は、図６（Ｂ）に示されるように、切れ目２６を２つ以上形成して独立した２つ以上の円弧状部材２８、２９に分割してもよい。 In the present embodiment, the cut 26 provided in the seal member 20 is inclined at a predetermined angle with respect to the radial direction and is formed parallel to the axial direction.
As shown in FIG. 6B, the seal member 20 may be divided into two or more arc-shaped members 28 and 29 that are independent by forming two or more cuts 26.

シール部材１９，２０は、弾性を有するゴム製の材料や樹脂材料から形成される。ゴム製の材料としては、フッ素ゴム、ニトリルゴム、水素化ニトリルゴム、シリコーンゴム等を用いることができ、樹脂材料としては、四フッ化エチレン樹脂（ＰＴＦＥ）等のフッ素樹脂等を用いることができる。
シール部材２０の材料は、使用環境等に応じて適宜選択され、上記以外の材料を用いることも可能である。
また、内側のシール部材１９の耐圧性能は、外側のシール部材２０の耐圧性能よりも高く設定されている。 The seal members 19 and 20 are formed from an elastic rubber material or resin material. As the rubber material, fluorine rubber, nitrile rubber, hydrogenated nitrile rubber, silicone rubber or the like can be used. As the resin material, fluorine resin such as tetrafluoroethylene resin (PTFE) or the like can be used. .
The material of the seal member 20 is appropriately selected according to the use environment and the like, and materials other than those described above can be used.
Further, the pressure resistance performance of the inner seal member 19 is set higher than the pressure resistance performance of the outer seal member 20.

内側のシール部材１９と外側のシール部材２０との間には、空間１１が画定されている。
図２に示されるように、加圧部１２は空間１１に接続する配管と、図示しない空気圧源とを備えている。
加圧部１２によって空間１１内に空気Ａを供給し、空間１１内の圧力を外気より高めることで、空間１１内の空気Ａが外側のシール部材２０を経由して空間１１から外側に漏れる方向に作用するようになっている。 A space 11 is defined between the inner seal member 19 and the outer seal member 20.
As shown in FIG. 2, the pressurizing unit 12 includes a pipe connected to the space 11 and a pneumatic source (not shown).
The direction in which the air A in the space 11 leaks outside from the space 11 via the outer sealing member 20 by supplying the air A into the space 11 by the pressurizing unit 12 and increasing the pressure in the space 11 from the outside air. It comes to act on.

このように構成された本実施形態に係る関節構造１０の作用について以下に説明する。
本実施形態に係る関節構造１０によれば、空間１１の圧力が加圧部１２の作動によって外気より高められることで、空間１１内の空気Ａが外側のシール部材２０を経由して空間１１から外側に漏れる方向に作用する。この結果、外側のシール部材２０を経由した外部からの液滴等の異物の侵入が空気Ａによって遮られ、異物の侵入を効果的に防止することができる。 The operation of the joint structure 10 according to the present embodiment configured as described above will be described below.
According to the joint structure 10 according to the present embodiment, the pressure in the space 11 is increased from the outside air by the operation of the pressurizing unit 12, so that the air A in the space 11 passes from the space 11 via the outer seal member 20. Acts in the direction of leaking outside. As a result, the entry of foreign matter such as droplets from the outside via the outer seal member 20 is blocked by the air A, and the entry of foreign matter can be effectively prevented.

外側のシール部材２０の耐圧性能は、内側のシール部材１９の耐圧性能よりも低いため、加圧部１２により空間１１内の気圧が高められると、空間１１内の空気Ａは、耐圧性能の高い内側のシール部材１９よりも耐圧性能が低い外側のシール部材２０から外部に漏れるため、内側のシール部材１９を経由した潤滑剤保有部への塵埃等の侵入を効果的に防止することができる。特に、外側のシール部材２０の劣化により耐圧性能が低下しても、外側のシール部材２０のリップを経由して外側に漏れる空気Ａによって、外部からの塵埃の侵入防止効果を維持することができる。   Since the pressure resistance performance of the outer seal member 20 is lower than the pressure resistance performance of the inner seal member 19, when the pressure in the space 11 is increased by the pressurizing unit 12, the air A in the space 11 has high pressure resistance performance. Since the outer seal member 20 having a pressure resistance lower than that of the inner seal member 19 leaks to the outside, it is possible to effectively prevent dust and the like from entering the lubricant holding portion via the inner seal member 19. In particular, even if the pressure resistance is reduced due to the deterioration of the outer seal member 20, the effect of preventing dust from entering from the outside can be maintained by the air A leaking to the outside via the lip of the outer seal member 20. .

本実施形態においては、シール部材２０が、リップシールであるので、外部からの液滴等の異物の侵入に対し、より優れたシール性能を発揮することができる。   In the present embodiment, since the seal member 20 is a lip seal, it is possible to exhibit more excellent sealing performance against entry of foreign matters such as liquid droplets from the outside.

図３に示されるように、シール部材２０は、周方向の１箇所に切れ目２６を備えた弾性材料により形成されているので、シール部材２０に弾性変形を生じさせて切れ目２６を周方向に開大するだけで、シール部材２０を容易に交換することができる。
また、切れ目２６を径方向に対して傾斜する方向に設けることにより、シール部材２０を取り付けたときに生じる切れ目２６の隙間を狭め、切れ目２６からの空気Ａの漏洩を減らすことができる。 As shown in FIG. 3, the seal member 20 is formed of an elastic material having a cut 26 at one place in the circumferential direction. Therefore, the seal member 20 is elastically deformed to open the cut 26 in the circumferential direction. The seal member 20 can be easily replaced only by increasing it.
In addition, by providing the cut 26 in a direction inclined with respect to the radial direction, the gap of the cut 26 generated when the seal member 20 is attached can be narrowed, and the leakage of the air A from the cut 26 can be reduced.

シール部材２０として、耐油性、耐薬品性、耐候性等に優れた樹脂材料を用いることで、シール部材２０の耐久性を高め、長期間安定してシール部材を使用することができる。また、弾性を有する樹脂材料を用いることとすれば、シール部材の交換性も増す。   By using a resin material excellent in oil resistance, chemical resistance, weather resistance, etc. as the seal member 20, the durability of the seal member 20 can be improved and the seal member can be used stably for a long period of time. Moreover, if the resin material which has elasticity is used, the exchangeability of a sealing member will also increase.

本実施形態においては、図４に示されるように、外側のシール部材２０の外側に、外部からの異物の侵入を防止する防護壁２７を設けることにより、外部から関節部２ｂに向けて噴射される液滴や異物の圧力が高い場合であっても、噴射された液滴や異物は防護壁２７によって遮られ、外側のシール部材２０に直接衝突することを防ぐ。これにより、外側のシール部材２０の破損を防ぐことができる。   In the present embodiment, as shown in FIG. 4, by providing a protective wall 27 that prevents the entry of foreign matter from the outside on the outside of the outer seal member 20, the jet is injected from the outside toward the joint portion 2 b. Even when the pressure of the liquid droplets or foreign matter is high, the ejected liquid droplets or foreign matter is blocked by the protective wall 27 and is prevented from directly colliding with the outer seal member 20. Thereby, damage to the outer seal member 20 can be prevented.

上記態様においては、外側のシール部材を止め環２１’によって保持された円環状のシール部材２０’としてもよい。リップシールであるシール部材２０の代わりに、図５に示されるようなシール部材２０’を用いた場合には、シール部材２０を用いる場合に比べて密封性には劣るが、空間１１内の空気Ａがシール部材２０’のわずかな隙間から外部へ噴き出すことで、関節部内側への液滴や異物の侵入を防止することができる。
また、リップシールであるシール部材２０に比べ、シール部材が劣化したり破損したりした場合の密封性の低下を少なくすることができる。
また、相手側接触面の表面粗さの粗滑にかかわらず、同一のシール部材を用いることができ、リップシールであるシール部材２０に比べて加工が容易となり、製造コストや工数を低減させることができる。 In the above aspect, the outer seal member may be an annular seal member 20 ′ held by the retaining ring 21 ′. When the seal member 20 ′ as shown in FIG. 5 is used instead of the seal member 20 which is a lip seal, the sealing performance is inferior to that when the seal member 20 is used. As A is ejected to the outside through a slight gap in the seal member 20 ′, it is possible to prevent intrusion of liquid droplets or foreign matters to the inside of the joint portion.
Further, as compared with the seal member 20 that is a lip seal, it is possible to reduce a decrease in sealing performance when the seal member is deteriorated or damaged.
In addition, the same sealing member can be used regardless of the rough surface roughness of the mating contact surface, making the processing easier and reducing manufacturing costs and man-hours compared to the sealing member 20 that is a lip seal. Can do.

なお、シール部材２０は、図６（Ａ）に示されるように、周方向の１箇所に切れ目２６を設けた構成としたり、図６（Ｂ）に示されるように、周方向の２箇所以上に切れ目２６を設けて２つ以上の円弧状部材２８、２９に分割可能とすれば、シール部材２０の着脱がさらに容易になり、シール部材２０の交換性が増すという利点がある。   The seal member 20 has a configuration in which a cut 26 is provided at one place in the circumferential direction as shown in FIG. 6 (A), or two or more places in the circumferential direction as shown in FIG. 6 (B). If the slit 26 is provided in the base plate so that it can be divided into two or more arc-shaped members 28 and 29, the seal member 20 can be easily attached and detached, and the exchangeability of the seal member 20 is increased.

また、本実施形態のロボット１に図示しない流量測定部３５を設けて、空間１１内部に供給される空気Ａの流量を測定することとすれば、シール部材１９，２０の劣化や破損の状態を簡便に判定することができ、シール部材１９，２０の交換時期を判断することができる。
さらに、流量測定部３５で測定された空気Ａの流量値が所定の範囲内にあるか否かを判定部３６により判定することで、詳細にシール部材１９，２０の劣化状況を判定することができる。 Further, if the flow rate measuring unit 35 (not shown) is provided in the robot 1 of the present embodiment and the flow rate of the air A supplied into the space 11 is measured, the state of deterioration or breakage of the seal members 19 and 20 is determined. This can be easily determined, and the replacement time of the seal members 19 and 20 can be determined.
Furthermore, the determination unit 36 determines whether or not the flow rate value of the air A measured by the flow rate measurement unit 35 is within a predetermined range, whereby the deterioration status of the seal members 19 and 20 can be determined in detail. it can.

次に、本発明の第２の実施形態に係る関節構造１０について、図面を参照して以下に説明する。
本実施形態の説明において、上述した第１の実施形態に係るロボット１と構成を共通とする箇所には同一符号を伏して説明を省略する。
本実施形態に係る関節構造１０は、図７に示されるように、外側のシール部材２０の代わりに、スリット形成部材３１が設けられている点において、第１の実施形態に係る関節構造１０と相違している。 Next, a joint structure 10 according to a second embodiment of the present invention will be described below with reference to the drawings.
In the description of the present embodiment, the portions having the same configuration as those of the robot 1 according to the first embodiment described above are given the same reference numerals and the description thereof is omitted.
As shown in FIG. 7, the joint structure 10 according to the present embodiment is different from the joint structure 10 according to the first embodiment in that a slit forming member 31 is provided instead of the outer seal member 20. It is different.

本実施形態に係る関節構造１０によれば、内側のシール部材１９とスリット形成部材３１との間の空間１１の圧力が、加圧部１２の作動によって外気より高められることにより、空間１１内の空気Ａがスリット形成部材３１を経由して空間１１から外側に漏れる方向に作用するので、スリット形成部材３１を経由した外部からの液滴等の異物の侵入が空気Ａによって遮られ、異物の侵入を効果的に防止することができる。
また、第１の実施形態のような、２つ以上のシール部材を使用する場合に比べ、使用するシール部材の数を減少させながらも十分にシール性能を確保することができ、シール部材の製造コストや工数を減らすことができる。 According to the joint structure 10 according to the present embodiment, the pressure in the space 11 between the inner seal member 19 and the slit forming member 31 is increased from the outside air by the operation of the pressurizing unit 12. Since the air A acts in the direction of leaking outside from the space 11 via the slit forming member 31, the entry of foreign matters such as droplets from the outside via the slit forming member 31 is blocked by the air A, and the foreign matter enters. Can be effectively prevented.
Further, as compared with the case of using two or more seal members as in the first embodiment, the seal performance can be sufficiently ensured while reducing the number of seal members to be used, and the manufacture of the seal members Costs and man-hours can be reduced.

以上、説明した実施形態においては、一例として関節部２ｂの関節構造１０について説明したが、その他の各関節部についても、同様の関節構造を有することとしてもよい。   In the embodiment described above, the joint structure 10 of the joint portion 2b has been described as an example, but the other joint portions may have the same joint structure.

上記実施形態では、シール部材を２つ設けた場合について説明したが、シール部材は２つ以上設けることとしてもよい。
さらに、シール部材として円環状のものを例示したが、これに代えて、他の任意の形状に形成してもよい。
また、空間１１内に供給する気体としては空気Ａに限定されるものではなく、他の任意の気体を採用してもよい。 In the above embodiment, the case where two seal members are provided has been described, but two or more seal members may be provided.
Furthermore, although the annular member is exemplified as the sealing member, it may be formed in any other shape instead.
Further, the gas supplied into the space 11 is not limited to the air A, and any other gas may be adopted.

以上、上記実施形態を用いて本発明について説明してきたが、本発明の技術的範囲は上記実施形態に記載の範囲には限定されない。発明の要旨を逸脱しない範囲で上記実施形態に多様な変更又は改良を加えることができ、該変更又は改良を加えた形態も本発明の技術的範囲に含まれる。   As mentioned above, although this invention was demonstrated using the said embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. Various changes or improvements can be added to the above-described embodiment without departing from the gist of the invention, and embodiments to which the changes or improvements are added are also included in the technical scope of the present invention.

１ ロボット
２、２ａ、２ｂ、２ｃ、２ｄ、２ｅ、２ｆ 関節部材
４、４ａ、４ｂ 駆動機構
５ 手首部
１０ 関節構造
１１ 空間
１２ 加圧手段
１９、２０、２０’ シール部材
２７ 防護壁
３１ スリット形成部材
Ａ 空気（気体） DESCRIPTION OF SYMBOLS 1 Robot 2, 2a, 2b, 2c, 2d, 2e, 2f Joint member 4, 4a, 4b Drive mechanism 5 Wrist part 10 Joint structure 11 Space 12 Pressure means 19, 20, 20 'Seal member 27 Protective wall 31 Slit formation Member A Air (gas)

Claims (13)

２つの関節部材と、
２つの該関節部材を所定の軸線回りに相対的に回転駆動する駆動機構と、
該駆動機構における潤滑剤保有部の外側を２重に取り囲む位置において、２つの前記関節部材の間をそれぞれ密封する２つのシール部材と、
２つの該シール部材の間に設けられた空間の気圧を外気より高くする加圧手段とを備える関節構造。 Two joint members;
A drive mechanism that relatively rotationally drives the two joint members around a predetermined axis;
Two seal members that respectively seal between the two joint members at a position that doublely surrounds the outside of the lubricant holding portion in the drive mechanism;
A joint structure comprising pressurizing means for making the pressure of a space provided between the two seal members higher than the outside air. ２つの前記シール部材の少なくとも一方が、リップシールである請求項１に記載の関節構造。   The joint structure according to claim 1, wherein at least one of the two seal members is a lip seal. 外側の前記シール部材の耐圧性能が、内側の前記シール部材の耐圧性能よりも低い請求項１または請求項２に記載の関節構造。   The joint structure according to claim 1 or 2, wherein the pressure resistance performance of the outer sealing member is lower than the pressure resistance performance of the inner sealing member. 外側の前記シール部材の外側に、外部からの異物の侵入を防止する防護壁を備える請求項１から請求項３のいずれかに記載の関節構造。   The joint structure according to any one of claims 1 to 3, further comprising a protective wall that prevents entry of foreign matter from outside on the outside of the outer seal member. 外側の前記シール部材が弾性材料からなり、周方向の少なくとも１箇所に切れ目を備える請求項１から請求項４のいずれかに記載の関節構造。   The joint structure according to any one of claims 1 to 4, wherein the outer sealing member is made of an elastic material and has a cut at at least one place in a circumferential direction. 前記切れ目が、径方向に対して傾斜している請求項５に記載の関節構造。   The joint structure according to claim 5, wherein the cut is inclined with respect to a radial direction. 外側の前記シール部材が、円環状の樹脂材料からなる請求項１から請求項４のいずれかに記載の関節構造。   The joint structure according to any one of claims 1 to 4, wherein the outer seal member is made of an annular resin material. 外側の前記シール部材が、周方向の少なくとも１箇所に切れ目を備える請求項７に記載の関節構造。   The joint structure according to claim 7, wherein the outer seal member includes a cut at at least one place in a circumferential direction. 外側の前記シール部材が、周方向の２箇所以上の切れ目により分割された２つ以上の円弧状部材からなる請求項７に記載の関節構造。   The joint structure according to claim 7, wherein the outer seal member includes two or more arc-shaped members divided by two or more cuts in the circumferential direction. ２つの関節部材と、
２つの該関節部材を所定の軸線回りに相対的に回転駆動する駆動機構と、
該駆動機構における潤滑剤保有部の外側を取り囲む位置において、２つの前記関節部材の間を密封するシール部材と、
該シール部材の外側を取り囲む位置に配置され、２つの前記関節部材の隙間を狭めるスリット形成部材と、
該スリット形成部材と前記シール部材との間に設けられた空間の気圧を外気より高くする加圧手段とを備える関節構造。 Two joint members;
A drive mechanism that relatively rotationally drives the two joint members around a predetermined axis;
A seal member that seals between the two joint members at a position surrounding the outside of the lubricant holding portion in the drive mechanism;
A slit forming member disposed at a position surrounding the outside of the seal member and narrowing a gap between the two joint members;
A joint structure comprising pressurizing means for increasing the air pressure in the space provided between the slit forming member and the seal member to be higher than the outside air. 請求項１から請求項１０のいずれかに記載の関節構造を備えるロボット。   A robot comprising the joint structure according to any one of claims 1 to 10. 前記加圧手段により前記空間内に供給される気体の流量を測定する流量測定手段を備える請求項１１に記載のロボット。   The robot according to claim 11, further comprising a flow rate measuring unit that measures a flow rate of the gas supplied into the space by the pressurizing unit. 前記流量測定手段により測定された気体の流量値に基づいて、前記シール部材の劣化または破損を判定する判定手段を備える請求項１２に記載のロボット。
The robot according to claim 12, further comprising a determination unit that determines deterioration or breakage of the seal member based on a gas flow rate value measured by the flow rate measurement unit.
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