JP2018028500A - Liquid detection device and substrate processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately detect a liquid flowing in only a part of a pipe section.SOLUTION: A liquid detection device 8 comprises a light emitting unit 81, a light receiving unit 82, and a determination unit 71. The light emitting unit 81 emits light toward a drainage pipe 62 being a pipe extending along the gravity direction. The light receiving unit 82 receives the light from the light emitting unit 81 through the drainage pipe 62. The determination unit 71 determines whether a liquid flowing in a part of a section of the drainage pipe 62 exists or not on the basis of an output from the light receiving unit 82. A plurality of detection points corresponding to the light from the light emitting unit 81, in the drainage pipe 62 are arranged in an arrangement direction inclined to a lengthwise direction of the drainage pipe 62. Thus the liquid flowing in only a part of the section of the drainage pipe 62 can be accurately detected.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a photoelectric liquid detection device that detects a liquid in a pipe line, and a substrate processing apparatus including the liquid detection device.

  Conventionally, in a manufacturing process of a semiconductor substrate (hereinafter simply referred to as “substrate”), various processes are performed on the substrate. For example, a chemical solution such as etching is performed on the surface of the substrate by discharging the chemical solution from a nozzle onto a substrate having a resist pattern formed on the surface. As described above, in an apparatus that performs a process of supplying a processing liquid to a substrate, a detection unit that monitors a leakage of the processing liquid in the processing liquid piping may be provided. In the detection unit, for example, a liquid level sensor for optically measuring the liquid level in the tank is used.

  For example, Patent Document 1 discloses a liquid level detector attached to a translucent tube. The liquid level detector includes one light-emitting element that is close to the outer peripheral surface of the translucent tube, and one light-receiving element that is disposed close to the outer peripheral surface of the translucent tube and is opposed to the light-emitting element. Prepare. Further, Patent Document 2 discloses a detection device that detects a liquid level of a liquid contained in a tubular body. The detection apparatus includes a light projecting unit and a light receiving unit that extend parallel to the longitudinal direction of the tube.

JP-A-8-293234 Japanese Patent No. 4054275

  By the way, in the apparatus of patent document 1 and patent document 2, although the liquid level of the liquid with which a pipe line is filled can be detected, a small amount of liquid flowing through only a part of the pipe cross section is accurately detected. It is difficult to detect. For example, when a small amount of liquid leaks due to a valve failure or the like and flows along a part of the inner peripheral surface of the pipe, the flow path of the liquid does not accidentally cross the light path from the light projecting unit to the light receiving unit. As far as the devices of Patent Document 1 and Patent Document 2 are concerned, it is difficult to detect the liquid.

  The present invention has been made in view of the above problems, and an object of the present invention is to accurately detect a liquid flowing through only a part of a pipe cross section.

  The invention according to claim 1 is a photoelectric liquid detection device that detects a liquid in a pipe line, and includes a light emitting unit that emits light toward a pipe line extending in the direction of gravity, and the pipe line. A light-receiving unit that receives light from the light-emitting unit that has passed through, and a determination unit that determines the presence or absence of liquid flowing in a part of the cross-section of the pipeline based on an output from the light-receiving unit, A plurality of detection points corresponding to the light from the light emitting unit are arranged in an arrangement direction inclined with respect to the longitudinal direction of the pipe.

  A second aspect of the present invention is the liquid detection device according to the first aspect, wherein the plurality of detection points are arranged over the entire width of the pipe line in the width direction of the pipe line.

  A third aspect of the present invention is the liquid detection device according to the first or second aspect, wherein the plurality of detection points are arranged in a matrix in the longitudinal direction of the conduit and in a direction perpendicular to the longitudinal direction. Be placed.

  A fourth aspect of the present invention is the liquid detection device according to any one of the first to third aspects, wherein the light receiving unit is arranged along an outer surface of the pipe line.

  A fifth aspect of the present invention is the liquid detection device according to any one of the first to fourth aspects, wherein the pipe line extends in parallel to the direction of gravity.

  A sixth aspect of the present invention is the liquid detection device according to any one of the first to fifth aspects, wherein the determination unit is configured to apply liquid to the entire cross section of the pipe line based on an output from the light receiving unit. It is also possible to detect the presence of.

  The invention according to claim 7 is a substrate processing apparatus for processing a substrate, a chamber, a substrate holding unit for holding the substrate in the chamber, a processing liquid supply unit for supplying a processing liquid to the substrate, A drainage pipe that guides the processing liquid from the processing liquid supply unit to the outside of the chamber, and the liquid detection device according to any one of claims 1 to 6, wherein the liquid detection device is connected to the pipe line. A liquid in the drainage pipe is detected.

  In the present invention, it is possible to accurately detect the liquid flowing through only a part of the pipe cross section.

It is a figure which shows the structure of the substrate processing apparatus which concerns on one embodiment. It is a block diagram which shows a process liquid supply part. It is a figure which shows the 3rd nozzle of a retracted position. It is a figure which shows a some detection point. It is a figure which shows the other example of a some detection point.

  FIG. 1 is a diagram showing a configuration of a substrate processing apparatus 1 according to an embodiment of the present invention. The substrate processing apparatus 1 is a single-wafer type apparatus that processes semiconductor substrates 9 (hereinafter simply referred to as “substrates 9”) one by one. The substrate processing apparatus 1 performs processing by supplying a processing liquid to the substrate 9. In FIG. 1, a part of the configuration of the substrate processing apparatus 1 is shown in cross section.

  The substrate processing apparatus 1 includes a chamber 11, a substrate holding unit 31, a substrate rotating mechanism 33, a cup unit 4, a processing liquid supply unit 5, and a control unit 7. Inside the chamber 11, the substrate holding part 31, the cup part 4 and the like are accommodated. The control unit 7 controls each component of the substrate processing apparatus 1. The control unit 7 is a general computer system including a CPU that performs various arithmetic processes, a ROM that stores basic programs, a RAM that stores various information, and the like. The function of the determination unit 71 is realized by the control unit 7. In other words, the control unit 7 includes the determination unit 71.

  The substrate holding part 31 is a substantially disk-shaped member centering on the central axis J1 which faces the up-down direction. The substrate 9 is disposed above the substrate holding unit 31. The substrate 9 is held by the substrate holding unit 31 in a horizontal state in the chamber 11. The substrate rotation mechanism 33 is disposed below the substrate holding unit 31. The substrate rotation mechanism 33 rotates the substrate 9 together with the substrate holder 31 around the central axis J1. The substrate rotation mechanism 33 is accommodated in a rotation mechanism accommodating portion 34 having a substantially cylindrical shape with a lid.

  The treatment liquid supply unit 5 individually supplies a plurality of types of treatment liquids to the substrate 9. The processing liquid supply unit 5 includes a first nozzle 51, a second nozzle 52, and a third nozzle 53. Each of the first nozzle 51 and the second nozzle 52 supplies a processing liquid from above the substrate 9 toward the upper main surface of the substrate 9 (hereinafter referred to as “upper surface 91”). In a state where the processing liquid is supplied from the first nozzle 51 to the substrate 9, the second nozzle 52 and the third nozzle 53 are retracted to the outside in the radial direction of the substrate 9. When the processing liquid is supplied from the second nozzle 52 to the substrate 9, the first nozzle 51 and the third nozzle 53 retreat outward in the radial direction of the substrate 9, and the second nozzle 52 is above the substrate 9. To position. The third nozzle 53 supplies the processing liquid from above the substrate 9 toward the peripheral region (that is, the edge portion) of the upper surface 91 of the substrate 9. In FIG. 1, the first nozzle 51, the second nozzle 52, and the third nozzle 53 are drawn above the substrate 9. As illustrated in FIG. 1, the processing liquid supply unit 5 may also include a lower nozzle that is disposed below the substrate 9 and supplies the processing liquid to the lower main surface of the substrate 9.

  The cup portion 4 is an annular member centered on the central axis J <b> 1 and is disposed around the substrate 9 and the substrate holding portion 31. The cup part 4 includes an upper cup part 41, a lower cup part 42, and a cup moving mechanism 43. The upper cup portion 41 is a substantially cylindrical member centered on the central axis J1. The upper cup portion 41 is disposed on the outer side in the radial direction of the substrate 9 and the substrate holding portion 31 and covers the sides of the substrate 9 and the substrate holding portion 31 over the entire circumference. The upper cup portion 41 receives a processing liquid and the like scattered from the rotating substrate 9 toward the periphery. The cup moving mechanism 43 moves the upper cup portion 41 in the vertical direction. The upper cup portion 41 is moved by a cup moving mechanism 43 between a processing position that is a position around the substrate 9 shown in FIG. 1 and a retracted position below the processing position.

  The lower cup part 42 is a bottomed substantially cylindrical member centering on the central axis J1. The lower cup portion 42 is disposed on the radially outer side of the rotation mechanism housing portion 34 below the upper cup portion 41. For example, the lower cup portion 42 is fixed to the outer surface of the rotation mechanism housing portion 34. The lower cup part 42 is connected to the lower part of the upper cup part 41. Specifically, the lower end portion of the upper cup portion 41 is inserted into the lower cup portion 42. The lower cup part 42 receives the processing liquid received by the upper cup part 41. At the bottom of the lower cup portion 42, a drain port 44 for discharging the processing liquid received by the lower cup portion 42 is provided. A common drain pipe 45 is connected to the drain port 44 to guide the processing liquid and the like to the outside of the chamber 11. The common drain pipe 45 extends downward from the drain port 44. For example, the common drain pipe 45 may extend substantially vertically downward, or may extend downward while being inclined with respect to the vertical direction.

  FIG. 2 is a block diagram illustrating the processing liquid supply unit 5 of the substrate processing apparatus 1. In FIG. 2, the configuration other than the treatment liquid supply unit 5 is also shown. The first nozzle 51 is connected to a chemical liquid supply source 54, a substrate cleaning liquid supply source 55, and an IPA (isopropyl alcohol) supply source 56. The second nozzle 52 is connected to the filler solution supply source 57. The third nozzle 53 is connected to the IPA supply source 56.

  The chemical solution delivered from the chemical solution supply source 54 is supplied to the central portion of the upper surface 91 of the substrate 9 through the first nozzle 51. As the chemical solution, for example, an etching solution such as hydrofluoric acid or an aqueous tetramethylammonium hydroxide solution is used. The substrate cleaning liquid sent from the substrate cleaning liquid supply source 55 is also supplied to the central portion of the upper surface 91 of the substrate 9 through the first nozzle 51. For example, pure water (DIW: deionized water) or carbonated water is used as the substrate cleaning liquid. The IPA sent from the IPA supply source 56 to the first nozzle 51 is supplied to the central portion of the upper surface 91 of the substrate 9 through the first nozzle 51.

  At the lower end of the first nozzle 51, for example, a plurality of discharge ports for chemical solution, substrate cleaning solution, and IPA are provided, and different types of treatment liquids are supplied to the upper surface of the substrate 9 through different pipes and discharge ports. 91. In the treatment liquid supply unit 5, for example, instead of the first nozzle 51, a plurality of treatment liquid nozzles that respectively supply the chemical liquid, the substrate cleaning liquid, and the IPA to the central portion of the upper surface 91 of the substrate 9 may be provided.

  The filler solution sent from the filler solution supply source 57 to the second nozzle 52 is supplied to the central portion of the upper surface 91 of the substrate 9 through the second nozzle 52. As the filler solution, for example, a solution in which a polymer that is a solid solute is dissolved in a solvent is used. When the polymer is water-insoluble, for example, IPA is used as the solvent. The polymer is solidified by evaporation of the solvent on the substrate 9 and is sublimated in a device different from the substrate processing apparatus 1, and is also called a sublimation agent.

  The IPA sent from the IPA supply source 56 to the third nozzle 53 is supplied to the peripheral area of the upper surface 91 of the substrate 9 through the third nozzle 53.

  The processing of the substrate 9 in the substrate processing apparatus 1 is performed in the order of chemical processing, cleaning processing, IPA replacement processing, filler filling processing, edge rinse processing, and drying processing, for example. Specifically, first, a chemical solution is applied to the substrate 9 by supplying the chemical solution from the first nozzle 51 to the rotating substrate 9. Subsequently, the supply of the chemical liquid is stopped, and the substrate 9 is cleaned by supplying the substrate cleaning liquid from the first nozzle 51 to the rotating substrate 9. Next, the supply of the substrate cleaning liquid is stopped, and IPA is supplied from the first nozzle 51 to the rotating substrate 9, whereby the substrate cleaning liquid on the substrate 9 is replaced with IPA.

  Furthermore, after the supply of IPA is stopped and the filler solution is supplied from the second nozzle 52 to the rotating substrate 9 for a predetermined time, the rotation speed of the substrate 9 is reduced, and the entire upper surface 91 of the substrate 9 is The state covered with the filler solution is maintained. Thereby, the filler solution is filled in the gaps in the pattern on the upper surface 91 of the substrate 9 (that is, the spaces between the pattern elements included in the pattern). Thereafter, the rotational speed of the substrate 9 is increased, and IPA is supplied from the third nozzle 53 to the peripheral region of the upper surface 91 of the substrate 9, thereby performing an edge rinse process for removing the filler solution in the peripheral region of the substrate 9. Is called. And the rotational speed of the board | substrate 9 is increased and the drying process of the board | substrate 9 is performed. The chemical solution, substrate cleaning solution, IPA and filler solution supplied onto the substrate 9 during the above processing are received by the cup portion 4 and discharged to the common drain pipe 45 through the drain port 44.

  FIG. 3 is a view showing the third nozzle 53 in a state where the substrate 9 is retracted to the retracted position on the outer side in the radial direction of the substrate 9 and a portion in the vicinity of the third nozzle 53. As shown in FIG. 3, the substrate processing apparatus 1 further includes a liquid receiving unit 61, a drainage pipe 62, and a liquid detection device 8. The liquid receiver 61 is disposed below the third nozzle 53 located at the retracted position. The liquid receiving unit 61 receives, for example, the processing liquid discharged from the third nozzle 53 during pre-dispensing (that is, an operation for preliminarily discharging the processing liquid before supplying the processing liquid to the substrate 9). In FIG. 3, the liquid receiving part 61 is drawn in a cross section.

  The drainage pipe 62 is connected to the liquid receiving part 61 and extends along the direction of gravity. For example, the drain pipe 62 may extend substantially vertically downward, or may extend downward while inclining with respect to the direction of gravity. In the example shown in FIG. 3, the drainage pipe 62 extends substantially parallel to the direction of gravity. The drainage pipe 62 guides the processing liquid from the third nozzle 53 received by the liquid receiving unit 61 to the outside of the chamber 11 (see FIG. 1). The liquid detection device 8 is a photoelectric liquid detection device that detects the liquid in the pipeline. The liquid detection device 8 is attached to the drainage pipe 62 that is the pipe, and detects the liquid in the drainage pipe 62.

  The liquid detection device 8 includes a light emitting unit 81, a light receiving unit 82, and the determination unit 71 described above. The light emitting unit 81 and the light receiving unit 82 are attached to the drainage pipe 62. Of the drainage pipe 62, at least a part to which the light emitting part 81 and the light receiving part 82 are attached has translucency. Preferably, a portion of the drainage pipe 62 to which the light emitting unit 81 and the light receiving unit 82 are attached is transparent. The light emitting unit 81 and the light receiving unit 82 are disposed along the outer surface of the drainage pipe 62. For example, the light emitting unit 81 is disposed on the opposite side of the light receiving unit 82 with the drain pipe 62 interposed therebetween.

  The light emitting unit 81 emits light toward the drainage pipe 62. The light emitting unit 81 includes a plurality of light emitting elements. The light emitting element is, for example, an LED (Light Emitting Diode) or an LD (Laser Diode). The light emitting element may be an optical fiber that guides light from a light source. The plurality of light emitting elements are arranged along the outer surface of the drainage pipe 62. The light receiving unit 82 receives a plurality of lights from a plurality of light emitting elements of the light emitting unit 81 via the drain tube 62. The light receiving unit 82 includes one or more light receiving elements. The light receiving element is disposed along the outer surface of the drainage pipe 62.

  FIG. 4 is a diagram illustrating a plurality of detection points 83 corresponding to a plurality of lights from the light emitting unit 81 in the drainage pipe 62. In FIG. 4, the outer shape of the light emitting unit 81 viewed from the light receiving unit 82 side is indicated by a broken line. The detection point 83 is a position in the drainage pipe 62 corresponding to the light emitted from the light emitting part 81 to the drainage pipe 62, and when liquid is present at the position, the light emitting part 81 moves to the light receiving part 82. The light going toward is blocked. The detection point 83 is also called a sensing point. Actually, in the drainage pipe 62, each position on a straight line passing through each detection point 83 and perpendicular to the paper surface is a detection point for detecting the liquid. The same applies to FIG. 5 described later.

  The plurality of detection points 83 are arranged in an arrangement direction that is inclined with respect to the longitudinal direction of the drainage pipe 62. In the example shown in FIG. 4, since the drainage pipe 62 extends substantially parallel to the gravity direction, the arrangement direction of the plurality of detection points 83 is also inclined with respect to the gravity direction. The arrangement direction of the plurality of detection points 83 is also inclined with respect to the width direction perpendicular to the longitudinal direction of the drainage pipe 62. Specifically, the arrangement direction of the plurality of detection points 83 is inclined by about 45 degrees with respect to the longitudinal direction of the drainage pipe 62. The plurality of detection points 83 are arranged at substantially equal pitches in the longitudinal direction and the width direction of the drainage pipe 62. The arrangement direction of the plurality of detection points 83 may be inclined with respect to the longitudinal direction of the drainage pipe 62. For example, the arrangement direction may be substantially parallel to the width direction of the drainage pipe 62. Good.

  The plurality of detection points 83 are arranged over substantially the entire width of the drainage pipe 62 in the width direction of the drainage pipe 62. Specifically, in FIG. 4, the detection point 83 located on the outermost side in the width direction of the drainage pipe 62 (that is, the detection point 83 located on the leftmost and rightmost side in the figure) and the inner surface of the drainage pipe 62. Is smaller than the pitch P <b> 1 in the width direction of the plurality of detection points 83.

  As shown in FIG. 3, the determination unit 71 is connected to the light receiving unit 82. Based on the output from the light receiving unit 82, the determination unit 71 is a liquid that flows through an unspecified part of the cross section of the drainage pipe 62 at a portion of the drainage pipe 62 to which the light emitting unit 81 and the light receiving unit 82 are attached. Determine the existence of The determination unit 71 can also detect that liquid is present in substantially the entire cross section of the drainage pipe 62 based on the output from the light receiving unit 82.

  Hereinafter, specific detection of the processing liquid by the liquid detection device 8 will be described. For example, when a treatment liquid leaks from the third nozzle 53 (so-called slow leak) and a small amount of the treatment liquid flows into the drainage pipe 62, the treatment liquid in the drainage pipe 62 has a plurality of detection points. A part of the light 83 passes through, and the light corresponding to the part of the light from the light emitting unit 81 is blocked. When the translucency of the processing liquid is relatively low, the light blocked by the processing liquid does not reach the light receiving unit 82, and when the translucency of the processing liquid is relatively high, one of the light blocked by the processing liquid The part passes through the processing liquid and reaches the light receiving part 82. In either case, the amount of light received by the light receiving unit 82 decreases due to light being blocked by the processing liquid. The output from the light receiving unit 82 is continuously sent to the determination unit 71.

  The determination unit 71 determines that there is processing liquid flowing in a part of the cross section of the drainage pipe 62 when the amount of light received by the light receiving unit 82 decreases to some extent or less and falls below a predetermined first threshold light reception amount. The first threshold light reception amount is smaller than the light reception amount when the light from the light emitting unit 81 is received by the light receiving unit 82 without being blocked in the drain pipe 62 (hereinafter referred to as “normal light reception amount”). It is. When the processing liquid flowing through a part of the cross section of the drainage pipe 62 is detected by the liquid detection device 8, a leakage of the processing liquid from the third nozzle 53 may be caused by a notifying unit such as an alarm (not shown). It is notified to the worker.

  Further, for example, when pre-dispensing is performed from the third nozzle 53 to the liquid receiving unit 61 in a state where clogging occurs in the downstream of the drain pipe 62, the processing liquid from the third nozzle 53 is drained. It stays in the tube 62. In this case, the processing liquid in the drainage pipe 62 overlaps most or all of the plurality of detection points 83 and blocks most or all of the light from the light emitting unit 81. When the translucency of the processing liquid is relatively low, the light blocked by the processing liquid does not reach the light receiving unit 82, and when the translucency of the processing liquid is relatively high, one of the light blocked by the processing liquid The part passes through the processing liquid and reaches the light receiving part 82. In either case, the amount of light received by the light receiving unit 82 decreases due to light being blocked by the processing liquid.

  The determination unit 71 determines that the processing liquid is present in substantially the entire cross section of the drainage pipe 62 when the amount of light received by the light receiving unit 82 falls below a predetermined second threshold light reception amount. The second threshold light reception amount is a light amount smaller than the normal light reception amount and the first threshold light reception amount. When the liquid detection device 8 detects that the processing liquid is present in substantially the entire cross section of the drainage pipe 62, the operator may indicate that the drainage pipe 62 is clogged by an alarming means such as an alarm (not shown). Is notified.

  In the substrate processing apparatus 1, similarly to the retracted position of the third nozzle 53, the liquid receiving unit 61, the drain pipe 62, and the liquid detecting device 8 are provided at the retracted position of the first nozzle 52. The leakage of the treatment liquid and clogging of the drainage pipe 62 are detected. The same applies to the retracted position of the second nozzle 52.

  As described above, the liquid detection device 8 includes the light emitting unit 81, the light receiving unit 82, and the determination unit 71. The light emitting unit 81 emits light toward the drainage pipe 62 that is a pipe line extending along the direction of gravity. The light receiving unit 82 receives light from the light emitting unit 81 via the drainage pipe 62. Based on the output from the light receiving unit 82, the determination unit 71 determines whether or not there is a liquid flowing through a part of the cross section of the drainage pipe 62. A plurality of detection points 83 corresponding to light from the light emitting unit 81 in the drainage pipe 62 are arranged in an arrangement direction inclined with respect to the longitudinal direction of the drainage pipe 62. Thereby, unlike the case where a plurality of detection points are arranged in parallel with the longitudinal direction of the drainage pipe, it is possible to detect the presence or absence of liquid over a wide range in the circumferential direction of the drainage pipe 62. Therefore, even when the liquid flows along a part of the inner surface of the drainage pipe 62, the liquid flowing only through a part of the cross section of the drainage pipe 62 can be detected with high accuracy.

  In the liquid detection device 8, a plurality of detection points 83 are arranged over the entire width of the drainage pipe 62 in the width direction of the drainage pipe 62. Thereby, the presence or absence of the liquid can be detected over a wider range in the circumferential direction of the drainage pipe 62. As a result, the liquid flowing through only a part of the cross section of the drainage pipe 62 can be detected with higher accuracy.

  As described above, the light receiving unit 82 is disposed along the outer surface of the drainage pipe 62. Thereby, since the light immediately after passing through the drainage pipe 62 can be received by the light receiving part 82, the detection accuracy of the liquid in the drainage pipe 62 can be improved.

  When the drainage pipe 62 extends parallel to the direction of gravity, a small amount of liquid that has flowed into the drainage pipe 62 may flow through any position in the cross section of the drainage pipe 62. Since the liquid detection device 8 can accurately detect the liquid flowing through only a part of the cross section of the drainage pipe 62 as described above, the structure of the liquid detection device 8 is a drainage that extends parallel to the direction of gravity. It is particularly suitable for detecting liquid in the tube 62.

  In the liquid detection device 8, the determination unit 71 can also detect the presence of liquid in the entire cross section of the drainage pipe 62 based on the output from the light receiving unit 82. Thereby, the structure which detects the leakage of the process liquid from the process liquid supply part 5 can be combined as a structure which detects the clogging of the drainage pipe 62. As a result, the structure of the substrate processing apparatus 1 including the liquid detection device 8 can be simplified.

  FIG. 5 is a view showing another preferred example of the plurality of detection points 83 in the drainage pipe 62. In the example shown in FIG. 5, the plurality of detection points 83 are arranged in a matrix in the longitudinal direction of the drainage pipe 62 that is a conduit and in the width direction perpendicular to the longitudinal direction. In other words, the plurality of detection points 83 include a plurality of detection point rows that are rows of detection points 83 arranged substantially parallel to the width direction, and the plurality of detection point rows are arranged along the longitudinal direction. The

  When attention is paid to each detection point row, the arrangement direction of the plurality of detection points 83 included in each detection point row is inclined with respect to the longitudinal direction of the drainage pipe 62. Thereby, similarly to the above-mentioned example, the liquid which flows through only a part of the cross section of the drainage pipe 62 can be detected with high accuracy. In addition, when a plurality of detection points 83 are arranged in a matrix in the longitudinal direction and the width direction of the drainage pipe 62, the light from the light emitting unit 81 is received when the liquid in the drainage pipe 62 is blocked. The difference between the received light amount and the normal received light amount in the part 82 can be increased. As a result, the liquid flowing through only a part of the cross section of the drainage pipe 62 can be detected with higher accuracy. In addition, the presence of liquid in the entire cross section of the drainage pipe 62 can be accurately detected.

  Various modifications can be made in the liquid detection device 8 and the substrate processing apparatus 1 described above.

  For example, the arrangement of the plurality of detection points 83 is not limited to the above arrangement example as long as the arrangement direction of the plurality of detection points 83 is inclined with respect to the longitudinal direction of the drainage pipe 62. Various changes may be made. Further, the plurality of detection points 83 are not necessarily arranged over the entire width of the drainage pipe 62.

  The light emitting unit 81 and the light receiving unit 82 are not necessarily arranged along the outer surface of the drainage pipe 62, and may be arranged at a position separated from the outer surface of the drainage pipe 62.

  The determination unit 71 does not have to determine that liquid is present in the entire cross section of the drainage pipe 62.

  The liquid detection device 8 may be provided in various pipelines other than the above-described drainage pipe 62 in the substrate processing apparatus 1, and may be used for detecting the liquid in the pipeline. For example, the light emitting unit 81 and the light receiving unit 82 of the liquid detection device 8 may be provided in a portion that extends along the direction of gravity in the conduit that supplies the filler solution from the filler solution supply source 57 to the second nozzle 52. Good. In this case, a slow leak of the filler solution from the filler solution supply source 57 is detected by the liquid detection device 8.

  In the substrate processing apparatus 1, the plurality of types of processing liquids supplied from the processing liquid supply unit 5 to the substrate 9 are not limited to the above-described example, and may be variously changed. Alternatively, only one type of processing liquid may be supplied from the processing liquid supply unit 5 to the substrate 9.

  The substrate processing apparatus 1 described above may be used for processing glass substrates used in display devices such as liquid crystal display devices, plasma displays, and FEDs (field emission displays) in addition to semiconductor substrates. Alternatively, the substrate processing apparatus 1 described above may be used for processing of an optical disk substrate, a magnetic disk substrate, a magneto-optical disk substrate, a photomask substrate, a ceramic substrate, a solar cell substrate, and the like.

  The liquid detection device 8 is not necessarily provided in the substrate processing apparatus 1 and may be used in an apparatus other than the substrate processing apparatus 1. Moreover, the liquid detection apparatus 8 may be used independently independently of other apparatuses.

  The configurations in the above-described embodiments and modifications may be combined as appropriate as long as they do not contradict each other.

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 8 Liquid detection apparatus 9 Substrate 11 Chamber 31 Substrate holding part 62 Drain pipe 71 Judgment part 81 Light emission part 82 Light reception part 83 Detection point J1 Central axis

Claims (7)

A photoelectric liquid detection device for detecting a liquid in a pipeline,
A light emitting unit that emits light toward a pipe line extending along the direction of gravity;
A light receiving portion for receiving light from the light emitting portion via the conduit;
A determination unit that determines the presence or absence of liquid flowing in a part of a cross section of the pipe line based on an output from the light receiving unit;
With
The liquid detection apparatus according to claim 1, wherein a plurality of detection points corresponding to light from the light emitting unit in the pipe line are arranged in an arrangement direction inclined with respect to a longitudinal direction of the pipe line. The liquid detection device according to claim 1,
The liquid detection device, wherein the plurality of detection points are arranged over the entire width of the pipeline in the width direction of the pipeline. The liquid detection device according to claim 1 or 2,
The liquid detection apparatus, wherein the plurality of detection points are arranged in a matrix in the longitudinal direction of the pipe line and in a direction perpendicular to the longitudinal direction. The liquid detection device according to any one of claims 1 to 3,
The liquid detection device, wherein the light receiving unit is disposed along an outer surface of the pipe line. The liquid detection device according to any one of claims 1 to 4,
The liquid detection device according to claim 1, wherein the pipe line extends in parallel with a gravitational direction. The liquid detection device according to any one of claims 1 to 5,
The liquid detection device, wherein the determination unit can detect the presence of liquid in the entire cross section of the pipe line based on an output from the light receiving unit. A substrate processing apparatus for processing a substrate,
A chamber;
A substrate holder for holding the substrate in the chamber;
A treatment liquid supply unit for supplying a treatment liquid to the substrate;
A drain pipe for guiding the processing liquid from the processing liquid supply unit to the outside of the chamber;
A liquid detection device according to any one of claims 1 to 6,
With
The substrate processing apparatus, wherein the liquid detection device detects a liquid in the drainage pipe which is the pipe line.

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