JP2018015034A - Ultrasonic device, ultrasonic measurement device, and ultrasonic measurement method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic device, an ultrasonic measurement device, and ultrasonic measurement method capable of improving the degree of freedom of a measurement position.SOLUTION: An ultrasonic device comprises: plural ultrasonic element arrays 43; and a moving part 5 which moves each of the ultrasonic element arrays. The ultrasonic element arrays comprise plural ultrasonic transmission and reception parts arranged in a first direction crossing a thickness direction, and are disposed at positions not interfering with each other in the first direction. The moving part 5 moves the ultrasonic element arrays in a second direction crossing the thickness direction and the first direction.SELECTED DRAWING: Figure 5

Description

  The present invention relates to an ultrasonic device, an ultrasonic measurement apparatus, and an ultrasonic measurement method.

Conventionally, an ultrasonic probe including a one-dimensional array transducer (one-dimensional array) in which a plurality of vibration elements (ultrasonic elements) transmitting and receiving ultrasonic waves are arranged in one direction, and an ultrasonic wave including the ultrasonic probe A diagnostic device (ultrasonic measurement device) is known (see, for example, Patent Document 1).
The ultrasonic measuring apparatus described in Patent Document 1 transmits a convex type or a sector type in which ultrasonic waves are transmitted radially from each ultrasonic element within a predetermined scanning plane, or linearly transmits ultrasonic waves from each ultrasonic element. A linear type ultrasonic element array is provided. The ultrasonic measurement apparatus configured as described above can acquire a tomographic image of the measurement target on the scanning plane.

JP 2012-105751 A

  By the way, in order to perform ultrasonic measurement at a plurality of measurement positions using an ultrasonic probe having a one-dimensional array, for example, it is conceivable to arrange a plurality of one-dimensional arrays. For example, an internal tomographic image can be acquired at a plurality of positions by arranging a plurality of one-dimensional arrays along the normal direction of the scanning surface so that the scanning surfaces are substantially parallel.

  However, in this case, the interval between the measurement positions cannot be made smaller than the outer dimension of the one-dimensional array. In addition, after the ultrasonic element array is arranged at one end, it is not easy to change the measurement position interval. Thus, with the conventional configuration, it is difficult to freely set the measurement position.

  An object of the present invention is to provide an ultrasonic device, an ultrasonic measurement apparatus, and an ultrasonic measurement method that can improve the degree of freedom of measurement positions.

  An ultrasonic device according to an application example of the invention includes a plurality of ultrasonic element arrays and a moving unit that moves each of the plurality of ultrasonic element arrays, and the plurality of ultrasonic element arrays have a thickness. A plurality of ultrasonic transmission / reception units arranged in a first direction intersecting the direction, arranged at positions that do not interfere with each other in the first direction, and the moving unit includes the plurality of ultrasonic element arrays in the thickness direction And moving in a second direction intersecting the first direction.

In this application example, each of the plurality of ultrasonic element arrays is configured as a so-called one-dimensional array in which ultrasonic transmission / reception units are arranged in the first direction. This ultrasonic element array transmits and receives ultrasonic waves along a scanning plane that includes a center line that passes through the center in the second direction and is parallel to the arrangement direction of the ultrasonic transmission / reception units arranged in the first direction.
The plurality of ultrasonic element arrays are arranged at positions that do not interfere with each other in the first direction. Therefore, the moving unit can move each of the plurality of ultrasonic element arrays to an arbitrary position in the second direction. As described above, the degree of freedom of the measurement position interval in the second direction can be improved without being limited by the outer dimensions of the ultrasonic element array.

In the ultrasonic device according to this application example, it is preferable that the normal lines of the ultrasonic transmission / reception surfaces of the plurality of ultrasonic element arrays intersect each other.
In this application example, the plurality of ultrasonic element arrays are arranged so that the normal lines of the ultrasonic element arrays intersect in plan view from the second direction. That is, when viewed in plan from the second direction, the respective ultrasonic element arrays are arranged so as to be inclined with respect to each other.
Here, it compares with the case where each ultrasonic element array is arrange | positioned on the same plane, without mutually inclining. In this case, by increasing the ultrasonic transmission angle of at least one ultrasonic element array, a shallow region near the surface of the measurement target can be measured by a plurality of ultrasonic element arrays. However, increasing the transmission angle of ultrasonic waves degrades the image quality of the ultrasonic waves. In addition, there is a limit to increasing the transmission angle, and there is a possibility that the vicinity of the surface of the measurement target cannot be measured. On the other hand, in this application example, the plurality of ultrasonic arrays are arranged so as to be inclined with respect to each other in plan view from the second direction. Thereby, when viewed from the second direction, the position of the overlapping region where the measurement regions of the plurality of ultrasonic element arrays are superimposed can be brought close to each ultrasonic element array.

  An ultrasonic measurement apparatus according to an application example of the present invention includes an ultrasonic device including a plurality of ultrasonic element arrays, and a moving unit that moves each of the plurality of ultrasonic element arrays, and the ultrasonic device. A plurality of ultrasonic element arrays arranged in a first direction intersecting the thickness direction, and in positions not interfering with each other in the first direction. Arranged, the moving unit moves the plurality of ultrasonic element arrays in a second direction intersecting the thickness direction and the first direction, and the control unit controls the moving unit to control the ultrasonic element. A movement control unit that moves the acoustic wave element array in the second direction is provided.

  In this application example, as in the above application example, the plurality of ultrasonic element arrays are arranged at positions that do not interfere with each other in the first direction. Therefore, the moving unit can move each of the plurality of ultrasonic element arrays to an arbitrary position in the second direction. As described above, the degree of freedom of the measurement position interval in the second direction can be improved without being limited by the outer dimensions of the ultrasonic element array.

In the ultrasonic measurement apparatus according to this application example, it is preferable that the normal lines of the ultrasonic transmission / reception surfaces of the plurality of ultrasonic element arrays intersect each other.
In this application example, the plurality of ultrasonic element arrays are arranged so that the normal lines of the ultrasonic element arrays intersect in plan view from the second direction. That is, when viewed in plan from the second direction, the respective ultrasonic element arrays are arranged so as to be inclined with respect to each other.
In this application example, similarly to the application example described above, the plurality of ultrasonic arrays are arranged to be inclined with respect to each other when seen in a plan view from the second direction. Thereby, when viewed from the second direction, the position of the overlapping region where the measurement regions of the plurality of ultrasonic element arrays are superimposed can be brought close to each ultrasonic element array.

In the ultrasonic measurement apparatus according to this application example, it is preferable that the movement control unit moves the plurality of ultrasonic element arrays to positions shifted from each other in the second direction.
In this application example, since the plurality of ultrasonic element arrays are arranged at positions shifted from each other in the second direction, different measurement positions can be made different for each of the plurality of ultrasonic element arrays.
Here, for example, when the scanning plane is moved by moving or tilting one ultrasonic element array, it is difficult to measure simultaneously at a plurality of measurement positions. On the other hand, in this application example, ultrasonic measurement can be performed at a plurality of measurement positions substantially simultaneously.

In the ultrasonic measurement apparatus according to an application example of the invention, it is preferable that the movement control unit moves at least one of the plurality of ultrasonic element arrays in the second direction when performing ultrasonic measurement. .
In this application example, at least one of the plurality of ultrasonic element arrays is moved in the second direction. That is, the scan plane of at least one ultrasonic element array is moved in the second direction intersecting the scan plane. Thereby, ultrasonic measurement can be performed at a plurality of measurement positions along the second direction. For example, when measuring an object moving in the second direction, the object can be measured by the same ultrasonic element array.

In the ultrasonic measurement apparatus according to this application example, it is preferable that the movement control unit changes a moving speed in the second direction of at least one of the plurality of ultrasonic element arrays.
In this application example, the moving speed of the ultrasonic element array is changed. With such a configuration, it is possible to improve the degree of freedom in changing the position of the scan plane, which can change the moving speed of the scan plane. For example, in this application example, the moving speed of the ultrasonic element array can be changed based on the moving speed of the object moving in the second direction. In this case, the scan plane can be moved according to the movement of the object.

In the ultrasonic measurement apparatus according to this application example, the control unit detects the position of the measurement target at the measurement position where the measurement result is obtained based on the measurement result of the ultrasonic measurement by the ultrasonic element array, It is preferable to provide a position detection unit that estimates the position of the measurement object along the second direction based on the detection result of the position.
In this application example, the position detection unit detects the position of the measurement target for each of the plurality of measurement positions. And a position detection part estimates the position of the measuring object along a 2nd direction based on a detection result. In such a configuration, the ultrasonic measurement can be performed simultaneously at a plurality of positions, so that the position of the measurement target can be quickly estimated. Further, the measurement position can be changed according to the measurement object, and the position of the measurement object can be estimated with high accuracy.

  In the ultrasonic measurement method according to an application example of the present invention, the ultrasonic measurement method includes: a plurality of ultrasonic element arrays; and a moving unit that moves each of the plurality of ultrasonic element arrays. A plurality of ultrasonic transmission / reception units arranged in a first direction intersecting the thickness direction, arranged at positions that do not interfere with each other in the first direction, and the moving unit includes the plurality of ultrasonic element arrays in the thickness direction; An ultrasonic measurement method using an ultrasonic device movable in a direction and a second direction intersecting the first direction, wherein at least one of the plurality of ultrasonic element arrays is moved in the second direction. It is characterized by carrying out ultrasonic measurement.

In this application example, as in the above application example, the plurality of ultrasonic element arrays are arranged at positions that do not interfere with each other in the first direction. Therefore, the moving unit can move each of the plurality of ultrasonic element arrays to an arbitrary position in the second direction. As described above, the degree of freedom of the measurement position interval in the second direction can be improved without being limited by the outer dimensions of the ultrasonic element array.
In this application example, at least one of the plurality of ultrasonic element arrays is moved in the second direction. That is, the scan plane of at least one ultrasonic element array is moved in the second direction intersecting the scan plane. Thereby, ultrasonic measurement can be performed at a plurality of measurement positions along the second direction. For example, when measuring an object moving in the second direction, the object can be measured by the same ultrasonic element array.

In the ultrasonic measurement method according to this application example, it is preferable that the moving speed in the second direction of at least one of the plurality of ultrasonic element arrays is changed.
In this application example, the moving speed of the ultrasonic element array is changed. With such a configuration, it is possible to improve the degree of freedom in changing the position of the scan plane, which can change the moving speed of the scan plane. For example, in this application example, the moving speed of the ultrasonic element array can be changed based on the moving speed of the object moving in the second direction. In this case, the scan plane can be moved according to the movement of the object.

1 is a block diagram showing a schematic configuration of an ultrasonic measurement apparatus according to a first embodiment. 1 is a front view showing a schematic configuration of an ultrasonic probe according to a first embodiment. 1 is a side view showing a schematic configuration of an ultrasonic probe according to a first embodiment. 1 is a perspective view showing a schematic configuration of an ultrasonic device according to a first embodiment. The front view which shows schematic structure of the ultrasonic device of 1st Embodiment. Sectional drawing which shows schematic structure of the ultrasonic unit of 1st Embodiment. The top view which shows typically the ultrasonic sensor of 1st Embodiment. Sectional drawing which shows typically the cross section of the ultrasonic sensor in the AA of FIG. The flowchart which shows the ultrasonic measurement process of 1st Embodiment. The schematic diagram for demonstrating the preliminary measurement process of 1st Embodiment. The schematic diagram for demonstrating this measurement process of 1st Embodiment. The flowchart which shows the ultrasonic measurement process of 2nd Embodiment. The schematic diagram for demonstrating this measurement process of 2nd Embodiment.

[First Embodiment]
Hereinafter, the ultrasonic measurement apparatus according to the first embodiment will be described.
FIG. 1 is a block diagram illustrating a schematic configuration of an ultrasonic measurement apparatus 1 according to the first embodiment.
As shown in FIG. 1, the ultrasonic measurement apparatus 1 according to the present embodiment controls an ultrasonic probe 2 that is fixed to an object (the living body M in the present embodiment), and the ultrasonic probe 2 to control the living body M. A control device 7 for obtaining an internal tomographic image (ultrasonic image), and a display device 8 for displaying the obtained internal tomographic image.

The ultrasonic measurement apparatus 1 of the present embodiment can be suitably used when performing a puncturing operation in which, for example, a puncture needle is inserted into a predetermined organ (for example, a blood vessel) in a living body.
For example, in the puncturing operation, the practitioner applies an acoustic matching material (for example, a gel) for improving the propagation efficiency of the ultrasonic wave to the affected part position where the ultrasonic probe 2 is to be punctured in the living body. To fix. The ultrasonic measurement apparatus 1 performs ultrasonic transmission processing for transmitting ultrasonic waves from the ultrasonic probe 2 into the living body and ultrasonic receiving processing for receiving reflected ultrasonic waves reflected in the living body with the ultrasonic probe 2. Do. Then, the ultrasonic probe 2 outputs a reception signal obtained by the ultrasonic reception process to the control device 7, and the control device 7 forms an in-vivo ultrasonic image based on the reception signal and displays it on the display device 8. Display.
By using such an ultrasonic measurement device 1, the practitioner can efficiently perform a puncturing operation while confirming (observing) an ultrasonic image displayed on the display device 8.
Hereinafter, each configuration of the ultrasonic measurement apparatus 1 of the present embodiment will be described in detail.

[Configuration of ultrasonic probe]
FIG. 2 is a diagram illustrating a schematic configuration when the ultrasonic probe 2 is viewed from the −Y side, and FIG. 3 is a diagram illustrating a schematic configuration when viewed from the + X side.
As shown in FIGS. 2 and 3, the ultrasonic probe 2 includes an ultrasonic device 3 that transmits and receives ultrasonic waves, and an acoustic matching member 9 that is disposed between the ultrasonic device 3 and the living body M. 3, and a fixing member 6 that is fixed to 3. The ultrasonic probe 2 is connected to the control device 7 by a cable, and an ultrasonic image obtained based on the control by the control device 7 is displayed on the display device 8.

[Configuration of ultrasonic device]
FIG. 4 is a perspective view showing a schematic configuration of the ultrasonic device 3. FIG. 5 is a side view showing a schematic configuration when the ultrasonic device 3 is viewed from the −Y side.
The ultrasonic device 3 supports three ultrasonic units 4 (first unit 4A, second unit 4B, and third unit 4C) and the ultrasonic unit 4 so as to be movable along the Y direction that is the second direction. A moving unit 5.

[Configuration of ultrasonic unit]
FIG. 6 is a cross-sectional view showing a schematic configuration of the ultrasonic unit 4.
The ultrasonic unit 4 includes a housing 41, and an ultrasonic sensor 42 and a circuit board 46 are accommodated in the housing 41 as shown in FIG.
As will be described in detail later, the ultrasonic sensor 42 includes an ultrasonic element array 43 that transmits and receives ultrasonic waves. The ultrasonic element array 43 is configured as a one-dimensional array including a plurality of ultrasonic transmission / reception units 44 arranged along one direction.
Here, the ultrasonic sensor 42 corresponding to each of the first unit 4A, the second unit 4B, and the third unit 4C is a first ultrasonic sensor, a second ultrasonic sensor, and a third ultrasonic sensor. In addition, the ultrasonic element array 43 corresponding to each of the first ultrasonic sensor, the second ultrasonic sensor, and the third ultrasonic sensor is replaced with the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the first ultrasonic element array 43B. It is assumed that there are three ultrasonic element arrays 43C (see FIG. 5).
The first unit 4A is arranged such that the arrangement direction of the ultrasonic transmission / reception units 44 of the first ultrasonic element array 43A is parallel to the X direction. Further, the second unit 4B and the third unit 4C are arranged such that the arrangement direction is inclined in the Y direction.
The first unit 4A, the second unit 4B, and the third unit 4C are basically configured in the same manner except for the disposition posture. In the following description, the configuration of the first unit 4A will be mainly described.

[Case configuration]
The housing 41 is a box-shaped member having a rectangular shape in plan view, for example, and houses the ultrasonic sensor 42 and the circuit board 46 therein. As shown in FIG. 6, the housing 41 is provided with a sensor window 411 that exposes the ultrasonic sensor 42 on one surface of the living body M side. The casing 41 is supported by the moving unit 5 so as to be movable along the Y direction.

[Configuration of ultrasonic sensor]
Next, the ultrasonic sensor 42 will be described.
FIG. 7 is a plan view schematically showing the ultrasonic sensor 42 of the present embodiment. FIG. 8 is a schematic cross-sectional view of the ultrasonic sensor 42 taken along the line AA in FIG. 7 and 8 illustrate the ultrasonic sensor 42 constituting the first unit 4A.
The ultrasonic sensor 42 is provided with one ultrasonic element array 43. The ultrasonic element array 43 includes a plurality of ultrasonic transmission / reception units 44 arranged in one direction intersecting the thickness direction (the X direction which is the first direction in the first ultrasonic sensor). The ultrasonic transmission / reception unit 44 is configured by arranging a plurality of ultrasonic transducers 45 in the Y direction. This ultrasonic element array 43 has a virtual plane (hereinafter also referred to as a scan plane) that passes through the center of the ultrasonic transmission / reception unit 44 in the Y direction and is parallel to the ZX plane when the ultrasonic transmission / reception unit 44 is individually driven. The ultrasonic beam can be scanned along the line.
In the example illustrated in FIG. 7, the ultrasonic transmission / reception unit 44 includes seven ultrasonic transducers 45 in the Y direction, and the ultrasonic sensor 42 includes eight ultrasonic transmission / reception units 44 in the X direction. Consists of including.

For example, as shown in FIG. 8, the ultrasonic sensor 42 includes an element substrate 421, a sealing plate 422, an acoustic matching layer 423, an acoustic lens 424, and the like.
As shown in FIG. 7, the element substrate 421 includes a base 421A, a vibration film 421B, and a piezoelectric element 421C.
The base 421A is made of a semiconductor substrate such as Si, for example. The base 421A is provided with openings 421A1 corresponding to the respective ultrasonic transducers 45. In the present embodiment, each opening 421A1 is a through-hole penetrating the base 421A in the substrate thickness direction, and a vibration film 421B is provided on one end side (sealing plate 422 side) of the through-hole.

The vibration film 421B is made of, for example, SiO ₂ or a laminate of SiO ₂ and ZrO ₂ and is provided so as to cover the entire sealing plate 422 side of the base 421A. That is, the vibration film 421B is supported by the partition wall 421A2 constituting the opening 421A1, and closes the sealing plate 422 side of the opening 421A1. The thickness dimension of the vibration film 421B is sufficiently small with respect to the base portion 421A.

  As illustrated in FIGS. 7 and 8, the piezoelectric element 421 </ b> C is provided on the vibration film 421 </ b> B that closes each opening 421 </ b> A <b> 1. The piezoelectric element 421C is configured by a laminated body of a lower electrode 421C1, a piezoelectric film 421C2, and an upper electrode 421C3. Here, one ultrasonic transducer 45 is configured by a region of the vibration film 421B that closes the opening 421A1 and the piezoelectric element 421C.

  In such an ultrasonic transducer 45, the piezoelectric film 421C2 is deformed by outputting a rectangular wave voltage of a predetermined frequency between the lower electrode 421C1 and the upper electrode 421C3, and thereby the vibration film that closes the opening 421A1. When 421B vibrates, ultrasonic waves are transmitted (ultrasonic transmission processing). When an ultrasonic wave is input to the vibration film 421B and the vibration film 421B vibrates, a potential difference is generated between the lower electrode 421C1 side and the upper electrode 421C3 side of the piezoelectric film 421C2. Accordingly, it is possible to detect that an ultrasonic wave has been received by detecting a potential difference between the lower electrode 421C1 and the upper electrode 421C3 (ultrasonic reception processing).

In the present embodiment, as described above, the ultrasonic transducers 45 are arranged in an array along the X direction and the Y direction.
Here, the lower electrode 421C1 is a drive electrode wiring, is formed in a straight line shape along the Y direction, and is arranged in parallel along the X direction. That is, the lower electrode 421C1 is provided across the plurality of ultrasonic transducers 45 arranged in the Y direction, and connects them. Drive terminals 421D1 that are electrically connected to the circuit board 46 are provided at both ends (± Y side ends) of the lower electrode 421C1.
Further, the upper electrode 421C3 is formed linearly along the X direction, and is provided across a plurality of ultrasonic transducers 45 arranged in the X direction to connect them. The ± X side end of the upper electrode 421C3 is connected to the common electrode line 421D2. The common electrode line 421D2 connects a plurality of upper electrodes 421C3 arranged along the Y direction, and a common terminal 421D3 electrically connected to the circuit board 46 is provided at the ± Y side end.

  Next, the sealing plate 422 constituting the ultrasonic sensor 42 will be described. The sealing plate 422 is bonded to the element substrate 421 and reinforces the element substrate 421. The sealing plate 422 is formed so as to cover a region where the ultrasonic transducer 45 of the element substrate 421 is disposed in a plan view as viewed from the Z direction. For example, a semiconductor substrate such as Si or an insulator substrate Consists of. In addition, since the material and thickness of the sealing plate 422 affect the frequency characteristics of the ultrasonic transducer 45, it is preferable to set based on the center frequency of the ultrasonic wave transmitted and received by the ultrasonic transducer 45.

The sealing plate 422 is bonded to the element substrate 421 by a bonding film 422A formed on the vibration film 421B of the element substrate 421, for example. The bonding film 422A is provided corresponding to a region other than the opening 421A1 of the base 421A (the partition 421A2 between the openings 421A1). Therefore, the vibration of the vibration film 421B is not inhibited by the bonding film 422A, and crosstalk between the ultrasonic transducers 45 can be suppressed.
Although not shown, the sealing plate 422 is provided with a through hole facing the terminals of the lower electrode 421C1 and the upper electrode 421C3, and the lower electrode 421C1, the upper electrode 421C3, and the circuit board 46 are provided in the through hole. Are provided. The electrode may be a through electrode, for example, a lead wire, FPC, or the like.

As shown in FIG. 8, the acoustic matching layer 423 is provided on the ultrasonic wave transmission / reception side of the element substrate 421 so as to fill the opening 421A1 of the base 421A.
The acoustic lens 424 is provided on the ultrasonic wave transmission / reception side of the element substrate 421. The acoustic lens 424 converges the ultrasonic wave transmitted from the ultrasonic transducer 45 to a predetermined depth position in the living body.
The acoustic matching layer 423 and the acoustic lens 424 propagate the ultrasonic wave transmitted from the ultrasonic transducer 45 to the living body and efficiently propagate the ultrasonic wave reflected in the living body to the ultrasonic transducer 45. . For this reason, the acoustic matching layer 423 and the acoustic lens 424 are set so that the acoustic impedance value is close to the acoustic impedance of the living body.

[Configuration of circuit board]
Next, the circuit board 46 will be described.
The circuit board 46 is electrically connected to each of the drive terminals 421D1 and the common terminals 421D3 of the ultrasonic sensor 42, and controls the ultrasonic sensor 42 based on the control of the control device 7.
Specifically, the circuit board 46 includes a transmission circuit, a reference electrode circuit, a reception circuit, and the like. The transmission circuit applies a drive voltage having a pulse waveform to each drive terminal 421D1. The reference electrode circuit applies a predetermined reference voltage (for example, 0 V) to each common terminal 421D3. The reception circuit acquires the reception signal output from each drive terminal 421D1, performs amplification processing, A-D conversion processing, phasing addition processing, and the like of the reception signal, and outputs them to the control device 7.

[Configuration of moving part]
As shown in FIGS. 4 and 5, the moving unit 5 supports the first unit 4A, the second unit 4B, and the third unit 4C at positions that do not interfere with each other in the X direction. The moving unit 5 supports the first unit 4A, the second unit 4B, and the third unit 4C so as to be movable in the Y direction.
The moving unit 5 includes a first moving unit 5A that supports the first unit 4A, a second moving unit 5B that continues to one end of the first moving unit 5A and supports the second unit 4B, and a first moving unit 5A. And a third moving part 5C that is continuous with the other end side and supports the third unit 4C.
Among these, the second moving unit 5B and the third moving unit 5C are at a predetermined angle with respect to the first moving unit 5A so as to move toward the + Z side as they move away from the first moving unit 5A along the X direction. Inclined.

As shown in FIG. 4, the first moving unit 5A includes a main body 51, a slider 52, a screw shaft 53, and a motor 54, and supports the first unit 4A so as to be movable along the Y direction. .
The main body 51 is provided with a guide groove 511 that restricts the moving direction of the slider 52 in the Y direction. The guide groove 511 is a groove provided along the Y direction and recessed in the X direction.

  The slider 52 supports the first unit 4 </ b> A so as to be movable in the Y direction along the guide groove 511. The slider 52 includes a support portion 521, a protruding portion 522, and a screw hole 523. The support part 521 supports the housing 41 of the first unit 4A. The protrusions 522 are provided on both the −X side and the + X side of the support portion 521 and protrude in the X direction. These protrusions 522 are inserted into the guide grooves 511. The screw hole 523 is provided through the support portion 521 in the Y direction, and the screw shaft 53 is screwed therein.

The screw shaft 53 is screwed into the screw hole 523 and connected to the motor 54 at the + Y side end.
The motor 54 is fixed to the main body 51 and is driven based on the control of the control device 7 to rotate the screw shaft 53.
Although not shown in FIG. 4, the first fixing portion 62 disposed on the −Y side of the main body portion 51 supports the −Y side end portion of the screw shaft 53. The second fixing portion 63 arranged on the + Y side is provided with a motor 54.

In the first moving unit 5A configured as described above, the screw shaft 53 is rotated by driving the motor 54, and the slider 52 is moved along the Y direction. Accordingly, the first unit 4A fixed to the slider 52, that is, the first ultrasonic element array 43A is moved along the Y direction.
The second moving unit 5B and the third moving unit 5C are also configured in substantially the same manner as the first moving unit 5A.

[Arrangement of ultrasonic element array]
In the ultrasonic device 3 configured as described above, the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C are arranged at positions that do not interfere with each other in the X direction. . That is, the second ultrasonic element array 43B is disposed on the −X side with respect to the first ultrasonic element array 43A. The third ultrasonic element array 43C is arranged on the + X side with respect to the first ultrasonic element array 43A.

  In the ultrasonic device 3, the first ultrasonic element array 43 </ b> A has the ultrasonic transmission / reception surface 431 arranged in parallel to the XY plane. The first ultrasonic element array 43A is arranged so that the arrangement direction of the ultrasonic transmission / reception units 44 is parallel to the X direction. The second ultrasonic element array 43B and the third ultrasonic element array 43C are inclined with respect to the first ultrasonic element array 43A so that the arrangement direction of the ultrasonic transmission / reception units 44 is in the direction along the X direction. Arranged.

Specifically, as shown in FIG. 5, the second ultrasonic element array 43B is inclined by an angle δ in the counterclockwise direction with respect to the first ultrasonic element array 43A in a plan view viewed from the −Y side. The third ultrasonic element array 43C is inclined at an angle δ in the clockwise direction with respect to the first ultrasonic element array 43A.
Here, it passes through the opening center (center in the X direction and Y direction) of the first ultrasonic element array 43A, and is defined as the normal line N1 of the ultrasonic transmission / reception surface 431 surface. Similarly, with respect to the second ultrasonic element array 43B and the third ultrasonic element array 43C, the normal lines of the ultrasonic transmission / reception surface 431 passing through the center of the opening are defined as a normal line N2 and a normal line N3, respectively. The normals N1, N2, and N3 intersect at a point P in a plan view viewed from the −Y side. Note that the normals N1, N2, and N3 do not intersect each other because they have a twisted relationship.
Further, the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C are arranged at a position equidistant from the point P.

  Here, the inclination angle δ of the second ultrasonic element array 43B and the third ultrasonic element array 43C with respect to the first ultrasonic element array 43A is the measurement areas F1, F2, F3 of the ultrasonic element arrays 43A, 43B, 43C. Is set so that the overlapping region F4 (see FIG. 5) where the two overlap each other is located inside the living body M. For example, as shown in FIG. 5, the overlapping region F4 when the ultrasonic waves are transmitted from the second ultrasonic element array 43B and the third ultrasonic element array 43C at a transmission angle θ equal to or smaller than the maximum transmission angle is the inner side of the living body M. Is set to be located at Thereby, since the superimposition area | region F4 is located in a biological body, a part of superimposition area | region F4 can be measured efficiently in the biological body, without overlapping the acoustic matching member 9. FIG. Note that the maximum transmission angle of the ultrasonic element array 43 is, for example, the maximum value of the transmission angle that can suppress the occurrence of side lobes (that is, satisfy the side lobe condition). It can be calculated based on the wavelength.

[Configuration of fixing member]
The fixing member 6 fixes the acoustic matching member 9 shown in FIGS. 2 and 3 to the ultrasonic device 3. The fixing member 6 includes a fixing main body 61 to which the ultrasonic device 3 is attached, a first fixing portion 62 extending in the Z direction from the −Y side and the + Z side of the fixing main body 61, and the first fixing portion 62. And a second fixing portion 63 extending in the Z direction from the + Y side and the + Z side of the fixing main body portion 61. The acoustic matching member 9 is disposed so as to be sandwiched between the first fixing portion 62 and the second fixing portion 63. Thereby, even if the ultrasonic probe 2 is moved along the surface of the living body M, the displacement of the acoustic matching member 9 with respect to the ultrasonic device 3 can be suppressed.

  The fixed main body 61 is provided with a cable connected to the control device 7. The fixed body 61 is gripped by the practitioner when operating the ultrasonic probe 2. The shape of the fixed main body 61 is not limited to a rectangular shape as in the illustrated example, and may be a shape that can be easily grasped by a practitioner. In addition, a circuit board or the like for driving the ultrasonic sensor 42 may be provided inside the fixed main body 61.

As shown in FIG. 3, the first fixing portion 62 has a substantially rectangular outer shape in a plan view viewed from the Y direction. The first fixing portion 62 has a groove portion 622 as a guide for the puncture needle, and a start mark 623 indicating the scan start position.
The groove portion 622 is formed at the + Z side end portion of the −Y side surface 621 of the first fixing portion 62 and at the center portion in the X direction. As shown in FIG. 3, the bottom surface 622A of the groove 622 is inclined at a predetermined angle (for example, an angle of 15 ° or more and 30 ° or less with respect to the XY plane) toward the + Y side toward the + Z side. Yes. For this reason, the practitioner can easily move the puncture needle 10 at a predetermined angle with respect to the ultrasonic probe 2 by moving the puncture needle 10 along the bottom surface 622A. Therefore, the practitioner can easily perform an appropriate puncturing operation when puncturing the puncture needle 10 into the blood vessel M1 inside the living body M.

  The start mark 623 is provided at a position on the −X side of the −Y side surface 621 of the first fixing portion 62, and indicates a −X side position where scanning with the ultrasonic probe 2 is started. In the ultrasonic probe 2 of the present embodiment, when performing ultrasonic measurement, the ultrasonic transmission / reception unit 44 arranged along the X direction is sequentially driven from the −X side to the + X side. The start mark 623 is illustrated as a groove provided along each of the X direction and the Z direction and intersecting with each other in an L shape. However, the present invention is not limited to this, and for example, one of the X direction and the Z direction. The groove may be provided along the groove, or may be a circular or rectangular groove in a plan view viewed from the Y direction. Further, the start mark 623 may be a protrusion other than the groove. In addition, the start mark 623 may be printed on the first fixing portion 62.

[Configuration of acoustic matching member]
As shown in FIGS. 2 and 3, the acoustic matching member 9 is disposed between the ultrasonic device 3 and the surface of the living body M during ultrasonic measurement, and transmits ultrasonic waves transmitted from the ultrasonic device 3 to the living body. The ultrasonic wave reflected in the living body is efficiently propagated to the ultrasonic device 3. For this reason, the acoustic matching member 9 has an acoustic impedance close to that of a living body.
The acoustic matching member 9 is formed of an elastic material, for example, a gel-like material, and has a trapezoidal outer shape in plan view as viewed from the Y direction. For this reason, the acoustic matching member 9 can be suitably adhered to both the ultrasonic element array 43 of the ultrasonic device 3 and the living body surface.

[Configuration of control device]
Next, the control device 7 will be described.
The control device 7 corresponds to a control unit, and includes a calculation unit configured by a CPU (Central Processing Unit) or the like and a storage unit configured by a memory or the like.
The storage unit stores various programs and various data for ultrasonic measurement using the ultrasonic probe 2 and generation and display of an ultrasonic image of a living body based on the ultrasonic measurement result.
As shown in FIG. 1, the calculation unit reads and executes various programs stored in the storage unit, and as illustrated in FIG. 1, the transmission / reception control unit 71, the image forming unit 72, the display control unit 73, the movement control unit 74, and the position detection unit 75. And function as the state determination unit 76 and the like. In addition, the control device 7 may be provided with an input operation unit composed of a keyboard or the like.

  The transmission / reception control unit 71 controls the ultrasonic probe 2 to transmit ultrasonic waves from a predetermined ultrasonic transmission / reception unit 44 of the ultrasonic sensor 42. At this time, the transmission / reception control unit 71 controls the transmission angle of the ultrasonic waves by delay driving the plurality of ultrasonic transmission / reception units 44 arranged in the X direction. Further, the transmission / reception control unit 71 controls the ultrasonic probe 2 to acquire a reception signal from the ultrasonic transmission / reception unit 44.

The image forming unit 72 corresponds to each of the ultrasonic element arrays 43A, 43B, and 43C based on the reception signals (image signals) output from the ultrasonic element arrays 43A, 43B, and 43C of the ultrasonic probe 2. Generate an ultrasound image.
The display control unit 73 causes the display device 8 to display each generated ultrasonic image.
The movement control unit 74 controls the motor 54 to control the first unit 4A, the second unit 4B, and the third unit 4C, that is, the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third super unit. The acoustic wave element array 43C is moved in the Y direction to change the position.

The position detection unit 75 detects the position of an object such as the blood vessel M1 or the puncture needle 10 based on the result of ultrasonic measurement by the ultrasonic probe 2. For example, the position detection unit 75 performs image processing of ultrasonic images corresponding to each of the ultrasonic element arrays 43A, 43B, and 43C, and detects the position of the object for each of the ultrasonic images. Further, the position detection unit 75 estimates the position of the object from the position detection results of the object at a plurality of measurement positions.
The state determination unit 76 determines whether the ultrasonic measurement processing by the ultrasonic measurement device 1 is performed in an appropriate state based on the detection result of the position of the puncture needle 10 by the position detection unit 75 when performing the puncturing operation. To do. For example, the state determination unit 76 performs error determination as to whether or not the position (tip position) of the puncture needle 10 is appropriate.

[Ultrasonic measurement processing]
FIG. 9 is a flowchart illustrating an example of an ultrasonic measurement process in the ultrasonic measurement apparatus 1. FIG. 10 is a diagram for explaining the preliminary measurement process, and FIG. 11 is a diagram for explaining the main measurement process. 10 and 11 schematically show the positional relationship among the ultrasonic element arrays 43A, 43B, and 43C, the puncture needle 10, and the blood vessel M1. 10 and 11, the scanning range SA by the ultrasonic element arrays 43A, 43B, and 43C is indicated by a one-dot chain line. The scan range SA is a measurement region that extends along the scan plane of the ultrasonic element array 43.
Hereinafter, the ultrasonic measurement process in the ultrasonic measurement apparatus 1 will be described. Note that, as described above, the ultrasonic measurement apparatus 1 according to the present embodiment can be used when performing a puncturing operation in which, for example, a puncture needle is inserted into a predetermined organ (for example, a blood vessel) in a living body. In this embodiment, before the practitioner performs puncture for inserting the puncture needle into the living body along the Y direction, the ultrasonic measurement device 1 performs preliminary measurement, and from the measurement result of the preliminary measurement, Detect (estimate) the position of the organ. Then, the ultrasonic measurement device 1 performs the main measurement with the puncture position determined based on the position detection result as the measurement position, acquires an ultrasonic image, and displays the ultrasonic image on the display device 8. The practitioner can more reliably grasp the position of the puncture needle by observing the ultrasonic image.

As shown in FIG. 9, first, the movement control unit 74 controls the motor 54 to perform the first unit 4A, the second unit 4B, and the third unit 4C, that is, the first ultrasonic element array 43A and the second ultrasonic element array. The positions of the acoustic element array 43B and the third ultrasonic element array 43C are set as preliminary measurement positions (step S1).
In FIG. 10, the arrangement of the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C is set to the first arrangement for preliminary measurement. In this first arrangement, the first ultrasonic element array 43A is arranged at the center in the Y direction, the second ultrasonic element array 43B is arranged at the −Y side end, and the third ultrasonic element array 43C is arranged at the + Y side end. The That is, the interval between the scan ranges SA (measurement position interval) is maximized.

Here, in the first arrangement, it is preferable that the interval between the measurement positions of the ultrasonic element arrays 43A, 43B, and 43C in the Y direction is equal to or greater than a predetermined value. The predetermined value is a value that can appropriately calculate (estimate) the position and shape of the object such as the blood vessel M1 from the ultrasonic tomographic image, that is, the three-dimensional arrangement, and can be calculated in advance by experiment, simulation, or the like. For example, when the blood vessel M1 is a measurement target as in the present embodiment, the three-dimensional arrangement of blood vessels is estimated based on the position of the blood vessel in each ultrasonic image corresponding to each ultrasonic element array 43A, 43B, 43C. At this time, if the interval between the measurement positions is small, the accuracy of estimating the direction and position of the blood vessel may decrease. Therefore, the fall of the said estimation precision can be suppressed by making the space | interval between measurement positions more than the said predetermined value.
Moreover, it is preferable that the space | interval between measurement positions is below a predetermined | prescribed upper limit. For example, when the blood vessel is bent, the three-dimensional arrangement of the blood vessel may not be accurately estimated. Therefore, the fall of the estimation precision of the three-dimensional arrangement | positioning of a target object can be suppressed by making the space | interval of a measurement position below into the upper limit set according to the measuring object.

Next, the ultrasonic measurement apparatus 1 performs preliminary measurement by driving the ultrasonic element arrays 43A, 43B, and 43C (step S2).
In step S2, the transmission / reception control unit 71 sequentially drives each of the ultrasonic element arrays 43A, 43B, and 43C arranged in the first arrangement shown in FIG. 10 to perform ultrasonic measurement.
For example, as shown in FIG. 5, the transmission / reception control unit 71 sets the ultrasonic transmission angle of the first ultrasonic element array 43A to 0 °, and sets the ultrasonic waves of the second ultrasonic element array 43B and the third ultrasonic element array 43C. The ultrasonic measurement is transmitted with the transmission angle of the sound wave as a predetermined angle θ.
The image forming unit 72 generates an ultrasonic image (for example, a B-mode image) based on the ultrasonic reception result. The display control unit 73 causes the display device 8 to display the generated ultrasonic image. 10, the first ultrasonic image Im1 is the first ultrasonic element array 43A, the second ultrasonic image Im2 is the second ultrasonic element array 43B, and the third ultrasonic image Im3 is the third ultrasonic element array. It is generated from the ultrasonic measurement result of 43C.

Next, the movement control unit 74 acquires the Y-direction positions (measurement positions) of the ultrasonic element arrays 43A, 43B, and 43C when performing the main measurement in step S4 described later (step S3).
In step S3, the movement control unit 74 measures the position in the Y direction of the first ultrasonic element array 43A during the main measurement so that the blood vessel M1 passes through the central portion of the measurement region F1 of the first ultrasonic element array 43A. Get as position. Further, the measurement positions of the second ultrasonic element array 43B and the third ultrasonic element array 43C at the time of the main measurement are set according to the measurement positions of the first ultrasonic element array 43A, which will be described later (see FIG. 11). ). The actual measurement position may be set by an input operation by a puncture person, or may be acquired based on the estimation result of the three-dimensional position of the blood vessel M1 by the position detection unit 75.

  For example, the position detection unit 75 determines the position of the blood vessel M1 at each measurement position of each of the ultrasonic element arrays 43A, 43B, and 43C based on the respective ultrasonic images Im1, Im2, and Im3 obtained by the preliminary measurement process in step S2. Is detected. Then, the position detection unit 75 estimates the three-dimensional position of the blood vessel M1 based on the detection result of the position of the blood vessel M1 at each measurement position (see FIG. 10). The movement control unit 74 then measures the first ultrasonic element array 43A at the time of the main measurement based on the estimation result of the three-dimensional position of the blood vessel M1 and the position of the measurement region F1 of the first ultrasonic element array 43A. The position Ps is acquired.

Next, the movement control unit 74 controls the motor 54 to set the positions of the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C as the main measurement positions ( Step S4).
In FIG. 11, the arrangement of the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C is set to the second arrangement for the main measurement. In the second arrangement, the interval between the scan ranges SA (that is, measurement positions) of the ultrasonic element arrays 43A, 43B, and 43C in the Y direction is smaller than that in the first arrangement. In the example shown in FIG. 11, the scan range SA of the first ultrasonic element array 43A and the scan range SA of the second ultrasonic element array 43B and the third ultrasonic element array 43C are arranged substantially adjacent to each other. Thereby, the puncture person can grasp the tip position of puncture needle 10 more certainly than the case where there is a gap between scan ranges SA.

Next, the ultrasonic measurement device 1 drives the ultrasonic element arrays 43A, 43B, and 43C to perform the main measurement (step S5).
In step S5, the transmission / reception control unit 71 sequentially drives the ultrasonic element arrays 43A, 43B, and 43C to perform ultrasonic measurement, as in step S2. The image forming unit 72 generates an ultrasonic image based on the ultrasonic reception result. The display control unit 73 causes the display device 8 to display the generated ultrasonic image. The ultrasonic images Im4, Im5, and Im6 shown in FIG. 11 are generated from the ultrasonic measurement results of the ultrasonic element arrays 43A, 43B, and 43C, respectively.

Next, the position detector 75 detects the position of the puncture needle 10 based on the measurement results of the ultrasonic element arrays 43A, 43B, and 43C (step S6).
The position detection unit 75 detects the position of the puncture needle 10 at each measurement position of each of the ultrasonic element arrays 43A, 43B, and 43C based on the measurement result of the main measurement. For example, the position detection unit 75 detects the presence / absence of the puncture needle 10 by edge detection or the like for each of the ultrasonic images Im4, Im5, and Im6 shown in FIG. Moreover, the position detection part 75 acquires the position of the said puncture needle 10, when the puncture needle 10 is detected.

Next, the state determination part 76 determines an error based on the position detection result of the puncture needle 10 in step S6 (step S7). When the state determination unit 76 determines that an error has occurred, the display control unit 73 displays an error determination result on the display device.
For example, when the puncture needle 10 is detected from each of the ultrasonic images Im4, Im5, and Im6, the state determination unit 76 determines that the tip position of the puncture needle 10 has advanced too far to the + Y side, so that it is an error. To do. Further, when the puncture needle 10 is not detected from any of the ultrasonic images Im4, Im5, and Im6, the distance between the puncture needle 10 and the blood vessel M1 may be too far, so that it is determined as an error.
On the other hand, when the puncture needle 10 is detected only from the second ultrasonic image Im5, or only from the first ultrasonic image Im4 and the second ultrasonic image Im5, the state determination unit 76 determines that no error has been detected.

  Even when the puncture needle 10 is detected only from the first ultrasonic image Im4 and the second ultrasonic image Im5, the distance between the puncture needle 10 detected in the first ultrasonic image Im4 and the blood vessel M1 is greater than a predetermined threshold. If it is larger, the state determination unit 76 may determine an error. Thereby, the state determination part 76 can determine that the position of the puncture needle 10 may be too far from the blood vessel M1.

  Next, the control device 7 determines whether or not a measurement end instruction has been received (step S8). If it determines with NO by step S8, the control apparatus 7 will perform the process after step S5, and if it determines with YES, the control apparatus 7 will complete | finish an ultrasonic measurement process.

[Effects of First Embodiment]
In the present embodiment, the ultrasonic element arrays 43A, 43B, and 43C are arranged at positions that do not interfere with each other in the X direction. Therefore, the moving unit 5 can move each of the ultrasonic element arrays 43A, 43B, and 43C to an arbitrary position in the Y direction. Thus, the degree of freedom of the measurement position interval (interval of the scan range SA) of each of the ultrasonic element arrays 43A, 43B, and 43C can be improved without being limited by the outer dimensions of the ultrasonic element array 43.
For example, by arranging the ultrasonic element arrays 43A, 43B, and 43C at different positions in the Y direction (positions shifted from each other) as in this embodiment, the measurement positions of the ultrasonic element arrays 43A, 43B, and 43C are different. The ultrasonic measurement can be performed simultaneously for different measurement positions.

In the present embodiment, the ultrasonic element arrays 43A, 43B, and 43C are arranged in an inclined manner with respect to each other when viewed in plan from the Y direction.
Here, the configuration in which the ultrasonic element arrays 43A, 43B, and 43C are arranged on the same plane without being inclined with each other is compared with the configuration of the present embodiment described above. In this case, for example, the overlapping region F4 can be set at a shallow position near the body surface by increasing the ultrasonic transmission angle of the second ultrasonic element array 43B and the third ultrasonic element array 43C. However, increasing the transmission angle of ultrasonic waves degrades the image quality of the ultrasonic waves. In addition, there is a limit in increasing the transmission angle, and there is a possibility that the position of the overlapping region F4 cannot be brought closer to the ultrasonic element array 43 side.
On the other hand, as in the present embodiment, the ultrasonic element arrays 43A, 43B, and 43C are arranged so as to be inclined with respect to each other, so that the position of the overlapping region F4 can be determined as viewed from the Y direction. It is easy to get close to 43A, 43B, and 43C.

  The movement control unit 74 changes the arrangement of the ultrasonic element arrays 43A, 43B, and 43C between a first arrangement having a larger measurement position interval and a second arrangement having a smaller measurement position interval. In such a configuration, the practitioner can set a plurality of measurement positions in a wider measurement range and observe the measurement object over a wider range by the first arrangement. On the other hand, the practitioner can set a plurality of measurement positions in a narrower measurement range by the second arrangement, and can observe the measurement object in more detail.

  In the first arrangement, the position detection unit 75 detects the position of the measurement object for each of the plurality of measurement positions set for the wider measurement range as described above. And the position detection part 75 estimates the position of measuring objects, such as the blood vessel M1, based on a detection result. In such a configuration, since ultrasonic measurement can be performed simultaneously at a plurality of positions, the position of the measurement target can be estimated quickly and with high accuracy.

[Second Embodiment]
Hereinafter, a second embodiment will be described.
In the first embodiment, the ultrasonic element arrays 43A, 43B, and 43C are stationary in the main measurement during the puncturing operation. In contrast, the second embodiment is different in that the first ultrasonic element array 43A and the second ultrasonic element array 43B are moved according to the position of the puncture needle 10 in the main measurement.
In the following description, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified.

[Ultrasonic measurement processing]
FIG. 12 is a flowchart illustrating an example of an ultrasonic measurement process in the ultrasonic measurement apparatus 1.
FIG. 13 is a diagram for explaining the main measurement process. FIG. 13 schematically shows the positional relationship among the ultrasonic element arrays 43A, 43B, and 43C, the puncture needle 10, and the blood vessel M1.
As shown in FIG. 12, first, the movement control unit 74 determines the positions of the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C as the preliminary measurement positions (the first measurement element in FIG. 10). (See 1 arrangement) (step S1).
Next, the ultrasonic measurement apparatus 1 performs preliminary measurement by driving the ultrasonic element arrays 43A, 43B, and 43C (step S2).

Next, the movement control unit 74 acquires a measurement position in the main measurement described later (step S9).
As shown in FIG. 13, the measurement position (Y direction position) of the third ultrasonic element array 43C in the main measurement is set to the final position. Here, the final position is a position where the puncture needle 10 is inserted into the blood vessel M1. Therefore, the position where the blood vessel M1 passes in the vicinity of the center position of the measurement region F3 of the third ultrasonic element array 43C is acquired as the final position of the Y direction position of the third ultrasonic element array 43C.

  As will be described later, in this measurement, the positions of the first ultrasonic element array 43A and the second ultrasonic element array 43B are changed according to the position of the puncture needle 10. That is, the first ultrasonic element array 43A and the second ultrasonic element array 43B are moved at a speed based on the tip position of the puncture needle 10. The initial positions of the first ultrasonic element array 43A and the second ultrasonic element array 43B are set, for example, at the −Y side end.

  Next, the movement control unit 74 controls the motor 54 to set the positions of the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C as the main measurement positions ( Step S4). That is, the movement control unit 74 moves the first ultrasonic element array 43A and the second ultrasonic element array 43B to the initial position and the third ultrasonic element array 43C to the final position Ps.

Next, the ultrasonic measurement apparatus 1 drives the ultrasonic element arrays 43A, 43B, and 43C to perform the main measurement (Step S10).
The ultrasonic measurement apparatus 1 moves the first ultrasonic element array 43A and the second ultrasonic element array 43B by the movement control unit 74 at a set moving speed (hereinafter also referred to as array speed) (the array speed is 0). In the case where the third ultrasonic element array 43C is stationary, the transmission / reception control unit 71 drives the ultrasonic element arrays 43A, 43B, and 43C to perform ultrasonic measurement.
Here, in the present embodiment, the movement control unit 74 moves the first ultrasonic element array 43A and the second ultrasonic element array 43B at an array speed based on a speed determination result in step S12 described later. Thereby, the first ultrasonic element array 43A and the second ultrasonic element array 43B are moved according to the tip position of the puncture needle 10.

  The image forming unit 72 generates an ultrasonic image based on the ultrasonic reception result. The display control unit 73 causes the display device 8 to display the generated ultrasonic image. The ultrasonic images Im7, Im8, and Im9 shown in FIG. 13 are generated from the ultrasonic measurement results of the ultrasonic element arrays 43A, 43B, and 43C, respectively. In FIG. 13, a mark indicating the final target position of the tip of the puncture needle 10 is displayed in the third ultrasonic image Im9 corresponding to the third ultrasonic element array 43C.

  Note that, from the start of the main measurement in step S10 until the puncture needle 10 is detected in the second ultrasonic image Im8 by the second ultrasonic element array 43B, the movement control unit 74 performs the first ultrasonic element array 43A. The second ultrasonic element array 43B is stationary.

Next, the position detector 75 detects the position of the puncture needle 10 based on the measurement results of the ultrasonic element arrays 43A, 43B, and 43C (step S6).
The position detection unit 75 detects the puncture needle 10 for each of the ultrasonic images Im7, Im8, and Im9. Moreover, the position detection part 75 acquires the position of the said puncture needle 10, when the puncture needle 10 is detected.

Next, the state determination unit 76 determines the measurement state including the appropriateness of the array speed and the presence / absence of an error based on the detection result of the puncture needle 10 in step S6 (step S11).
When the first ultrasonic element array 43A and the second ultrasonic element array 43B are stationary immediately after the main measurement, the state determination unit 76 determines whether the puncture needle 10 has been detected from the second ultrasonic image Im8. Determine. That is, when the puncture needle 10 is detected, it is determined that the first ultrasonic element array 43A and the second ultrasonic element array 43B need to be moved.
Note that after the movement start determination is made in step S11, the movement control unit 74 starts moving the first ultrasonic element array 43A and the second ultrasonic element array 43B in step S10. At this time, the initial value of the array speed is set to a preset value. The initial value may be set to a value calculated based on the elapsed time from the start of puncturing until the puncture needle 10 is detected.

In step S11, when the puncture needle 10 is detected only in the second ultrasonic image Im8 of the second ultrasonic element array 43B, the state determination unit 76 determines that the array speed is higher than the tip position of the puncture needle 10. If it is not, it is determined as a speed error.
For example, when the puncture needle 10 is detected in the first ultrasonic image Im7 corresponding to the first ultrasonic element array 43A in addition to the second ultrasonic image Im8, the state determination unit 76 determines that the array speed is slow. .
Further, the state determination unit 76 determines that the array speed is fast when the puncture needle 10 is not detected in any of the ultrasonic images Im7, Im8, and Im9.

Next, the control device 7 determines whether or not an instruction to end the measurement has been received (step S8). If it is determined YES, the control device 7 ends the ultrasonic measurement process.
If it determines with NO by step S8, the control apparatus 7 will perform the process after step S5. That is, in step S5, the movement control unit 74 can set the array speed to a plurality of speeds, for example, and sets the movement speed based on the speed determination result in step S11.
For example, if it is determined in step S11 that the array speed is slow, the movement control unit 74 sets the speed one step higher than the currently set array speed. If it is determined in step S11 that the array speed is high, the movement control unit 74 sets the speed one step lower than the currently set array speed.

[Effects of Second Embodiment]
In the present embodiment, the movement control unit 74 moves at least one of the ultrasonic element arrays 43A, 43B, and 43C in the Y direction. In such a configuration, an object such as the puncture needle 10 that moves in the Y direction can be measured at a plurality of measurement positions.
Further, the moving speed (array speed) of the ultrasonic element array is changed. In such a configuration, the array speed can be changed based on the position (movement speed) of an object such as the puncture needle 10. Thereby, the tip of the puncture needle 10 moving in the Y direction can be stored in the measurement region of the ultrasonic element array to be moved.

  In the present embodiment, the first ultrasonic element array 43A and the second ultrasonic element array 43B are moved together. From the first ultrasonic image Im7 and the second ultrasonic image Im8. By detecting the position of the puncture needle 10, the movement (position) of the tip of the puncture needle 10 can be detected. Further, the array speed can be changed according to the movement (position) of the tip.

[Modification]
Note that the present invention is not limited to the above-described embodiments, and the present invention includes configurations obtained by modifying, improving, and appropriately combining the embodiments as long as the object of the present invention can be achieved. Is.
For example, in each of the above embodiments, three ultrasonic element arrays are arranged in the X direction, but the number of ultrasonic element arrays is not limited to this, and four or more ultrasonic element arrays are arranged. It is good also as a structure to be.
In each said embodiment, although the structure which the measurement area | region of all the ultrasonic element arrays overlapped was illustrated, it is not limited to this. That is, a configuration may be adopted in which some measurement regions of a plurality of ultrasonic element arrays overlap each other.

  In the above embodiment, ultrasonic waves are transmitted (linear scan) in the Z direction from the first ultrasonic element array arranged in the center, and other elements arranged on the + X side or the −X side from the first ultrasonic element array. Although ultrasonic waves are transmitted from the ultrasonic element array in a direction inclined in the Z direction (bevel scan), the present invention is not limited to this. For example, an oblique scan may be performed on the first ultrasonic element array. Further, the second ultrasonic element array and the third ultrasonic element array may be subjected to linear scanning.

  In the above embodiment, the ultrasonic transmission angle is set to a preset angle in the preliminary measurement and the main measurement, but the present invention is not limited to this. For example, during the preliminary measurement, a wide range of ultrasonic images may be acquired by changing the ultrasonic transmission angle. Then, the position of the measurement target may be detected from the acquired ultrasonic image, and the transmission angle during the main measurement may be set based on the position detection result. Thereby, a more suitable transmission angle can be set with respect to the position of the object, and the measurement object can be more reliably accommodated in the overlapping region F4.

  In the first embodiment, as the second arrangement, as shown in FIG. 11, the scan range SA of the first ultrasonic element array 43A, and the scan ranges of the second ultrasonic element array 43B and the third ultrasonic element array 43C. The SA is disposed substantially adjacent to the SA, but is not limited to this. For example, the scan range SA of the first ultrasonic element array 43A and the scan range SA of the second ultrasonic element array 43B and the third ultrasonic element array 43C may be arranged via a predetermined gap. With such a configuration, the entire measurement range in the Y direction can be increased. For example, when the object extends along the Y direction, a wider range of the object can be observed in detail.

  In the second embodiment, the configuration in which two of the three ultrasonic element arrays 43 are moved is exemplified, but the present invention is not limited to this, and only one may be moved, or three may be moved simultaneously. You may let them. For example, when three are moved, the tip position of the puncture needle 10 can be detected more reliably by simultaneously moving the three ultrasonic element arrays 43 in a state where the scan ranges SA are substantially adjacent to each other.

  In the second embodiment, the tip position of the puncture needle 10 is detected based on the ultrasound image. However, for example, a sensor for detecting the movement amount, movement speed, and direction of the puncture needle 10 may be provided separately. For example, a roller or the like may be provided in the groove 622 of the fixed member 6 and the movement amount may be detected by the rotation amount of the roller. In this case, the tip position of the puncture needle can be calculated from the measurement position of the ultrasound image, the position of the puncture needle based on the ultrasound image, and the amount of movement of the puncture needle. In this case, the tip position of the puncture needle 10 can be calculated even when the second ultrasonic element array 43B is fixed and only the first ultrasonic element array 43A is moved according to the movement of the puncture needle 10. . Furthermore, in this case, the angle and orientation of the puncture needle 10 can be detected with higher accuracy based on the measurement results (ultrasonic image) by the first ultrasonic element array 43A and the second ultrasonic element array 43B.

  In the second embodiment, the configuration for changing the array speed is exemplified, but the present invention is not limited to this, and the array speed may be a constant speed. For example, when the first ultrasonic element array 43A and the second ultrasonic element array 43B are moved while the array speed is constant, the ultrasonic measuring device detects the puncture needle when the puncture needle is detected in the first ultrasonic image. An excess of the moving speed may be detected. In addition, the ultrasonic measurement device may detect a delay in the moving speed of the puncture needle when the puncture needle is not detected in the second ultrasonic image.

  In the second embodiment, the predicted arrival position of the puncture needle 10 may be displayed on the third ultrasonic image Im9 (FIG. 13). Further, when the predicted arrival position is away from the target position beyond the allowable range, an error may be notified. The predicted arrival position can be calculated based on, for example, position information of the puncture needle 10 measured at a plurality of measurement positions, information on the angle and orientation of the puncture needle 10, and the like.

In the above embodiment, the ultrasonic element arrays 43A, 43B, and 43C are sequentially driven. However, the present invention is not limited to this, and the ultrasonic images may be simultaneously acquired by driving simultaneously.
Further, although the acquired ultrasonic images are individually displayed, three-dimensional images may be generated and displayed from the measurement results of the ultrasonic element arrays 43A, 43B, and 43C.

  In the above embodiment, the ultrasonic element arrays 43A, 43B, and 43C of the ultrasonic device 3 are equidistant from the intersection P where the normal lines of the respective ultrasonic transmission / reception surfaces 431 intersect in a plan view in the Y direction. Although it was arranged, it is not limited to this. For example, you may arrange | position the 1st ultrasonic element array 43A to the intersection P side rather than the structure of the said embodiment. Thereby, the distance between the first ultrasonic element array 43A and the measurement target can be reduced. Therefore, the measurement accuracy by the first ultrasonic element array 43A can be improved.

  In the above embodiment, the plurality of ultrasonic element arrays have exemplified the configuration in which the normal lines of the respective ultrasonic transmission / reception surfaces 431 intersect at one point in a plan view in the Y direction (second direction). Not. For example, at least a part of normal lines of the plurality of ultrasonic element arrays may intersect as described above. The plurality of ultrasonic element arrays may be arranged such that the ultrasonic transmission / reception surfaces are on the same plane or parallel. That is, the plurality of ultrasonic element arrays may be arranged without being inclined in a plan view in the Y direction (second direction). Even in such a configuration, by transmitting ultrasonic waves from each ultrasonic element array in a direction intersecting the ultrasonic transmission / reception surface, a superimposed region can be formed, and the degree of freedom of the interval between the measurement regions can be improved.

In the said embodiment, although the acoustic matching member 9 was arrange | positioned between the ultrasonic device 3 and the target object, it is not limited to this, The acoustic matching member 9 does not need to be arrange | positioned. For example, in the case where measurement is performed in a medium such as water having substantially the same acoustic impedance as that of a living body, it is not necessary to provide the acoustic matching member 9.
Moreover, although the structure provided with the fixing member 6 which fixes the acoustic matching member 9 with respect to the ultrasonic device 3 was illustrated, it is not limited to this, It is good also as a structure which does not include the fixing member 6.

In the above embodiment, the configuration including the vibration film 421 </ b> B and the piezoelectric element 421 </ b> C as a vibrator that vibrates the vibrator is illustrated as the ultrasonic transducer 45. However, the present invention is not limited to this, and a configuration including a vibrator other than the piezoelectric element, such as an electrostatic actuator, may be employed.
Further, the ultrasonic transducer 45 may not be provided with a vibration film, and may be configured to transmit ultrasonic waves by vibrating a vibrator such as a piezoelectric element.

  In the said embodiment, although the ultrasonic measuring apparatus which makes a measurement object an in-vivo organ was illustrated, it is not limited to this. For example, the present invention can be applied to a measuring machine that uses various structures as a measurement object and detects defects in the structures or inspects aging. Further, for example, the present invention can be applied to a measuring machine that detects a defect of the measurement target using a semiconductor package, a wafer, or the like as the measurement target.

  In addition, the specific structure for carrying out the present invention may be configured by appropriately combining the above-described embodiments and modifications within the scope that can achieve the object of the present invention, and may be appropriately changed to other structures and the like. May be.

DESCRIPTION OF SYMBOLS 1 ... Ultrasonic measuring device, 3 ... Ultrasonic device, 4 ... Ultrasonic unit, 4A ... 1st unit, 4B ... 2nd unit, 4C ... 3rd unit, 5 ... Moving part, 5A ... 1st moving part, 5B ... 2nd moving part, 5C ... 3rd moving part, 9 ... Acoustic matching member, 43 ... Ultrasonic element array, 43A ... 1st ultrasonic element array, 43B ... 2nd ultrasonic element array, 43C ... 3rd ultrasonic wave Element array 44... Ultrasonic transmission / reception unit 74. Movement control unit 75. Position detection unit 431. Ultrasonic transmission / reception surface N 1... Normal (of the first ultrasonic element array) N 2. Normal line of element array, N3... (Normal line of third ultrasonic element array), P... Intersection, Ps... Measurement position, M.

Claims (10)

A plurality of ultrasonic element arrays;
A moving unit that moves each of the plurality of ultrasonic element arrays,
The plurality of ultrasonic element arrays includes a plurality of ultrasonic transmission / reception units arranged in a first direction intersecting the thickness direction, and are arranged at positions that do not interfere with each other in the first direction,
The moving unit moves the plurality of ultrasonic element arrays in a second direction intersecting the thickness direction and the first direction. The ultrasonic device according to claim 1,
In the plurality of ultrasonic element arrays, normal lines of respective ultrasonic transmission / reception surfaces intersect each other. An ultrasonic device comprising: a plurality of ultrasonic element arrays; and a moving unit that moves each of the plurality of ultrasonic element arrays;
A control unit for controlling the ultrasonic device,
The plurality of ultrasonic element arrays includes a plurality of ultrasonic transmission / reception units arranged in a first direction intersecting the thickness direction, and are arranged at positions that do not interfere with each other in the first direction,
The moving unit moves the plurality of ultrasonic element arrays in a second direction intersecting the thickness direction and the first direction,
The said control part is provided with the movement control part which controls the said moving part and moves the said ultrasonic element array to the said 2nd direction. The ultrasonic measuring device characterized by the above-mentioned. The ultrasonic measurement apparatus according to claim 3,
In the plurality of ultrasonic element arrays, normal lines of respective ultrasonic transmission / reception surfaces intersect each other. In the ultrasonic measuring device according to claim 3 or 4,
The movement control unit moves the plurality of ultrasonic element arrays to positions shifted from each other in the second direction. In the ultrasonic measuring device according to any one of claims 3 to 5,
The movement control unit moves at least one of the plurality of ultrasonic element arrays in the second direction when performing ultrasonic measurement. The ultrasonic measurement apparatus according to claim 6,
The said movement control part changes the moving speed of the said 2nd direction of at least 1 of these ultrasonic element arrays. The ultrasonic measuring device characterized by the above-mentioned. In the ultrasonic measuring device according to any one of claims 3 to 7,
The control unit detects a position of a measurement target at a measurement position where the measurement result is obtained based on a measurement result of ultrasonic measurement by the ultrasonic element array, and the second control unit detects the second position based on the detection result of the position. An ultrasonic measurement apparatus comprising: a position detection unit that estimates a position of the measurement object along a direction. A plurality of ultrasonic element arrays; and a moving unit that moves each of the plurality of ultrasonic element arrays, wherein the plurality of ultrasonic element arrays are arranged in a first direction intersecting a thickness direction. An ultrasonic transmission / reception unit is disposed at a position where the ultrasonic transmission / reception unit does not interfere with each other in the first direction, and the moving unit moves the plurality of ultrasonic element arrays in a second direction intersecting the thickness direction and the first direction. An ultrasonic measurement method using a possible ultrasonic device,
An ultrasonic measurement method comprising performing ultrasonic measurement while moving at least one of the plurality of ultrasonic element arrays in the second direction. The ultrasonic measurement method according to claim 9,
The ultrasonic measurement method, wherein a moving speed in the second direction of at least one of the plurality of ultrasonic element arrays is changed.

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