JP2018029697A - Ultrasonic device and ultrasonic measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic device and an ultrasonic measurement device capable of accurately measuring a shape of a measurement object region with irregularities.SOLUTION: There is provided an ultrasonic device in which a plurality of ultrasonic element arrays having a plurality of ultrasonic transmission/reception parts are connected at variable angles between them. The plurality of ultrasonic transmission/reception parts are disposed in a first direction intersecting with a thickness direction of the ultrasonic element arrays, and the plurality of ultrasonic element arrays are connected at angles variable in the first direction. In a plane view in a second direction intersecting with the thickness direction and the first direction, normal lines passing through the center of the transmission/reception surfaces of the plurality of ultrasonic element arrays cross at one point.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an ultrasonic device and an ultrasonic measurement apparatus.

2. Description of the Related Art Conventionally, an ultrasonic probe including an ultrasonic array in which a plurality of vibration elements (ultrasonic transmitting / receiving units) that transmit and receive ultrasonic waves are arranged one-dimensionally in one direction, and an ultrasonic diagnostic apparatus (ultrasonic wave) including the ultrasonic probe Measuring apparatus) is known (for example, see Patent Document 1).
The ultrasonic measurement apparatus described in Patent Literature 1 transmits ultrasonic waves within a predetermined scan plane from a one-dimensionally arranged ultrasonic transmission / reception unit and receives ultrasonic waves reflected by a measurement target within the scan plane. Thus, a tomographic image of the measurement target on the scan plane can be acquired.

JP 2012-105751 A

By the way, in a puncturing operation in which a puncture needle is used while observing an organ in a living body using an ultrasonic measurement device as described in Patent Document 1, a puncture needle may be inserted into a nerve hole such as a vertebra in the living body. is there. In this case, it is necessary to display the ultrasonic tomogram by detecting the ridge line of the bone and the inner side of the nerve hole with high accuracy by the ultrasonic measurement device. However, it is difficult for a conventional ultrasonic measurement apparatus such as Patent Document 1 to detect a bone ridgeline or a hole such as a nerve hole with high accuracy.
In other words, in the conventional ultrasonic measurement device,
I. Ultrasonic transmit and receive beams are too thin
II. The direction of the transmit beam and the receive beam are almost the same direction
III. The reflected wave from the bone surface includes a spherical wave component and a specular reflection component, but the amount of reflection of the spherical wave component is small, and almost no image can be formed. The specular reflection component is the same as the surface of the target (such as bone). There is a limit to improving the detection accuracy of bone ridgelines and holes due to the fact that imaging can be performed only when the transmitted and received beams are orthogonal to each other.

  Also, instead of a linear probe that outputs an ultrasonic transmission beam in the normal direction from the transmission / reception surface and receives reflected ultrasonic waves incident from the normal direction, the ultrasonic transmission / reception direction is expanded to a fan-shaped region. It is also conceivable to use a convex probe or the like that performs ultrasonic measurement. However, with the convex probe, the scanning density becomes coarse and the resolution of the image cannot be sufficiently increased.

  An object of the present invention is to provide an ultrasonic device and an ultrasonic measurement apparatus capable of measuring the shape of a measurement target portion having irregularities with high accuracy, and application examples and embodiments will be described below.

  An ultrasonic device according to one application is an ultrasonic device in which a plurality of ultrasonic element arrays each having a plurality of ultrasonic transmission / reception units are connected to each other with variable angles, and the plurality of ultrasonic transmission / reception units include Arranged in a first direction that intersects the thickness direction of the ultrasonic element array, the plurality of ultrasonic element arrays are coupled to the first direction with variable angles, and intersect the thickness direction and the first direction. When viewed in plan from the second direction, normal lines passing through the centers of the ultrasonic wave transmitting / receiving surfaces of the plurality of ultrasonic element arrays intersect at one point.

  The first direction in this application example is a direction that intersects the thickness direction of the ultrasonic element array, and the ultrasonic transmission / reception units are connected side by side in this direction. Accordingly, ultrasonic transmission / reception processing can be performed on the scan plane including the first direction and the thickness direction from the ultrasonic transmission / reception unit of each ultrasonic element array. Such ultrasonic element arrays are connected in the first direction, and normals passing through the centers of the transmission / reception surfaces of the ultrasonic element arrays intersect at one point (each normal line passes through the same intersection). Therefore, when an ultrasonic wave is transmitted from each ultrasonic element array in the normal direction of the transmission / reception surface, the ultrasonic wave is transmitted toward the intersection.

In such a configuration, ultrasonic waves are transmitted from one ultrasonic element array in the normal direction of the transmission / reception surface, and reflected ultrasonic waves reflected at the measurement target site are received by one or more ultrasonic element arrays. By doing so, the shape of the measurement target part having irregularities can be measured with high accuracy.
That is, when ultrasonic waves are transmitted from one ultrasonic element array in the normal direction of the transmission / reception surface, if the measurement target part has irregularities, the reflected ultrasonic wave includes a spherical wave component and a specular reflection component. . Among these, the specular reflection component can be received with high reception sensitivity by an ultrasonic element array that transmits ultrasonic waves (hereinafter also referred to as a transmission array). On the other hand, since the spherical wave component is reflected in a direction different from the transmission direction of the ultrasonic wave, it cannot be suitably detected in the transmitter array. However, in this application example, since the normal direction of the transmission / reception surface of another ultrasonic element array is also directed to the measurement target part, the reflected ultrasonic wave of the spherical wave component is reflected by another ultrasonic element array other than the transmission array. Can be suitably received. Therefore, by performing aperture synthesis based on the reception signals output from the transmission array and the other ultrasonic element arrays, the ultrasonic reflection position can be detected with high accuracy.
In addition, by changing the transmission array, even if the measurement target part has irregularities, the ultrasonic transmission beam can reach a wide area of the irregularities, and the transmission array can be extended in the normal direction of the transmission / reception surface. Since the sound wave is transmitted, the scanning density does not become rough unlike the convex probe.
As described above, in this application example, the shape of the measurement target portion having the unevenness can be measured with high accuracy.

In the ultrasonic device according to this application example, the plurality of ultrasonic element arrays include a first ultrasonic element array and a second ultrasonic element array, and the first ultrasonic element array and the second ultrasonic element. A first connecting portion for connecting the angle with the array as a variable, and the first connecting portion has a driving force for changing an angle between the first ultrasonic element array and the second ultrasonic element array. It is preferable that an angle changing unit to be supplied is provided.
In this application example, as the plurality of ultrasonic element arrays, a first ultrasonic element array and a second ultrasonic element array are included, and the first ultrasonic element array and the second ultrasonic element array are first connected. An angle changing unit that supplies a driving force for changing the angle between the first ultrasonic element array and the second ultrasonic element array is provided to the first connecting part so that the angle is variable. For this reason, in the 1st connection part, the angle of a 1st ultrasonic element array and a 2nd ultrasonic element array can be suitably set by an angle change part, and desired depth position from these two ultrasonic element arrays The ultrasonic measurement as described above is performed on the measurement target part, and a high-accuracy ultrasonic tomographic image can be obtained by aperture synthesis.

In the ultrasonic device according to this application example, it is preferable that the first ultrasonic element array and the second ultrasonic element array are arranged at positions shifted from each other with respect to the second direction.
In this application example, the ultrasonic measurement position by the first ultrasonic element array and the ultrasonic measurement position by the second ultrasonic element array are shifted from each other in the second direction. Therefore, the ultrasonic measurement results at positions shifted from each other with respect to the second direction can be obtained. Thereby, for example, when an ultrasonic tomographic image to be measured is obtained based on the ultrasonic measurement result, two ultrasonic measurement images whose positions are shifted with respect to the second direction can be obtained simultaneously.

  In the ultrasonic device of this application example, the plurality of ultrasonic element arrays include a first ultrasonic element array, a second ultrasonic element array, and a third ultrasonic element array, and the first ultrasonic element array, A first connecting part for connecting the angle with the second ultrasonic element array as a variable, a second connecting part for connecting the angle between the first ultrasonic element array and the third ultrasonic element array as a variable, A first angle changing unit for supplying a driving force for changing an angle between the first ultrasonic element array and the second ultrasonic element array is provided in the first connecting part; It is preferable that the second connecting portion is provided with a second angle changing portion that supplies a driving force for changing the angle between the first ultrasonic element array and the third ultrasonic element array.

In this application example, the first ultrasonic element array, the second ultrasonic element array, and the third ultrasonic element array are included as the plurality of ultrasonic element arrays, and the first ultrasonic element array and the second ultrasonic element array The angle of the array is variable by the first connecting portion, and the angle is changed by the first angle changing portion. In addition, the angle of the first ultrasonic element array and the third ultrasonic element array is variable by the second connecting portion, and the angle is changed by the second angle changing portion.
For this reason, in the 1st connection part, the angle of the 1st ultrasonic element array and the 2nd ultrasonic element array is suitably set up by the 1st angle change part, and in the 2nd connection part, the 1st ultrasonic element array and the 3rd By appropriately setting the angle of the ultrasonic element array by the second angle changing unit, the ultrasonic measurement as described above is performed on the measurement target portion at the desired depth position from the two ultrasonic element arrays, and the opening is opened. A high-accuracy ultrasonic tomographic image can be obtained by synthesis.

In the ultrasonic measurement apparatus according to this application example, the first ultrasonic element array, the second ultrasonic element array, and the third ultrasonic element array are arranged at positions shifted from each other with respect to the second direction. It is preferable.
In this application example, the ultrasonic measurement position by the first ultrasonic element array, the ultrasonic measurement position by the second ultrasonic element array, and the ultrasonic measurement position by the third ultrasonic element array are in the second direction. The positions are shifted from each other. Therefore, three ultrasonic measurement results that are shifted from each other in the second direction can be obtained simultaneously.

An ultrasonic measurement apparatus according to an application example includes the ultrasonic device as described above and a control unit that controls the ultrasonic device.
In this application example, the ultrasonic measurement process as described above is performed using the ultrasonic device, and the aperture synthesis based on the measurement result can be performed in the control unit.

  In the ultrasonic measurement apparatus according to this application example, the control unit causes an ultrasonic wave to be transmitted from one of the plurality of ultrasonic element arrays, and the ultrasonic wave transmitted by the ultrasonic wave transmission process is reflected by an object. An ultrasonic measurement unit that performs ultrasonic measurement for receiving the reflected ultrasonic waves by at least one of the plurality of ultrasonic element arrays, and the ultrasonic measurement unit, An image generation unit that generates an ultrasonic tomographic image obtained by combining the measurement results obtained when the ultrasonic element array that transmits the ultrasonic waves is switched and the ultrasonic measurement is performed a plurality of times. preferable.

In this application example, the ultrasonic measurement unit transmits one ultrasonic wave in the normal direction of the transmission / reception surface using one of a plurality of ultrasonic element arrays as a transmission array, and transmits the ultrasonic measurement element to at least one ultrasonic element array. The reflected ultrasonic waves are received. Then, the image generation unit synthesizes (aperture synthesis) reception signals (measurement results) from the respective ultrasonic element arrays that have received the ultrasonic waves, and generates an ultrasonic tomographic image.
Therefore, in this application example, an ultrasonic tomographic image can be formed by aperture synthesis as described above, and even when the measurement target part is a part having unevenness such as a bone or when a hole part such as a nerve hole is detected. Thus, it is possible to form an ultrasonic tomographic image with a high-definition shape of the measurement target part.

In the ultrasonic measurement apparatus according to this application example, the image generation unit calculates the position of the ultrasonic transmission / reception unit based on the mutual angle of the plurality of ultrasonic element arrays, and the position of the ultrasonic transmission / reception unit. Preferably, the ultrasonic tomographic image is generated by aperture synthesis based on a reception signal output from the ultrasonic transmission / reception unit.
In this application example, the mutual angle of each ultrasonic element array is detected, the position of the ultrasonic transmission / reception unit is calculated based on the angle, and the calculated ultrasonic transmission / reception unit and the received signal are used. An ultrasonic tomographic image is generated by aperture synthesis. Thereby, by calculating the exact position of the ultrasonic transmission / reception unit, it is possible to improve the accuracy when performing aperture synthesis, and to form a more accurate ultrasonic tomographic image.

In the ultrasonic measurement apparatus according to this application example, the ultrasonic device includes an angle changing unit that changes an angle of each of the plurality of ultrasonic element arrays, and the control unit controls the angle changing unit, It is preferable to include an angle setting unit that changes the angle of each of the plurality of ultrasonic element arrays to an angle corresponding to a position where ultrasonic measurement is performed.
In this application example, the ultrasonic device includes an angle changing unit that changes an angle between adjacent ultrasonic element arrays, and the control unit includes an angle setting unit that sets the angle. That is, the mutual angle of the plurality of ultrasonic element arrays is changed to the angle set by the angle setting unit. In this case, the position of each ultrasonic transmission / reception unit that has received the ultrasonic wave can be calculated based on the set angle without separately using a sensor or the like for detecting the mutual angle of the plurality of ultrasonic element arrays.

1 is a block diagram showing a schematic configuration of an ultrasonic measurement apparatus according to a first embodiment. The figure which shows schematic structure at the time of seeing the ultrasonic probe of 1st embodiment from the -Y side. The figure which shows schematic structure at the time of seeing the ultrasonic probe of 1st embodiment from the + X1 side. 1 is a perspective view showing a schematic configuration of an ultrasonic device according to a first embodiment. The side view which shows schematic structure at the time of seeing the ultrasonic device of 1st embodiment from the -Y side. Sectional drawing which shows schematic structure of an ultrasonic unit. The top view which shows typically the ultrasonic sensor of 1st embodiment. FIG. 8 is a schematic cross-sectional view of the ultrasonic sensor when the line AA in FIG. 7 is cut. The schematic plan view which shows the connection structure of the ultrasonic unit of 1st embodiment. The flowchart which shows an example of the ultrasonic measurement process in the ultrasonic measurement apparatus of 1st embodiment. The figure which shows the measurement range at the time of performing a linear scan with respect to the measurement object site | part which has a recessed part using the conventional ultrasonic element array. The figure which shows the measurement range at the time of performing a sector scan with respect to the measurement object site | part which has a recessed part using the conventional ultrasonic element array. The figure which shows the measurement range at the time of measuring using aperture synthesis with respect to the measurement object site | part which has a recessed part using the conventional ultrasonic element array. The figure which shows the measurement range at the time of performing the measurement using aperture synthesis with respect to the measurement object site | part which has a deep hole part using the conventional ultrasonic element array. The figure which shows the measurement range at the time of performing an ultrasonic measurement process with respect to the measurement object site | part which has a recessed part in 1st embodiment. The figure which shows the measurement range at the time of performing an ultrasonic measurement process with respect to the measurement object site | part which has a deep hole part in 1st embodiment. The figure which shows the measurement range at the time of performing an ultrasonic measurement process with respect to the measurement object site | part which has a recessed part in 2nd embodiment. The figure which shows the measurement range at the time of performing an ultrasonic measurement process with respect to the measurement object site | part which has a deep hole part in 2nd embodiment. The schematic plan view which shows the connection structure of the ultrasonic unit in 3rd embodiment. The schematic plan view which shows the connection structure of the ultrasonic unit in 4th embodiment.

[First embodiment]
Hereinafter, the ultrasonic measurement apparatus according to the first embodiment will be described.
FIG. 1 is a block diagram showing a schematic configuration of an ultrasonic measurement apparatus 1 according to the first embodiment.
As shown in FIG. 1, the ultrasonic measurement apparatus 1 according to the present embodiment controls an ultrasonic probe 2 that is fixed to an object (the living body M in the present embodiment), and the ultrasonic probe 2 to control the living body M. A control device 7 for generating the internal tomographic image (ultrasonic image), and a display device 8 for displaying the obtained internal tomographic image.

The ultrasonic measurement apparatus 1 of the present embodiment can be suitably used when performing a puncturing operation in which, for example, a puncture needle is inserted into a predetermined organ (for example, a blood vessel) in a living body.
For example, in the puncturing operation, the practitioner applies an acoustic matching member 9 (for example, a gel) for improving the propagation efficiency of the ultrasonic wave to the affected part position where the ultrasonic probe 2 is to be punctured in the living body, and the ultrasonic probe. 2 is fixed. The ultrasonic measurement apparatus 1 then transmits an ultrasonic wave from the ultrasonic probe 2 into the living body, and receives an ultrasonic wave reflected from the living body M by the ultrasonic probe 2. I do. When the reception signal obtained by the ultrasonic wave reception process is input from the ultrasonic probe 2, the control device 7 forms an ultrasonic image in the living body M based on the reception signal and displays the ultrasonic image on the display device 8.
By using such an ultrasonic measurement device 1, the practitioner can efficiently perform a puncturing operation while confirming (observing) an ultrasonic image displayed on the display device 8.
Hereinafter, each configuration of the ultrasonic measurement apparatus 1 of the present embodiment will be described in detail.

[Configuration of ultrasonic probe]
FIG. 2 is a diagram illustrating a schematic configuration when the ultrasonic probe 2 is viewed from the −Y side, and FIG. 3 is a diagram illustrating a schematic configuration when viewed from the + X1 side.
As shown in FIGS. 2 and 3, the ultrasonic probe 2 includes an ultrasonic device 3 that transmits and receives ultrasonic waves, and a fixing member 6 that supports the ultrasonic device 3. In addition, although illustration is abbreviate | omitted, it is good also as a structure by which the housing | casing which accommodates the fixing member 6 which supports the ultrasonic device 3 is provided.
The fixing member 6 fixes the ultrasonic device 3 and the acoustic matching member 9 disposed between the ultrasonic device 3 and the living body M.
The ultrasonic probe 2 is connected to the control device 7 by a cable, and an ultrasonic image obtained based on the control by the control device 7 is displayed on the display device 8.

[Configuration of ultrasonic device]
FIG. 4 is a perspective view showing a schematic configuration of the ultrasonic device 3. FIG. 5 is a side view showing a schematic configuration when the ultrasonic device 3 is viewed from the −Y side.
The ultrasonic device 3 includes three ultrasonic units 4 (first unit 4A, second unit 4B, and third unit 4C). These ultrasonic units 4 are arranged as rows in the X1 direction.
That is, the second unit 4B is disposed at the −X1 side end in the X1 direction, the first unit 4A is disposed on the + X1 side of the second unit 4B, and the third unit 4C is disposed on the + X1 side. . Moreover, the position with respect to the Y direction which is a 2nd direction in each ultrasonic unit 4 becomes the same position.

[Configuration of ultrasonic unit]
FIG. 6 is a cross-sectional view showing a schematic configuration of the ultrasonic unit 4.
The ultrasonic unit 4 includes a housing 41, and an ultrasonic sensor 42 and a circuit board 46 are accommodated in the housing 41 as shown in FIG.
As will be described in detail later, the ultrasonic sensor 42 includes an ultrasonic element array 43 that transmits and receives ultrasonic waves. The ultrasonic element array 43 is configured as a one-dimensional array including a plurality of ultrasonic transmission / reception units 44 arranged along one direction (scanning direction).
Here, the ultrasonic element array 43 corresponding to each of the first unit 4A, the second unit 4B, and the third unit 4C is changed to a first ultrasonic element array 43A, a second ultrasonic element array 43B, and a third super element. The acoustic element array 43C is used.

In the present embodiment, the first unit 4 </ b> A and the second unit 4 </ b> B are connected by a first connecting part 31 having a rotation mechanism with the Y direction as an axis. Further, the first unit 4A and the third unit 4C are connected by a second connecting portion 32 having a rotation mechanism with the Y direction as an axis. Therefore, the angle of the second unit 4B is variable with respect to the first unit 4A, with the axis along the Y direction as the center. Similarly, the angle of the third unit 4C with respect to the first unit 4A is variable with the axis along the Y direction as the center.
The connection configuration and rotation mechanism of each ultrasonic unit 4 will be described later.

In each ultrasonic unit 4, the ultrasonic element array 43 has a transmission / reception surface 431 (array surface) for transmitting and receiving ultrasonic waves, as shown in FIG. The normal direction of the transmission / reception surface 431 is the thickness direction of the ultrasonic element array 43, and is the Z2 direction in FIG. In each ultrasonic unit 4, the direction parallel to the intersection line between the X1-Z1 plane of the ultrasonic probe 2 and the transmission / reception surface 431 is the X2 direction, and intersects the thickness direction of the ultrasonic element array 43 (this embodiment). The form corresponds to the first direction in which orthogonal is exemplified). Here, when the adjacent ultrasonic units 4 are connected at 180 ° (the transmission / reception surface 431 is on the same plane), the X2 direction of each ultrasonic element array 43 is parallel to the X1 direction. In other words, this means that the plurality of ultrasonic element arrays 43 (the plurality of ultrasonic units 4) are variably connected in the X2 direction which is the first direction.
The ultrasonic element array 43 of each ultrasonic unit 4 includes ultrasonic transmission / reception units 44 arranged in the X2 direction.
In the present embodiment, the angles of the second ultrasonic element array 43B and the third ultrasonic element array 43C with respect to the first ultrasonic element array 43A are variable, and the X2 direction and the Z2 direction in each ultrasonic element array 43 are: The direction varies depending on the angle. Therefore, in the following description, the X2 direction in the first ultrasonic element array 43A is referred to as the X2A direction, the Z2 direction is referred to as the Z2A direction, the X2 direction in the second unit 4B is referred to as the X2B direction, and the Z2 direction is referred to as the Z2B direction. The X2 direction in the unit 4C may be referred to as an X2C direction, and the Z2 direction may be referred to as a Z2C direction.
In the present embodiment, the first unit 4A is fixed to the fixing member 6 so that the X2 direction is parallel to the X1 direction. Therefore, the X2A direction is the X1 direction, and the Z2A direction is the Z1 direction.

[Case configuration]
The housing 41 is a box-shaped member having a rectangular shape in plan view, for example, and houses the ultrasonic sensor 42 and the circuit board 46 therein. As shown in FIG. 6, the housing 41 is provided with a sensor window 411 that exposes the ultrasonic sensor 42 on one surface of the living body M side.

[Configuration of ultrasonic sensor]
Next, the ultrasonic sensor 42 will be described.
FIG. 7 is a plan view schematically showing the ultrasonic sensor 42 of the present embodiment. FIG. 8 is a schematic cross-sectional view of the ultrasonic sensor 42 taken along the line AA in FIG. 7 and 8 illustrate the ultrasonic sensor 42 constituting the first unit 4A.
The ultrasonic sensor 42 includes one ultrasonic element array 43. As described above, the ultrasonic element array 43 includes a plurality of ultrasonic transmission / reception units 44 arranged in the X2 direction. The ultrasonic transmission / reception unit 44 is configured by arranging a plurality of ultrasonic transducers 45 in the Y direction. The ultrasonic element array 43 has a virtual plane (hereinafter referred to as a scan plane) that passes through the center of the ultrasonic transmission / reception unit 44 in the Y direction and is parallel to the Z2-X2 plane when the ultrasonic transmission / reception unit 44 is individually driven. (Also referred to as a surface), an ultrasonic beam can be scanned.
In the example shown in FIG. 7, the ultrasonic transmission / reception unit 44 includes seven ultrasonic transducers 45 in the Y direction, and the ultrasonic sensor 42 includes eight ultrasonic transmission / reception units 44 in the X2 direction. However, the present invention is not limited to this. For example, more ultrasonic transducers 45 may be arranged.

For example, as illustrated in FIG. 8, the ultrasonic sensor 42 includes an element substrate 421, a sealing plate 422, an acoustic layer 423, an acoustic lens 424, and the like.
As shown in FIG. 7, the element substrate 421 includes a base 421A, a vibration film 421B, and a piezoelectric element 421C.
The base 421A is made of a semiconductor substrate such as Si, for example. The base 421A is provided with openings 421A1 corresponding to the respective ultrasonic transducers 45. In the present embodiment, each opening 421A1 is a through-hole penetrating the base 421A in the substrate thickness direction, and a vibration film 421B is provided on one end side (sealing plate 422 side) of the through-hole.

The vibration film 421B is made of, for example, SiO ₂ or a laminate of SiO ₂ and ZrO ₂ and is provided so as to cover the entire sealing plate 422 side of the base 421A. That is, the vibration film 421B is supported by the partition wall 421A2 constituting the opening 421A1, and closes the sealing plate 422 side of the opening 421A1. The thickness dimension of the vibration film 421B is sufficiently small with respect to the base portion 421A.

  As illustrated in FIGS. 7 and 8, the piezoelectric element 421 </ b> C is provided on the vibration film 421 </ b> B that closes each opening 421 </ b> A <b> 1. The piezoelectric element 421C is configured by a laminated body of a lower electrode 421C1, a piezoelectric film 421C2, and an upper electrode 421C3. Here, one ultrasonic transducer 45 is configured by a region of the vibration film 421B that closes the opening 421A1 and the piezoelectric element 421C.

  In such an ultrasonic transducer 45, the piezoelectric film 421C2 is deformed by outputting a rectangular wave voltage of a predetermined frequency between the lower electrode 421C1 and the upper electrode 421C3, and thereby the vibration film that closes the opening 421A1. When 421B vibrates, ultrasonic waves are transmitted (ultrasonic transmission processing). When an ultrasonic wave is input to the vibration film 421B and the vibration film 421B vibrates, a potential difference is generated between the lower electrode 421C1 side and the upper electrode 421C3 side of the piezoelectric film 421C2. Accordingly, it is possible to detect that an ultrasonic wave has been received by detecting a potential difference between the lower electrode 421C1 and the upper electrode 421C3 (ultrasonic reception processing).

In the present embodiment, as described above, the ultrasonic transducers 45 are arranged in an array along the X2 direction and the Y direction.
Here, the lower electrode 421C1 is a drive electrode wiring, is formed in a straight line shape along the Y direction, and is arranged in parallel along the X2 direction. That is, the lower electrode 421C1 is provided across the plurality of ultrasonic transducers 45 arranged in the Y direction, and connects them. Drive terminal portions 421D1 that are electrically connected to the circuit board 46 are provided at both end portions (± Y side end portions) of the lower electrode 421C1.
The upper electrode 421C3 is formed in a straight line along the X2 direction, and is provided across a plurality of ultrasonic transducers 45 arranged in the X2 direction to connect them. The ± X2 side end of the upper electrode 421C3 is connected to the common electrode line 421D2. The common electrode line 421D2 connects a plurality of upper electrodes 421C3 arranged along the Y direction, and a common terminal 421D3 electrically connected to the circuit board 46 is provided at the ± Y side end.

  Next, the sealing plate 422 constituting the ultrasonic sensor 42 will be described. The sealing plate 422 is bonded to the element substrate 421 and reinforces the element substrate 421. The sealing plate 422 is formed so as to cover a region where the ultrasonic transducer 45 of the element substrate 421 is disposed in a plan view as viewed from the Z2 direction. For example, a semiconductor substrate such as Si or an insulator substrate Consists of. In addition, since the material and thickness of the sealing plate 422 affect the frequency characteristics of the ultrasonic transducer 45, it is preferable to set based on the center frequency of the ultrasonic wave transmitted and received by the ultrasonic transducer 45.

The sealing plate 422 is bonded to the element substrate 421 by a bonding film 422A formed on the vibration film 421B of the element substrate 421, for example. The bonding film 422A is provided corresponding to a region other than the opening 421A1 of the base 421A (the partition 421A2 between the openings 421A1). Therefore, the vibration of the vibration film 421B is not inhibited by the bonding film 422A, and crosstalk between the ultrasonic transducers 45 can be suppressed.
Although not shown, the sealing plate 422 is provided with a through hole facing the terminals of the lower electrode 421C1 and the upper electrode 421C3, and the lower electrode 421C1, the upper electrode 421C3, and the circuit board 46 are provided in the through hole. Are provided. The electrode may be a through electrode, for example, a lead wire, FPC, or the like.

As shown in FIG. 8, the acoustic layer 423 is provided on the ultrasonic wave transmitting / receiving side of the element substrate 421 so as to fill the opening 421A1 of the base 421A.
The acoustic lens 424 is provided on the ultrasonic wave transmission / reception side of the element substrate 421. The acoustic lens 424 converges the ultrasonic wave transmitted from the ultrasonic transducer 45 to a predetermined depth position in the living body.
The acoustic layer 423 and the acoustic lens 424 propagate the ultrasonic wave transmitted from the ultrasonic transducer 45 to the living body and efficiently propagate the ultrasonic wave reflected in the living body to the ultrasonic transducer 45. Therefore, the acoustic layer 423 and the acoustic lens 424 are formed of a material whose acoustic impedance value is close to the acoustic impedance of the living body. Examples of such a material include silicone.

[Configuration of circuit board]
Next, the circuit board 46 will be described.
The circuit board 46 is electrically connected to each drive terminal portion 421D1 and each common terminal 421D3 of the ultrasonic sensor 42, and controls the ultrasonic sensor 42 based on the control of the control device 7.
Specifically, the circuit board 46 includes a transmission circuit, a reference electrode circuit, a reception circuit, and the like. The transmission circuit applies a drive voltage having a pulse waveform to each drive terminal portion 421D1. The reference electrode circuit applies a predetermined reference voltage (for example, 0 V) to each common terminal 421D3. The reception circuit acquires the reception signal output from each drive terminal unit 421D1, performs amplification processing, A-D conversion processing, phasing addition processing, and the like of the reception signal, and outputs them to the control device 7.

[Connection configuration of each ultrasonic unit 4]
Next, a connection configuration and a rotation mechanism of the ultrasonic unit 4 (first unit 4A, second unit 4B, third unit 4C) as described above will be described.
FIG. 9 is a schematic plan view showing the connection configuration of the ultrasonic unit 4.
As described above, the first connecting portion 31 is provided between the housing 41 (41A) of the first unit 4A and the housing 41 (41B) of the second unit 4B. The two units 4B are rotatably connected to the first unit 4A.
As the rotation mechanism, any configuration may be used as long as the angle between the first unit 4A and the second unit 4B can be changed to a desired angle. For example, a configuration as shown in FIG. It can be illustrated.
That is, in the example illustrated in FIG. 9, the first connecting portion 31 includes the first connection piece 311 connected to the −X2A side end face of the casing 41A of the first unit 4A and the + X2B side of the casing of the second unit 4B. A second connection piece 312 connected to the end face, and a first rotation part 313 having an axis along the Y direction provided between the first connection piece 311 and the second connection piece 312 are provided.

The first connection piece 311 has a first support portion 311A that protrudes toward the second unit 4B. The first support portion 311A is provided with, for example, a through hole penetrating in the Y direction, and the first rotation shaft 313A of the first rotation portion 313 is inserted into the through hole. In addition, in this example, although a through-hole is mentioned as an example, it is good also as a structure etc. which clamp 313A of 1st rotation shafts, for example. The same applies to the second support portion 312A, the third support portion 321A, and the fourth support portion 322A described below.
The second connection piece 312 has a second support portion 312A that protrudes toward the first unit 4A. The second support portion 312A is provided with a through hole penetrating in the Y direction, for example, and the first rotation shaft 313A is inserted through the through hole. A part of the second support portion 312A is fixed to the first rotation shaft 313A, and is connected to the second connection piece 312 by rotating the first rotation shaft 313A about the axis. The second unit 4B is also rotated.

The first rotation unit 313 includes a first rotation shaft 313A and a first angle changing unit 313B.
For example, as shown in FIGS. 3 and 4, the first angle changing unit 313 </ b> B is provided on the outer side of the ultrasonic device 3 at one end of the first rotation shaft 313 </ b> A. The first angle changing unit 313B is a motor capable of reversing the rotation direction, such as a servo motor, and is rotated by an angle based on the control signal in the rotation direction based on the control signal input from the control device 7. In addition, although the example using the motor which can rotate to a forward / reverse direction is shown here, it is good also as a structure which provides the switching gear for controlling a rotation direction between 313A of 1st rotation shafts, for example. Moreover, although the 1st rotation axis | shaft 313A is directly connected with the 1st angle change part 313B, and the rotational drive force is directly transmitted, the example between the 1st angle change part 313B and the 1st rotation axis | shaft 313A is shown. In addition, a gear for controlling the rotational speed may be appropriately arranged.

In addition, as described above, the second connecting portion 32 is provided between the housing 41A of the first unit 4A and the housing 41 (41C) of the third unit 4C, and the third connecting portion 32 is provided by the rotating mechanism. The unit 4C is rotatably connected to the first unit 4A.
As this turning mechanism, the same configuration as the first connecting portion 31 can be used.
For example, as illustrated in FIG. 9, the second connecting portion 32 includes a third connection piece 321 connected to the + X2A side end surface of the casing 41A of the first unit 4A, and −X2C of the casing 41C of the third unit 4C. A fourth connection piece 322 connected to the side end surface, and a second rotation part 323 having an axis along the Y direction provided between the third connection piece 321 and the fourth connection piece 322 are provided.

The third connection piece 321 includes a third support portion 321A that protrudes toward the third unit 4C. The third support portion 321A has a through hole that penetrates in the Y direction, for example, and the second rotation shaft 323A of the second rotation portion 323 is inserted through the through hole.
The fourth connection piece 322 has a fourth support portion 322A that protrudes toward the first unit 4A. The fourth support portion 322A is provided with, for example, a through hole penetrating in the Y direction, and the second rotation shaft 323A is inserted through the through hole. A part of the fourth support portion 322A is fixed to the second rotation shaft 323A, and is connected to the fourth connection piece 322 by rotating the second rotation shaft 323A about the axis. The third unit 4C is also rotated.

  For example, as illustrated in FIGS. 3 and 4, the second angle changing unit 323 </ b> B is provided on the outer side of the ultrasonic device 3 at one end of the second rotation shaft 323 </ b> A. The second angle changing unit 323B is configured by a motor capable of reversing the rotation direction, such as a servo motor, and is rotated by an angle based on the control signal in the rotation direction based on the control signal input from the control device 7. . As with the first angle changing unit 313B, for example, a switching gear for controlling the rotation direction may be provided between the second rotating shaft 323A and the second angle changing unit 323B and the second rotating shaft. It is good also as a structure which provides the gear for controlling rotation speed between 323A.

[Configuration of fixing member]
As shown in FIGS. 2 and 3, the fixing member 6 fixes the acoustic matching member 9 to the ultrasonic device 3. The fixing member 6 includes a fixing main body 61 to which the ultrasonic device 3 is attached, a first fixing member 62 extending in the Z direction from the −Y side and the + Z side of the fixing main body 61, and the first fixing member 62. And a second fixing member 63 extending in the Z direction from the + Y side and the + Z side of the fixed main body 61. The acoustic matching member 9 is disposed so as to be sandwiched between the first fixing member 62 and the second fixing member 63. Thereby, even if the ultrasonic probe 2 is moved along the surface of the living body M, the displacement of the acoustic matching member 9 with respect to the ultrasonic device 3 can be suppressed.

  The fixed main body 61 is provided with a cable connected to the control device 7. The fixed body 61 is gripped by the practitioner when operating the ultrasonic probe 2. The shape of the fixed main body 61 is not limited to a rectangular shape as in the illustrated example, and may be a shape that can be easily grasped by a practitioner. In addition, a circuit board or the like for driving the ultrasonic sensor 42 may be provided inside the fixed main body 61.

As shown in FIG. 2, the first fixing member 62 has a substantially rectangular outer shape in a plan view viewed from the Y direction. The first fixing member 62 has a groove 622 as a guide for the puncture needle, and a start mark 623 indicating a scan start position.
The groove 622 is formed at the + Z1 side end of the −Y side surface 621 of the first fixing member 62 and at the center in the X1 direction. As shown in FIG. 3, the bottom surface 622A of the groove 622 is inclined at a predetermined angle (for example, an angle of 15 ° or more and 30 ° or less with respect to the X1-Y plane) so as to go to the + Y side toward the + Z1 side. doing. For this reason, the practitioner can easily move the puncture needle 10 at a predetermined angle with respect to the ultrasonic probe 2 by moving the puncture needle 10 along the bottom surface 622A. Therefore, the practitioner can more easily perform an appropriate puncturing operation when puncturing the puncture needle 10 into the blood vessel inside the living body M.

  The start mark 623 is provided, for example, at a position on the −X1 side of the −Y side surface 621 of the first fixing member 62, and indicates a position on the −X1 side where scanning with the ultrasound probe 2 is started. The start mark 623 exemplifies a groove provided along each of the X1 direction and the Z1 direction and intersecting with each other in an L shape. However, the present invention is not limited to this, and for example, either the X1 direction or the Z1 direction The groove may be provided along the groove, or may be a circular or rectangular groove in a plan view viewed from the Y direction. Further, the start mark 623 may be a protrusion other than the groove. Further, the start mark 623 may be printed on the first fixing member 62. In addition, although an example in which only the start mark 623 is provided has been described, a configuration in which an end mark or the like for ending scanning is further provided.

[Configuration of acoustic matching member]
As shown in FIGS. 2 and 3, the acoustic matching member 9 is disposed between the ultrasonic device 3 and the surface of the living body M during ultrasonic measurement, and transmits ultrasonic waves transmitted from the ultrasonic device 3 to the living body. The ultrasonic wave reflected in the living body is efficiently propagated to the ultrasonic device 3. For this reason, the acoustic matching member 9 has an acoustic impedance close to that of a living body.
The acoustic matching member 9 is formed of an elastic material, for example, a gel-like material, and has a trapezoidal outer shape in plan view as viewed from the Y direction. For this reason, the acoustic matching member 9 can be suitably adhered to both the ultrasonic element array 43 of the ultrasonic device 3 and the living body surface.

[Configuration of control device]
Next, the control device 7 will be described.
The control device 7 includes a calculation unit configured by a CPU (Central Processing Unit) or the like and a storage unit configured by a memory or the like.
The storage unit stores various programs and various data for ultrasonic measurement using the ultrasonic probe 2 and generation and display of an ultrasonic image of a living body based on the ultrasonic measurement result.
As shown in FIG. 1, the calculation unit reads and executes various programs stored in the storage unit, so that an ultrasonic measurement unit 71, an image generation unit 72, a display control unit 73, and an angle control unit 74 (angle setting unit). Part) etc. In addition, the control device 7 may be provided with an input operation unit composed of a keyboard or the like.

The ultrasonic measurement unit 71 controls the ultrasonic probe 2 to transmit an ultrasonic wave from a predetermined ultrasonic transmission / reception unit 44 of the ultrasonic sensor 42 and receives a reception signal from the ultrasonic transmission / reception unit 44 that has received the ultrasonic wave. Perform the ultrasonic measurement process to be acquired.
Specifically, as the ultrasonic measurement process, the ultrasonic measurement unit 71 uses any one of the three ultrasonic element arrays 43 as a transmission array that transmits ultrasonic waves, and each ultrasonic transmission / reception unit of the transmission array. By simultaneously driving 44, an ultrasonic transmission beam is transmitted in the normal direction of the transmission / reception surface 431. Then, the reflected ultrasonic waves reflected by the measurement target part are received by the ultrasonic transmitting / receiving units 44 of the three ultrasonic element arrays 43, and reception signals are obtained from the respective ultrasonic transmitting / receiving units 44. Furthermore, the transmission / reception processing of ultrasonic waves is performed a plurality of times (three times in the present embodiment, since three ultrasonic element arrays 43 are provided) by switching the transmission array.

The image generation unit 72 generates an ultrasonic tomographic image of the living body M based on the reception signals output from the ultrasonic transmission / reception units 44 of the ultrasonic element arrays 43A, 43B, and 43C of the ultrasonic probe 2.
Specifically, the image generation unit 72 acquires the angles of the second ultrasonic element array 43B and the third ultrasonic element array 43C with respect to the first ultrasonic element array 43A controlled by the angle control unit 74. Moreover, based on the acquired angle, the position (position in the X1Z1 coordinate system) of each ultrasonic transmitting / receiving unit 44 of each ultrasonic element array 43 is calculated. Then, by using the output timing of the reception signal output from each ultrasonic transmission / reception unit 44 obtained by the ultrasonic measurement processing and the calculated position of each ultrasonic transmission / reception unit 44, a measurement target region is obtained by aperture synthesis. The position where the ultrasonic wave is reflected is calculated, and an ultrasonic tomographic image in which the reflection position of the ultrasonic wave is imaged is generated.
The display control unit 73 causes the display device 8 to display each generated ultrasonic image.

  The angle control unit 74 controls the first angle changing unit 313B and the second angle changing unit 323B to tilt the second ultrasonic element array 43B and the third ultrasonic element array 43C with respect to the first ultrasonic element array 43A. Change the angle.

In the present embodiment, ultrasonic measurement is performed to detect the shape of the measurement target part located in the vicinity of the predetermined depth position d. That is, the angle control unit 74 has a measurement area F1 of ultrasonic measurement by the first ultrasonic element array 43A and an ultrasonic wave by the second ultrasonic element array 43B in a plan view as viewed from the Y direction as shown in FIG. The measurement target point (point P) is positioned in a portion where the measurement region F2 for measurement and the measurement region F3 for ultrasonic measurement by the third ultrasonic element array 43C overlap (superimposition region F4). The inclination angle δ of the second ultrasonic element array 43B and the third ultrasonic element array 43C with respect to the first ultrasonic element array 43A is changed according to the measurement depth.
Here, the normal line of the transmission / reception surface 431 passing through the opening center (center in the X2 direction and the Y direction) of the first ultrasonic element array 43A is defined as a normal line N1. Similarly, with respect to the second ultrasonic element array 43B and the third ultrasonic element array 43C, the normal lines of the transmitting / receiving surface 431 passing through the center of the opening are defined as a normal line N2 and a normal line N3, respectively. The normals N1, N2, and N3 intersect at a point P in a plan view viewed from the −Y side.
In the present embodiment, the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C are arranged at an equidistant position from the point P.

  More specifically, the angle control unit 74 sets the size (width dimension) in the X2 direction of the ultrasonic element array 43 as W when performing ultrasonic measurement on the measurement depth d by the ultrasonic probe 2. An angle δ satisfying the following formula (1) is calculated.

[Equation 1]
Wcos δ + ² W cos ² δ−W− ² d sin δ = 0 (1)

[Ultrasonic measurement processing]
FIG. 10 is a flowchart illustrating an example of ultrasonic measurement processing in the ultrasonic measurement apparatus 1.
Hereinafter, the ultrasonic measurement process in the ultrasonic measurement apparatus 1 will be described with reference to FIG.
In the ultrasonic measurement processing by the ultrasonic measurement apparatus 1, first, the measurer fixes the ultrasonic probe 2 to the target site of the living body M (patient or the like) via the acoustic matching member 9. Then, as shown in FIG. 10, the control apparatus 7 acquires the measurement depth (step S1).
In step S <b> 1, for example, the measurer operates an input device or the like that is communicably connected to the control device 7, and inputs a depth at which ultrasonic measurement is performed. The input device may be an operation unit provided in the control device 7 or an operation unit provided in the ultrasonic probe 2. As the depth input, a specific depth depth may be input, or the measurer may select a desired depth level from a plurality of preset depth levels. The control device 7 acquires the measurement depth d at which the measurement is performed, that is, the depth d of the measurement target point (point P) from the epidermis of the living body M, based on the operation signal from the operation of the input device of the measurer.

Next, the angle control unit 74 calculates the first ultrasonic element array of the second ultrasonic element array 43B and the third ultrasonic element array 43C from the depth d acquired in step S1, based on the above formula (1). An inclination angle δ with respect to 43A is calculated (step S2).
In addition, although the example which calculates inclination-angle (delta) based on Formula (1) is shown here, it is not limited to this. For example, table data indicating the relationship between the measurement depth d and the inclination angle δ may be stored in the storage unit. In this case, the inclination angle δ corresponding to the measurement depth d acquired in step S1 may be acquired from the table data.

  Thereafter, the angle control unit 74 controls the first angle changing unit 313B of the first connecting unit 31 and the second angle changing unit 323B of the second connecting unit 32 so that the inclination angle δ calculated in step S2 is obtained. The angle of the second unit 4B and the third unit 4C with respect to the first unit 4A is changed (step S3). Accordingly, the second ultrasonic element array 43B in the second unit 4B and the third ultrasonic element array 43C in the third unit 4C are inclined at an inclination angle δ with respect to the first ultrasonic element array 43A. .

Thereafter, the ultrasonic measurement device 1 drives the ultrasonic element arrays 43A, 43B, and 43C to perform ultrasonic measurement processing (step S4).
In step S4, the ultrasonic measurement unit 71 first uses the first ultrasonic element array 43A as a transmission array, and simultaneously drives the ultrasonic transmission / reception units 44 of the first ultrasonic element array 43A, thereby applying a method for the transmission / reception surface 431. Send ultrasonic waves in the line direction. Then, reception processing is performed by each of the ultrasonic transmission / reception units 44 of the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C. Accordingly, a reception signal is output from each ultrasonic transmission / reception unit 44 at the reception timing when the reflected ultrasonic wave is received. The ultrasonic measurement unit 71 obtains the obtained measurement result, that is, the signal intensity of the received signal and the time when the signal is output (the time from when the ultrasonic wave is transmitted from the transmission array to when the received signal is output). , And stored in the storage unit in association with each ultrasonic transmission / reception unit 44.

Next, the ultrasonic measurement unit 71 switches the transmission array from the first ultrasonic element array 43A to the second ultrasonic element array 43B, and in the same manner as described above, ultrasonic transmission processing and each ultrasonic element array The reception processing by the ultrasonic transmission / reception unit 44 is performed, and the measurement result is stored in the storage unit.
Furthermore, the ultrasonic measurement unit 71 switches the transmission array from the second ultrasonic element array 43B to the third ultrasonic element array 43C, and in the same manner as described above, the ultrasonic transmission processing and each ultrasonic element array 43 are performed. The ultrasonic transmission / reception unit 44 performs reception processing and stores the measurement result in the storage unit.

  Note that the measurement depth d may be changed during the ultrasonic measurement. In this case, the angle control unit 74 changes the depth within a preset range ± Δd around the measurement depth d acquired in step S1, and sets the second ultrasonic wave at an angle corresponding to the changed measurement depth d ± Δd. The inclination angle δ of the element array 43B and the third ultrasonic element array 43C is changed. And the ultrasonic measurement process of step S4 is implemented and a measurement result is acquired.

Thereafter, the image generating unit 72 calculates the position of each ultrasonic wave transmitting / receiving unit 44 in each ultrasonic element array 43 based on the angle δ calculated in step S2 (step S5).
Here, in the first ultrasonic element array 43A, since the X2A direction is parallel to the X1 direction, the position of each ultrasonic transmission / reception unit 44 may be stored in advance in the storage unit.
On the other hand, the position of each ultrasonic transmission / reception unit 44 provided in the second ultrasonic element array 43B and the third ultrasonic element array 43C is the pitch between the ultrasonic transducers 45 (ultrasonic transmission / reception unit 44) in the X2 direction. The position information of the ultrasonic transducer 45 or the ultrasonic transmission / reception unit 44 located at the extreme end in the array (the position of the first ultrasonic element array 43A with respect to each ultrasonic transmission / reception unit 44) is stored, and these are stored. The position of each ultrasonic transmission / reception unit 44 is calculated based on the pitch and position information and the angle δ calculated in step S2.

Then, the image generation unit 72 reflects the ultrasonic wave using aperture synthesis based on the position of each ultrasonic transmission / reception unit 44 obtained in step S5 and the reception signal output from the ultrasonic transmission / reception unit 44. The calculated position is calculated, and an ultrasonic tomographic image is generated (step S6). In the aperture synthesis of the present embodiment, the ultrasonic reflection positions are calculated using all the ultrasonic transmission / reception units 44 included in the ultrasonic device 3, so that the ultrasonic wave obtained by synthesizing the measurement results of the plural ultrasonic transmission / reception units 44 is used. A tomographic image can be obtained, and even if the measurement target site is a site with irregularities such as bone or a site with a hole such as a nerve hole, it is a highly accurate super image that clearly displays the shape. A tomographic image can be obtained.
Thereafter, the display control unit 73 causes the display device 8 to display the generated ultrasonic tomographic image.

[Comparison of conventional ultrasonic device and ultrasonic device of this embodiment]
Next, the measurement range in the ultrasonic measurement process when using the ultrasonic device 3 of the present embodiment as described above and the conventional ultrasonic measurement process will be described.
FIGS. 11 to 16 are diagrams for explaining the ultrasonic measurement process using the conventional ultrasonic element array and the ultrasonic measurement process in the present embodiment, and FIG. On the other hand, the figure which shows the measurement range at the time of performing a linear scan by the conventional ultrasonic element array, FIG. 12 is the case where the sector scan is performed by the conventional ultrasonic element array with respect to the measurement object site | part which has a recessed part. FIG. 13 is a diagram illustrating a measurement range when aperture synthesis is performed using a conventional ultrasonic element array, and FIG. 14 is a diagram illustrating a measurement target region having a deep hole portion. FIG. 15 is a diagram illustrating a measurement range when aperture synthesis is performed using a conventional ultrasonic element array, and FIG. 15 is a diagram illustrating a measurement range of ultrasonic measurement processing for a measurement target portion having a recess in the present embodiment. 16, in this embodiment, showing the measuring range of the ultrasonic measuring process for measuring target portion depth with deep holes. 11 to 16 and FIGS. 17 and 18 to be described later, M1 is a measurement target part such as a bone, for example, and the hatched area in the figure indicates a measurement range M2 measured by ultrasonic measurement. ing.

  When linear scanning is performed using a conventional ultrasonic device having one ultrasonic element array 43D, ultrasonic waves (transmission beams) are output in the normal direction of the transmission / reception surface 431 from the ultrasonic element array 43D. The ultrasonic wave (reception beam) reflected in the direction is received. The reflected ultrasonic wave includes a spherical wave component reflected by a curved surface and a specular reflection component that is specularly reflected, but the spherical wave component has few components reflected in the normal direction. Therefore, as shown in FIG. 11, a part of the measurement target part M1 that is substantially parallel to the transmission / reception surface 431 becomes the measurement range M2, and when an ultrasonic tomographic image based on the measurement result is generated, only a part of the shape is obtained. It cannot be detected and the accuracy is low.

  In addition, a phase scan may be performed on each ultrasonic transmission / reception unit 44 of the conventional ultrasonic element array 43D as described above, and a sector scan may be performed to control the transmission / reception direction of ultrasonic waves within a substantially fan-shaped range. is there. In this case, as shown in FIG. 12, since ultrasonic waves can be transmitted from a plurality of directions to the recess, the shape of the measurement target region in a wide range can be detected. However, in sector scanning, it is necessary to tilt the transmission / reception direction of ultrasonic waves so as not to generate side lobes, the angle range is limited, and the probe aperture (ultrasonic transmission / reception unit 44) is limited. For this reason, as shown in FIG. 12, although the measurable range is wider than that of the conventional linear scan, a measurement range M2 that is wide enough to measure the entire shape of the recess cannot be obtained. Further, the receiving beam is received from an angle inclined with respect to the normal line of the transmitting / receiving surface 431. In this case, there is a problem that as the inclination angle increases, the reception sensitivity decreases, the SN ratio decreases, and the measurement accuracy decreases. Although it is conceivable to superimpose images using a plurality of ultrasonic measurement results whose inclination angles are changed, there is an adverse effect that the frame rate becomes slow. Further, depending on the distance (measurement depth) from the ultrasonic element array 43 to the measurement target portion M1, the ultrasonic scanning density becomes coarse. From the above, although the measurement range is wide as compared with the linear scan as shown in FIG. 11, it is not suitable for generating a high-accuracy ultrasonic tomographic image.

When performing aperture synthesis using the conventional ultrasonic element array 43D, as shown in FIG. 13, all ultrasonic transmission / reception units in the ultrasonic element array 43D transmit ultrasonic waves from the transmission / reception surface 431 in the normal direction. The reflected ultrasonic wave is received at 44, and the reflection position of the ultrasonic wave at the measurement target part is calculated from the position of the ultrasonic wave transmitting / receiving unit 44 and the output timing of the received signal.
In this case, as shown in FIG. 13, when the depth of the recess is shallow, almost the entire recess can be included in the measurement range M2, and the shape of the measurement target site M1 can be detected well. However, as shown in FIG. 14, when the depth of the concave portion is deep (for example, when detecting a nerve hole or the like), the spherical wave component of the reflected ultrasonic wave is reduced, and when the ultrasonic tomographic image is formed, the image is unclear ( Insufficient brightness).

On the other hand, in this embodiment, as shown in FIG. 15 by aperture synthesis, the shape of a measurement target part having a recess can be detected well.
In addition, in this embodiment, the inclination angle δ of the second ultrasonic element array 43B and the third ultrasonic element array 43C with respect to the first ultrasonic element array 43A is variable, and the inclination angle δ is varied according to the measurement depth d. Is changed. In this case, as can be seen by comparing FIG. 16 and FIG. 14, even when a deep recess (hole) is provided in the measurement target region M1, ultrasonic waves are inserted from a direction inclined with respect to the axis of the hole. It is possible to obtain a measurement result for a wider measurement range M2 and to suitably detect the shape of the inside of the hole.

[Operational effects of the first embodiment]
The ultrasonic device 3 of the present embodiment has a plurality of ultrasonic element arrays 43 including a first ultrasonic element array 43A, a second ultrasonic element array 43B, and a third ultrasonic element array 43C. These ultrasonic element arrays 43 include ultrasonic transmission / reception units 44 arranged in the X2 direction intersecting the thickness direction (Z2 direction), and perform ultrasonic measurement on a scan plane parallel to the X2-Z2 plane. be able to. These ultrasonic element arrays 43 are connected in the X1 direction so that the angle is variable with the Y direction as a rotation axis, and normal lines N1, N2, and N3 passing through the array centers of the ultrasonic element arrays 43 are intersections. Cross at P.
In such a configuration, one ultrasonic element array 43 is used as a transmission array, ultrasonic waves are transmitted in the normal direction of the transmission / reception surface 431, reflected ultrasonic waves are received by the three ultrasonic element arrays 43, and aperture synthesis is performed. By performing ultrasonic measurement, it is possible to perform shape measurement with high accuracy even on a measurement target portion having irregularities.
In other words, by switching the transmission array, an ultrasonic transmission beam can be incident on the unevenness such as the hole from a plurality of directions. For example, the ultrasonic wave is incident from one direction by one ultrasonic element array. Compared to the case, the ultrasonic wave can reach a wide range of the concave surface. Further, since the ultrasonic transmission beam is not inclined with respect to the normal line of the transmission / reception surface 431 unlike the sector scan, side lobes, SN ratio reduction, frame rate reduction, etc. do not occur, and it is quick. In addition, high-accuracy ultrasonic measurement processing can be performed, and a high-accuracy and clear ultrasonic tomographic image can be generated and displayed based on the measurement result. Therefore, for example, a hole such as a ridge line of a bone or a nerve hole can be displayed as a clear ultrasonic tomographic image, which can contribute to improvement in efficiency in puncture work or the like and improvement in work success rate such as puncture work.

In the present embodiment, as described above, the plurality of ultrasonic element arrays 43 include the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C. Further, a first connecting part 31 that connects the first ultrasonic element array 43A and the second ultrasonic element array 43B, and a second connecting part 32 that connects the first ultrasonic element array 43A and the third ultrasonic element array 43C. Prepare.
In such a configuration, an ultrasonic transmission beam can be incident along the axial direction of the concave portion (from directly above the concave portion) from the first ultrasonic element array 43A disposed in the center. From the array 43B and the third ultrasonic element array 43C, an ultrasonic transmission beam can be incident from a direction inclined with respect to the axial direction of the recess. Therefore, the transmission beam can be surely reached by a wide range of the recesses.

The first connecting portion 31 is provided with a first angle changing portion 313B that changes the angle of the second ultrasonic element array 43B with respect to the first ultrasonic element array 43A. A second angle changing unit 323B that changes the angle of the third ultrasonic element array 43C with respect to the ultrasonic element array 43A is provided.
For this reason, the inclination angle δ of the second ultrasonic element array 43B and the third ultrasonic element array 43C with respect to the first ultrasonic element array 43A can be easily changed. Therefore, ultrasonic measurement can be suitably performed with respect to the desired measurement depth d. In the ultrasonic measurement process, it is also possible to change the tilt angle δ. For example, by changing the tilt angle δ, even when the depth of the recess is deep, the ultrasonic transmission beam is applied to the entire recess. Can be reached.

In this embodiment, the control device 7 controls the ultrasonic probe 2 (ultrasonic device 3). The control device 7 includes an ultrasonic measurement unit 71 that performs the ultrasonic measurement process as described above, an image generation unit 72 that generates an ultrasonic tomographic image based on the measurement result, and an angle control unit that changes the inclination angle δ. 74. Therefore, the ultrasonic measurement process and the ultrasonic tomographic image generation process as described above can be easily performed.
When the angle control unit 74 calculates the tilt angle δ, the image generation unit 72 calculates the position of each ultrasonic transmission / reception unit 44 in each ultrasonic element array 43 based on the tilt angle δ. Therefore, the reflection position of the ultrasonic wave can be calculated with high accuracy by aperture synthesis, and an ultrasonic tomographic image with high accuracy can be generated.

[Second Embodiment]
Next, a second embodiment will be described.
In the first embodiment, the ultrasonic device 3 includes the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C. The configuration in which the inclination angle δ of the ultrasonic element array 43B and the third ultrasonic element array 43C can be changed is illustrated. On the other hand, the second embodiment is different from the first embodiment and the second embodiment in that the ultrasonic device 3 includes two ultrasonic element arrays 43.

  In the present embodiment, the ultrasonic element array 43 includes a first ultrasonic element array 43A and a second ultrasonic element array 43B, which are angled by the first connecting portion 31 similar to the first embodiment. It is linked as variable. Even in such a configuration, similarly to the first embodiment and the second embodiment, the second ultrasonic element with respect to the first ultrasonic element array 43A is inclined at the inclination angle δ according to the depth of the measurement target point (point P). By changing the angle of the array 43B, highly accurate ultrasonic measurement can be performed.

FIG. 17 is a diagram illustrating a range that can be measured by ultrasonic measurement processing on a measurement target region having a recess in the present embodiment, and FIG. 18 is a diagram illustrating a measurement range of the measurement target region having a deep hole in the present embodiment. It is a figure which shows the range which can be measured by a sound wave measurement process.
As can be seen by comparing FIGS. 15 and 16 with FIGS. 17 and 18, in this embodiment, the ultrasonic element array 43 in which the transmission / reception surface 431 is parallel to the X1 direction is not provided. In such a configuration, when the depth of the recess is deep, the accuracy is lower than that in the first embodiment. On the other hand, when the opening diameter of the concave portion is small, in the first embodiment, it is difficult for the transmission beams from the second ultrasonic element array 43B and the third ultrasonic element array 43C to enter the concave portion. On the other hand, in this embodiment, even if it is a recessed part with a small opening diameter, by arrange | positioning the ultrasonic probe 2 so that the 1st connection part 31 may be located substantially on the center axis | shaft of a recessed part, for example, The transmission beams from the respective ultrasonic element arrays 43 can be suitably reached inside the.

[Third embodiment]
Next, a third embodiment will be described.
In the first embodiment, an example is shown in which the positions of the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C included in the ultrasonic device 3 are the same in the Y direction. It was. In contrast, in the third embodiment, the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C are arranged at positions shifted in the Y direction. Different from one embodiment.

FIG. 19 is a schematic plan view showing the connection configuration of the ultrasonic units of the present embodiment.
As shown in FIG. 19, in this embodiment, the ultrasonic device 3 includes three ultrasonic units 4 (a first unit 4A, a second unit 4B, and a third unit 4C), as in the first embodiment. . These ultrasonic units 4 are arranged as rows in the X1 direction, and are arranged at positions shifted by a predetermined dimension with respect to the Y direction which is the second direction intersecting the X1 direction (in this embodiment, orthogonal). Yes. That is, in the present embodiment, the first ultrasonic element array 43A, the second ultrasonic element array 43B, and the third ultrasonic element array 43C are arranged at positions shifted from each other in the Y direction.
Specifically, the first unit 4A is arranged on the + X1 side of the second unit 4B and shifted to the + Y side. Further, the third unit 4C is arranged on the + X1 side of the first unit 4A and shifted to the + Y side. The amount of deviation in the Y direction of the first unit 4A and the third unit 4C is the interval between the measurement positions when performing ultrasonic measurement (interval of the scan surface), for example, the dimension of the ultrasonic unit 4 in the Y direction. The spacing dimension is less than
In the present embodiment, the ultrasonic element arrays 43 are arranged at positions shifted from each other with respect to the Y direction, but the present invention is not limited to this. For example, the ultrasonic element arrays 43 may be arranged so as to be shifted in a direction inclined with respect to the X1 direction and the Y direction on the X1-Y plane.

In such an ultrasonic device 3 of the third embodiment, since the scan planes of the respective ultrasonic element arrays 43 are shifted in the Y direction, three ultrasonic tomographic images shifted in the Y direction are obtained. Can do. Further, by performing aperture synthesis in each ultrasonic element array 43, it is possible to obtain highly accurate ultrasonic measurement results (ultrasonic tomographic images) for the respective scan planes. In addition, since ultrasonic measurement can be performed simultaneously by the three ultrasonic element arrays 43, three ultrasonic tomographic images shifted in the Y direction as described above can be obtained simultaneously (in real time).
Further, when the ultrasonic element arrays 43 are arranged at the same position in the X1 direction and arranged in the Y direction, the interval between the scan surfaces cannot be made smaller than the dimension of the ultrasonic unit 43 in the Y direction. On the other hand, in this embodiment, since each ultrasonic unit 43 is connected in the X1 direction, the interval between the scan surfaces can be made smaller than the dimension of the ultrasonic unit 43 in the Y direction. Therefore, it is possible to reduce the interval between the scan planes and obtain each ultrasonic tomographic image with high resolution in the Y direction.

[Fourth embodiment]
Next, a fourth embodiment of the present invention will be described.
The third embodiment is an example in which the ultrasonic element arrays 43 of the first embodiment are arranged at positions shifted from each other with respect to the Y direction. On the other hand, you may arrange | position each ultrasonic element array 43 of 2nd embodiment in the position which mutually shifted | deviated to the Y direction.
FIG. 20 is a schematic plan view illustrating a connection configuration of the ultrasonic units according to the fourth embodiment.
In the fourth embodiment, as in the second embodiment, the ultrasonic device 3 includes a second ultrasonic element array 43B relative to the first unit 4A (housing 41A) provided with the first ultrasonic element array 43A. The provided second unit 4B (housing 41B) is disposed at a position shifted to the + Y side in the Y direction.

  In the fourth embodiment, the same effect as that of the third embodiment can be obtained, and two ultrasonic tomographic images shifted in the Y direction can be obtained with high accuracy by aperture synthesis. Further, these ultrasonic tomographic images can be obtained simultaneously (in real time).

[Modification]
Note that the present invention is not limited to the above-described embodiments, and the present invention includes configurations obtained by modifying, improving, and appropriately combining the embodiments as long as the object of the present invention can be achieved. Is.

In the third embodiment and the fourth embodiment, each ultrasonic element array 43 may be configured to be movable along the Y direction. For example, a guide rail that guides the ultrasonic sensor 42 to be movable in the Y direction, a screw that is provided along the Y direction and is engaged with a part of the ultrasonic sensor 42, and a screw An example of the configuration includes a motor that is driven to rotate. In this configuration, by rotating the screw, the ultrasonic sensor 42 engaged with the screw can move in the Y direction. The ultrasonic sensor 42 may be manually movable.
In this way, by configuring the ultrasonic sensor 42 to be movable in the Y direction, a plurality of ultrasonic tomographic images can be obtained by arbitrarily setting the interval between the scan surfaces of the ultrasonic element array 43. In addition, it is possible to obtain a high-accuracy ultrasonic tomographic image using aperture synthesis as described above for a plurality of measurement positions having different positions in the Y direction.

  In the first embodiment, an example in which the ultrasonic device 3 includes three ultrasonic element arrays 43 has been described. In the second embodiment, an example in which two ultrasonic element arrays 43 are included has been described, but the present invention is not limited to this. For example, the ultrasonic device 3 may include four or more ultrasonic element arrays 43 connected in the X1 direction, and the angle between the adjacent ultrasonic element arrays 43 may be changed.

In each of the above embodiments, the first angle changing unit 313B and the second angle changing unit 323B are configured to include a motor, and by driving the motor under the control of the angle control unit 74, the ultrasonic element array 43 is provided. Although the example in which the inclination angle δ is changed has been shown, the present invention is not limited to this.
For example, an operation knob that is coaxial with the first rotation shaft 313A and the second rotation shaft 323A may be provided, and the inclination angle δ of the ultrasonic element array 43 may be manually changed.
In this case, it is preferable that an angle sensor for detecting an angle formed by the adjacent ultrasonic element array 43 is provided separately. That is, the position of each ultrasonic transmission / reception unit 44 can be calculated by detecting the inclination angle δ by the angle detection sensor. Thereby, an ultrasonic measurement result (ultrasonic tomographic image) with high accuracy in aperture synthesis can be obtained.

  Moreover, in each said embodiment, each housing | casing 41A, 41B, 41C is mutually connected, and the ultrasonic element array 43A, 43B, 43C shows the example connected as a variable angle via the housing | casing 41A. It was. On the other hand, each ultrasonic element array (ultrasonic sensor) may be connected to the angle variable via a direct rotation part.

In the first embodiment, the first ultrasonic element array 43A arranged at the center of the three ultrasonic element arrays 43 is always maintained substantially parallel to the epidermis of the living body M, and substantially in the normal direction of the epidermis. Although the structure which transmits / receives an ultrasonic wave along was illustrated, it is not limited to this.
For example, the second ultrasonic element array 43B located at the end on the −X1 side in the X1 direction is always maintained substantially parallel to the epidermis of the living body M, and is arranged at the center in the X1 direction. A configuration in which the inclination angle δ between the array 43A and the third ultrasonic element array 43C disposed at the end on the + X1 side is changed may be employed.

  In each of the embodiments described above, an example in which a transmission beam in the Z2 direction is output in each ultrasonic element array 43 has been described. However, for example, the transmission direction of the transmission beam is inclined with respect to the transmission / reception surface 431 as in sector scanning. You may let them. In this case, as described above, although there is a decrease in the S / N ratio, a decrease in the frame rate, and the like, the ultrasonic transmission beam can reach a wider range.

In the first embodiment, the inclination angle δ of the second ultrasonic element array 43B with respect to the first ultrasonic element array 43A and the inclination angle δ of the third ultrasonic element array 43C with respect to the first ultrasonic element array 43A are: Although the example which sets to the same angle was shown, it is not limited to this, It is good also as a structure which makes it incline with a respectively different inclination angle.
For example, when the width dimensions of the respective ultrasonic element arrays 43 in the X2 direction are different, the inclination angle δ of the second ultrasonic element array 43B with respect to the first ultrasonic element array 43A and the first ultrasonic element array 43A The inclination angle δ of the third ultrasonic element array 43C is made different. Thereby, the normal lines N1, N2, and N3 passing through the array center of each ultrasonic element array 43 can be crossed at one point (intersection point P), and the transmission beam from each ultrasonic element array 43 is transmitted to a predetermined measurement target site. Can be directed to.

  In the above embodiment, the ultrasonic transducer 45 is provided with the sealing plate 422 on the vibration film 421B side of the base 421A, transmits ultrasonic waves from the opening 421A1 of the base 421A, and emits ultrasonic waves emitted from the opening 421A. Although the example of receiving was shown, it is not limited to this. For example, the sealing plate 422 is provided on the side opposite to the vibrating membrane 421B of the base 421A, transmits ultrasonic waves on the side opposite to the opening 421A1, and receives ultrasonic waves incident on the side opposite to the opening 421A1. It is good also as a structure.

In the said embodiment, although the acoustic matching member 9 was arrange | positioned between the ultrasonic device 3 and the target object, it is not limited to this, The acoustic matching member 9 does not need to be arrange | positioned. For example, in the case where measurement is performed in a medium such as water having substantially the same acoustic impedance as that of a living body, it is not necessary to provide the acoustic matching member 9.
Moreover, although the structure provided with the fixing member 6 which fixes the acoustic matching member 9 with respect to the ultrasonic device 3 was illustrated, it is not limited to this, It is good also as a structure which does not include the fixing member 6.

In the above embodiment, the configuration including the vibration film 421 </ b> B and the piezoelectric element 421 </ b> C as a vibrator that vibrates the vibrator is illustrated as the ultrasonic transducer 45. However, the present invention is not limited to this, and a configuration including a vibrator other than the piezoelectric element, such as an electrostatic actuator, may be employed.
Further, the ultrasonic transducer 45 may not be provided with a vibration film, and may be configured to transmit ultrasonic waves by vibrating a vibrator such as a piezoelectric element.

  In the said embodiment, although the ultrasonic measuring apparatus which makes a measurement object an in-vivo organ was illustrated, it is not limited to this. For example, the present invention can be applied to a measuring machine that uses various structures as a measurement object and detects defects in the structures or inspects aging. Further, for example, the present invention can be applied to a measuring machine that detects a defect of the measurement target using a semiconductor package, a wafer, or the like as the measurement target.

  In addition, the specific structure for carrying out the present invention may be configured by appropriately combining the above-described embodiments and modifications within the scope that can achieve the object of the present invention, and may be appropriately changed to other structures and the like. May be.

  DESCRIPTION OF SYMBOLS 1 ... Ultrasonic measuring apparatus, 2 ... Ultrasonic probe, 3 ... Ultrasonic device, 4 ... Ultrasonic unit, 4A ... First unit, 4B ... Second unit, 4C ... Third unit, 6 ... Fixed member, 7 ... Control device, 9 ... acoustic matching member, 31 ... first connecting portion, 32 ... second connecting portion, 41 ... housing, 41A ... housing, 41B ... housing, 41C ... housing, 42 ... ultrasonic sensor, 43 ... Ultrasonic element array, 43A ... First ultrasonic element array, 43B ... Second ultrasonic element array, 43C ... Third ultrasonic element array, 44 ... Ultrasonic transmitter / receiver, 45 ... Ultrasonic transducer, 71 ... Ultra Sound wave measurement unit, 72 ... Image generation unit, 73 ... Display control unit, 74 ... Angle control unit, 311 ... First connection piece, 311A ... First support part, 312 ... Second connection piece, 312A ... Second support part, 313: First rotating part, 313A: First rotating shaft, 3 3B: 1st angle change part, 321 ... 3rd connection piece, 321A ... 3rd support part, 322 ... 4th connection piece, 322A ... 4th support part, 323 ... 2nd rotation part, 323A ... 2nd rotation Axis, 323B, second angle changing unit, F1, measurement area, F2, measurement area, F3, measurement area, F4, overlapping area, M, living body, M1, measurement site.

Claims (9)

An ultrasonic device in which a plurality of ultrasonic element arrays each having a plurality of ultrasonic transmission / reception units are connected to each other with variable angles,
The plurality of ultrasonic transmission / reception units are arranged in a first direction intersecting the thickness direction of the ultrasonic element array,
The plurality of ultrasonic element arrays are coupled with a variable angle in the first direction,
In a plan view from a second direction intersecting the thickness direction and the first direction, normals passing through the centers of the ultrasonic wave transmitting / receiving surfaces of the plurality of ultrasonic element arrays intersect at one point.
An ultrasonic device characterized by that. The ultrasonic device according to claim 1,
The plurality of ultrasonic element arrays include a first ultrasonic element array and a second ultrasonic element array,
A first connecting portion that connects the first ultrasonic element array and the second ultrasonic element array as a variable angle;
The ultrasonic device characterized in that the first connecting portion is provided with an angle changing portion for supplying a driving force for changing an angle between the first ultrasonic element array and the second ultrasonic element array. . The ultrasonic device according to claim 2,
The first ultrasonic element array and the second ultrasonic element array are arranged at positions shifted from each other with respect to the second direction.
An ultrasonic device characterized by that. The ultrasonic device according to claim 1,
The plurality of ultrasonic element arrays include a first ultrasonic element array, a second ultrasonic element array, and a third ultrasonic element array,
A first connecting part for connecting the angle between the first ultrasonic element array and the second ultrasonic element array as a variable;
A second connecting part for connecting the angle between the first ultrasonic element array and the third ultrasonic element array as variable,
With
The first connecting portion is provided with a first angle changing portion for supplying a driving force for changing an angle between the first ultrasonic element array and the second ultrasonic element array,
The second connecting portion is provided with a second angle changing portion for supplying a driving force for changing an angle between the first ultrasonic element array and the third ultrasonic element array.
An ultrasonic device characterized by that. The ultrasonic device according to claim 4,
The first ultrasonic element array, the second ultrasonic element array, and the third ultrasonic element array are arranged at positions shifted from each other with respect to the second direction.
An ultrasonic device characterized by that. The ultrasonic device according to any one of claims 1 to 5,
A control unit for controlling the ultrasonic device,
An ultrasonic measurement device characterized by that. The ultrasonic measurement apparatus according to claim 6,
The controller is
An ultrasonic wave is transmitted from one of the plurality of ultrasonic element arrays, and a reflected ultrasonic wave obtained by reflecting the ultrasonic wave transmitted by the ultrasonic transmission process is reflected by the object. An ultrasonic measurement unit that performs ultrasonic measurement to be received by at least one of the ultrasonic element arrays;
An image generation unit that generates an ultrasonic tomographic image obtained by combining the measurement results obtained when the ultrasonic measurement unit performs a plurality of ultrasonic measurements by switching the ultrasonic element array that transmits the ultrasonic waves. And comprising
An ultrasonic measurement device characterized by that. The ultrasonic measurement apparatus according to claim 7,
The image generation unit calculates the position of the ultrasonic transmission / reception unit based on the mutual angle of the plurality of ultrasonic element arrays, and is output from the position of the ultrasonic transmission / reception unit and the ultrasonic transmission / reception unit The ultrasonic tomogram is generated by aperture synthesis based on the received signal,
An ultrasonic measurement device characterized by that. In the ultrasonic measuring device according to any one of claims 6 to 8,
The ultrasonic device includes an angle changing unit that changes the angle of each of the plurality of ultrasonic element arrays,
The control unit includes an angle control unit that controls the angle changing unit to change each angle of the plurality of ultrasonic element arrays to an angle according to a position at which ultrasonic measurement is performed.
An ultrasonic measurement device characterized by that.

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