JP2018006902A - Crystal filter plate, and crystal filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a crystal filter plate having a wiring structure of a higher-reliability extraction electrode in which disconnection is unlikely to occur, and a crystal filter at lower cost.SOLUTION: A crystal filter comprises: an AT cut crystal filter plate 5 having a tabular shape that is rectangular in a planar view, with an X axis and a Z axis defined as sides and including a thin vibration part 53 in the center, a thick outer frame part 54 in a circumference and a step wall 56 connecting the vibration part with the outer frame part; a split electrode which is formed on one principal surface of the crystal filter plate and in such a first electrode 501 and a second electrode 502 are formed side by side; a common electrode 503 which is formed on the other principal surface of the crystal filter plate and formed oppositely to the split electrode; and extraction electrodes 504, 505, 506 and 507 connected with the electrodes and extending from the vibration part to a portion of the outer frame part. In the step wall, uneven surface step wall parts 5691, 5692, 5693 and 5694 are formed in portions where the extraction electrodes 506 and 507 pass.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a crystal vibrating device such as a crystal filter.

  At present, the oscillation frequency of a crystal resonator or a crystal filter using a thickness-shear vibration type crystal vibration plate such as an AT-cut crystal vibration plate is being increased. The quartz diaphragm used in this quartz-crystal vibrating device has an inverted mesa structure in which the vibrating part is thinly molded in order to cope with the increase in the oscillation frequency, and thin-film excitation electrodes are formed on both main surfaces of the thin-walled vibrating part. (For example, refer to Patent Document 1).

  In the crystal diaphragm described in Patent Document 1, a pair of excitation electrodes that excite the vibration part on both main surfaces of a rectangular crystal diaphragm, and a pair that extends these excitation electrodes to one end of the crystal diaphragm. The extraction electrode is formed.

JP 2004-242132 A

  Such an inverted mesa crystal diaphragm has a stepped wall connecting the vibrating part and the outer frame part, and the lead electrode may be disconnected at the edge of the stepped wall. In particular, since the quartz crystal plate is an anisotropic piezoelectric crystal, when wet etching is performed to form a quartz plate having an inverted mesa structure, the etching rate is increased by the crystal axis (the direction of the quartz crystal plate). Different. For example, in the case of an AT-cut quartz diaphragm, a new axis shifted by θ ° from the Z axis is referred to as Z ′, and a new axis shifted from the Y axis by θ ° is referred to as Y ′. The early order is Z ′> + X> −X> Y ′, and the etching rate varies depending on each crystal axis.

  For this reason, the step wall formed by wet etching has a different inclination angle depending on the crystal axis, so that a sharp ridge portion and an obtuse ridge portion are mixed, and disconnection of the extraction electrode in the step wall having an acute ridge portion The rate was extremely high.

  In order to solve such a problem, in Patent Document 1, an electrode material is further evaporated from the upper surface on the ridge portion of the step wall connecting the vibrating portion and the outer frame portion on which the extraction electrode is formed, and the electrode around the step wall is formed. We propose a configuration that avoids the risk of disconnection by making the thickness of the material thick.

  However, in the configuration of Patent Document 1, it is necessary to form the electrode twice, which not only leads to an increase in cost, but also has new problems such as an adverse effect of a shift when forming a partial upper electrode. It was happening.

  SUMMARY OF THE INVENTION In order to solve the above-described problems, an object of the present invention is to provide a quartz filter plate and a quartz filter having a more reliable lead electrode wiring structure that is less susceptible to disconnection at a lower cost.

  In order to achieve the above object, a rectangular plate shape in plan view with the X-axis and Z′-axis of the crystal axis as sides, a thin vibrating portion formed in the center, and a thick outer frame formed on the outer periphery And an AT-cut quartz filter plate having a step wall connecting the periphery of the vibrating portion and the outer frame portion, and formed on one main surface of the quartz filter plate, A divided electrode formed with a first electrode and a second electrode arranged side by side, a common electrode formed on the other main surface of the quartz filter plate and facing the divided electrode, and the first electrode A first extraction electrode connected to one electrode and extending from the vibrating part to a part of the outer frame part, and a first extraction electrode connected to the second electrode and extending from the vibrating part to a part of the outer frame part. 2 lead electrodes, connected to the common electrode and extended from the vibrating part to a part of the outer frame part A portion of the step wall of the crystal filter plate through which at least one of the first extraction electrode, the second extraction electrode, and the third extraction electrode passes, A wall is formed.

  According to the configuration of the present invention, by forming the extraction electrode on the uneven surface stepped wall portion, the surface area of the extraction electrode increases, the probability of connection by the extraction electrode on the step wall increases, and the conduction resistance in this region decreases. It is suppressed. Even if a stress is generated on the extraction electrode due to the difference in thermal expansion between the crystal and the extraction electrode at the ridge portion of the step wall, the disconnection at the extraction electrode in the uneven surface step wall is difficult to spread. By forming an uneven surface step wall portion on the step wall of the AT-cut quartz filter plate and forming an extraction electrode on top of this, the step wall is not affected by the crystal axis anisotropy. A region with a more obtuse angle of inclination is always formed at a part of the ridge. For this reason, the edge becomes gentle at the obtuse ridge portion of the stepped wall, and the extraction electrode can be hardly broken.

  In addition to the above-described configuration, each extraction electrode includes a front extraction electrode extending in a section from the vibrating portion of the crystal filter plate to the front of the step wall, and from the step wall of the crystal filter plate to the outer frame portion. A second extraction electrode extending from the first extraction electrode, and a first extraction electrode preceding the first extraction electrode and a second extraction electrode preceding the second extraction electrode, the first electrode and the second electrode being It extends along the crystal axis direction formed side by side, and the third extraction electrode before the third extraction electrode is orthogonal to the crystal axis direction in which the first electrode and the second electrode are formed side by side It may extend along the crystal axis direction.

  According to the configuration of the present invention, in addition to the above-described effects, in addition to the above-described effects, the extending directions of the first-stage first extraction electrode and the second-stage extraction electrode are set to the first electrode and the second electrode as described above. By extending along the direction of the crystal axis formed side by side, it is possible to suppress the occurrence of twist mode spurious. Furthermore, as described above, by extending the extending direction of the front third extraction electrode along the crystal axis direction perpendicular to the crystal axis direction in which the first electrode and the second electrode are formed side by side, Since the first extraction electrode and the previous second extraction electrode are not arranged to be opposed to each other at the vibrating portion of the quartz filter plate, the filter characteristics are not adversely affected.

  In addition to the above-described configuration, the uneven surface stepped wall portion may form an uneven surface only in the plate width direction orthogonal to the plate thickness direction of the crystal filter plate.

  According to the configuration of the present invention, in addition to the above-described effects, the uneven surface-shaped stepped wall portion is formed with the uneven surface only in the plate width direction orthogonal to the plate thickness direction of the quartz filter plate, thereby In the extension path of the extraction electrode to the outer frame portion, the risk of disconnection due to the ridge portion constituted by the uneven surface step portion itself is suppressed.

  In addition, a crystal comprising the above-described crystal filter plate, a first sealing body that holds the crystal filter plate, and a second sealing body that covers the crystal filter plate held by the first sealing body. Applicable to filters.

  According to the configuration of the present invention, in addition to the above-described effects, a crystal filter on which the above-described superior crystal filter plate is mounted can be obtained.

  According to the present invention, it is possible to provide a quartz filter plate and a quartz filter having a more reliable lead electrode wiring structure that is less likely to cause disconnection at a lower cost.

It is the perspective view which showed schematic structure of the crystal filter board concerning embodiment of this invention. It is a top view of FIG. It is a bottom view of FIG. It is sectional drawing which showed schematic structure of the quartz filter which mounts the quartz filter board of FIG.

  Embodiments of the present invention will be described below with reference to the drawings. In the crystal filter 1 according to the present embodiment, as shown in FIG. 4, a crystal filter plate 5, a base substrate 3 (first sealing body referred to in the present invention) that holds the crystal filter plate 5, and a base substrate 3. A lid 4 (second sealing body in the present invention) is provided for hermetically sealing the quartz filter plate 5 held in the chamber.

-Configuration of crystal filter plate 5-
As shown in FIG. 1, the quartz filter plate 5 is made of an AT-cut quartz substrate, has a rectangular rectangular shape in plan view, and has a plate-like rectangular parallelepiped shape. They are parallel, and the short side in plan view is configured to be parallel to the X axis in the crystal axis. On the other main surface of the quartz filter plate 5, a rectangular recess 52 in plan view is formed in the center of the plate surface in order to cope with the high frequency of the quartz filter plate 5. Includes a thin vibrating portion 53, a thick outer frame portion 54 formed on the outer periphery of the vibrating portion 53, and a stepped wall 56 that connects the periphery of the vibrating portion 53 and the outer frame portion 54. In addition, the rectangular recess 52 in plan view is configured such that each side is parallel to the X axis and the Z ′ axis in the crystal axis so as to be parallel to each side of the crystal filter plate 5, for example. Such a recess 52 is formed by using a photolithographic technique to form a chromium and gold (Cr—Au) film in which a window corresponding to the recess 52 is formed, and only the window is used as a fluorine-based etching solution. By dipping and wet etching, a recess having a desired depth can be formed. Thereby, the thin vibration part 53, the thick outer frame part 54, and the step wall 56 can be configured with respect to the crystal filter plate 5. Note that the crystal filter plate 5 is not limited to this embodiment, and the long side in plan view is parallel to the X axis according to the specifications and the like, and the short side in plan view is parallel to Z ′ inclined by a predetermined angle from Z in the crystal axis. It can be applied to the configuration as well.

  The crystal filter plate 5 (outer frame portion 54) has a first side 541 and a second side 542 which are two opposite sides, and a third side which is two opposite sides in a direction orthogonal to these sides. 543 and a fourth side 544. At this time, the first side 541 and the second side 542 are configured to be parallel to the X-axis, and face each other at one end and the other end in the Z′-axis direction of the crystal filter plate 5.

  The four corners of the quartz filter plate 5 (outer frame portion 54) have corner portions 545, 546, 547, and 548. At this time, one end portion of the first side 541 becomes the corner portion 545, the other end portion of the first side 541 becomes the corner portion 546, and one end portion of the second side 542 of the crystal filter plate 5 (outer frame portion 54). Are arranged and configured such that the other end portion of the second side 542 becomes the corner portion 548.

  In the recess 52 on the other main surface of the crystal filter plate 5, a parallel fifth step wall 561 that is close to the first side 541 of the crystal filter plate 5 and a parallel second step that is close to the second side 542 of the crystal filter plate 5. 6 step walls 562, a parallel seventh step wall 563 close to the third side 543 of the crystal filter plate 5, and a parallel eighth step wall 564 close to the fourth side 544 of the crystal filter plate 5. ing. At this time, the fifth step wall 561 and the sixth step wall 562 face each other, the seventh step wall 563 and the eighth step wall 564 face each other, and the fifth step wall 561 and the sixth step wall 562 are The seventh step wall 563 and the eighth step wall 564 are arranged and configured to be orthogonal to each other.

  C-shaped stepped wall portions 565, 566, 567, and 568 formed linearly are provided at the four corners of the recess 52 of the quartz filter plate 5. At this time, one end portion of the fifth step wall 561 of the recess 52 becomes a C-plane stepped wall portion 565, the other end portion of the fifth step wall 561 becomes a C-plane stepped wall portion 566, and the sixth of the recess 52 One end portion of the step wall 562 is a C-plane stepped wall portion 567, and the other end portion of the sixth step wall 562 is a C-plane stepped wall portion 568. The fifth step wall 561 and the sixth step wall 562 are configured to be parallel to the X axis. In addition, you may comprise this C surface-shaped step wall part as an R surface step-shaped wall part formed in circular arc shape.

  A portion of the fifth step wall 561 and a portion of the seventh step wall 563 adjacent to the C-plane step wall portion 566 that is one corner of the recess 52 of the crystal filter plate 5 are disposed on the plate of the crystal filter plate 5. First uneven surface stepped wall portion 5691 and second uneven surface formed with uneven surfaces meandering only in the plate width direction orthogonal to the thickness direction (the respective width directions of the fifth step wall 561 and the seventh step wall 563) And a stepped wall portion 5692. A part of the sixth step wall 562 and a part of the eighth step wall 564 adjacent to the C-plane step wall 567 which is one corner of the recess 52 of the crystal filter plate 5 are disposed on the plate of the crystal filter plate 5. A third uneven surface stepped wall portion 5673 and a fourth uneven surface formed with uneven surfaces meandering only in the plate width direction (the respective width directions of the sixth step wall 562 and the eighth step wall 564) perpendicular to the thickness direction. A stepped wall portion 5694 is formed. In addition, you may comprise this uneven surface as what meandered only in the plate | board thickness direction of the crystal filter board, or formed the unevenness | corrugation in both the plate | board thickness direction and the plate width direction. In this embodiment, the uneven surface stepped wall portion is formed on a part of two sides sandwiching the C-plane step wall portion at the corner, but the corner region is sandwiched between the C-surface step wall portion. It may be formed on the entire two sides except. It may be formed only on a part of one side where a later-described extraction electrode extends or on all except a corner, or may be formed on the entire periphery of four sides excluding a corner.

  A rectangular first electrode 501 and a second electrode 502 are arranged along the Z ′ axis with a predetermined gap region G in between near the center of the inside of one main surface of the quartz filter plate 5 (vibrating portion 53). It has the divided electrode formed. A rectangular common electrode 503 formed opposite to the divided electrodes (the first electrode 501 and the second electrode 502) is formed near the inner center of the recess 52 (vibration portion 53) on the other main surface of the crystal filter plate 5. It is formed. The first electrode 501 and the second electrode 502 are part of the outer frame portion 54 from the vibrating portion 53 by the first extraction electrode 504 and the second extraction electrode 505 in order to be electromechanically joined to an external electrode (not shown). It is extended to. The common electrode 503 is part of the outer frame portion 54 via the step wall 56 from the vibrating portion 53 by the third extraction electrode 506 and the fourth extraction electrode 507 in order to be electromechanically joined to an external electrode (not shown). Each is extended to.

  The first extraction electrode 504 extends the first electrode 501 only in the vicinity of the corner portion 545 that is one end portion of the first side 541 of the crystal filter plate 5 (outer frame portion 54) (extends only to the first side). And is formed at one of the two corners at both ends of the first side). More specifically, the first extraction electrode 504 includes a first front extraction electrode 5041 extending in a section from the vibrating portion 53 to a region before the region corresponding to the step wall 56 formed on the other main surface, and a step wall And a first rear extraction electrode 5042 extending from a region corresponding to 56 to the outer frame portion 54. The first front extraction electrode 5041 is connected to the central part of the parallel side 5011 close to the first side 541 of the crystal filter plate 5 among the sides of the first electrode 501, and the first electrode 501 from the central part. And the second electrode 502 extend along the crystal axis direction (in this embodiment, the Z ′ axis) formed side by side. The first rear extraction electrode 5042 is connected to the end of the first front extraction electrode 5041, and the first electrode 501 and the second electrode 502 are formed side by side in the region from the end to the outer frame portion 54. It extends along the crystal axis direction (X axis in this embodiment) orthogonal to the crystal axis direction, and extends to a partial region of the upper surface of the outer frame portion 54 leading to the corner portion 546.

  The second extraction electrode 505 extends the second excitation electrode 502 only in the vicinity of the corner portion 548 which is the other end portion of the second side 542 of the crystal filter plate 5 (outer frame portion 54) (only on the second side side). And is formed at one of the two corners at both ends of the second side). More specifically, the second extraction electrode 505 includes a second front extraction electrode 5051 extending in a section from the vibrating portion 53 to a region before the region corresponding to the step wall 56 formed on the other main surface, and a step wall And a second rear extraction electrode 5052 extending from a region corresponding to 56 to the outer frame portion 54. The second front extraction electrode 5051 is connected to the central part of the parallel side 5021 adjacent to the second side 542 of the crystal filter plate 5 among the sides of the second electrode 502, and the first electrode 501 from the central part. And the second electrode 502 extend along the crystal axis direction (in this embodiment, the Z ′ axis) formed side by side. The second rear extraction electrode 5052 is connected to the end of the second front extraction electrode 5051, and the first electrode 501 and the second electrode 502 are formed side by side in the region from the end to the outer frame portion 54. It extends along the crystal axis direction orthogonal to the crystal axis direction (in this embodiment, the X axis), and extends to a partial region of the upper surface of the outer frame portion 54 leading to the corner portion 548.

  The third extraction electrode 506 extends the common electrode 503 only in the vicinity of the corner portion 546 that is the other end portion of the first side 541 of the crystal filter plate 5 (outer frame portion 54) (extends only to the first side side). And is formed at one of the two corners at both ends of the first side). More specifically, the third extraction electrode 506 includes a third front extraction electrode 5061 extending in a section from the vibrating portion 53 to the front of the step wall 56 and a section from the step wall 56 to the outer frame section 54. And a third rear extraction electrode 5062 to be taken out. The third front extraction electrode 5061 is connected to a corner 5031 of the common electrode 503, and a crystal axis perpendicular to the crystal axis direction in which the first electrode 501 and the second electrode 502 are formed side by side from the corner. It extends along the direction (X axis in this embodiment). The third rear extraction electrode 5062 is connected to the end portion of the third front extraction electrode 5061, and the crystal axis direction (in this embodiment) in which the first electrode 501 and the second electrode 502 are formed side by side from the end portion. Z′-axis) and extending over the upper surfaces of the first uneven surface stepped wall portion 5691, the C surface stepped wall portion 566, and the second uneven surface stepped wall portion 5692. It extends to a partial region of the upper surface of the outer frame portion 54 to the corner portion 546 via the wall 56.

  The fourth extraction electrode 507 extends the common electrode 503 only in the vicinity of the corner portion 547 that is one end portion of the second side 542 of the crystal filter plate 5 (outer frame portion 54) (extends only to the second side). And is formed at one of the two corners at both ends of the second side). More specifically, the fourth extraction electrode 507 includes a fourth front extraction electrode 5071 extending in a section from the vibrating portion 53 to the front of the step wall 56, and a section from the step wall 56 to the outer frame section 54. And a fourth rear extraction electrode 5072 to be taken out. The fourth front extraction electrode 5071 is connected to the corner 5032 of the common electrode 503, and the crystal axis direction orthogonal to the crystal axis direction in which the first electrode 501 and the second electrode 502 are formed side by side from the corner. It extends along the X axis in this embodiment. The fourth rear extraction electrode 5072 is connected to the end portion of the fourth front extraction electrode 5071, and the crystal axis direction (in this embodiment) in which the first electrode 501 and the second electrode 502 are formed side by side from the end portion. Z′-axis) and extending over the upper surfaces of the third uneven surface stepped wall portion 5669, the C surface stepped wall portion 567, and the fourth uneven surface stepped wall portion 5694. It extends to a partial region of the upper surface of the outer frame portion 54 to the corner portion 547 via the wall 56.

  With the above configuration, two orthogonal stepped walls of the AT-cut quartz filter plate 5 straddle the upper surfaces of the first uneven surface stepped wall portion 5691, the C surface stepped wall portion 566, and the second uneven surfaced stepped wall portion 5692. The third post-stage extraction electrode 5062 is formed, and the third uneven surface step wall portion 5673, the C surface step wall portion 567, and the fourth uneven surface step are formed on two orthogonal step walls of the AT-cut quartz filter plate 5. A fourth rear extraction electrode 5072 is formed across the upper surface of the wall portion 5694.

  For this reason, the surface area of each extraction electrode increases, and the probability of connection by each extraction electrode in the step wall 56 increases. A decrease in the conduction resistance in this region is suppressed. Even if a stress is generated on each extraction electrode due to a difference in thermal expansion between the crystal and the extraction electrode at the ridge portion of the step wall 56, the disconnection at each extraction electrode in each uneven surface step wall is difficult to spread. In addition, by forming an uneven surface that meanders the uneven surface stepped wall portions 5691, 5692, 5663, and 5694 only in the plate width direction of the crystal filter plate 5, each extraction electrode from the vibrating portion 53 to the outer frame portion 54 is formed. In the extending path, the risk of disconnection due to the ridge portion constituted by the uneven surface step portion itself is suppressed.

  Further, when the step wall is formed by wet etching the AT-cut crystal filter plate 5, the inclination angle of the step wall differs due to the crystal axis anisotropy of the crystal, or the edge of the ridge portion of the step wall is tight. May be affected. However, a more obtuse ridge portion can be reliably configured, and the obtuse ridge portion of the step wall has a gentle edge, so that the extraction electrode is less likely to be disconnected.

  Further, since the four corner portions of the step wall have C-shaped step wall portions 565, 566, 567, and 568 formed in a straight line, cracks of the crystal filter plate 5 starting from these four corners are obtained. Generation | occurrence | production can be suppressed and the quartz filter board 5 with higher impact resistance can be provided.

  Further, the extending directions of the first front extraction electrode 5041 and the second front extraction electrode 5051 are set so that the first electrode 501 and the first electrode 501 extend from the center of each side close to the outer periphery of the crystal filter plate of the first electrode 501 and the second electrode 502. By extending along the crystal axis direction (in this embodiment, the Z ′ axis) in which the two electrodes 502 are formed side by side, the occurrence of twist mode spurious can be suppressed. Furthermore, as described above, the extending direction of the third pre-stage extraction electrode 5061 and the fourth pre-stage extraction electrode 5071 is the crystal axis direction orthogonal to the crystal axis direction in which the first electrode 501 and the second electrode 502 are formed side by side ( By extending along the X axis in this embodiment, the first front extraction electrode 5041, the second front extraction electrode 5051, and the vibrating portion 53 of the crystal filter plate 5 are not disposed opposite to each other. The filter characteristics are not adversely affected.

  The quartz filter plate 5 of the present embodiment discloses a so-called plano inverted mesa shape in which the recess 52 is formed only on the other principal surface of the quartz filter plate. The present invention can also be applied to a so-called bi-inverted mesa shape in which a recess is formed on the main surface. In addition, although two paths of the third extraction electrode 506 and the fourth extraction electrode 507 are configured as the extraction electrode of the common electrode 503 of this embodiment, only one of the paths may be used.

  The first electrode 501, the second electrode 502, the first extraction electrode 504, the second extraction electrode 505, the third extraction electrode 506, and the fourth extraction electrode 507 are formed by photolithography, for example, aluminum (Al) Single layer, chromium, silver (Cr-Ag), or nickel, silver (Ni-Ag) are laminated in this order.

-Configuration of base substrate 3-
As shown in FIG. 4, the base substrate 3 is formed in a box-like body including a bottom portion 31 and a wall portion 32 extending upward from the bottom portion 31. The base substrate 3 has a rectangular parallelepiped ceramic material laminated on a single plate made of a ceramic material in a rectangular shape in plan view and is integrally fired in a concave shape.

  The wall portion 32 is formed along the outer periphery of the surface of the bottom portion 31. The upper surface of the wall part 32 is a joining area | region with a cover body, The sealing member (for example, metallized layer, a metal ring material, etc.) 321 for joining with a cover body is provided in this joining area | region.

  In addition, a plurality of electrode pads 33, 34, 34 for electromechanically bonding the first electrode 501, the second electrode 502, and the common electrode 503 of the crystal filter plate 5 to the bottom 31 of the base substrate 3, respectively. 35 and 36 (only a part is shown) are formed. These electrode pads are electrically connected to terminal electrodes 371, 372, 373, and 374 formed on the outer peripheral back surface of the base substrate 3, respectively. These terminal electrodes are connected to external parts and external devices. These terminal electrodes and electrode pads are formed by printing a metallized material such as tungsten or molybdenum and then firing integrally with the base substrate 3. Some of these terminal electrodes and electrode pads are formed by forming nickel plating on the metallized upper portion and forming gold plating on the upper portion thereof.

-Configuration of lid 4-
The lid is made of, for example, a metal material or a ceramic material, and is formed into a single plate. This lid has a sealing material (a brazing material, a plating material, a glass material, etc.) formed on the lower surface.

-Configuration of crystal filter 1-
One end portion of the first side 541 of the crystal filter plate 5 is formed at the corner portion 545, the first rear extraction electrode 5041, the electrode pad 33 of the base substrate 3, and the other end portion of the first side 541 of the crystal filter plate 5 are The third rear extraction electrode 5062 formed at the corner portion 546 and the electrode pad 34 of the base substrate 3 are electrically and mechanically joined by the joining member B. One end portion of the second side 542 of the crystal filter plate 5 is formed at the corner portion 547, the fourth rear extraction electrode 5072, the electrode pad 35 of the base substrate 3, and the other end portion of the second side 542 of the crystal filter plate 5 The second rear extraction electrode 5052 formed in the corner portion 548 and the electrode pad 36 of the base substrate 3 are electrically and mechanically joined by the joining member B. Thus, the four corners of the crystal filter plate 5 are held by the base substrate 3. In this embodiment, a conductive resin bonding agent made of silicone resin or the like is used as the bonding member B. In addition, as this joining member B, you may use the conductive bump which consists of not only a conductive resin bonding agent but a brazing material or a metal material.

  In this crystal filter 1, a base substrate 3 (substrate referred to in the present invention) and a lid 4 are joined to form a package, and the base substrate 3 and the lid 4 are joined to form an internal space of the package. . The base substrate 3 (substrate in the present invention) and the lid 4 are joined by a welding technique such as a seam or beam, or an atmosphere heating technique such as a glass sealing material or a metal brazing material. At this time, as shown in FIG. 4, with the crystal filter plate 5 held and mounted on the base substrate 3, the base substrate 3 (the substrate according to the present invention) and the lid 4 are joined to each other and the inside of the package. The quartz filter plate 5 is hermetically sealed in the space, and the quartz filter 1 (quartz vibration device) is completed.

  The embodiments of the present invention described above are all examples embodying the present invention, and are not of a nature that limits the technical scope of the present invention.

  The present invention can also be applied to a crystal vibrating device such as a crystal filter.

1 Crystal Filter 3 Base Substrate 4 Lid 5 Crystal Filter Plate B Bonding Member

Claims (4)

A rectangular plate shape in plan view with the X axis and Z ′ axis of the crystal axis as sides, a thin vibrating portion formed in the center, a thick outer frame portion formed on the outer periphery, and the periphery of the vibrating portion And an AT-cut crystal filter plate having a stepped wall connecting the outer frame portion and the outer frame portion,
A divided electrode formed on one main surface of the crystal filter plate and formed side by side with the first electrode and the second electrode along one of the crystal axes;
Formed on the other main surface of the crystal filter plate, and a common electrode formed to face the divided electrode;
A first extraction electrode connected to the first electrode and extending from the vibrating part to a part of the outer frame part;
A second extraction electrode connected to the second electrode and extending from the vibrating portion to a part of the outer frame portion;
A third extraction electrode connected to the common electrode and extending from the vibrating part to a part of the outer frame part;
With
In the step wall of the crystal filter plate, an uneven surface step wall is formed in a portion through which at least one of the first extraction electrode, the second extraction electrode, and the third extraction electrode passes.
A quartz filter plate characterized by the above. Each extraction electrode includes a front extraction electrode extending in a section from the vibrating portion of the crystal filter plate to the front of the step wall, and a rear extraction electrode extending in a section from the step wall of the crystal filter plate to the outer frame portion. And
The first extraction electrode before the first extraction electrode and the second extraction electrode before the second extraction electrode extend along the crystal axis direction in which the first electrode and the second electrode are formed side by side. And
The third extraction electrode before the third extraction electrode extends along a crystal axis direction orthogonal to the crystal axis direction in which the first electrode and the second electrode are formed side by side.
2. The quartz filter plate according to claim 1, wherein: The uneven surface stepped wall portion forms an uneven surface only in the plate width direction orthogonal to the plate thickness direction of the crystal filter plate.
The crystal filter plate according to claim 1 or claim 2, wherein A crystal filter plate according to any one of claims 1 to 3, a first sealing body for holding the crystal filter plate, and the crystal filter held by the first sealing body A crystal filter comprising: a second sealing body that covers the plate.

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