JP2018004274A - Measurement method of flat reference surface and flatness measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flatness measurement device capable of specifying a specific reference surface even if an erroneous position measurement site is available.SOLUTION: When a light reception data value at the time of setting and measuring a second removal level is the light reception data value larger than a second light reception removal level value B2, it is determined to be a defective reference surface data value. When the light reception data value at the time of setting and measuring the second removal level is smaller than the second light reception removal level value B2 and the light reception data value at the time of setting and measuring a first removal level is larger than a first light reception removal level value B1, it is determined to be a good reference surface data value as the light reception data. Thus, when the light reception data (measurement data) at a reference surface measurement position K1 is determined to be defective reference surface data, the measurement operation is stopped, and its cause is checked, and the defective reference surface data is corrected to enable the measurement.SELECTED DRAWING: Figure 13

Description

  The present invention is mainly suitable for measuring the flatness of a plurality of mounting terminals (measurement points) of an object to be measured such as an electronic device such as an IC chip having a plurality of mounting terminals, an electronic component or a connector. The present invention relates to a method for measuring a reference surface and a flatness measuring apparatus.

Conventionally, the upper surface of a flat glass plate is used as a flat reference surface, and the distance from the flat reference surface of the mounting terminal (measurement location) of the measurement object placed on the flat reference surface is irradiated from the light projecting unit. In addition, there is known a technique in which the reflected light is received by a light receiving unit and measured by an autofocus light detecting unit that measures the distance. For example, the invention of Patent Document 1.
The measurement method is to specify a position of the flat reference surface by receiving a reference surface reflected light beam that is a reflected light beam from a flat reference surface without a measurement object, and to reflect the reflected light beam from a measurement location of the measurement object. By measuring the position of the measurement location by receiving the measurement location reflected light, and calculating the position of the measurement location from the specific reference plane, the distance of the measurement location (floating distance) from the reference plane is obtained. is there.
The flat reference surface is measured at a plurality of locations (for example, 5 locations), and the average value is used as the specific reference surface.
For this reason, the measurement location is such that the transmittance of the glass is the reference surface reflected light reception amount that allows the light detection unit to receive the reference surface reflected light, and the measurement location reflected light is stronger than the reference surface reflected light reception amount. When the reflected light amount is set so that the reflected light beam includes both the reference surface reflected light beam and the measurement site reflected light beam, the strong measurement site reflected light beam is focused.

  Specifically, the glass flat plate is a laser focus sensor (focus distance measuring method: resolution 0.01 μm), the irradiated laser beam is 670 nm, and the glass flat plate has a laser beam transmittance of 98% or more. Thus, a permeable membrane by vacuum vapor deposition containing magnesium fluoride as a main component is applied to both surfaces of the glass flat plate. Reflection from a flat reference surface is less than 2 percent. The flat reference surface is processed with flatness polished to a flatness of about 3 μm or less.

Japanese Patent No. 4849709

  In the conventional technology described above, when a part of the measurement object is located at the reference surface measurement position (reference surface measurement location) for measuring the flat reference surface, the position of the measurement object with a large amount of reflected light is determined as the reference surface position. (Hereinafter referred to as “false reference plane position”), the distance (floating distance or floating amount) of each measurement location from the erroneous reference plane position is calculated, and an incorrect floating distance is calculated. This has the disadvantage that the problem of “reference plane deviation” occurs.

For example, the measurement object has a 0.18 mm thick pin (measurement point), which is a measurement point, arranged in a form in which 95 pins protrude about 0.5 mm on the outside of the package at intervals of 0.32 mm, or 1 There are fine pin configurations such as four pins protruding outward on one side of a × 2 mm package, and small and heavy package configurations, and there are finer ones that will appear in the future. Expected to be.
For example, in the case of the 95 pins, when the positioning is applied to the corner of a square jig, the reference surface measurement position can be between the jig side wall and the focus (measurement location). For example, a very narrow gap such as about 0.5 mm × 3 mm or 0.5 mm × 0.5 mm is set.
In the state where the reference plane measurement position is set in such a narrow gap, the measurement object is placed in a wrong way (placement position / position), moved by wind pressure or vibration, the pin of the measurement object is bent, Alternatively, there is a problem that a part of the measurement object may be located immediately above the reference surface position due to a setting error of the reference surface measurement position.

The flat reference surface is warped, distorted, and uneven even though it is finely flattened. The wider the measurement range, the greater the difference between them, and the lower the accuracy of flatness accuracy. There is a possibility of coming.
As shown in Example 1, the measurement of the flat reference surface is performed before the measurement of the measurement object (hereinafter referred to as “pre-start reference surface measurement” or “pre-start reference surface measurement position”) and after the measurement (hereinafter referred to as “end”). This is necessary to prevent a measurement error due to the inclination of the flat reference surface. Also, reduce the chance that the difference between the reference plane measurement position before the start and the reference plane measurement position after the end will exceed the allowable range, that is, reduce or eliminate the chance of measurement error / impossibility of measurement due to exceeding the allowable range. Desired.
Therefore, in order to narrow the measurement range as much as possible, the reference plane measurement position before the start and the reference plane measurement position after the end are required to be as close as possible.

  The present invention has been made in view of the above-described drawbacks of the prior art, and an object of the present invention is to provide a flat reference surface measuring method and flatness measuring device capable of accurately measuring a flat reference surface.

In order to achieve the above object, the present invention is configured as follows.
<Invention of Claim 1>
A transmissive flat plate on which the upper surface is a flat reference surface and the object to be measured is placed on the flat reference surface, and a light beam positioned below the transmissive flat plate and directed toward the flat reference surface and the measurement object A flatness measuring device that performs measurement at a reference plane measurement position where there is no measurement object before starting measurement of the measurement object. A method for measuring a flat reference surface,
The measurement at the reference surface measurement position includes a first removal level setting measurement in which the first received light removal level value B1 is set and a second removal level in which the second received light removal level value B2 is set. Set measurement and
The first light reception removal level value B1 is a value (B1 <E) smaller than the reference surface confirmed light reception data value E that has been confirmed by measuring the reflected light beam of the flat reference surface in advance. The removal level value B2 is larger than the reference plane confirmed light reception data value E, and smaller than the measurement target confirmed light reception data value G (E < B2 <G),
The second measurement light reception data value C2 is a value smaller than the second light reception removal level value B2 (C2 <B2), and the first measurement obtained by the first removal level setting measurement. When the light reception data value C1 is a value (C1> B1) larger than the first light reception removal level value B1 (C2 <B2andC1> B1), it is determined that the data is a good reference plane data value. This is a method for measuring the reference plane.

The order of the first removal level setting measurement and the second removal level setting measurement may be either first or later, and it is arbitrary which one is performed first or second.
About “light reception data value”. This includes both cases where the manufacturing company of the light detection unit and its control device has an arbitrarily determined value, and the actual received light amount, received light intensity, and the like.
The good reference plane data value is an average value of the second measurement light reception data value C2 and the first measurement light reception data value C1, or is one of the measurement light reception data values of C1 and C2.

<Invention of Claim 2>
A transmissive flat plate having an upper surface as a flat reference surface and placing an object to be measured on the flat reference surface;
A light detection unit that is positioned below the transmissive flat plate, irradiates the flat reference surface and the measurement object with a light beam, and receives the reflected light beam;
Before starting measurement of the measurement object, a reference surface measurement position setting unit that sets or presets a reference surface measurement position that is a measurement position of the flat reference surface at a place where the measurement object is not present; and ,
A reference surface position specifying unit for specifying a reference surface position which is a position of the flat reference surface from measurement data at the reference surface measurement position;
A measurement point position specifying unit for specifying a measurement point position which is the position of the measurement point from the measurement data of the measurement point of the measurement object;
A floating distance calculation unit that calculates a floating distance that is a separation distance of the measurement location from the reference surface position;
A first removal level setting unit that sets or presets the first received light removal level value B1,
A second removal level setting unit that sets or presets the second received light removal level value B2, and
The measurement at the reference surface measurement position includes a first removal level setting measurement in which the first received light removal level value B1 is set and a second removal level in which the second received light removal level value B2 is set. Set measurement and
The first light reception removal level value B1 is a value (B1 <E) smaller than the reference surface confirmed light reception data value E that has been confirmed by measuring the reflected light beam of the flat reference surface in advance. The removal level value B2 is larger than the reference plane confirmed light reception data value E, and smaller than the measurement target confirmed light reception data value G (E < B2 <G),
The second measurement light reception data value C2 is a value smaller than the second light reception removal level value B2 (C2 <B2), and the first measurement obtained by the first removal level setting measurement. When the light reception data value C1 is a value (C1> B1) larger than the first light reception removal level value B1 (C2 <B2andC1> B1), it is determined that the data is a good reference plane data value. It is a degree measuring device.

<Invention of Claim 3>
A positioning jig is provided on the permeable flat plate, the positioning jig is fixed on the transmissive flat plate, and a plurality of measurements including a rectangular opening provided in the jig main body. The flatness according to claim 2, further comprising an object setting unit, wherein the measurement object can be set against an opening wall of the measurement object setting unit. It is a measuring device.

<Invention of Claim 4>
The jig body is provided with a measurement position setting portion capable of setting the reference surface measurement position including an opening in the vertical direction other than the measurement object setting portion or a recess in the vertical direction. The flatness measuring apparatus according to claim 3.

As is clear from the above description, the present invention has the following effects.
<Effect of the Invention of Claim 1>
According to the present invention, in the measurement of the reference surface at the reference surface measurement position performed before the measurement object is measured, the second received light removal level value measurement is performed by setting the second received light removal level value B2. The measurement light reception data value C2 is acquired, and the first measurement light reception data value C1 is acquired by the first light reception removal level value measurement by setting the first light reception removal level value B1.
When C2 <B2andC1> B1, it is determined that the data is a good reference plane data value.
That is, since the reference plane measurement data at the reference plane measurement position is defective (error) or good (correct) before the measurement of the measurement object is started, The measurement object need not be measured.
In other words, in the case of the determination with the defective reference surface data value, it is possible to avoid measurement time that becomes erroneous measurement data after the reference surface measurement position and useless time such as diffraction, and the measurement operation can be performed immediately. It is possible to stop, investigate the cause, correct it, and remeasure it.

<Effects of Invention of Claim 2>
The same effect as that of the first aspect of the invention can be obtained.

<Effect of the Invention of Claim 3>
While having the same effect as that of the invention of claim 2, the positioning jig for positioning the measuring object is provided with a plurality of measuring object set portions having a rectangular opening shape.
Therefore, for example, in a form in which two measurement object set parts are provided, the length of the measurement object is longer than the side wall length of the measurement object set part and the width is short (hereinafter also referred to as “long object object”). ) Sets a total of four measurement objects, each of which is two in the measurement object set section, and enables measurement of the four measurement objects at a time. For example, in the form in which two measurement object setting parts are provided, when the length of the measurement object is shorter than the side wall length of the measurement object setting part (hereinafter also referred to as “short object object”), measurement is performed. A total of eight measurement objects are set in each of the four object setting sections, and the eight measurement objects can be measured at a time.
That is, it is possible to measure three or more (long object) to five or more (short object) measurement objects in the measurement operation.

<Advantageous Effects of Invention>
The same effect as that of the invention of claim 3 can be obtained, and the reference plane measurement position can be set in the measurement position setting portion that includes the vertical penetration type opening or the vertical penetration type small recess other than the measurement object setting portion. Therefore, it is possible to measure the measurement object whose measurement location is within the package range that does not protrude outside the package.

It is a block diagram of Example 1 of this invention. The setting screen figure of Example 1 of this invention. The setting screen figure of Example 1 of this invention. The setting screen figure of Example 1 of this invention. The setting screen figure of Example 1 of this invention. The top view of the positioning jig of Example 1 of this invention. The enlarged plan view of the state which set the measuring object of Example 1 of this invention. The enlarged view which shows the measurement state of Example 1 of this invention. The enlarged view which shows the measurement state of Example 1 of this invention. The measurement result graph of Example 1 of this invention. FIG. 3 is a detailed view of data analysis of the first embodiment of the present invention. FIG. 3 is a detailed view of data analysis of the first embodiment of the present invention. The flowchart figure of Example 1 of this invention. The flowchart figure of Example 2 of this invention. The top view of the positioning jig of Example 3 of this invention. The enlarged view which shows the measurement state of Example 3 of this invention.

  Embodiments that are the best mode for carrying out the present invention will be described below. However, the present invention is not intended to be limited to these examples. Further, in the description of the embodiments to be described later, the same reference numerals are given to the same components of the above-described embodiments, and the overlapping description is omitted.

In the first embodiment of the present invention shown in FIGS. 1 to 5, the flatness measuring apparatus 1 has the following configuration.
A transmissive flat plate 3 made of a quartz glass member on which the upper surface is the flat reference surface 2 and the measuring object T is placed on the flat reference surface 2;
Light is irradiated to the flat reference surface 2 and the measuring object T placed on the flat reference surface 2 which are positioned below the transparent flat plate 3 and moved parallel to the flat reference surface 2. And a light detector 4 for receiving the reflected light beam,
Before starting the measurement of the measurement target T, the reference plane measurement position K1, which is the position where the light detection unit 4 performs the measurement of the flat reference plane 2 at a location where the measurement target T is not present, is set or preset. A reference plane measurement position setting unit 5;
After the measurement of the measurement target T, the reference plane measurement position K2, which is the position where the light detection unit 4 performs the measurement of the flat reference plane 2 at a place where the measurement target T is not present, is set or preset. A reference plane measurement position setting unit 6;
A reference surface position specifying unit 7 for specifying a reference surface position K that is the position of the flat reference surface 2 from measurement data at the reference surface measurement position K1 and the reference surface measurement position K2,
Measurement location data td-1, td-2 ... td-n from measurement location t1, t2 ... tn of measurement object T to measurement location tf-1, tf-2 ... tf A measurement point position specifying unit 8 for specifying -n;
A floating distance calculation unit 9 for calculating floating distances h1, h2... Hn, which are distances from the measurement position tf-1, tf-2... Tf-n from the reference surface position K;
A first removal level setting unit 10 for setting a first light reception removal level value B1,
A second removal level setting unit 11 for setting a second received light removal level value B2,
A measurement location number registration unit 12 for registering the number of measurement locations, which is the number of measurement locations t1, t2,.
A reference surface confirmed light reception data value setting unit 13 for setting a reference surface confirmed light reception data value E, which is a confirmed light reception data value of the light detection unit 4, which is confirmed in advance of the reflected light beam from the flat reference surface 2;
A measurement target confirmed received light data value setting unit 14 for setting a measurement target confirmed received light data value G, which is a confirmed light reception data value of the light detection unit 4, which has been confirmed in advance for the reflected light beam of the measurement target T; ,
A positioning jig 20 for positioning and setting the measuring object T provided on the flat reference surface 2;
Sensor movable means 18 composed of a combination of a stepping motor and a precision ball screw shaft or the like for horizontally moving the light detection unit 4 in the X-axis / Y-axis direction;
An observation chamber 19 provided on the upper part of the permeable flat plate 3;
A hot air supply unit 25 for supplying hot air to the observation chamber 19;
A temperature sensor 26 for detecting the temperature in the observation room 19, and
And a control unit 15 configured to perform various settings and control the operation of each part.

In this embodiment, the light detection unit 8 is a laser focus type displacement meter which is one of non-contact displacement meters.
As the laser displacement meter, a triangulation method, a confocal principle (confocal), and a spectral interference method are known. Any of the methods described above may be used in the light detection unit of the present invention.
Examples of light rays emitted by the light detection unit include red light rays, ultraviolet rays, red laser beams, and blue laser beams.

Measurement in the observation room can also be performed at room temperature.
A cooling device that enables measurement under low temperature conditions may be provided.
In addition, if it is only performed at room temperature, a configuration in which a cover and an observation room as a sealed space are not provided may be employed.

The first light reception removal level value B1 is a reference surface confirmed light reception data value E (here, “a light reception data value E that is a confirmed light reception data value of the light detection unit 4) of a reflected light beam from the flat reference surface 2”. E≈500 ”.) (B1 <E).
It can be said that the first light reception removal level value B1 is a threshold value that is a determination reference value for determining whether the light reception data value is larger or smaller than the value B1.

The second light reception removal level value B2 is a confirmed light reception data value of the light detection unit 4 that is larger than the reference surface confirmed light reception data value E and is confirmed in advance for the reflected light beam of the measurement target T. It is a value (E <B2 <G) that is smaller than the light reception data value G that has been confirmed to be measured (here, “G≈2000”).
The second light reception removal level value B2 can be regarded as a threshold value serving as a determination reference value for determining whether the light reception data value is larger or smaller than the value B2.

About “light reception data value”.
There are cases where the manufacturing company of the light detection unit and its controller has an arbitrary value determined by the program, and cases where it is the actual amount of received light, intensity of received light, etc., both of which are within the technical scope of the present invention. Is included.
There are various units that indicate the intensity (brightness) of light, such as conversion of photon flux density, irradiance, illuminance, and unit of light, but analog output is required, and special equipment is required for that purpose. And is extremely expensive.
On the other hand, the value arbitrarily determined by the program by the manufacturing company is not the actual received light amount or received light intensity, so there is no need to provide an analog output device or the like, and the device can be made inexpensive ( For example, it may be as low as 1 million yen.)
The numerical expression indicated by the light reception data value and the light reception removal level value in the present embodiment is an arbitrary expression number on the program, and the expression is not limited to this expression. This is just an expression format arbitrarily determined by the device manufacturer in the light detection unit 4 and its controller.
As for the light reception removal level value, whether the first light reception removal level value B1 is expressed as 100, 500, 1000, or 10a is arbitrarily determined by the apparatus. Is the value of
However, the amount of change is proportional to the actual amount of received light.

Each setting can be performed by selecting from manual sensing setting that is manually input and set each time, and a registered area mode in which a registered area is registered in advance.
Manual sensing setting is performed by pointing a setting value in the sensing setting field 28 of the sensing setting screen 27 with a cursor and inputting a setting value or the like.

Creation of the registration area mode is performed by manual sensing setting, and then the registration area mode is created by clicking the area mode registration button 29. When the region mode registration button 29 is clicked, a name entry box is displayed, and an arbitrary name (for example, the name of a part to be measured) is input.
As shown in FIG. 5, when the selection button of the registration area selection unit 30 is clicked, the name of the registration area mode is displayed, and when the name is specified, the registration mode of that name ("area mode A" in FIG. 5) is selected. The set value is displayed in the sensing setting field 28. Setting values cannot be changed in this display.
When changing the setting value, the setting value in the sensing setting field 28 can be changed by clicking the setting change button 31.

  The measurement object has different light reception data values depending on the surface material, and the light reception data value can be specified by the surface material. A light reception data value setting unit (material) 32 for which the measurement location has been confirmed is provided so that the light reception data value of the measurement location can be set by selecting the surface material.

The setting form is not limited to the above.
Only manual sensing setting or registration area mode (pre-registered) may be used.
Or the combination form of manual sensing setting and registration area mode may be sufficient.
Alternatively, a setting form such as a fixed setting value that cannot be partially changed may be used.

  The measurement objects T and T1 to T4 are 95 pins with a width (thickness) of 0.18 mm, measuring points t1, t2,. It is of the form.

Each setting or registration setting on the measuring object T in the first embodiment is as follows.
First light reception removal level value B1 = 100
First light reception removal level value B2 = 600
Reference surface confirmed received light data value E = 500
Light reception data value G = 2000 for which the measurement object has been confirmed
Number of measurement points = 95 points Reference surface measurement position K1 = 0.811: 5.000
Reference plane measurement position K2 = 0.811: -1.356

The light reception data value E for which the reference surface has been confirmed basically has no change, and may be fixedly set.
Since the change in the transmittance due to the deterioration of the transmissive film coated on the transmissive flat plate 3 can be considered, it is preferable to specify and set the light reception data value E with the reference plane confirmed each time.

In the measurement at the reference plane measurement position K1, the second removal level setting measurement, which is a measurement in a state where the second light reception removal level value B2 is set, is performed.
A first removal level setting measurement, which is a measurement in a state where the first light reception removal level value B1 is set, is performed,
When the second measured light reception data value C2 obtained during the second removal level setting measurement is a light reception data value larger than the second light reception removal level value B2 (C2> B2), it is determined as a defective reference surface data value. (Refer to the graph in FIG. 4),
The second measurement light reception data value C2 is a light reception data value smaller than the second light reception removal level value B2 (C2 <B2), and the first measurement light reception data obtained at the time of the first removal level setting measurement When the value C1 is a light reception data value (C1> B1) larger than the first light reception removal level value B1 (C2 <B2andC1> B1), the good reference surface data value is the light reception data value of the flat reference surface 2 (See the graphs in FIGS. 2 and 3) and the reference plane determination unit 16 makes the determination.
In the case of determination with the defective reference plane data value, the measurement operation is stopped and an alarm is issued.
In the case of the determination with the good reference plane data value, the measurement points t1, t2,... Tn are measured.
On the other hand, if the received light data value is smaller than the first received light removal level value B1, it is determined that the reference plane measurement is impossible, the measurement operation is stopped, and an alarm is issued.

The measurement points t1, t2,... Tn are measured with the second received light removal level value B2 set.
The measurement points t1, t2,... Tn are measured with the focus sensor focused on the measurement points t1, t2,. Since a flat reference surface (light reception data value≈500) is not focused and is not recognized, measurement without setting a removal level may be performed.
The measurement points t1, t2,..., Tn may be measured in a state where no light reception removal level value is set.

After the measurement at the measurement points t1, t2,... Tn is completed, it is determined whether the number of the measurement points t1, t2,... Tn is a predetermined number (here, 95 points) or not. Done in
When the number is a predetermined number, the number of measurement points is determined to be coincident, and when the number is not the predetermined number, the number of measurement points is determined to be unmatched.
If the measurement location mismatch determination is made, the measurement operation is stopped and an alarm is issued.
If the measurement location coincidence determination is made, the reference surface measurement position K2 is measured.

  In the measurement at the reference surface measurement position K2, the second removal level setting measurement, which is a measurement in a state where the second light reception removal level value B2 is set, is performed, and the first light reception removal level value B1 is set. The first removal level setting measurement, which is a measurement in a state where the second removal level is set, is measured, and the second measured light reception data value C2 at the time of the second removal level setting measurement is larger than the second light reception removal level value B2 (C2 > B2), it is determined as a defective reference plane data value, the second measured light reception data value C2 is smaller than the second light reception removal level value B2, and the first removal level setting measurement is performed. If the first measured light reception data value C1 is larger than the first light reception removal level value B1 (C2 <B2andC1> B1), the good reference surface data value that is the light reception data of the flat reference surface 2 The reference plane determination unit 16 makes the determination.

In the reference plane determination unit 16, the difference between the reference plane data value kd-1 at the reference plane measurement position K1 and the reference plane data value kd-2 at the reference plane measurement position K2 (hereinafter referred to as “reference plane data difference”) is an allowable value. If it is within (in this case, within 50 μm), it is determined as a good slope reference surface, and if it is greater than or equal to an allowable value, it is determined as a poor slope reference surface.
In the determination of the reference plane having a poor tilt, the measurement operation is stopped and an alarm is issued.
In the determination with respect to the good reference plane, the floating distance calculation unit 9 calculates the floating distances h1, h2,... Hn, and the floating distance data is output to the monitor 33, a printer (not shown), or the like.

At the reference surface measurement position K1, irradiation and measurement are performed five times at the time of the first removal level setting measurement, the average value thereof is set as the first measurement light reception data value C1, and the second removal level setting measurement is performed. At that time, five irradiations and measurements are performed, the average value of which is the second measured light reception data value C2, and the average value of C1 and C2 is the reference plane data value kd-1.
At the reference surface measurement position K2, irradiation and measurement are performed five times at the time of the first removal level setting measurement, the average value thereof is set as the first measurement light reception data value M1, and the second removal level setting measurement is performed. At that time, five irradiations and measurements are performed, the average value of which is the second measured light reception data value M2, and the average value of M1 and M2 is the reference plane data value kd-2.
The reference plane position K is a reference straight line composed of straight lines connecting the reference plane data value kd-1 and the reference plane data value kd-2. Even if the reference straight line is inclined from true horizontal, the floating distances h1, h2 ... hn is the floating distance from the position of the reference straight line (the floating distance h50 is the distance from the reference straight line position directly below the measurement location td50).

When the reference plane measurement positions are the three reference plane measurement positions K1, K2, and K3, a triangular plane that connects K1, K2, and K3 with straight lines is set as a virtual fresh water plane reference position. The floating distance from the corresponding location of the position is calculated.
When the reference plane measurement positions are the four reference plane measurement positions K1, K2, K3, and K4, the quadrilateral plane connecting K1, K2, K3, and K4 with straight lines is set as the virtual true horizontal plane reference position. The floating distance from the corresponding location of the horizontal plane reference position is calculated.

A graph example of the measurement result displayed on the monitor 33 is shown in FIG.
The horizontal line is the reference plane position K, and the vertical bars are the measurement location data td-1, td-2,... Td-n.
When the measurement location data is in close contact with the flat reference plane K, data below the K data line is output and the floating distance is 0.

Details of data analysis are shown in FIGS.
1. Move to the center position of the first measurement location set from the acquired data. (Fig. 11, upper diagram)
2. The range of the set measurement point interval is searched with the center position of the measurement point as the center, and the maximum value is obtained. (Fig.11, bottom diagram)
3. An identification line is created with 50% of the difference between the maximum value and the value of the flat reference surface. Search for points below the identification line from the center of the measurement location. (Fig. 12, upper diagram)
4). The measurement location data td-1... Is calculated by averaging 70% of the left and right positions (measurement location width) obtained from the center of the measurement location. (Fig. 12, bottom diagram)
5. The measurement is performed on all the measurement points t1 to t95, and the measurement point data td-1 to td-95 of the measurement points t1 to t95 are calculated.
When all the measurement location data td-1 to td-95 are 1 (the number on the right side of the graph), it is determined as abnormal and an abnormality notification is made.
In addition, when there is no td-1 or td-95 (including any one) on the left and right of the measurement location data, it is determined as abnormal and an abnormality notification is performed.

A processing flow of the first embodiment will be described with reference to FIG.
(1) The light detection 4 is stopped at the reference plane measurement position K1 (directly below).
(2) The second removal level B2 is set to 600 (including preset values) and measured to obtain the second measured light reception data value C2.
・ If C2 is smaller than B2 = 600 (C2 <B2), proceed to (3).
・ When C2 is larger than B2 = 600 (C2> B2), the measurement is stopped (abnormal end) and an abnormality notification (alarm) is given.
(3) The first removal level B1 is set to 100 (including pre-set) and measured to obtain the first measured light reception data value C1.
・ If C1 is greater than B1 = 100 (C1> B1), proceed to (4).
・ If C1 is smaller than B1 = 100 (C1 <B1), the measurement is stopped (abnormal termination) and an abnormality notification (alarm) is given.
(4) The reference plane data value kd-1 is acquired.
(5) The light detection 4 is stopped at the reference plane measurement position K2 (directly below).
(6) The second removal level B2 is set to 600 (including preset values) and measured to obtain the second measured light reception data value M2.
・ If M2 is smaller than B2 = 600 (M2 <B2), proceed to (7).
• If M2 is greater than B2 = 600 (M2> B2), stop measurement (abnormal termination) and send an abnormality notification (alarm).
(7) The second removal level B2 is set to 600 (including pre-set) and measured to obtain the first measured light reception data value M1.
・ If M1 is larger than B1 = 100 (M1> B1), proceed to (8).
・ If M1 is smaller than B1 = 100 (M1 <B1), the measurement is stopped (abnormal termination) and an abnormality notification (alarm) is given.
(8) The reference plane data value kd-2 is acquired.
(9) The reference surface position K is acquired from the reference surface data value kd-1 and the reference surface data value kd-2.
If the difference between the reference plane data value kd-1 and the reference plane data value kd-2 (hereinafter referred to as “reference plane data difference”) is within 50 μm, proceed to (10).
When the reference plane data difference between the reference plane data value kd-1 and the reference plane data value kd-2 is 50 μm or more, the measurement is stopped (abnormal end) and an abnormality notification (alarm) is given.
(10) The measurement location positions t1 to t95 are measured.
・ Proceed to (11) when all the measurement location t1 to t95 exist.
If there is no measurement location t1 to t95, the measurement is stopped (abnormal termination) and an abnormality notification (alarm) is made.
(11) Perform data analysis.
(12) Floating distances h1, h2,... Hn are calculated.

(C2 <B2) indicates that there may be a reflected light beam from the reference surface at the reference surface measurement position K2.
Since (C2> B2) indicates that there is a portion that reflects more strongly than the reference surface at the reference surface measurement position K2, it indicates that it is a defective reference surface data value.
(C1> B1) indicates that there may be a reflected light beam from the reference surface at the reference surface measurement position K2.
Since (C1 <B1) indicates that the reflected light beam is weaker than the reference surface at the reference surface measurement position K2, it indicates a defective reference surface data value.
Therefore, (C2 <B2) and (C1> B1) indicate good reference plane data values.
The same applies to (M2 <B2), (M2> B2), (M1> B1), and (M1 <B1), and (M2 <B2andM1> B1) is a good reference plane data value. ing.

When the difference between the reference plane data of C1 and C2 exceeds (50 μm in the first embodiment), the difference between M1 and M2 exceeds the predetermined allowable range (50 μm in the first embodiment), in either case In step 1, the measurement is re-measured as a difference in reference plane data value difference or the measurement is stopped and an alarm is issued.
If the reference surface data value difference is good, the measured light reception data value of either C1 or C2 is set as the reference surface data value kd-1, and the measurement light reception data value of either M1 or M2 is set as the reference surface data. The value kd-2 may be used.

On the flat reference surface 2 of the transparent flat plate 3, a positioning jig 20 made of a quartz glass member having a flat plate shape for positioning a measurement object is provided.
The positioning jig 20 is composed of a flat plate-shaped jig body 21 fixed to the transparent flat plate 3 and a rectangular opening (vertical through opening) provided in the jig body 21. Fixing for fixing the jig 20 by screwing it into the screw holes provided in the permeable flat plate 3 and the measurement object setting portions 22a and 22b for positioning and setting the two opening walls extending from the corners It has a configuration including screws 24a to 24d.
The measurement object setting unit is not limited to two places, and a plurality of measurement object setting parts may be provided.

The first light reception removal level value B1 and the second light reception removal level value B2 set by the first removal level setting unit 10 and the second removal level setting unit 11 are set each time depending on the type of the measurement object T. I do.
When the measuring object T is an apparatus that performs only one type, the first received light removal level value B1 and the second received light removal level value B2 are set in advance (settings cannot be changed). It's also good.

  The measurement at the reference surface measurement positions K1 and K2 is a measurement mode in which the measurement at the second light reception removal level value B2 is first, and the measurement at the first light reception removal level value B1 is after, the first light reception removal level value Any of the measurement forms in which the measurement at B1 is performed first and the measurement at the second light receiving removal level value B2 is performed later may be used.

Alternatively, the measurement target T may be measured after the measurement at the reference plane measurement positions K1 and K2 is completed.
The transparent flat plate is not limited to quartz glass, and includes a plastic plate.
Either a determination form in which the measurement point determination unit 13 performs determination and then the reference plane determination unit 14 determines, or a determination form in which the measurement point determination unit 14 performs determination and the reference plane determination unit 13 determines thereafter.

As described above, the flat reference surface measuring method of the flatness measuring apparatus described below is realized.
A transparent flat plate (3) on which the upper surface is a flat reference surface (2) and the object to be measured (T) is placed on the flat reference surface (2), located below the transparent flat plate (3) And a light detection unit (4) for irradiating a light beam toward the flat reference surface (2) and the measurement object (T) and receiving the reflected light beam, and the measurement object (T). A method for measuring a flat reference surface of a flatness measuring device that performs measurement at a reference surface measurement position (K1) where there is no measurement object (T) before starting measurement,
The measurement at the reference plane measurement position (K1) includes the first removal level setting measurement in which the first received light removal level value B1 is set, and the second in which the second received light removal level value B2 is set. Removal level setting measurement of
The first light reception removal level value B1 is a value (B1 <E) smaller than the reference surface confirmed received light data value E that has been measured and confirmed in advance by the reflected light beam of the flat reference surface (2). The light reception removal level value B2 of 2 is larger than the light reception data value E for which the reference surface has been confirmed, and is based on the light reception data value G for which the measurement object (T) has been confirmed by measuring the reflected light of the measurement object (T) in advance. Is also a small value (E <B2 <G),
When the second measured light reception data value C2 obtained by the second removal level setting measurement is larger than the second light reception removal level value B2 (C2> B2), Judgment,
The second measurement light reception data value C2 is a value smaller than the second light reception removal level value B2 (C2 <B2), and the first measurement obtained by the first removal level setting measurement. When the light reception data value C1 is greater than the first light reception removal level value B1 (C1> B1) (C2 <B2andC1> B1), the flat reference surface is determined as a good reference surface data value. Measuring method.

In the second embodiment of the present invention shown in FIG. 14, the main difference from the first embodiment is that the processing steps are as follows.
Such processing steps will be described with reference to the processing flow of FIG.
(1) The light detection 4 is stopped at the reference plane measurement position K1 (directly below).
(2) The first measurement light reception data value C1 is acquired by setting the first removal level B1 = 100 (including preset values).
・ If C1 is larger than B1 = 100 (C1> B1), proceed to (3).
・ If C1 is smaller than B1 = 100 (C1 <B1), the measurement is stopped (abnormal termination) and an abnormality notification (alarm) is given.
(3) The second removal level B2 is set to 600 (including preset values) and measured to obtain the second measured light reception data value C2.
・ If C2 is smaller than B2 = 600 (C2 <B2), proceed to (4).
・ When C2 is larger than B2 = 600 (C2> B2), the measurement is stopped (abnormal end) and an abnormality notification (alarm) is given.
(4) The reference plane data value kd-1 is acquired.
(5) The measurement location positions t1 to t95 are measured.
・ Proceed to (11) when all the measurement location t1 to t95 exist.
If there is no measurement location t1 to t95, the measurement is stopped (abnormal termination) and an abnormality notification (alarm) is made.
(6) The light detection 4 is stopped at the reference plane measurement position K2 position (directly below).
(7) The first removal level B1 is set to 100 (including pre-set) and measured to obtain a first measured light reception data value M1.
・ If M1 is larger than B1 = 100 (M1> B1), proceed to (8).
・ If M1 is smaller than B1 = 100 (M1 <B1), the measurement is stopped (abnormal termination) and an abnormality notification (alarm) is given.
(8) The reference plane data value kd-2 is acquired.
(9) The reference surface position K is acquired from the reference surface data value kd-1 and the reference surface data value kd-2.
If the difference between the reference plane data value kd-1 and the reference plane data value kd-2 is within 50 μm, proceed to (10).
When the reference plane data difference between the reference plane data value kd-1 and the reference plane data value kd-2 is 50 μm or more, the measurement is stopped (abnormal end) and an abnormality notification (alarm) is performed.
The reference plane data value difference (50 μm in the first embodiment), which is an allowable range of the reference plane data value difference, is arbitrarily set (can be changed) by the reference plane data value difference setting unit 34. Or it is good also as a set value which is preset as a fixed value and cannot be changed.
(10) Perform data analysis.
(11) The floating distances h1, h2,... Hn are calculated.

15 and 16, the third embodiment of the present invention is mainly different from the first embodiment in that the measuring object set portions 22 a and 22 b provided in the positioning jig 20 and the jig main body 21 in a vertically penetrating manner are provided. In other words, a plurality of reference surface setting positions 23 are provided, which can set the reference surface measurement position K1 having a small hole shape (or a small concave shape).
Since the reference plane measurement position K1 can be set in the reference plane setting position 23 consisting of an opening in the vertical penetration form other than the measurement object set portions 22a and 22b or a small recess in the vertical penetration form, the measurement spot is outside the package. It is possible to measure an object to be measured within a package range that does not protrude.

The plurality of measurement objects T1 to Tn to be set include the same or different ones. Individual signs 36 for identifying each corner position may be written outside the corner of the measurement object set unit.
In the case of measurement of a plurality of sets of measurement objects, first, the second received light removal level value measurement and the second received light removal level value measurement are performed at all reference surface measurement positions (hereinafter referred to as “reference surface simultaneous measurement”). When the received light data value (measurement data) at the reference surface measurement position is determined to be a good reference surface data value, it is recommended that all measurement objects be measured (starting from the measurement of the reference surface measurement position). .
Alternatively, each reference surface position data obtained by the simultaneous measurement of the reference surface may be stored, and the measurement object may be measured immediately after the simultaneous measurement of the reference surface.

As a method for setting the measuring object T at a predetermined position, it is preferable to use a brush having a soft brush-like part with a thin hair such as a makeup brush (patching the cheek).
The measurement object provided with a brush-like part composed of a plurality of hair-like members or hairs, provided with a movable part for moving the brush-like part, and placed on the flat reference surface of the measurement object set part The measuring exercise is moved by the operation of the brush portion in the brushing state toward the two opening walls extending from the corners of the measuring object set portion. Thus, it is possible to set the measurement object in the brush application state in contact with the two opening walls.
For example, a light and small measurement object having a package size of 2 mm × 1 mm, for example, has a problem that it is likely to move away with a finger and not be in contact with the two opening walls.
A tool that consists of a large number of hair-like members or hairs that moves the measuring exercise toward the two-opening wall in a state where it is much weaker than the finger and in a state where the contact area of the brush tip is small From the state where the measurement object is applied to the two opening walls with the weak pressing and the small contact area, the measurement object is in contact with the two opening walls even if the brush part is moved away. It realizes that it can be surely set without moving.

  The present invention is mainly used in industries that use connectors for electronic parts and disciple parts.

T, T1, T2, T3, T4: measurement object,
t1, t2... tn: measurement points,
td-1, td-2,... td-n: measurement location data,
tf-1, tf-2,... tf-n: measurement location,
K: reference plane position,
K1: reference plane measurement position,
kd-1: reference plane data value,
K2: reference plane measurement position,
kd-2: reference plane data value,
h1, h2... hn: floating distance,
B1: First light reception removal level value B1,
B2: second received light removal level value B2,
C1, M1: first measurement light reception data value,
C2, M2: second measured light reception data value,
E: Received data value with reference plane confirmed,
G: Light reception data value for which the object to be measured has been confirmed,

1: flatness measuring device,
2: Flat reference plane,
3: Transparent flat plate,
4: Photodetector,
5: Reference plane measurement position setting section,
6: Reference plane measurement position setting section,
7: Reference plane position specifying part,
8: Measurement point position specifying part,
9: Floating distance calculation unit,
10: 1st removal level setting part,
11: Second removal level setting unit,
12: Measurement location number registration section,
13: Reference surface confirmed received light data value setting unit,
14: The received light data value setting unit for which the measurement object is confirmed
15: Control unit,
16: Reference plane determination unit,
17: Measurement location number determination unit,
18: Sensor moving means,
19: Observation room
20: positioning jig,
21: Jig body,
22a, 22b: measurement object set part,
23: Reference plane setting location,
24a to 24d: fixing screws,
25: Hot air supply unit,
26: temperature sensor,
27: Sensing setting unit,
28: Sensing setting field,
29: Area mode registration button,
30: Registration area selection section,
31: Setting change button,
32: Received light data value setting part (material) with confirmed measurement location,
33: Monitor
34: Reference plane data value difference setting unit,
35: Package,

Claims (4)

A transmissive flat plate on which the upper surface is a flat reference surface and the object to be measured is placed on the flat reference surface, and a light beam positioned below the transmissive flat plate and directed toward the flat reference surface and the measurement object A flatness measuring device that performs measurement at a reference plane measurement position where there is no measurement object before starting measurement of the measurement object. A method for measuring a flat reference surface,
The measurement at the reference surface measurement position includes a first removal level setting measurement in which the first received light removal level value B1 is set and a second removal level in which the second received light removal level value B2 is set. Set measurement and
The first light reception removal level value B1 is a value (B1 <E) smaller than the reference surface confirmed light reception data value E that has been confirmed by measuring the reflected light beam of the flat reference surface in advance. The removal level value B2 is larger than the reference plane confirmed light reception data value E, and smaller than the measurement target confirmed light reception data value G (E < B2 <G),
The second measurement light reception data value C2 is a value smaller than the second light reception removal level value B2 (C2 <B2), and the first measurement obtained by the first removal level setting measurement. When the light reception data value C1 is a value (C1> B1) larger than the first light reception removal level value B1 (C2 <B2andC1> B1), it is determined that the data is a good reference plane data value. Reference plane measurement method. A transmissive flat plate having an upper surface as a flat reference surface and placing an object to be measured on the flat reference surface;
A light detection unit that is positioned below the transmissive flat plate, irradiates the flat reference surface and the measurement object with a light beam, and receives the reflected light beam;
Before starting measurement of the measurement object, a reference surface measurement position setting unit that sets or presets a reference surface measurement position that is a measurement position of the flat reference surface at a place where the measurement object is not present; and ,
A reference surface position specifying unit for specifying a reference surface position which is a position of the flat reference surface from measurement data at the reference surface measurement position;
A measurement point position specifying unit for specifying a measurement point position which is the position of the measurement point from the measurement data of the measurement point of the measurement object;
A floating distance calculation unit that calculates a floating distance that is a separation distance of the measurement location from the reference surface position;
A first removal level setting unit that sets or presets the first received light removal level value B1,
A second removal level setting unit that sets or presets the second received light removal level value B2, and
The measurement at the reference surface measurement position includes a first removal level setting measurement in which the first received light removal level value B1 is set and a second removal level in which the second received light removal level value B2 is set. Set measurement and
The first light reception removal level value B1 is a value (B1 <E) smaller than the reference surface confirmed light reception data value E that has been confirmed by measuring the reflected light beam of the flat reference surface in advance. The removal level value B2 is larger than the reference plane confirmed light reception data value E, and smaller than the measurement target confirmed light reception data value G (E < B2 <G),
The second measurement light reception data value C2 is a value smaller than the second light reception removal level value B2 (C2 <B2), and the first measurement obtained by the first removal level setting measurement. When the light reception data value C1 is a value (C1> B1) larger than the first light reception removal level value B1 (C2 <B2andC1> B1), it is determined that the data is a good reference plane data value. Degree measuring device.   A positioning jig is provided on the permeable flat plate, the positioning jig is fixed on the transmissive flat plate, and a plurality of measurements including a rectangular opening provided in the jig main body. The flatness according to claim 2, further comprising an object setting unit, wherein the measurement object can be set against an opening wall of the measurement object setting unit. measuring device.   The jig body is provided with a measurement position setting portion capable of setting the reference surface measurement position including an opening in the vertical direction other than the measurement object setting portion or a recess in the vertical direction. The flatness measuring device according to claim 3.

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