JP2017530358A - 処理中のウェハの制御のための表面形状測定のための装置および方法 - Google Patents

処理中のウェハの制御のための表面形状測定のための装置および方法 Download PDF

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JP2017530358A
JP2017530358A JP2017516376A JP2017516376A JP2017530358A JP 2017530358 A JP2017530358 A JP 2017530358A JP 2017516376 A JP2017516376 A JP 2017516376A JP 2017516376 A JP2017516376 A JP 2017516376A JP 2017530358 A JP2017530358 A JP 2017530358A
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Japan
Prior art keywords
wafer
shape
imaging
field
shape measuring
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Pending
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JP2017516376A
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Japanese (ja)
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JP2017530358A5 (enExample
Inventor
ジル フレスケ
ジル フレスケ
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Fogale Nanotech SAS
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Fogale Nanotech SAS
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Publication of JP2017530358A publication Critical patent/JP2017530358A/ja
Publication of JP2017530358A5 publication Critical patent/JP2017530358A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02029—Combination with non-interferometric systems, i.e. for measuring the object
    • G01B9/0203—With imaging systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • H10P74/203—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8841—Illumination and detection on two sides of object

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2017516376A 2014-09-25 2015-09-18 処理中のウェハの制御のための表面形状測定のための装置および方法 Pending JP2017530358A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1459086A FR3026481B1 (fr) 2014-09-25 2014-09-25 Dispositif et procede de profilometrie de surface pour le controle de wafers en cours de process
FR1459086 2014-09-25
PCT/EP2015/071407 WO2016046072A1 (fr) 2014-09-25 2015-09-18 Dispositif et procede de profilometrie de surface pour le controle de wafers en cours de process

Publications (2)

Publication Number Publication Date
JP2017530358A true JP2017530358A (ja) 2017-10-12
JP2017530358A5 JP2017530358A5 (enExample) 2019-08-29

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017516376A Pending JP2017530358A (ja) 2014-09-25 2015-09-18 処理中のウェハの制御のための表面形状測定のための装置および方法

Country Status (9)

Country Link
US (1) US9958261B2 (enExample)
EP (1) EP3198220B1 (enExample)
JP (1) JP2017530358A (enExample)
KR (1) KR20170059450A (enExample)
CN (1) CN106796099B (enExample)
FR (1) FR3026481B1 (enExample)
SG (1) SG11201702440VA (enExample)
TW (1) TW201614191A (enExample)
WO (1) WO2016046072A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018066670A (ja) * 2016-10-20 2018-04-26 株式会社ミツトヨ クロマティック共焦点センサ
KR20200006363A (ko) * 2018-07-10 2020-01-20 울산과학기술원 라만-원자간력 현미경의 광축 얼라이너
KR20200006364A (ko) * 2018-07-10 2020-01-20 울산과학기술원 라만-원자간력 현미경

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US11562502B2 (en) 2015-11-09 2023-01-24 Cognex Corporation System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance
US10812778B1 (en) 2015-11-09 2020-10-20 Cognex Corporation System and method for calibrating one or more 3D sensors mounted on a moving manipulator
US10757394B1 (en) 2015-11-09 2020-08-25 Cognex Corporation System and method for calibrating a plurality of 3D sensors with respect to a motion conveyance
FR3045813B1 (fr) * 2015-12-22 2020-05-01 Unity Semiconductor Dispositif et procede de mesure de hauteur en presence de couches minces
FR3052869B1 (fr) * 2016-06-17 2018-06-22 Unity Semiconductor Dispositif de positionnement d'une plaquette de circuit integre, et appareil d'inspection d'une plaquette de circuit integre comprenant un tel dispositif de positionnement
CN109672878A (zh) * 2017-10-13 2019-04-23 康耐视公司 对校准物体两相对侧成像的视觉系统的场校准系统和方法
FR3077631B1 (fr) * 2018-02-05 2021-01-01 Unity Semiconductor Procede et dispositif d'inspection d'une surface d'un objet comportant des materiaux dissimilaires
US10782120B2 (en) * 2018-07-03 2020-09-22 Kla Corporation Dual-interferometry wafer thickness gauge
CN109916347A (zh) * 2019-04-16 2019-06-21 合肥工业大学 一种基于近红外低相干光掺杂硅晶片表面形貌测量方法
DE102019114167A1 (de) * 2019-05-27 2020-12-03 Precitec Optronik Gmbh Optische Messvorrichtung und Verfahren
FR3101702B1 (fr) * 2019-10-07 2021-11-19 Fogale Nanotech Dispositif et procédé de mesures d’imagerie et d’interférométrie
US12215966B2 (en) * 2019-12-06 2025-02-04 Applied Materials, Inc. Methods and systems of optical inspection of electronic device manufacturing machines
CN111664802A (zh) * 2020-06-03 2020-09-15 中国科学院西安光学精密机械研究所 基于动态定量相位成像的半导体晶圆表面形貌测量装置
US11519935B2 (en) * 2020-08-18 2022-12-06 Oxford Instruments Asylum Research, Inc. Atomic force microscope
US11521874B2 (en) * 2020-09-30 2022-12-06 Kla Corporation Systems and methods for determining measurement location in semiconductor wafer metrology
CN112857238B (zh) * 2021-04-16 2022-11-29 中国工程物理研究院机械制造工艺研究所 一种大口径平行平晶厚度分布的干涉测量方法
JP2024043634A (ja) * 2022-09-20 2024-04-02 株式会社ジャパンディスプレイ 計測方法及び計測装置

Citations (3)

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JP2008083059A (ja) * 2006-09-26 2008-04-10 David S Marx ウェーハの測定システム及び測定装置
JP2009049122A (ja) * 2007-08-17 2009-03-05 Fujifilm Corp 光半導体素子、該光半導体素子を用いた波長可変光源および光断層画像取得装置
US20120257213A1 (en) * 2011-04-06 2012-10-11 Precitec Optronik Gmbh Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer

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US6847458B2 (en) * 2003-03-20 2005-01-25 Phase Shift Technology, Inc. Method and apparatus for measuring the shape and thickness variation of polished opaque plates
US20070148792A1 (en) * 2005-12-27 2007-06-28 Marx David S Wafer measurement system and apparatus
DE102010015944B4 (de) * 2010-01-14 2016-07-28 Dusemund Pte. Ltd. Dünnungsvorrichtung mit einer Nassätzeinrichtung und einer Überwachungsvorrichtung sowie Verfahren für ein in-situ Messen von Waferdicken zum Überwachen eines Dünnens von Halbleiterwafern
FR2959305B1 (fr) * 2010-04-26 2014-09-05 Nanotec Solution Dispositif optique et procede d'inspection d'objets structures.
CN101915547B (zh) * 2010-07-28 2012-05-02 深圳市斯尔顿科技有限公司 一种时域oct测量的方法和时域oct系统
CN102713504B (zh) * 2010-12-17 2014-08-27 松下电器产业株式会社 表面形状测定方法及表面形状测定装置
FR2994734B1 (fr) 2012-08-21 2017-08-25 Fogale Nanotech Dispositif et procede pour faire des mesures dimensionnelles sur des objets multi-couches tels que des wafers.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008083059A (ja) * 2006-09-26 2008-04-10 David S Marx ウェーハの測定システム及び測定装置
JP2009049122A (ja) * 2007-08-17 2009-03-05 Fujifilm Corp 光半導体素子、該光半導体素子を用いた波長可変光源および光断層画像取得装置
US20120257213A1 (en) * 2011-04-06 2012-10-11 Precitec Optronik Gmbh Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018066670A (ja) * 2016-10-20 2018-04-26 株式会社ミツトヨ クロマティック共焦点センサ
KR20200006363A (ko) * 2018-07-10 2020-01-20 울산과학기술원 라만-원자간력 현미경의 광축 얼라이너
KR20200006364A (ko) * 2018-07-10 2020-01-20 울산과학기술원 라만-원자간력 현미경
KR102256790B1 (ko) * 2018-07-10 2021-05-28 울산과학기술원 라만-원자간력 현미경의 광축 얼라이너
KR102280558B1 (ko) * 2018-07-10 2021-07-23 울산과학기술원 라만-원자간력 현미경

Also Published As

Publication number Publication date
CN106796099B (zh) 2020-11-03
US9958261B2 (en) 2018-05-01
FR3026481B1 (fr) 2021-12-24
SG11201702440VA (en) 2017-04-27
WO2016046072A1 (fr) 2016-03-31
KR20170059450A (ko) 2017-05-30
CN106796099A (zh) 2017-05-31
US20170299376A1 (en) 2017-10-19
EP3198220C0 (fr) 2023-06-07
FR3026481A1 (fr) 2016-04-01
EP3198220A1 (fr) 2017-08-02
TW201614191A (en) 2016-04-16
EP3198220B1 (fr) 2023-06-07

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