JP2017517729A - エアロゾル質量センサ及びセンサ方法 - Google Patents

エアロゾル質量センサ及びセンサ方法 Download PDF

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Publication number
JP2017517729A
JP2017517729A JP2016568046A JP2016568046A JP2017517729A JP 2017517729 A JP2017517729 A JP 2017517729A JP 2016568046 A JP2016568046 A JP 2016568046A JP 2016568046 A JP2016568046 A JP 2016568046A JP 2017517729 A JP2017517729 A JP 2017517729A
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mass
sensor
heating
sensor element
aerosol
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Ceased
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JP2016568046A
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Japanese (ja)
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JP2017517729A5 (enExample
Inventor
コレイ カルカヤ
コレイ カルカヤ
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/04—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by removing a component, e.g. by evaporation, and weighing the remainder
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0637—Moving support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
    • G01N33/0068—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display using a computer specifically programmed
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N2001/222—Other features
    • G01N2001/2223—Other features aerosol sampling devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2016568046A 2014-06-10 2015-06-10 エアロゾル質量センサ及びセンサ方法 Ceased JP2017517729A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP14171818 2014-06-10
EP14171818.9 2014-06-10
PCT/EP2015/062872 WO2015189230A1 (en) 2014-06-10 2015-06-10 Aerosol mass sensor and sensing method

Publications (2)

Publication Number Publication Date
JP2017517729A true JP2017517729A (ja) 2017-06-29
JP2017517729A5 JP2017517729A5 (enExample) 2018-05-24

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JP2016568046A Ceased JP2017517729A (ja) 2014-06-10 2015-06-10 エアロゾル質量センサ及びセンサ方法

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US (1) US20170097255A1 (enExample)
EP (1) EP3155398A1 (enExample)
JP (1) JP2017517729A (enExample)
CN (1) CN106415235A (enExample)
RU (1) RU2017100035A (enExample)
WO (1) WO2015189230A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111830128A (zh) * 2019-04-23 2020-10-27 帕尔公司 飞机空气污染物分析仪和使用方法
CN111830129A (zh) * 2019-04-23 2020-10-27 帕尔公司 飞机空气污染物分析仪及其使用方法
JP2020185983A (ja) * 2019-04-23 2020-11-19 ポール・コーポレーションＰａｌｌ Ｃｏｒｐｏｒａｔｉｏｎ 航空機空気汚染物質収集装置及び使用方法
JP2020187112A (ja) * 2019-04-23 2020-11-19 ポール・コーポレーションＰａｌｌ Ｃｏｒｐｏｒａｔｉｏｎ 航空機空気汚染物質分析装置及び使用方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107144517A (zh) * 2017-04-26 2017-09-08 北京航空航天大学 颗粒物计数器
WO2019115688A1 (en) * 2017-12-15 2019-06-20 Ams Ag Integrated thermophoretic particulate matter sensors
TWI647435B (zh) * 2018-01-19 2019-01-11 國立清華大學 熱致動振盪式懸浮微粒感測裝置及懸浮微粒感測方法
US11181454B2 (en) 2018-01-26 2021-11-23 Massachusetts Institute Of Technology Physical and chemical characterization of aerosols with photonic waveguides
CN108844869B (zh) * 2018-06-06 2024-04-12 山西省生态环境监测和应急保障中心(山西省生态环境科学研究院) 一种烟尘在线采样及称重装置及方法
CN109060464A (zh) * 2018-09-29 2018-12-21 南京木达环保科技有限公司 用于重量法烟气湿度测量的采样器及测量装置
CN110231263B (zh) * 2019-05-23 2020-10-30 武汉大学 一种具有自清洁功能的pm2.5质量传感器及其制备方法
CA3149617A1 (en) 2019-08-02 2021-02-11 Cambridge Enterprise Limited Particle sensor and sensing method
KR102256445B1 (ko) * 2019-11-22 2021-05-27 (주)와이솔 먼지 탈착이 가능한 먼지 센서
CN111351733A (zh) * 2020-03-12 2020-06-30 中国科学院上海微系统与信息技术研究所 一种高精度热重分析仪
US12098984B2 (en) 2021-04-02 2024-09-24 Honeywell International Inc. Supply air contamination sensor
KR20230027634A (ko) 2021-08-19 2023-02-28 삼성전자주식회사 미세 먼지 측정 모듈 및 미세 먼지 측정 장치
CN114858961A (zh) * 2022-03-29 2022-08-05 中国科学院上海微系统与信息技术研究所 一种金属氧化物催化剂活性测试装置及测试方法
KR20240029443A (ko) * 2022-08-26 2024-03-05 삼성전자주식회사 센서 장치 및 센서 장치의 작동 방법
DE102023115387A1 (de) * 2023-06-13 2024-12-19 Testo SE & Co. KGaA Verfahren, Messvorrichtung und Verwendung einer Heizplatte, eines Partikelzählers und eines Luftqualitätsbestimmungs-Sensors zur Luftqualitätsbestimmung mit Hilfe von Aerosolpartikeln in einem Gasgemisch
CN119086203B (zh) * 2024-08-27 2025-08-22 中国计量科学研究院 一种滤膜基底颗粒物标准物质制备装置和方法
CN118730796B (zh) * 2024-09-02 2024-11-19 南京大学 石英晶体微天平、基于石英晶体微天平的检测方法及装置

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3653253A (en) * 1970-01-05 1972-04-04 Thermo Systems Inc Aerosol mass concentration spectrometer
JPS53114491A (en) * 1977-01-28 1978-10-05 Westinghouse Electric Corp Onnline method using particles analyzer
JPH01501168A (ja) * 1986-10-03 1989-04-20 ヒユーズ・エアクラフト・カンパニー 汚染分析装置
US5892141A (en) * 1995-11-21 1999-04-06 Sun Electric U.K. Limited Method and apparatus for analysis of particulate content of gases
JP2002089907A (ja) * 2000-09-18 2002-03-27 Mitsubishi Electric Corp 空気清浄機
JP2003065940A (ja) * 2001-06-12 2003-03-05 Matsushita Electric Works Ltd ダストセンサー及び空気清浄機
JP2003532056A (ja) * 2000-04-05 2003-10-28 ザ チャールズ スターク ドレイパー ラボラトリー インク 物質の質量を測定する装置及びその方法
US20050172735A1 (en) * 2003-11-13 2005-08-11 Booker David R. Apparatus for analysis of aerosols
WO2011062489A1 (en) * 2009-11-20 2011-05-26 Xensor Integration B.V. Thermogravimetric device with thermal actuator
US20120092175A1 (en) * 2010-10-15 2012-04-19 Adams Jesse D Pre-smoke Detector and System for Use in Early Detection of Developing Fires
JP2012154620A (ja) * 2004-08-11 2012-08-16 Koninkl Philips Electronics Nv 空気汚染センサシステム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7584649B2 (en) * 2006-06-02 2009-09-08 Board Of Trustees Of Michigan State University Sensor with microelectro-mechanical oscillators
CN101949562B (zh) * 2010-10-28 2013-03-13 江苏大学 一种多功能空气净化机及节能使用方法
CN102680349B (zh) * 2012-03-30 2016-03-30 北京安赛博技术有限公司 一种pm2.5的监测设备

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3653253A (en) * 1970-01-05 1972-04-04 Thermo Systems Inc Aerosol mass concentration spectrometer
JPS53114491A (en) * 1977-01-28 1978-10-05 Westinghouse Electric Corp Onnline method using particles analyzer
JPH01501168A (ja) * 1986-10-03 1989-04-20 ヒユーズ・エアクラフト・カンパニー 汚染分析装置
US5892141A (en) * 1995-11-21 1999-04-06 Sun Electric U.K. Limited Method and apparatus for analysis of particulate content of gases
JP2003532056A (ja) * 2000-04-05 2003-10-28 ザ チャールズ スターク ドレイパー ラボラトリー インク 物質の質量を測定する装置及びその方法
JP2002089907A (ja) * 2000-09-18 2002-03-27 Mitsubishi Electric Corp 空気清浄機
JP2003065940A (ja) * 2001-06-12 2003-03-05 Matsushita Electric Works Ltd ダストセンサー及び空気清浄機
US20050172735A1 (en) * 2003-11-13 2005-08-11 Booker David R. Apparatus for analysis of aerosols
JP2012154620A (ja) * 2004-08-11 2012-08-16 Koninkl Philips Electronics Nv 空気汚染センサシステム
WO2011062489A1 (en) * 2009-11-20 2011-05-26 Xensor Integration B.V. Thermogravimetric device with thermal actuator
US20120092175A1 (en) * 2010-10-15 2012-04-19 Adams Jesse D Pre-smoke Detector and System for Use in Early Detection of Developing Fires

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111830128A (zh) * 2019-04-23 2020-10-27 帕尔公司 飞机空气污染物分析仪和使用方法
CN111830129A (zh) * 2019-04-23 2020-10-27 帕尔公司 飞机空气污染物分析仪及其使用方法
JP2020185983A (ja) * 2019-04-23 2020-11-19 ポール・コーポレーションＰａｌｌ Ｃｏｒｐｏｒａｔｉｏｎ 航空機空気汚染物質収集装置及び使用方法
JP2020187112A (ja) * 2019-04-23 2020-11-19 ポール・コーポレーションＰａｌｌ Ｃｏｒｐｏｒａｔｉｏｎ 航空機空気汚染物質分析装置及び使用方法
JP2020187111A (ja) * 2019-04-23 2020-11-19 ポール・コーポレーションＰａｌｌ Ｃｏｒｐｏｒａｔｉｏｎ 航空機空気汚染物質分析装置及び使用方法
JP2020187113A (ja) * 2019-04-23 2020-11-19 ポール・コーポレーションＰａｌｌ Ｃｏｒｐｏｒａｔｉｏｎ 航空機空気汚染物質分析装置及び使用方法
US11243145B2 (en) 2019-04-23 2022-02-08 Pall Corporation Aircraft air contaminant analyzer and method of use
JP7052166B2 (ja) 2019-04-23 2022-04-12 ポール・コーポレーション 航空機空気汚染物質収集装置及び使用方法
US11460444B2 (en) 2019-04-23 2022-10-04 Pall Corporation Aircraft air contaminant analyzer and method of use
CN111830129B (zh) * 2019-04-23 2023-06-02 帕尔公司 飞机空气污染物分析仪及其使用方法
US11668677B2 (en) 2019-04-23 2023-06-06 Pall Corporation Aircraft air contaminant analyzer and method of use
CN111830128B (zh) * 2019-04-23 2023-06-23 帕尔公司 飞机空气污染物分析仪和使用方法

Also Published As

Publication number Publication date
CN106415235A (zh) 2017-02-15
US20170097255A1 (en) 2017-04-06
WO2015189230A1 (en) 2015-12-17
EP3155398A1 (en) 2017-04-19
RU2017100035A (ru) 2018-07-10

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