JP2017504966A - 撮像素子、および電子装置 - Google Patents
撮像素子、および電子装置 Download PDFInfo
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Abstract
Description
第1の実施の形態である光起電力型画素について、図面を参照しながら説明する。なお、各図面において共通する部位については適宜、同一の符号を付しているものとする。
絶縁性材料(SiO2,SiN,BSG,PSG,SiON等)
導電性半導体(例えば、PN接合ダイオード11がSiである場合には、P型領域31と逆導電型のn-Si等)
金属(P型領域31に対するオーミック電極、ショットキー電極)
次に、図12は、第1の実施の形態である光起電力型画素10を表面照射型撮像素子に適用した場合の構成例(以下、第2の構成例と称する)の断面図である。
図13に示された第3の構成例は、上述した第2の構成例の製造方法において、エッチング表面のSiを熱酸化した後に埋め込む材料を、SiO2からWやAlなどの金属に置き換えることによって製造することができる。
の構成例は、第7の構成例と同様に、隣接する光電変換領域に光起電力型画素61(光起電力型画素10に相当)と蓄積型画素62を配置している。また、第6の構成例と同様に、光電変換領域21と画素回路領域(MOS Tr.36等)が別基板(センサ基板56と回路基板57)上に形成され、光起電力を発生するN型領域32、および、蓄積型画素62のFDは、電極34と配線200によって回路基板57のMOS Tr.36aのゲートに接続される。
次に、第2の実施の形態である、蓄積型画素としても動作することができる光起電力型画素(以下、蓄積型兼光起電力型画素と称する)について説明する。
図36は、第2の実施の形態である蓄積型兼光起電力型画素70を表面照射型撮像素子に適用した場合の構成例(以下、第8の構成例と称する)の断面図である。
従来の蓄積型画素でオーバーフローバリアを形成する領域(P型領域32のうちの、N型基板51とN型領域32に挟まれた領域)には、P型中性領域が形成されるようにアクセプタ不純物を導入する。これにより、該第8の構成例を光起電力型画素として動作させた場合に、第1の実施の形態である光起電力型画素と同等の光起電力を生成することができる。
P型領域31と素子分離領域35bの界面付近の正孔濃度が所定濃度以上となるように、P型領域31にアクセプタ不純物を導入するか、または、素子分離領域35bのSiO2内に、負の固定電荷を生成する膜を埋め込む。該負の固定電荷を生成する膜としては、例えばハフニウム酸化膜を使用することができ、成膜方法には、化学気相成長法、スパッタリング法、原子層堆積法等を用いることができる。これにより、該第8の構成例を蓄積型画素として動作させた場合の暗電流を、従来の蓄積型画素と同等まで低減することができる。
次に、図38は、図31に示された蓄積型兼光起電力型画素70の等価回路におけるアンプ12に採用可能な第1の構成例を示している。
次に、図53は、図36に示された第8の構成例においてTG71をオンにした状態での照射光に対応するFD72の出力電圧のシミュレーション結果を示している。同図に示されるように、FD72の出力電圧は、照度に対して対数的に増加することが分かる。すなわち、第8の構成例が光起電力型画素としても動作していることがわかる。
図54は、光起電力型画素出力値を、同一画素、または近傍画素の蓄積型画素出力値を用いて較正する方法の概要を示している。
以上説明したように、第1および第2の実施の形態によれば、素子分離領域を設けたことにより、信号電荷の隣接画素への拡散を阻止することができる。
(1)
画素毎に照射光に応じて光起電力を発生する光電変換領域を有する光起電力型画素と、
隣接する画素それぞれの前記光電変換領域の間に、前記光電変換領域を実質的に取り囲む状態で設けられた素子分離領域と
を備える撮像素子。
(2)
前記素子分離領域は、前記光起電力型画素の信号電荷の隣接画素への拡散を阻止する材料により構成されている
前記(1)に記載の撮像素子。
(3)
前記光起電力型画素に隣接する位置に蓄積型画素を
さらに備える前記(1)または(2)に記載の撮像素子。
(4)
前記光電変換領域には、フォトセンサとしてPN接合ダイオードが形成されている
前記(1)から(3)のいずれかに記載の撮像素子。
(5)
前記光起電力型画素は、さらに、転送ゲートおよびフローティングディフュージョンを有し、蓄積型兼光起電力型画素として動作する
前記(1)から(4)のいずれかに記載の撮像素子。
(6)
前記蓄積型兼光起電力型画素に隣接する位置に蓄積型画素を
さらに備える前記(5)に記載の撮像素子。
(7)
前記光電変換領域、転送ゲート、およびフローティングディフュージョンを有する蓄積型兼光起電力型画素をさらに備え、
前記光起電力型画素と前記蓄積型兼光起電力型画素は隣接して形成されている
前記(1)から(4)のいずれかに記載の撮像素子。
(8)
各画素における前記光電変換領域と画素回路領域との間は絶縁されている
前記(1)から(7)のいずれかに記載の撮像素子。
(9)
撮像素子が搭載された電子装置において、
前記撮像素子は、
画素毎に照射光に応じて光起電力を発生する光電変換領域を有する光起電力型画素と、
隣接する画素それぞれの前記光電変換領域の間に、前記光電変換領域を実質的に取り囲む状態で設けられた素子分離領域と備える
電子装置。
Claims (9)
- 画素毎に照射光に応じて光起電力を発生する光電変換領域を有する光起電力型画素と、
隣接する画素それぞれの前記光電変換領域の間に、前記光電変換領域を実質的に取り囲む状態で設けられた素子分離領域と
を備える撮像素子。 - 前記素子分離領域は、前記光起電力型画素の信号電荷の隣接画素への拡散を阻止する材料により構成されている
請求項1に記載の撮像素子。 - 前記光起電力型画素に隣接する位置に蓄積型画素を
さらに備える請求項1に記載の撮像素子。 - 前記光電変換領域には、フォトセンサとしてPN接合ダイオードが形成されている
請求項1に記載の撮像素子。 - 前記光起電力型画素は、さらに、転送ゲートおよびフローティングディフュージョンを有し、蓄積型兼光起電力型画素として動作する
請求項4に記載の撮像素子。 - 前記蓄積型兼光起電力型画素に隣接する位置に蓄積型画素を
さらに備える請求項5に記載の撮像素子。 - 前記光電変換領域、転送ゲート、およびフローティングディフュージョンを有する蓄積型兼光起電力型画素をさらに備え、
前記光起電力型画素と前記蓄積型兼光起電力型画素は隣接して形成されている
請求項4に記載の撮像素子。 - 各画素における前記光電変換領域と画素回路領域との間は絶縁されている
請求項1に記載の撮像素子。 - 撮像素子が搭載された電子装置において、
前記撮像素子は、
画素毎に照射光に応じて光起電力を発生する光電変換領域を有する光起電力型画素と、
隣接する画素それぞれの前記光電変換領域の間に、前記光電変換領域を実質的に取り囲む状態で設けられた素子分離領域と備える
電子装置。
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