JP2017502592A - 超音波トランスデューサスタック - Google Patents
超音波トランスデューサスタック Download PDFInfo
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- JP2017502592A JP2017502592A JP2016542188A JP2016542188A JP2017502592A JP 2017502592 A JP2017502592 A JP 2017502592A JP 2016542188 A JP2016542188 A JP 2016542188A JP 2016542188 A JP2016542188 A JP 2016542188A JP 2017502592 A JP2017502592 A JP 2017502592A
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- ultrasonic transducer
- transducer stack
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- matching layer
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- 239000000463 material Substances 0.000 claims description 19
- 238000002608 intravascular ultrasound Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 141
- 239000004593 Epoxy Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 210000004351 coronary vessel Anatomy 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 201000004624 Dermatitis Diseases 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 208000010668 atopic eczema Diseases 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 229920001038 ethylene copolymer Polymers 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012285 ultrasound imaging Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/76—Medical, dental
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Abstract
Description
Claims (20)
- バッキング層と、
前記バッキング層の上に横たわる活性層であって、複数のテクスチャを含む表面を有する活性層と、
前記活性層の上に横たわる整合層であって、第1厚さ領域および第2厚さ領域を有し、前記第1厚さ領域は前記第2厚さ領域の厚さより大きな厚さを有し、前記第1厚さ領域が前記複数のテクスチャの中に延在し、前記第2厚さ領域が前記複数のテクスチャの中に延在しない整合層と
を含む超音波トランスデューサスタック。 - 前記第1厚さ領域が第1周波数と整合し、前記第2厚さ領域が第2周波数と整合し、前記第1周波数は前記第2周波数より高い、請求項1に記載の超音波トランスデューサスタック。
- 前記第1周波数が60MHzである、請求項1に記載の超音波トランスデューサスタック。
- 前記第2周波数が40MHzである、請求項1に記載の超音波トランスデューサスタック。
- 前記第1厚さ領域が3/4λの厚さを有し、前記第2厚さ領域が1/4λの厚さを有し、ここでλは所望の波長である、請求項1に記載の超音波トランスデューサスタック。
- 前記整合層が、1:1を超える第1厚さ領域/第2厚さ領域の比を有する、請求項1に記載の超音波トランスデューサスタック。
- 前記整合層が、1:1未満の第1厚さ領域/第2厚さ領域の比を有する、請求項1に記載の超音波トランスデューサスタック。
- 前記複数のテクスチャがそれぞれ円形状の表面テクスチャを有する、請求項1に記載の超音波トランスデューサスタック。
- 前記複数のテクスチャが円の列のパターンとして提供される、請求項8に記載の超音波トランスデューサスタック。
- 前記複数のテクスチャがそれぞれ街路状の表面テクスチャを有する、請求項1に記載の超音波トランスデューサスタック。
- 前記複数のテクスチャが、交差する街路のパターンとして提供される、請求項10に記載の超音波トランスデューサスタック。
- 前記複数のテクスチャが、交差しない街路のパターンとして提供される、請求項10に記載の超音波トランスデューサスタック。
- 前記複数のテクスチャがそれぞれ正方形の深さ形状を有する、請求項1に記載の超音波トランスデューサスタック。
- 前記複数のテクスチャがそれぞれ凹面の深さ形状を有する、請求項1に記載の超音波トランスデューサスタック。
- 前記整合層が第1整合層および第2整合層を含む、請求項1に記載の超音波トランスデューサスタック。
- 前記第1整合層が、前記複数のテクスチャの中に延在する延在部を画定し、前記第2整合層が前記複数のテクスチャの中に延在しない、請求項15に記載の超音波トランスデューサスタック。
- 前記第1整合層および前記第2整合層が同じ材料を含む、請求項15に記載の超音波トランスデューサスタック。
- 前記第1整合層および前記第2整合層が異なる材料を含む、請求項15に記載の超音波トランスデューサスタック。
- 前記超音波トランスデューサスタックがIVUSトランスデューサの一部である、請求項1に記載の超音波トランスデューサスタック。
- 超音波トランスデューサスタックを作製する方法であって、
(a)ウェハを形成するステップであって、
(i)バッキング層を提供するステップ、
(ii)前記バッキング層の上に横たわる活性層を提供するステップ、
(iii)前記活性層の表面に複数のテクスチャを形成するステップ、
(iv)前記活性層の前記表面の上に整合層を提供するステップであって、前記整合層が第1厚さ領域および第2厚さ領域を有し、前記第1厚さ領域が前記第2厚さ領域の厚さより大きな厚さを有し、前記第1厚さ領域が前記複数のテクスチャの中に延在し、前記第2厚さ領域が前記複数のテクスチャの中に延在しない、ステップ
を含むステップと、
(b)前記ウェハをセグメントに分割するステップであって、各セグメントが超音波トランスデューサスタックを形成するステップと
を含む方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019203976A JP6962989B2 (ja) | 2013-12-31 | 2019-11-11 | 超音波トランスデューサスタック |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/144,799 US9536511B2 (en) | 2013-12-31 | 2013-12-31 | Ultrasound transducer stack |
US14/144,799 | 2013-12-31 | ||
PCT/US2014/072514 WO2015116340A2 (en) | 2013-12-31 | 2014-12-29 | Ultrasound transducer stack |
Related Child Applications (1)
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JP2019203976A Division JP6962989B2 (ja) | 2013-12-31 | 2019-11-11 | 超音波トランスデューサスタック |
Publications (2)
Publication Number | Publication Date |
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JP2017502592A true JP2017502592A (ja) | 2017-01-19 |
JP2017502592A5 JP2017502592A5 (ja) | 2017-11-30 |
Family
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JP2016542188A Pending JP2017502592A (ja) | 2013-12-31 | 2014-12-29 | 超音波トランスデューサスタック |
JP2019203976A Active JP6962989B2 (ja) | 2013-12-31 | 2019-11-11 | 超音波トランスデューサスタック |
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Country Status (5)
Country | Link |
---|---|
US (1) | US9536511B2 (ja) |
EP (1) | EP3089828B1 (ja) |
JP (2) | JP2017502592A (ja) |
CN (1) | CN105848791A (ja) |
WO (1) | WO2015116340A2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106824733A (zh) * | 2017-01-11 | 2017-06-13 | 上海爱声生物医疗科技有限公司 | 一种匹配层优化的超声换能器及其制作方法 |
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JPH0730998A (ja) * | 1993-06-15 | 1995-01-31 | Hewlett Packard Co <Hp> | 超音波プローブ |
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2013
- 2013-12-31 US US14/144,799 patent/US9536511B2/en active Active
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2014
- 2014-12-29 EP EP14864979.1A patent/EP3089828B1/en active Active
- 2014-12-29 CN CN201480070753.8A patent/CN105848791A/zh active Pending
- 2014-12-29 WO PCT/US2014/072514 patent/WO2015116340A2/en active Application Filing
- 2014-12-29 JP JP2016542188A patent/JP2017502592A/ja active Pending
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2019
- 2019-11-11 JP JP2019203976A patent/JP6962989B2/ja active Active
Patent Citations (2)
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JPH0181100U (ja) * | 1987-11-20 | 1989-05-31 | ||
JPH0730998A (ja) * | 1993-06-15 | 1995-01-31 | Hewlett Packard Co <Hp> | 超音波プローブ |
Also Published As
Publication number | Publication date |
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CN105848791A (zh) | 2016-08-10 |
WO2015116340A9 (en) | 2015-10-08 |
US9536511B2 (en) | 2017-01-03 |
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WO2015116340A3 (en) | 2015-12-03 |
EP3089828A2 (en) | 2016-11-09 |
JP2020043579A (ja) | 2020-03-19 |
US20150182998A1 (en) | 2015-07-02 |
JP6962989B2 (ja) | 2021-11-05 |
EP3089828B1 (en) | 2017-11-15 |
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