JP2017502299A5 - - Google Patents

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Publication number
JP2017502299A5
JP2017502299A5 JP2016543028A JP2016543028A JP2017502299A5 JP 2017502299 A5 JP2017502299 A5 JP 2017502299A5 JP 2016543028 A JP2016543028 A JP 2016543028A JP 2016543028 A JP2016543028 A JP 2016543028A JP 2017502299 A5 JP2017502299 A5 JP 2017502299A5
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JP
Japan
Prior art keywords
vessel wall
base structure
temperature
processing vessel
temperature sensor
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JP2016543028A
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English (en)
Japanese (ja)
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JP2017502299A (ja
JP6408588B2 (ja
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Priority claimed from US14/140,784 external-priority patent/US9360377B2/en
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Publication of JP2017502299A5 publication Critical patent/JP2017502299A5/ja
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Publication of JP6408588B2 publication Critical patent/JP6408588B2/ja
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JP2016543028A 2013-12-26 2014-11-25 非侵入型温度測定アセンブリ Active JP6408588B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/140,784 US9360377B2 (en) 2013-12-26 2013-12-26 Non-intrusive temperature measurement assembly
US14/140,784 2013-12-26
PCT/US2014/067243 WO2015099933A1 (en) 2013-12-26 2014-11-25 Non-intrusive temperature measurement assembly

Publications (3)

Publication Number Publication Date
JP2017502299A JP2017502299A (ja) 2017-01-19
JP2017502299A5 true JP2017502299A5 (OSRAM) 2017-11-30
JP6408588B2 JP6408588B2 (ja) 2018-10-17

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Family Applications (1)

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JP2016543028A Active JP6408588B2 (ja) 2013-12-26 2014-11-25 非侵入型温度測定アセンブリ

Country Status (7)

Country Link
US (1) US9360377B2 (OSRAM)
EP (1) EP3087304B1 (OSRAM)
JP (1) JP6408588B2 (OSRAM)
CN (2) CN104748889B (OSRAM)
CA (1) CA2933495C (OSRAM)
RU (1) RU2618499C1 (OSRAM)
WO (1) WO2015099933A1 (OSRAM)

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