JP2017226061A - Guide roller for wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a guide roller capable of increasing the rigidity of a disk member, and capable of equalizing inertia as compared with a guide roller made of urethane rubber.SOLUTION: In a guide roller for a wire saw having a disk member 2, the disk member 2 comprises a bearing part 10 fixed to a rotary shaft S, an annular outer peripheral edge 20 around which a wire W is wound, and a connection part 30 for connecting the bearing part 10 with the outer peripheral edge part 20. The connection part 30 comprises a first connection surface part 31 positioned on one end side in the thickness direction L of the disk member 2 and a second connection surface part 32 positioned on the other end side in the thickness direction L. The first connection surface part 31 and the second connection surface part 32 are formed at positions separated respectively from a virtual plane P that passing through the center of the thickness of the disk member 2 and for which the thickness direction L is a normal.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a guide roller for a wire saw.

In a wire saw that cuts a workpiece such as a semiconductor material or a magnetic material with a wire, the traveling of the wire is guided by a plurality of guide rollers.
As a guide roller for a wire saw, there is a guide roller in which a disk member made of urethane rubber is attached to a metal rotating shaft. A guide groove is formed on the outer peripheral surface of the guide roller, and a wire is wound around the guide groove. By the way, in order to shorten the processing time in the wire saw, the wire traveling speed has been increased. When the traveling speed of the wire is increased, the rotational speed of the guide roller is increased. However, in the guide roller having the above-described configuration, the rigidity of the disk member is small, so that the disk member vibrates and hinders the traveling of the wire. was there.

  Therefore, there is a guide roller as shown in Patent Document 1 for suppressing vibration. In the guide roller of Patent Document 1, a mounting groove is formed on the outer peripheral surface of a metal disk member attached to the rotating shaft, and an annular outer peripheral member made of urethane rubber is fitted into the mounting groove, Guide grooves are formed on the outer peripheral surface. Since the disk member has higher rigidity than the urethane rubber disk member, it is possible to suppress vibration during high rotation.

Japanese Patent Laid-Open No. 10-286752

  In recent years, wires have become thinner in order to improve the processing accuracy in wire saws. Since the guide roller of Patent Document 1 includes a metal disk member, the weight of the disk member is large and inertia is increased. Therefore, there is a problem that the wire is cut when the guide roller is rotated and reversed.

  An object of the present invention is to solve the above-described problems and to provide a guide roller that can increase the rigidity of the disk member and can equalize the inertia as compared with a guide roller made of urethane rubber.

  In order to solve the above-described problems, the present invention is a wire saw guide roller that includes a disk member and guides the travel of a wire for workpiece processing, and the disk member is fixed to a rotating shaft. A bearing portion; an annular outer peripheral portion around which the wire is wound; and a connecting portion that connects the bearing portion and the outer peripheral portion, wherein the connecting portion is one end in the thickness direction of the disk member. A first connection surface portion located on the side and a second connection surface portion located on the other end side in the thickness direction, the first connection surface portion and the second connection surface portion being a thickness of the disk member. It is characterized in that it is formed at a position that passes through the center of the thickness and is separated from a virtual plane having the thickness direction as a normal line.

  According to the guide roller having the above-described configuration, the first connecting surface portion and the second connecting surface portion are disposed at positions separated from each other, so that the bending rigidity of the disk member can be increased. Furthermore, since a space is formed between the first connection surface portion and the virtual plane and between the second connection surface portion and the virtual plane, it can be thinned, and the weight of the disk member can be reduced. Inertia can be made equivalent compared to guide rollers made of urethane rubber.

  In the guide roller of the present invention, the first connection surface portion and the second connection surface portion are alternately arranged along the circumferential direction of the disk member, and the first connection surface portion and the second connection surface portion that are adjacent to each other. What is connected with the plate-shaped connection part is preferable. According to the said structure, the further weight reduction of a disk member can be achieved by having arrange | positioned the 1st connection surface part and the 2nd connection surface part alternately. Moreover, the bending rigidity of a disc member can be enlarged by connecting the 1st connection surface part and the 2nd connection surface part with the connection part. Furthermore, since the disk member does not have a closed hollow portion, it can be constituted by one piece using a manufacturing method such as casting, forging or cutting. Therefore, it is possible to reduce the labor and cost for manufacturing.

  In the guide roller according to the present invention, it is preferable that a hole is formed at a position near the outer peripheral edge of the connection portion. According to the said structure, since the outer peripheral part of a disc member is reduced in weight, an inertia can be made small efficiently.

  Furthermore, in the guide roller of the present invention, the disk member is preferably made of metal or fiber reinforced plastic. According to the said structure, the bending rigidity of a disk member can be enlarged.

  In the guide roller of the present invention, the rigidity of the disk member can be increased as compared with the guide roller made of urethane rubber, and the inertia can be made equal to the guide roller by preventing increase of the inertia.

It is the perspective view which showed the guide roller which concerns on 1st embodiment of this invention. (A) is the side view which showed the guide roller which concerns on 1st embodiment of this invention, (b) is the sectional view on the AA line of Fig.2 (a). It is the BB sectional view taken on the line of Fig.2 (a). It is the side view which showed the state which hung the wire on the guide roller which concerns on 1st embodiment of this invention. (A) And (b) is sectional drawing which showed the modification of the connection part of a disc member. It is the partially broken perspective view which showed the guide roller which concerns on 2nd embodiment of this invention. (A) is the side view which showed the guide roller which concerns on 2nd embodiment of this invention, (b) is CC sectional view taken on the line of Fig.7 (a). (A) is the side part which showed the guide roller which concerns on 3rd embodiment of this invention, (b) is DD sectional view taken on the line of Fig.8 (a), (c) is E- of Fig.8 (a). It is E line sectional drawing.

  The guide roller according to the first embodiment of the present invention will be described in detail with reference to the drawings as appropriate. The guide roller 1 of the present embodiment is used for a wire saw, and guides the traveling of a workpiece processing wire W as shown in FIG. The guide roller 1 of this embodiment includes a disk member 2 and an annular outer peripheral member 3.

  The outer peripheral member 3 is an annular member, and the outer peripheral member 3 of the present embodiment is configured by an elastic member made of urethane rubber. The outer peripheral member 3 is fitted on the outer peripheral surface of the disc member 2. A guide groove 4 is formed on the outer peripheral surface of the outer peripheral member 3. The guide groove 4 is a concave groove on which the wire W is hung. The guide groove 4 has a V-shaped cross section and is formed over the entire circumference of the outer circumferential surface of the outer circumferential member 3.

  As shown in FIGS. 1 and 2, the disk member 2 includes a bearing portion 10, an outer peripheral edge portion 20, and a connection portion 30. The disc member 2 is a disc made of a one-piece member made of an aluminum alloy, and the bearing portion 10, the outer peripheral edge portion 20, and the connection portion 30 are integrally formed.

  The bearing portion 10 is a portion fixed to the rotating shaft S (see FIG. 4) and has a disk shape with a predetermined thickness in order to ensure bearing strength. A circular center hole 11 passes through the center portion of the bearing portion 10. The rotation shaft S is inserted through the center hole 11 (see FIG. 4). Around the center hole 11, a plurality (four in the present embodiment) of mounting holes 12 pass therethrough. The mounting holes 12 are arranged at equal intervals along the circumferential direction of the center hole 11. As shown in FIG. 4, in each attachment hole 12, a bolt B inserted through the hole S <b> 2 of the flange portion S <b> 1 of the rotation shaft S is inserted and attached. In this way, the bearing portion 10 of the guide roller 1 is fixed to the rotating shaft S.

  The outer peripheral edge 20 is a portion around which the wire W is wound via the outer peripheral member 3 and has an annular shape. A concave groove 21 is formed on the outer peripheral surface of the outer peripheral edge 20 over the entire circumference. The concave groove 21 includes a pair of side walls 22 and 22 that face each other, and a bottom plate 23. The outer peripheral member 3 is fitted into the concave groove 21. The thickness dimension of the outer peripheral edge portion 20 (the distance between the outer surfaces of the side walls 22 and 22) is larger than the thickness dimension of the bearing portion 10.

  As shown in FIG. 3, the connection portion 30 is a portion that connects the bearing portion 10 and the outer peripheral edge portion 20, and extends from the bearing portion 10 to the outer peripheral edge portion 20. The connection part 30 includes a first connection surface part 31, a second connection surface part 32, and a connection part 33.

  The 1st connection surface part 31 is located in the one end side (left side in FIG.2 (b)) of the thickness direction L (refer FIG.2, (b)) of the disc member 2. As shown in FIG. The first connection surface portion 31 has a flat plate shape, and is formed at a position that passes through the center of the thickness of the disk member 2 and is separated from an imaginary plane P having the thickness direction L as a normal line. The inner peripheral side end of the first connection surface portion 31 is continuous with the bearing portion 10. The surface of the first connection surface portion 31 is flush with one surface of the bearing portion 10. An outer peripheral side end portion of the first connection surface portion 31 is connected to the bottom plate 23 of the outer peripheral edge portion 20. A plurality of first connection surface portions 31 are formed at a predetermined central angle and spread radially from the bearing portion 10. A first hole 34 is formed in the first connection surface portion 31. The lightening hole 34 has a circular shape and is formed at a position near the outer peripheral edge.

  The 2nd connection surface part 32 is located in the other end side (the right side in (b) of FIG. 2) of the thickness direction L of a disc member. The second connection surface portion 32 has a flat plate shape and is formed at a position separated from the virtual plane P. The inner peripheral side end of the second connection surface portion 32 is continuous with the bearing portion 10. The surface of the second connection surface portion 32 is flush with the other surface of the bearing portion 10. The outer peripheral side end portion of the second connection surface portion 32 is connected to the bottom plate 23 of the outer peripheral edge portion 20. A plurality of second connection surface portions 32 are formed at the same predetermined central angle as the first connection surface portion 31, and spread radially from the bearing portion 10. The second connection surface portion 32 is also formed with a lightening hole 34. The lightening hole 34 has a circular shape like the first connection surface portion 31 and is formed at a position near the outer peripheral edge portion. The lightening holes 34 of the first connection surface portion 31 and the second connection surface portion 32 are arranged so that their centers are located on the same circumference.

  The first connection surface portions 31 and the second connection surface portions 32 are alternately arranged along the circumferential direction of the disk member 2. The 1st connection surface part 31 and the 2nd connection surface part 32 are located in a line over the perimeter of the connection part 30, and the connection part 30 becomes the cyclic | annular form with the unevenness | corrugation on the surface. That is, a recess 35 that opens to the other end side in the thickness direction L is formed on the back surface (surface facing the virtual plane P) of the first connection surface portion 31. A concave portion 36 that opens to one end side in the thickness direction L is formed on the back surface (surface facing the virtual plane P) side of the second connection surface portion 32.

  As shown in FIGS. 1 and 3, the connecting portion 33 is a portion that connects the first connecting surface portion 31 and the second connecting surface portion 32 and has a flat plate shape. The connecting portion 33 connects the side portion at one end in the circumferential direction of the first connection surface portion 31 adjacent in the circumferential direction and the side portion at the other end of the second connection surface portion 32. The connecting portion 33 has a rectangular shape that extends in the thickness direction L of the disk member 2 and extends along the side portions of the first connecting surface portion 31 and the second connecting surface portion 32. The connecting portion 33 is continuous perpendicularly to the first connection surface portion 31 and the second connection surface portion 32.

  In addition, in the connection part 30 of this embodiment, although the 1st connection surface part 31 and the connection part 33 are orthogonal, the 2nd connection surface part 32 and the connection part 33 are also orthogonal, The structure of a connection part is limited to the said structure. The configuration shown in FIG. 5 may be used instead.

  As shown to (a) of FIG. 5, the connection part 30a which concerns on another form is exhibiting the corrugated plate shape where a cross section is linear. Specifically, the first connection surface portion 31a, the second connection surface portion 32a, and the connection portion 33a have a planar shape, and the connection portion 33a is inclined from the direction orthogonal to the first connection surface portion 31a and the second connection surface portion 32a. doing. The connecting portion 33a is inclined so that both the angle formed by the first connecting surface portion 31a and the connecting portion 33a and the angle formed by the second connecting surface portion 32a and the connecting portion 33a are obtuse. On the back surface (surface facing the virtual plane P) of the first connection surface portion 31a, a trapezoidal concave section 35a that opens to the other end side in the thickness direction L is formed. On the back surface (surface facing the virtual plane P) of the second connection surface portion 32a, a trapezoidal concave section 36a that opens to one end side in the thickness direction L is formed.

  As shown in FIG. 5B, the connecting portion 30b according to still another embodiment has a corrugated shape with a curved cross section. Specifically, the first connection surface portion 31b and the second connection surface portion 32b have a circular arc shape in cross section, and the connection portion 33b has a planar shape. The connecting portion 33b is flush with the end portion of the first connection surface portion 31b and the end portion of the second connection surface portion 32b. On the back surface (surface facing the virtual plane P) side of the first connection surface portion 31b, a concave portion 35b having a bottom-like cross section that opens to the other end side in the thickness direction L is formed. On the back surface (surface facing the virtual plane P) side of the second connection surface portion 32b, a concave portion 36b having a bottom-like cross section that opens to one end side in the thickness direction L is formed.

  According to the guide roller 1 according to the first embodiment, the first connection surface portion 31 and the second connection surface portion 32 are arranged at positions separated from each other, and the thickness dimension of the connection portion 30 is increased. The bending rigidity of the member 2 can be increased. Furthermore, in this embodiment, since the 1st connection surface part 31 and the 2nd connection surface part 32 are connected in the connection part 33, the 1st connection surface part 31, the 2nd connection surface part 32, and the connection part 33 are integrated, The bending rigidity of the connection part 30 can be further increased.

  On the other hand, since spaces are formed between the first connection surface portion 31 and the virtual plane P, and between the second connection surface portion 32 and the virtual plane P, the space portion can be thinned. Therefore, since the weight of the disk member 2 can be reduced as compared with a solid aluminum disk member having the same thickness dimension, the inertia can be reduced.

  Further, in the present embodiment, the first connection surface portion 31 and the second connection surface portion 32 are alternately arranged, so that a recess 35 is formed on the back surface side of the first connection surface portion 31, and on the back surface side of the second connection surface portion 32. Since the concave portion 36 is formed, the disk member 2 can be further reduced in weight. Further, since the lightening holes 34 are formed in the first connection surface portion 31 and the second connection surface portion 32, the disk member 2 can be further reduced in weight. Therefore, the inertia can be reduced.

  Further, since the lightening holes 34 are formed at positions near the outer peripheral edge portions of the first connecting surface portion 31 and the second connecting surface portion 32, the outer peripheral edge portion can be reduced in weight. Therefore, the inertia can be efficiently reduced.

  Therefore, since the guide roller 1 of the present embodiment has high rigidity, even when the rotation speed of the guide roller 1 is high, vibration of the disk member 2 can be suppressed. Furthermore, although it is the guide roller 1 provided with the disk member 2 made from aluminum whose specific gravity is larger than urethane rubber, it can be set as an inertia equivalent to a guide roller made from urethane rubber. Thereby, even when the wire W is thin or when the rotation speed of the guide roller 1 is high, the wire W is prevented from being cut.

  Furthermore, since the disk member 2 of the present embodiment does not have a closed hollow portion, it can be formed of one piece by employing a manufacturing method such as casting, forging, or cutting. Therefore, it is possible to reduce the labor and cost for manufacturing.

  Next, the guide roller which concerns on 2nd embodiment is demonstrated, referring FIG. 6 and FIG. The disc member 102 of the guide roller according to the second embodiment is different from the first embodiment in the configuration of the connecting portion 130. The connection part 130 includes a first connection surface part 131 and a second connection surface part 132. In addition, since the other bearing part 10 and the outer periphery part 20 are the same as that of 1st embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted.

  The first connection surface portion 131 is located on one end side (the left side in FIG. 7B) in the thickness direction L of the disc member 102 (see FIG. 7B). The first connection surface portion 131 has an annular flat plate shape, passes through the center of the thickness of the disk member 102, and has a virtual plane P having a normal in the thickness direction L (see FIG. 7B). It is formed in the position away from. The inner peripheral side end of the first connection surface portion 131 is continuous with the bearing portion 10 over the entire circumference. The surface of the first connection surface portion 131 is flush with one surface of the bearing portion 10. The outer peripheral side end portion of the first connection surface portion 131 is connected to the bottom plate 23 of the outer peripheral edge portion 20 over the entire circumference.

  A first hole 134 is formed in the first connection surface portion 131. The lightening hole 134 has a circular shape and is formed at a position near the outer peripheral edge. A plurality of the lightening holes 134 are formed at predetermined intervals along the circumferential direction.

  The second connection surface portion 132 is located on the other end side in the thickness direction L of the disc member 102 (right side in FIG. 7B). The second connection surface portion 132 has an annular flat plate shape and is formed at a position separated from the virtual plane P. The inner peripheral side end of the second connection surface portion 132 is continuous with the bearing portion 10 over the entire circumference. The surface of the second connection surface portion 132 is flush with the other surface of the bearing portion 10. The outer peripheral side end of the second connection surface portion 132 is connected to the bottom plate 23 of the outer peripheral edge 20 over the entire circumference.

  The second connection surface portion 132 is also formed with a lightening hole 134. The lightening hole 134 has a circular shape like the first connection surface portion 131 and is formed at a position near the outer peripheral edge portion. A plurality of the lightening holes 134 are formed at predetermined intervals along the circumferential direction.

  The first connection surface portion 131 and the second connection surface portion 132 are arranged in parallel to face each other with a gap therebetween. A hollow portion 135 is formed between the first connection surface portion 131 and the second connection surface portion 132. The hollow portion 135 is partitioned by the first connection surface portion 131, the second connection surface portion 132, the outer peripheral surface of the bearing portion 10, and the bottom plate 23 of the outer peripheral edge portion 20. The disc member 102 is formed by combining two pieces of members divided in two on the virtual plane P, and has a structure including a hollow portion 135 inside thereof.

  According to the disk member 102 of the present embodiment, since the first connection surface portion 131 and the second connection surface portion 132 are annularly formed throughout, the rigidity of the disk member 102 can be further increased. . Furthermore, since the hollow part 135 is formed inside, the weight reduction of the disc member 102 can be achieved. Therefore, the inertia of the guide roller can be reduced.

  In addition, in the connection part 130 of this embodiment, although the 1st connection surface part 131 and the 2nd connection surface part 132 are mutually opposed and are not connected directly, a connection part is provided and the 1st connection surface part 131 and the 2nd connection are provided. The surface portion 132 may be connected. In this case, it is preferable that the connecting portion has a plate shape extending in the radial direction of the guide roller. If the connecting portion is provided, the rigidity of the disk member 102 can be further increased.

  Moreover, in the connection part 130 of this embodiment, although the 1st connection surface part 131 and the 2nd connection surface part 132 are mutually parallel, it is not limited to this. Even if it is the structure where a space | interval becomes narrow as a 1st connection surface part and a 2nd connection surface part go to an outer periphery.

  Next, a guide roller according to a third embodiment will be described with reference to FIG. The disk member 202 of the guide roller according to the third embodiment is different from the first embodiment and the second embodiment in the configuration of the connecting portion 230. The connecting portion 230 is configured by a spoke 239 that connects the bearing portion 10 and the outer peripheral edge portion 20. In addition, since the other bearing part 10 and the outer periphery part 20 are the same as that of 1st embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted.

  The spokes 239 have a hollow prism shape and spread radially from the bearing portion 10. Four spokes 239 are provided at a pitch of 90 °. The arrangement pitch and the number of the spokes 239 are not limited to four at 90 °, but are appropriately determined according to the required rigidity. The shape of the spokes 239 is not limited to a square cross section, and may be, for example, a circular cross section, a rectangle, or a polygon.

  As mentioned above, although the form for implementing this invention was demonstrated, this invention is not limited to the said embodiment, In the range which does not deviate from the meaning of this invention, a design change is possible suitably. In the said embodiment, although the disk members 2,102,202 are formed with the aluminum alloy, it is not limited to this. Other members such as titanium, magnesium, fiber reinforced plastic (FRP), carbon fiber reinforced plastic (CFRP), and other members having higher strength than urethane rubber may be used.

DESCRIPTION OF SYMBOLS 1 Guide roller 2 Disk member 10 Bearing part 20 Outer peripheral edge part 30 Connection part 31 1st connection surface part 32 2nd connection surface part 33 Connection part 34 Threading hole 102 Disk member 130 Connection part 131 1st connection surface part 132 2nd connection Surface part 134 Thickening hole 202 Disc member 230 Connection part L Thickness direction P Virtual plane W Wire

Claims (4)

A guide roller for a wire saw that includes a disk member and guides the traveling of a wire for workpiece processing,
The disk member includes a bearing portion fixed to a rotating shaft, an annular outer peripheral edge portion around which the wire is wound, and a connection portion that connects the bearing portion and the outer peripheral edge portion,
The connection portion includes a first connection surface portion located on one end side in the thickness direction of the disk member, and a second connection surface portion located on the other end side in the thickness direction,
The first connection surface portion and the second connection surface portion are formed at positions separated from virtual planes that pass through the center of the thickness of the disk member and have the thickness direction as a normal line. Guide roller for wire saw. Said 1st connection surface part and said 2nd connection surface part are alternately arrange | positioned along the circumferential direction of the said disk member, and said 1st connection surface part and said 2nd connection surface part adjacent are plate-shaped connection. The guide roller for a wire saw according to claim 1, wherein the guide rollers are connected at a portion. The guide roller for a wire saw according to claim 1 or 2, wherein a lightening hole is formed at a position near the outer peripheral edge portion of the connection portion. The guide roller for a wire saw according to any one of claims 1 to 3, wherein the disk member is made of metal or fiber reinforced plastic.

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