WO2017221388A1 - Wire saw guide roller - Google Patents

Wire saw guide roller Download PDF

Info

Publication number
WO2017221388A1
WO2017221388A1 PCT/JP2016/068734 JP2016068734W WO2017221388A1 WO 2017221388 A1 WO2017221388 A1 WO 2017221388A1 JP 2016068734 W JP2016068734 W JP 2016068734W WO 2017221388 A1 WO2017221388 A1 WO 2017221388A1
Authority
WO
WIPO (PCT)
Prior art keywords
outer peripheral
guide roller
mounting groove
wire
wire saw
Prior art date
Application number
PCT/JP2016/068734
Other languages
French (fr)
Japanese (ja)
Inventor
林　雅一
克彦 阿部
杉原　勉
和之 金井
Original Assignee
コマツＮｔｃ株式会社
株式会社フコク
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コマツＮｔｃ株式会社, 株式会社フコク filed Critical コマツＮｔｃ株式会社
Priority to JP2018523242A priority Critical patent/JPWO2017221388A1/en
Priority to PCT/JP2016/068734 priority patent/WO2017221388A1/en
Publication of WO2017221388A1 publication Critical patent/WO2017221388A1/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
    • B26D1/01—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
    • B26D1/46—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having an endless band-knife or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Definitions

  • the present invention relates to a guide roller for a wire saw.
  • a wire saw that cuts a workpiece such as a semiconductor material or a magnetic material with a wire
  • the traveling of the wire is guided by a plurality of guide rollers.
  • a guide roller for a wire saw a mounting groove is formed on the outer peripheral surface of a metal disc member, and an annular outer peripheral member made of urethane rubber is fitted into this mounting groove, and the guide groove is formed on the outer peripheral surface of the outer peripheral member. Is formed (see, for example, Patent Document 1).
  • the axial cross section of the mounting groove of the disk member is formed in a V shape, and the outer peripheral member is supported by the inclined surface of the mounting groove. Easy to shift in the width direction. Therefore, the conventional guide roller has a problem that the wire is likely to swing when the travel of the wire is guided by the guide groove of the outer peripheral member.
  • the present invention is a guide roller for a wire saw, and guides the traveling of a wire for workpiece machining.
  • the guide roller includes a disc member and an annular outer peripheral member fitted on the outer peripheral surface of the disc member.
  • the outer peripheral member is an elastic member, and the guide groove of the wire is formed over the entire outer peripheral surface of the outer peripheral member.
  • a mounting groove is formed on the outer peripheral surface of the disk member over the entire circumference.
  • the mounting groove has a bottom surface and a pair of inner side surfaces, and both the inner side surfaces are formed perpendicular to the central axis of the disk member. And the said outer peripheral member is press-fitted between the said both inner surfaces.
  • the outer peripheral member is supported from both sides in the groove width direction by both inner side surfaces of the mounting groove, the outer peripheral member is not easily displaced in the groove width direction in the mounting groove. Therefore, in the guide roller of the present invention, when the travel of the wire is guided by the guide groove of the outer peripheral member, it is possible to suppress the wire from swinging, so that it is possible to increase the processing accuracy of the workpiece by the wire saw. In the guide roller of the present invention, the travel of the wire can be stably guided by the guide groove, so that the speed of the travel of the wire can be increased and the wire can be thinned.
  • the outer peripheral member since the outer peripheral member is press-fitted into the attachment groove, the outer peripheral member can be reliably attached to the attachment groove.
  • both the inner surfaces of the mounting groove are parallel and the mounting groove has a simple shape, so that the mounting groove can be formed with high accuracy and the dimensional accuracy of the mounting groove is confirmed. Easy to do.
  • an inner peripheral surface of the outer peripheral member is fastened to the bottom surface of the mounting groove.
  • the outer peripheral member is supported from three directions by the bottom surface and both inner side surfaces of the mounting groove, the outer peripheral member can be further stabilized with respect to the mounting groove.
  • a pair of side walls are formed over the entire outer periphery of the disk member, and the mounting groove is formed between the side walls. And it is preferable to form the recessed part connected to the said mounting groove in the outer-periphery edge part of the said side wall.
  • the pin is inserted into the concave portion of the side wall from the side of the disk member, the tip of the pin is hooked on the outer peripheral member, and the outer peripheral member is pulled outward in the radial direction of the disk member. It can be easily removed from the mounting groove.
  • the guide roller according to the present invention can prevent the wire from swinging, the processing accuracy of the workpiece by the wire saw can be increased. Moreover, in the guide roller of the present invention, the traveling of the wire can be stably guided, so that the traveling of the wire can be speeded up and the wire can be thinned.
  • the guide roller 10 of the present embodiment is used for a wire saw, and guides the traveling of the wire W for workpiece machining as shown in FIG.
  • the guide roller 10 includes a disk member 20 and an annular outer peripheral member 30 fitted to the outer peripheral surface of the disk member 20, and a guide groove 31 is formed on the outer peripheral surface of the outer peripheral member 30. ing.
  • the disk member 20 is a disk made of aluminum alloy, and a circular center hole 21 passes through the center.
  • a circular center hole 21 passes through the center.
  • four mounting holes 22 penetrate.
  • the mounting holes 22 are arranged at equal intervals in the circumferential direction of the center hole 21.
  • the center hole 21 is a part through which the rotation axis S is inserted as shown in FIG. Further, a bolt B inserted through the hole S2 of the flange portion S1 of the rotating shaft S is attached to each mounting hole 22. In this way, the guide roller 10 is fixed to the rotation shaft S.
  • a pair of side walls 25, 25 are formed on both edges of the outer peripheral surface of the disk member 20 over the entire circumference. Both side walls 25, 25 are annular wall portions, and are arranged at intervals in the direction of the central axis A of the disk member 20. Both side walls 25, 25 are formed perpendicular to the central axis A of the disk member 20, as shown in FIG.
  • a mounting groove 26 is formed between the side walls 25, 25. As shown in FIG. 2, the mounting groove 26 is formed over the entire circumference of the outer peripheral surface of the disk member 20.
  • the mounting groove 26 is a concave groove having a rectangular axial section, and as shown in FIG. 3B, a bottom surface 26a and a pair of inner side surfaces 26b and 26b are formed.
  • the mounting groove 26 is formed such that the width of the bottom surface 26a is larger than the height of the inner surface 26b.
  • the bottom surface 26 a is a circumferential surface formed around the central axis A of the disk member 20.
  • the bottom surface 26a is formed in parallel to the central axis A.
  • Both inner side surfaces 26b, 26b are circumferential surfaces formed around the central axis A.
  • Both inner side surfaces 26b, 26b are formed perpendicular to the central axis A.
  • a concave portion 27 is formed on the outer peripheral edge of the side wall 25.
  • the recess 27 is a cut extending from the outer peripheral edge of the side wall 25 toward the inner side (center side) of the disk member 20 in the radial direction.
  • the recess 27 is open to one surface and the other surface of the side wall 25 and communicates with the mounting groove 31.
  • the bottom surface of the recess 27 is continuous with the bottom surface 26 a of the mounting groove 26.
  • each concave portion 27 on one side wall 25 and each concave portion 27 on the other side wall 25 face each other.
  • the outer peripheral member 30 is an annular member, and the outer peripheral member 30 of this embodiment is an elastic member made of urethane rubber. As shown in FIG. 1, the outer circumferential member 30 is fitted on the outer circumferential surface of the disk member 20 and is press-fitted into the mounting groove 26 of the disk member 20. On the outer circumferential surface of the outer circumferential member 30, a guide groove 31 having a V-shaped axial cross section is formed over the entire circumference. The guide groove 31 is a concave groove on which the wire W (see FIG. 4) is hung.
  • the inner diameter of the outer peripheral member 30 is slightly smaller than the outer diameter of the bottom surface 26 a of the mounting groove 26. Therefore, in a state where the outer peripheral member 30 is fitted in the mounting groove 26, the inner peripheral surface 30 a of the outer peripheral member 30 is fastened to the bottom surface 26 a of the mounting groove 26 as shown in FIG. Thus, the inner peripheral surface 30 a of the outer peripheral member 30 is pressed against the bottom surface 26 a of the mounting groove 26.
  • the width L1 in the direction (center axis A direction) perpendicular to the circumferential direction of the outer peripheral member 30 is the width L2 in the direction (center axis A direction) perpendicular to the circumferential direction of the mounting groove 26. It is formed slightly larger than. Therefore, in a state where the outer peripheral member 30 is fitted in the mounting groove 26, the outer peripheral member 30 is press-fitted between the inner side surfaces 26b, 26b of the mounting groove 26 as shown in FIG. Thus, the both side surfaces 30 b and 30 b of the outer peripheral member 30 are pressed against both the inner side surfaces 26 b and 26 b of the mounting groove 26.
  • the outer peripheral member 30 is clamped to the bottom surface 26a and sandwiched between both inner side surfaces 26b and 26b. Thereby, the outer peripheral member 30 is supported from the three directions of the bottom surface 26a of the mounting groove 26 and both inner side surfaces 26b and 26b. Thus, by pressing the outer peripheral member 30 into the mounting groove 26, the outer peripheral member 30 is less likely to be displaced in the groove width direction within the mounting groove 26.
  • the wire W when the travel of the wire W (see FIG. 4) is guided by the guide groove 31 of the outer peripheral member 30, the wire W can be prevented from swinging. Processing accuracy can be increased.
  • the travel of the wire W (see FIG. 4) can be stably guided by the guide groove 31, so that the travel of the wire W is increased and the wire W is thinned. can do.
  • the outer peripheral member 30 is press-fitted into the mounting groove 26, so that the outer peripheral member 30 can be securely attached to the mounting groove 26.
  • both the inner side surfaces 26b, 26b of the mounting groove 26 are parallel, and the mounting groove 26 is a simple rectangular concave groove. Therefore, the mounting groove 26 can be formed with high accuracy. In addition, it is easy to confirm the dimensional accuracy of the mounting groove 26.
  • a pin is inserted into the concave portion 27 of the side wall 25 from the side of the disk member 20, and the tip of the pin is hooked on the outer peripheral member 30,
  • the outer peripheral member 30 can be easily detached from the mounting groove 26 by pulling the outer peripheral member 30 outward in the radial direction of the disk member 20.
  • the guide roller 10 of this embodiment uses an outer peripheral member 30 made of urethane rubber.
  • the material of the outer peripheral member 30 is not limited, and various elastic members such as silicon rubber can be used. Can be used.
  • the disk member 20 made of aluminum alloy is used, but the material of the disk member 20 is not limited, and various metal materials and resin materials can be used. Moreover, it is preferable to reduce the weight of the disk member 20 by forming a plurality of openings in the disk member 20.
  • the three concave portions 27 are formed on the side wall 25, but the number of the concave portions 27 is not limited. Moreover, in the guide roller 10 of this embodiment, although the recessed part 27 is formed in the side walls 25 and 25, you may form the recessed part 27 only in one side wall 25. FIG.
  • the outer peripheral member 30 is supported by the bottom surface 26a of the mounting groove 26 and both inner side surfaces 26b, 26b, but the outer peripheral member 30 is supported by both inner side surfaces 26b, 26b.
  • the outer peripheral member 30 can be stabilized with respect to the mounting groove 26.

Abstract

A wire saw guide roller (10) for guiding traveling of a wire is provided with a circular plate member (20), and an annular outer circumferential member (30) fitted in the outer circumferential surface of the circular plate member (20). The outer circumferential member (30) is an elastic member, and a guide groove (31) for the wire is formed therein. Furthermore, an attaching groove (26) is formed in the circular plate member (20). In the attaching groove (26), a bottom surface (26a) and a pair of inner surfaces (26b, 26b) are formed, and both the inner surfaces (26b, 26b) are perpendicularly formed with respect to the center axis line of the circular plate member (20). The outer circumferential member (30) is press-fitted between the inner surfaces (26b, 26b). With such configuration, the outer circumferential member (30) fitted between the outer circumferential surfaces of the circular plate member (20) can be stabilized.

Description

ワイヤソー用のガイドローラGuide roller for wire saw
　本発明は、ワイヤソー用のガイドローラに関する。 The present invention relates to a guide roller for a wire saw.
　半導体材料や磁性材料などのワークをワイヤによって切断するワイヤソーでは、複数のガイドローラによってワイヤの走行を案内している。
　ワイヤソー用のガイドローラとしては、金属製の円板部材の外周面に取付溝が形成されており、この取付溝にウレタンゴム製の環状の外周部材が嵌め合わされ、外周部材の外周面にガイド溝が形成されているものがある（例えば、特許文献１参照）。 In a wire saw that cuts a workpiece such as a semiconductor material or a magnetic material with a wire, the traveling of the wire is guided by a plurality of guide rollers.
As a guide roller for a wire saw, a mounting groove is formed on the outer peripheral surface of a metal disc member, and an annular outer peripheral member made of urethane rubber is fitted into this mounting groove, and the guide groove is formed on the outer peripheral surface of the outer peripheral member. Is formed (see, for example, Patent Document 1).
特開平１０－２８６７５２号公報Japanese Patent Laid-Open No. 10-286752
　前記した従来のガイドローラでは、円板部材の取付溝の軸断面がＶ形状に形成されており、外周部材は取付溝の傾斜面に支持されているため、取付溝に対して外周部材が溝幅方向にずれ易い。したがって、従来のガイドローラでは、外周部材のガイド溝によってワイヤの走行を案内したときに、ワイヤが振れ易いという問題がある。 In the conventional guide roller described above, the axial cross section of the mounting groove of the disk member is formed in a V shape, and the outer peripheral member is supported by the inclined surface of the mounting groove. Easy to shift in the width direction. Therefore, the conventional guide roller has a problem that the wire is likely to swing when the travel of the wire is guided by the guide groove of the outer peripheral member.
　本発明は、前記した問題を解決し、円板部材の外周面に嵌め合わされた外周部材を安定させることができるガイドローラを提供することを課題とする。 It is an object of the present invention to provide a guide roller that can solve the above-described problems and can stabilize the outer peripheral member fitted to the outer peripheral surface of the disk member.
　前記課題を解決するため、本発明は、ワイヤソー用のガイドローラであって、ワーク加工用のワイヤの走行を案内するものである。前記ガイドローラは、円板部材と、前記円板部材の外周面に嵌め合わされた環状の外周部材と、を備えている。前記外周部材は、弾性部材であり、前記外周部材の外周面には、前記ワイヤのガイド溝が全周に亘って形成されている。また、前記円板部材の外周面には、取付溝が全周に亘って形成されている。前記取付溝には、底面および一対の内側面が形成され、前記両内側面は、前記円板部材の中心軸線に対して垂直に形成されている。そして、前記両内側面の間に前記外周部材が圧入されている。 In order to solve the above-described problems, the present invention is a guide roller for a wire saw, and guides the traveling of a wire for workpiece machining. The guide roller includes a disc member and an annular outer peripheral member fitted on the outer peripheral surface of the disc member. The outer peripheral member is an elastic member, and the guide groove of the wire is formed over the entire outer peripheral surface of the outer peripheral member. In addition, a mounting groove is formed on the outer peripheral surface of the disk member over the entire circumference. The mounting groove has a bottom surface and a pair of inner side surfaces, and both the inner side surfaces are formed perpendicular to the central axis of the disk member. And the said outer peripheral member is press-fitted between the said both inner surfaces.
　本発明のガイドローラでは、外周部材が取付溝の両内側面によって溝幅方向の両側から支持されるため、取付溝内で外周部材が溝幅方向にずれ難い。
　したがって、本発明のガイドローラでは、外周部材のガイド溝によってワイヤの走行を案内したときに、ワイヤが振れるのを抑えることができるため、ワイヤソーによるワークの加工精度を高めることができる。
　また、本発明のガイドローラでは、ガイド溝によってワイヤの走行を安定して案内することができるため、ワイヤの走行を高速化するとともに、ワイヤを細線化することができる。 In the guide roller of the present invention, since the outer peripheral member is supported from both sides in the groove width direction by both inner side surfaces of the mounting groove, the outer peripheral member is not easily displaced in the groove width direction in the mounting groove.
Therefore, in the guide roller of the present invention, when the travel of the wire is guided by the guide groove of the outer peripheral member, it is possible to suppress the wire from swinging, so that it is possible to increase the processing accuracy of the workpiece by the wire saw.
In the guide roller of the present invention, the travel of the wire can be stably guided by the guide groove, so that the speed of the travel of the wire can be increased and the wire can be thinned.
　また、本発明のガイドローラでは、取付溝に外周部材を圧入するため、取付溝に対して外周部材を確実に取り付けることができる。
　また、本発明のガイドローラでは、取付溝の両内側面が平行しており、取付溝が簡単な形状であるため、取付溝を精度良く形成することができるとともに、取付溝の寸法精度を確認し易い。 In the guide roller of the present invention, since the outer peripheral member is press-fitted into the attachment groove, the outer peripheral member can be reliably attached to the attachment groove.
In the guide roller of the present invention, both the inner surfaces of the mounting groove are parallel and the mounting groove has a simple shape, so that the mounting groove can be formed with high accuracy and the dimensional accuracy of the mounting groove is confirmed. Easy to do.
　前記したワイヤソー用のガイドローラにおいて、前記外周部材の内周面が前記取付溝の前記底面に締め付けられていることが好ましい。
　この構成では、外周部材が取付溝の底面および両内側面によって三方向から支持されるため、取付溝に対して外周部材をより安定させることができる。 In the above-described guide saw for a wire saw, it is preferable that an inner peripheral surface of the outer peripheral member is fastened to the bottom surface of the mounting groove.
In this configuration, since the outer peripheral member is supported from three directions by the bottom surface and both inner side surfaces of the mounting groove, the outer peripheral member can be further stabilized with respect to the mounting groove.
　前記したワイヤソー用のガイドローラにおいて、前記円板部材の外周面には、一対の側壁が全周に亘って形成され、前記取付溝は、前記両側壁の間に形成されている。そして、前記側壁の外周縁部には、前記取付溝に連通している凹部を形成することが好ましい。 In the above-described wire saw guide roller, a pair of side walls are formed over the entire outer periphery of the disk member, and the mounting groove is formed between the side walls. And it is preferable to form the recessed part connected to the said mounting groove in the outer-periphery edge part of the said side wall.
　この構成では、円板部材の側方から側壁の凹部にピンを挿入し、ピンの先端部を外周部材に引っ掛けて、外周部材を円板部材の径方向の外側に引くことで、外周部材を取付溝から容易に取り外すことができる。 In this configuration, the pin is inserted into the concave portion of the side wall from the side of the disk member, the tip of the pin is hooked on the outer peripheral member, and the outer peripheral member is pulled outward in the radial direction of the disk member. It can be easily removed from the mounting groove.
　本発明のガイドローラでは、ワイヤが振れるのを防ぐことができるため、ワイヤソーによるワークの加工精度を高めることができる。また、本発明のガイドローラでは、ワイヤの走行を安定して案内することができるため、ワイヤの走行を高速化するとともに、ワイヤを細線化することができる。 Since the guide roller according to the present invention can prevent the wire from swinging, the processing accuracy of the workpiece by the wire saw can be increased. Moreover, in the guide roller of the present invention, the traveling of the wire can be stably guided, so that the traveling of the wire can be speeded up and the wire can be thinned.
本発明の実施形態に係るガイドローラを示した斜視図である。It is the perspective view which showed the guide roller which concerns on embodiment of this invention. 本発明の実施形態に係るガイドローラを示した分解斜視図である。It is the disassembled perspective view which showed the guide roller which concerns on embodiment of this invention. 本発明の実施形態に係るガイドローラを示した図で、（ａ）は断面図、（ｂ）は円板部材に外周部材を組み付ける前の状態の断面図、（ｃ）は円板部材に外周部材を組み付けた状態の断面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is the figure which showed the guide roller which concerns on embodiment of this invention, (a) is sectional drawing, (b) is sectional drawing of the state before attaching an outer peripheral member to a disc member, (c) is outer periphery to a disc member. It is sectional drawing of the state which assembled | attached the member. 本発明の実施形態に係るガイドローラにワイヤを掛けた状態を示した側面図である。It is the side view which showed the state which hung the wire to the guide roller which concerns on embodiment of this invention.
　本発明の実施形態について、適宜図面を参照しながら詳細に説明する。
　本実施形態のガイドローラ１０は、ワイヤソーに用いられるものであり、図４に示すように、ワーク加工用のワイヤＷの走行を案内するものである。 Embodiments of the present invention will be described in detail with reference to the drawings as appropriate.
The guide roller 10 of the present embodiment is used for a wire saw, and guides the traveling of the wire W for workpiece machining as shown in FIG.
　本実施形態のガイドローラ１０は、円板部材２０と、円板部材２０の外周面に嵌め合わされている環状の外周部材３０と、を備え、外周部材３０の外周面にガイド溝３１が形成されている。 The guide roller 10 according to the present embodiment includes a disk member 20 and an annular outer peripheral member 30 fitted to the outer peripheral surface of the disk member 20, and a guide groove 31 is formed on the outer peripheral surface of the outer peripheral member 30. ing.
　円板部材２０は、図２に示すように、アルミニウム合金製の円板であり、中心部に円形の中心穴２１が貫通している。また、中心穴２１の周囲には、四つの取付穴２２が貫通している。各取付穴２２は、中心穴２１の周方向に等間隔に配置されている。 As shown in FIG. 2, the disk member 20 is a disk made of aluminum alloy, and a circular center hole 21 passes through the center. In addition, around the center hole 21, four mounting holes 22 penetrate. The mounting holes 22 are arranged at equal intervals in the circumferential direction of the center hole 21.
　中心穴２１は、図４に示すように、回転軸Ｓが挿通される部位である。また、各取付穴２２には、回転軸Ｓのフランジ部Ｓ１の穴部Ｓ２に挿通されたボルトＢが取り付けられる。このようにして、ガイドローラ１０は回転軸Ｓに固定されている。 The center hole 21 is a part through which the rotation axis S is inserted as shown in FIG. Further, a bolt B inserted through the hole S2 of the flange portion S1 of the rotating shaft S is attached to each mounting hole 22. In this way, the guide roller 10 is fixed to the rotation shaft S.
　円板部材２０の外周面の両縁部には、図２に示すように、一対の側壁２５，２５が全周に亘って形成されている。両側壁２５，２５は環状の壁部であり、円板部材２０の中心軸線Ａ方向に間隔を空けて配置されている。
　両側壁２５，２５は、図３（ｂ）に示すように、円板部材２０の中心軸線Ａに対して垂直に形成されている。 As shown in FIG. 2, a pair of side walls 25, 25 are formed on both edges of the outer peripheral surface of the disk member 20 over the entire circumference. Both side walls 25, 25 are annular wall portions, and are arranged at intervals in the direction of the central axis A of the disk member 20.
Both side walls 25, 25 are formed perpendicular to the central axis A of the disk member 20, as shown in FIG.
　両側壁２５，２５の間には、取付溝２６が形成されている。取付溝２６は、図２に示すように、円板部材２０の外周面の全周に亘って形成されている。
　取付溝２６は、軸断面が矩形の凹溝であり、図３（ｂ）に示すように、底面２６ａおよび一対の内側面２６ｂ，２６ｂが形成されている。取付溝２６は、内側面２６ｂの高さよりも、底面２６ａの幅が大きく形成されている。 A mounting groove 26 is formed between the side walls 25, 25. As shown in FIG. 2, the mounting groove 26 is formed over the entire circumference of the outer peripheral surface of the disk member 20.
The mounting groove 26 is a concave groove having a rectangular axial section, and as shown in FIG. 3B, a bottom surface 26a and a pair of inner side surfaces 26b and 26b are formed. The mounting groove 26 is formed such that the width of the bottom surface 26a is larger than the height of the inner surface 26b.
　底面２６ａは、円板部材２０の中心軸線Ａ回りに形成された円周面である。底面２６ａは、中心軸線Ａに対して平行に形成されている。
　両内側面２６ｂ，２６ｂは、中心軸線Ａ回りに形成された円周面である。両内側面２６ｂ，２６ｂは、中心軸線Ａに対して垂直に形成されている。 The bottom surface 26 a is a circumferential surface formed around the central axis A of the disk member 20. The bottom surface 26a is formed in parallel to the central axis A.
Both inner side surfaces 26b, 26b are circumferential surfaces formed around the central axis A. Both inner side surfaces 26b, 26b are formed perpendicular to the central axis A.
　側壁２５の外周縁部には、図３（ａ）に示すように、凹部２７が形成されている。凹部２７は、側壁２５の外周縁部から円板部材２０の径方向の内側（中心側）に向けて延びている切れ込みである。凹部２７は、側壁２５の一方の面および他方の面に開口しており、取付溝３１に連通している。また、凹部２７の底面は、取付溝２６の底面２６ａに連続している。 As shown in FIG. 3A, a concave portion 27 is formed on the outer peripheral edge of the side wall 25. The recess 27 is a cut extending from the outer peripheral edge of the side wall 25 toward the inner side (center side) of the disk member 20 in the radial direction. The recess 27 is open to one surface and the other surface of the side wall 25 and communicates with the mounting groove 31. The bottom surface of the recess 27 is continuous with the bottom surface 26 a of the mounting groove 26.
　側壁２５には、図２に示すように、三つの凹部２７が円板部材２０の周方向に等間隔に形成されている。また、一方の側壁２５の各凹部２７と、他方の側壁２５の各凹部２７とはそれぞれ対峙している。 As shown in FIG. 2, three concave portions 27 are formed in the side wall 25 at equal intervals in the circumferential direction of the disk member 20. In addition, each concave portion 27 on one side wall 25 and each concave portion 27 on the other side wall 25 face each other.
　外周部材３０は、円環状の部材であり、本実施形態の外周部材３０は、ウレタンゴム製の弾性部材である。
　外周部材３０は、図１に示すように、円板部材２０の外周面に嵌め合わされており、円板部材２０の取付溝２６内に圧入されている。
　外周部材３０の外周面には、軸断面がＶ形状のガイド溝３１が全周に亘って形成されている。ガイド溝３１は、ワイヤＷ（図４参照）が掛けられる凹溝である。 The outer peripheral member 30 is an annular member, and the outer peripheral member 30 of this embodiment is an elastic member made of urethane rubber.
As shown in FIG. 1, the outer circumferential member 30 is fitted on the outer circumferential surface of the disk member 20 and is press-fitted into the mounting groove 26 of the disk member 20.
On the outer circumferential surface of the outer circumferential member 30, a guide groove 31 having a V-shaped axial cross section is formed over the entire circumference. The guide groove 31 is a concave groove on which the wire W (see FIG. 4) is hung.
　外周部材３０の内径は、取付溝２６の底面２６ａの外径よりも僅かに小さく形成されている。
　したがって、外周部材３０を取付溝２６に嵌め合わせた状態では、図３（ｃ）に示すように、外周部材３０の内周面３０ａは、取付溝２６の底面２６ａに締め付けられている。
　このように、外周部材３０の内周面３０ａは、取付溝２６の底面２６ａに押し付けられている。 The inner diameter of the outer peripheral member 30 is slightly smaller than the outer diameter of the bottom surface 26 a of the mounting groove 26.
Therefore, in a state where the outer peripheral member 30 is fitted in the mounting groove 26, the inner peripheral surface 30 a of the outer peripheral member 30 is fastened to the bottom surface 26 a of the mounting groove 26 as shown in FIG.
Thus, the inner peripheral surface 30 a of the outer peripheral member 30 is pressed against the bottom surface 26 a of the mounting groove 26.
　図３（ｂ）に示すように、外周部材３０の周方向に直交する方向（中心軸線Ａ方向）の幅Ｌ１は、取付溝２６の周方向に直交する方向（中心軸線Ａ方向）の幅Ｌ２よりも僅かに大きく形成されている。
　したがって、外周部材３０を取付溝２６に嵌め合わせた状態では、図３（ｃ）に示すように、外周部材３０は、取付溝２６の両内側面２６ｂ，２６ｂの間に圧入されている。
　このように、外周部材３０の両側面３０ｂ，３０ｂは、取付溝２６の両内側面２６ｂ，２６ｂに押し付けられている。 As shown in FIG. 3B, the width L1 in the direction (center axis A direction) perpendicular to the circumferential direction of the outer peripheral member 30 is the width L2 in the direction (center axis A direction) perpendicular to the circumferential direction of the mounting groove 26. It is formed slightly larger than.
Therefore, in a state where the outer peripheral member 30 is fitted in the mounting groove 26, the outer peripheral member 30 is press-fitted between the inner side surfaces 26b, 26b of the mounting groove 26 as shown in FIG.
Thus, the both side surfaces 30 b and 30 b of the outer peripheral member 30 are pressed against both the inner side surfaces 26 b and 26 b of the mounting groove 26.
　以上のような本実施形態のガイドローラ１０では、図３（ｃ）に示すように、外周部材３０は、底面２６ａに締め付けられるとともに、両内側面２６ｂ，２６ｂの間に挟まれている。これにより、外周部材３０は、取付溝２６の底面２６ａおよび両内側面２６ｂ，２６ｂの三方向から支持されている。
　このように、外周部材３０を取付溝２６内に圧入することで、取付溝２６内で外周部材３０が溝幅方向にずれ難くなる。 In the guide roller 10 of the present embodiment as described above, as shown in FIG. 3C, the outer peripheral member 30 is clamped to the bottom surface 26a and sandwiched between both inner side surfaces 26b and 26b. Thereby, the outer peripheral member 30 is supported from the three directions of the bottom surface 26a of the mounting groove 26 and both inner side surfaces 26b and 26b.
Thus, by pressing the outer peripheral member 30 into the mounting groove 26, the outer peripheral member 30 is less likely to be displaced in the groove width direction within the mounting groove 26.
　したがって、本実施形態のガイドローラ１０では、外周部材３０のガイド溝３１によってワイヤＷ（図４参照）の走行を案内したときに、ワイヤＷが振れるのを防ぐことができるため、ワイヤソーによるワークの加工精度を高めることができる。 Therefore, in the guide roller 10 according to the present embodiment, when the travel of the wire W (see FIG. 4) is guided by the guide groove 31 of the outer peripheral member 30, the wire W can be prevented from swinging. Processing accuracy can be increased.
　また、本実施形態のガイドローラ１０では、ガイド溝３１によってワイヤＷ（図４参照）の走行を安定して案内することができるため、ワイヤＷの走行を高速化するとともに、ワイヤＷを細線化することができる。 Further, in the guide roller 10 of the present embodiment, the travel of the wire W (see FIG. 4) can be stably guided by the guide groove 31, so that the travel of the wire W is increased and the wire W is thinned. can do.
　本実施形態のガイドローラ１０では、取付溝２６内に外周部材３０を圧入するため、取付溝２６に対して外周部材３０を確実に取り付けることができる。 In the guide roller 10 of the present embodiment, the outer peripheral member 30 is press-fitted into the mounting groove 26, so that the outer peripheral member 30 can be securely attached to the mounting groove 26.
　本実施形態のガイドローラ１０は、取付溝２６の両内側面２６ｂ，２６ｂが平行しており、取付溝２６が簡単な矩形状の凹溝であるため、取付溝２６を精度良く形成することができるとともに、取付溝２６の寸法精度を確認し易い。 In the guide roller 10 of the present embodiment, both the inner side surfaces 26b, 26b of the mounting groove 26 are parallel, and the mounting groove 26 is a simple rectangular concave groove. Therefore, the mounting groove 26 can be formed with high accuracy. In addition, it is easy to confirm the dimensional accuracy of the mounting groove 26.
　本実施形態のガイドローラ１０では、図３（ａ）に示すように、円板部材２０の側方から側壁２５の凹部２７にピンを挿入し、ピンの先端部を外周部材３０に引っ掛けて、外周部材３０を円板部材２０の径方向の外側に引くことで、外周部材３０を取付溝２６から容易に取り外すことができる。 In the guide roller 10 of the present embodiment, as shown in FIG. 3A, a pin is inserted into the concave portion 27 of the side wall 25 from the side of the disk member 20, and the tip of the pin is hooked on the outer peripheral member 30, The outer peripheral member 30 can be easily detached from the mounting groove 26 by pulling the outer peripheral member 30 outward in the radial direction of the disk member 20.
　以上、本発明の実施形態について説明したが、本発明は前記実施形態に限定されることなく、その趣旨を逸脱しない範囲で適宜に変更が可能である。
　本実施形態のガイドローラ１０では、図２に示すように、ウレタンゴム製の外周部材３０を用いているが、外周部材３０の材料は限定されるものではなく、シリコンゴムなどの各種の弾性部材を用いることができる。 The embodiment of the present invention has been described above, but the present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the spirit of the present invention.
As shown in FIG. 2, the guide roller 10 of this embodiment uses an outer peripheral member 30 made of urethane rubber. However, the material of the outer peripheral member 30 is not limited, and various elastic members such as silicon rubber can be used. Can be used.
　本実施形態のガイドローラ１０では、アルミニウム合金製の円板部材２０を用いているが、円板部材２０の材料は限定されるものではなく、各種の金属材料および樹脂材料を用いることができる。
　また、円板部材２０に複数の開口部を形成することで、円板部材２０を軽量化することが好ましい。 In the guide roller 10 of the present embodiment, the disk member 20 made of aluminum alloy is used, but the material of the disk member 20 is not limited, and various metal materials and resin materials can be used.
Moreover, it is preferable to reduce the weight of the disk member 20 by forming a plurality of openings in the disk member 20.
　本実施形態のガイドローラ１０では、側壁２５に三つの凹部２７が形成されているが、凹部２７の数は限定されるものではない。また、本実施形態のガイドローラ１０では、両側壁２５，２５に凹部２７が形成されているが、一方の側壁２５のみに凹部２７を形成してもよい。 In the guide roller 10 of the present embodiment, the three concave portions 27 are formed on the side wall 25, but the number of the concave portions 27 is not limited. Moreover, in the guide roller 10 of this embodiment, although the recessed part 27 is formed in the side walls 25 and 25, you may form the recessed part 27 only in one side wall 25. FIG.
　本実施形態では、図３（ｃ）に示すように、外周部材３０が取付溝２６の底面２６ａおよび両内側面２６ｂ，２６ｂに支持されているが、外周部材３０を両内側面２６ｂ，２６ｂによって溝幅方向の両側から支持することで、取付溝２６に対して外周部材３０を安定させることもできる。 In the present embodiment, as shown in FIG. 3C, the outer peripheral member 30 is supported by the bottom surface 26a of the mounting groove 26 and both inner side surfaces 26b, 26b, but the outer peripheral member 30 is supported by both inner side surfaces 26b, 26b. By supporting from both sides in the groove width direction, the outer peripheral member 30 can be stabilized with respect to the mounting groove 26.
　１０　　ガイドローラ
　２０　　円板部材
　２１　　中心穴
　２２　　取付穴
　２５　　側壁
　２６　　取付溝
　２６ａ　底面
　２６ｂ　内側面
　２７　　凹部
　３０　　外周部材
　３０ａ　内周面
　３０ｂ　両側面
　３１　　ガイド溝
　Ａ　　　中心軸線
　Ｓ　　　回転軸
　Ｓ１　　フランジ部
　Ｗ　　　ワイヤ DESCRIPTION OF SYMBOLS 10 Guide roller 20 Disk member 21 Center hole 22 Mounting hole 25 Side wall 26 Mounting groove 26a Bottom face 26b Inner side surface 27 Recessed part 30 Outer peripheral member 30a Inner peripheral surface 30b Both side surfaces 31 Guide groove A Central axis S Rotating shaft S1 Flange part W Wire

Claims (3)

  1. 　ワーク加工用のワイヤの走行を案内するためのガイドローラであって、
    　円板部材と、
    　前記円板部材の外周面に嵌め合わされた環状の外周部材と、を備え、
    　前記外周部材は、弾性部材であり、
    　前記外周部材の外周面には、前記ワイヤのガイド溝が全周に亘って形成され、
    　前記円板部材の外周面には、取付溝が全周に亘って形成されており、
    　前記取付溝には、底面および一対の内側面が形成され、
    　前記両内側面は、前記円板部材の中心軸線に対して垂直に形成されており、
    　前記両内側面の間に前記外周部材が圧入されていることを特徴とするワイヤソー用のガイドローラ。     A guide roller for guiding the travel of a wire for workpiece machining,
    A disk member;
    An annular outer peripheral member fitted to the outer peripheral surface of the disk member,
    The outer peripheral member is an elastic member,
    On the outer circumferential surface of the outer circumferential member, the guide groove of the wire is formed over the entire circumference,
    On the outer peripheral surface of the disk member, mounting grooves are formed over the entire circumference,
    The mounting groove is formed with a bottom surface and a pair of inner surfaces,
    The inner surfaces are formed perpendicular to the central axis of the disc member,
    A guide roller for a wire saw, wherein the outer peripheral member is press-fitted between the inner surfaces.
  2. 　請求項１に記載のワイヤソー用のガイドローラであって、
    　前記外周部材の内周面が前記取付溝の前記底面に締め付けられていることを特徴とするワイヤソー用のガイドローラ。     A guide roller for a wire saw according to claim 1,
    A guide roller for a wire saw, wherein an inner peripheral surface of the outer peripheral member is fastened to the bottom surface of the mounting groove.
  3. 　請求項１または請求項２に記載のワイヤソー用のガイドローラであって、
    　前記円板部材の外周面には、一対の側壁が全周に亘って形成され、
    　前記取付溝は、前記両側壁の間に形成されており、
    　前記側壁の外周縁部には、前記取付溝に連通している凹部が形成されていることを特徴とするワイヤソー用のガイドローラ。     A guide roller for a wire saw according to claim 1 or 2,
    On the outer peripheral surface of the disk member, a pair of side walls are formed over the entire circumference,
    The mounting groove is formed between the side walls,
    A guide roller for a wire saw, wherein a concave portion communicating with the mounting groove is formed in an outer peripheral edge portion of the side wall.
PCT/JP2016/068734 2016-06-23 2016-06-23 Wire saw guide roller WO2017221388A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2018523242A JPWO2017221388A1 (en) 2016-06-23 2016-06-23 Guide roller for wire saw
PCT/JP2016/068734 WO2017221388A1 (en) 2016-06-23 2016-06-23 Wire saw guide roller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2016/068734 WO2017221388A1 (en) 2016-06-23 2016-06-23 Wire saw guide roller

Publications (1)

Publication Number Publication Date
WO2017221388A1 true WO2017221388A1 (en) 2017-12-28

Family

ID=60783223

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/068734 WO2017221388A1 (en) 2016-06-23 2016-06-23 Wire saw guide roller

Country Status (2)

Country Link
JP (1) JPWO2017221388A1 (en)
WO (1) WO2017221388A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009001242A1 (en) * 2007-06-27 2008-12-31 Simec S.P.A. Pulley for multi-wire machine tools
WO2011032603A1 (en) * 2009-09-18 2011-03-24 Applied Materials, Inc. Wire saw device and method for operating same
WO2011086403A1 (en) * 2010-01-18 2011-07-21 Applied Materials, Inc. Pulley tire, pulley wheel and pulley for a wire saw device, and method for assembling pulley
US20130061730A1 (en) * 2011-09-08 2013-03-14 Illinois Tool Works Inc. Wire saw for cutting pipe
JP2014079830A (en) * 2012-10-15 2014-05-08 Yasunaga Corp Wire saw device and manufacturing method of wafer using the same
CN204736348U (en) * 2015-05-29 2015-11-04 邢台晶龙电子材料有限公司 Silicon rod section guider for lathe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009001242A1 (en) * 2007-06-27 2008-12-31 Simec S.P.A. Pulley for multi-wire machine tools
WO2011032603A1 (en) * 2009-09-18 2011-03-24 Applied Materials, Inc. Wire saw device and method for operating same
WO2011086403A1 (en) * 2010-01-18 2011-07-21 Applied Materials, Inc. Pulley tire, pulley wheel and pulley for a wire saw device, and method for assembling pulley
US20130061730A1 (en) * 2011-09-08 2013-03-14 Illinois Tool Works Inc. Wire saw for cutting pipe
JP2014079830A (en) * 2012-10-15 2014-05-08 Yasunaga Corp Wire saw device and manufacturing method of wafer using the same
CN204736348U (en) * 2015-05-29 2015-11-04 邢台晶龙电子材料有限公司 Silicon rod section guider for lathe

Also Published As

Publication number Publication date
JPWO2017221388A1 (en) 2019-04-18

Similar Documents

Publication Publication Date Title
KR20080065601A (en) Wheel hub comprising axial recesses formed between the holes for wheel nuts
US11434964B2 (en) Brake lining for a railway vehicle and disk brake equipped with the same
JP2020063845A (en) Continuously variable transmission with pulleys and drive belt
US4896976A (en) Supporting disk for a supporting disk bearing
JP5777529B2 (en) Impeller, rotor provided with the same, and method for manufacturing impeller
JP2006142689A (en) Disc cutter
JP2007292287A (en) Bearing unit with resin made pulley
JP4409437B2 (en) Belt and tread drum
JP5706790B2 (en) brake disc
WO2017221388A1 (en) Wire saw guide roller
KR20080065597A (en) Wheel hub comprising axial recesses formed between the holes for wheel nuts
SE440730B (en) WHEEL DRIVE
JP2018189199A (en) Stator
JP2017226061A (en) Guide roller for wire saw
US20080132158A1 (en) Grinding wheel and wheel hub therefore
JP6447458B2 (en) Dust cover
CN110114591B (en) Drive belt for a continuously variable transmission with a transverse component and a ring set
JP6639813B2 (en) A pair of radial flanged bearings with rolling elements
KR101638021B1 (en) Clutch apparatus of transmission
KR102490245B1 (en) Clutch disc with axially extended spline teeth
JP5918069B2 (en) Belt mounting jig
US10767700B2 (en) Flanged inner ring for wheel hub bearings
CN110316610A (en) Guide reel
US2248382A (en) Grinding wheel and mounting therefor
AU2016101854A4 (en) Low-noise rotor core

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 2018523242

Country of ref document: JP

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16906305

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16906305

Country of ref document: EP

Kind code of ref document: A1