JP2017212257A - Substrate housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container in which a radio frequency identification (RF-ID) tag can be moved according to the position of an interrogator.SOLUTION: A substrate housing container 1 capable of housing a plurality of substrates comprises: a container body 2 having an opening at its one end; a lid 11 for sealing the opening; an identification member 3 having a container identification part; and an RF-ID holding part 4 for holding an RF-ID tag 5. The identification member 3 is detachably fitted to the container body 2. The RF-ID holding part 4 is coupled to the identification member 3, and it is also movable, without being attached or detached, between a first position A located on the inner side of a maximum outer shape of the substrate housing container 1 and a second position B located on the outer side of the maximum outer shape of the substrate housing container 1.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate storage container for storing a substrate such as a semiconductor wafer.

  Conventionally, in a semiconductor manufacturing process, a substrate storage container for storing a substrate such as a semiconductor wafer has been used for transportation and storage between factories and between processes. In the semiconductor manufacturing process, various devices identify the type, quantity, characteristics, etc. of substrates stored in the substrate storage container and efficiently manage the process. (Radio Frequency IDentification) Identification parts such as tags and infopads are attached.

  As a substrate storage container to which an identification component is attached, for example, Japanese Patent Application Laid-Open No. H10-228867 describes a substrate storage container having an identification component holding member having a base portion, a back wall portion and a side wall portion rising from the base portion. In this substrate storage container, a wall surface for displaying a barcode and a card case holding portion for holding a card case are provided on the back wall portion, and the base portion and / or the back wall portion is provided with an RF- It is described that at least one RF-ID holding member for holding an ID tag is formed.

JP 2008-068888 A

  However, although the SEMI standard defines the range of attachment of the RF-ID tag to the substrate storage container, the position of the interrogator (reader / writer) for the RF-ID tag differs depending on the factory and the processing apparatus. Therefore, simply attaching the RF-ID tag to a predetermined place on the substrate storage container may not be able to read or write information with another interrogator. For each factory or processing device that handles the substrate storage container, In accordance with the position of the interrogator (or the range in which the interrogator can be read or written), it is necessary to once remove the RF-ID tag from the substrate storage container and replace it with the corresponding position.

  Therefore, the present invention has been made in view of the above problems, and an object thereof is to provide a substrate storage container in which an RF-ID tag can be moved according to the position of an interrogator.

(1) One aspect of the present invention is a substrate storage container that can store a plurality of substrates, and includes a container body having an opening on one side, a lid that seals the opening, and a container identification unit. And an RF-ID holding member to which an RF-ID tag is attached. The identification member is detachably attached to the container main body, and the RF-ID holding member is on the bottom side of the container main body. A first position which is connected to the identification member so as to be rotatable from the rear side to the back side, and is located inside the maximum outer shape of the substrate storage container, and a second position which is outside the maximum outer shape of the substrate storage container It must be possible to move between them without being attached or detached.

(2) In the above aspect (1), the RF-ID holding member may be held at the first position when the substrate storage container is transported.

(3) In the above aspect (1) or (2), the RF-ID holding member may be fixed in the horizontal direction at the first position and fixed in the vertical direction at the second position. Good.

(4) In any one of the above aspects (1) to (3), at least one protrusion is provided on either one of the identification member or the RF-ID holding member, and the identification member or the RF -The other of the ID holding member may be provided with an engaging groove that is paired with the protrusion and engages with the protrusion.

(5) In any one of the above aspects (1) to (4), the identification member and the RF-ID holding member may be formed as separate members and rotatably connected by a connection pin. .

  ADVANTAGE OF THE INVENTION According to this invention, the board | substrate storage container which can move an RF-ID tag according to the position of an interrogator can be provided.

It is a perspective view of the back side which shows substrate storage container 1 concerning an embodiment of the present invention. 3 is a rear perspective view showing the container body 2. FIG. It is the perspective view from the lower part which shows the identification member 3, (a) The perspective view from the upper part. It is the (a) perspective view which shows RF-ID holding member 4, (b) The perspective view from another angle, (c) Sectional drawing cut | disconnected by the DD line | wire. It is a perspective view which shows the connection pin 6. FIG. It is a perspective view from the upper side which shows each state (a) to (c) of RF-ID holding member 4. FIG. It is a perspective view from the lower part which shows each state (a) to (c) of RF-ID holding member 4. FIG.

<< Embodiment of the Present Invention >>
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of the present specification, the same members are denoted by the same reference numerals throughout. The front and rear refer to the direction connecting the opening side and the back side of the container main body, and the left and right indicate the state viewed from the opening side of the container main body.

<Substrate storage container>
FIG. 1 is a rear perspective view showing a substrate storage container 1 according to an embodiment of the present invention, and FIG. 2 is a rear perspective view showing a container main body 2.
A substrate storage container 1 shown in FIG. 1 is capable of storing a plurality of substrates not shown, and includes a container main body 2 and a lid 11 (not shown).

[Container body]
The container body 2 shown in FIG. 2 has a substantially cubic shape having one opening (not shown) such as a front surface, a ceiling surface 2a, a back surface 2b, left and right side surfaces 2c, and a bottom surface 2d. The opening is sealed by a lid 11 described later.

  The ceiling surface 2a of the container body 2 may be provided with a robotic flange or the like that is suspended by a suspension device of an overhead traveling carriage that travels between and between processes.

  The back surface 2b of the container body 2 is located on the opposite side of the opening, and a pair of left and right protrusions 21 are formed from the bottom surface 2d to the ceiling surface 2a. The pair of protrusions 21 has a maximum outer shape on the back surface 2b side of the container body 2.

  The left and right side surfaces 2c of the container body 2 are provided with support members on the inner surfaces facing each other, and support members for horizontally supporting the peripheral edge of the substrate are formed at predetermined intervals in the vertical direction. Yes.

  An identification member 3 to be described later is detachably attached to the bottom surface 2d of the container body 2. Specifically, a pair of locking grooves 22 for fixing the identification member 3 are formed on the bottom surface 2d of the container body 2 so as to protrude from the bottom surface 2d.

[Lid]
The lid 11 (not shown) is attached so as to seal the opening of the container body 2. The lid 11 is provided with a support member that supports the peripheral edge of the substrate on the opening side of the container body 2. The lid 11 may include a locking mechanism that fixes the lid 11 to the container body 2 in a state where the container body 2 is sealed.

[Identification member]
FIGS. 3A and 3B show the identification member 3, (a) a perspective view from below and (b) a perspective view from above.
The identification member 3 shown in FIG. 3 has a container identification part such as an infopad plug attachment part, and is detachably attached to the container body 2. The identification member 3 is formed of a base portion 31, a pair of left and right side wall portions 32, and a vertical wall portion 33.

  The base 31 is plate-shaped, and a substantially U-shaped notch 31a is formed along the center line CL in the width direction. A plurality of through holes 31b having different radii are formed symmetrically about the center line CL in the width direction in the base 31 whose front is separated left and right by the notch 31a. The through-hole 31b has a concentric outer circle with a large diameter and an inner circle with a small diameter, and a step is formed between the outer circle and the inner circle. . This step portion fits a claw or the like provided on an info pad plug (not shown), and if necessary, the through hole 31b is closed when the info pad plug is attached.

  The side wall portion 32 is L-shaped in side view, and is erected from the left and right end portions of the base portion 31, and a locking claw 32 a is formed at the end portion. The engaging claw 32a engages with the engaging groove 22 of the container body 2, whereby the identification member 3 has the bottom surface 2d of the container body 2 so that the base 31 is substantially parallel to the bottom surface 2d of the container body 2. Mounted on.

  The vertical wall portion 33 is plate-shaped, and is erected so as to curve upward from the rear end portion of the base portion 31 and to curve backward. The vertical wall 33 has a connecting wall 34 formed on one side in a direction substantially orthogonal to the center line CL. A bearing hole 34a is formed in the connecting wall 34, and a connecting pin 6 described later is inserted therein. Further, at least two engagement grooves 35 are formed around the bearing hole 34a (see FIG. 3A).

[RF-ID holding member]
4A and 4B are a perspective view, a perspective view from another angle, and a cross-sectional view cut along line DD, showing the RF-ID holding member 4.
The RF-ID holding member 4 shown in FIG. 4 holds an RF-ID tag 5 (not shown). The RF-ID holding member 4 is formed in a substantially T shape by a holding member main body 41 and a bearing portion 42.

  The holding member main body 41 has a rectangular bar shape, and a recess 41a is formed on one surface (see FIG. 4A). The RF-ID tag 5 is inserted and fixed in the recess 41a. Note that the RF-ID tag 5 may be removed from the recess 41a by forming an opening penetrating to the recess 41a near both ends of the opposite surface and inserting a jig or the like through the opening.

  On the other hand, the bearing portion 42 is formed so as to incline and project at an angle θ1 toward the other side from a position displaced from the center of the surface opposite to the surface on which the concave portion 41a of the holding member body 41 is formed. Yes. In the present embodiment, the angle θ <b> 1 is 112 °, but can be arbitrarily set according to a position / posture described later for fixing the RF-ID holding member 4.

  The bearing portion 42 is formed with a bearing hole 42a that supports a connecting pin 6 described later (see FIG. 4C). In addition, a protrusion 43 is formed around the bearing hole 42a to engage with the engagement groove 35 (see FIG. 4B).

  The protrusion 43 is provided on the RF-ID holding member 4 and the engagement groove 35 is provided on the identification member 3. However, since the protrusion 43 and the engagement groove 35 are in a relative relationship as a pair, conversely The protrusion 43 may be provided on the identification member 3, and the engagement groove 35 may be provided on the RF-ID holding member 4.

[Connecting pin]
FIG. 5 is a perspective view showing the connecting pin 6.
The connecting pin 6 shown in FIG. 5 connects the identification member 3 and the RF-ID holding member 4. The connecting pin 6 has a head portion 6a and a shaft portion 6b. The head 6a is formed in a substantially disc shape. On the other hand, the shaft portion 6b is formed with a flange portion 6c at the tip, and is formed in a half state.

  Here, the container body 2, the lid body 11, the identification member 3, the RF-ID holding member 4, and the connecting pin 6 are formed by injection molding using a resin material. Examples of the resin material include conventionally known synthetic resins such as polycarbonate, polyether ether ketone, polyether imide, polybutylene terephthalate, polyacetal, liquid crystal polymer, and cycloolefin polymer, and alloy resins thereof. Moreover, you may use what added carbon powder, carbon fiber, a carbon nanotube, etc. to these resin, and provided electroconductivity.

<Fixed position and movement of RF-ID holding member>
6 is a perspective view from above showing each state (a) to (c) of the RF-ID holding member 4, and FIG. 7 is a state (a) to (c) of each state of the RF-ID holding member 4. FIG. It is a perspective view from the lower part which shows.

  As described above, the connecting pin 6 connects the identification member 3 and the RF-ID holding member 4, and the connecting pin 6 includes the bearing hole 34 a of the identification member 3 and the bearing hole of the RF-ID holding member 4. The RF-ID holding member 4 is rotatably supported by the shaft 42a. That is, the connection wall 34 of the identification member 3 and the bearing portion 42 of the RF-ID holding member 4 are sandwiched in this order between the head portion 6a and the flange portion 6c of the connection pin 6, and the shaft portion 6b It is pivotally supported so that it can rotate.

  By being connected in this way, the RF-ID holding member 4 can rotate from the bottom surface 2d side of the container body 2 to the back surface 2b side.

(A) First position A
The RF-ID holding member 4 is rotated and fixed to the bottom surface 2d side of the container body 2 until the longitudinal direction thereof coincides with the substantially horizontal direction. At this time, the RF-ID holding member 4 is positioned inside the maximum outer shape of the substrate storage container 1. This position is the first position A where the RF-ID holding member 4 is fixed (see FIGS. 6A and 7A).

(B) Rotational movement from the first position A to the second position B When the RF-ID holding member 4 is rotated from the first position A toward the back surface 2b side of the container body 2, the connecting pin 6 Since the axis line has a twisted position relationship with the longitudinal direction of the RF-ID holding member 4, the RF-ID holding member 4 rotates while being twisted from a substantially horizontal direction to a substantially vertical direction (FIG. 6 ( b) and FIG. 7B).

(C) Second position B
The RF-ID holding member 4 is rotated and fixed to the back surface 2b side of the container body 2 until the longitudinal direction thereof coincides with the substantially vertical direction. At this time, the RF-ID holding member 4 is located outside the maximum outer shape of the substrate storage container 1. This position is the second position B where the RF-ID holding member 4 is fixed (see FIGS. 6C and 7C).

  Therefore, the RF-ID holding member 4 is attached / detached between the first position A that is inside the maximum outer shape of the substrate storage container 1 and the second position B that is outside the maximum outer shape of the substrate storage container 1. It becomes possible to move without being done.

  When the substrate storage container 1 is transported, the RF-ID holding member 4 is fixed at the first position A. In the case of the first position A, the RF-ID holding member 4 is positioned on the inner side of the pair of protrusions 21 (the maximum outer shape of the substrate storage container 1) which is the maximum outer shape on the back surface 2b side of the container body 2. Thus, even when the substrate storage container 1 is packaged / packed, the RF-ID holding member 4 does not damage the packaging material or packaging material for transportation.

  Further, when the substrate storage container 1 is used in a processing apparatus, the RF-ID holding member 4 is fixed at the first position A or the second position B. According to the position of the interrogator for the RF-ID tag, the interrogator is fixed to the first position A or the second position B so that the interrogator can be connected to the RF-ID tag 5. Data can be read or written.

  However, the fixed position of the RF-ID holding member 4 is not limited to the position of this embodiment. For example, it may be fixed not only in a substantially vertical direction or a substantially horizontal direction but also in a direction inclined (twisted) by 45 ° or 60 ° from the horizontal direction. At that time, the protrusion 43 or the engagement groove 35 is provided corresponding to the fixing position of the RF-ID holding member 4.

  As described above, the substrate storage container 1 according to the embodiment of the present invention includes a container body 2 having an opening on one side, a lid 11 that seals the opening, an identification member 3 having a container identification unit, and an RF- An RF-ID holding member 4 that holds the ID tag 5, the identification member 3 is detachably attached to the container body 2, and the RF-ID holding member 4 is moved from the bottom side to the back side of the container body 2. Between the first position A that is rotatably connected to the identification member 3 and that is inside the maximum outer shape of the substrate storage container 1, and the second position B that is outside the maximum outer shape of the substrate storage container 1. It can be moved without being attached or detached.

  Thereby, the RF-ID holding member 4 is moved and fixed to the first position A that is inside the maximum outer shape of the substrate storage container 1 or the second position B that is outside the maximum outer shape of the substrate storage container 1. Therefore, the position of the RF-ID holding member 4 can be changed according to the position of the interrogator, and the information of the RF-ID tag 5 can be read or written. In addition, since the RF-ID holding member 4 moves between the first position A and the second position B by a rotational movement, the RF-ID holding member 4 is not removed, and is forgotten to be attached. It does not happen, and there is no mistake in attaching the RF-ID tag 5.

  In the present embodiment, the RF-ID holding member 4 is held at the first position A when the substrate storage container 1 is transported. Thereby, it can prevent that the RF-ID holding member 4 damages the packaging material and packaging material for transport.

  In the present embodiment, the RF-ID holding member 4 is fixed in the horizontal direction at the first position A, and fixed in the vertical direction at the second position B. Thereby, the area | region of the locus | trajectory which the RF-ID holding member 4 moves can be made small.

  In the present embodiment, at least one protrusion 43 is provided on either one of the identification member 3 or the RF-ID holding member 4, and the other of the identification member 3 or the RF-ID holding member 4 is paired with the protrusion 43. An engagement groove 35 that engages with the protrusion 43 is provided. Thereby, even if external force, such as vibration at the time of transportation, acts on the RF-ID holding member 4 due to the engagement between the protrusion 43 and the engaging groove 35, the position of the RF-ID holding member 4 may be displaced. Absent. Further, it can be confirmed that the projection 43 and the engagement groove 35 are accurately fixed to the first position A or the second position B by a click feeling.

  The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above-described embodiments, and various modifications may be made within the scope of the gist of the present invention described in the claims. It can be changed.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 11 Lid body 2 Container body, 2a Ceiling surface, 2b Back surface, 2c Side surface, 2d Bottom surface 21 Projection part 22 Locking groove 3 Identification member 31 Base part, 31a Notch part, 31b Through-hole 32 Side wall part, 32a Locking Claw 33 Vertical wall portion 34 Connecting wall, 34a Bearing hole 35 Engaging groove 4 RF-ID holding member 41 Holding member body, 41a Recess 42 Bearing portion, 42a Bearing hole 43 Projection 5 RF-ID tag 6 Connecting pin, 6a Head , 6b Shaft portion, 6c ridge portion A first position B second position CL center line

Claims (5)

A substrate storage container that can store a plurality of substrates,
A container body having an opening on one side;
A lid for sealing the opening;
An identification member having a container identification part;
An RF-ID holding member for attaching an RF-ID tag,
The identification member is detachably attached to the container body,
The RF-ID holding member is connected to the identification member so as to be rotatable from the bottom side to the back side of the container body,
It is movable without being attached or detached between a first position inside the maximum outer shape of the substrate storage container and a second position outside the maximum outer shape of the substrate storage container. Substrate storage container. The substrate storage container according to claim 1, wherein the RF-ID holding member is held at the first position when the substrate storage container is transported. The RF-ID holding member is
In the first position, fixed in the horizontal direction,
The substrate storage container according to claim 1, wherein the substrate storage container is fixed in a vertical direction at the second position. At least one protrusion is provided on either one of the identification member or the RF-ID holding member,
The engagement groove that is paired with the protrusion and engages with the protrusion is provided on the other of the identification member or the RF-ID holding member. Board storage container. 5. The substrate storage container according to claim 1, wherein the identification member and the RF-ID holding member are formed as separate members and are rotatably connected by a connection pin. .

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