JP2017212258A - Substrate housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container in which a radio frequency identification (RF-ID) tag can be moved according to the position of an interrogator.SOLUTION: A substrate housing container 1 capable of housing a plurality of substrates comprises: a container body 2 having an opening at its one end; a lid 11 for sealing the opening; an identification member 3 having a container identification part; and an RF-ID holding part 4 for holding an RF-ID tag 5. The identification member 3 is detachably fitted to the container body 2. The RF-ID holding part 4 is coupled to the identification member 3, and is also movable between a first position A where the RF-ID holding part 4 is horizontally arranged and a second position B where the RF-ID holding part 4 is vertically arranged.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a substrate storage container for storing a substrate such as a semiconductor wafer.

  Conventionally, in a semiconductor manufacturing process, a substrate storage container for storing a substrate such as a semiconductor wafer has been used for transportation and storage between factories and between processes. In the semiconductor manufacturing process, various devices identify the type, quantity, characteristics, etc. of substrates stored in the substrate storage container and efficiently manage the process. (Radio Frequency IDentification) Identification parts such as tags and infopads are attached.

  As a substrate storage container to which an identification component is attached, for example, Japanese Patent Application Laid-Open No. H10-228867 describes a substrate storage container having an identification component holding member having a base portion, a back wall portion and a side wall portion rising from the base portion. In this substrate storage container, a wall surface for displaying a barcode and a card case holding portion for holding a card case are provided on the back wall portion, and the base portion and / or the back wall portion is provided with an RF- It is described that at least one RF-ID holding member for holding an ID tag is formed.

JP 2008-068888 A

  However, although the SEMI standard defines the range of attachment of the RF-ID tag to the substrate storage container, the position of the interrogator (reader / writer) for the RF-ID tag differs depending on the factory and the processing apparatus. Therefore, simply attaching the RF-ID tag to a predetermined place on the substrate storage container may not be able to read or write information with another interrogator. For each factory or processing device that handles the substrate storage container, In accordance with the position of the interrogator (or the range in which the interrogator can be read or written), it is necessary to once remove the RF-ID tag from the substrate storage container and replace it with the corresponding position.

  Therefore, the present invention has been made in view of the above problems, and an object thereof is to provide a substrate storage container in which an RF-ID tag can be moved according to the position of an interrogator.

(1) One aspect of the present invention is a substrate storage container that can store a plurality of substrates, and includes a container body having an opening on one side, a lid that seals the opening, and a container identification unit. An identification member having an RF-ID tag, and an RF-ID holding member holding the RF-ID tag, wherein the identification member is detachably attached to the container body, and the RF-ID holding member is connected to the identification member In addition, the RF-ID holding member is movable between a first position where the RF-ID holding member is arranged in the horizontal direction and a second position where the RF-ID holding member is arranged in the vertical direction.

(2) In the aspect of the above (1), the first position may be provided on the bottom side of the container body, and the second position may be provided on the back side of the container body.

(3) In the above aspect (2), the RF-ID holding member may be held at the first position when the substrate storage container is transported.

(4) In any one aspect of the above (1) to (3), when the RF-ID holding member is held at the first position or the second position, a different position of the processing apparatus It may be possible to read or write data between the RF-ID tag interrogator and the RF-ID tag.

(5) In any one of the above aspects (1) to (4), the identification member is formed with a slide rail, and the RF-ID holding member is slidably engaged with the slide rail. An engaged portion may be formed.

(6) In any one aspect of the above (1) to (5), the identification member is a lock mechanism capable of fixing the RF-ID holding member to the first position and the second position. May be provided respectively.

  ADVANTAGE OF THE INVENTION According to this invention, the board | substrate storage container which can move an RF-ID tag according to the position of an interrogator can be provided.

It is a perspective view of the back side which shows substrate storage container 1 concerning an embodiment of the present invention. It is a side view which shows the container main body 2. FIG. It is a perspective view from the lower part which shows the identification member 3. FIG. FIG. 3 is a perspective view showing the identification member 3 from above. It is the perspective view from the (a) surface side which shows RF-ID holding member 4, and the perspective view from the (b) back side. It is explanatory drawing which shows each state (a) and (b) of the connection of RF-ID holding member 4. FIG. It is explanatory drawing which shows each state (c1) to (c5) of the movement of RF-ID holding member 4. FIG. It is explanatory drawing which shows each state (d1) to (d3) of the movement of RF-ID holding member 4. FIG. It is the perspective view seen from the outer side which shows each state (e) and (f) of fixation and cancellation | release of RF-ID holding member 4. FIG. It is the perspective view seen from the container main body 2 side which shows each state (e) and (f) of fixation and cancellation | release of RF-ID holding member 4. FIG.

<< Embodiment of the Present Invention >>
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the embodiments of the present specification, the same members are denoted by the same reference numerals throughout. The front and rear refer to the direction connecting the opening side and the back side of the container main body, and the left and right indicate the state viewed from the opening side of the container main body.

<Substrate storage container>
FIG. 1 is a rear perspective view showing a substrate storage container 1 according to an embodiment of the present invention, and FIG. 2 is a side view showing a container body 2.
A substrate storage container 1 shown in FIG. 1 is capable of storing a plurality of substrates not shown, and includes a container main body 2 and a lid 11 (not shown).

[Container body]
The container body 2 shown in FIG. 2 has a substantially cubic shape having one opening (not shown) such as a front surface, a ceiling surface 2a, a back surface 2b, left and right side surfaces 2c, and a bottom surface 2d. The opening is sealed by a lid 11 described later.

  The ceiling surface 2a of the container body 2 may be provided with a robotic flange or the like that is suspended by a suspension device of an overhead traveling carriage that travels between and between processes.

  The back surface 2b of the container body 2 is located on the opposite side of the opening, and a pair of left and right protrusions 21 are formed from the bottom surface 2d to the ceiling surface 2a. The pair of protrusions 21 serve as outer edges on the back surface 2b side of the container body 2.

  The left and right side surfaces 2c of the container body 2 are provided with support members on the inner surfaces facing each other, and support members for horizontally supporting the peripheral edge of the substrate are formed at predetermined intervals in the vertical direction. Yes.

  An identification member 3 to be described later is detachably attached to the bottom surface 2d of the container body 2. Therefore, a pair of locking grooves 22 for fixing the identification member 3 are formed on the bottom surface 2d of the container body 2 so as to protrude from the bottom surface 2d.

[Lid]
The lid 11 (not shown) is attached so as to seal the opening of the container body 2. The lid 11 is provided with a support member that supports the peripheral edge of the substrate on the opening side of the container body 2. The lid 11 may include a locking mechanism that fixes the lid 11 to the container body 2 in a state where the container body 2 is sealed.

[Identification member]
FIG. 3 is a perspective view from below showing the identification member 3, and FIG. 4 is a perspective view from above showing the identification member 3.
The identification member 3 shown in FIG. 3 functions as a container identification part by attaching an infopad plug or the like, and is detachably attached to the container body 2. The identification member 3 includes a base 31, a pair of left and right side walls 32, and a vertical wall 33 (see also FIG. 4).

  The base 31 is plate-shaped, and a substantially U-shaped notch 31a is formed along the center line CL in the width direction. A plurality of through holes 31b having different radii are formed symmetrically about the center line CL in the width direction in the base 31 whose front is separated left and right by the notch 31a. The through-hole 31b has a concentric outer circle with a large diameter and an inner circle with a small diameter, and a step is formed between the outer circle and the inner circle. . This step portion fits a claw or the like provided on an info pad plug (not shown), and if necessary, the through hole 31b is closed when the info pad plug is attached.

  The side wall portion 32 is L-shaped in a side view, and is erected from the left and right end portions of the base portion 31, and has locking claws 32 a at the end portions (see also FIG. 4). The engaging claw 32a engages with the engaging groove 22 of the container body 2, whereby the identification member 3 has the bottom surface 2d of the container body 2 so that the base 31 is substantially parallel to the bottom surface 2d of the container body 2. Mounted on.

  The vertical wall portion 33 is plate-shaped and is erected in a substantially vertical direction from the rear end portion of the base portion 31. In addition, it is preferable that the connection part of the vertical wall part 33 and the base 31 is a curved surface with a radius of about 2 mm to 20 mm so that the packaging material and the packaging material are not torn when the substrate storage container 1 is packaged and packed. When the identification member 3 is attached to the container body 2, the vertical wall portion 33 is substantially parallel to the back surface 2 b of the container body 2.

  Further, a pair of slide rails 34 is formed on the identification member 3 at a predetermined interval across the base portion 31 and the vertical wall portion 33. In the present embodiment, the slide rail 34 is formed as a groove, but may be formed as a convex rail. In addition, fixing holes 35 are formed at at least two positions in the middle position between the slide rails 34. The fixing hole 35 functions as a part of a lock mechanism that holds and fixes the longitudinal direction of the RF-ID holding member 4 described later in a predetermined direction.

  The slide rail 34 is formed by a straight line at a base 31 from a predetermined position to a center line CL (see FIG. 3), and is substantially orthogonal to the base 31 up to a predetermined height position of the vertical wall 33. , And a straight line substantially parallel to the plane including the center line CL (see FIG. 4). The first fixing hole 35 is formed at the base 31 at a position that is an intermediate position between the slide rails 34 and is separated from the vertical wall 33 by a predetermined distance. In addition, although the position away from the vertical wall part 33 by the predetermined distance is the same position as the above-mentioned predetermined position (start end of the groove), it may be a different position.

  On the other hand, in the predetermined height position of the vertical wall part 33, it forms in the circular arc of 90 degrees of center angles centering on the intermediate point of slide rails 34 (refer FIG. 4). However, the central angle of the arc may be in the range of 90 degrees or more and less than 180 degrees.

  That is, one slide rail 34 is an arc that extends upward from a predetermined height position, and the other slide rail 34 is an arc that extends downward from a predetermined height position. A second fixing hole 35 is formed at a position including this center.

  An insertion hole 34 a is formed at the connecting portion between the straight line and the arc of the slide rail 34. Here, if the shape of the insertion hole 34a is formed to be equal to the shape of the hook-shaped portion 42a of the RF-ID holding member 4 described later, the identification member 3 and the RF-ID holding member 4 can be easily connected or released. If the shape of the insertion hole 34a is made smaller than the shape of the flange portion 42a, the identification member 3 and the RF-ID holding member 4 can be connected, but it is difficult to release.

[RF-ID holding member]
FIG. 5 is a perspective view from the front surface side and (b) a perspective view from the back surface side, showing the RF-ID holding member 4.
An RF-ID holding member 4 shown in FIGS. 5A and 5B holds an RF-ID tag 5 (not shown). The RF-ID holding member 4 is formed by a holding member main body 41, a pair of slide claws 42, and a fitting claw 43. The RF-ID holding member 4 is connected to the identification member 3 (slide rail 34) so that the main body member 41 side is the surface.

  The holding member main body 41 has a rectangular bar shape, and as shown in FIG. 5B, a recess 41a is formed on the back surface side so as to extend in the length direction. The RF-ID tag 5 is inserted and fixed in the recess 41a. The holding member main body 41 is formed with a substantially square opening 41b penetrating from the surface side to the recess 41a in the vicinity of both ends (see FIG. 5A). The depression at the center of the surface is provided as necessary when the RF-ID holding member 4 is manufactured by injection molding.

  The holding member main body 41 fixes the RF-ID tag 5 to the back surface side, so that the RF-ID tag 5 cannot be removed when the RF-ID holding member 4 is connected to the identification member 3. Further, even if an external force such as an impact is applied to the substrate storage container 1, the RF-ID tag 5 does not fall off. On the other hand, in a state where the RF-ID holding member 4 is detached from the identification member 3, the RF-ID tag 5 is pushed out from the recess 41a by inserting a jig or the like from the opening 41b on the front surface side. -The ID tag 5 can be removed.

  The slide claw 42 functions as an engaged portion that is slidably engaged with the slide rail 34, and also functions as a guide and a stopper when sliding along the slide rail 34. . The slide claw 42 is formed so as to protrude from both ends on the surface side where the concave portion 41b of the holding member main body 41 is formed, and a hook-shaped portion 42a is formed at the tip. In addition, when the slide rail 34 is formed as a ridge rail, the slide claw 42 is changed to an engaged portion having a dovetail groove engaged with the ridge rail, and is configured as a monorail structure.

  The fitting claw 43 is fitted into the fixing hole 35 of the identification member 3 and fixes the RF-ID holding member 4. The fitting claw 43 protrudes in the same direction as the slide claw 42 from the surface opposite to the surface on which the concave portion 41a of the holding member main body 41 is formed or from the center of the side surface, and is folded in the opposite direction. In addition, a hook-like portion 43a is formed in the vicinity of the folding. The fitting claw 43 is elastically deformed when pushed into the holding member main body 41 side.

  The container main body 2, the lid 11, the identification member 3, and the RF-ID holding member 4 are formed by injection molding using a resin material. Examples of the resin material include conventionally known synthetic resins such as polycarbonate, polyetheretherketone, polyetherimide, polybutylene terephthalate, polyacetal, liquid crystal polymer, and cycloolefin polymer, and alloy resins thereof. Moreover, you may use what added carbon powder, carbon fiber, a carbon nanotube, etc. to these resin, and provided electroconductivity.

<Connection between identification member and RF-ID holding member>
First, a method for connecting the identification member 3 and the RF-ID holding member 4 will be described. FIG. 6A is an explanatory diagram showing the states (a) and (b) of the connection of the RF-ID holding member 4.

(A) Preparation for connection The longitudinal direction of the RF-ID holding member 4 is aligned with the substantially horizontal direction, and the slide claw 42 of the RF-ID holding member 4 is inserted into the insertion hole 34a formed in the vertical wall portion 33 of the identification member 3. Relative to
(B) Connection When the RF-ID holding member 4 is pushed toward the vertical wall portion 33 (or the back surface 2b of the container body 2) and the slide claw 42 is inserted into the insertion hole 34a, the hook-like portion 42a is moved to the slide rail 34. The RF-ID holding member 4 is coupled to the identification member 3.

  When the connection between the identification member 3 and the RF-ID holding member 4 is completed, the RF-ID holding member 4 can slide along the slide rail 34.

<Moving and fixing the RF-ID holding member>
Next, a method for moving and fixing the RF-ID holding member 4 will be described. FIG. 6B is an explanatory diagram showing the states (c1) to (c5) of the movement of the RF-ID holding member 4.

(C1) Movement 1 to the first position A
6A, the RF-ID holding member 4 is slid downward along the slide rail 34 on the vertical wall 33 while keeping the longitudinal direction of the RF-ID holding member 4 in a substantially horizontal direction.
(C2) Movement 2 to the first position A
When the RF-ID holding member 4 reaches the curved surface of the connecting portion between the vertical wall portion 33 and the base portion 31, the longitudinal direction remains substantially horizontal, but starts to rotate so that the surface is downward.
(C3) Movement 3 to the first position A
When the RF-ID holding member 4 exceeds the connection portion and reaches the base portion 31, the surface becomes downward.
(C4) Movement 4 to the first position A
The fitting claw 43 is opposed to the fixing hole 35 formed in the base 31.
(C5) Movement 5 to the first position A
When the RF-ID holding member 4 is pushed toward the base 31 (or the bottom surface 2d of the container body 2) and the fitting claw 43 is fitted into the fixing hole 35, the hook-like portion 43a is locked to the fixing hole 35, The RF-ID holding member 4 is fixed.

  Thus, the RF-ID holding member 4 is moved, and this position becomes the first position A where the RF-ID holding member 4 is fixed.

  FIG. 6C is an explanatory diagram showing the states (d1) to (d3) of the movement of the RF-ID holding member 4.

(D1) Movement 1 to the second position B
From the state (b) of FIG. 6A, the RF-ID holding member 4 is moved (rotated) along the arc of the slide rail 34.
(D2) Movement 2 to the second position B
The longitudinal direction of the RF-ID holding member 4 is made to coincide with the substantially vertical direction, and the fitting claw 43 is opposed to the fixing hole 35 formed in the vertical wall portion 33.
(D3) Movement 3 to the second position B
When the RF-ID holding member 4 is pushed toward the vertical wall portion 33 (or the back surface 2 b side of the container body 2) and the fitting claw 43 is fitted into the fixing hole 35, the hook-like portion 43 a is engaged with the fixing hole 35. The RF-ID holding member 4 is fixed. The fixing hole 35 is adapted to be fitted into the fitting claw 43 only when the longitudinal direction of the RF-ID holding member 4 is made substantially coincident with the vertical direction. It is formed in a shape that does not fit.

Thus, the RF-ID holding member 4 is moved, and this position becomes the second position B where the RF-ID holding member 4 is fixed.
Therefore, in the RF-ID holding member 4, the first position A where the longitudinal direction of the RF-ID holding member 4 is arranged in a substantially horizontal direction and the longitudinal direction of the RF-ID holding member 4 are arranged in a substantially vertical direction. The second position B is movable without being attached or detached.

<Unfixing of RF-ID holding member>
Finally, a method for releasing the fixation when the RF-ID holding member 4 is moved from the state where it is fixed at the first position A or the second position B will be described. FIG. 7 is a perspective view seen from the outside showing the states (e) and (f) of fixing and releasing the RF-ID holding member 4, and FIG. 8 shows fixing and releasing of the RF-ID holding member 4. It is the perspective view seen from the container main body 2 side which shows each state (e) and (f). 7 shows a state in which the RF-ID holding member 4 is fixed at the first position A, and FIG. 8 shows a state in which the RF-ID holding member 4 is fixed at the second position B. The shape of the slide rail 34 is different.

(E) Unlock 1
When the fitting claw 43 is pushed into the holding member main body 41, the fitting claw 43 is elastically deformed, and the hook-shaped portion 43 a can be pulled out from the fixing hole 35.
(F) Unlock 2
The fitting claw 43 is pulled out from the fixing hole 35 by pulling out the RF-ID holding member 4 while pushing the fitting claw 43.

  Thereby, the fixation of the RF-ID holding member 4 at the first position A or the second position B is released. At this time, since the hook-shaped portion 42a of the slide claw 42 remains locked to the slide rail 34 (see FIG. 8F), the RF-ID holding member 4 is slidable along the slide rail 34. become.

<Fixed position of RF-ID holding member>
When the substrate storage container 1 is transported, the RF-ID holding member 4 is fixed at the first position A. If it is the first position A, the RF-ID holding member 4 is positioned on the inner side of the pair of protrusions 21 that are the outer edges on the back surface 2b side of the container body 2 and on the bottom surface 2d side of the container body 2. Even when the substrate storage container 1 is packaged and packed, the RF-ID holding member 4 does not damage the packaging material or packing material for transportation.

  When the substrate storage container 1 is used in a processing apparatus, the RF-ID holding member 4 is fixed at the first position A or the second position B. According to the position of the interrogator for the RF-ID tag, the interrogator is fixed to the first position A or the second position B so that the interrogator can be connected to the RF-ID tag 5. Data can be read or written.

  However, the fixed position of the RF-ID holding member 4 is not limited to the position of this embodiment. For example, it may be fixed not in a substantially vertical direction but in a direction inclined by 45 ° or 60 ° from the horizontal direction. The position of the insertion hole 34a is not limited to the position of the present embodiment. For example, it may be below the center of the arc.

  As described above, the substrate storage container 1 according to the embodiment of the present invention includes a container body 2 having an opening on one side, a lid 11 that seals the opening, an identification member 3 having a container identification unit, and an RF- And an RF-ID holding member 4 that holds the ID tag 5, the identification member 3 is detachably attached to the container body 2, and the RF-ID holding member 4 is coupled to the identification member 3, and RF -It is movable between the first position A where the ID holding member 4 is arranged in the horizontal direction and the second position B where the RF-ID holding member 4 is arranged in the vertical direction.

  Accordingly, the RF-ID holding member 4 can be moved and fixed to the first position A arranged in the substantially horizontal direction or the second position B arranged in the substantially vertical direction. Depending on the position, the position of the RF-ID holding member 4 can be changed, and the information of the RF-ID tag 5 can be read or written. Further, since the RF-ID holding member 4 moves in a state of being connected between the first position A and the second position B, the RF-ID holding member 4 is not removed and attached. There is no forgetting, and there is no mistake in attaching the RF-ID tag 5.

  In the present embodiment, the first position A is provided on the bottom surface 2 d side of the container main body 2, and the second position B is provided on the back surface 2 b side of the container main body 2. Thereby, the RF-ID holding member 4 can be disposed on the inner side of the outer edge of the container body 2 by fixing the RF-ID holding member 4 in the substantially horizontal direction on the bottom surface 2 d side of the container body 2. On the other hand, the RF-ID holding member 4 can be arranged outside the outer edge of the container body 2 by fixing the RF-ID holding member 4 substantially vertically on the back surface 2b side of the container body 2.

  In the present embodiment, the RF-ID holding member 4 is held at the first position A when the substrate storage container 1 is transported. Thereby, it can prevent that the RF-ID holding member 4 damages the packaging material and packaging material for transport.

  In the present embodiment, when the RF-ID holding member 4 is held at the first position A or the second position B, the RF-ID tag interrogator and the RF-ID provided at different positions of the processing apparatus are used. Data can be read from or written to the ID tag 5. Thereby, the interrogator can read or write data with the RF-ID tag 5 by fixing the RF-ID holding member 4 to the first position A or the second position B.

  In the present embodiment, the identification member 3 is formed with a slide rail 34, and the RF-ID holding member 4 is formed with an engaged portion that is slidably engaged with the slide rail 34. Thereby, the RF-ID holding member 4 can move along the slide rail 34 between the first position A and the second position B, and the RF-ID holding member 4 is moved during the sliding movement. It does not come off the slide rail 34.

  In the present embodiment, the identification member 3 is provided with a lock mechanism 35 that can fix the RF-ID holding member 4 at the first position A and the second position B, respectively. Thereby, even if external force, such as vibration at the time of transportation, acts on the RF-ID holding member 4, the position of the RF-ID holding member 4 does not shift.

  The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above-described embodiments, and various modifications may be made within the scope of the gist of the present invention described in the claims. It can be changed.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 11 Lid body 2 Container body, 2a Ceiling surface, 2b Back surface, 2c Side surface, 2d Bottom surface 21 Projection part 22 Locking groove 3 Identification member 31 Base part, 31a Notch part, 31b Through-hole 32 Side wall part, 32a Locking Claw 33 Vertical wall 34 Slide rail, 34a Insert hole 35 Fixing hole (lock mechanism)
4 RF-ID holding member 41 holding member main body, 41a concave portion, 41b opening 42 slide claw (engaged portion), 42a hook-shaped portion 43 fitting hook, 43a hook-shaped portion 5 RF-ID tag A first position B Second position CL Center line

Claims (6)

A substrate storage container that can store a plurality of substrates,
A container body having an opening on one side;
A lid for sealing the opening;
An identification member having a container identification part;
An RF-ID holding member for holding an RF-ID tag,
The identification member is detachably attached to the container body,
The RF-ID holding member is coupled to the identification member,
The substrate is movable between a first position where the RF-ID holding member is arranged in a horizontal direction and a second position where the RF-ID holding member is arranged in a vertical direction. Storage container. The first position is provided on the bottom side of the container body,
The substrate storage container according to claim 1, wherein the second position is provided on a back side of the container body. The substrate storage container according to claim 2, wherein the RF-ID holding member is held at the first position when the substrate storage container is transported. When the RF-ID holding member is held at the first position or the second position, the interrogator for the RF-ID tag provided at a different position of the processing apparatus and the RF-ID tag The substrate storage container according to any one of claims 1 to 3, wherein the data can be read or written. The identification member is formed with a slide rail,
The substrate storage container according to any one of claims 1 to 4, wherein the RF-ID holding member is formed with an engaged portion that is slidably engaged with the slide rail. The said identification member is provided with the lock mechanism which can fix the said RF-ID holding member in said 1st position and said 2nd position, respectively, The any one of Claim 1-5 characterized by the above-mentioned. The substrate storage container described in 1.

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