JP2017210991A - Abnormality detection device and abnormality detection method of fluid bearing - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an abnormality detection device and abnormality detection method of a fluid bearing, capable of detecting occurrence of clogging in a flow passage of an orifice, and capable of cleaning the orifice at proper timing.SOLUTION: An abnormality detection device of a fluid bearing includes: a bearing body 2; a bearing hole 3 formed in the bearing body 2; a plurality of pockets 4 opened on an inner peripheral surface of the bearing hole 3 and arranged with intervals around a center axis O of the bearing hole 3; a plurality of flow passages 28 communicating with the plurality of pockets 4; an orifice 5 detachably disposed in the flow passage 28; a plurality of pressure sensors 22 configured to measure fluid pressure held in the plurality of pockets 4; and a control unit 27. The control unit 27 is configured to, when among pressure measurement values measured by the plurality of pressure sensors 22, the difference between a maximum value and a minimum value is a predetermined value or more, detect abnormality.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an abnormality detection apparatus and an abnormality detection method for a fluid bearing such as a ram bearing provided in a DI processing apparatus that manufactures a DI can, for example.

  A bottomed cylindrical DI can having a can body (wall) and a bottom (bottom) as a can that is filled and sealed with beverages and the like, and a disc that is wound around the open end of the DI can A two-piece can having a can-shaped can lid is known. Further, a bottle can in which a cap is screwed to an opening end portion after a bottle necking process is performed on the DI can is also known.

  The DI can used in such a can body has a bottomed cylindrical shape by performing a cupping process (drawing process) and a DI process (drawing and squeezing process) on a disk-shaped blank punched out of a plate of aluminum alloy material. Formed.

In the cupping step, the blank is subjected to cupping (drawing) to obtain a cup-shaped body that is a molding intermediate in the process of shifting from the blank to the DI can.
In the DI process, a punch sleeve is fitted inside the cup-like body and a plurality of dies are fitted outside, and the cup-like body is drawn and ironed between them. That is, in a state where the central axis of the punch sleeve and the central axis of the plurality of dies are coaxially arranged (centered), the peripheral wall of the cup-shaped body is sandwiched between them and moved relative to the central axis direction. The cup-shaped body is subjected to DI (Drawing & Ironing) processing to form a DI can.

The punch sleeve is supported at the tip of a ram shaft (main shaft) extending in the horizontal direction, and the ram shaft is pivotally supported by a pair of ram bearings that are spaced apart from each other in the horizontal direction.
A ram bearing is a fluid bearing called a hydrostatic bearing or a hydrostatic bearing, and a plurality of pockets to which oil is supplied are spaced apart from each other in the circumferential direction on the inner peripheral surface of the bearing hole into which the ram shaft is inserted. It is open. By applying pressure to the oil held in these pockets, the ram bearing is supported by separating the ram shaft from the inner peripheral surface of the bearing hole by hydraulic pressure (floating the ram shaft in the air).

With such a configuration, the center axis of the ram bearing (the center axis of the bearing hole) and the center axis of the ram shaft are aligned with high accuracy, so that the punch sleeve supported by the ram shaft and a plurality of dies The accuracy of the coaxiality is also ensured, and the thickness of the peripheral wall of the DI can can be made uniform. Also, wear of the ram shaft and ram bearing is suppressed.
In the ram bearing, an orifice for partially narrowing the flow path is provided in the oil piping path (flow path) in order to stably apply high hydraulic pressure to the ram shaft inserted into the bearing hole. It is arranged.

  In addition, as a ram bearing used for the conventional DI processing apparatus, for example, an electromagnetic type as described in Patent Document 1 below is also well known. Patent Document 2 below describes a press brake that performs bending of a workpiece by moving a ram up and down and moving the punch and die closer to and away from each other.

Japanese National Patent Publication No. 6-500503 JP 2002-239634 A

However, the fluid bearing of the conventional DI processing apparatus has the following problems.
The orifice has a small inner diameter channel of, for example, less than 1 mm, and foreign substances, sludge and the like are accumulated, and the channel is likely to be clogged. For this reason, it is necessary to periodically remove and clean the orifice, but the proper timing for cleaning has not been known.

  Specifically, when the orifice flow path is clogged, not only the processing accuracy (thickness accuracy of the peripheral wall) of the DI can to be produced can be secured, but there is a possibility that the ram bearing and the ram shaft may be worn or damaged. For this reason, it has been necessary to clean the orifices at a high frequency, which is troublesome. In addition, in order to remove the orifice from the oil piping path and remount it, it is necessary to disassemble the piping itself, and it takes about half a day as an operation time, for example.

  The present invention has been made in view of such circumstances, and it is possible to detect the occurrence of clogging in the flow path of the orifice and to provide a fluid bearing capable of cleaning the orifice at an appropriate timing. An object of the present invention is to provide an abnormality detection device and an abnormality detection method.

An abnormality detection device for a fluid bearing according to an aspect of the present invention includes a bearing main body, a bearing hole formed in the bearing main body, and an inner peripheral surface of the bearing hole spaced apart from each other around a central axis of the bearing hole. A plurality of pockets opened and opened, a plurality of flow paths communicating with the plurality of pockets, an orifice detachably disposed in the flow path, and a pressure of a fluid held in the plurality of pockets are measured. When the difference between the maximum value and the minimum value is equal to or greater than a predetermined value among the measured pressure values measured by the plurality of pressure sensors. It is characterized by detecting an abnormality.
Further, the fluid bearing abnormality detection method according to one aspect of the present invention includes opening a plurality of pockets spaced from each other around the central axis of the bearing hole on the inner peripheral surface of the bearing hole formed in the bearing body. A plurality of flow sensors communicating with the plurality of pockets, a plurality of pressure sensors for measuring the pressure of the fluid held in the plurality of pockets, and an orifice being detachably disposed in the flow paths; and a control A controller, wherein the controller detects an abnormality when a difference between a maximum value and a minimum value is equal to or greater than a predetermined value among measured pressure values measured by the plurality of pressure sensors. To do.

  This fluid bearing is, for example, a hydrostatic bearing or a hydrostatic bearing, and is spaced from each other around the center axis of the bearing hole on the inner peripheral surface of the bearing hole that pivotally supports the main shaft. A plurality of pockets to which fluid is supplied are opened. The opening of the pocket is disposed opposite to the outer peripheral surface of the main shaft, and a chamber capable of holding fluid is formed by these pocket and the outer peripheral surface of the main shaft. Then, by applying pressure to the fluid held in the pocket (chamber), the hydrodynamic bearing is supported by separating the main shaft from the inner peripheral surface of the bearing hole by the fluid pressure (floating the main shaft in the air).

  According to the fluid bearing abnormality detection device and abnormality detection method of the present invention, an orifice is detachably provided in each flow path communicating with a plurality of pockets. In addition, a pressure sensor that measures the pressure of the fluid held in each pocket is provided. That is, the fluid pressures in the plurality of pockets can be measured by the plurality of pressure sensors, respectively.

  When the difference (pressure difference) between the maximum value and the minimum value among the measured pressure values measured by these pressure sensors becomes greater than a predetermined value, the control unit detects an abnormality. That is, when the maximum pressure difference between the measured values measured by the plurality of pressure sensors becomes equal to or greater than a predetermined value, it is determined that the orifice is clogged and is abnormal.

Specifically, when any of the orifices provided in the flow paths of the plurality of pockets is clogged, the pressure sensor measures the fluid pressure of the pockets to which the flow paths of the orifices communicate. A change occurs in the value, and the pressure difference between the measured values of each pressure sensor increases.
In the present invention, when a fluid pressure difference occurs between the pockets as described above, it is determined that the abnormality is present if the difference between the maximum value and the minimum value (maximum pressure difference) is smaller than a predetermined value. If it becomes larger than a predetermined value, it is determined that the coaxiality between the center axis of the bearing hole and the central axis of the main shaft cannot be sufficiently secured (or that there is a risk of this), and it is judged as abnormal. To do.

Accordingly, by appropriately setting the predetermined value, it is possible to reliably detect an abnormality (orifice clogging) and clean the orifice at an appropriate timing.
In other words, it is possible to maintain a good machining accuracy by a machining device such as a DI machining device without excessively cleaning the orifice excessively (unnecessarily) as in the prior art, and in the fluid bearing and the main shaft. The occurrence of wear or damage can be prevented.

  As described above, according to the present invention, it is possible to detect clogging in the flow path of the orifice, and it is possible to clean the orifice at an appropriate timing.

In addition, an abnormality detection device for a fluid bearing according to an aspect of the present invention includes a bearing body, a bearing hole formed in the bearing body, and an inner peripheral surface of the bearing hole, around the center axis of the bearing hole. A plurality of pockets opened at intervals, a plurality of flow paths communicating with the plurality of pockets, an orifice removably disposed in the flow paths, and a pressure of fluid retained in the plurality of pockets. A plurality of pressure sensors to be measured, and a control unit, wherein the control unit is a maximum value when a minimum value is equal to or less than a predetermined value among measured values of pressure measured by the plurality of pressure sensors. An abnormality is detected when the value exceeds a predetermined value.
Further, the fluid bearing abnormality detection method according to one aspect of the present invention includes opening a plurality of pockets spaced from each other around the central axis of the bearing hole on the inner peripheral surface of the bearing hole formed in the bearing body. A plurality of flow sensors communicating with the plurality of pockets, a plurality of pressure sensors for measuring the pressure of the fluid held in the plurality of pockets, and an orifice being detachably disposed in the flow paths; and a control The control unit is abnormal when a minimum value becomes a predetermined value or less or a maximum value becomes a predetermined value or more among measured pressure values measured by the plurality of pressure sensors. It is characterized by detecting.

  According to the fluid bearing abnormality detection device and abnormality detection method of the present invention, an orifice is detachably provided in each flow path communicating with a plurality of pockets. In addition, a pressure sensor that measures the pressure of the fluid held in each pocket is provided. That is, the fluid pressures in the plurality of pockets can be measured by the plurality of pressure sensors, respectively.

  Of the measured pressure values measured by these pressure sensors, when the minimum value becomes smaller than the predetermined value, or when the maximum value becomes larger than the predetermined value, the orifice is clogged. The control unit detects an abnormality.

Specifically, when any of the orifices provided in the flow paths of the plurality of pockets is clogged, the pressure sensor measures the fluid pressure of the pockets to which the flow paths of the orifices communicate. A change occurs in the value.
In the present invention, when the measurement value of the pressure sensor changes as described above, if the minimum value of the pressure is larger than the predetermined value or the maximum value of the pressure is smaller than the predetermined value, When the minimum value of pressure becomes smaller than the predetermined value or when the maximum value of pressure becomes larger than the predetermined value, the center axis of the bearing hole and the central axis of the main shaft It is determined that there is an abnormality as if the degree of concentricity could not be sufficiently secured (or if there is a risk of such a situation).

Accordingly, by appropriately setting each of the above predetermined values, it is possible to reliably detect an abnormality (orifice clogging) and clean the orifice at an appropriate timing.
In other words, it is possible to maintain a good machining accuracy by a machining device such as a DI machining device without excessively cleaning the orifice excessively (unnecessarily) as in the prior art, and in the fluid bearing and the main shaft. The occurrence of wear or damage can be prevented.

  As described above, according to the present invention, it is possible to detect clogging in the flow path of the orifice, and it is possible to clean the orifice at an appropriate timing.

In the fluid bearing abnormality detection device, it is preferable that at least three pockets are formed at equal intervals around the central axis on the inner peripheral surface of the bearing hole.
In the fluid bearing abnormality detection method, it is preferable that at least three pockets are formed at equal intervals around the central axis on the inner peripheral surface of the bearing hole.

In this case, since at least three pockets are formed at equal intervals around the central axis of the bearing hole on the inner peripheral surface of the bearing hole, the bearing pressure is increased by the pressure of the fluid held in these pockets. The main shaft can be reliably separated from the inner peripheral surface of the hole and can be easily arranged coaxially, so that the main shaft can be stably supported.
Then, by measuring the pressure of the fluid held in three or more pockets with three or more pressure sensors equal to the number of pockets, the accuracy of abnormality detection can be improved, and the above-described effects of the present invention can be achieved. It is more stable.

In the fluid bearing abnormality detection device, a temperature sensor for measuring any one of the fluids held in the vicinity of the bearing hole and in the pocket of the bearing body is provided, and the control unit includes the temperature sensor. It is preferable to detect an abnormality when the measured value of the measured temperature becomes a predetermined value or more.
In the fluid bearing abnormality detection method, a temperature sensor for measuring any one of the fluids held in the vicinity of the bearing hole and in the pocket of the bearing body is provided, and the control unit measures the temperature sensor. It is preferable to detect an abnormality when the measured value of the measured temperature is equal to or greater than a predetermined value.

  When orifice clogging occurs and the fluid pressure in the pocket corresponding to the flow path in which the orifice is disposed decreases, the axial positions of the central axis of the bearing hole and the central axis of the main shaft supported by the bearing hole are changed. It will shift. As these inter-shaft distances increase, the outer peripheral surface of the main shaft finally comes into contact with the inner peripheral surface of the bearing hole.

According to the abnormality detection device and the abnormality detection method of the fluid bearing, the temperature sensor that measures the temperature of any one of the fluid held in the vicinity of the bearing hole of the bearing body (the portion disposed close to the bearing hole) and the pocket. Is provided. And when the measured value of a temperature sensor becomes larger than a predetermined value, a control part detects abnormality.
That is, when the bearing hole comes into contact with the main shaft, the contact resistance (friction) determines that the temperature of the fluid in the vicinity of the bearing hole or in the pocket has risen based on the measured temperature value measured by the temperature sensor. be able to. Therefore, in combination with the abnormality detection by the pressure sensor described above, the abnormality of the fluid bearing can be detected more reliably.

In the fluid bearing abnormality detection device, it is preferable that a plurality of the temperature sensors are provided corresponding to the plurality of pockets opened on the inner peripheral surface of the bearing hole.
In the fluid bearing abnormality detection method, it is preferable that a plurality of the temperature sensors are provided corresponding to the plurality of pockets opened in the inner peripheral surface of the bearing hole.

  In this case, a plurality of temperature sensors are provided corresponding to the plurality of pockets opened on the inner peripheral surface of the bearing hole. Therefore, even when the orifice is clogged and the main shaft approaches a specific pocket of these pockets and contacts the inner peripheral surface of the bearing hole, the temperature rise in the vicinity of the pocket is reduced. Can be measured with high accuracy by the temperature sensor corresponding to. Therefore, the accuracy of abnormality detection is increased.

In the fluid bearing abnormality detection device, a flow meter is provided upstream of the orifices of the plurality of flow paths, and the control unit has a flow rate measured by the flow meter outside a predetermined numerical range. When it becomes, it is preferable to detect abnormality.
In the fluid bearing abnormality detection method, a flow meter is provided upstream of the orifices of the plurality of flow paths, and the control unit determines that the measured flow rate measured by the flow meter is out of a predetermined numerical range. It is preferable to detect an abnormality when it becomes.

In this case, a flow meter is provided on the upstream side of the orifices of the plurality of flow paths, and when the flow rate measured by the flow meter falls outside the predetermined numerical range (up and down from the appropriate numerical range). The control unit detects an abnormality when it falls outside.
In other words, for example, when orifice clogging has progressed across a plurality of orifices, or when a fluid supply source pressure setting abnormality or a relief valve failure occurs, the measured value of the flow meter is a predetermined numerical value. Since it becomes smaller or larger than the range, an abnormality can be determined based on this measured value. Therefore, the abnormality can be detected more reliably.

In the fluid dynamic bearing abnormality detection apparatus, a supply fluid temperature sensor for measuring the temperature of the fluid supplied to the flow path of the bearing body is provided, and the control unit measures the temperature measured by the supply fluid temperature sensor. It is preferable to detect an abnormality when the measured value is outside a predetermined numerical range.
In the fluid bearing abnormality detection method, a supply fluid temperature sensor for measuring a temperature of a fluid supplied to the flow path of the bearing body is provided, and the control unit has a temperature measured by the supply fluid temperature sensor. It is preferable to detect an abnormality when the measured value is outside a predetermined numerical range.

  When the temperature of the fluid supplied to the flow path of the bearing body goes out of the predetermined numerical range according to the type of the fluid (when it goes out of the appropriate numerical range, either up or down) A change in viscosity or the like may occur, and a desired fluid function (such as a function of floating the main shaft from the inner peripheral surface of the bearing hole and lubricating these slides) may not be stably obtained. For example, when the temperature of the fluid supplied to the flow path is lower than (a lower limit of) a predetermined numerical range, the viscosity of the fluid may increase and smooth sliding may not be promoted. When the temperature of the fluid is higher than a predetermined numerical range (upper limit), the viscosity of the fluid decreases and the fluid tends to flow out of the pocket, and the fluid sliding function and the centering function may become unstable. In addition, when the temperature of the fluid supplied to the flow path is higher than the predetermined numerical range (upper limit), the temperature of the metal parts of the fluid bearing is likely to increase, which may cause seizure or the like.

According to the fluid bearing abnormality detection device and abnormality detection method, a supply fluid temperature sensor for measuring the temperature of the fluid supplied to the flow path of the bearing body is provided, and the measured value of the supply fluid temperature sensor is provided. Is outside the predetermined numerical range, the control unit detects an abnormality.
Therefore, the function of the fluid held in the pocket can be stably exhibited, and when there is a possibility that the function of the fluid cannot be sufficiently exhibited, an abnormality is detected and the bearing hole and the spindle are worn or damaged. Can be prevented. Further, seizure of metal parts of the fluid bearing can be prevented.

In the fluid bearing abnormality detection device, at least a display unit for displaying a pressure measurement value measured by the pressure sensor is provided, and when the control unit detects an abnormality, the measurement value until the abnormality is detected is provided. It is preferable that the transition can be displayed on the display unit for a predetermined time.
In the fluid bearing abnormality detection method, at least a display unit that displays a measurement value of the pressure measured by the pressure sensor is provided, and the transition of the measurement value until the abnormality is detected when the control unit detects the abnormality. It is preferable that the display can be displayed retroactively for a predetermined time.

In this case, since the display unit that displays at least the pressure measurement value measured by the pressure sensor is provided, the operator needs to know what the pressure measurement value is (high or low). Can be confirmed accordingly.
When the control unit detects an abnormality, the transition of the measured value until the abnormality is detected can be displayed retroactively on the display unit, so when an abnormality occurs, even if the operator is on the spot Even without being present, the transition of measured values up to the occurrence of an abnormality can be confirmed retrospectively. Accordingly, it is possible to confirm when an abnormality has occurred, to identify the location and cause of the abnormality, and the like.

In the fluid bearing abnormality detection device, a drive unit that relatively moves the bearing main body and the main shaft inserted through the bearing hole of the bearing main body is provided, and the control unit detects an abnormality. In addition, it is preferable to stop the drive unit.
In the fluid bearing abnormality detection method, a drive unit that relatively moves the bearing body and the main shaft inserted through the bearing hole of the bearing body is provided, and the control unit detects an abnormality. The driving unit is preferably stopped.

  In this case, when the control unit detects an abnormality, the driving unit that moves the bearing main body and the main shaft relative to each other is stopped, so that damage to the processing device, jamming of the processed product (molded product clogging), and the like can be suppressed.

  According to the fluid bearing abnormality detection device and abnormality detection method of the present invention, it is possible to detect clogging in the flow path of the orifice, and it is possible to clean the orifice at an appropriate timing.

It is a perspective view which shows a pair of ram bearing (fluid bearing) with which the DI processing apparatus which concerns on one Embodiment of this invention is equipped. It is sectional drawing of a front ram bearing among a pair of ram bearings of FIG. 1, and is a figure which shows the abnormality detection apparatus of a front ram bearing. It is sectional drawing of a rear ram bearing among a pair of ram bearings of FIG. 1, and is a figure which shows the abnormality detection apparatus of a rear ram bearing. FIG. 5A is a partial cross-sectional view of a bolt-shaped body (mounting cylinder) in which a plug portion and an orifice housing are integrally formed, and FIG. 4B is a cross-sectional view taken along line BB in FIG. It is a figure which shows an example of a monitor and its display. It is a flowchart which judges the cause etc. of abnormality generation based on the measured value of a pressure and a flow volume.

Hereinafter, a fluid dynamic bearing 1, an abnormality detection device 10 for a fluid dynamic bearing 1, and an abnormality detection method according to an embodiment of the present invention will be described with reference to FIGS.
The fluid dynamic bearing 1 and its abnormality detection device 10 according to the present embodiment are provided in a DI processing apparatus that performs DI processing on a cup-shaped body to form a DI can.

First, a DI can made from a cup-shaped body will be described.
The DI can is used for a can (a two-piece can or a bottle can) filled and sealed with contents such as a beverage. The DI can has a bottomed cylindrical shape, and has a can body (wall) that is a peripheral wall of the can and a can bottom (bottom) that is a bottom wall of the can. The two-piece can is manufactured by winding a disc-shaped can lid around the opening end of the DI can. The bottle can is manufactured by subjecting the DI can to bottle necking and then screwing a cap onto the opening end. “DI” in the DI canister is an abbreviation for Drawing & Ironing.

  The DI can is formed into a bottomed cylindrical shape by performing a cupping process (drawing process) and a DI process (drawing and squeezing process) on a disk-shaped blank punched out of a plate made of an aluminum alloy material. Specifically, in the case of a two-piece can, for example, a DI can is manufactured through a plate material punching process, a cupping process, a DI process, a trimming process, a printing process, a painting process, a necking process, a bottom reforming process, and a flanging process in this order. The

  In the process of manufacturing the DI can, the blank is drawn (cupping) by a cupping press and formed into a cup-shaped body. That is, the cup-shaped body is a molded intermediate body produced in the process of shifting from a blank to a DI can in the cupping step. The cup-shaped body has a bottomed cylindrical shape in which the height of the peripheral wall (the length along the can axis direction) is smaller than that of the DI can and the diameter of the bottom wall is large.

Next, the DI processing apparatus will be described.
The DI processing apparatus is used in the DI process described above, and performs DI processing (drawing (redrawing) ironing) on the cup-shaped body to form a DI can.

  The DI processing apparatus includes a receiving seat on which the cup-shaped body is placed, a single redrawing die having a circular through-hole for redrawing the cup-shaped body, and a coaxial arrangement with the redrawing die. A plurality of (for example, three) ironing dies (for example, ironing die) having through-holes having a circular cross section, and coaxial with the ironing die, and can be fitted inside the through-holes of each ironing die, A cylindrical or columnar punch sleeve that is movable in the direction of the central axis of the die, a cylindrical cup holder sleeve that fits outside the punch sleeve, and a ram shaft that supports the punch sleeve at the tip (main shaft) And a pair of ram bearings 1F and 1R (fluid bearing 1) for supporting the ram shaft so as to be movable in the central axis direction.

As the redraw die, the ironing die, the punch sleeve, and the cup holder sleeve described above, for example, those described in JP-A-2007-216302 can be used.
The central axes of the redrawing die, the ironing die, the punch sleeve, the cup holder sleeve, the ram shaft and the ram bearing are coaxial with each other and extend in the horizontal direction.

The DI processing to the cup-shaped body by the DI processing apparatus is performed as follows.
The cup-shaped body placed on the receiving seat is disposed between the punch sleeve and the redraw die with the cup shaft (can shaft) extending in the horizontal direction and the opening directed to the punch sleeve. .

  The cup holder sleeve and the punch sleeve move forward relative to the cup-shaped body. Then, while the cup holder sleeve presses the bottom wall of the cup-shaped body against the end face of the re-drawing die and performs the cup pressing operation, the punch sleeve pushes the cup-shaped body into the through-hole of the re-drawing die and re-draws. Apply processing.

  By redrawing, a cup-shaped body having a smaller diameter and a longer length (height) along the cup axis direction than the cup-shaped body is formed. Subsequently, this cup-shaped body is pushed in with a punch sleeve and gradually ironed while passing through a plurality of ironing dies one after another. That is, the bottom walled cylindrical DI can is formed by squeezing the peripheral wall of the cup-like body and extending the peripheral wall to increase the peripheral wall height and reduce the wall thickness. This DI can is cold worked and hardened by squeezing the peripheral wall, and the strength is increased.

  In the DI can that has been ironed, the punch sleeve is further pushed forward to press the bottom portion (the portion that becomes the bottom of the can) against the bottom molding die, so that the bottom portion is formed in a dome shape.

Next, the abnormality detection device 10 and the abnormality detection method for the ram bearings 1F and 1R (fluid bearing 1) and the ram bearings 1F and 1R will be described.
In FIG. 1, the pair of ram bearings 1F and 1R are spaced apart from each other in the horizontal direction corresponding to a ram shaft (not shown) extending in the horizontal direction. Of these ram bearings 1F and 1R, the one arranged near the punch sleeve is called a front ram bearing 1F, and the one arranged apart from the front ram bearing 1F with respect to the punch sleeve is a rear ram bearing. It is called 1R.
These ram bearings 1F and 1R are fluid dynamic bearings 1 called hydrostatic bearings or hydrostatic bearings.

As shown in FIG. 2, the front ram bearing 1 </ b> F and its abnormality detection device 10 are provided with a bearing body 2, a bearing hole 3 formed in the bearing body 2, and an inner peripheral surface of the bearing hole 3. A plurality of pockets 4 that open at intervals around the central axis O, a plurality of channels 28 that communicate with the plurality of pockets 4, an orifice 5 that is detachably disposed in the channel 28, and a plurality of A plurality of pressure sensors 22 for measuring the pressure of the fluid held in the pocket 4 and a control unit 27 are provided.
The flow path 28 is formed inside the bearing body 2 and communicates with the pocket 4. The flow path 28 is formed inside the bearing body 2 and extends in the direction in which the first flow path 11 extends. And a second flow path 12 that extends in an intersecting direction and communicates with the first flow path 11.

The front ram bearing 1 </ b> F is located on the extension line of the first flow path 11 and opens to the outer surface of the bearing body 2. The front ram bearing 1 </ b> F closes the opening hole 6 and is detachably provided in the opening hole 6. And a plug portion 7.
The front ram bearing 1 </ b> F includes a cylindrical orifice housing 8 that is detachably disposed in the first flow path 11, and the orifice 5 is mounted in the orifice housing 8. That is, the orifice 5 is detachably attached to the first flow path 11 via the orifice housing 8.
Further, the front ram bearing 1F of the present embodiment includes a bolt-like body (attachment cylinder) 9 in which the plug portion 7 and the orifice housing 8 are integrally formed.

The bearing main body 2 includes a main body portion 13 and a bearing metal portion 14.
In the front ram bearing 1F shown in FIG. 1, the main body portion 13 includes a plate-shaped portion having a rectangular plate shape and a central axis O (the front axis) of the bearing hole 3 from both surfaces (front and rear surfaces) facing the thickness direction of the plate-shaped portion. Hereinafter, a pair of cylindrical portions projecting along the bearing axis O) may be provided.

  In FIG. 2, the bearing metal portion 14 has a cylindrical shape and is fitted in a hole that penetrates the main body portion 13 in the bearing axis O direction. A through hole that penetrates the bearing metal portion 14 in the direction of the bearing axis O is a bearing hole 3 that supports the ram axis. That is, the inner peripheral surface of the bearing metal portion 14 corresponds to the inner peripheral surface of the bearing hole 3 of the front ram bearing 1F.

A plurality of pockets 4 are formed on the inner peripheral surface of the bearing hole 3 at intervals in the circumferential direction around the bearing axis O. In the present embodiment, at least three pockets 4 are formed on the inner peripheral surface of the bearing hole 3 at equal intervals in the circumferential direction, and four pockets 4 are formed in the illustrated example.
Specifically, pockets 4 are formed on the inner peripheral surface of the bearing hole 3 in the upper part, the lower part, and a pair of side parts (left side part, right side part), respectively. It is arranged at a position that is 90 ° rotationally symmetric around O (centered on the bearing axis O).

  In the example of the present embodiment, the pocket 4 has a concave opening disposed close to the outer peripheral surface of the ram shaft, a hole that is located in the center of the bottom of the opening and penetrates the peripheral wall of the bearing metal portion 14, have.

Each pocket 4 holds fluid such as oil. Specifically, the opening of the pocket 4 is disposed opposite to the outer peripheral surface of the ram shaft, and a chamber capable of holding fluid is formed by the pocket 4 and the outer peripheral surface of the ram shaft, and the fluid is held in this chamber. Then, by applying pressure to the fluid held in the pocket 4 (chamber), the front ram bearing 1F causes the ram shaft to be separated from the inner peripheral surface of the bearing hole 3 by the fluid pressure (the ram shaft is floated in the air). )To support.
Further, on the inner peripheral surface of the bearing hole 3, a discharge groove 15 is formed between the pockets 4 adjacent to each other in the circumferential direction to discharge the fluid flowing out from the pocket 4 to the outside of the bearing.

  A first flow path 11 and a second flow path 12 are formed inside the bearing body 2 as a passage (flow path 28) for supplying fluid to the pocket 4 from the outside of the bearing. The flow path 28 formed inside the bearing body 2 is provided with an orifice 5 described later for partially narrowing the flow path 28. Of the flow paths 28, the direction in which the first flow path 11 extends and the direction in which the second flow path 12 extends are different from each other, and the first flow path 11 and the second flow path 12 are mutually different. Are communicated so as to cross each other.

In the example shown in FIG. 2, the first flow path 11 extends in the vertical direction (longitudinal direction), and the second flow path 12 extends in the left and right direction (horizontal direction). Are connected so as to be orthogonal to each other.
However, the present invention is not limited to this, and the first flow path 11 and the second flow path 12 may intersect, for example, so as to form an obtuse angle larger than 90 ° between them, and less than 90 ° May be formed so as to form an acute angle.

  In the present embodiment, four first flow paths 11 (flow paths 28) are formed in the bearing body 2 corresponding to the four pockets 4 that are open on the inner peripheral surface of the bearing hole 3. Further, one second flow path 12 is formed in the bearing body 2. Of the four first flow paths 11, one second flow path 12 is connected to the three first flow paths 11 communicating with the upper pocket 4 and the pair of side pockets 4. In the example shown in FIG. 2, the first flow path 11 communicating with the lower pocket 4 is open to the outer surface of the bearing body 2 without being connected to the second flow path 12.

  In the example of the present embodiment, the first flow path 11 is connected to the small diameter flow path 16 that opens in the pocket 4 and the end of the small diameter flow path 16 opposite to the pocket 4. And a large-diameter channel 17 having a large inner diameter.

  The small diameter channel 16 opens in a hole disposed in the center of the pocket 4. A portion of the small-diameter channel 16 that is connected to the pocket 4 (a channel tip) extends from the pocket 4 toward the outside in the radial direction perpendicular to the bearing axis O. In the example shown in FIG. 2, among the three first channels 11 that communicate with the second channel 12, the small-diameter channel 16 of the first channel 11 that communicates with the upper pocket 4 is located above the upper pocket 4. It extends towards. In addition, each small-diameter channel 16 of the pair of first channels 11 communicating with the pair of side pockets 4 extends from the side pockets 4 to the side, and then extends to change the direction upward. .

  The inner diameter of the small-diameter channel 16 of the first channel 11 is smaller than the inner diameter of the second channel 12. Specifically, for example, the channel cross-sectional area of the second channel 12 is larger than the sum of the channel cross-sectional areas of the small-diameter channels 16 in the plurality of first channels 11 connected to the second channel 12. Has been.

The large-diameter channel 17 extends in the vertical direction. In the example shown in FIG. 2, the lower ends of the large-diameter channels 17 in the three first channels 11 communicating with the second channel 12 are connected to the small-diameter channels 16, respectively. The part opens to the second flow path 12.
An internal thread portion is formed on the inner peripheral surface of the large-diameter channel 17.

  In the example of this embodiment, the second flow path 12 is formed so as to penetrate the bearing body 2 in the left-right direction. Of both end portions along the extending direction of the second flow path 12, one end portion (the right end portion in FIG. 2) opens to the side surface (outer surface) of the bearing body 2, and the opening portion receives the fluid. The other end (the left end in FIG. 2) is closed by a plug.

  In the front ram bearing 1F, the position along the bearing axis O direction of the second flow path 12 in the bearing body 2 and the position along the bearing axis O direction of the first flow path 11 are the same. That is, both the first flow path 11 and the second flow path 12 are arranged in one imaginary plane perpendicular to the bearing axis O.

  In the bearing main body 2, an opening hole 6 that is disposed coaxially with the first flow path 11 is formed in a portion that is located on an extension line directed upward of the first flow path 11. In the illustrated example, the opening hole 6 opens to the outer surface of the bearing body 2 and communicates with the large-diameter channel 17 of the first channel 11 through the second channel 12. Specifically, in the present embodiment, the opening hole 6 extends in the vertical direction corresponding to the extending direction of the first flow path 11, and passes through the second flow path 12 positioned above the first flow path 11. It communicates with the first flow path 11. The upper end of the opening hole 6 opens to the upper surface (outer surface) of the bearing body 2, and the lower end of the opening hole 6 opens to the second flow path 12.

  The inner diameter of the opening hole 6 is larger than the outer diameter of the shaft portion of the bolt-shaped body 9 described later and smaller than the outer diameter of the head of the bolt-shaped body 9. Therefore, the shaft portion of the bolt-shaped body 9 can be inserted into the opening hole 6 and the head portion cannot be inserted.

  As shown in FIGS. 4A and 4B, the bolt-shaped body (mounting cylinder) 9 has a shaft portion and a head portion having an outer diameter larger than that of the shaft portion. In FIG. 2, when the bolt-shaped body 9 is mounted on the bearing body 2, the central axis C of the bolt-shaped body 9 is vertically aligned along the extending direction of the large-diameter flow path 17 of the first flow path 11. It extends and is arranged.

In FIG. 4A, the shaft portion and the head portion of the bolt-shaped body 9 are arranged coaxially with the central axis C as a common axis.
The shaft portion extends along the direction of the central axis C of the bolt-shaped body 9. The shaft portion includes a cylindrical orifice housing 8 to which the orifice 5 is mounted, a solid portion 18 connected to the head, a cylindrical connection portion 19 that connects the solid portion 18 and the orifice housing 8, have.

A male screw portion is formed on the outer peripheral surface of the orifice housing 8. An internal thread portion is formed on the inner peripheral surface of the orifice housing 8.
In FIG. 2, the orifice housing 8 (and the bolt-shaped body 9) can be removed from the first channel 11 by screwing the male screw portion of the orifice housing 8 into the female screw portion of the large-diameter channel 17. It is attached to. That is, when the bolt-shaped body 9 is attached to the bearing body 2, the orifice housing 8 is disposed in the large diameter flow path 17.

  In the example of the present embodiment, as shown in FIG. 2, the orifice 5 disposed in the orifice housing 8 has a cylindrical shape. The orifice 5 is formed with a through-hole penetrating the orifice 5 in the central axis direction, and this through-hole is an orifice hole (throttle hole). The orifice 5 is arranged coaxially with the orifice housing 8. A male screw portion is formed on the outer peripheral surface of the orifice 5, and the orifice 5 is detachably attached to the orifice housing 8 by screwing the male screw portion into the female screw portion of the orifice housing 8. .

In the bearing body 2, the orifice 5 is disposed corresponding to the position where the orifice housing 8 is disposed. Specifically, the orifice 5 is a portion of the first flow path 11 (large size) located between the portion of the first flow path 11 that opens in the pocket 4 (small diameter flow path 16) and the second flow path 12. Disposed in the radial channel 17).
The inner diameter (orifice diameter) of the orifice hole of the orifice 5 is set to, for example, less than 1 mm. Of the flow path 28 formed inside the bearing body 2, the portion corresponding to the orifice 5 has the smallest flow path cross-sectional area.

In the example shown in FIG. 2, the total length of the orifice 5 is longer than the distance from the lower end of the orifice housing 8 to the upper end of the small-diameter channel 16. Specifically, the lower end surface of the orifice 5 is disposed so as to protrude downward relative to the lower end surface of the orifice housing 8, and the screwing amount of the orifice 5 into the orifice housing 8 (in the direction of the central axis C of the orifice housing 8). The insertion length of the orifice 5 with respect to the orifice housing 8 along the vertical axis) is a small-diameter channel from the lower end surface of the orifice housing 8 along the vertical direction in which the first channel 11 extends (the same direction as the direction of the central axis C). It is made larger than the length to 16 upper end edges.
Further, the outer diameter of the orifice 5 is made larger than the inner diameter of the small-diameter channel 16 of the first channel 11.
This prevents the orifice 5 from falling off the orifice housing 8 in the large-diameter channel 17 of the first channel 11.

4A, the outer diameter of the shaft portion of the bolt-shaped body 9 is made smaller in the order of the orifice housing 8, the solid portion 18, and the connecting portion 19.
The solid portion 18 has a solid shaft shape. As shown in FIG. 2, when the bolt-shaped body 9 is attached to the bearing body 2, the solid portion 18 is disposed in the opening hole 6.

  2 and 4 (a) and 4 (b), a plurality of communication holes 20 are opened on the outer peripheral surface of the connecting portion 19 around the central axis C at intervals. In the connecting portion 19, these communication holes 20 extend along a radial direction perpendicular to the central axis C, are arranged at equal intervals around the central axis C, and communicate with each other on the central axis C. doing. In the example of the present embodiment, four communication holes 20 are opened on the outer peripheral surface of the connection portion 19. In addition, the number of the communication holes 20 opened to the outer peripheral surface of the connection part 19 is not restricted to four, For example, three or less and five or more may be sufficient. The communication holes 20 and the interior of the orifice housing 8 (through holes in which the orifices 5 are disposed) communicate with each other.

As shown in FIG. 2, when the bolt-shaped body 9 is attached to the bearing body 2, the connection portion 19 is disposed in the second flow path 12. The communication hole 20 of the connection portion 19 communicates the first flow path 11 and the second flow path 12. Specifically, the communication hole 20 that opens to the second flow path 12 and the large diameter flow path 17 of the first flow path 11 communicate with each other through the through hole of the orifice housing 8 and the through hole of the orifice 5. Thus, the second flow path 12 and the first flow path 11 communicate with each other.
Thus, in this embodiment, the 1st flow path 11 and the 2nd flow path 12 are mutually connected through the inside of the bolt-shaped body 9 which makes a top cylinder shape.

When the bolt-shaped body 9 is attached to the bearing body 2, the head of the bolt-shaped body 9 closes the opening hole 6 of the bearing body 2 and comes into contact with the upper surface (outer surface) of the bearing body 2. That is, the head of the bolt-shaped body 9 is a plug portion 7 that is detachably disposed in the opening hole 6 and closes the opening hole 6.
In the example shown in FIG. 2, an annular packing (seal member) 21 is disposed between the head of the bolt-shaped body 9 and the upper surface of the bearing body 2.

  In the present embodiment, the front ram bearing 1F is provided with the bolt-like body (mounting cylinder) 9 in which the plug portion 7 and the orifice housing 8 are integrally formed. However, the present invention is not limited to this. is not. That is, for example, the plug portion 7 attached to the opening hole 6 and the orifice housing 8 attached to the first flow path 11 may be provided separately from each other.

1 and 2, the front ram bearing 1F of the present embodiment includes a pressure sensor 22 that measures the pressure of the fluid held in the pocket 4, and the vicinity of the bearing hole 3 of the bearing body 2 (close to the bearing hole 3). And a temperature sensor 23 for measuring the temperature of any one of the fluids held in the pocket 4.
A flow meter 24 for measuring the flow rate of the fluid supplied to the flow path 28 and the fluid bearing 1 are provided outside the bearing in the DI processing apparatus on the upstream side of the orifices 5 of the plurality of flow paths 28. On the other hand, a drive unit 25 that moves the ram axis (main shaft), a monitor (display unit) 26 that displays each measurement value measured by the pressure sensor 22, the temperature sensor 23, and the flow meter 24, and a control unit 27 are provided. Provided.

  The pressure sensor 22 measures the pressure of the fluid acting on the ram shaft from the pocket 4 of the bearing hole 3. Specifically, in FIG. 2, the pressure sensor 22 includes a portion of the first flow path 11 (small diameter flow path 16) located between the pocket 4 and the orifice 5 in the flow path 28 of the bearing body 2, and the pocket. 4. Measure the fluid pressure of any one of the four. That is, the pressure sensor 22 measures the pressure of the fluid held in the pocket 4 indirectly through the flow path 28 or directly measures the pressure of the fluid held in the pocket 4.

  A plurality of pressure sensors 22 are provided in the bearing body 2 corresponding to the number of the plurality of pockets 4. In the example of the present embodiment, four pockets 4 are opened on the inner peripheral surface of the bearing hole 3, and four pressure sensors 22 are arranged in the bearing body 2 correspondingly.

  Specifically, in FIG. 1 and FIG. 2, one of the plurality of pressure sensors 22 attached to the bearing body 2 measures the fluid pressure in the upper pocket 4, and communicates with the pair of side pockets 4. Two are included that measure the fluid pressure in the first flow path 11 and one that measures the fluid pressure in the lower pocket 4.

  In the present embodiment, the temperature sensor 23 measures the temperature in the vicinity of the bearing hole 3 in the vicinity of the bearing hole 3 and in the pocket 4 of the bearing body 2. Specifically, the temperature sensor 23 measures the temperature of the bearing metal portion 14 that forms the bearing hole 3 in the bearing body 2. In the example of this embodiment, the temperature sensor 23 is disposed in the bearing body 2 so as to measure the temperature of the outer peripheral surface of the bearing metal portion 14.

  A plurality of temperature sensors 23 are provided in the bearing body 2 so as to correspond to the plurality of pockets 4 opened on the inner peripheral surface of the bearing hole 3. In the example of the present embodiment, four pockets 4 are formed on the inner peripheral surface of the bearing hole 3, and four temperature sensors 23 are arranged in the bearing body 2 correspondingly. As the temperature sensor 23, for example, a thermocouple is used.

  Specifically, the plurality of temperature sensors 23 attached to the bearing body 2 include one (not shown) that measures the temperature of the portion corresponding to the upper pocket 4 in the bearing metal portion 14, and a pair of side portions. Two are included for measuring the temperature of each portion corresponding to the pocket 4 and one for measuring the temperature of the portion corresponding to the lower pocket 4.

In the example shown in FIG. 2, the pair of pressure sensors 22 and the pair of temperature sensors 23 provided in the bearing body 2 corresponding to the pair of side pockets 4 among the four pockets are perpendicular to the bearing axis O. They are arranged in one virtual plane. A temperature sensor 23 provided in the bearing body 2 corresponding to the lower pocket 4 is also arranged in the virtual plane.
Specifically, among the pressure sensors 22 and the temperature sensors 23 provided in the bearing body 2 by four, the two pressure sensors 22 and the three temperature sensors 23 described above are plate-like in the body portion 13 of the bearing body 2. The two pressure sensors 22 and one temperature sensor 23 other than those described above are disposed in the cylindrical portion of the main body portion 13.

Although not particularly shown, a temperature sensor for supply fluid that measures the temperature (supply temperature) of fluid such as oil supplied to the flow path 28 of the bearing body 2 is provided inside or outside the front ram bearing 1F. ing.
When the supply fluid temperature sensor measures the temperature of the fluid inside the front ram bearing 1F, the supply fluid temperature sensor is upstream of the orifice 5, for example, the temperature of the fluid in the second flow path 12. Is arranged to measure. When the supply fluid temperature sensor measures the temperature of the fluid outside the front ram bearing 1F, the supply fluid temperature sensor measures, for example, the temperature of the fluid downstream or upstream of the flowmeter 24. Is arranged.

  The flow meter 24 is provided between a pressurized fluid supply source (not shown) such as a pressure pump that pressurizes fluid such as oil and supplies the fluid to the flow path 28 of the bearing body 2 and the flow path 28 of the bearing body 2. It is provided in the piping route. In the example of the present embodiment, one flow meter 24 is provided for one front ram bearing 1F. That is, one flow meter 24 is provided upstream of the four flow paths 28 of the front ram bearing 1F. However, the present invention is not limited to this. For example, a plurality of flow meters 24 may be provided corresponding to the plurality of pockets 4 of the front ram bearing 1F. In the present embodiment, the flow meter 24 is provided outside the bearing. However, for example, when the outer shape of the bearing is large and the flow meter 24 can be accommodated, the orifice 5 of the flow path 28 inside the bearing body 2. A flow meter 24 may be provided on the upstream side.

  In FIG. 2, the fluid flowing from the pressurized fluid supply source through the flow meter 24 and flowing out from the flow meter 24 toward the bearing body 2 passes through a flow path branched outside or inside the bearing body 2. , And supplied to each pocket 4. In FIG. 2, only a piping path from the flow meter 24 to the second flow path 12 communicating with the upper pocket 4 and the pair of side pockets 4 is illustrated. The piping path toward the first flow path 11 communicating with is not shown.

  The drive unit 25 relatively moves the bearing body 2 and the ram shaft (main shaft) inserted through the bearing hole 3 of the bearing body 2. In the present embodiment, the drive unit 25 reciprocates the ram shaft in the center axis direction (bearing axis O direction) with respect to the pair of ram bearings 1F and 1R.

As shown in FIG. 5, the monitor 26 displays at least a measurement value of the pressure measured by the pressure sensor 22. In the present embodiment, the pressure measurement value measured by the pressure sensor 22, the temperature measurement value measured by the temperature sensor 23, and the flow rate measurement value measured by the flow meter 24 (the fluid per unit time) are displayed on the monitor 26. Flow rate) is displayed.
Further, the monitor 26 displays an alarm value (abnormality determination value) or the like related to each measurement value as necessary.

  In FIG. 5, in the present embodiment, various alarm values and measurement values other than the above are displayed on the monitor 26 in addition to the above measurement values. Specifically, a temperature upper limit alarm value (predetermined value) that is an upper limit value of temperature, a pressure lower limit alarm value (predetermined value) that is a lower limit value of pressure, and a MAX value, a MIN value, a pressure difference ( MAX value−MIN value) and a pressure difference alarm value (predetermined value) which is an upper limit value of the pressure difference are displayed.

Although not particularly illustrated, the monitor 26 may further display a pressure upper limit alarm value (predetermined value) that is an upper limit value of pressure. In addition, a flow rate upper limit alarm value (predetermined value) that is an upper limit value and a flow rate lower limit alarm value (predetermined value) that is a lower limit value may be displayed in an appropriate numerical range of the flow rate.
In addition, the fluid temperature upper limit alarm value (predetermined value) and the lower limit value, which are upper limits, of the temperature (supply temperature) of fluid such as oil supplied to the front ram bearing 1F and the appropriate numerical range of the fluid temperature, A certain fluid temperature lower limit alarm value (predetermined value) or the like may be displayed.

Further, the monitor 26 displays each measured value measured by the pressure sensor 22, the temperature sensor 23 and the flow meter 24, and each numerical value such as a pressure MAX value, a MIN value, a pressure difference, etc. as a continuous measurement result. Multiple types of graphs and tables (lists) can be displayed.
The monitor 26 performs an intended operation (for example, an operation for displaying various data (recorded measurement values, graphs, tables), an apparatus setting operation, etc.) when the operator touches the screen. The touch panel etc. which can be used may be sufficient.

  The control unit 27 is electrically connected to each electrical component such as the pressure sensor 22, the temperature sensor 23, the flow meter 24, the drive unit 25, and the monitor 26. The control unit 27 can record each measurement value measured by the pressure sensor 22, the temperature sensor 23, and the flow meter 24 over a predetermined time, and can display the measurement value on the monitor 26.

And the control part 27 is the difference (the said pressure difference. Specifically, maximum pressure difference) of the measured value of the pressure which the some pressure sensor 22 measured with the maximum value (MAX value) and the minimum value (MIN value). ) Exceeds a predetermined value (pressure difference alarm value), an abnormality is detected.
In the present embodiment, the control unit 27 detects an abnormality when the difference between the MAX value of the pressure and the MIN value becomes 0.50 MPa or more, for example.

Further, instead of or together with the above abnormality detection, the control unit 27 determines that the minimum value (MIN value) of the pressure measurement values measured by the plurality of pressure sensors 22 is equal to or less than a predetermined value (pressure lower limit alarm value). An abnormality is detected when the maximum value (MAX value) becomes equal to or greater than a predetermined value (pressure upper limit alarm value).
In the present embodiment, the control unit 27 detects an abnormality when the MIN value of the pressure becomes, for example, 2.50 MPa or less. Further, when the MAX value of the pressure becomes, for example, 9.0 MPa or more, the control unit 27 may detect an abnormality.

The control unit 27 detects an abnormality when the measured value of the temperature measured by the temperature sensor 23 is equal to or greater than a predetermined value (temperature upper limit alarm value). Specifically, the control unit 27 detects an abnormality when the maximum value (MAX value) among the measured values of the temperatures measured by the plurality of temperature sensors 23 is equal to or greater than a predetermined value (temperature upper limit alarm value).
In the present embodiment, the control unit 27 detects an abnormality when the temperature (the MAX value) becomes, for example, 50.0 ° C. or higher.

Further, the control unit 27 detects an abnormality when the measured value of the flow rate measured by the flow meter 24 falls outside a predetermined numerical range. Specifically, when the measured value of the flow rate measured by the flow meter 24 becomes larger than the upper limit value (flow rate upper limit alarm value) of a predetermined numerical range (preset appropriate numerical range), and the lower limit value (flow rate) The control unit 27 detects an abnormality at any time when it becomes smaller than the lower limit alarm value.
In the present embodiment, an appropriate numerical range of the flow rate is, for example, 2 to 20 L / min.

Further, the control unit 27 determines that the temperature measured by the supply fluid temperature sensor (the temperature sensor that measures the temperature (supply temperature) of the fluid supplied to the flow path 28 of the bearing body 2) is out of a predetermined numerical range. When this happens, an abnormality is detected. Specifically, when the measured value of the temperature measured by the supply fluid temperature sensor is larger than the upper limit (fluid temperature upper limit alarm value) of a predetermined numerical range (preset appropriate numerical range), and the lower limit The control unit 27 detects an abnormality at any time when it becomes smaller than the value (fluid temperature lower limit alarm value).
In the present embodiment, an appropriate numerical range of the temperature of the fluid supplied to the flow path 28 of the bearing body 2 is, for example, 20 to 50 ° C.

When the control unit 27 detects an abnormality, it is possible to display the transition of each measurement value (a plurality of types of measurement values and the above pressure difference) until the abnormality is detected on the monitor 26 by a predetermined time. It is.
Specifically, after detecting the abnormality, the control unit 27 stops recording each measurement value and the like. Then, the data is displayed on the monitor 26 with a waveform such as a line graph, a list, etc. for each measured value, for example, by going back about 10 minutes.

Moreover, the control part 27 stops the drive part 25, when abnormality is detected.
Specifically, when detecting an abnormality, the control unit 27 stops at least the driving unit 25 and displays, for example, that the abnormality is detected on the monitor 26 to sound a buzzer (not shown) Inform the operator that an abnormality has been detected, such as by turning on a lamp (blinking).

  FIG. 6 shows an example of a flowchart for determining the cause and the like when the control unit 27 detects an abnormality such as a measurement value of the pressure sensor 22. It should be noted that this flow chart can be referred to in advance even when a change in increase or decrease in the measured pressure value displayed on the monitor 26 is recognized before the control unit 27 detects an abnormality.

The upper part in FIG. 6 shows changes in the “pressure” of the fluid for each case.
Specifically, for example, when the pressure (measured value) becomes higher than a predetermined value (pressure upper limit alarm value) or lower than a predetermined value (pressure lower limit alarm value) across the plurality of pockets 4 When the pressure becomes higher than a predetermined value (pressure upper limit alarm value) or lower than a predetermined value (pressure lower limit alarm value) for a specific pocket 4 among the plurality of pockets 4, and the maximum pressure difference When (MAX value−MIN value) becomes larger than a predetermined value (pressure difference alarm value), each represents.

Further, the lower part of FIG. 6 shows the change of the “flow rate” of the fluid divided into cases.
Specifically, in each case in which the pressure change described above is divided into cases, for example, when the flow rate (measured value) is high (out of the proper numerical range and larger than the flow rate upper limit alarm value), it is appropriate In the case of a numerical value range, the value is low (when it is outside the proper numerical value range and smaller than the flow rate lower limit alarm value).

When the pressure changes, the cause is determined as follows according to (I) to (XIII) shown in FIG. 6 by the combination of the measured value of the pressure and the measured value of the flow rate. Or can be estimated.
Actually, not all the cases (I) to (XIII) below are possible, so cases where it is difficult to think about the occurrence of abnormality are set to “no experience”. If an inexperienced case occurs, the cause may be determined as appropriate by disassembling the device or inspecting each component.

(I)… Setting error of fluid supply source pressure. Relief valve failure.
(II) ... No experience.
(III) ... No experience.
(IV) ... No experience.
(V) ... No experience.
(VI): Abnormal setting of fluid supply source pressure. Filter clog for supply fluid. Relief valve failure. Pressure pump (pressurized fluid supply source) malfunctions.
(VII) ... No experience.
(VIII): Orifice clogged.
(IX)… Orifice clogged.
(X)… Orifice inner diameter abnormality (orifice hole deformation, expansion).
(XI) Abnormal inner diameter of ram bearing (partial deformation due to wear of bearing hole).
(XII) ... No experience.
(XIII)… Clogged orifice. Abnormal orifice inner diameter (deformation or enlargement of orifice hole). Abnormal inner diameter of ram bearing (partial deformation due to wear of bearing hole).

  Next, the rear ram bearing 1R, the abnormality detecting device 10 for the rear ram bearing 1R and the abnormality detecting method shown in FIGS. 1 and 3 will be described. Detailed description of the same components as those of the front ram bearing 1F described above will be omitted, and only differences will be mainly described below.

  The main body 13 of the bearing body 2 of the rear ram bearing 1R has a rectangular parallelepiped shape. The main body 13 is provided with a plurality of adjustment screws for coaxially aligning (centering) the bearing holes 3 of the ram bearings 1F, 1R on the bearing shaft O.

  As shown in FIG. 3, in the rear ram bearing 1R, a position along the bearing axis O direction of the first flow path 11 in the bearing body 2 and a position along the bearing axis O direction of the second flow path 12 are They are different from each other. That is, the virtual plane perpendicular to the bearing axis O where the first flow path 11 is arranged and the virtual plane perpendicular to the bearing axis O where the second flow path 12 is arranged are different from each other in the direction of the bearing axis O. It is the surface.

In the bearing body 2, the opening hole 6 is directly connected to the large-diameter channel 17 of the first channel 11 without passing through the second channel 12. The second flow path 12 is connected to the connection portion between the opening hole 6 and the first flow path 11 from the bearing axis O direction and communicates with the first flow path 11.
Specifically, the connection portion 19 and its communication hole 20 in the bolt-shaped body 9 are arranged at a portion where the first flow path 11 and the second flow path 12 intersect and connect, and through the communication hole 20. The first flow path 11 and the second flow path 12 communicate with each other.

  In the rear ram bearing 1R, a pressure sensor 22 and a temperature sensor 23 provided in the bearing body 2 corresponding to a predetermined (one) pocket 4 among a plurality of pockets 4 formed in the bearing hole 3 are provided. The bearing shafts O are arranged apart from each other in the direction of the bearing axis O.

As the flow meter 24 connected to the rear ram bearing 1R, a separate body is used from the flow meter 24 connected to the front ram bearing 1F described above. That is, in the example of the present embodiment, two flow meters 24 are provided for the ram bearings 1F and 1R in the DI processing apparatus.
The drive unit 25, the monitor 26, and the control unit 27 shown in FIGS. 2 and 3 are common to both ram bearings 1F and 1R and are the same product (common product).

  According to the abnormality detection device 10 and the abnormality detection method for the fluid dynamic bearing 1 (1F, 1R) of the present embodiment described above, the orifice 5 is detachably provided in each flow path 28 communicating with the plurality of pockets 4. Yes. Further, a pressure sensor 22 for measuring the pressure of the fluid held in each pocket 4 is provided. That is, the fluid pressures in the plurality of pockets 4 can be measured by the plurality of pressure sensors 22, respectively.

  When the difference between the maximum value and the minimum value (pressure difference) among the measured pressure values measured by these pressure sensors 22 becomes greater than a predetermined value, the control unit 27 detects an abnormality. That is, when the maximum pressure difference between the measured values measured by the plurality of pressure sensors 22 is equal to or greater than a predetermined value (pressure difference alarm value), it is determined that an orifice clogging has occurred and that it is abnormal.

Specifically, when clogging occurs in the flow path of any one of the orifices 5 provided in the flow paths 28 of the plurality of pockets 4, the fluid pressure in the pocket 4 through which the flow path of the orifice 5 communicates is reduced. A change occurs in the measured value of the pressure sensor 22 to be measured, and the pressure difference between the measured values of the pressure sensors 22 increases.
In this embodiment, when a fluid pressure difference occurs between the pockets 4 as described above, if the difference between the maximum pressure value and the minimum value (maximum pressure difference) is smaller than a predetermined value, it is abnormal. Assuming that the concentricity between the center axis O of the bearing hole 3 and the center axis of the ram shaft cannot be sufficiently secured (or that there is a risk of it) ).

  Further, in the present embodiment, when the minimum value of the pressure measurement values measured by the plurality of pressure sensors 22 becomes smaller than a predetermined value (pressure lower limit alarm value) or the maximum value is a predetermined value (pressure upper limit alarm). When the value becomes greater than or equal to (value), the control unit 27 detects an abnormality, assuming that the orifice is clogged.

Specifically, when clogging occurs in the flow path of any one of the orifices 5 provided in the flow paths 28 of the plurality of pockets 4, the fluid pressure in the pocket 4 through which the flow path of the orifice 5 communicates is reduced. A change occurs in the measured value of the pressure sensor 22 to be measured.
In the present embodiment, when the measurement value of the pressure sensor 22 changes as described above, the minimum value of the pressure is larger than the predetermined value, or the maximum value of the pressure is smaller than the predetermined value. When the minimum value of pressure becomes smaller than a predetermined value without being judged as abnormal, or when the maximum value of pressure becomes larger than a predetermined value, the center axis O of the bearing hole 3 and the ram shaft Assuming that the degree of concentricity with the central axis cannot be sufficiently ensured (or that there is a risk of this), it is determined to be abnormal.

Accordingly, by appropriately setting each of the above predetermined values, an abnormality (orifice clogging) can be reliably detected, and the orifice 5 can be cleaned at an appropriate timing.
In other words, the processing accuracy of the DI can by the DI processing apparatus can be maintained well, and the fluid bearing 1 (1F) can be maintained without excessively (unnecessarily) frequently cleaning the orifice 5 as before. 1R) and the ram shaft can be prevented from being worn or damaged.

  As described above, according to the present embodiment, it is possible to detect that the flow path of the orifice 5 is clogged, and it is possible to clean the orifice 5 at an appropriate timing.

In the present embodiment, at least three or more pockets 4 are formed at equal intervals around the central axis O of the bearing hole 3 on the inner peripheral surface of the bearing hole 3. By the pressure of the fluid to be applied, the ram shaft can be reliably separated from the inner peripheral surface of the bearing hole 3 and can be easily arranged coaxially, so that the ram shaft can be stably supported.
Then, by measuring the pressure of the fluid held in three or more pockets 4 with the same number of three or more pressure sensors 22 as the pockets 4, the accuracy of abnormality detection can be improved, and the above-described embodiment. The effect of is more stably achieved.
In the present embodiment, the four pockets 4 are formed at equal intervals around the central axis O of the bearing hole 3 on the inner peripheral surface of the bearing hole 3, so that the structure of the device is not overly complicated. The operational effects of the present embodiment can be made particularly remarkable.

  In the present embodiment, the control unit 27 detects an abnormality when the measured value of the temperature measured by the temperature sensor 23 is equal to or greater than a predetermined value (temperature upper limit alarm value), and thus has the following effects.

  That is, when orifice clogging occurs and the fluid pressure in the pocket 4 corresponding to the flow path 28 in which the orifice 5 is disposed decreases, the center axis O of the bearing hole 3 and the ram that is pivotally supported by the bearing hole 3. The axis position of the axis shifts from the center axis. As these inter-shaft distances increase, the outer peripheral surface of the ram shaft finally comes into contact with the inner peripheral surface of the bearing hole 3.

According to the configuration of the present embodiment, the temperature sensor 23 measures the temperature of any one of the fluids held in the vicinity of the bearing hole 3 of the bearing body 2 (the part disposed close to the bearing hole 3) and in the pocket 4. Is provided. And when the measured value of the temperature sensor 23 becomes larger than a predetermined value, the control unit 27 detects an abnormality.
That is, when the bearing hole 3 and the ram shaft come into contact with each other, the temperature sensor 23 measures the temperature of the fluid in the vicinity of the bearing hole 3 and in the pocket 4 due to the contact resistance (friction). Can be determined based on Therefore, combined with the abnormality detection by the pressure sensor 22 described above, the abnormality of the fluid bearing 1 (1F, 1R) can be detected more reliably.

  In the present embodiment, a plurality of temperature sensors 23 are provided corresponding to the plurality of pockets 4 opened on the inner peripheral surface of the bearing hole 3. Therefore, orifice clogging occurs, and even when the ram shaft approaches the specific pocket 4 out of these pockets 4 and contacts the inner peripheral surface of the bearing hole 3, the temperature in the vicinity of the pocket 4 is reached. The rise can be accurately measured by the temperature sensor 23 corresponding to the pocket 4. Therefore, the accuracy of abnormality detection is increased.

Further, in the present embodiment, the flow meter 24 is provided on the upstream side of the orifices 5 of the plurality of flow paths 28, and the flow rate measured by the flow meter 24 falls outside a predetermined numerical range ( The control unit 27 detects an abnormality when it deviates from the appropriate numerical range to either the upper or lower side.
That is, for example, when orifice clogging progresses over the plurality of orifices 5 or when a fluid supply source pressure setting abnormality or a relief valve failure occurs, the measured value of the flow meter 24 is a predetermined value. Because it is smaller or larger than the numerical value range (because it is smaller than the flow rate lower limit alarm value or larger than the flow rate upper limit alarm value), an abnormality can be judged based on this measured value. . Therefore, the abnormality can be detected more reliably.

  Moreover, in this embodiment, when the measured value of the temperature measured by the supply fluid temperature sensor is outside the predetermined numerical range, the control unit 27 detects an abnormality, so that the following effects are obtained.

  That is, when the temperature of the fluid supplied to the flow path 28 of the bearing body 2 is out of a predetermined numerical range corresponding to the type of the fluid (when it is out of the appropriate numerical range, either up or down). Changes in the viscosity of the fluid, etc., and the desired fluid function (such as the function of floating the ram shaft from the inner peripheral surface of the bearing hole 3 and lubricating these slides) cannot be obtained stably. There is a fear. For example, when the temperature of the fluid supplied to the flow path 28 is lower than (a lower limit of) a predetermined numerical range, the viscosity of the fluid may increase and smooth sliding may not be promoted. When the temperature of the fluid is higher than the predetermined numerical range (the upper limit thereof), the viscosity of the fluid decreases and the fluid tends to flow out of the pocket 4, and the sliding function and the centering function by the fluid may become unstable. . Further, if the temperature of the fluid supplied to the flow path 28 is higher than the upper limit of the predetermined numerical range, the metal parts (the bearing metal portion 14 and the like) of the fluid bearing 1 are likely to rise in temperature, which may cause seizure or the like. Also become.

According to the configuration of the present embodiment, the supply fluid temperature sensor for measuring the temperature of the fluid supplied to the flow path 28 of the bearing body 2 is provided, and the measurement value of the supply fluid temperature sensor is a predetermined value. When the value is out of the numerical range, the control unit 27 detects an abnormality.
Therefore, the function of the fluid held in the pocket 4 can be stably exhibited, and when there is a possibility that the function of the fluid cannot be sufficiently exhibited, an abnormality is detected and the bearing hole 3 and the ram shaft are worn. And damage can be prevented. Further, seizure of metal parts of the fluid bearing 1 can be prevented.

  In the present embodiment, a monitor (display unit) 26 that displays at least the measurement value of the pressure measured by the pressure sensor 22 is provided. When the control unit 27 detects an abnormality, the measurement value until the abnormality is detected is provided. Since the transition can be displayed on the monitor 26 retroactively for a predetermined time, the following effects are obtained.

That is, in this case, since the monitor 26 that displays at least the pressure measurement value measured by the pressure sensor 22 is provided, the operator can determine what state the pressure measurement value is (high or low). You can check if necessary.
When the control unit 27 detects an abnormality, the transition of the measured value until the abnormality is detected can be displayed on the monitor 26 retroactively for a predetermined time. Even if you are not present, you can check the transition of measured values until the occurrence of an abnormality. Accordingly, it is possible to confirm when an abnormality has occurred, to identify the location and cause of the abnormality, and the like.

In this embodiment, in addition to the pressure measurement value measured by the pressure sensor 22, the pressure value MAX value, the MIN value, the pressure difference (MAX value−MIN value), and the temperature measured by the temperature sensor 23 are displayed on the monitor 26. And the measured value of the flow rate measured by the flowmeter 24 (the flow rate of the fluid per unit time) are displayed. The monitor 26 displays alarm values (abnormality determination values) related to the above-described measured values and the like. Furthermore, each of the above-described measured values can be displayed as a continuous measurement result by a plurality of types of graphs and tables (lists).
Therefore, the operator can check various data as necessary. Also, when an abnormality occurs, the work of confirming when the abnormality has occurred and identifying the location and cause of the abnormality can be performed with higher accuracy and easier.

  Further, in the present embodiment, when the control unit 27 detects an abnormality, the drive unit 25 that moves the bearing body 2 and the ram shaft relative to each other is stopped, so that the DI processing apparatus is damaged or the workpiece jams (molded product clogging). Etc. can be suppressed.

  In the present embodiment, when the control unit 27 detects an abnormality, at least the drive unit 25 is stopped and, for example, the monitor 26 displays that the abnormality has been detected, and a buzzer is sounded or a lamp is turned on. The operator is notified that an abnormality has been detected, such as by blinking. Therefore, the above-described effects can be obtained, and the DI processing apparatus can be quickly returned from the abnormality occurrence state.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

  For example, in the above-described embodiment, the fluid dynamic bearing 1 and the abnormality detection device 10 are provided in a DI processing device that performs DI processing on a cup-shaped body to form a DI can. However, the present invention is not limited to this. Absent. That is, the fluid dynamic bearing and its abnormality detection device of the present invention can be provided in various devices (processing devices, etc.) other than the above-described DI processing device, and have excellent operational effects as described above.

  In the above-described embodiment, the pair of ram bearings 1F and 1R support the ram shaft (main shaft) so as to be movable in the direction of the central axis O (that is, slidably movable). It is not a thing. For example, when the present invention is applied to an apparatus other than the DI processing apparatus, the pair of ram bearings 1F and 1R may support the ram shaft so as to be rotatable around its central axis O. In this case, the drive unit 25 rotates and moves the ram shaft around the central axis O with respect to the pair of ram bearings 1F and 1R.

  In the above-described embodiment, the pair of ram bearings 1F and 1R are arranged to be spaced apart from each other in the horizontal direction corresponding to the ram shaft extending in the horizontal direction. However, the present invention is not limited to this. Absent. For example, when the present invention is applied to an apparatus other than the DI processing apparatus, the pair of ram bearings 1F and 1R may be arranged apart from each other in the vertical direction corresponding to the ram shaft extending in the vertical direction. Good.

In the above-described embodiment, the control unit 27 detects an abnormality based on any of the pressure measurement values (MAX value, MIN value, MAX value−MIN value) measured by the plurality of pressure sensors 22, In addition, it was decided to detect abnormalities under the following conditions. That is, when the measured value of the temperature measured by the temperature sensor 23 is equal to or greater than a predetermined value, when the measured value of the flow rate measured by the flow meter 24 is out of the predetermined numerical range, and when the temperature sensor for supply fluid is The control unit 27 also detects an abnormality when the measured temperature value is out of the predetermined numerical range. However, the present invention is not limited to this, and the control unit 27 is based on at least one of the pressure measurement values (MAX value, MIN value, MAX value−MIN value) measured by the plurality of pressure sensors 22. What is necessary is just to detect abnormality, and it is not necessary to detect abnormality in the said other conditions. Therefore, in this case, the temperature sensor 23, the flow meter 24, and the supply fluid temperature sensor may not be provided.
However, it is preferable that the control unit 27 detects abnormality even under conditions other than pressure, such as temperature and flow rate, so that the operational effects of the present invention become more remarkable.

  In the above-described embodiment, the monitor (display unit) 26 that can display various data including at least the measurement value of the pressure measured by the pressure sensor 22 is provided. However, the monitor 26 is not provided. Also good.

  In addition, in the range which does not deviate from the meaning of this invention, you may combine each structure (component) demonstrated by the above-mentioned embodiment, a modification, and a remark etc., addition of a structure, omission, substitution, others It can be changed. Further, the present invention is not limited by the above-described embodiments, and is limited only by the scope of the claims.

  The fluid bearing abnormality detection device and abnormality detection method of the present invention can detect clogging in the flow path of the orifice and can clean the orifice at an appropriate timing. Therefore, it has industrial applicability.

1 Fluid bearing 1F Front ram bearing (fluid bearing)
1R rear ram bearing (fluid bearing)
2 Bearing Body 3 Bearing Hole 4 Pocket 5 Orifice 10 Fluid Bearing Abnormality Detection Device 22 Pressure Sensor 23 Temperature Sensor 24 Flowmeter 25 Drive Unit 26 Monitor (Display Unit)
27 Control unit 28 Flow path O Bearing shaft (center axis of bearing hole)

Claims (18)

A bearing body;
A bearing hole formed in the bearing body;
A plurality of pockets opened on the inner peripheral surface of the bearing hole at intervals around the central axis of the bearing hole;
A plurality of flow paths communicating with the plurality of pockets;
An orifice detachably disposed in the flow path;
A plurality of pressure sensors for measuring the pressure of the fluid held in the plurality of pockets;
A control unit,
The control unit detects an abnormality when a difference between a maximum value and a minimum value is equal to or greater than a predetermined value among measured pressure values measured by the plurality of pressure sensors. Anomaly detection device. A bearing body;
A bearing hole formed in the bearing body;
A plurality of pockets opened on the inner peripheral surface of the bearing hole at intervals around the central axis of the bearing hole;
A plurality of flow paths communicating with the plurality of pockets;
An orifice detachably disposed in the flow path;
A plurality of pressure sensors for measuring the pressure of the fluid held in the plurality of pockets;
A control unit,
The control unit detects an abnormality when a minimum value becomes a predetermined value or less or a maximum value becomes a predetermined value or more among measured pressure values measured by the plurality of pressure sensors. An abnormality detection device for a fluid bearing, characterized by: The fluid bearing abnormality detection device according to claim 1 or 2,
At least three or more pockets are formed on the inner peripheral surface of the bearing hole at equal intervals around the central axis. The fluid bearing abnormality detection device according to any one of claims 1 to 3,
A temperature sensor that measures the temperature of any of the fluids held in the vicinity of the bearing hole and in the pocket of the bearing body is provided,
The fluid bearing abnormality detection device according to claim 1, wherein the controller detects an abnormality when a measured value of the temperature measured by the temperature sensor becomes equal to or greater than a predetermined value. The fluid bearing abnormality detection device according to claim 4,
The fluid bearing abnormality detection device according to claim 1, wherein a plurality of the temperature sensors are provided corresponding to the plurality of pockets opened on an inner peripheral surface of the bearing hole. The fluid bearing abnormality detection device according to any one of claims 1 to 5,
A flow meter is provided upstream of the orifices of the plurality of flow paths,
The fluid bearing abnormality detection device, wherein the control unit detects an abnormality when a measured value of the flow rate measured by the flowmeter is out of a predetermined numerical range. The fluid bearing abnormality detection device according to any one of claims 1 to 6,
A supply fluid temperature sensor for measuring the temperature of the fluid supplied to the flow path of the bearing body;
The fluid bearing abnormality detection device, wherein the control unit detects an abnormality when a measured value of the temperature measured by the supply fluid temperature sensor is outside a predetermined numerical range. The fluid bearing abnormality detection device according to any one of claims 1 to 7,
A display unit for displaying at least a pressure measurement value measured by the pressure sensor;
The fluid bearing abnormality detection device, wherein when the control unit detects an abnormality, a transition of the measured value until the abnormality is detected can be displayed on the display unit for a predetermined time. The fluid bearing abnormality detection device according to any one of claims 1 to 8,
A drive unit for relatively moving the bearing body and the main shaft inserted through the bearing hole of the bearing body;
The fluid bearing abnormality detection device according to claim 1, wherein the controller stops the driving unit when an abnormality is detected. On the inner peripheral surface of the bearing hole formed in the bearing body, a plurality of pockets are opened at intervals around the central axis of the bearing hole,
Providing a plurality of flow paths communicating with the plurality of pockets;
An orifice is detachably disposed in the flow path,
A plurality of pressure sensors for measuring the pressure of the fluid held in the plurality of pockets, and a control unit;
The control unit detects an abnormality when a difference between a maximum value and a minimum value is equal to or greater than a predetermined value among measured pressure values measured by the plurality of pressure sensors. Anomaly detection method. On the inner peripheral surface of the bearing hole formed in the bearing body, a plurality of pockets are opened at intervals around the central axis of the bearing hole,
Providing a plurality of flow paths communicating with the plurality of pockets;
An orifice is detachably disposed in the flow path,
A plurality of pressure sensors for measuring the pressure of the fluid held in the plurality of pockets, and a control unit;
The control unit detects an abnormality when a minimum value becomes a predetermined value or less or a maximum value becomes a predetermined value or more among measured pressure values measured by the plurality of pressure sensors. An abnormality detection method for a hydrodynamic bearing, characterized by: The fluid bearing abnormality detection method according to claim 10 or 11,
An abnormality detection method for a fluid bearing, wherein at least three pockets are formed at equal intervals around the central axis on the inner peripheral surface of the bearing hole. An abnormality detection method for a fluid bearing according to any one of claims 10 to 12,
Provided with a temperature sensor that measures the temperature of any one of the fluids held in the vicinity of the bearing hole and in the pocket of the bearing body,
An abnormality detection method for a fluid bearing, wherein the control unit detects an abnormality when a measured value of a temperature measured by the temperature sensor becomes a predetermined value or more. The fluid bearing abnormality detection method according to claim 13,
A fluid bearing abnormality detection method comprising: providing a plurality of the temperature sensors corresponding to the plurality of pockets opened on an inner peripheral surface of the bearing hole. It is a fluid bearing abnormality detection method according to any one of claims 10 to 14,
A flow meter is provided on the upstream side of the orifices of the plurality of flow paths,
The fluid bearing abnormality detection method, wherein the controller detects an abnormality when a measured value of the flow rate measured by the flow meter is out of a predetermined numerical range. A fluid bearing abnormality detection method according to any one of claims 10 to 15,
Providing a temperature sensor for the supply fluid for measuring the temperature of the fluid supplied to the flow path of the bearing body;
The fluid bearing abnormality detection method, wherein the controller detects an abnormality when a measured value of the temperature measured by the supply fluid temperature sensor is outside a predetermined numerical range. A fluid bearing abnormality detection method according to any one of claims 10 to 16, comprising:
At least a display unit for displaying a pressure measurement value measured by the pressure sensor is provided,
An abnormality detection method for a fluid bearing, wherein when the control unit detects an abnormality, a transition of the measured value until the abnormality is detected can be displayed on the display unit by a predetermined time. A fluid bearing abnormality detection method according to any one of claims 10 to 17,
A drive unit for relatively moving the bearing body and the main shaft inserted through the bearing hole of the bearing body;
An abnormality detection method for a fluid bearing, wherein the control unit stops the drive unit when an abnormality is detected.

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