JP2017187317A - 多重反射型セル及び分析装置 - Google Patents
多重反射型セル及び分析装置 Download PDFInfo
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- 238000004458 analytical method Methods 0.000 title description 4
- 230000003287 optical effect Effects 0.000 claims abstract description 26
- 210000004027 cell Anatomy 0.000 claims description 100
- 210000005056 cell body Anatomy 0.000 claims description 41
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 12
- 239000007789 gas Substances 0.000 description 40
- 238000005259 measurement Methods 0.000 description 8
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 5
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
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- 238000000862 absorption spectrum Methods 0.000 description 2
- 238000007865 diluting Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
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- 239000013013 elastic material Substances 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
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- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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Abstract
【解決手段】入射した光を多重反射した後に外部へ射出する多重反射型セル102であって、試料が導入されるセル室2Sが形成されるセル本体2と、セル本体2に取り付けられて、セル室2Sに反射面3xが位置する2以上の反射部材と31〜33、セル本体2に対して反射部材32、33の位置を調整する位置調整機構4とを備えている。セル本体2は、セル室2Sと外部とを連通し、反射部材32、33が取り付けられる取り付け部221を有している。取り付け部221に取り付けられた反射部材32、33とセル本体2との間に、セル室2Sとセル本体2の外部との間を封止するシール部材7が設けられており、シール部材7によりセル室2Sとセル本体2の外部との間が封止されている。位置調整機構4は、セル室2Sの外部に設けられている。
【選択図】図3
Description
また、反射部材の反射面がセル室内に位置しているので、反射面の前方に窓等を設ける必要が無く、当該窓の反射を低減するための構造を不要にするとともに、互いに対向する2つの反射面の間の空間全体を光路長として利用することができる。さらに、試料と反射面との間に窓等を設ける必要が無いので、所望の光路長を得るためにはセル全体が大型化してしまう心配も無い。
この問題を好適に解決するためには、前記位置調整機構は、前記シールによる可動範囲内において、前記反射部材を調整するように構成されたものであることが望ましい。
この構成であれば、取り付け部の傾斜により反射部材の角度の大部分を調整することができ、位置調整機構による反射部材の調整を軽微にすることができる。したがって、シール部材による可動範囲で反射部材の位置調整を可能にし易くできる。
この構成においては、光軸が傾斜した第2反射部材の位置決めが特に難しくなる。そのため、前記第2反射部材が、前記位置調整機構により位置調整可能に設けられていることが望ましい。
102・・・多重反射型セル
2・・・セル本体
221・・・取り付け部
2S・・・セル室
W1・・・入射窓
W2・・・出射窓
31・・・第1反射部材
31C・・・第1反射部材の光軸
32・・・第2反射部材
32C・・・第2反射部材の光軸
33・・・第2反射部材
33C・・・第2反射部材の光軸
3x・・・反射面
4・・・位置調整機構
7・・・Oリング(シール部材)
Claims (7)
- 入射した光を多重反射した後に外部へ射出する多重反射型セルであって、
試料が導入されるセル室が形成されるセル本体と、
前記セル本体に取り付けられて、前記セル室に反射面が位置する2以上の反射部材と、
前記セル本体に対して前記反射部材の位置を調整する位置調整機構とを備え、
前記セル本体は、前記セル室と外部とを連通し、前記反射部材が取り付けられる取り付け部を有しており、
前記取り付け部に取り付けられた反射部材と前記セル本体との間に、前記セル室と前記セル本体の外部との間を封止するシール部材が設けられており、
前記位置調整機構は、前記セル室の外部に設けられている多重反射型セル。 - 前記位置調整機構は、前記シール部材による可動範囲内において、前記反射部材を調整するものである請求項1記載の多重反射型セル。
- 前記取り付け部は、前記セル本体に対する前記反射部材の取り付け角度に沿って傾斜して設けられている請求項1又は2記載の多重反射型セル。
- 3つの反射部材を有するものであり、
1つの反射部材である第1反射部材と、残りの2つの反射部材である第2反射部材とが互いに対向して配置されており、
前記2つの第2反射部材は、前記第1反射部材の光軸を含む面に対して対称となるように配置され、それらの光軸が前記第1反射部材に向かって相寄る方向に傾斜しており、
前記第2反射部材は、前記位置調整機構により位置調整可能に設けられている請求項1乃至3の何れか一項に記載の多重反射型セル。 - 前記反射部材は、先端面に反射面を有する円筒形状をなすものであり、
前記取り付け部は、前記反射部材の外側周面に対向する断面円形の内側周面を有するものであり、
前記シール部材は、前記反射部材の外側周面と前記取り付け部の内側周面との間を気密にシールするものである請求項1乃至4の何れか一項に記載の多重反射型セル。 - 前記位置調整機構は、前記セル本体の外部に面して設けられている請求項1乃至5の何れか一項に記載の多重反射型セル。
- 請求項1乃至6の何れか一項に記載の多重反射型セルを備えた分析装置。
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JP2016074604A JP6656995B2 (ja) | 2016-04-01 | 2016-04-01 | 多重反射型セル及び分析装置 |
EP17163378.7A EP3225974B1 (en) | 2016-04-01 | 2017-03-28 | Multiple reflection type cell and analyzer |
CN201710195847.3A CN107389583B (zh) | 2016-04-01 | 2017-03-29 | 多重反射型单元和分析装置 |
US15/477,329 US10101264B2 (en) | 2016-04-01 | 2017-04-03 | Multiple reflection type cell and analyzer |
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JP2016074604A JP6656995B2 (ja) | 2016-04-01 | 2016-04-01 | 多重反射型セル及び分析装置 |
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JP2017187317A true JP2017187317A (ja) | 2017-10-12 |
JP6656995B2 JP6656995B2 (ja) | 2020-03-04 |
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US (1) | US10101264B2 (ja) |
EP (1) | EP3225974B1 (ja) |
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Cited By (1)
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JP2019184368A (ja) * | 2018-04-06 | 2019-10-24 | 横河電機株式会社 | ガス分析装置 |
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- 2016-04-01 JP JP2016074604A patent/JP6656995B2/ja active Active
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2017
- 2017-03-28 EP EP17163378.7A patent/EP3225974B1/en active Active
- 2017-03-29 CN CN201710195847.3A patent/CN107389583B/zh active Active
- 2017-04-03 US US15/477,329 patent/US10101264B2/en active Active
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CN107389583A (zh) | 2017-11-24 |
US10101264B2 (en) | 2018-10-16 |
CN107389583B (zh) | 2021-04-13 |
EP3225974B1 (en) | 2019-03-06 |
JP6656995B2 (ja) | 2020-03-04 |
EP3225974A1 (en) | 2017-10-04 |
US20170284929A1 (en) | 2017-10-05 |
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