JP2017183523A - Electronic device manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic device manufacturing apparatus capable of easily performing highly accurate alignment.SOLUTION: An electronic device manufacturing apparatus comprises: an impression cylinder 110 including three effective surfaces 110a-110c for holding a sheet while being supported in a rotatable manner in a circumferential direction; a supply cylinder 120 for supplying sheets S1-S3 to every other surface of the effective surfaces 110a-110c of the impression cylinder 110; a discharge cylinder 150 for discharging the sheets S1-S3 from the effective surfaces 110a-110c of the impression cylinder 110; and multiple ink transfer means 130, 140, 191 and 192 for transferring a functional ink consisting of a material having functionality to the sheets S1-S3 that are held by the effective surfaces 110a-110c of the impression cylinder 110.SELECTED DRAWING: Figure 3G

Description

  The present invention relates to an electronic device manufacturing apparatus that manufactures an electronic device by laminating functional materials on a flexible substrate to form a functional layer.

  A flexible electronic device such as a thin film transistor (TFT) in which functional layers such as a gate layer (G layer), a gate insulator layer (GI layer), and a source and drain layer (SD layer) are stacked on a substrate is, for example, As described in Patent Document 1, an ink layer is provided on a blanket, a letterpress plate having a convex pattern is brought into contact with the blanket, and ink in a portion of the ink layer on the blanket that is in contact with the convex pattern After forming an ink pattern on the blanket, the ink pattern on the blanket is transferred to a substrate having an ink repellent pattern on a non-ink pattern portion to transfer the ink repellent pattern to the blanket. In general, it is produced by a printing method in which a pattern subtracted from an ink pattern is formed on a substrate.

JP 2007-268715 A JP2013-241275A Japanese Patent Laying-Open No. 2015-153796

  By the way, when manufacturing TFT as mentioned above, since it is necessary to print each layer, such as G layer, GI layer, SD layer, etc. on a base material with high precision, to the printing part of each corresponding layer. When the substrate was transported, highly accurate positioning had to be performed each time, which was very laborious.

  In view of the above, an object of the present invention is to provide an electronic device manufacturing apparatus capable of easily performing highly accurate alignment.

  An electronic device manufacturing apparatus according to the present invention for solving the above-described problems is an electronic device that manufactures an electronic device by forming a functional layer by laminating a functional material on a flexible substrate. A manufacturing apparatus, a pressure cylinder having an odd number of three or more holding surfaces that are rotatably supported to hold a base material along a circumferential direction, and every other base material to the holding surface of the pressure cylinder Substrate supply means for supplying the substrate, substrate discharge means for discharging the substrate from the holding surface of the impression cylinder, and a material having functionality on the substrate held on the holding surface of the impression cylinder And a plurality of ink transfer means for transferring functional ink.

  Further, the electronic device manufacturing apparatus according to the present invention is the electronic device manufacturing apparatus described above, wherein at least one of the ink transfer means is rotatably arranged and can move away from and in contact with the impression cylinder, A plate cylinder having a plurality of plate surfaces formed with a pattern corresponding to the functional layer in the circumferential direction, and a first functional ink supply means for supplying a first functional ink to the plate surface of the plate cylinder. It is characterized by that.

  In the electronic device manufacturing apparatus according to the present invention, in the above-described electronic device manufacturing apparatus, at least one of the other ink transfer means is rotatably arranged and can move away from and in contact with the impression cylinder. A coater cylinder and a second functional ink supply means for supplying a second functional ink to the coater cylinder are provided.

  The electronic device manufacturing apparatus according to the present invention is the above-described electronic device manufacturing apparatus, wherein the plate cylinder has a first plate surface and a second plate surface, and is a substrate held from the base material supply unit. The plate cylinder and the first so as to form a first functional layer on the substrate by transferring the first functional ink supplied to the first plate surface of the plate cylinder to the material The operation of the functional ink supply means is controlled so that the substrate on which the first functional layer is formed is held on the holding surface of the impression cylinder as it is without being transferred from the impression cylinder to the substrate discharge means. The first functional ink that controls the operation of the impression cylinder and the substrate discharging means and is supplied to the second plate surface of the plate cylinder with respect to the substrate on which the first functional layer is formed. The plate cylinder and the first function so as to form a third functional layer by transferring Characterized in that it comprises a control means for controlling the operation of the ink supply means.

  The electronic device manufacturing apparatus according to the present invention is the electronic device manufacturing apparatus described above, wherein the plate cylinder has a first plate surface and a second plate surface, and is controlled to rotate the impression cylinder. After that, the base material supply means and the operation of the impression cylinder are controlled so that the base material is held on the holding surface of the impression cylinder from the base material supply means, and the base material held from the base material supply means On the other hand, the plate cylinder and the first functionality are formed such that the first functional ink supplied to the first plate surface of the plate cylinder is transferred to form a first functional layer on the substrate. The second functional ink supplied to the blanket of the coater cylinder is transferred to the substrate on which the first functional layer is formed by controlling the operation of the ink supply means. The coater cylinder and the second functionality so as to form a second functional layer The base material on which the first functional layer and the second functional layer are formed is controlled as it is on the holding surface of the impression cylinder without passing it from the impression cylinder to the substrate discharge means. The operation of the impression cylinder and the substrate discharging means is controlled so as to be held, and the second plate surface of the plate cylinder is formed on the substrate on which the first functional layer and the second functional layer are formed. Controlling the operation of the plate cylinder and the first functional ink supply means so as to transfer the first functional ink supplied to the second functional layer and form a third functional layer on the second functional layer, The operation of the coater cylinder and the second functional ink supply means is controlled so that the second functional ink is not transferred to the substrate on which the first to third functional layers are formed. A base material on which three functional layers are formed is transferred from the holding surface of the impression cylinder to the base material discharging means. Characterized in that it comprises a control means for controlling the operation of the impression cylinder and the substrate discharging means so as to de.

  According to the electronic device manufacturing apparatus of the present invention, while supplying every other substrate to three or more holding surfaces of the rotating impression cylinder, the functional ink is supplied from the plurality of ink transfer means to the substrate. Since a plurality of layers can be transferred and superimposed, it is possible to easily perform high-precision alignment each time each layer is formed on the base material, and to the base material supplied one after another from the base material supply means Thus, it is possible to efficiently form each layer sequentially.

It is a principal part schematic block diagram of main embodiment of the electronic device manufacturing apparatus which concerns on this invention. It is a control block diagram of the principal part of the electronic device manufacturing apparatus of FIG. It is explanatory drawing of the manufacture procedure of the thin-film transistor (TFT) by the electronic device manufacturing apparatus of FIG. It is explanatory drawing of the manufacturing procedure following FIG. 3A. It is explanatory drawing of the manufacturing procedure following FIG. 3B. It is explanatory drawing of the manufacturing procedure following FIG. 3C. It is explanatory drawing of the manufacturing procedure following FIG. 3D. It is explanatory drawing of the manufacturing procedure following FIG. 3E. It is explanatory drawing of the manufacturing procedure following FIG. 3F. It is explanatory drawing of the manufacturing procedure following FIG. 3G. It is explanatory drawing of the manufacturing procedure following FIG. 3H. It is explanatory drawing of the manufacturing procedure following FIG. 3I. It is a principal part schematic block diagram of other embodiment of the electronic device manufacturing apparatus which concerns on this invention.

  Although an embodiment of an electronic device manufacturing apparatus according to the present invention will be described with reference to the drawings, the present invention is not limited to only the following embodiments described with reference to the drawings.

<Main embodiment>
A main embodiment in the case of manufacturing a thin film transistor (TFT) in the electronic device manufacturing apparatus according to the present invention will be described below based on FIGS. 1 and 2 and FIGS.

  In FIG. 1, 110 is an impression cylinder, 120 is a supply cylinder, 130 is a plate cylinder, 140 is a coater cylinder, 150 is a discharge cylinder, 191 is an ink jet apparatus, and 192 is an insulating ink supply apparatus.

  The impression cylinder 110 is rotatably supported and has a diameter size (sixfold diameter) that can include six effective surfaces in the circumferential direction of the outer surface as a holding surface for holding a sheet that is a flexible substrate. However, it has a so-called skeleton type in which only three effective surfaces 110a to 110c are provided at equal intervals in the circumferential direction.

  The impression cylinder 110 includes gripping claw devices 111A to 111C that detachably hold the front side (front end side) of the sheet in each of the effective surfaces 110a to 110c, and the rear side (end side) of the sheet in the conveyance direction. Suction heads 112 </ b> A to 112 </ b> C (for example, see Patent Document 2). The suction heads 112A to 112C are connected to a suction pump 217 via valves 218A to 218C, respectively (see FIG. 2).

  The supply cylinder 120, which is a base material supply means, is rotatably supported so as to be in contact with the impression cylinder 110, and has a diameter size (double diameter) that can include two effective surfaces in the circumferential direction of the outer surface. However, the impression cylinder has only one effective surface 120a and has a gripper claw device 121 that detachably grips the front side (front end side) in the sheet conveyance direction on the effective surface 120a. Every other sheet can be supplied to and held by the effective surfaces 110a to 110c of 110.

  The discharge cylinder 150 which is a base material discharge unit is located at a position where the impression cylinder 110 and the supply cylinder 120 are in contact with each other, that is, the holding position where the sheet from the supply cylinder 120 is held. A diameter size (double diameter) that is rotatably supported so as to be in contact with the impression cylinder 110 on the downstream side in the rotation direction (sheet conveying direction) of the impression cylinder 110 and can have two effective surfaces in the circumferential direction of the outer surface. Although there is only one effective surface 150a, it has a gripping claw device 151 that detachably grips the front side (front end side) in the sheet conveyance direction on the effective surface 150a.

  The plate cylinder 130 rotates in the rotational direction of the impression cylinder 110 from the position where the impression cylinder 110 and the supply cylinder 120 are in contact, that is, the holding position of the impression cylinder 110 that holds the sheet from the supply cylinder 120. (Sheet conveying direction) The impression cylinder 110 is located at a position downstream of the pressure cylinder 110 and the discharge cylinder 150, that is, a position where the pressure cylinder 110 is separated from the discharge cylinder 150. Between the operating position in contact with the impression cylinder 110 and the retracted position away from the impression cylinder 110. It is supported via a guide rail (not shown) so that it can.

  The plate cylinder 130 is a G layer plate surface Pg which is a first plate surface on which a pattern corresponding to a gate layer (G layer) which is a first functional layer is formed, and a third functional layer. A holding surface for holding a double-size plate P formed so as to be aligned with a plate surface Psd for the SD layer, which is a second plate surface formed with a pattern corresponding to the source and drain layer (SD layer), in the circumferential direction. A plate holding device 131 having a diameter size (double diameter) having an effective surface 130a on the outer surface and detachably holding one end side (front end side) and the other end side (end side) of the plate P is provided. Have.

  The ink jet device 191 which is a first functional ink supply means is made of a material which forms a G layer and an SD layer with respect to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 located at the retracted position. The conductive ink which is the first functional ink can be jetted and supplied.

  The coater cylinder 140 is located downstream of the contact position between the impression cylinder 110 and the plate cylinder 130 in the rotation direction of the impression cylinder 110 (sheet conveyance direction), and between the impression cylinder 110 and the discharge cylinder 150. It is rotatably disposed between the contact position, that is, the upstream side of the pressure drum 110 in the rotation direction (sheet conveyance direction) of the pressure drum 110 from the separation position where the discharge drum 150 separates the sheet. A blanket B made of silicon resin having a size corresponding to the size of the sheet is wound around the outer circumference (single diameter), and between the operating position in contact with the impression cylinder 110 and the retracted position separated from the impression cylinder 110. It is supported via a guide rail (not shown) so that it can slide and move linearly.

  The insulating ink supply device 192, which is a second functional ink supply means, has a gate insulator layer (GI layer) which is a second functional layer on the blanket B of the coater cylinder 140 located at the retracted position. Insulating ink, which is a second functional ink made of a material forming the above, can be sent out and supplied.

  As shown in FIG. 2, a motor 201 that independently drives the impression cylinder 110, a motor 202 that independently drives the supply cylinder 120, a motor 203 that independently drives the plate cylinder 130, and the coater cylinder 140. The motor 204 for independently rotating the motor and the motor 205 for independently rotating the discharge cylinder 150 are electrically connected to the output unit of the control device 200 as control means. The output unit of the control device 200 is electrically connected to the ink jet device 191 and the insulating ink supply device 192.

  Further, the output unit of the control device 200 is configured so that the holding claw device 111A of the impression cylinder 110 is opposed to the holding claw device 111A to 111C of the impression cylinder 110 and the holding claw device 121 of the supply cylinder 120. To switch the opening and closing of the holding claw device 121 of the supply cylinder 120 and the actuator 211 for switching the track of the cam follower cam for opening and closing the holding claw device 111A to 111C to switch the opening and closing of the holding claw device 111A to 111C. The cam follower cam trajectory for switching the cam follower 121 that opens and closes the pawl device 121 is electrically connected to each other (for the cam trajectory switching mechanism, “printing cylinder” and “ The cam trajectory switching mechanism of the “feed side transfer cylinder” (refer to FIG. 5 in particular)).

  Further, the output unit of the control device 200 opens and closes the gripper claw devices 111A to 111C when the gripper claw devices 111A to 111C of the impression cylinder 110 and the gripper claw device 151 of the discharge drum 150 are opposed to each other. A cam follower cam that opens and closes the gripper claw device 151 to switch between an actuator 213 that switches the trajectory of the cam follower cam that opens and closes the gripper claw device 111A to 111C so as to switch. Are electrically connected to the actuator 214 for switching the trajectory of each of them (for the cam trajectory switching mechanism, “second paper discharge side transfer cylinder” and “paper take-up cylinder” described in Patent Document 2). (See FIG. 4 in particular).

  The output unit of the control device 200 is electrically connected to the suction pump 217 and the valves 218A to 218C, and the actuator 215 slides the plate cylinder 130 along the guide rail. And an actuator 216 that slides the coater cylinder 140 along the guide rail.

  On the other hand, the rotary unit 221 for detecting the rotational phase of the impression cylinder 110, the rotary encoder 222 for detecting the rotational phase of the supply cylinder 120, and the rotational phase of the plate cylinder 130 are input to the control device 200. A rotary encoder 223 for detecting, a rotary encoder 224 for detecting the rotational phase of the coater cylinder 140, and a rotary encoder 225 for detecting the rotational phase of the discharge cylinder 150 are electrically connected.

  That is, based on information from the rotary encoders 221 to 225, the control device 200 rotates the motors 201 to 205, operates the ink jet device 191 and the insulating ink supply device 192, and controls the actuators 211 to 216. The expansion / contraction operation and the opening / closing operation of the valves 218A to 218C can be controlled (details will be described later).

  In the present embodiment, among the plurality of ink transfer means, the plate cylinder 130, the ink jet apparatus 191 and the like constitute at least one ink transfer means, and the coater cylinder 140, the insulating ink supply apparatus 192 and the like. Thus, at least one other ink transfer means is configured.

  Next, a TFT manufacturing method by the electronic device manufacturing apparatus according to this embodiment will be described with reference to FIGS.

  Initially, the plate cylinder 130 and the coater cylinder 140 are located at the retracted position away from the impression cylinder 110, and the valves 218A to 218C are in the closed state. When the control device 200 is activated, the control device 200 activates the suction pump 217 and rotates the cylinders 110, 120, 130, and 140 at a predetermined cycle. Based on the information from 225, the operation of the motors 201 to 205 is controlled.

  When the holding claw device 121 of the supply cylinder 120 holds the leading end side of the first sheet S1 and the sheet S1 is held on the effective surface 120a of the supply cylinder 120 and conveyed, the control device 200 Based on the information from the rotary encoders 221 and 222, when the holding claw device 121 of the supply cylinder 120 faces the holding claw device 111A of the impression cylinder 110, the holding claw device of the supply cylinder 120 The operation of the actuators 211 and 212 is controlled so that the leading end side of the sheet S1 is held by the holding claw device 111A of the impression cylinder 110 from 121 (see FIG. 3A), and the suction head of the impression cylinder 110 is also controlled. When the 112 A faces the effective surface 120 a of the supply cylinder 120, the gripper device 1 of the impression cylinder 110 The terminal side of the sheet S1, which is applied to the distal end side 1A so as to suck and hold to the suction head 112A, releasing control the valve 218A. As a result, the sheet S1 is supplied from the effective surface 120a of the supply cylinder 120 onto the effective surface 110a of the impression cylinder 110 and held in close contact therewith.

  At the same time, the control device 200 controls the ink jet based on the information from the rotary encoders 221 and 223 so as to supply the conductive ink Ic to the plate surface Pg of the plate P of the plate cylinder 130. The operation of the device 191 is controlled.

  Subsequently, the control device 200 transfers the conductive ink Ic supplied to the plate surface Pg of the plate P of the plate cylinder 130 onto the sheet S1 on the effective surface 110a of the impression cylinder 110. Based on the information from the encoders 221 and 223, the operation of the actuator 215 is controlled to move the plate cylinder 130 to the operation position. Thereby, the G layer is formed on the sheet S1 (see FIG. 3B).

  At this time, the supply cylinder 120 faces the gripping claw device 111B of the impression cylinder 110 in a state where the gripping claw device 121 is empty without gripping the sheet. Therefore, the control device 200 includes the rotary encoder 221, Based on the information from 222, the operation of the actuators 211, 212 is controlled so that the gripper devices 121, 111B do not interfere with each other without delivering the sheet by the cylinders 110, 120, and the valve 218A is closed. The operation of the valve 218A is controlled so as to maintain the state as it is.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200, based on information from the rotary encoders 221 and 223, The operation of the actuator 215 is controlled so as to move the plate cylinder 130 to the retracted position.

  At the same time, the control device 200 supplies the insulating ink Ii to the blanket B of the coater cylinder 140 based on the information from the rotary encoders 221 and 224 so as to supply the insulating ink Ii. To control the operation.

  Subsequently, the control device 200 transfers the insulating ink Ii supplied to the blanket B of the coater cylinder 140 onto the sheet S1 on the effective surface 110a of the impression cylinder 110, so that the rotary encoders 221 and 224 are transferred. The operation of the actuator 216 is controlled based on the information from the above to move the coater cylinder 140 to the operating position. Thereby, a GI layer is formed on the G layer of the sheet S1 (see FIG. 3C).

  Then, when the coater cylinder 140 finishes transferring the insulating ink Ii to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200, based on information from the rotary encoders 221 and 224, The operation of the actuator 216 is controlled to move the coater cylinder 140 to the retracted position.

  In this way, the holding claw device 111A that holds the leading end side of the sheet S1 on which the G layer and the GI layer are formed on the effective surface 110a of the impression cylinder 110 faces the holding claw device 151 of the discharge cylinder 150. At this time, the control device 200 does not cause the gripper claw device 151 of the discharge drum 150 to interfere with the gripper claw device 111A of the pressure drum 110 based on information from the rotary encoders 221 and 225. The sheet S1 is held on the effective surface 110a of the impression cylinder 110 without passing the leading end side of the sheet S1 from the gripper claw device 111A of 110 to the gripper claw device 151 of the discharge cylinder 150. In addition, the operation of the actuators 211 and 214 is controlled, and the open state of the valve 218A is kept as it is. Controlling the operation of the valve 218A to maintain.

  At this time, the supply cylinder 120 conveys the sheet S2 while the gripper claw device 121 holds the leading end side of the next sheet S2 and holds it on the effective surface 120a. Based on the information from the rotary encoders 221 and 222, when the holding claw device 121 of the supply cylinder 120 faces the holding claw device 111C of the impression cylinder 110, the holding claw device 121 of the supply cylinder 120 The operation of the actuators 211 and 212 is controlled so that the holding claw device 111C of the impression cylinder 110 changes the leading end side of the sheet S2 (see FIG. 3D), and the suction head 112C of the impression cylinder 110 is controlled. When the gripper device 111 of the impression cylinder 110 is opposed to the effective surface 120a of the supply cylinder 120. End side of the seat S2, applied to the distal end side so as to suck and hold to the suction head 112C, releasing control the valve 218C on. Accordingly, the sheet S2 is supplied from the effective surface 120a of the supply cylinder 120 onto the effective surface 110c of the impression cylinder 110 and is held in close contact therewith.

  At the same time, the control device 200 controls the ink jet based on the information from the rotary encoders 221 and 223 so as to supply the conductive ink Ic to the plate surface Pg of the plate P of the plate cylinder 130. The operation of the device 191 is controlled.

  Subsequently, the control device 200 transfers the conductive ink Ic supplied to the plate surface Pg of the plate P of the plate cylinder 130 onto the sheet S2 on the effective surface 110c of the impression cylinder 110. Based on the information from the encoders 221 and 223, the operation of the actuator 215 is controlled to move the plate cylinder 130 to the operation position. Thereby, the G layer is formed on the sheet S2 (see FIG. 3E).

  At the same time, the control device 200 supplies the insulating ink Ii to the blanket B of the coater cylinder 140 based on the information from the rotary encoders 221 and 224 so as to supply the insulating ink Ii. To control the operation.

  At this time, the holding claw device 111A that holds the sheet S1 on the effective surface 110a of the impression cylinder 110 faces the holding claw device 121 of the supply cylinder 120 that does not hold the sheet. Based on the information from the rotary encoders 221 and 222, the apparatus 200 controls the operation of the actuators 211 and 212 so that the gripping claw devices 121 and 111A do not interfere with each other without delivering the sheet by the cylinders 110 and 120. At the same time, the operation of the valve 218A is controlled so as to maintain the open state of the valve 218A.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S2 on the effective surface 110c of the impression cylinder 110, the control device 200, based on the information from the rotary encoders 221 and 223, The inkjet device 191 is controlled so as to control the operation of the actuator 215 so as to move the plate cylinder 130 to the retracted position and to supply the conductive ink Ic to the plate surface Psd of the plate P of the plate cylinder 130. The operation is controlled (see FIG. 3F).

  Subsequently, the control device 200 transfers the insulating ink Ii supplied to the blanket B of the coater cylinder 140 onto the sheet S2 on the effective surface 110c of the impression cylinder 110, so that the rotary encoders 221 and 224 are transferred. The operation of the actuator 216 is controlled based on the information from the above to move the coater cylinder 140 to the operating position. Thereby, a GI layer is formed on the G layer of the sheet S2.

  Then, when the coater cylinder 140 finishes transferring the insulating ink Ii to the sheet S2 on the effective surface 110c of the impression cylinder 110, the control device 200, based on information from the rotary encoders 221 and 224, The operation of the actuator 216 is controlled so as to move the coater cylinder 140 to the retracted position (see FIG. 3G).

  At the same time, the control device 200 transfers the conductive ink Ic supplied to the plate surface Psd of the plate P of the plate cylinder 130 onto the sheet S1 on the effective surface 110a of the impression cylinder 110. Further, based on the information from the rotary encoders 221 and 223, the operation of the actuator 215 is controlled to move the plate cylinder 130 to the operating position. As a result, an SD layer is formed on the GI layer of the sheet S1.

  Then, when the plate cylinder 130 finishes transferring the conductive ink Ic to the sheet S1 on the effective surface 110a of the impression cylinder 110, the control device 200, based on information from the rotary encoders 221 and 223, The operation of the actuator 215 is controlled so as to move the plate cylinder 130 to the retracted position (see FIG. 3H).

  At this time, when the holding claw device 111C that holds the leading end side of the sheet S2 on which the G layer and the GI layer are formed on the effective surface 110c of the impression cylinder 110 faces the holding claw device 151 of the discharge drum 150. In the same manner as in the case of the sheet S1 described above, the control device 200 changes the holding claw device 151 of the discharge drum 150 based on the information from the rotary encoders 221 and 225 to the holding claw device of the impression drum 110. On the effective surface 110c of the impression cylinder 110 without changing the leading end side of the sheet S2 from the holding claw device 111C of the impression cylinder 110 to the holding claw device 151 of the discharge cylinder 150 without interfering with the 111C. The actuators 211 and 214 are controlled so as to pass the sheet S2 while being held, and the bar As it is to maintain an open state of the probe 218C.

In addition, the feeding cylinder 120 conveys the sheet S3 in a state where the gripping claw device 121 further holds the leading end side of the next sheet S3 and holds it on the effective surface 120a.
Based on information from the rotary encoders 221 and 222, the control device 200 is configured to supply the feed cylinder 120 when the grip claw device 121 of the supply cylinder 120 faces the grip claw device 111 </ b> B of the impression cylinder 110. The operation of the actuators 211 and 212 is controlled so that the gripper claw device 111B of the impression cylinder 110 can exchange the leading end side of the sheet S3, and the suction head of the impression cylinder 110 is also controlled. When the 112B faces the effective surface 120a of the supply cylinder 120, the suction head 112B sucks and holds the distal end side of the sheet S3 with the leading end held by the gripping claw device 111B of the impression cylinder 110. The valve 218B is controlled to be opened. As a result, the sheet S3 is supplied from the effective surface 120a of the supply cylinder 120 onto the effective surface 110b of the impression cylinder 110 and held in close contact therewith.

  On the other hand, the sheet S1 on which the G layer, the GI layer, and the SD layer are formed on the effective surface 110a of the impression cylinder 110 passes through the coating cylinder 140 without being transferred with the insulating ink Ii.

  When the gripping claw device 111A that holds the leading end side of the sheet S1 held on the effective surface 110a of the impression cylinder 110 faces the gripping claw device 151 of the discharge cylinder 150, the control device 200 Based on the information from the rotary encoders 221 and 225, the actuators 211, 211 are arranged so that the leading end side of the sheet S1 is changed from the holding claw device 111A of the impression cylinder 110 to the holding claw device 151 of the discharge cylinder 150. 214 is controlled (see FIG. 3I), and the valve 218A is controlled to be closed so that the suction is stopped when the suction head 112A of the pressure drum 110 faces the effective surface 150a of the discharge drum 150. To do. Accordingly, the sheet S1 on which the G layer, the GI layer, and the SD layer are formed is separated from the effective surface 110a of the impression cylinder 110, and is discharged out of the system through the discharge cylinder 150.

  At this time, the holding claw device 111C that holds the sheet S2 on the effective surface 110c of the impression cylinder 110 faces the holding claw device 121 of the supply cylinder 120 that does not hold the sheet. Based on the information from the rotary encoders 221 and 222, the apparatus 200 prevents the gripper claws 121 and 111C from interfering with the cylinders 110 and 120 without delivering the sheet, as in the case of the sheet S1. The operation of the actuators 211 and 212 is controlled, and the operation of the valve 218C is controlled so that the open state of the valve 218C is maintained as it is.

  Further, the sheet S3 held on the effective surface 110b of the impression cylinder 110 is the same as that of the sheets S1 and S2 held on the effective surfaces 110a and 110c in the plate P of the plate cylinder 130. The conductive ink Ic is transferred from the plate surface Pg.

  The sheet S3 held on the effective surface 110b of the impression cylinder 110 is insulated from the blanket B of the coater cylinder 140 in the same manner as the sheets S1 and S2 held on the effective surfaces 110a and 110c. By transferring the ink Ii, a GI layer is formed on the G layer, and the sheet S2 held on the effective surface 110c of the impression cylinder 110 is the same as the sheet S1 held on the effective surface 110a. Thus, the SD layer is formed on the GI layer by transferring the conductive ink Ic from the plate surface Psd of the plate P of the plate cylinder 130 (see FIG. 3J).

  In addition, the supply cylinder 120 conveys the sheet S4 in a state where the gripper claw device 121 further holds the leading end side of the next sheet S4 and holds it on the effective surface 120a. Based on the information from the rotary encoders 221 and 222, when the holding claw device 121 of the supply cylinder 120 faces the holding claw device 111A of the impression cylinder 110, the holding claw device of the supply cylinder 120 The operation of the actuators 211 and 212 is controlled so that the leading end side of the sheet S4 is changed from 121 to the holding claw device 111A of the impression cylinder 110, and the suction head 112A of the impression cylinder 110 is supplied to the supply cylinder. When facing the effective surface 120a of 120, the gripper claw device 111A of the impression cylinder 110 has a distal end side. The terminal side of the added sheet S4 so as to suck and hold to the suction head 112A, releasing control the valve 218A. Accordingly, the sheet S4 is supplied from the effective surface 120a of the supply cylinder 120 onto the effective surface 110a of the impression cylinder 110 and is held in close contact therewith.

  Hereinafter, by repeating the above-described operation, a TFT in which a G layer, a GI layer, and an SD layer are sequentially laminated on a sheet can be continuously manufactured.

  That is, in the electronic device manufacturing apparatus according to the present embodiment, the inks Ic and Ii are transferred to the sheets held on the effective surfaces 110a to 110c of the rotatable impression cylinder 110 by the apparatuses 191 and 192, and the respective layers are transferred. Are stacked.

  Therefore, according to the electronic device manufacturing apparatus according to the present embodiment, it is possible to easily perform high-precision alignment each time each layer is formed on the sheet.

  Further, since the plate P having the two plate surfaces Pg and Psd is mounted on one plate cylinder 130, the ink jet device 191 can supply the conductive ink Ic to the two plate surfaces Pg and Psd. Therefore, it is possible to reduce the number of installation of the very expensive ink jet device 191 and to achieve cost reduction and space saving.

  In addition, since the supply cylinder 120 supplies and holds every other sheet to the impression cylinder 110 having the three effective surfaces 110a to 110c, the sheets supplied from the supply cylinder 120 one after another are held. On the other hand, it is possible to efficiently form each layer sequentially, and to manufacture a plurality of TFTs at the same time in a space-saving manner.

<Other embodiments>
In the above-described embodiment, by providing the plate cylinder 130 and the ink jet apparatus 191 and the coater cylinder and the insulating ink supply apparatus 192, three types of ink Ic and Ii are used on the sheet. In another embodiment, for example, as shown in FIG. 4, the rotational direction of the impression cylinder 110 (sheet) is larger than the contact position between the impression cylinder 110 and the plate cylinder 130. The ink jet device 193 is further disposed between the downstream side of the pressure cylinder 110 and the upstream side of the pressure cylinder 110 in the rotation direction (sheet conveyance direction) with respect to the contact position between the pressure cylinder 110 and the coater cylinder 140. By doing so, it is possible to form four types of layers on the sheet with three types of ink.

  In the above-described embodiment, the conductive ink Ic is supplied to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 by the inkjet device 191. However, as another embodiment, for example, an ink fountain is used. Ink unit that supplies ink to the plate cylinder via a transfer roller, an ink unit that supplies ink directly from the ink plate to the plate cylinder, a furnisher roller, an ink discharge roller, an ink form roller, etc. from the ink plate It is also possible to apply an inking device that indirectly supplies ink to the plate cylinder.

  In the above-described embodiment, the conductive ink Ic supplied to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 with respect to the sheet held on the effective surfaces 110a to 110c of the impression cylinder 110. However, as another embodiment, for example, between the impression cylinder 110 and the plate cylinder 130 so as to be able to move to and away from the impression cylinder 110 and the plate cylinder 130. The conductive ink Ic supplied to the plate surfaces Pg and Psd of the plate P of the plate cylinder 130 is once transferred to the blanket cylinder after the blanket cylinder is rotatably arranged on the plate cylinder 130, and then the plate cylinder 130. It is also possible to adopt an offset method for transferring to the sheets held on the effective surfaces 110a to 110c.

  In the embodiment described above, the plate cylinder 130 having a diameter size (double diameter) including the effective surface 130a for holding the plate P having a double size formed with the two plate surfaces Pg and Psd is applied. However, the present invention is not limited to this, and if necessary, for example, a plate having a diameter size (triple diameter) having an effective surface for holding a triple size plate formed with three plate surfaces. It is also possible to apply a barrel.

  In the embodiment described above, the suction heads 112 </ b> A to 112 </ b> C connected to the suction pump 217 are provided on the effective surfaces 110 a to 110 c of the impression cylinder 110, so that the sheet conveyance direction rear side (end side) is provided. The effective surfaces 110a to 110c are detachably sucked and held. However, as another embodiment, for example, instead of the suction heads 112A to 112C and the like, on the effective surfaces 110a to 110c of the impression cylinder 110, for example. Even if the rubber sheet made of silicon rubber or the like is attached so that the rear side (terminal side) in the sheet conveyance direction can be detachably attached to the effective surfaces 110a to 110c, Similar effects can be obtained.

  In the above-described embodiment, the case where the impression cylinder 110 having the three effective surfaces 110a to 110c is applied has been described. However, the present invention is not limited to this, and three or more odd numbers (for example, five Any impression cylinder having a glossy (seven) effective surface (holding surface) can be applied in the same manner as in the above-described embodiment. However, as in the above-described embodiment, the impression cylinder 110 having the three effective surfaces 110a to 110c is very preferable because it can achieve the most space saving.

  In the embodiment described above, the case of manufacturing a TFT has been described. However, the present invention is not limited to this, and a functional layer is formed by laminating a functional material on a flexible base material. Thus, if an electronic device is manufactured, it can be applied in the same manner as in the above-described embodiment.

  Since the electronic device manufacturing apparatus according to the present invention can easily perform high-accuracy alignment each time each layer is formed on the base material, it can be used extremely beneficially industrially.

DESCRIPTION OF SYMBOLS 110 Impression cylinder 110a-110c Effective surface 111A-111C Holding claw device 112A-112C Suction head 120 Supply cylinder 120a Effective surface 121 Holding claw device 130 Plate cylinder 130a Effective surface 131 Plate holding device 140 Coater cylinder 150 Discharge cylinder 150a Effective surface 151 Nail device 191, 193 Ink jet device 192 Insulating ink supply device 200 Control device 201-205 Motor 211-216 Actuator 217 Suction pump 218 A-218 C Valve 221-225 Rotary encoder P plate Pg, Psd Plate surface Ic Conductive ink Ii Insulating ink S1-S4 Sheet

Claims (5)

An electronic device manufacturing apparatus for manufacturing an electronic device by laminating a functional material on a flexible substrate to form a functional layer,
An impression cylinder having an odd number of three or more holding surfaces along the circumferential direction, which are rotatably supported and hold the substrate;
Base material supply means for supplying every other base material to the holding surface of the impression cylinder;
Base material discharging means for discharging the base material from the holding surface of the impression cylinder;
An electronic device manufacturing apparatus comprising: a plurality of ink transfer units that transfer functional ink made of a functional material to a base material held on the holding surface of the impression cylinder. The electronic device manufacturing apparatus according to claim 1,
At least one of the ink transfer means comprises:
A plate cylinder that is rotatably arranged, can move away from and against the impression cylinder, and has a plurality of plate surfaces formed with a pattern corresponding to the functional layer in the circumferential direction;
An electronic device manufacturing apparatus comprising: a first functional ink supply unit that supplies a first functional ink to the plate surface of the plate cylinder. The electronic device manufacturing apparatus according to claim 2,
At least one other ink transfer means,
A coater cylinder which is rotatably arranged and can move away from and against the impression cylinder;
An electronic device manufacturing apparatus, comprising: a second functional ink supply unit configured to supply a second functional ink to the coater cylinder. The electronic device manufacturing apparatus according to claim 2,
The plate cylinder has a first plate surface and a second plate surface,
The first functional ink supplied to the first plate surface of the plate cylinder is transferred to the substrate held from the substrate supply means so as to form a first functional layer on the substrate. To control the operation of the plate cylinder and the first functional ink supply means,
Operation of the impression cylinder and the substrate discharge means so that the substrate on which the first functional layer is formed is held as it is on the holding surface of the impression cylinder without being transferred from the impression cylinder to the substrate discharge means. And the third functional layer is formed by transferring the first functional ink supplied to the second plate surface of the plate cylinder to the substrate on which the first functional layer is formed. An electronic device manufacturing apparatus comprising: control means for controlling the operation of the plate cylinder and the first functional ink supply means. The electronic device manufacturing apparatus according to claim 3,
The plate cylinder has a first plate surface and a second plate surface,
After controlling the impression cylinder to rotate,
Controlling the operation of the substrate supply means and the impression cylinder so that the substrate is held on the holding surface of the impression cylinder from the substrate supply means,
The first functional ink supplied to the first plate surface of the plate cylinder is transferred to the substrate held from the substrate supply means so as to form a first functional layer on the substrate. To control the operation of the plate cylinder and the first functional ink supply means,
A second functional layer is formed on the first functional layer by transferring the second functional ink supplied to the blanket of the coater cylinder to the substrate on which the first functional layer is formed. And controlling the operation of the coater cylinder and the second functional ink supply means,
The pressure cylinder and the base so that the base material on which the first functional layer and the second functional layer are formed are held as they are on the holding surface of the pressure drum without being transferred from the pressure drum to the base material discharging means. The first functionality supplied to the second plate surface of the plate cylinder with respect to the substrate on which the first functional layer and the second functional layer are formed while controlling the operation of the substrate discharging means. Controlling the operation of the plate cylinder and the first functional ink supply means to transfer the ink to form a third functional layer on the second functional layer;
The operation of the coater cylinder and the second functional ink supply means is controlled so that the second functional ink is not transferred to the substrate on which the first to third functional layers are formed. Control means for controlling the operation of the impression cylinder and the substrate discharge means so that the substrate on which the three functional layers are formed is detached from the holding surface of the impression cylinder to the substrate discharge means. An electronic device manufacturing apparatus.

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