JP2017176927A5 - - Google Patents
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- JP2017176927A5 JP2017176927A5 JP2016064184A JP2016064184A JP2017176927A5 JP 2017176927 A5 JP2017176927 A5 JP 2017176927A5 JP 2016064184 A JP2016064184 A JP 2016064184A JP 2016064184 A JP2016064184 A JP 2016064184A JP 2017176927 A5 JP2017176927 A5 JP 2017176927A5
- Authority
- JP
- Japan
- Prior art keywords
- processing
- processing chamber
- cover portion
- film
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016064184A JP2017176927A (ja) | 2016-03-28 | 2016-03-28 | 表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016064184A JP2017176927A (ja) | 2016-03-28 | 2016-03-28 | 表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017176927A JP2017176927A (ja) | 2017-10-05 |
| JP2017176927A5 true JP2017176927A5 (https=) | 2018-12-06 |
Family
ID=60003256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016064184A Pending JP2017176927A (ja) | 2016-03-28 | 2016-03-28 | 表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2017176927A (https=) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02263420A (ja) * | 1989-04-03 | 1990-10-26 | Toray Ind Inc | エレクトレット化シートの製造方法およびエレクトレット化シートの製造装置 |
| JP2799698B2 (ja) * | 1996-03-22 | 1998-09-21 | 春日電機株式会社 | コロナ放電電極構造 |
| JP2004198590A (ja) * | 2002-12-17 | 2004-07-15 | Konica Minolta Holdings Inc | 薄膜有するを物品、その製造方法及び低反射体並びに透明導電性体 |
| JP2005154788A (ja) * | 2003-11-20 | 2005-06-16 | Konica Minolta Holdings Inc | 薄膜形成方法及び薄膜形成体 |
| JP2010043215A (ja) * | 2008-08-18 | 2010-02-25 | Toray Ind Inc | 電気絶縁性シートの表面処理装置、表面処理方法、および、電気絶縁性シートの製造方法 |
| JP2013060538A (ja) * | 2011-09-14 | 2013-04-04 | Toray Ind Inc | シートのプラズマ処理装置およびプラズマ処理方法 |
-
2016
- 2016-03-28 JP JP2016064184A patent/JP2017176927A/ja active Pending
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