JP2017176927A5 - - Google Patents

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Publication number
JP2017176927A5
JP2017176927A5 JP2016064184A JP2016064184A JP2017176927A5 JP 2017176927 A5 JP2017176927 A5 JP 2017176927A5 JP 2016064184 A JP2016064184 A JP 2016064184A JP 2016064184 A JP2016064184 A JP 2016064184A JP 2017176927 A5 JP2017176927 A5 JP 2017176927A5
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JP
Japan
Prior art keywords
processing
processing chamber
cover portion
film
roller
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Pending
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JP2016064184A
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English (en)
Japanese (ja)
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JP2017176927A (ja
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Priority to JP2016064184A priority Critical patent/JP2017176927A/ja
Priority claimed from JP2016064184A external-priority patent/JP2017176927A/ja
Publication of JP2017176927A publication Critical patent/JP2017176927A/ja
Publication of JP2017176927A5 publication Critical patent/JP2017176927A5/ja
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JP2016064184A 2016-03-28 2016-03-28 表面処理装置 Pending JP2017176927A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016064184A JP2017176927A (ja) 2016-03-28 2016-03-28 表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016064184A JP2017176927A (ja) 2016-03-28 2016-03-28 表面処理装置

Publications (2)

Publication Number Publication Date
JP2017176927A JP2017176927A (ja) 2017-10-05
JP2017176927A5 true JP2017176927A5 (cg-RX-API-DMAC7.html) 2018-12-06

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ID=60003256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016064184A Pending JP2017176927A (ja) 2016-03-28 2016-03-28 表面処理装置

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JP (1) JP2017176927A (cg-RX-API-DMAC7.html)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263420A (ja) * 1989-04-03 1990-10-26 Toray Ind Inc エレクトレット化シートの製造方法およびエレクトレット化シートの製造装置
JP2799698B2 (ja) * 1996-03-22 1998-09-21 春日電機株式会社 コロナ放電電極構造
JP2004198590A (ja) * 2002-12-17 2004-07-15 Konica Minolta Holdings Inc 薄膜有するを物品、その製造方法及び低反射体並びに透明導電性体
JP2005154788A (ja) * 2003-11-20 2005-06-16 Konica Minolta Holdings Inc 薄膜形成方法及び薄膜形成体
JP2010043215A (ja) * 2008-08-18 2010-02-25 Toray Ind Inc 電気絶縁性シートの表面処理装置、表面処理方法、および、電気絶縁性シートの製造方法
JP2013060538A (ja) * 2011-09-14 2013-04-04 Toray Ind Inc シートのプラズマ処理装置およびプラズマ処理方法

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