JP2017174537A - プラズマ処理方法 - Google Patents
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Abstract
Description
なお、反射波係数Γ1は、パワーセンサ36cによって求められる進行波パワー測定値PF1及び反射波パワー測定値PR11から、PR11/PF1により、求められてもよい。
Claims (6)
- プラズマ処理装置において実行されるプラズマ処理方法であって、
前記プラズマ処理装置は、
処理容器と、
前記処理容器内にガスを供給するガス供給系と、
前記処理容器内の空間がそれらの間に介在するように設けられた第1電極及び第2電極と、
高周波を出力する高周波電源と、
前記第1電極及び前記第2電極のうち一方の電極に前記高周波電源を接続する給電ラインと、
前記高周波電源の負荷インピーダンスを調整するための整合器と、
前記高周波電源の負荷インピーダンス、負荷抵抗、及び、負荷リアクタンス、並びに、前記高周波の反射波係数のうち何れかを含むパラメータを求める演算部と、
を備え、
該プラズマ処理方法において、前記処理容器内で互いに異なる処理ガスのプラズマを生成する複数の段階であり順に実行される該複数の段階を各々が含む複数のサイクルが順に実行され、
前記複数の段階にわたって前記高周波電源から前記高周波が前記一方の電極に供給され、
該プラズマ処理方法は、
前記複数の段階中の先行する段階から該先行する段階に連続する後続の段階に遷移するときに、前記ガス供給系が出力する処理ガスを切り替える工程と、
前記ガス供給系が出力する処理ガスが切り替えられた後に前記パラメータが閾値を超えた時点で、前記高周波電源から前記一方の電極に供給される前記高周波の設定を変更する工程であり、該高周波の設定を変更することは、前記高周波のパワーを変更すること、及び/又は、前記高周波電源から前記一方の電極に供給される前記高周波を、連続波とパルス変調された高周波のうち一方から他方に変更することを含む、該工程と、
を含むプラズマ処理方法。 - プラズマ処理装置において実行されるプラズマ処理方法であって、
前記プラズマ処理装置は、
処理容器と、
前記処理容器内にガスを供給するガス供給系と、
前記処理容器内の空間がそれらの間に介在するように設けられた第1電極及び第2電極と、
高周波を出力する高周波電源と、
前記第1電極及び前記第2電極のうち一方の電極に前記高周波電源を接続する給電ラインと、
前記高周波電源の負荷インピーダンスを調整するための整合器と、
前記第1電極に接続されており、負極性の直流電圧を発生する直流電源と、
前記高周波電源の負荷インピーダンス、負荷抵抗、及び、負荷リアクタンス、並びに、前記高周波の反射波係数のうち何れかを含むパラメータを求める演算部と、
を備え、
該プラズマ処理方法において、前記処理容器内において互いに異なる処理ガスのプラズマを生成する複数の段階であり順に実行される該複数の段階を各々が含む複数のサイクルが順に実行され、該複数の段階は、
前記複数の段階にわたって前記高周波電源から前記高周波が前記一方の電極に供給され、
該プラズマ処理方法は、
前記複数の段階中の先行する段階から該先行する段階に連続する後続の段階に遷移するときに、前記ガス供給系が出力する処理ガスを切り替える工程と、
前記ガス供給系が出力する処理ガスが切り替えられた後に前記パラメータが閾値を超えた時点で、前記高周波電源から前記一方の電極に供給される前記高周波の設定、及び、
前記直流電源によって出力される前記直流電圧のレベルのうち少なくとも一方を変更する工程であり、該高周波の設定を変更することは、前記高周波のパワーを変更すること、及び/又は、前記高周波電源から前記一方の電極に供給される前記高周波を、連続波とパルス変調された高周波のうち一方から他方に変更することを含む、該工程と、
を含むプラズマ処理方法。 - 前記プラズマ処理装置の時間調整部において、前記後続の段階に遷移したときから前記パラメータが前記閾値を超えた前記時点までの時間差を求める工程と、
前記複数のサイクルのうち先行するサイクルにおいて求められた前記時間差の分だけ増加するよう、前記複数のサイクルのうち前記先行するサイクルの後に実行されるサイクルにおける前記後続の段階と同じ段階の所定の実行時間長を調整する工程と、
を更に含む、請求項1又は2に記載のプラズマ処理方法。 - 前記演算部において、パラメータの系列から求められる移動平均値を用いて、前記閾値を調整する工程を更に含み、
前記パラメータの系列は、前記複数のサイクルのうち既に実行済みのサイクルに含まれる前記後続の段階と同一の段階、又は、前記後続の段階と前記実行済みのサイクルに含まれる該後続の段階と同一の段階のそれぞれで前記整合器によるインピーダンス整合が完了した状態における、前記高周波電源の負荷インピーダンス、負荷抵抗、及び、負荷リアクタンス、並びに、前記高周波の反射波係数のうち何れかを含むパラメータから構成される、
請求項1〜3の何れか一項に記載のプラズマ処理方法。 - 前記複数の段階は、
希ガス及びフルオロカーボンガスを含む第1の処理ガスのプラズマを生成する第1段階と、
前記第1段階に続き、希ガスを含む第2の処理ガスのプラズマを生成する第2段階と、
を含む、請求項1〜4の何れか一項に記載のプラズマ処理方法。 - 前記複数の段階は、前記第2段階に続き、希ガス及び酸素ガスを含む第3の処理ガスのプラズマを生成する第3段階を更に含む、請求項5に記載のプラズマ処理方法。
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JP2016056942A JP6392266B2 (ja) | 2016-03-22 | 2016-03-22 | プラズマ処理方法及びプラズマ処理装置 |
TW106107521A TWI745356B (zh) | 2016-03-22 | 2017-03-08 | 電漿處理方法 |
SG10201702290WA SG10201702290WA (en) | 2016-03-22 | 2017-03-21 | Plasma Processing Method |
US15/464,539 US9941098B2 (en) | 2016-03-22 | 2017-03-21 | Plasma processing method |
KR1020170035269A KR102262262B1 (ko) | 2016-03-22 | 2017-03-21 | 플라즈마 처리 방법 |
CN201710172873.4A CN107221493B (zh) | 2016-03-22 | 2017-03-22 | 等离子体处理方法 |
US15/905,908 US10176971B2 (en) | 2016-03-22 | 2018-02-27 | Plasma processing apparatus |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2020012907A1 (ja) * | 2019-06-20 | 2020-01-16 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置及びプラズマ処理方法 |
JP2021064482A (ja) * | 2019-10-11 | 2021-04-22 | 株式会社ダイヘン | 高周波電源装置 |
JP2021535542A (ja) * | 2018-08-30 | 2021-12-16 | アプライド マテリアルズ インコーポレイテッドApplied Materials, Incorporated | 乗数モードを用いる高周波(rf)パルスインピーダンス同調 |
WO2022163530A1 (ja) * | 2021-01-29 | 2022-08-04 | 東京エレクトロン株式会社 | プラズマ処理装置及びソース高周波電力のソース周波数を制御する方法 |
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US10176971B2 (en) | 2019-01-08 |
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